KR20200079813A - Linear evaporation source - Google Patents

Abstract

Disclosed is a high temperature linear evaporation source. The high temperature linear evaporation source according to one embodiment of the present invention includes: a deposition material linear discharge unit discharging a deposition material toward a deposition target; and a deposition material heating unit connected to cross the deposition material linear discharge unit, receiving and heating the deposition material to transfer the deposition material to the linear discharge unit, and having a first built-in heating module which is disposed at a central region and heats the deposition material.

Description

Linear evaporation source for high temperature

The present invention relates to a linear evaporation source for high temperature, and more specifically, it is possible to increase the heating efficiency and effectively maintain a high temperature state even when heating a large amount of evaporation material or a metal material evaporation material. There is no risk of electrical short even when heating the evaporation material of metal material, and it is for high temperature that can prevent the crucible deformation during cooling of equipment that can occur due to the difference in thermal expansion coefficient between the raw material of the evaporation material and the material of the crucible. It relates to a linear deposition source.

With the rapid development of information and communication technology and the expansion of the market, flat panel displays have been spotlighted as display devices. Such flat panel display elements include liquid crystal display elements, plasma display panels, and organic light emitting diodes.

Among them, organic light emitting devices, such as OLED, have very good advantages such as fast response speed, lower power consumption than conventional LCDs, light weight, and the fact that they do not require a separate back light device, making them ultra-thin and high brightness. It has recently been spotlighted as a display device.

The organic electroluminescent device is a principle in which an appropriate energy difference is formed in an organic thin film and emits light by applying an anode film, an organic thin film, and a cathode film on a substrate in order, and applying a voltage between the anode and the cathode.

In other words, the injected electrons and holes recombine, and the remaining excitation energy is generated as light. At this time, since the wavelength of light generated according to the amount of the dopant of the organic material can be adjusted, full color can be realized.

1 is a structural diagram of an organic light emitting device.

As shown in this figure, the organic light emitting device has an anode, a hole injection layer, a hole transport layer, a light emitting layer, and a hole blocking layer on a substrate. layer), an electron transport layer, an electron injection layer, and a film such as a cathode are formed in order.

In this structure, ITO (Indium Tin Oxide) having small surface resistance and good permeability is mainly used as the anode. In addition, the organic thin film is formed of a multi-layer of a hole injection layer, a hole transport layer, a light emitting layer, a hole blocking layer, an electron transport layer, and an electron injection layer in order to increase luminous efficiency. Organic materials used as a light emitting layer include Alq3, TPD, PBD, m-MTDATA, TCTA, and the like. As the cathode, a Lie-Al metal film is used. In addition, since the organic thin film is very weak to moisture and oxygen in the air, an encapsulation film is formed on the top to seal the device to increase the life time of the device.

When the organic light emitting device shown in FIG. 1 is briefly summarized, the organic light emitting device includes an anode, a cathode, and a light emitting layer interposed between the anode and the cathode, and when driven, holes are injected into the light emitting layer from the anode, and electrons Is injected into the light emitting layer from the cathode. Holes and electrons injected into the light emitting layer combine in the light emitting layer to generate excitons, and these excitons emit light while transitioning from an excited state to a ground state.

The organic light emitting device may be divided into a single color or a full color organic light emitting device according to the color to be implemented. The full color organic light emitting device includes red (R), green (G) and three primary colors of light. A full color is realized by having a light emitting layer patterned for each blue (B).

A substrate deposition apparatus for a flat panel display device is applied to make an organic light emitting device having the structure shown in FIG. 1, that is, to deposit a light emitting layer (organic material) and an electrode layer (inorganic material).

A substrate deposition apparatus for a flat panel display device to which a vacuum evaporation method is applied is provided with a linear evaporation source for high temperature spraying a deposition material toward a substrate.

Recently, a linear type linear deposition source is applied to secure uniformity of the thickness of the thin film, simplify the control device, and reduce the volume of the chamber. It may be a deposition source for depositing organic or inorganic substances.

In the case of such a high-temperature linear deposition source, since the amount of the deposition material heated to discharge the deposition material in a linear manner, unlike the point deposition source that discharges the deposition material only at a specific point, it occurs accordingly. There is a need for a solution to various problems.

First, in the case of a high-temperature linear deposition source, it is necessary to efficiently heat a large amount of deposition material, and the heated evaporated deposition material must be able to maintain the temperature at a high temperature.

In particular, in the case of a high-temperature linear deposition source for depositing a deposition material of a metal material, the boiling point is higher than that of depositing an organic material, and the evaporated metal material deposition material is applied to a heating unit and an internal structure where power is supplied. If adsorbed, an electrical short phenomenon may occur, which may cause fatal damage to the equipment.

In addition, there is a problem in that a risk of breakage increases when a ceramic material generally used in a point evaporation source is a crucible material for accommodating a large amount of deposition material.

Therefore, it is made of a metal material such as tantalum (Ta, Tantalum) having a very high melting point and boiling point, and it is possible to apply sufficient heat to heat the evaporation material while preventing the risk of damage. When the raw material of the deposited material is adsorbed inside, the difference in the degree of shrinkage while cooling due to the difference in the thermal expansion coefficient between the raw material of the adsorbed deposited material and the material of the crucible occurs while the deposition is over and the equipment is cooled. , Due to this, there is a problem that the shape of the crucible may be deformed.

Republic of Korea Publication No. 10-2004-0011432

Therefore, the technical problem to be achieved by the present invention is to increase the heating efficiency even when heating a large amount of the deposition material or a metal material deposition material, it is possible to effectively maintain a high temperature state, in particular to heat the deposition material of the metal material It is to provide a linear evaporation source for high temperature that has no risk of electrical short and prevents crushable deformation when cooling equipment that may occur due to a difference in thermal expansion coefficient between a raw material of a deposition material and a material of a crucible.

According to an aspect of the present invention, a deposition material linear discharge unit for discharging a deposition material toward a deposition target; And a first built-in heating that crosses the deposition material linear discharge unit, accommodates the deposition material, heats the deposition material, and transfers it to the deposition material linear discharge unit, which is disposed in a central region to heat the deposition material. A linear vapor deposition source for high temperature may be provided, which comprises a vapor deposition material heating unit having a module.

The deposition material linear discharge unit may include a second built-in heating module disposed in the central region to heat the deposition material.

The deposition material heating unit is disposed along the circumference of at least a portion of the first built-in heating module, and a deformation-proof crucible module that prevents deformation by adsorption of the deposition material accommodated when cooling is performed after heating. Further included, the first built-in heating module may heat the deposition material accommodated in the deformation-resistant crucible module.

The deformation-preventing crucible module includes: a first crucible that accommodates the deposition material and is provided around the first embedded heating module so as to contact a region of the first embedded heating module; And a movement path that is disposed in contact with a region of the first crucible to accommodate the first crucible, and moves the evaporated material heated by the first built-in heating module in an evaporated state. It may include a second crucible.

The first crucible includes: a first cylinder disposed to be in contact with the first built-in heating module; A second cylinder spaced apart from the first cylinder and disposed to contact the second crucible; And a bottom portion connecting the first cylinder and the second cylinder at the lower ends of the first cylinder and the second cylinder, and forming a receiving space for accommodating the deposition material together with the first cylinder and the second cylinder. It can contain.

The bottom portion has a through hole so that the first built-in heating module is disposed through the inside of the first cylinder, and a ring having a width equal to a spaced distance between the first cylinder and the second cylinder It can have a shape.

The first crucible may be formed of a Pyrolytic Boron Nitride (PBN) material.

The second crucible may include: a second upper crucible coupled to one side of the deposition material linear discharge unit; And a second lower crucible connected detachably to the lower portion of the second upper crucible, and supporting the first crucible.

The second lower crucible may include a seating groove on which the first built-in heating module is seated; And a flange portion formed at a position higher than the bottom of the seating groove to support the bottom portion of the first crucible.

The first built-in heating module includes: a heater body disposed in an inner central region of the deformation-preventing crucible module; And a ceramic coating part surrounding the heater body.

The deposition material linear discharge unit further comprises a deposition material delivery cylinder that communicates with the first crucible and receives the deposition material in a heated and evaporated state, and the second built-in heating module includes the deposition material delivery cylinder. It is provided in the interior of the deposition material to be transferred from the first crucible can be heated.

The deposition material linear discharge unit is coupled to one side of the deposition material delivery cylinder in communication, and may further include a plurality of nozzles spraying the deposition material to the outside.

Embodiments of the present invention, by providing a built-in heating module, even in the case of heating a large amount of deposition material or a metal material deposition material can increase the heating efficiency and effectively maintain a high temperature state.

In addition, by providing a detachable deformation preventing crucible module, it is possible to prevent crucible deformation when cooling equipment, which may occur due to a difference in thermal expansion coefficient between a raw material of a deposition material and a material of a crucible.

1 is a structural diagram of an organic light emitting device.
2 is a schematic structural diagram of a substrate deposition apparatus for a flat panel display device to which a linear deposition source for high temperature is applied according to an embodiment of the present invention.
3 is a cross-sectional structural view of the linear deposition source for high temperature in FIG. 2.
4 is an enlarged cross-sectional view of a portion of the evaporation material heating unit of FIG. 3.
5 is a cross-sectional view illustrating a state in which the first crucible and the second crucible of the deposition material heating unit of FIG. 4 are separated.
6 is a cross-sectional perspective view schematically showing the first crucible of FIG. 3.

In order to fully understand the present invention, the operational advantages of the present invention, and the objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the contents described in the accompanying drawings, which illustrate preferred embodiments of the present invention.

Hereinafter, the present invention will be described in detail by explaining preferred embodiments of the present invention with reference to the accompanying drawings. The same reference numerals in each drawing denote the same members.

2 is a schematic structural diagram of a substrate deposition apparatus for a flat panel display device to which a linear deposition source for high temperature is applied according to an embodiment of the present invention.

Prior to the description relative to the drawings, the flat panel display device includes a liquid crystal display device, a plasma display panel, an organic light emitting diode, and the like. It will be described as a substrate for a light emitting element (OLED).

Referring to FIG. 2, a substrate deposition apparatus for a flat panel display device is provided at one side of a process chamber 2 in which a deposition process for a substrate proceeds, and a high-temperature linear deposition source for spraying a deposition material toward the substrate (1) is included.

The process chamber 2 is a place where a deposition process for a substrate is performed. That is, a place for depositing a light emitting layer (organic substance) and an electrode layer (inorganic substance) is formed for manufacturing the organic electroluminescent element shown in FIG. 1. The vapor deposition apparatus of this embodiment may be a vapor deposition apparatus for depositing organic or inorganic substances.

During the deposition process, the inside of the process chamber 2 maintains a vacuum atmosphere. Therefore, a vacuum pump or the like may be connected to the process chamber 2.

On the other hand, a linear vapor deposition source 1 for high temperature is provided on one side of the process chamber 2 to eject the deposition material toward the substrate.

Since the linear evaporation source 1 for high temperature of the present embodiment discloses an integral structure that is disposed long in the longitudinal direction of the process chamber 2 and does not require additional assembly, it is possible to reduce the occurrence of temperature deviation that may occur with each use. have.

Hereinafter, with reference to FIGS. 3 to 6 to be described in detail with respect to the linear deposition source for high temperature (1) of this embodiment.

FIG. 3 is a cross-sectional structural view of the linear deposition source for high temperature in FIG. 2, FIG. 4 is an enlarged cross-sectional view showing a portion of the evaporation material heating unit of FIG. 3, and FIG. 5 is a first crush of the evaporation material heating unit of FIG. 4 FIG. 6 is a cross-sectional view showing a state in which the blow and the second crucible are separated, and FIG. 6 is a cross-sectional perspective view schematically showing the first crucible in FIG. 3.

As shown in these drawings, a linear deposition source for high temperature according to an embodiment of the present invention includes a deposition material heating unit 10 and a deposition material linear discharge unit 20.

First, the deposition material heating unit 10 is cross-connected with the deposition material linear discharge unit 20 to be described later, and accommodates the deposition material 3 and heats the deposition material 3 to deposit the material linear discharge unit 20 It serves to convey.

That is, it serves to heat the evaporation material 3 in a solid or liquid state in order to evaporate it in a vaporizable state, and includes a first built-in heating module 100 and a strain-proof crucible module 300.

At this time, according to the present invention, the first built-in heating module 100 is disposed in the central region and serves to heat the deposition material 3. That is, unlike the conventional heating method which is generally disposed while wrapping the outside of the crucible, toward the deposition material 3 in the central region of the place where the deposition material 3 is prepared and the moving path where the evaporated deposition material moves. It is to use the method of heating outward.

In the conventional heating method of the crucible from the outside, heat is not only transmitted to the crucible but also escapes to the outside, so there is a lot of heat loss, and a separate structure such as a reflector is installed to prevent this. There were drawbacks to this complexity.

However, according to the present invention, by heating outwards toward the deposition material 3 in the central region, unnecessary heat loss can be minimized and heating efficiency for heating the deposition material to high temperature is increased. This is advantageous for a linear evaporation source for evaporating a large amount of evaporation material, and may be more advantageous for heating the evaporation material of a metal material having a high boiling point.

According to this embodiment, as shown in detail in Figures 3 and 4, the first built-in heating module 100 is disposed in the central region of the deformation preventing crucible module 300, the deformation preventing crucible module ( The deposition material 3 accommodated inside the first crucible 310 of 300) is heated.

The first built-in heating module 100 includes a heater body 110 disposed in an inner central region of the strain-proof crucible module 300 and a ceramic coating unit 120 surrounding the heater body 110.

In the case of heating the deposition material of a metal material during the deposition process, when the deposition material of the metal material is evaporated, when it is deposited on a component that flows electricity, a short circuit phenomenon occurs in which an electrical short occurs, which causes fatal damage to the equipment. There is a problem that can cause.

According to an embodiment of the present invention, as shown in detail in Figure 4, by providing a ceramic coating unit 120 surrounding the heater body 110, the deposition material (3) of the first built-in heating module (100) Since it can be prevented from being deposited by the heater body 110 disposed therein, it is possible to prevent a short circuit phenomenon in which an electrical short occurs due to adsorption of the deposition material even if a deposition material of a metal material is used.

In addition, by using a ceramic material, there is also an effect of preventing the deposition material from being deposited on the surface of the first built-in heating module 100. For example, a PBN (Pyrolytic Boron Nitride) material may be used as the ceramic material. .

The deformation preventing crucible module 300 is disposed along the periphery of at least a portion of the first built-in heating module 100 and prevents deformation by adsorption of the deposited material 3 that is accommodated when cooling is performed after heating. It plays a role, and as shown in detail in FIGS. 4 and 5, includes a first crucible 310 and a second crucible 320.

The first crucible 310 is provided to surround the first built-in heating module 100 so as to make contact with a region of the first built-in heating module 100, and performs first heat to accommodate the deposition material 3 The heat generated in the heating module 100 allows the heat to be transferred outward toward the deposition material 3.

6, the first crucible 310 includes a first cylinder 311, a second cylinder 312, and a bottom portion 313, as shown in detail in FIG. 6.

The first cylinder 311 is disposed to contact the first built-in heating module 100, and the second cylinder 312 is spaced apart from the first cylinder 311 to be disposed in the second crucible 320 Arranged to be in contact, the bottom portion 313 connects the first cylinder 311 and the second cylinder 312 at the lower ends of the first cylinder 311 and the second cylinder 312, and the first cylinder 311 and The second cylinder 312 is formed to form an accommodation space accommodating the deposition material 3 together.

The bottom part 313 according to the present embodiment includes a through hole 315 so that the first built-in heating module 100 is disposed through the inside of the first cylinder 311, and the first cylinder 311 and the first 2 It is manufactured in a form having a ring shape having a width equal to the spaced distance of the cylinder 312.

The first crucible 310 is formed of a Pyrolytic Boron Nitride (PBN) material, thereby preventing the deposition material 3 from being adsorbed.

The second crucible 320 is disposed in contact with a region of the first crucible 310 to accommodate the first crucible 310 and is heated by the first built-in heating module 100. It serves to form a movement path through which the material 3 moves in an evaporated state.

Hereinafter, a process of depositing a deposition material will be schematically described with reference to FIG. 3.

First, before being heated, the deposition material 3 in the form of a solid or liquid is accommodated only in the receiving space of the first crucible 310 and does not directly contact the second crucible 320.

Subsequently, when heating is performed by the first built-in heating module 100, the deposition material is formed between the inner wall of the second crucible 320 and the outer wall of the first built-in heating module 100 in an evaporated state. It goes upward along the movement path, which is the space, and moves horizontally along the deposition material delivery cylinder 400 of the deposition material linear discharge unit 20 to be described later.

At this time, the deposition material is heated and kept warm by the second built-in heating module 200 provided inside the deposition material transfer cylinder 400 so that it can move while maintaining the evaporated state.

Thereafter, as shown in detail in FIG. 2, the deposition material discharged toward the substrate while passing through the plurality of nozzles 500 is deposited on the substrate.

After the deposition process is performed and the deposition material is consumed, the first crucible 310 must be replenished with the raw material deposition material. According to an embodiment of the present invention, the second crucible that can be partially separated By providing the blade 320, there is an advantage that it is easy to replenish the deposition material and to easily clean and maintain the equipment.

5, the second upper crucible 320 includes a second upper crucible 321 and a second lower crucible 322.

The second upper crucible 321 is a portion that is coupled to one side of the linear evaporation unit 20, and the second lower crucible 322 can be detachably attached to the lower portion of the second upper crucible 321. It is connected to serve to support the first crucible 310.

According to this embodiment, the second lower crucible 322 is formed in a position higher than the bottom of the seating groove 323 in which the first built-in heating module 100 is seated, and the seating groove 323, It was provided in a form including a flange portion 324 to support the bottom portion 313 of the sibling 310.

By providing the seating groove 323 in this way, the first built-in heating module 100 is accurately arranged in the central region, and there is an advantage of uniformly heating the deposited material.

In addition, by allowing the bottom portion 313 of the first crucible 310 to be located at a position higher than the bottom of the seating groove 323, sufficient heating is also provided to the deposition material located below the first crucible 310. It is possible to efficiently consume the raw material of the deposition material.

As shown in detail in FIG. 5, the heating of the first built-in heating module 100 before the second upper crucible 321 and the second lower crucible 322 are separated to replenish the raw material of the deposition material After the operation is over, the equipment is cooled.

As described above, in the case of the high-temperature linear deposition source, since the amount of the deposition material heated to discharge the deposition material in a linear manner is increased, unlike the point deposition source that discharges the deposition material only at a specific point, When using a ceramic material that is generally used in a point evaporation source of a crucible, there is a problem that the risk of damage increases.

Therefore, the second crucible 320 is made of a metal material such as tantalum (Ta) having a very high melting point and boiling point, so that it is possible to apply sufficient heat to heat the deposited material and prevent the risk of damage. However, accordingly, when the raw material of the deposited material is adsorbed inside the crucible, it is cooled due to the difference in the coefficient of thermal expansion between the raw material of the adsorbed deposited material and the material of the crucible during deposition and cooling of the equipment. There is a difference in the degree of contraction, and there is a problem in that the shape of the crucible can be deformed.

In other words, when a deposition process is performed using a deposition material of a metal material and a cooling process is performed, a conventional crew in which the first crucible 310 and the second crucible 320 are not provided together If a sible is used, adsorption is performed as the remaining raw material of the evaporation material existing inside the crucible in a liquid state by heating is cooled at the bottom of the crucible.

At this time, due to the difference in the thermal expansion coefficient between the evaporation material and the crucible, a difference in the degree of contraction while cooling occurs, which causes a problem that the shape of the crucible may be deformed. In addition, even when the second upper crucible 321 and the second lower crucible 322 are separated in a state in which the evaporation material and the crucible are adsorbed, the evaporation material and the crucible are also pulled by each other. The problem that the shape of the crucible can be deformed occurs.

Therefore, according to an embodiment of the present invention, by providing the first crucible 310 and the second crucible 320 that are separated from each other, the deposition material accommodated in the first crucible 310 ( 3) Since it is possible to prevent the second lower crucible 322 from being adsorbed, it is possible to prevent deformation of the crucible that may occur during the process of adsorbing and cooling the deposited material and the crucible.

On the other hand, the deposition material linear discharge unit 20 serves to discharge the deposition material toward the deposition target, the second built-in heating module 200, the deposition material delivery cylinder 400, and a plurality of nozzles 500 Includes.

The deposition material delivery cylinder 400 communicates with the first crucible 310 and serves to receive the deposition material that is heated and evaporated.

The second built-in heating module 200 is disposed in the central region of the deposition material delivery cylinder 400 to heat the deposition material, and is provided inside the deposition material delivery cylinder 400 to be transferred from the first crucible 310 It is possible to move while maintaining the evaporated state by heating the insulating material and keeping it warm.

The deposition material that was moved in the horizontal direction along the movement path of the deposition material formed by the inner wall of the deposition material delivery cylinder 400 and the outer wall of the second built-in heating module 200 is processed through the nozzle 500 through the process chamber (2, 2) is injected toward the substrate inside.

A plurality of nozzles 500 are coupled in communication to one side of the deposition material delivery cylinder 400, and serves to spray the deposition material to the outside, a plurality of nozzles 500 are arranged to be spaced apart from each other, deposited toward the market The material can be discharged linearly.

As described above, according to the present embodiment, by providing the first built-in heating module 100, even when heating a large amount of deposition material or a deposition material of a metal material, it is possible to increase heating efficiency and effectively maintain a high temperature state. do.

Since the first built-in heating module 100 includes a ceramic coating unit 120, it is possible to prevent a short circuit phenomenon in which an electrical short occurs due to adsorption of the deposition material even if a deposition material of a metal material is used.

In addition, by providing a deformation preventing crucible module 300 separable into the first crucible 310 and the second crucible 320, the difference in thermal expansion coefficient between the raw material of the deposited material and the material of the crucible is Therefore, it is possible to prevent the crushable deformation during cooling of the equipment.

As described above, the present invention is not limited to the described embodiments, and it is apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, such modifications or variations will have to belong to the claims of the present invention.

DESCRIPTION OF SYMBOLS 1 Linear deposition source for high temperature 2 Process chamber
100: first built-in heating module 110: heater body
120: ceramic coating unit 200: second built-in heating module
300: deformation preventing crucible module 310: first crucible
311: first cylinder 312: second cylinder
313: bottom part 320: second crucible
321: second upper crucible 322: second lower crucible
323: seating groove 324: flange
400: deposition material transfer cylinder 500: nozzle

Claims (12)

A deposition material linear discharge unit that discharges a deposition material toward a deposition object; And
A first built-in heating module that is cross-connected to the deposition material linear discharge unit, accommodates the deposition material, heats the deposition material, and transfers it to the deposition material linear discharge unit, which is disposed in a central region to heat the deposition material. Linear deposition source for high temperature, characterized in that it comprises a vapor deposition material heating unit having a. According to claim 1,
The deposition material linear discharge unit,
And a second built-in heating module disposed in the central region to heat the deposition material. According to claim 1,
The deposition material heating unit,
It is disposed along the circumference of at least a portion of the first built-in heating module, and further includes a deformation preventing crucible module that prevents deformation by adsorption of the deposited material that is accommodated when cooling is performed after heating,
The first built-in heating module is a linear deposition source for high temperature, characterized in that for heating the deposition material accommodated in the deformation-resistant crucible module. According to claim 3,
The deformation preventing crucible module,
A first crucible accommodating the deposition material but surrounding the first built-in heating module so as to contact a region of the first built-in heating module; And
It is disposed in contact with an area of the first crucible to accommodate the first crucible, and forms a movement path through which the deposited material heated by the first built-in heating module moves in an evaporated state. A linear deposition source for high temperature, comprising a second crucible. According to claim 4,
The first crucible,
A first cylinder disposed in contact with the first built-in heating module;
A second cylinder spaced apart from the first cylinder and disposed to contact the second crucible; And
A bottom portion connecting the first cylinder and the second cylinder at the lower ends of the first cylinder and the second cylinder, and forming a receiving space accommodating the deposition material together with the first cylinder and the second cylinder Linear deposition source for high temperature, characterized in that. The method of claim 5,
The bottom portion,
The first built-in heating module is provided with a through hole so as to be disposed through the interior of the first cylinder, and having a ring shape having a width equal to the spaced distance between the first cylinder and the second cylinder Characterized by a linear deposition source for high temperature. The method of claim 6,
The first crucible is a linear deposition source for high temperature, characterized in that it is formed of a PBN (Pyrolytic Boron Nitride) material. According to claim 4,
The second crucible,
A second upper crucible coupled to one side of the deposition material linear discharge unit; And
A linear deposition source for high temperature, characterized in that it is detachably connected to a lower portion of the second upper crucible and includes a second lower crucible supporting the first crucible. The method of claim 8,
The second lower crucible,
A seating groove on which the first built-in heating module is seated; And
It is formed at a position higher than the bottom of the seating groove, a linear deposition source for high temperature, characterized in that it comprises a flange portion for supporting the bottom of the first crucible. According to claim 3,
The first built-in heating module,
A heater body disposed in an inner central region of the deformation preventing crucible module; And
Linear deposition source for high temperature, characterized in that it comprises a ceramic coating surrounding the heater body. According to claim 3,
The deposition material linear discharge unit,
Further comprising a deposition material delivery cylinder in communication with the first crucible to receive the deposition material is heated and evaporated,
The second built-in heating module is provided inside the deposition material delivery cylinder to heat the deposition material delivered from the first crucible, a linear deposition source for high temperature. The method of claim 11,
The deposition material linear discharge unit,
Linear deposition source for high temperature characterized in that it is coupled in communication with one side of the deposition material delivery cylinder, and further comprising a plurality of nozzles for spraying the deposition material to the outside.

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