KR20190087979A - A door configured to seal an opening in a vacuum processing system, a vacuum processing system, and a method for operating a door - Google Patents

Abstract

A door (100) configured to seal an opening in a vacuum processing system (200) is provided. The door 100 includes a movable member 110; And a flexible closure portion (120) configured to be movable from an open position to a closed position, wherein the flexible closure portion (120) is configured to provide a vacuum-tight seal at the closed position.

Description

A door configured to seal an opening in a vacuum processing system, a vacuum processing system, and a method for operating a door

[0001] Embodiments of the present disclosure relate to doors configured to seal openings in a vacuum processing system, vacuum processing systems, and methods for operating a door configured to seal an opening in a vacuum processing system. Embodiments of the present disclosure particularly relate to doors having flexible closures, vacuum processing systems having such doors, and methods for operating such doors.

[0002] Typically, a vacuum processing chamber communicates with a transfer chamber or other processing chamber through a sealable opening, the sealable opening being wide and relatively short to accommodate insertion and removal of horizontally-oriented or vertically-oriented substrates. Generally, a slit valve is used to seal such openings. For example, the seal closure of the slit valve can be extended to seal the opening and retracted to enable the passage of substrates through the opening. Slit valve designs that avoid (1) particle generation through rubbing friction, and (2) problems of uneven compression of the elastomeric sealing elements are desirable.

[0003] During certain types of substrate processing operations, there may be a pressure differential between the vacuum processing chamber and the transfer chamber, or between the vacuum processing chamber and the other processing chamber, such that a high pressure in the transfer chamber or other processing chamber may cause sealing of the slit valve Apply pressure to the closure. The vacuum processing chamber may also experience deformations due to pressure differences. That is, such a pressure chamber may undergo deformation, which may result in a change in the shape of the opening to be sealed. Thus, the slit valve can be subjected to stresses and fatigue, and the amounts of stresses and fatigue increase with the pressure difference. If large substrates are involved, such as large substrates used for flat closure displays, the pressure differential effects may be even worse (e.g., it may be possible to have a larger opening in a larger substrate, Since a larger sealing closure for sealing can be provided). Typically, conventional slit valves are not designed to generate particles or accommodate large pressure differences during open and close operations.

[0004] In view of the foregoing, there is provided, in accordance with the present invention, a door configured to seal an opening in a vacuum processing system, a vacuum processing system, and a method for operating a door configured to seal the opening in a vacuum processing system, overcoming at least some of the problems in the art. . ≪ / RTI >

[0005] In view of the foregoing, there is provided a door configured to seal an opening in a vacuum processing system, a vacuum processing system, and a method for operating a door configured to seal an opening in a vacuum processing system. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.

[0006] According to one aspect of the present disclosure, a door configured to seal an opening in a vacuum processing system is provided. The door comprises a movable member; And a flexible closure attached to the movable member and configured to be movable from an open position to a closed position, wherein the closure is configured to provide a vacuum-tight seal at the closed position.

[0007] According to a further aspect of the present disclosure, a vacuum processing system is provided. A vacuum processing system includes a door configured to seal an opening in a vacuum processing system. The door comprises a movable member; And a flexible closure attached to the movable member and configured to be movable from an open position to a closed position, wherein the closure is configured to provide a vacuum-tight seal at the closed position. The vacuum processing system further includes a vacuum chamber, wherein the door is configured to provide access to the vacuum chamber.

[0008] According to yet a further aspect of the present disclosure, a method for operating a door configured to seal an opening in a vacuum processing system is provided. The method includes loading and / or unloading the substrate into / from the vacuum chamber through the door.

[0011] Additional aspects, advantages, and features of the present disclosure are evident from the dependent claims, the detailed description, and the accompanying drawings.

[0012] In the manner in which the recited features of the present disclosure can be understood in detail, a more particular description of the disclosure briefly summarized above may be made with reference to the embodiments. BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings relate to embodiments of the present disclosure and are described below. Exemplary embodiments are shown in the drawings and are described in detail in the following description.
[0013] FIG. 1 illustrates a schematic view of a vacuum processing chamber in accordance with embodiments described herein.
[0014] FIG. 2 illustrates a schematic side view of a vacuum processing system in accordance with embodiments described herein.
[0015] FIG. 3 illustrates a schematic side view of a vacuum processing system in accordance with embodiments described herein.
[0016] FIG. 4 illustrates a schematic side view of a door in accordance with embodiments described herein.
[0017] FIG. 5 illustrates a schematic side view of a door in accordance with the embodiments described herein.
[0018] FIG. 6 shows a schematic side view of a door in accordance with the embodiments described herein.
[0019] FIG. 7 illustrates a flow diagram of a method for operating a door, in accordance with embodiments described herein.

[0020] Reference will now be made in detail to various embodiments of the present disclosure, and one or more examples of various embodiments thereof are illustrated in the drawings. In the following description of the drawings, like reference numerals refer to like components. In general, only differences for the individual embodiments are described. Each example is provided as an illustration of the present disclosure and is not intended as a limitation of the present disclosure. Additionally, features illustrated or described as part of one embodiment may be used with other embodiments or for other embodiments to produce further embodiments. It is intended that the description include such modifications and variations.

[0021] According to embodiments described herein, there is provided a door or slit valve configured to seal an opening in a vacuum processing system. The door may include a movable member and a flexible closing member. The flexible closure may be attached to the movable member. The flexible closure may be configured to be movable from an open position to a closed position. The flexible closure may be configured to provide a vacuum-tight seal at the closed position. Specifically, the flexible closure may be a flexible panel. In addition, the flexible closure may be referred to as a flexible seal.

[0022] According to the embodiments described herein, the door can be configured to allow the substrate to pass through the door in the open position. In particular, the door may be configured to allow the large area substrate to pass through the door in the open position.

[0023] According to embodiments described herein, a large area substrate may have a size of at least 0.174 m ² . The size may be from about 1.375 m ² to about 10 m ² , more typically from about 2 m ² to about 11 m ² , or even up to 12 m ² . Typically, the substrates on which the doors, vacuum processing chambers, systems, and methods are provided, in accordance with the embodiments described herein, are large area substrates as described herein. For example, a large area substrate may have GEN 5 corresponding to about 1.4 m ² substrates (1.1 mx 1.3 m), GEN 7.5 corresponding to about 4.39 m ² substrates (1.95 mx 2.25 m), about 5.5 m ² substrates 2.2 mx 2.5 m), or even a GEN 10 corresponding to about 8.7 m ² substrates (2.85 mx 3.05 m). Larger generations such as GEN 11 and GEN 12 and corresponding substrate areas can similarly be implemented. However, those skilled in the art will appreciate that the holders may be used for any substrate size, i.e., a substrate size that is much smaller or larger than the substrate size outlined above.

[0024] According to the embodiments described herein, the door may be configured to seal the opening with the width and height. The width may be equal to or greater than 0.2 m, in particular equal to or greater than 0.5 m, and / or equal to or less than 1 m, in particular equal to or less than 0.8 m. The height may be equal to or greater than 20 cm, especially equal to or greater than 30 cm, and / or equal to or less than 500 cm, in particular equal to or less than 100 cm.

[0025] According to the embodiments described herein, the door can be configured to allow the substrate to pass through the door in a vertical orientation or a substantially vertical orientation. Alternatively, the door may be configured to allow the substrate to pass through the door in a horizontal orientation or a substantially horizontal orientation.

[0026] The terms "vertical direction" or "vertical orientation" may be understood to distinguish from "horizontal direction" That is, "vertical direction" or "vertical orientation" may relate to, for example, a substantially vertical orientation of the substrate, wherein the numerical value from the correct vertical or vertical orientation, A deviation of -15 [deg.] May still be considered as "substantially vertical direction" or "substantial vertical orientation ". The vertical direction may be substantially parallel to gravity.

[0027] According to the embodiments described herein, substantial vertical is to allow deviations of +/- 20 degrees or less, for example +/- 10 degrees or less, from the vertical direction, especially when representing substrate orientation Can be understood. This deviation can be provided, for example, because a substrate support having slight deviation from the vertical orientation can generate a more stable substrate position. Nevertheless, for example, the substrate orientation during deposition can be considered to be substantially vertical, which can be considered to be different from the horizontal substrate orientation.

[0028] The term "horizontal direction" or "horizontal orientation" may be understood to distinguish it from "vertical orientation" or "vertical orientation ". That is, "horizontal direction" or "horizontal orientation" may relate, for example, to a substantially horizontal orientation of the substrate where the number from the correct horizontal or horizontal orientation, -15 [deg.] May still be considered as "substantial horizontal orientation" or "substantial horizontal orientation ". The horizontal direction may be substantially perpendicular to gravity.

[0029] According to the embodiments described herein, " substantially horizontal " permits a deviation of +/- 20 degrees or less from the horizontal direction, e.g., +/- 10 degrees or less, especially when representing substrate orientation . ≪ / RTI > This deviation can be provided, for example, because a substrate support having slight deviation from the horizontal orientation can generate a more stable substrate position. Nevertheless, for example, the substrate orientation during deposition can be considered to be substantially horizontal, which can be considered to be different from the vertical substrate orientation.

[0030] The term " substantially at right angles " may relate to a substantially orthogonal orientation of, for example, horizontal and vertical orientations, particularly with respect to gravity, where the number from the orientation at an exact right angle, / -10 [deg.] Or even up to +/- 15 [deg.] May still be considered to be " substantially perpendicular ".

[0031] Typically, the substrate may be made of any material suitable for material deposition. For example, the substrate may be formed of any material or material that can be coated by a deposition process, such as glass (e.g., soda-lime glass, borosilicate glass, etc.), metal, polymer, ceramic, compound materials, ≪ / RTI > and combinations thereof.

[0032] According to embodiments described herein, a vacuum processing chamber may be provided. The vacuum processing chamber may be included in a vacuum processing system for processing the substrate. The processing system may include a vacuum processing chamber in accordance with the embodiments described herein. The processing system may be configured to coat the substrate with one or more layers, such as metal layers, dielectric layers, and / or semiconductor layers, in a vacuum processing chamber. In particular, " processing " refers to depositing a film on a substrate by, for example, PVD processes such as sputtering or CVD processes, transporting the substrate through a vacuum processing chamber, transferring a substrate from one vacuum processing chamber to a transfer chamber, Transferring the substrate to a vacuum processing chamber, and the like.

[0033] As referred to herein, substrates may be transported through a vacuum processing system or in a vacuum processing system to perform a process, such as a deposition process. For example, the deposition process may be a static PVD sputter process. According to embodiments, a vacuum processing system may be configured for a PVD deposition process. For various processes, the vacuum processing chamber may experience pressure differentials or differential pressures between the first pressure side, e.g., the inner pressure side within the vacuum processing chamber, and the second pressure side, e.g., the outer pressure side, outside the vacuum processing chamber . For example, the first pressure side may have a pressure on the second pressure side, e.g., a pressure that is less than or much less than the external pressure, e.g., an internal pressure. Thus, the vacuum processing chamber may undergo deformation resulting from differential pressure. The deformation may result in relative movement of the parts of the vacuum processing chamber or relative movement of the parts connected to the vacuum processing chamber relative to the vacuum processing chamber. Movement, in turn, can result in abrasion of particles at the interface between the moving parts and, therefore, can lead to contamination of the vacuum processing chamber.

[0034] FIG. 1 shows the pressure difference or pressure difference between the first pressure side, for example, the internal pressure side within the vacuum processing chamber 210, and the second pressure side, such as the external pressure side outside the vacuum processing chamber 210 Lt; RTI ID = 0.0 > 210 < / RTI > For example, the first pressure side may have a vacuum pressure level of pressure, such as an internal pressure, while the second pressure side may have a pressure of atmospheric pressure level, e.g., an external pressure. The vacuum pressure level may correspond to a pressure level of 10 mbar or less, especially 1 mbar or less, or even 1 x 10 ^-4 and 1 x 10 ^-2 mbar or less. The atmospheric pressure level may correspond to a pressure level of 1 bar. In general, when the differential pressures are higher, this can lead to greater deformations.

[0035]  As shown in Figure 1, the deformations are defined by a vacuum processing chamber 210, which defines the interior of the vacuum processing chamber 210 from the outside of the enclosure 212 of the vacuum processing chamber 210, such as the vacuum processing chamber 210 Lt; / RTI > walls. In Fig. 1, the force due to the differential pressure and acting on the vacuum processing chamber 210 is illustrated by the arrows. In particular, the force may act from the outside of the vacuum processing chamber 210 to the interior of the vacuum processing chamber 210. The resulting deformations are illustrated in Fig. 1 by a deformed rectangle shown as thin black lines. In particular, the vacuum processing chamber 210, and more particularly the enclosure 212 of the vacuum processing chamber 210, is configured to receive the vacuum processing chamber 210 from a steady state, shown as thick gray lines in FIG. 1, It can be transformed into a vacuum state shown by thin black lines in Fig.

[0036] According to the embodiments described herein, during deposition, the vacuum processing chamber 210 may form a vacuum-tight enclosure by the door 100 in the closed position, ie, 10 mbar or less , Especially 1 mbar or less, or even 1x10 < ^-4 > to 1x10 < ^{-2 &} gt ^; mbar or less. Different pressure ranges will be specifically contemplated for PVD processes, such as sputtering, and CVD processes typically performed in the mbar-range, which can be performed in the range of 10 ^-3- mbar. In addition, the vacuum chambers may be vacuum evacuated with a background vacuum having a pressure of ¹ x 10 ^-6 mbar or less. The background pressure can be understood as the pressure reached by the vacuum evacuation of the chamber without any influx of any medium.

[0037] Fig. 2 shows the door 100. Fig. The door 100 may be configured to seal the opening in the vacuum processing chamber 210. In accordance with the embodiments described herein, the door 100 may include a movable member 110 and a flexible closing portion 120. The flexible closure 120 may be attached to the movable member 110. For example, the flexible closure 120 may be secured to the movable member 110 by a fixture 115. The flexible closing portion 120 may be configured to be movable from an open position to a closed position. The flexible closure 120 can be configured to provide a vacuum-tight seal at the closed position. Specifically, the flexible closure 120 may be a flexible panel.

[0038] In addition, the flexible closure may be referred to as a flexible seal. In addition, while movable arms 110 may be shown as movable members 110 in the figures, movable members 110 may also be provided as other types of links or fixed elements or joints. In particular, movable arm 110 can be considered as a particular type of link, fixed element, or joint, and the present disclosure also encompasses any type of link, fixture, or joint of movable type, Or < / RTI > embodiments. According to embodiments, the movable member 110 is a movable arm 110. Specifically, the moveable arm 110 may have a female-shaped configuration, for example, by having one dimensional measurement that is larger than the other dimensional measurements of the moveable arm 110. One larger dimension measurement may be a dimensional measurement of the movable arm 110 extending from the hinge 130 to the flexible closure 120. [ Moreover, the movement of the flexible closure may be of any kind, such as rotational, curved, linear, and combinations thereof.

[0039] In particular, FIG. 2 illustrates a door 100 to be arranged between two vacuum processing chambers 210. In this arrangement, the door 100 may be configured to enable transfer of the substrate from one vacuum processing chamber 210 to another vacuum processing chamber 210. Alternatively, the door 100 may also be arranged in one vacuum processing chamber 210. The door 100 may be configured to allow the substrate to pass through the door 100 in an open position. Specifically, the door 100 may be configured to enable loading and / or unloading operations, in which the substrate is loaded into the vacuum processing chamber 210, respectively, in its loading and / or unloading operations, And / or the substrate is unloaded from the vacuum processing chamber 210.

[0040] As shown in FIG. 2, the door 100 may be provided in the door housing 150. The door housing 150 may be attached to the vacuum processing chamber 210. In addition, the door housing 150 may be provided in a manner that communicates between the two vacuum processing chambers 210. The door housing 150 may be provided between the vacuum processing chamber 210 and another vacuum processing chamber 210 or between the vacuum processing chamber 210 and the transfer chamber so that the door housing 150 Between the vacuum processing chamber 210 and the other vacuum processing chamber 210, or between the vacuum processing chamber 210 and the transfer chamber. For example, the substrate may be transferred through the door housing 150, between the vacuum processing chamber 210 and another vacuum processing chamber 210, or between the vacuum processing chamber 210 and the transfer chamber.

[0041] However, it is also possible that the door 100 is not provided with the door housing 150. For example, the parts of the door housing 150 may be integral parts of the vacuum processing chamber 210 or integral parts of another member connected to the vacuum processing chamber. For example, the vacuum processing chamber 210 may have a protruding part leading to another vacuum processing chamber 210 or transfer chamber to provide communication with other vacuum processing chambers 210 or transfer chambers.

[0042] According to embodiments, a door frame 220 may be provided. For example, the door frame 220 may be provided as a part of the door housing 150. Additionally or alternatively, the door frame 220 may be part of the vacuum processing chamber 210. The door frame 220 may provide a surface or frame in which the door 100, and in particular the flexible closing portion 120, may abut against the surface or frame. In particular, the door 100, and in particular the flexible closing portion 120, can be configured to provide a vacuum-tight seal with the door frame 220 in the closed position.

[0043] According to the embodiments described herein, the door 100 may include a hinge 130. The hinge 130 may be connected to the movable member 110. Accordingly, the movable member 110 can connect the flexible closure part 120 and the hinge 130. [ By the rotation of the movable member 110 about the hinge 130, the flexible closure 120 can be moved from the open position to the closed position and / or vice versa.

[0044] The door 100 may further be provided with a locking mechanism 160. The locking mechanism 160 may be configured to provide a closing force on the door 100, specifically on the movable member 110, at the closed position of the flexible closure 120. [ Thus, the locking mechanism 160 can provide a closing force to keep the flexible closure 120 in the closed position. For example, the closing force may support a force provided by the hinge 130 to hold or fix the flexible closure 120 in the closed position.

[0045] For example, the locking mechanism 160 may be provided with a movable part, which may be a position that is in contact with the movable member 110, particularly when the flexible closing part 120 is in the closed position, Lt; / RTI > The locking mechanism 160 may be connected to the door housing 150. Alternatively or additionally, the locking mechanism 160 may be connected to the vacuum processing chamber 210.

[0046] According to the embodiments described herein, the substrate may be loaded through the door 100 when the flexible closure 120 is in the open position. After loading the substrate through the door 100, the door 100 may be closed. That is, the flexible closure 120 can be moved to the closed position. After closing the door 100, the vacuum processing chamber 210 may be evacuated. As outlined herein, vacuum evacuation of the vacuum processing chamber 210 may result in differential pressure between the interior of the vacuum processing chamber 210 and the exterior of the vacuum processing chamber 210. This differential pressure may result in deformation of the vacuum processing chamber 210.

[0047] The deformation may result in relative movement of the parts of the vacuum processing chamber relative to one another. The illustrated arrows may cause relative movement, as shown in Figure 2, which may result in a change in the shape of the opening sealed by the door 100. In addition, as illustrated by the use of points 1, 2, 3, and 4 shown in FIG. 2, deformation may also occur in directions perpendicular to the marked arrows. For example, the relative movement between points 1 and 2 may be approximately 0 mm, while the relative movement between points 3 and 4 may be approximately 1.5 mm. In particular, points 1 and 2 may be closer to hinge 130 than points 3 and 4. Thus, a greater relative movement may occur farther away from the hinge 130. That is, relative movement between the door frame 220 and the flexible closing portion 120 may be caused by deformations. Relative movement can result in symmetrical and / or asymmetrical changes in the shape of the opening.

[0048] In addition, this relative movement can result in relative movement in the contact area between the door frame 220 and the flexible closure 120. This relative movement in the contact area may be achieved by any suitable means, such as, for example, from the materials that make up the flexible closure 120 and / or the door frame 220, and / or from any material between the flexible closure 120 and the door frame 220 Of the particles. According to the embodiments described herein, door 100 is configured to compensate for deformations caused by differential pressure between the first pressure side, e.g., the internal pressure side, and the second pressure side, e.g., the external pressure side, in the closed position Lt; / RTI >

[0049] As shown in Fig. 3, there is no movement at all in the contact area between the flexible closing part 120 and the door frame 220, or the flexibility of the flexible closing part 120 ). ≪ / RTI > In particular, the flexible closing portion 120 may be configured to follow deformations, specifically movement of the door frame 220. In practicing the embodiments, wear of the particles can be reduced and contamination of the vacuum processing chamber 210 can be prevented.

[0050] According to embodiments described herein, door frame 220 may include at least one sealing element 222 in the contact area, wherein, in the closed position, the first side wall and / The side wall contacts the door frame 220. In the case of carrying out the embodiments, the sealing effect obtained by the door 100 can be improved.

[0051] Typically, contamination of the vacuum processing chamber 210 can be prevented, particularly when the at least one sealing element 222 is provided in the contact area, because the sealing elements 222 are vulnerable to particle generation due to rubbing friction. have. Specifically, the flexible closure 120 may be configured to compensate for movement of the door frame 220 and the at least one sealing element 222 such that the at least one sealing element 222 and the flexible closed So that no movement or no substantial movement occurs between the first and second portions 120.

[0052] Figure 4 shows a schematic side view of a door 100 according to embodiments described herein.

[0053] In accordance with the embodiments described herein, the flexible closure 120 may include a plate 122. The plate 122 may have a first plate side and a second plate side opposite the first plate side. The first side wall 124 may be connected to the first plate side. And the second side wall 126 may be connected to the second plate side. 4, the first side may be farther away from the hinge 130 and / or the second side may be closer to the hinge 130 than the first side, especially from the perspective of the fixture 115 . Additionally, the first side wall 124 and / or the second side wall 126 may contact the door frame 220 in the closed position.

[0054] Additionally, the first sidewall 124 may include a first protrusion 124a protruding from the first sidewall 124. The first projection 124a may be arranged on the side of the first side wall 124 opposite the plate 122. [ Additionally or alternatively, the second sidewall 126 may include a second protrusion 126a protruding from the second sidewall 126. The second projection 126a may be arranged on the side of the second side wall 126 opposite the plate 122. The first protrusion 124a and the second protrusion 126a may be configured to face the door frame 220. In particular, the first projection 124a and the second projection 126a may provide a contact surface configured to contact the door frame 220. In addition, the first projection 124a and the second projection 126a may extend in directions away from each other.

[0055] According to the embodiments described herein, the plate 122 may be configured to be flexible. Additionally or alternatively, the first side wall 124 may be configured to be flexible. Additionally or alternatively, the second side wall 126 may be configured to be flexible. Additionally or alternatively, the first projection 124a may be configured to be flexible. Additionally or alternatively, the second projection 126a may be configured to be flexible. According to advantageous embodiments, at least one of the first sidewall 124 and the second sidewall 126 may be configured to be flexible. In particular, some or all of these parts can be configured to be flexible as long as the flexible closure 120 is configured to be flexible. That is, some of these parts may be configured to be flexible, but not all of these parts need necessarily be flexible in providing the flexible closure 120.

[0056] In a particularly advantageous embodiment, at least the first side wall 124 and the second side wall 126 are configured to be flexible. As shown in FIG. 4, the deformation caused by the differential pressure can result in relative movement (indicated by the arrows shown in door frame 220 in FIG. 4) that can change the shape of the opening. The first sidewall 124 and the second sidewall 126 may follow an alteration of the opening when the first sidewall 124 and the second sidewall 126 are configured to be flexible. Therefore, relative movement between the first protrusion 124a and the second protrusion 126a on the one hand and the door frame 220 on the other hand can be prevented. In practicing the embodiments, wear of the particles, and thus contamination of the vacuum processing chamber 210, can be prevented.

[0057] In particular, FIG. 4 illustrates a side view or a cross-sectional view of door 100 in accordance with the embodiments described herein. Thus, the first sidewall 124 and the second sidewall 126 may be portions of a particularly common circumferential sidewall extending from the plate 122. As a result, the first projection 124a and the second projection 126a may be a circumferential flange extending from the circumferential side wall. According to the embodiments described herein, the flexible closure 120 may have a tub-like shape.

[0058] 5 shows a schematic side view of a door 100 in accordance with the embodiments described herein.

[0059] According to the embodiments described herein, the door 100 may include at least one diaphragm 140. The diaphragm 140 may be connected to the flexible closure 120. In addition, the diaphragm 140 may be configured to seal the space S formed by the flexible closure portion 120. In particular, the space S can be sealed in such a manner that a constant pressure can be maintained in the space S. In practice, the flexible closure may not be deformed and / or inflated in the presence of pressure differentials, since in particular the diaphragm is able to separate the volume inside the flexible closure from the external pressure. In practicing the embodiments, the door may not be inflated in a direction opposite to the direction in which the chamber flange may expand due to differential pressure. In addition, the relative movement of the sealing surface can be further minimized.

[0060] The space S may be defined and / or defined by the plate 122, the first sidewall 124, the second sidewall 126, and the diaphragm 140. According to the embodiments described herein, the diaphragm 140 may be arranged at the same or substantially the same level as the first projection 124a and the second projection 126a. That is, the diaphragm 140 may be arranged outside the vacuum processing chamber 210 with respect to the door frame 220. In addition, the diaphragm 140 may be connected to the fixture 115.

[0061] According to the embodiments described herein, the diaphragm 140 may be configured to be flexible. Additionally or alternatively, a gasket 142 configured to be flexible may be provided to the diaphragm 140. [ Specifically, the diaphragm 140 may be configured to follow the movement or deformation of the flexible closure 120.

[0062] 3 to 5, the flexible closure 120 may be arranged to extend toward the vacuum processing chamber 210 and / or into the vacuum processing chamber 210. Specifically, the flexible closure 120 may be arranged to extend toward the vacuum processing chamber 210 and / or into the vacuum processing chamber 210 with respect to the door frame 220. That is, the first projection 124a and the second projection 126a may contact the door frame 220 from the surface of the door frame opposite the vacuum processing chamber 210. In addition, the first sidewall 124 and the second sidewall 126 may extend from the outer surface toward the vacuum processing chamber 210 and / or into the vacuum processing chamber 210. The plate 122 arranged between the first sidewall 124 and the second sidewall 126 may be arranged on the side of the vacuum processing chamber 210 and / or in the vacuum processing chamber 210. [ Indeed, particularly with the flexible sidewalls of the flexible enclosures that can be formed to be thin and flexible, the flexible enclosures can adapt to movements of the chamber flange. In practicing the embodiments, the relative movement between the sealing surface and the seal can be minimized.

[0063] Alternatively, as shown in FIG. 6, the flexible closure 120 may be arranged to extend in a direction away from the vacuum processing chamber 210. Specifically, the flexible closing portion 120 may be arranged to extend in a direction away from the vacuum processing chamber 210 with respect to the door frame 220. That is, the first projection 124a and the second projection 126a may contact the door frame 220 from the surface of the door frame opposite the vacuum processing chamber 210. In addition, the first sidewall 124 and the second sidewall 126 may extend in a direction away from the vacuum processing chamber 210 from the outer surface. Thus, the plate 122 arranged between the first sidewall 124 and the second sidewall 126 may be arranged outside the vacuum processing chamber 210. Indeed, the deformation of the flexible enclosure can act in the same direction as the chamber deformation.

[0064] When the door 100 is arranged between the two vacuum processing chambers 210, the direction toward or away from the vacuum processing chamber 210 is such that it is closer to the door frame 220 Or the direction of the vacuum processing chamber 210 including the door frame 220 or away from the vacuum processing chamber 210. In particular, the description that " flexible closure 120 can be arranged to extend toward and / or into vacuum processing chamber 210 " means that flexible closure 120 or flexible closure 120, The flexible closure 120 may be arranged to extend in a direction away from the vacuum processing chamber 210 while at least a portion of the portion 120 may be understood as an arrangement traversing the door frame 220. [ Can be understood as an arrangement in which the flexible closing portion 120 extends in a direction away from the door frame 220 and / or does not traverse the door frame 220.

[0065] According to the embodiments described herein, the flexible closure 120 may comprise aluminum and / or be made of aluminum. Specifically, aluminum can be made to have the desired properties with respect to flexibility. Thus, a flexible closure 120 that is made of a material that is particularly suited for its intended use may be provided.

[0066] The vacuum processing system 200 includes a door 100 and a vacuum chamber 210 wherein the door 100 is configured to provide access to the vacuum chamber 210 .

[0067] Additionally, a method 900 for operating the door 100 is described herein. In particular, as shown in FIG. 7, method 900 may include block 910. At block 910, the substrate may be loaded into the vacuum processing chamber 210 through the door 100 and / or unloaded from the vacuum processing chamber 210. For example, the substrate may be loaded from another vacuum processing chamber and / or loaded into another vacuum processing chamber. Additionally, the substrate may be loaded from the transfer chamber and / or loaded into the transfer chamber. In particular, after the loading and / or unloading operation, the door 100 may be closed to seal the opening in the vacuum processing chamber 210 (see block 920). After closing the door 100, the vacuum processing chamber 210 may be evacuated. Thus, a differential pressure between the interior of the vacuum processing chamber 210 and the exterior of the vacuum processing chamber 210 can be generated. The differential pressure can result in deformation of the vacuum processing chamber 210, which in turn can result in relative movement of the door 100 relative to the vacuum processing chamber 210. Relative movement can cause wear of the particles in the contact zone between the vacuum processing chamber 210 and the door 100. The door 100 may be provided with a flexible closure 120 and the flexible closure 120 may be configured to conform to variations of the vacuum processing chamber 210 . Accordingly, the relative movement between the vacuum processing chamber 210 and the door 100 can be suppressed. In practicing the embodiments, wear of the particles, and thus contamination of the vacuum processing chamber 210, can be prevented.

Claims (16)

A door (100) configured to seal an opening in a vacuum processing system (200)
A movable member (110); And
- a flexible closure (120) attached to the movable member (110) and configured to be movable from an open position to a closed position,
/ RTI >
The flexible closure (120) is configured to provide a vacuum-tight seal at the closed position.
door. The method according to claim 1,
The door (100) is configured to compensate for deformations caused by differential pressure between a first pressure side and a second pressure side in the closed position,
door. 3. The method according to claim 1 or 2,
The door (100) is configured to allow a substrate to pass through the door (100) at the open position.
door. 4. The method according to any one of claims 1 to 3,
The flexible closure portion 120 includes a plate 122 and a first side wall 124,
door. 5. The method of claim 4,
The first side wall 124, 126 is configured to be flexible,
door. 6. The method according to any one of claims 1 to 5,
- a hinge (130)
The movable member (110) connects the flexible closure (120) and the hinge (130)
door. 7. The method according to any one of claims 1 to 6,
The flexible closure part 120 may have a tub-like shape,
door. 8. The method according to any one of claims 1 to 7,
- at least one diaphragm (140) connected to the flexible closure (120) and configured to seal a space (S) formed by the flexible closure (120)
door. 9. The method according to any one of claims 1 to 8,
The flexible closure part 120 comprises aluminum and / or is made of aluminum,
door. 10. The method according to any one of claims 1 to 9,
The movable member 110 is a movable arm,
door. As the vacuum processing system 200,
A door (100) as claimed in any one of claims 1 to 10; And
- a vacuum chamber (210)
/ RTI >
The door (100) is configured to provide access to the vacuum chamber (210)
Vacuum processing system. 12. The method of claim 11,
The door 100 is configured to allow the substrate to be loaded into and / or unloaded from the vacuum chamber 210 at the open position,
Vacuum processing system. 13. The method according to claim 11 or 12,
- a door frame (220)
The flexible closure part (120) includes a plate (122) having a first plate side and a second plate side opposite the first plate side, and a first side wall (124) is connected to the first plate side A second side wall 126 is connected to the second plate side and the first side wall 124 and / or the second side wall 126 are in contact with the door frame 220 in the closed position,
Vacuum processing system. 14. The method of claim 13,
The door frame (220) includes at least one sealing element (222) in a contact area in which the first and / or second sidewalls contact the door frame (220) in the closed position.
Vacuum processing system. The method according to claim 12 or 13,
The vacuum processing system 200 includes a vacuum processing system 200 configured for a PVD deposition process,
Vacuum processing system. A method (900) for operating the door (100) as claimed in any one of claims 1 to 10,
- loading and / or unloading the substrate into / from the vacuum processing chamber (210) through the door (100); And
Closing the door (100) to seal the opening in the vacuum processing chamber (210)
/ RTI >
Way.

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