KR20200081910A - Vacuum chamber for vacuum deposition and deposition apparatus having the same - Google Patents

Abstract

Disclosed are a vacuum chamber for vacuum deposition and a deposition apparatus including the same. According to one embodiment of the present invention, the vacuum chamber for vacuum deposition includes: a chamber body having an internal deposition space to conduct deposition on a substrate in a vacuum atmosphere, and including a gate provided on one side; a chamber door combined with the chamber body to open or close the gate like a hinged door which is pulled from the outside; a door gasket installed along the outer circumference of the chamber door; a door hinge interposed and combined between one side of the chamber door and the chamber body to enable the chamber door to be moved toward and away from the gate; a plurality of electromagnetic attachment and detachment units installed in at least one of the vicinity of the gate and the inner circumference of the chamber door, and attaching the chamber door to the chamber body or detaching the same therefrom; and a vacuum pump creating a vacuum in the deposition space in the state where the chamber door is closed. Therefore, the vacuum chamber for vacuum deposition is capable of enabling efficient vacuum pumping.

Description

Vacuum chamber for vacuum deposition and deposition apparatus having same same

The present invention relates to a vacuum chamber for vacuum deposition and a deposition apparatus including the same. More specifically, when the vacuum pump is operated for vacuuming the vacuum chamber, the chamber door is in close contact with the gate of the vacuum chamber to efficiently perform vacuum pumping, and for vacuum deposition, the chamber door can be easily removed when the vacuum is released. It relates to a vacuum chamber and a deposition apparatus comprising the same.

Organic light emitting diodes (OLEDs) are self-emission devices that emit light using an electroluminescence phenomenon that emits light when a current flows through a fluorescent organic compound, and do not require a backlight for applying light to a non-light emitting device. Therefore, a lightweight and thin flat panel display device can be manufactured.

A flat panel display device using such an organic electroluminescent device has a fast response speed and a wide viewing angle, and has emerged as a next-generation display device. In particular, because the manufacturing process is simple, it is an advantage that can reduce the production cost more than the existing liquid crystal display device.

In the organic electroluminescent device, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer, which are the remaining constituent layers except the anode and cathode electrodes, are made of organic thin films, and these organic thin films are deposited on a substrate by vacuum thermal evaporation Is deposited on.

In the vacuum heat deposition method, after aligning a shadow mask and a substrate in which a certain pattern is formed in a vacuum chamber in which a vacuum state is maintained, heat is applied to the evaporation source containing the evaporation material to sublimate the evaporation source. It is achieved by depositing a material on a substrate.

In general, a gate for loading a substrate or the like is provided on one side of the vacuum chamber, and the chamber door is coupled to the outside of the vacuum chamber in a casement shape to seal the inside of the vacuum chamber.

During the deposition process, a vacuum pump is operated to maintain a constant vacuum pressure in the vacuum chamber. When the vacuum pump is operated, the inside of the vacuum chamber is in a negative pressure state, and the chamber door is pulled by negative pressure and compressed around the gate. The inside of the vacuum chamber is maintained in a vacuum.

By the way, when the operation of the vacuum pump starts, if the chamber door is not in close contact with the gate so that the outside air does not flow into the vacuum chamber, even if the vacuum pump operates, the outside air flows into the vacuum chamber and vacuum pumping is done well. There is a problem that does not lose.

In addition, when the deposition process is completed to release the vacuum pressure inside the vacuum chamber, there is a problem that the chamber door is not well opened even if there is a slight difference between the atmospheric pressure and the pressure inside the vacuum chamber.

Republic of Korea Patent Registration No. 10-1462595 (2014.11.18 announcement)

When the vacuum pump is operated for vacuuming the vacuum chamber, the chamber door is in close contact with the gate of the vacuum chamber to efficiently perform vacuum pumping, and the vacuum chamber for vacuum deposition is easy to remove the chamber door when releasing the vacuum. And it is to provide a deposition apparatus comprising the same.

According to an aspect of the present invention, a deposition space is provided inside to perform deposition on a substrate in a vacuum atmosphere, and a chamber body having a gate on one side; A chamber door coupled to the chamber body to open and close the gate in a casement type pulling from the outside; A door gasket installed along the outer circumference of the chamber door; A door hinge interposed between the chamber body and one side of the chamber door so that the chamber door enters and exits in the gate direction; A plurality of electromagnet detachers installed on one or more of the periphery of the gate and the inner circumference of the chamber door, and detaching the chamber door with respect to the chamber body; A vacuum chamber for vacuum deposition is provided, which includes a vacuum pump that generates a vacuum in the deposition space while the chamber door is closed.

The door hinge is installed in a vertical direction with respect to the gate, and a tube-shaped tube body in which a slot is formed in the longitudinal direction; A sliding part located inside the tube body and moving along the tube body; It may include a hinge portion extending from the sliding portion to the slot of the tube body and coupled to one side of the chamber door so that the chamber door rotates in a casement shape.

The sliding portion may include a roller that moves along the inside of the tube body.

The door hinge includes a first hinge member coupled to the chamber body on one side of the gate; A sliding portion slidably coupled to one side of the first hinge member so as to enter the gate direction when the chamber door is closed; A second hinge member coupled to the chamber door and hinged to one side of the sliding portion may be included.

A sliding slot is formed in the first hinge member in the gate direction, and the sliding unit includes: a sliding panel facing the first hinge member; It may include a sliding rod that protrudes from the sliding panel and is inserted into and sliding in the sliding slot.

A stepped groove may be formed inside the gate, and a stepped protrusion may be formed in the chamber door to be inserted into the stepped groove of the gate. In this case, the door gasket may be provided along the outside of the stepped protrusion of the chamber door. A first gasket installed to be closed in a ring shape; The stepped protrusion of the chamber door may include a second gasket installed to be closed in a ring shape along the outer circumference.

The electromagnet detachment port may include a pair of electromagnets that face each other so that an attractive force acts or a repulsive force acts on each other.

According to another aspect of the invention, the vacuum chamber for vacuum deposition; An aligner disposed inside the vacuum chamber and aligning the substrate and the mask with each other; An evaporation apparatus is provided that includes an evaporation source disposed opposite the substrate.

In the vacuum chamber for vacuum deposition according to the embodiment of the present invention, when the vacuum pump is operated for vacuuming the vacuum chamber, the chamber door is in close contact with the gate of the vacuum chamber to efficiently perform vacuum pumping, and when the vacuum is released, the chamber door It is easy to remove.

1 is a view showing a deposition apparatus having a vacuum chamber for vacuum deposition according to an embodiment of the present invention.
Figure 2 is a view of the opening of the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.
3 is a view when closing the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.
Figure 4 is a view showing the front of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.
Figure 5 is a cross-sectional view of the chamber door portion of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.
Figure 6 is a view showing the back of the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.
7 is a view when opening the chamber door of the vacuum chamber for vacuum deposition according to another embodiment of the present invention.
8 is a view when closing the chamber door of the vacuum chamber for vacuum deposition according to another embodiment of the present invention.

The present invention can be applied to various transformations and can have various embodiments, and specific embodiments will be illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and should be understood to include all conversions, equivalents, and substitutes included in the spirit and scope of the present invention. In the description of the present invention, when it is determined that a detailed description of related known technologies may obscure the subject matter of the present invention, the detailed description will be omitted.

Terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, terms such as “comprises” or “have” are intended to indicate the presence of features, numbers, steps, actions, components, parts or combinations thereof described herein, one or more other features. It should be understood that the existence or addition possibilities of fields or numbers, steps, operations, components, parts or combinations thereof are not excluded in advance.

Hereinafter, an embodiment of a vacuum chamber for vacuum deposition according to the present invention and a deposition apparatus including the same will be described in detail with reference to the accompanying drawings, and in describing with reference to the accompanying drawings, identical or corresponding components are the same drawings. Numbers will be given and redundant descriptions will be omitted.

1 is a view showing a deposition apparatus having a vacuum chamber for vacuum deposition according to an embodiment of the present invention. And, Figure 2 is a view when the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention, Figure 3 is a view when closing the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention to be. And, Figure 4 is a view showing the front of the vacuum chamber for vacuum deposition according to an embodiment of the present invention, Figure 5 is a cross-sectional view of the chamber door portion of the vacuum deposition vacuum chamber according to an embodiment of the present invention. And, Figure 6 is a view showing the back of the chamber door of the vacuum chamber for vacuum deposition according to an embodiment of the present invention.

1 to 6, the deposition chamber 2, Aligner (4), evaporation source (6), substrate (8), mask (10), gate (11), chamber body (12), chamber door (14), vacuum pump (15), door hinge (16), Door gasket 17, tube body 18, sliding portion 20, hinge portion 22, roller 24, hinge shaft 26, electromagnet removal port 28, electromagnet pair 29, stepped groove 30, stepped protrusion 32, the first gasket 34, the second gasket 36 is shown.

Before describing the vacuum chamber 2 for vacuum deposition according to the present embodiment, a deposition apparatus equipped with the vacuum chamber 2 for vacuum deposition will be described with reference to FIG. 1.

The deposition apparatus includes a vacuum chamber 2 for vacuum deposition according to the present embodiment; An aligner 4 disposed inside the vacuum chamber 2 and aligning the substrate 8 and the mask 10 with each other; And an evaporation source 6 disposed opposite the substrate 8.

In the evaporation space of the vacuum chamber 2 for vacuum deposition, evaporation particles are deposited on the substrate 8 according to evaporation of the evaporation material. The deposition chamber of the vacuum chamber 2 maintains a vacuum atmosphere for the deposition of the evaporation particles, and evaporates the evaporation material according to heating in the deposition chamber of the high vacuum to deposit the evaporation particles on the surface of the substrate 8. Accordingly, an evaporation source 6 for receiving the evaporation material and heating the evaporation material is disposed to face the substrate 8 inside the deposition space, and an aligner for aligning the loaded substrate 8 and the mask 10 ( 4) may be disposed on the substrate 8.

When the substrate 8 is loaded into the vacuum chamber 2, the aligner 4 aligns and adheres the substrate 8 and the mask 10 to each other. When the substrate 8 and the mask 10 are aligned, evaporation particles discharged from the evaporation source 6 are deposited on the substrate 8 through the mask 10 in a predetermined pattern.

The vacuum chamber 2 for vacuum deposition according to the present embodiment is coupled to a chamber body 12 having a gate 11 on one side and a gate 11 on one side of the chamber body 12 to enter and exit the gate 11. It includes a chamber door (14) for opening and closing (11).

The chamber door 14 is provided with a plurality of electromagnet detachment openings 28 along the outer periphery, and the entire chamber door 14 enters the gate 11 direction of the chamber body 12 according to the attraction operation of the electromagnet detachment opening 28. The operation of the vacuum pump 15 is performed in the compressed state to facilitate the vacuum pumping operation.

On the other hand, when opening the chamber door 14 by releasing the vacuum pressure of the vacuum chamber 2 for maintenance, etc. after the deposition process, there is a slight difference in the pressure inside and outside the deposition space of the vacuum chamber 2. Even if the chamber door 14 may not open well, in this case, the chamber door 14 can be easily opened according to the repulsive action of the electromagnet detachment port 28.

Hereinafter, the vacuum chamber 2 for vacuum deposition according to this embodiment will be described in detail.

The vacuum chamber 2 for vacuum deposition according to the present embodiment is provided with a deposition space therein, and deposition is performed on the substrate 8 in a vacuum atmosphere, and the chamber body 12 is provided with a gate 11 on one side. ; A chamber door 14 that is coupled to the chamber body 12 to open and close the gate 11 in a casement shape that is pulled from the outside; A gasket installed to be closed in a ring shape along the outer circumference of the chamber door 14; A door hinge 16 interposed between the chamber body 12 and one side of the chamber door 14 to enter the chamber door 14 toward the gate 11 when the chamber door 14 is closed; It is installed along the outer periphery of the gate 11 between the outer periphery of the gate 11 and the chamber door 14 facing the outer periphery of the gate 11, and a plurality of detachable chamber doors 14 with respect to the chamber body 12 An electromagnet detachment port 28; It includes a vacuum pump 15 for generating a vacuum in the deposition space in the closed state of the chamber door (14).

The chamber body 12 is provided with a deposition space therein to deposit the substrate 8 in a vacuum atmosphere, and a gate 11 is provided on one side. As the air in the deposition space is discharged according to the operation of the vacuum pump 15 to be described later, the deposition space is in a negative pressure state of high vacuum, and deposition is performed on the substrate 8 in a vacuum environment of high vacuum.

On the other hand, a gate 11 for loading the substrate 8 or the like is formed on one side of the chamber body 12. In the present embodiment, the gate 11 having one surface open in the chamber body 12 in the form of a cuboid is presented.

The chamber door 14 is coupled to the outer wall of the chamber body 12 to open and close the gate 11 in a casement type pulling from the outside. When the vacuum pump 15 is operated while the chamber door 14 is closed from the outside of the chamber body 12, the deposition door becomes a negative pressure state of high vacuum and the chamber door 14 is the gate 11 of the chamber body 12. Sealing of the deposition space is achieved while squeezing the surroundings.

The chamber door 14 is formed to have a larger size than the gate 11 to cover the gate 11 entirely, and a door gasket 17 is installed along the outer circumference inside the chamber door 14.

As described above, the chamber door 14 is larger than the gate 11 of the chamber body 12 because the chamber door 14 has to be compressed from the outside of the vacuum chamber 2 for high vacuum sealing of the deposition space. It is formed to cover the gate 11 from the outside of the chamber body 12.

The door gasket 17 is installed along the outer circumference inside the chamber door 14 opposite the gate 11 for sealing of the deposition space by the compression of the chamber door 14. When the casement-type chamber door 14 closes the gate 11 to the chamber body 12, the door gasket 17 is in close contact with the wall of the chamber door 14 around the gate 11, and the deposition of the vacuum chamber 2 The space is closed. When the vacuum pump 15 is operated while the deposition space is closed, the inside of the vacuum chamber 2 is in a negative pressure state, and the chamber door 14 is compressed around the gate 11 so that the inside of the vacuum chamber 2 is vacuumed. Remains intact.

However, when the chamber door 14 is not closed well or because of frequent use of the chamber door 14, a part of the door gasket 17 is not in close contact with the gate 11, and there is a gap, the vacuum pump 15 is also operated. In spite of this, there is a case where the vacuum pumping is not performed well as the outside air is introduced into the vacuum chamber 2.

In this embodiment, a plurality of electromagnet detachment openings 28 including electromagnets are installed along any one of the periphery of the chamber door 14 in one or more of the periphery of the gate 11 and the inner circumference of the chamber door 14 to form an electromagnet. The chamber door 14 is evenly in close contact with the gate 11 of the chamber body 12 by the operation of the manpower, so that the deposition space of the vacuum chamber 2 is disconnected from the outside by airflow by the door gasket 17. .

The electromagnet detachment port 28 is installed on any one or more of the periphery of the gate 11 and the inner circumference of the chamber door 14, and detaches the chamber door 4 from the chamber body 12.

The electromagnet detachment hole 28 includes an electromagnet that is magnetized according to the flow of electric current, and the electromagnet detachment hole 28 is disposed at any one of the periphery of the gate 11 and the inner periphery of the chamber door 14 so that only the attractive force can act. It may be installed, or may be installed as a pair of electromagnets 29 facing each other on the inner circumference of the chamber door 14 and around the gate 11 so that both attractive force and repulsive force act.

The electromagnet pair 29 is configured such that attractive forces act on each other or repulsive forces act on each other, and when the chamber door 14 is closed, attractive forces act on each other and when the chamber door 14 is opened, repulsive forces act on each other.

The door hinge 16 is interposed between the chamber body 12 and one side of the chamber door 14 so that the chamber door 14 enters and exits in the direction of the gate 11. In order for the deposition space of the vacuum chamber 2 for vacuum deposition to maintain a negative pressure of high vacuum, the chamber door 14 must be pressed tightly in the direction of the gate 11, the door hinge 16 according to the present embodiment is a chamber door (14) is configured to enter and exit in the direction of the gate (11).

Conventionally, the chamber door was coupled to the chamber body by using a hinge on which the body side plate coupled to the chamber body and the door side plate coupled to the chamber door hinged around the hinge portion. In this case, the chamber door was rotated around the hinge and the chamber body was closed, and a lever located on the opposite side of the hinge was applied to lock the chamber door. When the vacuum pump is operated while the vacuum chamber is closed with the chamber door, the chamber door squeezes the periphery of the gate. There was a problem that the compression was not achieved.

Accordingly, in this embodiment, when the chamber door 14 is first closely contacted to the gate 11 of the chamber body 12 according to the attraction action of the electromagnet detachment port 28, when the vacuum pump 15 is operated, The door hinge 16 is configured such that the chamber door 14 is evenly pressed against the chamber body 12 as the chamber door 14 enters the gate 11 direction.

That is, the door hinge 16 according to the present embodiment allows the chamber door 14 to be opened and closed in a cased shape with respect to the chamber body 12, as well as the attraction and repulsive action of the electromagnet desorption 28, the deposition space When vacuuming or releasing, the chamber door 14 enters and exits the gate 11 direction.

2 to 4, the door hinge 16 according to the present embodiment is shown, the door hinge 16 according to the present embodiment is installed in the vertical direction with respect to the gate 11, and the slot in the longitudinal direction A tube body 18 on the tube to be formed; A sliding portion 20 located inside the tube body 18 and moving along the tube body 18; It includes a hinge portion 22 extending from the sliding portion 20 to a slot of the tube body 18 and coupled to one side of the chamber door 14 so that the chamber door 14 is rotated in a casement shape.

The tube body 18 is a tube having a straight movement path formed therein, and both ends are blocked. A slot for sliding the sliding portion 20 in the longitudinal direction is formed in the tube body 18.

The sliding portion 20 is disposed inside the tube body 18 to perform a linear reciprocating motion along the straight path of the tube body 18. In this embodiment, in order to facilitate sliding, a roller moving along the inside of the tube body is configured as a sliding portion.

To the hinge portion 22, the chamber door 14 is coupled around the hinge shaft 26 so that the chamber door 14 can be rotated in a casement shape, and one side of the hinge portion 22 is a tube body 18 It is coupled to the sliding portion 20 through the slot.

Referring to FIG. 3, the chamber door 14 is rotated (in the direction of the arc arrow in FIG. 3) about the hinge axis 26 of the hinge 22 to close the gate 11 of the chamber body 12. , When applying the attraction force to the electromagnet detachment port 28, the chamber door 14 is first closely contacted around the gate 11 of the chamber body 12, and then, when the vacuum pump 15 is operated, the negative pressure is generated in the deposition space. As the pneumatic is formed, the sliding portion 20 moves along the tube body 18 (in the direction of the straight arrow in FIG. 3) so that the chamber door 14 comes into close contact with the gate 11 to form a vacuum pressure in the deposition space. .

On the other hand, after opening the chamber door 14 by releasing the vacuum pressure of the vacuum chamber 2 for maintenance or the like after the deposition process, the chamber door 14 is applied to the chamber by applying repulsive force to the electromagnet detachment port 28. It can be separated from the main body 12.

The vacuum pump 15 creates a vacuum in the deposition space while the chamber door 14 is closed. The vacuum pump 15 is operated to maintain the vacuum pressure in the deposition space of the vacuum chamber 2 while the deposition on the substrate 8 is performed. According to the operation of the vacuum pump 15, the chamber door 14 is continuously and evenly compressed in the direction of the gate 11, so that the deposition space of the vacuum chamber 2 maintains the vacuum pressure constant.

A cryogenic pump may be applied as the vacuum pump 15. A cryo pump is a pump that creates a cryo panel inside the pump and reduces the pressure inside the container by cryo-condensation or cryo-sorption of the gas thereon. The inside can be kept in a vacuum.

Meanwhile, according to the operation of the vacuum pump 15, the door gasket 17 may be double formed to maintain a constant vacuum pressure in the deposition space. That is, as shown in FIGS. 5 and 6, the stepped groove 30 is formed inside the gate 11 of the chamber body 12, and the stepped groove 30 of the gate 11 is formed in the chamber door 14. ) To form a stepped protrusion 32, the first gasket 34 and the second gasket 36 respectively on the outer periphery of the stepped protrusion 32 and the outer periphery of the stepped protrusion 32 of the chamber door 14, respectively. By installing, as the chamber door 14 was closed, the first gasket 34 and the second gasket 36 were configured to be in close contact with the outer wall surface of the chamber body 12 and the stepped groove 30, respectively.

7 is a view when the chamber door 14 of the vacuum chamber 2 for vacuum deposition according to another embodiment of the present invention is opened, and FIG. 8 is a vacuum chamber 2 for vacuum deposition according to another embodiment of the present invention. When closing the chamber door 14 of the drawing.

7 and 8, the chamber body 12, the chamber door 14, the door hinge 16, the electromagnet removal port 28, the electromagnet pair 29, the first hinge member 38, the sliding portion 40 ), the sliding slot 42, the sliding panel 44, the sliding rod 46, the hinge portion 48, the second hinge member 50 is shown.

The shape of the door hinge 16 of the vacuum chamber 2 for vacuum deposition according to this embodiment is different from the above embodiment.

Door hinge 16 according to this embodiment, as shown in Figures 7 and 8, the first hinge member 38 coupled to the chamber body 12 on one side of the gate; A sliding portion 40 slidably coupled to one side of the first hinge member 38 so as to enter the gate direction when the chamber door 14 is closed; It includes a second hinge member 50 coupled to the chamber door 14 and hinged to one side of the sliding portion 40.

The hinge applied to the door is usually composed of two hinge members hinged around the hinge part, and in this embodiment, the second hinge member 50 with respect to the first hinge member 38 coupled to the chamber body 12 Is a form configured to slide the hinge portion 48 is coupled.

The first hinge member 38 is coupled to the chamber body 12 on one side of the gate, and the second hinge member 50 is coupled to one side of the chamber door 14. The second hinge member 50 is coupled to the first hinge member 38 through the sliding portion 40 and the hinge portion 48 to enter and exit in the gate direction.

The second hinge member 50 is hinged to the hinge portion 48 and rotates around the hinge shaft 26 to open or close the gate of the chamber body 12, and is provided through the sliding portion 40. It is configured to slide against the hinge member 38 so that the chamber door 14 enters and exits toward the gate.

The sliding part 40 according to the present embodiment includes: a sliding panel 44 facing the first hinge member 38; It includes a sliding rod (46) protruding from the sliding panel (44) and inserted into the sliding slot (42) and sliding. Sliding rod 46 is a linear reciprocating movement along the sliding slot 42 when the sliding panel 44 moves the first hinge member 38 in the state passing through the sliding slot 42.

8 shows the chamber door 14 being opened, the chamber door 14 is rotated about the hinge portion 48 when the chamber door 14 is open (in the direction of the arc arrow in FIG. 8) to make the chamber The gate of the main body 12 is closed (see FIG. 9 ), and when the attractive force is applied to the electromagnet detachment port 28 in this state, the chamber door 14 is primarily brought into close contact with the gate of the chamber body 12. Thereafter, when the vacuum pump 15 is operated, a vacuum pressure of negative pressure is formed in the deposition space, and the chamber door 14 is brought into close contact with the gate portion by the sliding portion 40 to form a vacuum pressure in the deposition space.

When the chamber door 14 is opened by releasing the vacuum pressure of the vacuum chamber 2 for maintenance or the like after the deposition process, the chamber door 14 is applied to the chamber body 12 by applying a repulsive force to the electromagnet detachment port 28. ).

Although the embodiments of the present invention have been described above, the spirit of the present invention is not limited to the embodiments presented herein, and those skilled in the art to understand the spirit of the present invention can add elements within the scope of the same spirit. However, other embodiments may be easily proposed by changing, deleting, adding, or the like, but this will also be considered to be within the scope of the present invention.

2: Deposition chamber 4: Aligner
6: Evaporation source 8: Substrate
10: mask 11: gate
12: chamber body 14: chamber door
15: vacuum pump 16: door hinge
17: door gasket 18: tube body
20, 40: sliding portion 22, 48: hinge portion
24: roller 26: hinge shaft
28: Electromagnet removal port 29: Electromagnet pair
30: stepped groove 32: stepped protrusion
34: first gasket 36: second gasket
38: first hinge member 40: sliding portion
42: sliding slot 44: sliding panel
46: sliding rod 50: second hinge member

Claims (8)

A chamber body in which a deposition space is provided and deposition is performed on a substrate in a vacuum atmosphere, and a gate is provided on one side;
A chamber door coupled to the chamber body to open and close the gate in a casement type pulling from the outside;
A door gasket installed along the outer circumference of the chamber door;
A door hinge interposed between the chamber body and one side of the chamber door so that the chamber door enters and exits in the gate direction;
A plurality of electromagnet detachers installed on one or more of the periphery of the gate and the inner circumference of the chamber door, and detaching the chamber door with respect to the chamber body;
And a vacuum pump for generating vacuum in the deposition space while the chamber door is closed.
According to claim 1,
The door hinge,
It is installed in the vertical direction with respect to the gate, the tube body on the tube slot is formed in the longitudinal direction;
A sliding part located inside the tube body and moving along the tube body;
And a hinge portion extending from the sliding portion to a slot of the tube body and coupled to one side of the chamber door so that the chamber door is rotated in a casement shape.
According to claim 1,
The sliding portion,
Vacuum roller for vacuum deposition, characterized in that it comprises a roller that moves along the interior of the tube body.
According to claim 1,
The door hinge,
A first hinge member coupled to the chamber body at one side of the gate;
A sliding portion slidably coupled to one side of the first hinge member so as to enter the gate direction when the chamber door is closed;
It characterized in that it comprises a second hinge member coupled to the chamber door and hinged to one side of the sliding portion, the vacuum chamber for vacuum deposition.
According to claim 4,
The first hinge member is formed with a sliding slot in the gate direction,
The sliding portion,
A sliding panel facing the first hinge member;
Vacuum sliding chamber for vacuum deposition, characterized in that it comprises a sliding rod that protrudes from the sliding panel and is inserted into the sliding slot and sliding.
According to claim 1,
A stepped groove is formed inside the gate,
In the chamber door, a stepped protrusion is formed to be inserted into the stepped groove of the gate,
The door gasket,
A first gasket installed to be closed in an annular shape along the outer side of the stepped portion of the chamber door;
A vacuum chamber for vacuum deposition, characterized in that the stepped protrusion of the chamber door includes a second gasket which is installed to be closed in an annular shape along an outer circumference.
According to claim 1,
The electromagnet removal port,
Vacuum pairs for vacuum deposition, characterized in that it comprises a pair of electromagnets that face each other so that the attractive force acts or repulsive force acts on each other.
The vacuum chamber for vacuum deposition according to any one of claims 1 to 7;
An aligner disposed inside the vacuum chamber and aligning the substrate and the mask with each other;
And an evaporation source disposed opposite the substrate.

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