KR20200038790A - Portable laser induced breakdown spectroscopy and method for controlling the same - Google Patents

Abstract

The present invention relates to a laser induced breakdown spectroscopy (LIBS) apparatus which comprises: an irradiating unit irradiating a sample with laser beams; a light receiving unit receiving light of plasma generated from the sample by the laser beams emitted to the sample; a distance measuring unit measuring the distance between the sample and the irradiating unit; an irradiating unit body formed to include the irradiating unit, the light receiving unit, and the distance measuring unit, and formed to be movable in the direction in which the sample is located or in the direction opposite to the direction in which the sample is located; a location adjusting unit changing the location of the irradiating unit body; and a control unit controlling the location adjusting unit to change the location of the irradiating unit body so that the irradiating unit body is closer to the sample or to change the location of the irradiating unit body so that the irradiating unit body is farther from the sample, according to the distance between the measured sample and the irradiating unit. The LIBS apparatus can improve accuracy and efficiency of laser spectroscopic analysis.

Description

A laser-guided spectroscopic analysis device and a control method for the device {PORTABLE LASER INDUCED BREAKDOWN SPECTROSCOPY AND METHOD FOR CONTROLLING THE SAME}

The present invention relates to a laser induced spectroscopic analysis device (LIBS: Lasser Induced Breakdown Spectroscopy).

The laser-guided spectroscopic analysis device (LIBS) refers to a device that allows a laser to enter a sample and to receive light generated from a plasma generated from the sample by the incident laser to analyze the components of the sample.

LIBS is used in various fields because of the advantage of being able to accurately analyze the components of a sample in a short period of time without a separate pre-treatment process in the field.

On the other hand, in the case of LIBS, by using laser light, the focus of the laser light must exactly match the surface of the sample to obtain an accurate analysis result for the component of the sample. Accordingly, an accurate laser-guided spectroscopic analysis result can be obtained only when the distance between the irradiating unit to which the laser light is irradiated and the sample is maintained at an accurate focal length.

Meanwhile, the sample targeted for the laser-guided spectroscopic analysis may be various materials. Therefore, the sample may be a sample having various bends instead of a flat plane shape. Therefore, even if the user maintains the distance between the initial sample and the laser irradiation unit as the optimal distance, the distance between the sample and the laser irradiation unit is different from the focal length in the curved portion. Therefore, in this case, there is a problem that accuracy and efficiency of laser spectral analysis are deteriorated.

On the other hand, when the laser is irradiated to the curved portion of the sample, the user may directly change the position of the laser irradiation portion, but this is a hassle that the user must change the location of the irradiated portion whenever the laser is irradiated to the curved portion of the sample. There is a problem that loyalty entails. In addition, even if the user directly changes the position of the irradiated portion, since the length protruding in the direction of the laser irradiated portion or the depth inserted in the opposite direction of the laser irradiated portion is different for each bend, the bend may vary depending on the shape. The problem is that it is difficult to keep the laser focal length accurately.

The present invention is to solve the above-mentioned problems, and provides a laser-guided spectroscopic analysis device and a control method of the device that can maintain a constant focal length of the laser according to the shape of the curved sample even if the user does not directly manipulate it The purpose is to do.

According to one aspect of the present invention to achieve the above or other object, the laser-guided spectroscopic analysis device according to an embodiment of the present invention, an irradiation unit for irradiating a laser to the sample, and from the sample by the laser irradiated to the sample It is formed to include a light receiving unit for receiving the light of the generated plasma, a distance measuring unit for measuring the distance between the sample and the irradiation unit, the irradiation unit and the light receiving unit, and the distance measuring unit, the direction in which the sample is located or the Position of the irradiator body formed to be movable in a direction opposite to the direction in which the sample is located, a position adjusting unit for moving the position of the irradiator body, and a position of the irradiator body to be closer to the sample according to the distance between the measured sample and the irradiator The position of the irradiator body to move or to move further away from the sample It characterized in that it comprises a control part for controlling the positioning part so as to move.

In one embodiment, the irradiation unit includes at least one lens for determining the focal length of the laser, and the position adjusting unit changes the position of at least one of the at least one lens of the irradiation unit to change the It is characterized by further changing the focal length.

In one embodiment, the light receiving unit, the plasma generated by the laser, is formed by including at least one lens for forming a focus of the image to be sensed, the control unit, the irradiation unit by the position adjustment unit When the position of at least one lens is changed, the position of at least one lens of the light receiving unit is changed according to the position of the lens of the irradiated unit to change the focal length of the image sensed by the light receiving unit according to the changed focal length of the laser. It is characterized by.

In one embodiment, when the distance between the sample surface and the irradiation unit is first measured, the control unit moves the position of the irradiation unit based on the measured distance, and determines the distance between the moved irradiation unit location and the sample surface. The focal length of the laser is further changed by changing a position of at least one lens of the irradiation unit according to a result of the second measurement.

In one embodiment, when the distance between the sample surface and the irradiation unit is first measured, the control unit changes the focal length of the laser by changing at least one lens position of the irradiation unit based on the measured distance, and the It is characterized in that the position of the irradiation unit is further changed according to a result of comparing the measured distance and the changed focal length.

In one embodiment, the control unit is characterized in that to move the position of the body of the irradiation unit to maintain the focal length of the laser, the distance between the sample and the irradiation unit is preset.

In one embodiment, further comprising a guide portion for guiding a path through which the irradiator body moves, the irradiator body moving in a direction in which the laser is irradiated along the guide portion or in a direction opposite to the direction in which the laser is irradiated It is characterized by being formed to move.

According to one aspect of the present invention to achieve the above or other object, the control method of the laser-guided spectroscopic analysis device according to an embodiment of the present invention, the irradiation unit for irradiating the laser to the sample and the plasma light generated from the sample A control method of a laser-guided spectroscopic analysis device configured to move a position of a light-receiving unit for receiving light, the method comprising: measuring a distance between the sample and an irradiation unit, and calculating a difference between the measured distance and the focal length of the laser Step, based on the calculated difference, determining a distance and a moving direction to which the irradiation unit and the light receiving unit are to be moved, a distance between the sample and the irradiation unit according to the determined moving distance and the moving direction, and between the sample and the light receiving unit The irradiation unit so that the distance of the same as the preset focal length for the irradiation unit and the light receiving unit, respectively And moving the light-receiving unit.

In one embodiment, the method further comprises moving at least one of the lenses of the irradiation unit for determining the focal length of the laser, based on a difference between the measured distance and the focal length of the laser. .

In one embodiment, the step of moving at least one of the lenses of the irradiation unit, based on the preset information on the laser focal length corresponding to different positions and each position of the at least one lens, the measurement And determining a position of a lens forming a laser focal length corresponding to the determined distance, and moving at least one of the lenses of the irradiation unit to the determined lens position.

In one embodiment, the step of moving at least one of the lenses of the irradiation unit, when the position of at least one of the lenses of the irradiation unit is changed, at least one lens position of the light receiving unit in association with the changed position of the lens of the irradiation unit And changing the focal length of the image sensed by the light receiving unit according to the changed focal length of the laser.

In one embodiment, calculating the difference between the measured distance and the focal length of the laser includes: determining whether the measured distance between the sample and the irradiation unit exceeds a preset distance, and the determination result Before moving the irradiation unit and the light receiving unit according to, further comprising the step of first moving any one of the lenses of the irradiation unit based on the difference in the focal length of the laser, the step of moving the irradiation unit and the light receiving unit, It is characterized in that the step of moving the irradiation unit and the light receiving unit according to a result of comparing the re-measured distance between the sample and the irradiation unit and the focal length changed according to any one of the changed irradiation lens.

The effects of the laser-guided spectroscopic analysis device and the control method of the device according to the present invention are as follows.

According to at least one of the embodiments of the present invention, the present invention allows the position of the laser irradiation unit to be changed according to the distance between the sample and the laser irradiation unit, thereby maintaining a constant focal length of the laser according to the shape of the curved sample It is possible to improve the accuracy and efficiency of laser spectral analysis.

In addition, according to at least one of the embodiments of the present invention, the present invention changes the laser position according to the shape of the curved sample by changing at least one lens position that refracts the laser in the laser irradiation part according to the distance between the sample and the laser irradiation part. The effect is that the focal length of the laser can be matched to the surface of the curved sample by changing the focal length of.

1 is a block diagram for explaining the structure of a laser-guided spectroscopic analysis device according to an embodiment of the present invention.
2 is a conceptual diagram for explaining the structure of a laser-guided spectroscopic analysis device according to an embodiment of the present invention.
3 is a flowchart illustrating an operation process of changing the position of the irradiation unit in the laser-guided spectroscopic analysis device according to an embodiment of the present invention.
4 is an exemplary view showing an example in which the position of the irradiation unit is changed according to a sample having a curved shape in the laser-guided spectroscopic analysis apparatus according to the embodiment of the present invention.
5 is a flowchart illustrating an operation process of moving a position of a lens according to a distance from a sample surface in a laser-guided spectroscopic analysis device according to another embodiment of the present invention.
6 is a conceptual diagram showing the structure of an irradiation unit in a laser-guided spectroscopic analysis device according to another embodiment of the present invention.
7 is an exemplary view showing an example in which a focal length is changed according to a movement of a lens in a laser-guided spectroscopic analysis device according to another embodiment of the present invention.

Hereinafter, exemplary embodiments disclosed herein will be described in detail with reference to the accompanying drawings, but the same or similar elements are assigned the same reference numbers regardless of the reference numerals, and overlapping descriptions thereof will be omitted. The suffixes "modules" and "parts" for the components used in the following description are given or mixed only considering the ease of writing the specification, and do not have meanings or roles distinguished from each other in themselves. In addition, in describing the embodiments disclosed in the present specification, when it is determined that detailed descriptions of related known technologies may obscure the gist of the embodiments disclosed herein, detailed descriptions thereof will be omitted.

In addition, the accompanying drawings are only for easy understanding of the embodiments disclosed in the present specification, and the technical spirit disclosed in the specification is not limited by the accompanying drawings, and all modifications included in the spirit and technical scope of the present invention , It should be understood to include equivalents or substitutes.

Terms including ordinal numbers such as first and second may be used to describe various components, but the components are not limited by the terms. The terms are used only for the purpose of distinguishing one component from other components.

When an element is said to be "connected" or "connected" to another component, it is understood that other components may be directly connected to or connected to the other component, but may exist in the middle. It should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that no other component exists in the middle.

Singular expressions include plural expressions unless the context clearly indicates otherwise.

In this application, the terms "comprises" or "have" are intended to indicate the presence of features, numbers, steps, actions, components, parts or combinations thereof described herein, one or more other features. It should be understood that the existence or addition possibilities of fields or numbers, steps, operations, components, parts or combinations thereof are not excluded in advance.

First, FIG. 1 is a block diagram for explaining the structure of a laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention.

Referring to FIG. 1, the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention is connected to the control unit 100 and the control unit 100 and is irradiated 110 controlled by the control unit 100, It may be configured to include a light receiving unit 120, a distance measuring unit 130, a position adjusting unit 140, and a memory 150. The components shown in FIG. 1 are not essential for implementing the laser-guided spectroscopic analysis device 1, so the laser-guided spectroscopic analysis device 1 described herein is more than the components listed above, or It may have fewer components.

First, the irradiation unit 110 may be formed to irradiate the sample with a laser. To this end, the irradiator 110 may include at least one lens, and accordingly, a focal length of the laser irradiated from the irradiator 110 may be formed on a focal length determined by the at least one lens. And when the focal length and the surface of the sample coincide, that is, when the focal point is formed on the surface of the sample, the most plasma can be generated from the sample.

The light receiving unit 120 may be formed to receive light of plasma generated from a sample by the laser. To this end, the light receiving unit 120 may also be formed by including at least one lens, and the at least one light receiving unit lens is located around a focal point formed by the laser, for example, at a position spaced apart from the focal point by a predetermined distance. The focal length may be set so that the focus of the image sensed at 120) is formed. Accordingly, when the focus of the laser irradiated from the irradiator 110 accurately matches on the surface of the sample, the light receiving unit 120 may sense an image in which the focus is focused on plasma generated from the sample. Meanwhile, the light receiving unit 120 may be formed around the irradiation unit 110 in order to increase the efficiency of plasma light reception.

In this case, since the control unit 100 analyzes the components of the sample from the spectrum of the plasma sensed through the light receiving unit 120, when the image focused on the plasma is sensed, the component of the sample can be most accurately analyzed.

Meanwhile, the laser-guided spectroscopic analysis device 1 according to the embodiment of the present invention may include a distance measuring unit 130. Here, the distance measuring unit 130 may measure the distance between the irradiation unit 110 and the sample. For example, the distance measuring unit 130 may be a laser range finder (LRF) using a laser. Or it may be a distance measuring device using ultrasonic waves or infrared rays. Alternatively, the distance measuring unit 130 may include measurement means for sensing an image of a sample and measuring a distance from the sensed image.

Meanwhile, the distance measurement unit 130 may be formed around the irradiation unit 110. In addition, a laser for measuring distance or ultrasonic waves or infrared rays may be irradiated in the direction in which the laser is irradiated from the irradiator 110. This is because the distance measuring unit 130 is for measuring the distance between the irradiation unit 110 and the sample irradiated with the laser of the irradiation unit 110.

In addition, the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention may include a position adjusting unit 140. The position adjusting unit 140 may be formed to move the position of the irradiation unit 110 according to the distance measured by the distance measuring unit 130.

For example, assuming that the direction in which the laser is irradiated from the irradiating unit 110 is the front direction of the irradiating unit 110, and assuming that the direction opposite to the direction in which the laser is irradiated is the rear direction of the irradiating unit 110, the position The adjustment unit 140 may be formed to advance or reverse the irradiation unit 110 according to the distance measured by the distance measurement unit 130. To this end, the position adjusting unit 140 may be formed to include at least one driving motor and at least one gear, and for guiding the irradiation unit 110 according to a path through which the irradiation unit 110 moves. It may include a guide portion.

Meanwhile, the control unit 100 may control the overall operation of the laser-guided spectroscopic analysis device 1. For example, the control unit 100 may control the irradiation unit 110 so that the laser is irradiated with the sample according to the user's input. In addition, when the laser is irradiated from the irradiation unit 110, the light receiving unit 120 may be controlled to receive plasma generated from a sample by the laser. In addition, the components of the sample may be analyzed based on the spectrum of the plasma sensed through the light receiving unit 120.

Here, the control unit 100 may control the distance measurement unit 130 to measure the distance between the sample and the irradiation unit 110 in conjunction with the irradiation of the laser. In addition, it may be determined whether the distance measured by the distance measurement unit 130 matches a preset laser focal length.

For example, if the distance measured from the distance measurement unit 130 is within the same determination range preset from the laser focal length, the control unit 100 is a preset laser focal length between the current irradiation unit 110 and the sample. I can judge. On the other hand, if the distance measured from the distance measuring unit 130 is outside the preset range of the same determination from the laser focal length, it may be determined that the distance between the current irradiation unit 110 and the sample is outside the preset laser focal length. have.

As a result of the determination, if it is determined to be outside the preset laser focal length, the control unit 100 may control the position adjusting unit 140 so that the position of the irradiation unit 110 is moved. For example, the controller 100 may calculate a difference between a currently measured distance and a preset focal length, and allow the position of the irradiation unit 110 to be moved according to the calculated difference. Therefore, the irradiator 110 is moved by the position adjusting unit 140 to always maintain a preset focal length with the sample, and accordingly, the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention is capable of more accurate sample Component analysis results can be obtained.

Meanwhile, the position adjustment unit 140 may move not only the position of the irradiation unit 110 but also the position of at least one lens provided in the irradiation unit 110. In this case, when the position of the lens is moved, the position at which the laser refracts is changed according to the position of the moved lens, so that the focal length of the laser irradiated through the irradiation unit 110 may be changed. Accordingly, due to the curved shape of the sample, even when the distance between the sample surface and the irradiator 110 is changed, the focal length of the laser can be changed so that the focal point of the laser always coincides with the sample surface.

In this case, of course, the position adjusting unit 140 may change the position of at least one lens provided in the light receiving unit 120. For example, at least one lens provided in the light receiving unit 120 may be moved together in conjunction with the lens movement of the irradiation unit 110. Accordingly, when the focal length of the laser is changed according to the movement of the lens position of the irradiator 110, the focal length of the light receiving unit 120 may be changed as much as the changed focal length of the laser.

Here, the positional movement of the irradiation unit 110 and the positional movement of the lens may be used to complement one of the other. For example, when the distance between the sample surface and the irradiation unit 110 is measured, the control unit 100 may move the lenses of the irradiation unit 110 and the light receiving unit 120 so that the focal length of the first irradiated laser coincides with the measured distance. You can. In addition, when the focal length is changed according to the movement of the lenses, the distance between the irradiator 110 and the sample may be measured again, and the position of the irradiator 110 may be moved based on the measured distance. In this case, the irradiation unit 110 may be moved such that the sample and the irradiation unit 110 maintain a focal length calculated according to the positions of the moved lenses.

Alternatively, when the distance between the sample surface and the irradiation unit 110 is measured, the control unit 100 may control the position of the irradiation unit 110 to be moved based on the measured distance. And when the distance between the sample surface and the irradiation unit 110 is changed according to the position of the irradiation unit 110, the focal length of the laser irradiated according to the changed distance to match the changed distance of the irradiation unit 110 and the light receiving unit 120 The lenses can be moved. Accordingly, the present invention can make the distance between the sample surface and the irradiation unit 110 more precisely match the laser focal length.

Alternatively, the control unit 100 may of course selectively use any one method according to the distance between the sample surface and the irradiation unit 110. For example, when the measured distance between the sample and the irradiation unit 110 exceeds a preset distance, the control unit 100 may move the lenses of the irradiation unit 110 and the light receiving unit 120 to match the measured distance. Also, the position of the irradiation unit 110 may be changed according to a difference between the measured distance and the changed focal length according to the moved lenses. On the other hand, if the distance between the sample surface and the irradiation unit 110 is equal to or less than a preset distance, the control unit 100 may control the position adjustment unit 140 to change only the position of the irradiation unit 110, of course.

Meanwhile, the memory 150 may store programs and various data for the operation of the control unit 100. For example, the memory 150 may include data capable of analyzing the components of the sample according to the plasma spectrum sensed by the light receiving unit 120. In addition, the memory 150 may include information about a focal length of the preset irradiation unit 110 laser and the light receiving unit 120. In addition, when the lenses of the irradiation unit 110 or the light receiving unit 120 are moved, information about focal lengths changed according to the moved lens may be included.

2 is a conceptual diagram for explaining the structure of a laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention.

Referring to Figure 2, the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention shows an example in which the light receiving unit 120 and the distance measuring unit 130 are formed around the irradiation unit 110, the light receiving unit ( 120), the distance measurement unit 130 and the irradiation unit body 200 including the irradiation unit 110 is shown an example connected to the position adjustment unit 140.

On the other hand, in the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention, when the position of the irradiation part body 200 is moved, a guide part 210 for guiding a path through which the irradiation part body 200 moves may be formed. have. Therefore, when the position adjusting unit 140 moves the irradiation unit body 200, the irradiation unit body 200 moves along the guide unit 210 to move forward (move in the direction in which the laser is irradiated) or reverse (laser is It may be formed to move in the opposite direction of the irradiation direction).

3 is a flowchart illustrating an operation process of changing the position of the irradiation unit 110 in the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention.

Referring to FIG. 3, when a laser is irradiated to a sample, the controller 100 of the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention first measures a distance between the sample surface and the irradiator 110 It can be (S300). For example, the distance measurement may be performed based on at least one of a laser distance measuring unit (LRF), an ultrasonic distance measuring unit, and an infrared distance measuring unit.

Then, when the distance between the sample surface and the irradiation unit 110 is measured, the control unit 100 may compare the measured distance with a preset laser focal length (S302). Here, the preset laser focal length may be a preset fixed laser focal length. Alternatively, it may be a laser focal length calculated according to the lens position of the irradiation unit 110.

As a result of the comparison of step S302, if the measured distance is a distance that can be determined to be the same as the preset laser focal length, the controller 100 proceeds to step S300 to measure the distance between the sample surface and the irradiation unit 110 again. You can. Then, the process of comparing the measured distance and the preset laser focal length may be repeated by proceeding to step S302.

On the other hand, as a result of the comparison of step S302, if the measured distance is a distance that cannot be determined to be the same as the preset laser focal length, the controller 100 determines the distance and direction to which the irradiation unit 110 will be moved based on the measured distance. It can be calculated (S304). For example, in step S304, as a result of comparing the measured distance with a preset laser focal length, if the measured distance is longer than a preset laser focal length, the control unit 100 displays the irradiation unit 110 and the sample surface. It may be determined that the irradiation unit 110 should be advanced by a difference between the measured distance and a preset laser focal length so as to be closer. On the other hand, if the measured distance is shorter than the preset laser focal length, the control unit 100 is equal to the difference between the measured distance and the preset laser focal length so that the irradiating unit 110 and the sample surface become farther away. ).

In addition, the control unit 100 may control the position adjustment unit 140 such that the position of the irradiation unit 110 is changed according to the distance and direction calculated in step S304 (S306). Accordingly, the position of the irradiator 110 may be changed, and a focal length may be maintained between the sample surface and the irradiator 110 according to the changed position of the irradiator 110. Therefore, the focal point of the irradiated laser may be formed on the surface of the sample.

On the other hand, if the position of the irradiation unit 110 is changed through the step S306, the control unit 100 proceeds to step S300 to measure the distance between the sample surface and the irradiation unit 110 again. Then, the process proceeds to step S302, and the process proceeds to step S300 again according to the result of comparing the measured distance with the preset laser focal length, or the process from step S304 to step S306 can be repeated. That is, until the irradiation of the sample component is completed by the user, the process of FIG. 3 may be repeatedly performed according to the distance between the sample surface and the irradiation unit 110. In addition, the irradiator 110 may be moved to match the preset focal length corresponding to the irradiator 110.

On the other hand, similarly, the light receiving unit 120 may also maintain a preset focal length from the sample. In this case, the light receiving unit 120 may also be moved so that the distance between the sample and the light receiving unit 120 matches a preset focal length (eg, a preset focal length for the light receiving unit 120). Here, the preset focal length for the light receiving unit 120 may be a different distance from the focal length set for the irradiation unit 110.

Meanwhile, FIG. 4 is an exemplary view showing an example in which the position of the irradiation unit is changed according to the sample 400 having a curved shape in the laser-guided spectroscopic analysis device 1 according to the embodiment of the present invention.

In the following description, the drawing shown at the top of FIG. 4 is referred to as the first drawing, the drawing indicated at the middle is the second drawing, and the drawing shown at the bottom is referred to as the third drawing.

Referring to FIG. 4, the sample 400 may be formed to have bends having different steps according to positions. In addition, with respect to the sample 400, the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention can analyze a sample by moving from point a to point b of sample 400 and from point b to point c .

In this case, when the preset laser focal length is the d distance, as shown in the first drawing of FIG. 4, in the initial stage of sample analysis, the user induces laser-guided spectroscopy so that the distance between the sample surface and the irradiation unit 110 maintains the d distance. The analysis device 1 can be arranged. Therefore, in the case of the point a of the sample 400, the laser irradiated from the irradiation unit 110 is irradiated at a distance spaced by the distance d, which is the focal length, so that focus may be formed on the surface of the point a.

In this state, when the laser-guided spectroscopic analysis device 1 moves to irradiate the laser to the point b, the control unit 100 in step S302 of FIG. 3, the sample surface measured through the distance measuring unit 130, that is It can be identified that the distance between the surface of point b and the irradiation unit 110 is different from the focal length d distance. Then, the controller 100 proceeds to step S304 to step S306 of FIG. 3 and moves the irradiator body 200 according to the difference between the distance between the sample surface and the irradiator 110 at point b and a preset focal length d distance. I can do it. Therefore, as shown in the second drawing of FIG. 4, the body of the irradiator 110 retracts by the calculated difference, so that the distance between the sample surfaces at the time point b of the irradiator 110 can maintain the focal length d distance. . Accordingly, since the laser irradiated from the irradiation unit 110 is irradiated at a distance spaced apart by the distance d, which is the focal length, focus may be formed on the surface of point b.

On the other hand, when the laser-guided spectroscopic analysis device 1 moves to irradiate the laser to the point c, the control unit 100 in step S302 of FIG. 3, the sample surface measured through the distance measuring unit 130, that is, point c It can be identified that the distance between the surface and the irradiation unit 110 is shorter than the focal length d distance.

Then, the control unit 100 proceeds to step S304 to step S306 of FIG. 3 and moves the irradiation unit body 200 according to the difference between the distance between the sample surface and the irradiation unit 110 at point c and a preset focal length d distance. I can do it. Therefore, as shown in the third drawing of FIG. 4, the body of the irradiator 110 moves forward by the calculated difference, so that the distance between the sample surfaces at the time point c of the irradiator 110 can maintain the focal length d distance. . Accordingly, since the laser irradiated from the irradiator 110 is irradiated at a distance spaced apart by the distance d, which is the focal length, focus may be formed on the surface of point c. Accordingly, the present invention is to ensure that the focus of the laser irradiated from the irradiating unit 110 is always formed on the surface of the sample irrespective of the step formed by the curvature of the surface of the sample 400. It is possible to increase the efficiency of the acquisition and the laser-guided spectroscopic analysis.

Meanwhile, in the description of FIGS. 3 and 4, an example of an operation process in which the position adjusting unit 140 changes the position of the irradiation unit 110 has been described, but the position adjustment unit 140 is provided in the irradiation unit 110 as described above. It has been mentioned that it may be formed to change the position of at least one lens. Hereinafter, in FIGS. 5 to 7, when the position adjusting unit 140 is formed to change the position of at least one lens according to the distance between the sample surface and the irradiation unit 110, the operation process of the control unit 100 and the lens The location change will be described.

First, FIG. 5 is a flowchart illustrating an operation process of moving a position of a lens according to a distance from a sample surface in a laser-guided spectroscopic analysis device 1 according to another embodiment of the present invention.

Referring to FIG. 5, when a laser is irradiated to a sample, the controller 100 of the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention first measures a distance between the sample surface and the irradiator 110 It can be (S400).

Then, when the distance between the sample surface and the irradiation unit 110 is measured, the control unit 100 may determine whether the measured distance matches the currently calculated laser focal length (S402). For example, if the currently measured distance is within the same determination range preset from the currently calculated laser focal length or a preset laser focal length, the control unit 100 determines that the currently measured distance matches the currently calculated laser focal length. You can.

On the other hand, as a result of the comparison of step S402, if the measured distance coincides with the calculated laser focal length, the control unit 100 proceeds to step S400 to measure the distance between the sample surface and the irradiation unit 110 again. Then, the process proceeds to step S402 and the process of determining whether the measured distance matches the currently calculated laser focal length or a preset laser focal length may be repeated.

On the other hand, when the comparison result of step S402, the currently measured distance does not match the currently calculated laser focal length, the control unit 100 is based on the distance between the irradiation unit 110 from the measured sample surface, the irradiation unit 110 ) And the position of the lens to form a focal length corresponding to the distance between the sample surface. As an example, the control unit 100 may calculate the position of the lens based on information on focal lengths changed according to each position of the lens.

For example, the memory 150 may include information about focal lengths that are changed according to different positions of the lens. Alternatively, when the lens moves, the memory 150 may include information for calculating a focal length according to a moving direction and a moving distance. Accordingly, in step S504, the control unit 100 determines a position of a lens forming a focal length corresponding to the measured distance based on the information included in the memory 150, or corresponds to the measured distance The moving distance and the moving direction of the lens for forming the focal length can be calculated.

In addition, the control unit 100 controls the position adjusting unit 140 such that at least one lens position provided in the irradiation unit 110 is changed according to the moving distance and moving direction of the lens calculated in step S504 or the determined position of the lens. It can be (S506). Accordingly, the focal length of the laser irradiated from the irradiator 110 may be changed to a distance between the currently measured sample surface and the irradiator 110 according to the changed position of the lens of the irradiator 110. Therefore, the focal point of the laser irradiated from the irradiation unit 110 may be formed on the sample surface. On the other hand, when the focal length of the laser irradiated from the irradiator 110 is changed according to the change of the position of the lens of the irradiator 110, the lens position of the light receiving unit 120 is changed in conjunction with the change of the focal length of the light receiving unit 120 Can be.

On the other hand, when the position of the lens of the irradiation unit 110 is changed through the step S506, the control unit 100 proceeds to step S500 to measure the distance between the sample surface and the irradiation unit 110 again. Then, the process proceeds to step S502, and the process proceeds to step S500 again according to the result of comparing the measured distance with the preset laser focal length, or the process from step S504 to step S506 can be repeated. That is, until the irradiation of the sample component is completed by the user, the process of FIG. 5 may be repeatedly performed according to the distance between the sample surface and the irradiation unit 110.

6 to 7 are conceptual diagrams showing the structure of the irradiating unit in the laser-guided spectroscopic analysis device 1 formed to change the lens position of the irradiating unit 110 as described above and an example showing an example in which the lens position is changed It is.

First, referring to FIG. 6, the drawing shown at the bottom of FIG. 6 is the structure of the irradiator 110 including a plurality of lenses 600 and 610 in the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention Is showing. As shown in FIG. 6, in the irradiation unit 110, the laser passing through the second lens 610 may have a structure in which a focus is formed at a predetermined distance by the first lens 600.

In this case, the control unit 100 of the laser-guided spectroscopic analysis device 1 according to an embodiment of the present invention may control the position adjusting unit 140 so that the position of the first lens 600 is changed. That is, as shown in the first drawing of FIG. 7, when the first lens 600 is in the first position, focus is on the first point 700 spaced a predetermined distance from the first lens 600. It can be formed.

However, if the first lens is moved by a certain distance 620 by the position adjusting unit 140, the position where the focus is formed may be changed according to the positional movement of the first lens 600. That is, as shown in the second drawing of FIG. 7, when the first lens 600 moves by the predetermined distance 620 in the direction in which the second lens 610 is located, the irradiation is performed by the irradiation unit 110 The focus of the laser can be formed in the second position 710 rather than the first position 700. That is, the position at which the focus of the laser is formed may be changed according to the movement of the lens. In addition, the second position 710 may be a point on the sample surface located closer to the distance from the irradiation unit 110 according to the shape of the curved sample.

On the other hand, in the above description, the case where the first lens 600 moves in the direction in which the second lens 610 is located is exemplified, but it is needless to say that it may move in the opposite direction. In this case, the focus of the laser irradiated from the irradiator 110 may be formed at a greater distance than the irradiator 110. Accordingly, when the distance between the sample surface and the irradiation unit 110 is further increased, the control unit 100 moves the first lens 600 to move the first lens 600 on the sample surface located at a greater distance from the irradiation unit 110 according to the shape of the curved sample. The focal point of the laser may be formed at one point.

On the other hand, in the above description, the structure of the irradiating unit 110 in which the focus of the laser irradiated using two lenses is determined is described, but this is only an example for explaining the present invention and the present invention is not limited thereto. . That is, as long as the focal point of the irradiated laser can be changed by changing at least one lens position, the present invention is also applied to a laser-guided spectroscopic analysis device having an irradiating unit having a structure different from that shown in FIGS. 6 to 7. Of course it can be applied.

The above-described present invention can be embodied as computer readable codes on a medium on which a program is recorded. The computer-readable medium includes any kind of recording device in which data readable by a computer system is stored. Examples of computer-readable media include a hard disk drive (HDD), solid state disk (SSD), silicon disk drive (SDD), ROM, RAM, CD-ROM, magnetic tape, floppy disk, and optical data storage device. This includes, and is also implemented in the form of a carrier wave (eg, transmission over the Internet). In addition, the computer may include a control unit 100 of the laser-guided spectroscopic analysis device. Therefore, the above detailed description should not be construed as limiting in all respects, but should be considered as illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the equivalent scope of the present invention are included in the scope of the present invention.

Claims (12)

In the laser-guided spectroscopic analysis device,
An irradiation unit that irradiates a sample with a laser;
A light receiving unit for receiving light of plasma generated from the sample by the laser irradiated to the sample;
A distance measuring unit for measuring a distance between the sample and the irradiation unit;
An irradiation part body formed to include the irradiation part, the light receiving part, and the distance measuring part, and formed to be movable in a direction in which the sample is located or in a direction opposite to the direction in which the sample is located;
A position adjusting unit for moving the position of the irradiation unit body; And,
A control unit for controlling the position adjusting unit to move the position of the irradiation unit body to be closer to the sample or to move the position of the irradiation unit body to be further away from the sample according to the distance between the measured sample and the irradiation unit Laser-guided spectroscopic analysis device comprising a. According to claim 1,
The irradiation unit,
It includes at least one lens for determining the focal length of the laser,
The position adjustment unit,
A laser-guided spectroscopic analysis device, characterized in that further changing the focal length of the laser by changing at least one position among at least one lens of the irradiation unit. According to claim 2,
The light receiving unit,
The plasma generated by the laser is formed by including at least one lens for forming a focus of a sensed image,
The control unit,
When the position of the at least one lens of the irradiation unit is changed by the position adjusting unit, the position of at least one lens of the light receiving unit is changed according to the position of the lens of the changed irradiation unit, and the light receiving unit is sensed according to the focal length of the changed laser. Laser-guided spectroscopic analysis device, characterized by changing the focal length of the image together. According to claim 2, The control unit,
When the distance between the sample surface and the irradiated portion is first measured, the position of the irradiated portion is moved based on the measured distance,
The laser-guided spectroscopic analysis device, characterized in that further changing the focal length of the laser by changing the position of at least one lens of the irradiated portion according to the result of the second measurement of the distance between the position of the moved irradiated portion and the sample surface. According to claim 2, The control unit,
When the distance between the sample surface and the irradiation part is first measured, the focal length of the laser is changed by changing at least one lens position of the irradiation part based on the measured distance,
The laser-guided spectroscopic analysis device, characterized in that further changing the position of the irradiation unit according to the result of comparing the measured distance and the changed focal length. According to claim 1, The control unit,
Laser-guided spectroscopic analysis device, characterized in that for moving the position of the body of the irradiation unit so that the distance between the sample and the irradiation unit to maintain a predetermined focal length of the laser. According to claim 1,
Further comprising a guide portion for guiding (guide) the path through which the irradiation part body,
The irradiation unit body,
A laser-guided spectroscopic analysis device characterized in that it is formed to move in the direction in which the laser is irradiated along the guide portion or in a direction opposite to the direction in which the laser is irradiated. In the control method of the laser-guided spectroscopic analysis device formed to move the position of the irradiation unit for irradiating the laser to the sample and the light receiving unit for receiving the light of the plasma generated from the sample,
Measuring a distance between the sample and the irradiation unit;
Calculating a difference between the measured distance and the focal length of the laser;
Determining a distance and a moving direction to which the irradiation unit and the light receiving unit are to move based on the calculated difference;
And moving the irradiation unit and the light receiving unit such that the distance between the sample and the irradiation unit and the distance between the sample and the light receiving unit correspond to a preset focal length for the irradiation unit and the light receiving unit, respectively, according to the determined moving distance and the moving direction. Control method of the laser-guided spectroscopic analysis device, characterized in that. The method of claim 8,
And moving at least one of the lenses of the irradiation unit for determining the focal length of the laser based on a difference between the measured distance and the focal length of the laser. Control method. The method of claim 9, wherein the step of moving at least one of the lenses of the irradiation unit,
Determining a position of a lens forming a laser focal length corresponding to the measured distance, based on predetermined positions of different positions of the at least one lens and a laser focal length corresponding to each position; And,
And moving at least one of the lenses of the irradiation unit to the determined lens position. The method of claim 9, wherein the step of moving at least one of the lenses of the irradiation unit,
When the position of at least one of the lenses of the irradiation unit is changed, the position of at least one lens of the light receiving unit is changed according to the position of the lens of the changed irradiation unit, and the focus of the image sensed by the light receiving unit according to the changed focal length of the laser The method of controlling a laser-guided spectroscopic analysis device further comprising the step of changing the distance together. The method of claim 9,
Calculating the difference between the measured distance and the focal length of the laser,
Determining whether the measured distance between the sample and the irradiation part exceeds a preset distance; And,
Further comprising the step of first moving any one of the lenses of the irradiation unit based on the difference in the focal length of the laser before the irradiation unit and the light receiving unit are moved according to the determination result,
The step of moving the irradiation unit and the light receiving unit,
The step of moving the irradiation unit and the light-receiving unit according to the result of comparing the re-measured distance between the sample and the irradiation unit and the focal length changed according to the lens of any one of the changed irradiation section of the laser-guided spectroscopic analysis device, characterized in that Control method.

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