KR102161013B1 - Apparatus and method for managing physical distribution system - Google Patents

Abstract

A logistics conveyance management apparatus and method are provided. The logistics transport management device includes a receiving unit that receives transport information collected on a transport path from a transport device that transports a carrier in which a substrate is stored along a rail disposed on the ceiling, and the received transport in a layout diagram of the rail disposed on the ceiling. And a screen management unit for synthesizing information to configure a distribution screen, and an output unit for outputting the configured distribution screen.

Description

Logistics return management device and method {Apparatus and method for managing physical distribution system}

The present invention relates to a logistics transport management apparatus and method.

When manufacturing a semiconductor device or a display device, various processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning are performed. Here, the photographic process includes coating, exposure, and development processes. A photoresist is applied on a substrate (ie, a coating process), a circuit pattern is exposed on a substrate on which a photosensitive film is formed (ie, an exposure process), and an exposed region of the substrate is selectively developed (ie, a developing process).

Various processes may be processed on one substrate, and the process may be performed in one substrate processing apparatus or in a plurality of substrate processing apparatuses. For transport of substrates between substrate processing apparatuses, an overhead hoist transport (OHT) may be used. The ceiling logistics transporter may include a rail installed on the ceiling, and the substrate may move from one place to the other place along the rail.

The problem to be solved by the present invention is to provide a logistics transport management apparatus and method.

The problems of the present invention are not limited to the problems mentioned above, and other problems that are not mentioned will be clearly understood by those skilled in the art from the following description.

One aspect of the logistics transport management apparatus of the present invention for achieving the above object is a receiving unit that receives transport information collected on a transport path from a transport device that transports a carrier in which a substrate is accommodated along a rail disposed on the ceiling. And a screen management unit configured to configure a distribution transfer screen by synthesizing the received transfer information on a layout diagram of the rail disposed on the ceiling, and an output unit outputting the configured distribution transfer screen.

The screen management unit expands or reduces the layout view to configure the distribution screen.

The screen management unit composes the distribution transfer screen by synthesizing transfer information corresponding to the size of the enlarged or reduced layout map to the layout map.

The screen management unit divides the layout diagram into a plurality of zones, and configures the distribution transport screen by matching transport information for each zone.

The transfer information matched for each zone includes at least one of the type, time, number, authenticity, action, and rail shooting images of errors generated in the corresponding zone.

When a plurality of transfer information is received corresponding to a certain point, the screen management unit arranges a plurality of transfer information according to an order of occurrence.

The screen management unit composes the distribution transfer screen by synthesizing an icon including the number of errors generated in any one of the plurality of areas into the layout diagram.

The screen manager determines the size of the icon in proportion to the number of errors.

The screen manager includes the number of false errors and the number of false errors among the errors in the icon.

The screen management unit includes the number of errors to be taken and the number of errors that have not been taken from among the errors.

The screen manager switches the screen to an action screen for receiving an action status for the unreacted error when the command for selecting the unreacted error is input.

The screen manager displays the vibration status for each section of the rail included in the layout diagram in at least one of a color, a thickness, and a shape.

The distribution transport management apparatus further includes an input unit for receiving change information on the layout diagram, wherein the screen management unit configures the distribution transportation screen by reflecting the input change information on the layout diagram.

An aspect of the logistics transport management method of the present invention for achieving the above object is the step of receiving transport information collected on a transport path from a transport device that transports a carrier in which a substrate is accommodated along a rail disposed on the ceiling. And, constructing a logistics transport screen by synthesizing the received transport information on a layout diagram of the rail arranged on the ceiling, and outputting the configured logistics transport screen.

The step of configuring the logistics transport screen includes dividing the layout diagram into a plurality of zones, and matching transport information for each zone.

The transfer information matched for each zone includes at least one of the type, time, number, authenticity, action, and rail shooting images of errors generated in the corresponding zone.

Details of other embodiments are included in the detailed description and drawings.

1 is a view showing a logistics transport system according to an embodiment of the present invention.
Figure 2 is a block diagram of a logistics transport management apparatus according to an embodiment of the present invention.
3 is a view showing a logistics return screen according to an embodiment of the present invention.
4 is a view showing that an error icon is displayed on a logistics return screen according to an embodiment of the present invention.
5 and 6 are views showing an enlarged rail layout according to an embodiment of the present invention.
7 is a diagram illustrating an error icon displayed on a logistics return screen according to another embodiment of the present invention.
8 is a view showing detailed information of an error according to an embodiment of the present invention is displayed on the logistics return screen.
9 is a view showing an action screen according to an embodiment of the present invention.
10 is a view showing that the current state of vibration for each section of the rail is included in the rail layout according to an embodiment of the present invention.
11 is a view showing that the vibration graph of the rail according to an embodiment of the present invention is displayed on the logistics transport screen.
12 is a view showing that the rail photographed image is displayed on the logistics transport screen according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments to be posted below, but may be implemented in a variety of different forms, and only these embodiments make the posting of the present invention complete, and common knowledge in the technical field to which the present invention pertains. It is provided to completely inform the scope of the invention to those who have it, and the invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification.

When an element or layer is referred to as “on” or “on” of another element or layer, it is possible to interpose another layer or other element in the middle as well as directly above the other element or layer. All inclusive. On the other hand, when a device is referred to as "directly on" or "directly on", it indicates that no other device or layer is interposed therebetween.

Spatially relative terms "below", "beneath", "lower", "above", "upper", etc., as shown in the figure It may be used to easily describe the correlation between the device or components and other devices or components. Spatially relative terms should be understood as terms including different directions of the device during use or operation in addition to the directions shown in the drawings. For example, if an element shown in the figure is turned over, an element described as “below” or “beneath” of another element may be placed “above” another element. Accordingly, the exemplary term “below” may include both directions below and above. The device may be oriented in other directions, and thus spatially relative terms may be interpreted according to the orientation.

Although the first, second, etc. are used to describe various elements, components and/or sections, of course, these elements, components and/or sections are not limited by these terms. These terms are only used to distinguish one element, component or section from another element, component or section. Therefore, it goes without saying that the first element, the first element, or the first section mentioned below may be a second element, a second element, or a second section within the technical scope of the present invention.

The terms used in the present specification are for describing exemplary embodiments and are not intended to limit the present invention. In this specification, the singular form also includes the plural form unless specifically stated in the phrase. As used in the specification, "comprises" and/or "comprising" refers to the presence of one or more other components, steps, actions and/or elements, and/or elements, steps, actions and/or elements mentioned. Or does not exclude additions.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used as meanings that can be commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not interpreted ideally or excessively unless explicitly defined specifically.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and in the description with reference to the accompanying drawings, identical or corresponding components are assigned the same reference numerals and duplicated Description will be omitted.

1 is a view showing a logistics transport system according to an embodiment of the present invention.

Referring to FIG. 1, the distribution transfer system 10 includes a rail 100, a transfer device 200 and a distribution transfer management device 300.

The rail 100 provides a moving path of the transfer device 200. The transfer device 200 may move along the rail 100. In the present invention, the rail 100 may be disposed on the ceiling of a space equipped with semiconductor manufacturing equipment (not shown). The semiconductor manufacturing equipment is equipment that performs processes such as photography, etching, ashing, ion implantation, thin film deposition, and cleaning, and a plurality of semiconductor manufacturing equipment may be disposed in the corresponding space. The rail 100 may be disposed on the ceiling of a corresponding space so that the transfer device 200 moves above each of the plurality of semiconductor manufacturing equipment.

The transport device 200 serves to transport a carrier in which a substrate is accommodated along the rail 100 disposed on the ceiling. In order to perform various processes on the substrate, the substrate must be moved between different semiconductor manufacturing equipment, and the substrate can be accommodated in a carrier and transported by the transfer device 200. The carrier can accommodate a plurality of substrates. As a carrier, a Front Opening Unified Pod (FOUP) may be used. The transfer equipment may move along the rail 100 after gripping the carrier in one semiconductor manufacturing equipment to transfer it to another semiconductor manufacturing equipment.

A plurality of transfer devices 200 may be provided in one space, and the plurality of transfer devices 200 may move along the rail 100 while avoiding collisions with each other.

The logistics transport management device 300 serves to manage transport information of the transport device 200 moving along the rail 100. For example, the logistics transport management apparatus 300 may store and output transport information. The user can check various information related to the movement of the transfer device 200 by referring to the output transfer information.

The transfer device 200 may transmit transfer information to the distribution transfer management device 300. To this end, the transfer device 200 may include a sensing means (not shown) for collecting transfer information and a communication means (not shown) for transmitting the collected transfer information. The transfer device 200 may wirelessly transmit transfer information or may transmit transfer information through a wired cable formed along the rail 100.

Figure 2 is a block diagram of a logistics transport management apparatus according to an embodiment of the present invention.

Referring to FIG. 2, the logistics transport management device 300 includes a receiving unit 310, an input unit 320, a storage unit 330, a control unit 340, a screen management unit 350, and an output unit 360. do.

The receiving unit 310 serves to receive transfer information collected on a transfer path from a transfer device 200 that transfers a carrier in which a substrate is accommodated along a rail 100 disposed on the ceiling. The receiving unit 310 may wirelessly or wiredly communicate with the transfer device 200 to receive transfer information.

The receiving unit 310 may receive transfer information from a plurality of transfer devices 200, and for this purpose, the receiving unit 310 may configure a separate communication channel with each of the transfer devices 200.

The input unit 320 serves to receive a layout diagram of the rail 100. Also, the input unit 320 may receive a control command from a user. The user's control command may be a command for controlling the operation of the screen manager 350 to be described later.

The storage unit 330 serves to temporarily or permanently store the transfer information received through the receiving unit 310 and the layout diagram of the rail 100 input through the input unit 320. In addition, the storage unit 330 may temporarily store a control command input through the input unit 320.

The screen management unit 350 synthesizes transport information received through the receiving unit 310 on a layout diagram (hereinafter referred to as a rail layout diagram) of the rail 100 disposed on the ceiling to configure a distribution transport screen. In addition, the screen management unit 350 may configure the logistics transport screen by expanding or reducing the rail layout diagram, and may configure the logistics transport screen by editing transport information. A detailed description of the logistics return screen will be described later with reference to FIG. 3.

The output unit 360 plays a role of outputting a distribution screen configured by the screen management unit 350. To this end, the output unit 360 may include a display means (not shown) for outputting a logistics transport screen.

The control unit 340 may perform overall control of the receiving unit 310, the input unit 320, the storage unit 330, the screen manager 350, and the output unit 360.

3 is a view showing a logistics return screen according to an embodiment of the present invention.

Referring to FIG. 3, the distribution conveyance screen 400 may include a rail layout diagram 500 and a grid 600.

The rail layout diagram 500 shows the arrangement of the rails 100 arranged on the ceiling of a space equipped with a plurality of semiconductor manufacturing equipment. Accordingly, it can be understood that the surface in which the rail arrangement diagram 500 is displayed in FIG. 3 corresponds to the ceiling surface of the space.

The rail layout 500 may be divided into a plurality of zones by a grid 600. The grid 600 may include horizontal and vertical lines. Here, the interval between two adjacent horizontal lines may be the same or different, and similarly, the interval between two adjacent vertical lines may be the same or different. Accordingly, the size of each divided area may be the same or different. Hereinafter, a description will be made focusing on the same size of each divided area.

The rail layout diagram 500 may be divided into a plurality of zones based on the grid 600 by the screen manager 350. The screen manager 350 may configure the logistics transport screen 400 by matching transport information for each zone. Here, the transport information matched for each region may include at least one of a type of error generated in a corresponding region, a time of occurrence, a number, authenticity, whether or not to take action, and a rail photographed image. Hereinafter, the operation of the screen management unit 350 with respect to the distribution transfer screen 400 will be described in detail.

The rail layout diagram 500 may be input through the input unit 320. In addition, the input unit 320 may receive change information on the rail layout map 500. When change information on the rail layout map 500 is input, the screen management unit 350 may configure the distribution transfer screen 400 by reflecting the input change information on the rail layout map 500. For example, when the rail 100 is newly created, the path is changed, or the existing rail 100 is removed, the user may input change information on the rail layout diagram 500 through the input unit 320. Accordingly, the screen management unit 350 configures the distribution transfer screen 400 by reflecting the change information.

4 is a view showing that an error icon is displayed on a logistics return screen according to an embodiment of the present invention.

Referring to FIG. 4, the screen management unit 350 synthesizes the error icons 710 to 740 including the number of errors generated in any one of a plurality of areas into a rail layout diagram 500 to provide a logistics transfer screen 400. ) Can be configured.

Here, the screen manager 350 may determine the size of the error icons 710 to 740 in proportion to the number of errors. That is, the smaller the number of errors, the smaller the size of the error icons 710 to 740, and the larger the number of errors, the larger the size of the error icons 710 to 740. 4 illustrates circular error icons 710 to 740, the error icons may be implemented as polygons such as triangles or squares.

The user can easily check the number of errors generated in the rail 100 of the corresponding area through the error icons 710 to 740.

5 and 6 are views showing an enlarged rail layout according to an embodiment of the present invention.

Referring to FIG. 5, the screen management unit 350 may enlarge or reduce the rail layout diagram 500 to configure the distribution transport screen 400. FIG. 5 shows that the divided areas in which 5 errors have occurred among the divided areas of the rail arrangement diagram 500 shown in FIG. 4 are enlarged.

The screen manager 350 may configure the distribution transfer screen 400 by synthesizing transfer information corresponding to the size of the enlarged or reduced rail layout map 500 into the rail layout map 500. For example, the screen management unit 350 displays the number of errors in each divided area by including the number of errors in one error icon 710 to 740 in the size step of the rail layout diagram 500 illustrated in FIG. 4. In the size step of the rail arrangement diagram 500 shown in FIG. 5, error icons 741 to 743 in the detailed area can be newly displayed. Specifically, as shown in FIG. 4, when the rail layout diagram 500 is reduced, the screen management unit 350 includes one error icon ( 740) may be displayed on the logistics return screen 400. On the contrary, when the rail layout diagram 500 is enlarged, the screen management unit 350 includes two error icons 741 and 743 containing a number of 1 for the five error-prone areas as shown in FIG. 5. ) And one error icon 742 including the number of 3 may be displayed on the logistics return screen 400. Here, each of the error icons 741 to 743 may be displayed at a point where an error occurs, or may be displayed adjacent to the point.

Through the enlargement and reduction of the rail arrangement diagram 500, the user can easily check the number and location of errors generated in each divided area.

Referring to FIG. 6, the screen management unit 350 may configure the logistics conveyance screen 400 by synthesizing detailed information 751, 752a, 752b, 752c, and 753 of errors in the enlarged rail layout diagram 500. For example, the distribution transfer screen 400 of FIG. 6 may be a rail layout diagram 500 that is further enlarged compared to the distribution transfer screen 400 of FIG. 5.

When the rail layout diagram 500 is enlarged to the steps of FIG. 6, the screen management unit 350 removes the error icons 741 to 743 indicating the number of errors, and detailed information of the error (751, 752a, 752b, 752c, 753) May be displayed on the logistics return screen 400. For example, the type of the error and the identification information of the transfer device 200 that found the error may be included in the detailed information 751, 752a, 752b, 752c, and 753 of the error.

When there is a plurality of transfer information received corresponding to a certain point, the screen manager 350 may list a plurality of transfer information according to the order of occurrence. 6 shows three detailed information 752a, 752b, and 752c with respect to three points where three errors have occurred. Each of the detailed information 752a, 752b, and 752c may be generated at different times and included in each of the collected transport information. The screen manager 350 may list detailed information 752a, 752b, and 752c according to the order of time when the transfer information is generated. For example, the screen manager 350 may arrange the oldest 752a at the top and the latest 752c at the bottom. Through this, the user can predict the occurrence trend of errors.

FIG. 7 is a view showing that an error icon is displayed on a logistics return screen according to another embodiment of the present invention, and FIG. 8 is a view showing that detailed information of an error according to an embodiment of the present invention is displayed on the logistics return screen. 9 is a view showing an action screen according to an embodiment of the present invention.

Referring to FIGS. 7 and 8, the screen manager 350 may include one or more number information for one divided area in one error icon 810 to 840.

For example, the screen management unit 350 includes the number of true errors and the number of false errors in the error icons 810 to 840, or the number of corrective errors and the number of unreacted errors are indicated by the error icons 810 to 840. Can be included in In FIG. 7, the number displayed in the shaded area of the error icons 810 to 840 may be the number of genuine errors or the number of corrective errors, and the number displayed in the blank area may be the number of false errors or the number of uncorrected errors.

In the present invention, a true error indicates a true error, and a false error indicates that it has the same effect as an error, but is not actually an error. Whether there is a true or false false is determined by the transfer device 200, and the transfer device 200 may transmit transfer information according to the determination result.

In addition, in the present invention, an action error indicates an error in which the action has been completed, and an unaction error indicates an error in which action is not completed.

Referring to FIG. 8, detailed information of an error may be displayed on the logistics return screen 400. For example, if you place the pointer (PT) on the error icon or click the error icon (810 to 830) with the pointer (PT), the details of the error (821, 822a, 822b) may be displayed.

The detailed information of the error (821, 822a, 822b) may include at least one of the type of the error, identification information of the transport device 200 that found the error, the name of the operator who took the error, and whether to take action. FIG. 8 shows that detailed information 821 for one corrective error and detailed information 822a and 822b for two uncorrected errors are displayed on the logistics return screen 400. Here, detailed information 822a and 822b on the two non-action errors may be listed in the order of occurrence. For example, the screen manager 350 may arrange the oldest 822a at the top and the most recent 822b at the bottom.

When the detailed information 822a and 822b on the unreacted error is selected as the pointer PT, an action screen for inputting the details may be displayed.

Referring to FIG. 9, when a command for selecting an unaction error is input, the screen manager 350 may switch the screen to the action work screen 900 for receiving an action status for an unaction error.

Through the action screen 900, the user can input the type of error, the occurrence time, and the action method. The information input through the action screen 900 may be stored in the storage unit 330 and may be confirmed by a user or another user later. In addition, the stored information may be updated through the action work screen 900, and a user or another user may check the updated information.

10 is a view showing that the vibration status of the rail for each section according to the embodiment of the present invention is included in the rail layout diagram 500, and FIG. 11 is a graph showing the vibration of the rail according to the embodiment of the present invention. It is a diagram showing what is indicated in ).

Referring to FIG. 10, the screen manager 350 may display the vibration status of rails for each section included in the rail layout diagram 500 in at least one of a color, a thickness, and a shape.

For example, the screen management unit 350 displays a rail section in a good state in green, a rail section in an abnormal state in orange, a rail section in a dangerous state in red, and a rail section without collected information. It can be displayed in black. In the present invention, a rail section represents a rail path between two adjacent nodes. When the vibration conditions at each point in one rail section are different, the average value of the vibration conditions at all points is determined to be the vibration status of the rail section, or the vibration level at the point representing the highest vibration condition is the vibration status of the rail section Can be determined to be.

FIG. 10 shows that the vibration status of each rail section is included in the enlarged rail layout diagram 500 and displayed, but the rail layout diagram 500 at the minimum stage may include and display the vibration status of each section of the rail.

Referring to FIG. 11, when a specific rail section is selected, the screen manager 350 may display the vibration status of the rail section as a graph (hereinafter, referred to as a vibration graph) 1000. The vibration graph 1000 is a list of vibration magnitudes over the entire rail section, and the user can check at which point in the corresponding rail section the greatest vibration occurs through the vibration graph 1000.

12 is a view showing that the rail photographed image is displayed on the logistics transport screen according to an embodiment of the present invention.

Referring to FIG. 12, when a specific rail section is selected, the screen manager 350 may display a rail photographing image 1100 of the corresponding rail section. The screen management unit 350 may configure the distribution transport screen 400 by synthesizing the rail photographing image 1100 into the rail layout diagram 500.

As the transport device 200 moves along the rail, a photographing device (not shown) provided in the transport device 200 may continuously photograph the surface of the rail. The rail photographing image 1100 may be included in the transport information and transmitted to the distribution transport management apparatus 300. The storage unit 330 of the distribution transport management apparatus 300 may store transport information including the rail photographing image 1100.

When the user selects a specific rail section of the rail layout diagram 500, an image photographed in the rail section may be output through the distribution transfer screen 400. Here, the image output through the logistics conveyance screen 400 may be a still image or a moving image.

The user can check the cleanliness of the rail section through the output image, and can check the cause of vibration.

Although the embodiments of the present invention have been described with reference to the above and the accompanying drawings, those of ordinary skill in the art to which the present invention pertains can implement the present invention in other specific forms without changing the technical spirit or essential features. You can understand that there is. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting.

10: logistics conveying system 100: rail
200: transfer device 300: logistics transfer management device
310: receiving unit 320: input unit
330: storage unit 340: control unit
350: screen management unit 360: output unit
400: logistics return screen 500: rail layout
600: grid
710~740, 741~743, 810~840: Error icon
751, 752a, 752b, 752c, 753, 821, 822a, 822b: details of the error
900: Action work screen 1000: Vibration graph
1100: Rail shooting video

Claims (16)

A receiver configured to receive transport information collected on a transport path from a transport device that transports a carrier in which a substrate is accommodated along a rail disposed on the ceiling;
A screen management unit configured to configure a logistics transport screen by synthesizing the received transport information on a layout diagram of the rail arranged on the ceiling; And
Including an output unit for outputting the configured logistics return screen,
The screen management unit divides the layout diagram into a plurality of zones by a grid, and configures the logistics transport screen by matching transport information for each zone. The method of claim 1,
The screen management unit is a logistics transport management device for configuring the logistics transport screen by expanding or reducing the layout diagram. The method of claim 2,
The screen management unit combines transport information corresponding to the size of the enlarged or reduced layout map to the layout map to configure the logistics transport screen. delete The method of claim 1,
The transport information matched for each zone includes at least one of a type of error, occurrence time, number, authenticity, action status, and rail photographing image of an error occurring in the corresponding zone. The method of claim 1,
The screen management unit is a logistics transport management device for listing a plurality of transport information according to the order of occurrence when there are a plurality of transport information received corresponding to a certain point. The method of claim 1,
The screen management unit is a logistics transport management device configured to configure the logistics transport screen by synthesizing an icon including the number of errors generated in any one of the plurality of regions into the layout diagram. The method of claim 7,
The screen management unit determines the size of the icon in proportion to the number of errors. The method of claim 7,
The screen management unit includes the number of true errors and the number of false errors among the errors in the icon. The method of claim 7,
The screen management unit includes the number of errors to be taken care of and the number of errors not taken from among the errors in the icon. The method of claim 10,
The screen management unit is a logistics transport management device for converting a screen to an action screen for receiving an action status for the unreacted error when the command for selecting the unreacted error is input. The method of claim 1,
The screen management unit displays the state of vibration for each section of the rail included in the layout diagram in at least one of a color, a thickness, and a shape. The method of claim 1,
Further comprising an input unit for receiving the change information on the layout,
The screen management unit reflects the input change information to the layout diagram to configure the logistics transport screen. Receiving transfer information collected on a transfer path from a transfer device that transfers a carrier in which a substrate is accommodated along a rail disposed on the ceiling;
Synthesizing the received transfer information on a layout diagram of the rail disposed on the ceiling to construct a distribution transfer screen; And
Including the step of outputting the configured logistics return screen,
The step of constructing the logistics transport screen includes dividing the layout diagram into a plurality of regions by a grid and matching transport information for each region. delete The method of claim 14,
The transport information matched for each region includes at least one of a type of error, occurrence time, number, authenticity, action, and rail photographed images of errors occurring in the corresponding region.

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