KR20190027685A - A scanner device capable of multi-id recognition - Google Patents

Abstract

The present invention relates to a scanner device capable of recognizing a multi-ID to effectively manage resources in a semiconductor manufacturing process. According to the present invention, the scanner device comprises: an integrated scanner scanning a 1D barcode, a 2D barcode, and an RFID tag having a different format, which are used for managing a semiconductor product in a semiconductor processor to acquire ID information set in the 1D barcode, the 2D barcode, and the RFID tag; and a cradle to receive the collected ID information set in the 1D barcode, the 2D barcode, and the RFID tag, which is acquired through the integrated scanner.

Description

[0001] The present invention relates to a scanner device capable of recognizing a multi-ID,

The present invention relates to a scanner device capable of multi-ID recognition, and more particularly, to a scanner device capable of recognizing a multi-ID, and more particularly, to a multi-ID reader capable of recognizing a 1D, 2D barcode, To a possible scanner device.

Generally, a semiconductor device includes a FAB process for forming a predetermined film on a silicon wafer used as a semiconductor substrate and forming the film into a pattern having electrical characteristics, a probe test process for electrically inspecting each die on which the pattern is formed, A wire bonding process in which a gold or aluminum wire is welded to a semiconductor device divided by each die by a cutting process, a semiconductor device in which a bonding process is completed is sealed with a ceramic or plastic And is manufactured through a packaging process.

Here, the FAB process includes a deposition process for forming a predetermined film on a semiconductor substrate, a photolithography process for forming a photoresist pattern to form a film as a pattern, an etching process for removing a specific portion of the film to form a film, A chemical mechanical polishing process for planarizing the surface, an ion implantation process for implanting impurities into a specific region of the semiconductor substrate, and a cleaning drying process for removing foreign matter remaining on the surface of the semiconductor substrate. During the fabrication of semiconductors in this FAB process, a certain number of wafers are collected and processed and measured in accordance with process steps in a lot box unit. A Lot Identification Number (LOT ID) for distinguishing such lots is printed on a sticker with a bar code and attached to a plastic tag to check and manage the progress and position of various semiconductor manufacturing processes through a barcode reader.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing the configuration of various barcode types and RFID tags used for semiconductor product management in a semiconductor process. Fig. As shown in FIG. 1, various kinds of bar codes and dedicated readers are used in semiconductor manufacturing processes for managing semiconductor products manufactured throughout semiconductor, such as semiconductor FAB process, PKG process, and test process. That is, a PDA for 1D recognition is used for a 1D barcode of T-CARD, a PDA for C-KIT is used for a 2D barcode of C-KIT, a PDA for 1D recognition is used for a 1D barcode of a magazine or a cassette, A 2D recognition PDA is used, a RFID reader in a magazine or a cassette is used in a device, and a 1D barcode in a device is used as a recognition device for 1D recognition.

As described above, at least three dedicated scanners for recognizing each bar code are required for recognition devices used in the conventional semiconductor manufacturing process, and 1D, 2D, and RF readers are required for each process, It takes a lot of time to manage the resources by using the equipment. Especially, in order to improve the integrity and the reliability of the product, the operator must input and check the barcode by hand, and the necessity of management is required. In order to manage the semiconductor resources in the conventional semiconductor manufacturing process, it is necessary to use dedicated equipment for analyzing each bar code and RFID information, and it takes a long time to collect and organize the analyzed data, and various bar codes and RFID There is a problem that much time and expense are incurred in connection with the equipment configuration for interlocking. Korean Patent Registration No. 10-0556328 and Publication No. 10-2006-0008094 are disclosed in the prior art documents.

The present invention has been proposed in order to solve the above-mentioned problems of the previously proposed methods, and it is an object of the present invention to provide an integrated scanner and a cradle in which different types of 1D and 2D By combining the barcode and the RFID tag so that they can be recognized, it becomes possible to integrate various barcodes and RFID with one device, thereby improving the productivity. In each QC, The present invention has been made in view of the above problems, and it is an object of the present invention to provide a scanner device capable of multi-ID recognition.

In addition, the present invention realizes an integrated scanner for recognizing 1D and 2D bar codes and RFID tags, saving time and cost for data management in a semiconductor process, facilitating maintenance of bar code equipment, Another object of the present invention is to provide a scanner device capable of recognizing a multi-ID, which makes it possible to construct an apparatus at a lower cost than a scanner having a dedicated scanner for recognizing RFID tags and 1D and 2D barcodes used in a semiconductor process .

In addition, the present invention can be applied to a general-purpose semiconductor manufacturing process, in which a chip can be integratedly managed as a whole rather than a PKG unit, and multi-ID recognition It is another object of the present invention to provide a scanner device capable of performing this function.

According to an aspect of the present invention, there is provided a scanner capable of multi-ID recognition,

1. A scanner device capable of multi-ID recognition,

An integrated scanner that scans different types of 1D bar codes, 2D bar codes, and RFID tags used for semiconductor product management in a semiconductor process to obtain respective ID information set in the ID bar code, 2D bar code, and RFID tag; And

And a cradle that performs short-range wireless communication with the integrated scanner and receives ID information set in the ID bar code, the 2D bar code, and the RFID tag acquired and acquired through the integrated scanner.

Advantageously, the integrated scanner further comprises:

A scanner body in the form of a gun type for use by an operator for semiconductor product management in a semiconductor process;

A trigger provided at an upper end of a handle portion of the scanner main body so that an operator can operate the scanner for driving a scan;

A camera scanner which is formed on a front surface of the scanner body and performs scanning for acquiring ID information of the ID bar code, the 2D bar code and the RFID tag corresponding to a scan driving signal according to the operation of the trigger;

A display for displaying ID information of the ID bar code, the 2D bar code, and the RFID tag, which are formed on the rear side of the scanner body formed with the camera scanner and recognized through the camera scanner;

A communication unit for transmitting the ID information of the ID barcode, the 2D barcode, and the RFID tag acquired through the camera scanner to the cradle via short-range wireless communication;

A function button provided at a lower portion of the display for setting a function for operating and operating the integrated scanner;

A control unit that controls and manages the configuration of the integrated scanner as a whole and executes firmware for driving control of each configuration of the integrated scanner; And

And a power unit for supplying power for driving each configuration of the integrated scanner.

More preferably, the camera scanner includes:

An image sensor for scanning and recognizing the ID barcode and the 2D barcode, and an RF reader for recognizing the RFID tag.

More preferably, the communication unit includes:

And can perform Bluetooth communication with the cradle.

More preferably, the power supply unit includes:

And a lithium ion rechargeable battery for charging power from the cradle.

Preferably, the cradle includes:

A cradle main body having a corresponding shape capable of mounting the scanner main body of the integrated scanner;

A communication unit provided in the cradle body for performing data communication with the integrated scanner through Bluetooth; And

And a charging unit for charging the power source of the integrated scanner through a contact terminal formed at the lower end of the handle of the scanner body, which is held in the cradle main body.

More preferably,

The integrated scanner and the cradle can mutually recognize and pair with each other a specific ID set in advance, and enable the replacement scanner to be used.

According to the scanner device capable of multi-ID recognition proposed in the present invention, an integrated scanner and a cradle, in which integrated scanners use different types of 1D, 2D bar codes and RFID tags used for semiconductor product management in a semiconductor process By integrating and recognizing various barcodes and RFIDs, it is possible to improve productivity by integrating various barcodes and RFIDs with a single device, .

In addition, according to the present invention, the integrated scanner for recognizing 1D and 2D bar codes and RFID tags saves time and money for data management in a semiconductor process, facilitates maintenance of bar code equipment, It is possible to make the equipment configuration more inexpensive than the 1D and 2D barcode used in the conventional semiconductor process and the dedicated scanner for recognizing the RFID tag.

In addition, the present invention can be applied to a general semiconductor manufacturing process, which enables the overall integrated management of a chip, which is not a PKG unit, and enables effective resource management in a semiconductor manufacturing process.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 shows the configuration of various barcode forms and RFID tags used for semiconductor product management in semiconductor processes.
2 is a functional block diagram illustrating a configuration of a scanner device capable of multi-ID recognition according to an exemplary embodiment of the present invention.
FIG. 3 is a diagram illustrating an entire perspective view of a scanner device capable of multi-ID recognition according to an embodiment of the present invention; FIG.
4 is a perspective view of an integrated scanner applied to a scanner device capable of multi-ID recognition according to an embodiment of the present invention.
FIG. 5 is a diagram illustrating a configuration of an integrated scanner applied to a scanner device capable of multi-ID recognition according to an exemplary embodiment of the present invention. FIG.
FIG. 6 is a rear view of an integrated scanner applied to a scanner device capable of multi-ID recognition according to an embodiment of the present invention; FIG.
FIG. 7 is a view illustrating a use state of a scanner device capable of multi-ID recognition using an integrated scanner according to an embodiment of the present invention; FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, in order that those skilled in the art can easily carry out the present invention. In the following detailed description of the preferred embodiments of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In the drawings, like reference numerals are used throughout the drawings.

In addition, in the entire specification, when a part is referred to as being 'connected' to another part, it may be referred to as 'indirectly connected' not only with 'directly connected' . Also, to "include" an element means that it may include other elements, rather than excluding other elements, unless specifically stated otherwise.

FIG. 2 is a functional block diagram illustrating a configuration of a scanner device capable of multi-ID recognition according to an exemplary embodiment of the present invention. FIG. 3 is a perspective view of a scanner device capable of multi-ID recognition according to an exemplary embodiment of the present invention. FIG. 4 is a perspective view of an integrated scanner applied to a scanner device capable of recognizing a multi-ID according to an embodiment of the present invention. FIG. 5 is a schematic view of a scanner according to an embodiment of the present invention. FIG. 6 is a diagram illustrating a configuration in which an integrated scanner applied to a scanner device capable of multi-ID recognition is viewed from the front. FIG. 6 is a view illustrating an integrated scanner applied to a scanner device capable of multi- Fig. 2 to 6, the scanner device 100 capable of multi-ID recognition according to an embodiment of the present invention may include an integrated scanner 110 and a cradle 130 .

The integrated scanner 110 scans different types of 1D bar codes, 2D bar codes, and RFID tags used for semiconductor product management in a semiconductor process to acquire respective ID information set in ID bar codes, 2D bar codes, and RFID tags It is the composition of the composite reader. As shown in FIGS. 2 to 6, the integrated scanner 110 includes a scanner main body 111 in the form of a gun type for use by an operator for semiconductor product management in a semiconductor process, A trigger 112 which is provided at the upper end of the handle and which allows the operator to operate the apparatus for scan driving and a trigger 112 which is provided on the front surface of the scanner body 111 and which corresponds to the scan drive signal according to the operation of the trigger 112 A camera scanner 113 for performing a scan for acquiring ID information of the ID bar code, the 2D bar code and the RFID tag, and a scanner part 113 formed on the rear part of the scanner main body 111 in which the camera scanner 113 is formed, A display 114 for displaying ID information of the recognized ID barcode, 2D barcode and RFID tag, and ID information of the ID barcode, 2D barcode, and RFID tag acquired through the camera scanner 113 And a function button 116 for setting a function for operating and operating the integrated scanner 110. The communication unit 115 is connected to the cradle 130 through a wireless communication A control unit 117 that controls and controls each configuration of the integrated scanner 110 and that is loaded with firmware for driving control of each configuration of the integrated scanner 110, And a power supply unit 118 for supplying power for driving the light emitting diode. A work indicator lamp (not shown) is formed on the upper portion of the display 114 of the scanner main body 111 and is connected to the upper front portion of the dry type scanner main body 111, A rubber protective pad is formed around the display 114 and a rubber non-slip pad may be formed on the handle of the scanner body 111.

5, the camera scanner 113 includes an image sensor, which is formed on the upper front surface of the scanner body 111, for scanning and recognizing ID bar codes and 2D bar codes, an RF And a reader may be integrated. The communication unit 115 may perform short range wireless communication using the Bluetooth 2.0 with the cradle 130 and the power source unit 118 may be configured with a lithium ion rechargeable battery for charging the power source from the cradle 130. [

The cradle 130 has a structure of a pedestal that performs near field wireless communication with the integrated scanner 110 and is provided with ID information set in the ID barcode, 2D barcode, and RFID tag acquired and acquired through the integrated scanner 110 to be. 2 and 3, the cradle 130 includes a cradle main body 131 having a corresponding shape capable of receiving the scanner main body 111 of the integrated scanner 110, The communication unit 132 is provided in the cradle main body 131 and performs data communication with the integrated scanner 110 via Bluetooth and a contact terminal 119 formed at the lower end of the handle of the scanner body 111, And a charging unit 133 for charging the power supply unit 118 of the integrated scanner 110 through the power supply unit.

Herein, the integrated scanner 110 and the cradle 130 can recognize and pair predetermined IDs with each other, so that the integrated scanner 110 can be replaced and used.

FIG. 7 is a view showing a use state of a scanner device capable of multi-ID recognition using an integrated scanner according to an embodiment of the present invention. FIG. 7A shows a system operation scenario according to a software READ (READ) sequence for simultaneously recognizing a 1D bar code and RFID, FIG. 7B shows a system according to a software read order for simultaneously recognizing a 2D bar code and RFID Operating scenario. That is, FIG. 7 shows an operation scenario of simultaneously recognizing different types of 1D bar codes and 2D bar codes and RFID tags used for product management throughout semiconductor, such as semiconductor FAB process, PKG process, and test process.

In FIG. 7A, the integrated scanner 110 recognizes the RFID tag at the same time as the 1D barcode scan, and confirms whether the recognized ID barcode and the RFID tag number match. Then, as shown in FIG. 7 (b), the integrated scanner 110 simultaneously recognizes the RFID tag simultaneously with the 2D barcode scan, and then confirms whether the 2D barcode is loaded according to the RFID tag number. This makes it possible to manage the ID numbers of the 1D bar code, the 2D bar code and the RFID tag in an integrated manner.

As described above, the scanner device capable of multi-ID recognition according to an embodiment of the present invention integrates different types of 1D and 2D barcodes and RFID tags used for semiconductor product management in a semiconductor process It is possible to integrate various barcodes and RFIDs with one device and to improve the productivity by making it possible to recognize the barcodes and RFID in a single device. And the integrated scanner for recognizing 1D and 2D barcodes and RFID tags saves time and money for data management in the semiconductor process and facilitates the maintenance of the barcode equipment, Compared with the 1D and 2D barcodes used in semiconductor processing and dedicated scanners for recognizing RFID tags, It is possible to configure the non-enable. In particular, it is a general-purpose equipment that is applied to the semiconductor production process. It enables the overall integrated management of the chip, not the PKG unit, and enables efficient resource management in the semiconductor production process.

The present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics and scope of the invention.

100: scanner device according to an embodiment of the present invention
110: Integrated Scanner
111: Scanner body
112: Trigger
113: Camera Scanner
114: Display
115:
116: Function buttons
117:
118:
119: Contact terminal
130: Cradle
131: Cradle body
132:
133:

Claims (7)

1. A scanner device (100) capable of multi-ID recognition,
An integrated scanner 110 that scans different types of 1D bar codes, 2D bar codes, and RFID tags used for semiconductor product management in a semiconductor process to obtain respective ID information set in the ID bar code, 2D bar code, and RFID tag; And
And a cradle 130 that performs short-range wireless communication with the integrated scanner 110 and receives ID information set in the ID barcode, 2D barcode, and RFID tag acquired and collected through the integrated scanner 110 Wherein the scanner is capable of recognizing the multi-ID.
The apparatus of claim 1, wherein the integrated scanner (110)
A scanner main body 111 in the form of a gun type so that it can be used by an operator for semiconductor product management in a semiconductor process;
A trigger 112 installed at an upper end of a handle portion of the scanner main body 111 to allow an operator to operate the scanner for driving a scan;
A scanner (not shown) for scanning the ID barcode, the 2D barcode, and the RFID tag to acquire ID information corresponding to the scan driving signal generated by the operation of the trigger 112 113);
A display 114 formed on a rear portion of the scanner main body 111 on which the camera scanner 113 is formed and displaying ID information of the ID bar code, 2D bar code and RFID tag recognized through the camera scanner 113;
A communication unit 115 for transmitting ID information of the ID barcode, the 2D barcode, and the RFID tag acquired through the camera scanner 113 to the cradle 130 through short-range wireless communication;
A function button 116 installed below the display 114 to set a function for operating and operating the integrated scanner 110;
A controller 117 that controls and manages each configuration of the integrated scanner 110 and that is loaded with firmware for driving control of each configuration of the integrated scanner 110; And
And a power supply unit (118) for supplying power for driving each configuration of the integrated scanner (110).
The apparatus of claim 2, wherein the camera scanner (113)
An image sensor for scanning and recognizing the ID barcode and the 2D barcode, and an RF reader for recognizing the RFID tag.
The communication system according to claim 2, wherein the communication unit (115)
And performs a Bluetooth communication with the cradle (130).
The power supply unit according to claim 2,
And a lithium ion rechargeable battery for charging power from the cradle (130).
6. The cradle according to any one of claims 1 to 5, wherein the cradle (130)
A cradle main body 131 having a corresponding shape capable of receiving the scanner main body 111 of the integrated scanner 110;
A communication unit 132 provided in the cradle main body 131 and performing data communication with the integrated scanner 110 through Bluetooth; And
And a charging unit 133 for charging the power source unit 118 of the integrated scanner 110 through a contact terminal 119 formed at the lower end of the handle of the scanner main body 111 which is held in the cradle main body 131, Wherein the scanner is capable of recognizing the multi-ID.
The method according to claim 6,
Wherein the integrated scanner (110) and the cradle (130) mutually recognize predetermined pairs of identifiers to pair with each other to enable replacement use.

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