KR20190060173A - Laser optical system - Google Patents

Abstract

The present invention relates to a laser optical system. More particularly, the present invention relates to a laser optical system in which various laser light source units with a single wavelength can be mounted. According to an embodiment of the present invention, the laser optical system comprises: a table; and a plurality of laser path changing units disposed in the table, arranged in a line along an optical axis, and changing a moving path of a laser generated by any one of the laser light source units mounted on the table to the optical axis.

Description

[0001] LASER OPTICAL SYSTEM [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser optical system, and more particularly, to a laser optical system capable of mounting various laser light sources of a single wavelength.

Laser is an artificial light that can be obtained by amplifying light (electromagnetic wave) using a resonator, which is the initial letter of Light Amplification by Stimulated Emission of Radiation.

The laser has physical characteristics such as excellent directivity and water property and can keep the wavelength constant, and has been used for advanced processing applications with high added value.

The laser pointed out the possibility in 1917 when Einstein published "theory of induced emission". Then in the 1960s, Mayman of the United States succeeded the laser oscillation using the ruby crystals for the first time in the world. Since then, researchers around the world have discovered various laser oscillations. In 1961, He-Ne laser, glass laser, semiconductor laser in 1962, Ar laser in 1963, CO2 laser in 1964, pigment laser in 1966, picosecond laser, excimer laser in 1970, Were found.

There are various processing techniques using such lasers. Among them, laser micro-machining technology has been widely used as a technology essential for high-quality parts processing in high-tech industrial fields such as semiconductor, electronics, automobile, mechatronics, etc., . It has also contributed to the development of a new process that replaces existing processes in the area of machining parts that are environmentally friendly, noncontact processes and have a shape of several tens of micrometers in size.

The laser optical system used in the laser processing technology needs to be properly aligned so that the laser beam can be accurately irradiated to the object in the desired direction in order to improve the processing quality.

On the other hand, in a laser optical system having various laser light sources of a single wavelength, there is an inconvenience that a new laser light source must be aligned every time a conventional laser light source is replaced with a new laser light source.

It is an object of the present invention to provide a laser optical system having a plurality of laser light sources for generating a laser of a single wavelength and a method for repositioning the replaced laser light source unit when replacing a predetermined laser light source unit with a new laser light source unit, A laser optical system capable of solving the above problems is provided.

A laser optical system according to an embodiment includes: a table; And a plurality of laser path changing units disposed in the table and arranged in a line along the optical axis, wherein the laser path changing unit is configured to change the laser path changing unit, To the optical axis.

Here, the plurality of laser path changing units may receive a plurality of lasers from the plurality of laser light source units, change the travel path of one of the received lasers to the optical axis, and do not change the travel path of the remaining lasers have.

Here, the plurality of lasers emitted from the plurality of laser light sources may have the same single wavelength, and may have different pulse lengths or intensities.

Here, the laser path changing unit may include: a mirror; A mirror holder for holding the mirror; A mirror rotating unit which rotates the mirror holder about a rotation axis and rotates the mirror holder around a rotation axis to position the mirror on the optical axis or to position the mirror outside the optical axis; And a support portion that supports the mirror rotation portion and can be coupled with the table.

The apparatus may further include a beam expander disposed on the table and disposed on the optical axis and collimating the laser output from one of the plurality of laser path changing units into parallel light .

Here, the laser is arranged on the table and disposed on the optical axis, and the laser beam output from the beam expander and traveling in a straight line along the optical axis is changed by a wedge optical system, and the wedge optical system is rotated, And a trepanning module for outputting the rotated image.

When the laser optical system according to the embodiment is used, there is an advantage that it is possible to solve the inconvenience of having to rearrange the replaced laser light source part when replacing a predetermined laser light source part with a new laser light source part.

1 is a plan view of a laser optical system according to an embodiment of the present invention.
2 is a front view when the first laser path changing portion 300a among the plurality of laser path changing portions shown in FIG. 1 is a changing mode for changing the traveling path of the first laser.
3 is a front view in the case where the first laser path changing portion 300a shown in FIG. 2 is a non-changing mode in which the progress path of the first laser is not changed.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix " part " for the constituent elements used in the following description is to be given or mixed with consideration only for ease of specification, and does not have a meaning or role that distinguishes itself.

In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between. The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a plan view of a laser optical system according to an embodiment of the present invention.

The laser optical system according to the embodiment can be also referred to as a laser optical device, and can be used as an optical system that requires the use of multiple lasers of a single wavelength, and can also be used as one constituting various laser processing systems.

1, the laser optical system according to the embodiment includes a table 100, a plurality of laser light source units 200a, 200b and 200c, a plurality of laser path changing units 300a, 300b and 300c, a beam expander 400, A trefanning module 500, and one or more mirror portions 600a and 600b.

A plurality of laser path changing portions 300a, 300b and 300c, a beam expander 400, a trefanning module 500, and one or more mirror portions 500a, (600a, 600b) are disposed.

The plurality of laser light source units 200a, 200b, and 200c are disposed on the table 100.

The plurality of laser light source units 200a, 200b, and 200c generate a laser having a predetermined single wavelength.

Each of the plurality of laser light source units 200a, 200b, and 200c generates the same single wavelength laser, but the pulse duration or intensity of the generated laser may be different from each other. For example, the first laser light source unit 200a generates the single-wavelength femtosecond laser, the second laser light source unit 200b generates the single-wavelength picosecond laser, and the third laser light source unit 200b generates the single- A single wavelength nanosecond laser can be generated.

With a femtosecond laser, the pulse width of the laser is shorter than the heat propagation time of the material, which has the advantage of not causing thermal damage or structural change of the material. In other words, the localized portion of the material is removed in an extremely short time, so that thermal diffusion phenomena occurring in general laser processing do not occur and precise processing is possible than thermal processing of conventional lasers.

In addition, the femtosecond laser can suppress most of the melts and debris formed around the workpiece, and even if it occurs, it is in the form of a very fine powder, which can be easily cleaned. In addition, femtosecond lasers are not limited to materials processed by multiphoton absorption due to the principle of processing, and precision processing of various materials such as metals, dielectrics, and ceramics is possible.

The use of pico-second laser can greatly compensate for the disadvantages of thermal deformation, which is the biggest problem in laser machining, and enables more precise micro-machining. In addition, since cold processing is possible, it is possible to perform micro-machining of materials which have been difficult to process due to heat distortion and the like.

A plurality of mounting portions (not shown) on which the plurality of laser light source portions 200a, 200b, and 200c are mounted may be disposed on the table 100. Accordingly, the user can mount various types of laser light source units on the table 100. [ A plurality of mounting portions (not shown) can be set at positions where a plurality of laser path changing portions 300a, 300b, and 300c fixed to the table 100 can transmit the laser to the optical axis 10. The user needs to align the laser light source he or she intends to use to an arbitrary mounting portion of a plurality of mounting portions (not shown) and then align the laser from the newly mounted laser light source to the optical axis 10 There is no advantage.

A plurality of laser path changing parts 300a, 300b and 300c are arranged on the table 100 and arranged in a line on the optical axis 10 of the laser optical system according to the embodiment, Position.

The plurality of laser path changing parts 300a, 300b and 300c can correspond to the plurality of laser light sources 200a, 200b and 200c on a one-to-one basis. For example, the first laser path changing portion 300a corresponds to the first laser light source portion 200a, the second laser path changing portion 300b corresponds to the second laser light source portion 200b, The changing unit 300c may correspond to the third laser light source unit 200c.

The plurality of laser path changing units 300a, 300b and 300c receive the laser beams generated from the plurality of laser beam sources 200a, 200b and 200c and change the traveling direction so that the received laser beams travel along the optical axis 10 . The plurality of laser path changing units 300a, 300b, and 300c may not receive the laser generated from the plurality of laser light sources 200a, 200b, and 200c, or may pass therethrough the same without changing the laser advancing direction.

Whether or not the progress direction of the laser generated from each of the plurality of laser light source units 200a, 200b, and 200c is changed or not may be selected by the user or may be selected according to a preprogrammed process.

In driving the plurality of laser path changing parts 300a, 300b and 300c, at least one laser path changing part of the plurality of laser path changing parts 300a, 300b and 300c moves the received laser along the optical axis 10 Change the direction of progress so that

For example, assuming that a laser is generated in each of the first to third laser light sources 200a, 200b and 200c, one of the first to third laser path changing units 300a, 300b and 300c The laser path changing unit changes the traveling direction so that the received laser advances to the optical axis 10, and the remaining laser path changing units prevents the received laser from proceeding to the optical axis 10. [ This is to allow only one selected laser to travel along the optical axis 10. The driving of the plurality of laser path changing parts 300a, 300b and 300c can be controlled by a separate control part (not shown). A control unit (not shown) may be mounted on the table 100 or may be mounted outside the table 100 to control a plurality of laser path changing units 300a, 300b and 300c by wire or wirelessly.

An example of the first laser path changing portion 300a among the plurality of laser path changing portions 300a, 300b, and 300c will be described with reference to FIG. 2 to FIG. Since the second to third laser path changing parts 300b and 300c are the same as the first laser path changing part 300a, the detailed description will be replaced with the following description.

FIG. 2 is a front view of the first laser path changing portion 300a of the plurality of laser path changing portions shown in FIG. 1 in the change mode, FIG. 3 is a front view of the first laser path changing portion 300a shown in FIG. Is a non-change mode.

2 to 3, the first laser path changing portion 300a includes a mirror 310, a mirror holder 330, a mirror rotation portion 350, and a support portion 370. [

The support portion 370 is in contact with the table 100 shown in Fig. The support portion 370 is disposed on the upper surface of the table 100 and can be coupled to the table 100 through a fastening means such as a screw.

A mirror rotation part 350 is disposed on the support part 370. The supporting portion 370 supports the mirror rotating portion 350 to fix the mirror rotating portion 350.

The mirror rotation unit 350 rotates the mirror holder 330 by a predetermined angle. The mirror rotation unit 350 can rotate the rotation axis 355 by a predetermined angle around the rotation axis 355.

The mirror holder 330 is coupled to one side of the mirror rotation part 350 and can rotate at a predetermined angle in association with the rotation of the mirror rotation part 350.

The mirror holder 330 grips a portion of the edge of the mirror 310 to hold the mirror 310. The mirror 310 can be rotated by a predetermined angle in conjunction with the rotation of the mirror holder 330. [

The mirror 310 changes the traveling path of the first laser generated from the first laser generator 200a. That is, the mirror 310 reflects the received first laser to the optical axis 10 shown in Fig. The mirror 310 can be located on the optical axis 10 and can be located outside the optical axis 10 by rotation of the mirror holder 330.

The first laser path changing unit 300a may be driven in a changing mode for changing the traveling path of the received laser and a non-changing mode for not changing the traveling path of the received laser. The example shown in Fig. 2 is the change mode, and the example shown in Fig. 3 is the non-change mode.

The first laser path changing unit 300a can select a change mode and a non-change mode by a user or a control signal. The mode selection by the user may be such that the user rotates the mirror holder 330 about the rotation axis 355 to position the mirror 310 at the position of FIG. 2 or FIG. The mode selection based on the control signal is performed by electrically driving a motor (not shown) in the mirror rotation unit 350 to rotate the mirror holder 330 about the rotation axis 355, 3, as shown in Fig.

1, a beam expander 400 is disposed on the table 100 and is disposed on the optical axis 10, and a plurality of laser path changing portions 300a, 300b, and 300c And collimates one laser provided from one laser path changing portion into parallel light.

The trefanning module 500 means an optical system used for effective processing of laser drilling.

The trefaning module 500 includes a method using an offset of a lens, a method using a scanner using a galvanometer mirror, a method using an image rotator, and a method using a wedge.

The wedge-based trapezing module 500 changes a light propagation path by using two or more wedge optical systems that move linearly along the optical axis 10, rotates the wedge optical system itself, Module.

One or more mirror portions 600a and 600b change the path of the laser present on the table 100. [

The first mirror portion 600a is disposed between the first laser light source portion 200a and the first laser path changing portion 300a and guides the path of the first laser generated from the first laser light source portion 200a to a predetermined path 20a ). The first mirror part 600a may be configured such that the first laser generated by the first laser light source part 200a is irradiated onto the first laser path changing part 300a by the size of the first laser light source part 200a or the size of the table 100. [ In the case where the incident light can not be directly incident.

The second mirror unit 600b changes the movement path of the laser beam output from the tref- ning module 500 to the exit 700. [ When the laser beam output from the trapezing module 500 is not directly incident on the exit 700 due to the size of the trefor- ing module 500 or the size of the table 100, Can be used.

In this way, the laser optical system according to the embodiment of the present invention shown in Figs. 1 to 3 can solve the inconvenience of having to reorder the replaced laser light sources one by one in replacing a predetermined laser light source can do.

In addition, the user inserts at least one laser path changing portion of the plurality of laser path changing portions 300a, 300b, and 300c into the optical axis 10 as a simple process. The laser light path changing portions 300a, 300b, There is an advantage that a laser emitted from one laser light source portion can be selectively used.

While the present invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, As will be understood by those skilled in the art.

100: table,
200a, 200b, and 200c: a laser light source unit,
300a, 300b, 300c: laser path changing section
400: beam expander
500: Trepanning module
600a and 600b:

Claims (6)

table; And
And a plurality of laser path changing portions disposed in the table and arranged in a line along an optical axis,
Wherein the laser path changing unit changes the traveling path of the laser generated from any one of the plurality of laser light source units mounted on the table to the optical axis.
The method according to claim 1,
Wherein the plurality of laser path changing units are configured to receive a plurality of lasers from the plurality of laser light source units and to change the traveling path of one of the received lasers to the optical axis, .
3. The method according to claim 1 or 2,
Wherein the plurality of lasers emitted from the plurality of laser light sources have the same single wavelength and have different pulse lengths or intensities.
The laser processing apparatus according to claim 1 or 2,
mirror;
A mirror holder for holding the mirror;
A mirror rotator for rotating the mirror holder about a rotation axis to position the mirror on the optical axis or to position the mirror on the optical axis; And
A supporting part for supporting the mirror rotating part and capable of being fastened to the table;
.
3. The method according to claim 1 or 2,
And a beam expander disposed in the table and disposed on the optical axis for collimating the laser output from one of the plurality of laser path changing portions into parallel light.
3. The method according to claim 1 or 2,
Wherein the optical axis is changed by using a wedge optical system which is disposed on the optical axis and which is output from the beam expander and linearly propagates along the optical axis and rotates the wedge optical system to rotate the laser And a trepanning module for outputting the laser beam.

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