KR20200006089A - heat exchanger - Google Patents

Abstract

Provided is a heat exchanger capable of appropriately performing heat exchange on the sprayed heat exchange liquid.
A heat exchange vessel 3 for performing heat exchange therein, a spray nozzle 5 for spraying the heat exchanged liquid in the heat exchange vessel 3, and an injection nozzle 7 for injecting gas into the mist M of the sprayed heat exchanged liquid 7 And an outlet 9 for discharging the heat-exchanged liquid, which is located upstream of the injected gas.

Description

heat exchanger

The present invention relates to a heat exchanger provided in a vaporizer or a steam generator.

A heat exchanger is a device for heating or cooling one object by contacting two objects having different temperatures, and is widely used in industrial applications such as vaporizers, steam generators, food manufacturing, chemical manufacturing, and refrigeration storage.

For example, there exists a vaporizer as described in Unexamined-Japanese-Patent No. 2010-219421. In this vaporizer, the inside of a cylindrical vaporization chamber is heated by a heater, the liquid for thin film formation is vaporized by vaporizing in this vaporization chamber, and the vaporized liquid is discharged | emitted from the discharge port.

However, in the conventional vaporizer, some of the sprayed liquid adheres to the inner surface of the heating vessel before vaporizing, and the deposited liquid is deposited by pyrolysis or polymerization reaction. Since this deposition occurs in the vicinity of the discharge port, there is a problem that the discharge port is narrowed by the deposit.

Japanese Utility Model Laid-Open No. 55-8832 discloses an evaporation apparatus in which a heat transfer tube group is disposed in an evaporation chamber, and the liquid is dispersed in the heat transfer tube group and evaporated.

This evaporator has a problem that a part of the scattered liquid passes through without contacting the heat transfer tube group, so that sufficient evaporation is not performed.

The evaporator is configured to control the temperature of the heat medium passing through the heat transfer tube, and is also applicable as a device for heating or cooling the liquid. There is a problem that the heating or cooling of the liquid is insufficient.

As described above, in a heat exchanger applied to a vaporizer, an evaporator, a liquid heating or a cooling apparatus, the heat exchange liquid, which is the liquid to be sprayed, cannot be properly heat-exchanged, which causes the above problems.

Japanese Patent Publication No. 2010-219421 Japanese Utility Model Publication No. 55-8832

The problem to be solved is that the heat exchanged liquid to be sprayed could not be properly heat exchanged.

The present invention provides a heat exchanger capable of appropriately performing heat exchange on the sprayed heat exchange liquid.

The heat exchanger includes a heat exchanger container for performing heat exchange therein, a spraying hole for spraying a heat exchanged liquid into the heat exchanger container, a spraying hole for injecting a gas to the sprayed heat exchanged liquid, and an upstream side of the gas. A discharge port for discharging the heat exchange liquid is provided.

The heat exchanger of this invention can lengthen the residence time of the to-be-exchanged liquid sprayed by the injected gas, and can make heat exchange with respect to the to-be-exchanged liquid inside the heat exchange container appropriately.

1 is a schematic diagram showing a vaporizer to which a heat exchanger according to Embodiment 1 of the present invention is applied.
FIG. 2 is a perspective view showing the vaporizer of FIG. 1. FIG.
3 is a perspective cross-sectional view of the vaporizer of FIG. 2.
4 is a perspective cross-sectional view of the vaporizer of FIG. 2.
5 is a plan view of the body of the vaporizer of FIG. 2.
FIG. 6 is a cross-sectional view illustrating a spray nozzle periphery of the vaporizer of FIG. 2.
7 is a conceptual view showing the injection direction of the injection port of the injection nozzle of FIG. It is shown.
8 is a schematic view showing a vaporizer to which a heat exchanger according to Embodiment 2 of the present invention is applied.
9 is a schematic top view of the bottom of the vaporizer of FIG. 8.
10 is a schematic diagram showing a heating and cooling apparatus to which a heat exchanger according to Embodiment 3 of the present invention is applied.
FIG. 11 is a schematic view showing the heat cooling device of FIG. 10.
12 is a cross-sectional view of a heat exchange chamber illustrating a heat exchange part of the heat cooling device of FIG. 11.
FIG. 13 is a cross-sectional view of the heat exchange chamber illustrating the arrangement of the nozzles of the heating and cooling device of FIG. 11.
FIG. 14 is a schematic view of a heat exchange chamber showing a relationship between a nozzle and a heat exchange unit of the heat cooling device of FIG. 11.
15 is a schematic diagram showing a heating / cooling apparatus to which a heat exchanger according to Embodiment 4 of the present invention is applied.
16 is a schematic structural diagram of a separation system having a steam generator using a heat exchanger according to Embodiment 5 of the present invention.
17 is a schematic diagram of an aerosol-forming system having a vaporizer applying a heat exchanger according to a sixth embodiment of the present invention.
FIG. 18 is a schematic cross-sectional view illustrating the venturi used in the aerosol-forming system of FIG. 17.
It is a schematic diagram which shows an example of the contact state of the dispersion medium of an aerosol, and the molecules of a dispersoid.

The purpose of appropriately performing heat exchange with the sprayed heat exchange liquid is realized by a heat exchanger that sprays the heat exchange liquid in the heat exchange container and injects gas to the sprayed heat exchange liquid.

Specifically, the heat exchanger includes a heat exchanger for performing heat exchange therein, a spraying hole for spraying a heated exchange liquid into the heat exchanger container, a spraying hole for injecting gas to the sprayed heat exchanged liquid, and an upstream side of the injected gas. Located at is provided with a discharge port for discharging the heat exchange liquid.

The heat exchanger may be applied as a cooling device or a heating device, a steam generator, a vaporizer, or the like of a heat exchanged liquid.

When the heat exchanger is applied to a heating device, a steam generator, a vaporizer, or the like, a heater is provided that heats the heat exchanger container and serves as a heating space for heating the heat exchanged liquid sprayed inside the heat exchanger container. In this case, the gas injected from the injection port is preferably a heating gas.

The gas injected from the injection port is preferably a spiral swirl flowing in contact with the inner surface of the heat exchange vessel while having a direction opposite to the spray direction of the heat exchange liquid.

In addition, when applying a heat exchanger as a cooling apparatus or a heating apparatus, you may provide the heat exchange part which consists of a mesh-shaped heat transfer tube which opposes the spray port and the other side opposes the spray port.

It is also possible to construct a separation system using a heat exchanger. The separation system has a steam separator connected to the outlet of the heat exchanger. The heat exchanger generates steam of the heat exchanged liquid, and the steam separator separates the steam discharged from the outlet of the heat exchanger into a vapor component and a concentrate.

Using a heat exchanger, it is also possible to construct an aerosol-forming system for forming an aerosol of a first liquid having a relatively high vapor pressure and a second liquid having a relatively low vapor pressure.

The aerosol-forming system includes a flow tube in contact with an outlet of a heat exchanger, a venturi installed in the flow tube, a supply tube communicating with the venturi, and a storage tank communicating with the supply tube.

The heat exchanger sprays the first liquid from the spray port as the heat exchanged liquid and vaporizes it in the heating space to form a dispersion medium for the aerosol, the storage tank stores the second liquid, and the venturi discharges from the outlet of the heat exchanger. The obtained dispersion medium is made to flow, and the 2nd liquid supplied from the storage tank via the supply pipe is sprayed, and it is set as the dispersion for aerosol.

Example 1

[Configuration of Carburetor]

1 is a schematic view of a vaporizer applying a heat exchanger according to a first embodiment of the present invention, Figure 2 is a perspective view of the vaporizer, Figure 3 is a perspective perspective cross-sectional view, Figure 4 is a perspective perspective cross-sectional view from a different surface, Figure 5 is a body of vaporization It is a top view which shows.

The vaporizer 1 as the heat exchanger of the present embodiment is provided, for example, in a semiconductor production line or the like to vaporize and supply a heat-exchanged liquid.

The heat-exchanged liquid is not particularly limited, but for example, acids having corrosive properties such as hydrochloric acid, sulfuric acid, acetic acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, hydrofluoric acid, boric acid, ammonia, potassium hydroxide and sodium hydroxide Solutions such as alkalis, such as alkali salts, and metal salts, such as a silicon chloride, are also high purity water.

The vaporizer | carburetor 1 of this embodiment is equipped with the heat exchanger container 3, the spray nozzle 5 which has the sprayer 5a, the spray nozzle 7 which has the injection hole 7a, and the discharge port 9. As shown in FIG.

The heat exchange vessel 3 is configured to perform heat exchange on the sprayed heat exchange liquid (mist M) which will be described later. Although the material of the heat exchange container 3 is not specifically limited, For example, it consists of metals, such as stainless, and vinyl chloride, fluororesin, etc. which are excellent in chemical-resistance. The heat exchange vessel 3 is composed of a body 11, a top portion 13, and a bottom portion 15.

The body 11 is formed in the shape of a cylinder, and has a cylindrical space portion 12 inside the circumferential wall portion 11a. Although the diameter of the space part 12 is constant, you may change in the axial direction of the heat exchange container 3.

In the circumferential wall portion 11a of the body 11, heaters 17 are arranged in the axial direction at predetermined intervals in the circumferential direction. The heater 17 serves as a heating space for heating the heat exchanger container 3 to heat the sprayed heat exchanger liquid described later in the heat exchanger container 3.

The heater 17 of this embodiment is held in the holding hole 11b which penetrates the circumferential wall part 11a in the axial direction. However, the heater 17 is not particularly limited as long as it can heat the heat exchange vessel 3. For example, the heater 17 may be wound around the body 11.

Both ends in the axial direction of the body 11 are closed by the top part 13 and the bottom part 15.

The top portion 13 constitutes one end of the heat exchange vessel 3. The top portion 13 is formed in a plate shape separate from the body 11, and the outer circumferential portion is fastened and fixed to the body 11 by a bolt 19.

Specifically, the male screw part 19a of the bolt 19 which penetrated the outer peripheral part of the saw part 13 is screwed into the female screw part 11c provided in the body 11. As shown in FIG. In the female threaded portion 11c of the body 11, the body 11 is formed at a plurality of circumferential directions of the circumferential wall portion 11a at a position avoiding the holding hole 11b for the heater. The top portion 13 can also be integrally formed with the body 11 by welding or the like.

The spray nozzle 5 is attached to the center part of the saw part 13. 6 is a cross-sectional view showing the periphery of the spray nozzle 5.

1 and 6, the spray nozzle 5 is supported while penetrating through the top portion 13 of the heat exchanger container 3, and the spray port 5a at the tip is placed in the internal space of the heat exchanger container 3. Do it.

The main body 5b of the spray nozzle 5 is located outside from the top 13. The liquid supply pipe 21 of the to-be-exchanged liquid and the gas supply pipe 23 of the carrier gas are connected to this main-body part 5b.

Accordingly, the spray nozzle 5 is configured to spray the heat-exchanged liquid supplied from the liquid supply pipe 21 into the heat exchange vessel 3 by a carrier gas such as nitrogen supplied from the gas supply pipe 23.

Since the main nozzle 5b is located outside the heat exchange vessel 3, the spray nozzle 5 is hardly affected by the heat of the heat exchange vessel 3 as a whole, and the spray hole 5a is used for spraying the heat exchanged liquid. By cooling.

For this reason, in the spray nozzle 5, the blockage by pyrolysis and thermal polymerization of the to-be-exchanged liquid at the spray port 5a is controlled.

The supply amount of the liquid to be exchanged is controlled by the flow controller 25a provided in the liquid supply pipe 21. Similarly, the supply amount of carrier gas is controlled by the flow controller 25b provided in the gas supply pipe 23.

The spray center axis X of the spray nozzle 5 is along the axial direction of the heat exchange vessel 3 in this embodiment, whereby the spraying direction is directed toward the other end of the heat exchange vessel 3 along the axial direction. It is. In addition, the spray center axis | shaft X can also be inclined with respect to the axial direction of the heat exchange container 3.

The spray flow rate and spray angle of the spray nozzle 5 are not particularly limited, but are about 45 degrees and about 15 degrees in this embodiment, respectively.

1 to 4, the bottom portion 15 constitutes the other end of the heat exchange vessel (3). This bottom part 15 is formed in block shape, and the outer peripheral part is fastened to the body 11 by the bolt 27, and is fixed.

Specifically, the male screw part 27a of the bolt 27 which penetrated the outer peripheral part of the bottom part 15 similarly to the top part 13 is screwed into 11 d of female screw parts provided in the body 11. As shown in FIG. The female threaded portion 11d of the body 11 is formed at a plurality of circumferential directions of the circumferential wall portion 11a of the body 11 at a position outside the holding hole 11b for the heater.

The bottom portion 15 has a recess 29 formed therein. The recess 29 communicates with the space 12 of the body 11, and together with the space 12 constitutes an internal space of the heat exchange vessel 3. The recessed part 29 is formed with the 1st part 29a and the 2nd part 29b.

The first portion 29a of the recess 29 has the same diameter adjacent to the space 12 of the body 11. The second portion 29b of the recess 29 has a tapered shape in which the diameter gradually decreases toward the other end of the heat exchange vessel 3. Although the diameter of the second portion 29b of the present embodiment is reduced in a parabolic shape, the second portion 29b may be configured to decrease in diameter in a straight line.

The bottom part 15 is provided with the injection nozzle 7 and the discharge port 9.

The injection nozzle 7 injects gas to the heat-exchanged liquid sprayed from the spray nozzle 5. The gas is heated air in this embodiment, but may be other gas such as nitrogen. In the case of using another gas, it is preferable to use the same gas as the carrier gas, since it does not have to affect the heat-exchanged liquid. In addition, the gas to eject does not need to be heated.

The injection nozzle 7 of this embodiment penetrates the bottom portion 15 in and out, and is connected to the injection gas supply pipe 31 outside the heat exchange vessel 3, so that the injection hole 7a is recessed in the heat exchange vessel 3. It is against the inner surface of the 1st part 29a of (29).

The injection gas supply pipe 31 is connected to the injection nozzle 7 while the flow controller 25c and the heat exchanger 33 are connected, and heat the injected gas through the heat exchanger 33 under the control of the flow controller 25c. Supply. The supplied gas is injected from the injection port 7a of the injection nozzle 7.

In addition, although the heat exchanger 33 may use the heat exchanger which this applicant proposed by PCT / JP2016 / 003080, it is sufficient as a general heat exchanger.

The injection hole 7a of the injection nozzle 7 is inclined toward one end side of the heat exchange vessel 3 with respect to the radial direction of the heat exchange vessel 3 in the direction of injection of the gas from the injection hole 7a. The gas flows along the inner surface of the gas.

7 is a conceptual diagram showing the injection direction of the injection hole 7a of the injection nozzle 7, Figure 7 (A) is a lying angle θ1 with respect to the inner surface of the heat exchange vessel 3, Figure 7 (B) is a heat exchange vessel ( The inclination angle θ2 is shown on the injection nozzle 5 side in 3).

7A and 7B conceptually show the angle of the injection port 7a. Therefore, as in the injection nozzle 7 of this embodiment, in the form in which the front-end | tip is curved, it refers to the direction which the injection port 7a is aimed at, and the angle with respect to the radial direction Y of the heat exchange container 3.

As shown in Fig. 7, in this embodiment, the jetting direction of the jetting port 7a is about 45 degrees for the lay angle θ1 and about 75 degrees for the inclination angle θ2. Further, the lying angle θ1 and the inclination angle θ2 can be appropriately changed in accordance with the flow rate of the heat exchanged liquid and the like.

The gas injected from the injection hole 7a of the injection nozzle 7 turns swirling along the inner surface of the heat exchange vessel 3 to become a swirl SF directed toward one end of the heat exchange vessel 3. That is, the swirl (SF) represents a spiral in contact with the inner surface of the heat exchange vessel 3 while having a directivity in the opposite direction to the spray direction of the heat exchange liquid.

The central axis of the swirl flow SF follows the axial direction of the heat exchange vessel 3, whereby the injection direction of the swirl flow SF is directed toward one end of the heat exchange vessel 3 along the axial direction. Therefore, the spray direction of swirl flow SF is opposite to the spray direction of a to-be-exchanged liquid.

However, the spraying direction of the swirl flow SF and the spraying direction of the heat-exchanging liquid may be reversed. For example, the angle between both directions may be obtuse by making the spraying direction inclined with respect to the axial direction. .

A discharge port 9 is provided at the other end side of the heat exchange vessel 3 in the axial direction than the injection nozzle 7. As a result, the discharge port 9 is located on the upstream side of the swirl flow SF. The upstream side of swirl (SF) means that it is an upstream side rather than the downstream side of swirl (SF) which is a part which collides with the sprayed heat exchange liquid.

Therefore, not only the part upstream than the injection port 7a of the swirl flow SF but the inside of the swirl flow SF downstream from the injection port 7a is included in the upstream of the swirl flow SF.

The outlet 9 of the present embodiment is formed by opening a hole in the heat exchange vessel 3 that extends in the axial direction through the inside and outside of the bottom portion 15 of the heat exchange vessel 3. The discharge port 9 is located in a radial direction from the shaft center of the heat exchange vessel 3. The discharge pipe 35 is attached to the outer end of the discharge port 9. By this discharge pipe 35, the vaporized heat-exchanged liquid is conveyed to the next process, such as semiconductor manufacture.

[Operation of Carburetor]

The vaporizer 1 of this embodiment heats the heat exchanger container 3 by the heater 17 by control of the controller which is not shown in figure, and makes the inside of the heat exchanger container 3 predetermined temperature. Then, through the control according to the controllers 25a, 25b, and 25c, the sprayed fluid SF is sprayed from the spray nozzle 5, and the swirl flow SF is sprayed from the spray nozzle 7 to the sprayed heat exchanged liquid. Let's do it.

The sprayed heat-exchanged liquid (mist M) collides with the swirl (SF) while performing heat exchange with the heating space in the heat exchange vessel (3). At this time, since the swirl SF is a heating gas, heat exchange is performed between the mist M and the swirl SF of the heat-exchanged liquid.

Therefore, the mist M of the heat-exchanged liquid is not only exchanged with the heating space in the heat exchange vessel 3 but also with the swirl SF, so that vaporization is promoted.

In addition, the mist M of the heat-exchanged liquid is trapped by the swirl flow SF and transported away from the discharge port 9, so that adhesion to the inner surface of the heat exchange vessel 3 is suppressed and inside the heat exchange vessel 3 The residence time at will be longer.

In particular, since the swirls SF come into contact with the inner surface of the heat exchange vessel 3, the mist M of the heat-exchanged liquid is reliably captured near the inner surface of the heat exchange vessel 3, and the inner surface of the heat exchange vessel 3 is secured. Can be reliably suppressed. In addition, the swirl flow SF carries out a spiral transfer of the captured mist M of the heat-exchanged liquid along the inner surface of the heat exchange vessel 3, whereby the heat exchange between the inner surface of the heat exchange vessel 3 and the mist M is performed. In this way, the heat on the inner surface of the heat exchange vessel 3 can be effectively used to promote vaporization. Moreover, by carrying the mist M spirally, a residence time can be reliably lengthened.

Therefore, in this embodiment, vaporization can be carried out while reliably retaining the mist M of the heat-exchanged liquid. In addition, even if the gas injected from the injection nozzle 7 is not a swirl flow SF but linearly injected, the residence time of the mist M of the heat-exchanged liquid may be long.

In addition, when the mist M is forcibly held as described above, a difference in density occurs between the low-temperature molecules of the mist M immediately after being sprayed and the high-temperature molecules of the mist M heated by the injected gas, and the high temperature during the retention. Heat can be efficiently absorbed from the molecule by low-temperature molecules, and the mist M of the heat-exchanged liquid can be vaporized more reliably.

Even if the mist M of the to-be-exchanged liquid adheres to the inner surface of the heat exchange vessel 3, the swirl SF separates and captures the to-be-exchanged liquid from the inner surface of the heat exchange vessel 3.

Therefore, in this embodiment, it is possible to evaporate while holding the heat exchange liquid more reliably.

Since the vaporized to-be-exchanged liquid largely rises in volume, the pressure in the to-be-exchanged container 3 is greatly increased, so that even if a swirl flow SF opposite to the outlet 9 is present, Discharged.

[Effect of Example 1]

The vaporizer 1 to which the heat exchanger of the present embodiment is applied includes a heat exchanger vessel 3 for performing heat exchange therein, a spray nozzle 5 for spraying a heat exchanger liquid into the heat exchanger container 3, and a mist M of the sprayed heat exchanger liquid. And a discharge nozzle 9 for discharging the heat exchange liquid, located at an upstream side of the injected gas.

Therefore, in the vaporizer | carburetor 1, the residence time of the mist M of the sprayed to-be-exchanged liquid can be lengthened by the gas injected, and the heat exchange with respect to the to-be-exchanged liquid in the inside of the heat exchange container 3 is performed suitably. It is possible to vaporize the heat exchange liquid reliably.

In addition, in the present embodiment, when the mist M is forcibly held as described above, a density difference occurs between the low-temperature molecules of the mist M immediately after being sprayed and the high-temperature molecules of the mist M heated by the injected gas. During the residence, heat can be efficiently absorbed from the high temperature molecules to the low temperature molecules, and the heat exchange liquid can be vaporized more reliably.

To this end, in the vaporizer 1 of the present embodiment, even when generating gas for thin film formation, for example, there is no possibility that the heat-exchanged liquid adheres to the heat exchange container 3 and surrounds the outlet 9, thereby prolonging life. Can be planned. In addition, in the present embodiment, the main body 5b of the spray nozzle 5 is exposed to the outside of the heat exchange vessel 3, and as a whole, it is difficult to be affected by the heat of the heat exchange vessel 3, and the spray hole 5a is Since it cools by spraying of a to-be-exchanged liquid, clogging of the spray port 5a can be suppressed and it can further extend life.

Further, in the present embodiment, even if the heat exchanged liquid reaching the heat exchange vessel 3 is large in capacity, the heat exchanged liquid is reliably retained by retaining the mist M of the heat exchanged liquid in the heat exchange vessel 3 as described above. It can be vaporized.

In addition, since the heat exchanged liquid can be vaporized reliably by keeping the mist M of the heat exchanged liquid in the heat exchange container 3 as described above, the heating temperature of the heater 17 that heats the heat exchange container 3. It can be reduced.

As a result, in the apparatus for vaporizing the heat-exchange liquid which corrodes metals, such as a semiconductor manufacturing apparatus, it is necessary to form the heat exchange container 3 using resin which is excellent in chemical-resistance, By reducing the heating temperature, damage due to heat of the resin heat exchange vessel 3 can be suppressed.

For example, in HMDS (hexamethyldisilazane) treatment for surface treatment of wafers, the HMDS liquid, which is a heat-exchange liquid, is usually vaporized using a bubbling method. There is also the problem of this instability.

On the other hand, in the vaporizer | carburetor 1 of this embodiment, since the heat exchange container 3 is made of resin, it can respond to an HMDS process, Moreover, since it is also possible to respond to a large flow volume up to about 50g per minute, it is useful for HMDS process.

In the present embodiment, since the mist M of the heat exchanged liquid is retained in the heat exchange vessel 3 as described above, the heat exchanged liquid can be reliably vaporized. The ratio can be suppressed.

Furthermore, in the present embodiment, the structure is simple, so that the number of parts can be greatly reduced.

Further, the outlet 9 of the present embodiment is conveniently located in the radial direction from the shaft center of the heat exchange vessel 3. Therefore, even when the to-be-heated liquid exchanged on the inner surface of the heat exchange container 3 adheres and flows down, it can reduce the heat-exchange liquid which reaches the discharge port 9, and can contribute to long life.

Since the vaporized to-be-exchanged liquid largely rises in volume, even if gas is injected so that the pressure in the to-be-exchanged container 3 is largely raised and the sprayed heat-exchanged liquid is separated from the outlet 9, the outlet 9 Can be reliably discharged.

In the present embodiment, the gas injected from the injection nozzle 7 is a spiral swirl (SF) tangential to the inner surface of the heat exchange vessel 3 while having a directivity in the opposite direction to the spray direction of the heat exchange liquid 3. Therefore, the mist M of the to-be-exchanged liquid can be reliably captured in the vicinity of the inner surface of the heat exchange vessel 3, and the adhesion to the inner surface of the heat exchange vessel 3 can be reliably suppressed. In addition, since the captured mist M of the heat-exchanged liquid is helically conveyed along the inner surface of the heat exchange vessel 3, the heat exchange between the inner surface of the heat exchange vessel 3 and the mist M is performed. The inner surface of 3) can be used effectively, and the residence time can be reliably lengthened.

Therefore, in this embodiment, heat exchange with respect to the heat exchanged liquid inside the heat exchange container 3 can be made more appropriate.

In this embodiment, since the swirl (SF) injected from the injection nozzle is heated air, the heat exchange is also performed between the mist (M) and the swirl (SF) of the to-be-exchanged liquid, thereby facilitating vaporization of the to-be-exchanged liquid. .

Example 2

8 is a schematic view showing a vaporizer to which a heat exchanger according to Embodiment 2 of the present invention is applied, and FIG. 9 is a plan view showing a bottom portion of the vaporizer of FIG. 8. The second embodiment omits redundant description by using the same reference numeral or the same reference numeral A in the same reference numerals.

1 A of the vaporizer | carburetor of this embodiment changes the shape of the recessed part 29A of the bottom part 15A of 3 A of heat exchange containers with respect to Example 1. As shown in FIG.

29A of recesses are formed in parabolic shape as a whole, and a part of inner surface of body 11A is also formed in parabolic form continuous to the inner surface of recessed part 20A.

11 A of these bodies and the inner surface of the recessed part 29A of the bottom part 15A, ie, the inner surface of 3 A of heat exchange containers, are coat | covered with the resin liner 36 detachably attached.

The liner 36 is a cylindrical body made of vinyl chloride, fluorine resin, or the like having excellent chemical resistance, and in the present embodiment, the body 11A of the metal heat exchange vessel 3A and the recess 29A of the bottom portion 15A are formed. It is fitted inside.

The liner 36 protects the heat exchange container 3A from the heat exchanged liquid and can be exchanged when the heat exchanged liquid adheres and the compound is deposited. Note that the liner 36 may be omitted as in the first embodiment, or may be applied to other embodiments. In the present embodiment, when the liner 36 is omitted, the heat exchange vessel 3A may be formed of resin or metal depending on the type of the heat exchange liquid.

The injection nozzle 7A is along the inner surface of the recess 29A in the circumferential direction and is inclined toward one end of the heat exchange vessel 3A with respect to the radial direction of the heat exchange vessel 3A.

As a result, in the present embodiment, the air blown out from the injection port 7Aa of the injection nozzle 7A is spirally enlarged along the inner surface of the recess 29A to easily generate the swirl flow SF.

In the vaporizer 1A of this embodiment, the inner surface of the heat exchanger container 3A is detachably covered by the liner 36 so that the heat exchanger liquid is made of metal even when the heat exchanger container 3A is made of metal. It is also applicable to liquids which corrode, and it is also possible to pray for long life.

In addition, in this embodiment, the same effects as in the first embodiment can be obtained.

Example 3

FIG. 10 is a schematic view of a heating cooling apparatus to which a heat exchanger according to Embodiment 3 of the present invention is applied, and FIG. 11 is an enlarged view partially showing the heating cooling apparatus of FIG. In Embodiment 3, redundant description is omitted by using the same reference numeral or the same reference numeral B as the same reference numeral in the component corresponding to the first embodiment.

The heat cooling device 1B as the heat exchanger of this embodiment is used for temperature control of the heat exchanged liquid, and heats or cools the heat exchanged liquid to a desired temperature. This heating and cooling device 1B includes a heat exchanger 3B, a spray nozzle 5B, a spray nozzle 7B and a discharge port 9B.

The heat exchanger 3B of this embodiment is formed in the shape of a box, and a spray nozzle 5B is provided at one end, and the storage part 37 which stores the to-be-exchanged liquid after heating or cooling is partitioned at the other end. The storage part 37 is provided with the discharge port 9B.

The heat exchanger container 3B is provided with a heat exchanger 39 facing the spray nozzle 5B.

12 is a cross-sectional view of the heat exchange vessel 3B showing the heat exchange portion 39 of the heat cooling device 1B of FIG.

The heat exchange part 39 arrange | positions the heat exchanger tube 39a arrange | positioned in mesh shape in multiple layers like FIG. 11 and FIG. 12, and connects the heat exchanger tube 39a of each layer mutually. The heat transfer pipe 39a of the heat exchanger 39 is drawn out of the heat exchange vessel 3B and connected to the heat pump 41. The heat pump 41 sends a heat medium to the heat exchange part 39 via the heat exchanger tube 39a.

Between the heat exchange part 39 and the storage part 37, the injection nozzle 7B is provided in the heat exchange container 3B.

FIG. 13 is a cross-sectional view of the heat exchange container 3B showing the arrangement of the injection nozzles 7B of the heat cooling device 1 of FIG.

11 and 13, the injection nozzle 7B is provided in multiple numbers in the circumferential direction of the heat exchange container 3B. In the present embodiment, the heat exchange vessel 3B is formed in a tubular shape in which the inner and outer circumferences are formed in a rectangular cross section, and two injection nozzles 7B are arranged on each side of the heat exchange vessel 3B. Each injection nozzle 7B is inclined toward the heat exchanger 39.

FIG. 14 is a schematic view showing the injection nozzle and the heat exchange part of the heat cooling device 1 of FIG.

In the heat-cooling apparatus 1 of this embodiment, as shown in FIG. 14, when the heat exchange liquid is sprayed from the spray nozzle 5B, the mist M of the heat exchange liquid reaches the heat exchange part 39. In the heat exchange part 39, heat exchange is performed between the mist M of a to-be-exchanged liquid and the heat exchanger tube 39a, and heating or cooling of a to-be-exchanged liquid is performed.

At this time, the gas from the injection nozzle 7B collides with the mist M of the heat exchanged liquid, the mist M of the heat exchanged liquid is trapped by the injected gas, and the residence time in the heat exchange vessel 3 is maintained. This will be longer.

In particular, in this embodiment, since the heat exchange part 39 is comprised by the mesh heat-transfer tube 39a, turbulence generate | occur | produces in the heat exchange part 39, and the mist M of the to-be-exchanged liquid in the heat exchange part 39 Heat exchange is performed between the heat exchanger tube 39a of the heat exchanger part 39 while the heat stays.

Moreover, by contacting the mist M before heat exchange immediately after being sprayed during the staying contact with the mist M after heat exchange, it is possible to more reliably perform heat exchange due to the density difference between the molecules of both mists M. FIG.

Therefore, in this embodiment, heating or cooling can be performed while reliably retaining the mist M of the heat-exchanged liquid.

The heat exchanged liquid heated or cooled by the heat exchanger 39 flows out of the heat exchanger 39 and is stored in the storage 37. The heat-exchanged liquid after the stored heating or cooling is discharged from the outlet 9.

The heat-cooling apparatus 1 to which the heat exchanger of the present embodiment is applied includes a heat exchange vessel 3B for performing heat exchange therein, a spray nozzle 5B for spraying a heat exchange liquid in the heat exchange vessel 3B, and a sprayed heat exchange liquid. An injection nozzle 7B for injecting gas, and an outlet 9B for discharging the heat-exchanged liquid, which is located upstream of the injected gas.

Therefore, in the heat-cooling apparatus 1B, the residence time of the to-be-exchanged liquid sprayed by the injected gas can be lengthened, and heat exchange with respect to the to-be-exchanged liquid inside the heat exchange container 3 can be performed appropriately, The heat exchange liquid can be reliably heated or cooled.

In this embodiment, the heat exchange part 39 is a mesh heat-transfer tube 39a, and the heat exchange liquid is sprayed by the spray nozzle 5B facing the heat exchange part 39 from one side, and the injection nozzle facing the other side ( Since gas is injected by 7B), the heat exchange part 39 can generate turbulence, can hold | maintain the mist M of a to-be-exchanged liquid, and can make heat exchange more appropriately.

Example 4

15 is a schematic diagram showing a heating / cooling apparatus to which a heat exchanger according to Embodiment 4 of the present invention is applied. The fourth embodiment omits redundant description by using the same reference numeral or the same reference numeral C in the same reference numerals.

The heat-cooling device 1C as the heat exchanger of this embodiment omits the heat-exchange unit 39 from the heat-cooling device 1C of the third embodiment, and injects cold or hot air from the injection nozzle 7C, thereby exchanging heat. It is to cool or heat the liquid to the desired temperature.

That is, in the injection nozzle 7C of this embodiment, the heat exchange part 40 for cooling or heating gas is provided in the supply path 38 for supplying gas. The heat exchange part 40 is connected to the heat pump 42 and cools or heats the gas in the supply path 38 by the heat medium from the heat pump 42.

In the heat-cooling apparatus 1C, when the heat exchange liquid is sprayed from the spray nozzle 5C, gas is injected from the spray nozzle 7C to the mist M of the heat exchange liquid. Since the injected gas is cooled or heated by the heat exchange part 40, it collides with the mist M and performs heat exchange. Thereby, the mist M can be heated or cooled.

In addition, when the gas collides with the mist M of the heat exchanged liquid, the mist M of the heat exchanged liquid is trapped by the injected gas and stays in the heat exchange vessel 3.

At this time of stay, a density difference occurs between the hot and cold molecules of the mist M immediately after being sprayed and the mist M cooled or heated by the sprayed gas.

By such a difference in density, heat can be efficiently absorbed from high temperature molecules to low temperature molecules, and the mist M of the heat-exchanged liquid can be reliably heated or cooled.

Therefore, in the heat-cooling device 1C, the heat exchanged liquid sprayed by the injected gas is forcibly held while cooling or heating, and the heat exchanged liquid before and after cooling or heating is brought into contact with each other to ensure that the heat-exchanged liquid is reliably held. It can be cooled or heated.

In addition, in the present embodiment, the same effects as those of the third embodiment can be obtained.

Example 5

16 is a schematic diagram of a separation system having a steam generator using a heat exchanger according to Embodiment 5 of the present invention. The fifth embodiment omits redundant description by using the same reference numeral or the same reference numeral D in the same reference numerals.

The separation system 43 of the present embodiment uses the first and second steam generators 1Da and 1Db which are heat exchangers having the same configuration as the vaporizer 1 of the first embodiment. In addition, in the steam generators 1Da and 1Db, the temperature of the heater 17 is set lower than that of the vaporizer 1 of the first embodiment, and the vaporized heat exchange liquid sprayed into the heat exchange vessel 3 is vaporized without vaporization. will be.

In the separation system 43, a storage tank 45 for the heat exchange liquid to be separated is connected to the liquid supply pipe 21D on the upstream side of the first steam generator 1Da. On the downstream side of the first steam generator 1Da, a first steam separator 47a is connected to the discharge pipe 35D.

The 1st steam separator 47a isolate | separates a vapor component and a concentrated liquid, for example by changing a specific gravity. The steam extraction pipe 49 of the first steam separator 47a is wound in a coil shape on the outer circumference of the heat exchange vessel 3D of the first steam generator 1Da. Thereby, it is the structure which supplementally heats the heat exchange container 3D using steam.

The liquid extraction pipe 51 of the first steam separator 47a functions as a liquid supply pipe on an upstream side of the second steam generator 1Db. The second steam separator 47b is connected to the discharge pipe 35D on the downstream side of the second steam generator 1Db.

On the outer circumference of the heat exchange vessel 3D of the second steam generator 1Db, the steam outlet pipe 49 of the first steam separator 47a which has passed through the heat exchange vessel 3D of the first steam generator 1Da. This coil is wound up. Accordingly, the second steam generator 1Db is also configured to be auxiliaryly heated using steam.

The second steam separator 47b has the same configuration as the first steam separator 47a and has a smaller capacity than the first steam separator 47a. In the second steam separator 49b, the steam extraction pipe 49 is connected to the discharge destination and the like, and the liquid extraction pipe 51 reaches the storage tank 53 of the concentrated liquid.

In this separation system 43, for example, when a heavy metal contamination solution as a heat exchanged liquid is supplied to the first steam generator 1Da, steam of the heavy metal pollution solution is generated by the same process as in the vaporization of Example 1.

The generated steam is sent to the first steam separator 47a via the discharge pipe 35 of the first steam generator 1Da. In the first steam separator 47a, steam and the concentrate are separated from the specific gravity.

The separated steam is withdrawn from the steam outlet pipe 49 of the first steam separator 47a, and the heat exchanger 3D of the first steam generator 1Da and the heat exchanger of the second steam generator 1Db. After used for heating of (3D), it is sent to the discharge destination.

On the other hand, the separated concentrate is sent from the liquid extraction pipe 51 to the second steam generator 1Db, and generates steam for the concentrated liquid similarly to the first steam generator 1Da.

The generated steam is sent to the second steam separator 47b via the discharge pipe 35D, and separated from the difference in specific gravity in the second steam separator 47b into steam and concentrate.

The separated steam is taken out from the steam extraction pipe 49 of the second steam separator 47b and discharged to the discharge destination, and the separated concentrate is sent to the storage tank 53.

As described above, in the present embodiment, heavy metal contamination solutions and the like can be purified by separation. In addition, although the case of the heavy metal contamination solution was demonstrated as a heat exchange liquid, it is not limited to this, If it is a solution which requires separation and purification, it can be set as a heat exchange liquid.

For example, it is possible to separate radioactive material (concentrate) and purified water (steam) using the heat exchanged liquid of the radioactive contaminated water separation system 43.

In addition, the separation system 43 of this embodiment can be used also as a concentrator. For example, it is possible to concentrate the drug or the like by using an extract or a solution such as a drug as the heat-exchanged liquid.

Example 6

FIG. 17 is a schematic view of an aerosol-forming system having a vaporizer applying a heat exchanger according to a sixth embodiment of the present invention, and FIG. 18 is a schematic cross-sectional view showing a venturi used in the aerosol system of FIG. In addition, the sixth embodiment omits redundant description by using the same reference numerals in the components corresponding to the first embodiment.

The aerosol-forming system 55 of the present embodiment includes a vaporizer 1 as a heat exchanger, flow tubes 57 and 58, a venturi 59, a supply tube 61, a storage tank 63, and a relatively high vapor pressure. It forms the aerosol AS of the liquid L1 and the second liquid L2 having a relatively low vapor pressure.

The vaporizer 1 has the same configuration as the vaporizer 1 of the first embodiment. On the upstream side of the vaporizer 1, a liquid supply pipe 21 and a gas supply pipe 23 for carrier gas are connected as in the first embodiment. A storage tank 65 for storing the first liquid L1 is connected to the liquid supply pipe 21.

The first liquid L1 is heptane in this embodiment. However, the first liquid L1 may be a substance having a higher vapor pressure than the second liquid L2 and is not limited to heptane.

The vaporizer 1 sprays the first liquid L1 as a heat exchange liquid from the spray port 5a (see FIG. 1) of the spray nozzle 5, and sprays the first liquid L1 in the heating space of the vaporizer 1. (L1) is vaporized to form a dispersion medium DM for the aerosol AS. The formed dispersion medium DM is discharged from the discharge port 9 (see FIG. 1) of the vaporizer 1.

On the downstream side of the vaporizer 1, a flow pipe 57 connected to the discharge port 9 is provided. The flow tube 57 flows the dispersion medium DM discharged from the vaporizer 1. The flow tube 57 flows the dispersion medium DM discharged from the vaporizer 1. The venturi 59 is provided in the flow pipe 57.

The venturi 59 of this embodiment is configured as a unit. That is, in the venturi 59, the top portion 59b and the bottom portion 59c are attached to both ends of the tubular venturi body 59a by bolts 59d.

The venturi body 59a, the top portion 59b, and the bottom portion 59c are made of metal such as stainless steel. Inside the venturi body 59a, a first chamber 59aa, a fastening part 59ab, and a second chamber 59ac are formed.

A flow pipe 57 connected to the top portion 59b communicates with the first chamber 59aa, and the dispersion medium DM flows from the flow pipe 57. The inner diameter of the first chamber 59aa is larger than the inner diameter of the flow tube 57 so as to lower the flow velocity of the introduced dispersion medium DM.

The tightening portion 59ab is a portion that locally reduces the inner diameter of the venturi body 59a. That is, the tightening part 59ab has a smaller inner diameter than the first chamber 59aa. In the present embodiment, the tightening portion 59ab gradually decreases the inner diameter of the first chamber 59aa, and after the inner diameter becomes small, the inner diameter gradually increases, and the transition to the second chamber 59ac occurs.

The second chamber 59ac has an internal diameter equivalent to that of the first chamber 59aa, and the dispersion medium DM introduced from the tightening part 59ab and the aerosol AS according to the dispersoid DS described later. Decrease the flow rate. In addition, the inner diameter of the second chamber 59ac may form a coating made of fluorine or the like for preventing deposition of the powder DM.

Aerosol AS flows out from the 2nd chamber 59ac from the flow pipe 58 connected to the bottom part 59c.

The venturi 59 of this embodiment is provided with a venturi heater 67. The venturi heater 67 is to heat the venturi 59. The venturi heater 67 of this embodiment is comprised by the cartridge heater, for example, and is embedded in the pipe wall 60 of the venturi 59.

However, the venturi heater 67 can employ | adopt another heater, and it is good also as a structure etc. which wind around the periphery of the venturi 59. What is necessary is just to change the structure of this venturi heater 67 suitably according to the vapor pressure etc. of the 1st liquid L1 and the 2nd liquid L2.

The supply pipe 61 communicates with the venturi 59 to supply the second liquid L2. In this embodiment, one end of the supply pipe 61 is connected to the tightening part 59ab of the venturi body 59a and has an opening 61a facing the fitting part 59ab.

In the supply pipe 63, a flow controller 61b is provided, and the supply amount of the second liquid L2 is controlled. The other end of this supply pipe 61 communicates with the storage tank 63.

The second liquid L2 is stored in the storage tank 63. The second liquid L2 is made of silicon in this embodiment. However, the second liquid L2 may be a substance having a lower vapor pressure than the first liquid L1 and is not limited to silicon.

In addition, since silicone is highly viscous, the silicone as the second liquid L2 is diluted by mixing about 30 wt% of heptane as a solvent. However, dilution is not necessary when using a low viscosity material as the second liquid L2.

The pressure tube 63a is connected to the storage tank 63. A pressurized gas, for example, nitrogen similar to a carrier gas is supplied from this pressurizing tube 63a, and it pressurizes in order to supply the 2nd liquid L2 in the storage tank 63. FIG.

As described above, the aerosol-forming system 55 sprays and vaporizes the first liquid L1 into the heating space inside the vaporizer 1 to form a dispersion medium DM for the aerosol AS, and The dispersion medium DM is discharged from the discharge port 9 of the vaporizer 1.

The discharged dispersion medium DM flows in the flow tube 57 and flows into the venturi 59. The dispersion medium DM introduced into the venturi 59 is first filled by the first chamber 59aa of the venturi main body 59a, so that the flow rate decreases, and the flow velocity increases when passing through the fastening portion 59ab. In this tightening part 59ab, the second liquid L2 is supplied via the supply pipe 61.

The supplied second liquid L2 is sprayed (particulated) from the opening 61a of the supply pipe 61 into the fastening portion 59ab by the dispersion medium DM to form dispersoid DS, and directly into the dispersion medium DM. Mixed with As a result, an aerosol (AS) is formed by the dispersion medium (DM) and the dispersoid (DS).

At the time of formation of such aerosol AS, heat is applied by contact between molecules from the dispersion medium DM to the dispersoid DS. It is a schematic diagram which shows an example of the contact state of the molecule | numerator of the dispersion medium DM and the dispersoid DS of an aerosol (AS).

In addition, since the dispersion medium DM and the dispersoid DS are compressed in the venturi 59, heat can be reliably applied from the dispersion medium DM to the dispersion DS.

In addition, in this embodiment, since the venturi 59 is heated by the venturi heater 67, the heat applied to the dispersoid DS from the dispersion medium DM can be suppressed from being absorbed by the venturi 59. More reliably, heat can be applied from the dispersion medium DM to the dispersoid DS.

In addition, what is necessary is just to set the heating temperature of the venturi 59 in the range which can suppress that the heat applied to the dispersoid DS from the dispersion medium DM is absorbed by the venturi 59, For example, 60 degreeC-80 degreeC Etc. However, the heating temperature of the venturi can be appropriately changed in accordance with the first liquid L1 and the second liquid L2.

In this way, by applying heat from the dispersion medium DM to the dispersoid DS, the particles (molecules) of the dispersoid DS are bonded to the particles (molecules) of the dispersion medium DM, The viscosity of silicone can be reduced.

By combining the dispersion medium DM and the dispersion DS, the dispersion DS is reliably transported, and the dispersion DS in the vicinity of the opening 61a of the supply pipe 61 or in the second chamber 59ac. Can be suppressed from being deposited. In addition, due to the decrease in viscosity of the dispersoid DS, deposition of the dispersoid DS in the vicinity of the opening 61a of the supply pipe 61 or in the second chamber 59ac can be suppressed more reliably.

In this way, when the aerosol AS formed in the chamber 59 flows downstream from the tightening portion 59a of the venturi 59, the dispersion combined with the dispersion medium DM and the dispersion DS or the dispersion medium DM. The vagina DS can be released from the compression and mixed to uniform the density of the aerosol AS.

As described above, the aerosol-forming system 55 of the present embodiment communicates with the flow tube 57 connected to the outlet 9 of the vaporizer 1, the venturi 59 provided with the flow tube 57, and the venturi 59. The supply pipe 61 and the storage tank 63 which communicates with the supply pipe 61 are provided. The vaporizer 1 sprays the first liquid L1 having a relatively high vapor pressure from the spray port 5a as a heat exchange liquid, and vaporizes it in a heating space to form a dispersion medium DM for the aerosol AS, and the storage tank. 63 stores the second liquid L2 having a relatively low vapor pressure, and venturi 59 flows the dispersion medium DM discharged from the outlet 9 of the vaporizer 1, and supplies the supply pipe from the storage tank 63. The second liquid L2 supplied via 61 is sprayed to obtain a dispersoid DS for the aerosol AS.

Therefore, in the present embodiment, the first liquid L1, which is relatively easy to vaporize, is vaporized to form a dispersion medium DM, and the second liquid L2, which is relatively difficult to vaporize in the venturi 59, is sprayed (particulate). By using dispersoid DS, the aerosol AS can be easily and reliably formed.

In the formation of the aerosol (AS), the particles (molecules) of the dispersoid (DS) are dispersed in the dispersion medium (DM) by applying heat by contacting molecules from the dispersion medium (DM) to the dispersoid (DS). In addition to bonding to (molecules), it is possible to reduce the viscosity of silicon, which is a dispersoid (DS).

Therefore, in this embodiment, it is possible to suppress the deposition of the silicon, which is the dispersoid DS, in the vicinity of the opening 61a of the supply pipe 16 or in the second chamber 59ac.

In addition, in this embodiment, since the dispersion medium DM and the dispersion DS are compressed in the venturi 59, heat can be reliably applied from the dispersion medium DM to the dispersion DS.

In addition, when the aerosol (AS) formed in the venturi 59 flows downstream from the tightening portion 59a of the venturi 59, the aerosol AS is released from compression to mix the dispersion medium DM and the dispersion DS to uniform the density. Can be.

In this embodiment, since the venturi heater 67 for heating the venturi 59 is provided, the heat applied to the dispersoid DS from the dispersion medium DM can be suppressed from being absorbed by the venturi 59, thereby making it more reliable. It is possible to apply heat from the dispersion medium (DM) to the dispersoid (DS).

1, 1A vaporizer (heat exchanger)
1B heating chiller (heat exchanger)
1Da, 1Db Steam Generator
3, 3A, 3B, 3D heat exchanger
5a, 5Aa atomizer
7a, 7Aa nozzle
9, 9B outlet
11, 11A body
17 heater
39 heat exchanger
39a heat pipe
43 Separation System
47a, 47b steam separator
55 Aerosol Forming System
57, 58 flow pipe
59 Venturi
59aa 1st chamber
59ab fastener
59ac 2nd chamber
61 supply line
63 reservoir
67 Venturi Heaters
AS aerosol
DM dispersion medium
DS Dispersion

Claims (10)

A heat exchanger container for internal heat exchange,
A spraying hole for spraying the heat-exchanging liquid in the heat-exchange container,
An injection hole for injecting a gas to the sprayed heat exchange liquid;
And an outlet for discharging the heat-exchanged liquid located on an upstream side of the injected gas. The method according to claim 1,
And a heater for heating the heat exchanger to form a heating space for heating the sprayed heat exchanged liquid in the heat exchange vessel. The method according to claim 2,
The gas injected from the injection port is a spiral swirl flowing in contact with the inner surface of the heat exchange container while having a directivity in the opposite direction to the spray direction of the heat exchange liquid. The method according to claim 2 or 3,
The gas injected from the injection port is a heat exchanger, characterized in that the heated gas. The method according to any one of claims 1 to 4,
The heat exchanger is made of metal,
And an inner surface of the heat exchanger container is coated with a resin liner detachably mounted. The method according to claim 1,
A heat exchanger comprising: a heat exchanger having one side facing the spray hole and the other side having a mesh-shaped heat transfer tube facing the spray hole. In the separation system provided with the heat exchanger of any one of Claims 1-4,
A steam separator in contact with an outlet of the heat exchanger,
The heat exchanger generates steam of the heat exchanged liquid,
The steam separator is a separation system, characterized in that for separating the steam discharged from the outlet of the heat exchanger into a vapor component and a concentrate. An aerosol-forming system comprising the heat exchanger according to any one of claims 2 to 4 to form an aerosol of a first liquid having a relatively high vapor pressure and a second liquid having a relatively low vapor pressure,
A flow pipe connected to an outlet of the heat exchanger,
A venturi connected to the flow tube,
A supply pipe communicating with the venturi;
A storage tank communicating with the supply pipe,
The heat exchanger sprays the first liquid from the spray port as the heat exchanged liquid to vaporize in the heating space to form a dispersion medium for the aerosol,
The storage tank stores the second liquid,
And the venturi flows the dispersion medium discharged from the outlet of the heat exchanger and sprays the second liquid supplied from the storage tank via the supply pipe to form a dispersion for the aerosol. The method according to claim 8,
And an venturi heater for heating the venturi. The method according to claim 8 or 9,
The venturi is provided with a first chamber having an inner diameter larger than the flow tube in communication with the flow tube, a tightening portion having a smaller inner diameter than the first chamber, and a second chamber having a larger inner diameter than the tightening portion,
And the supply tube communicates with the tightening unit.

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