KR20190017165A - Method of manufacturing transmittance electrode with high transparent and low resistance and transmittance electrode with high transparent and low resistance manufactured using the method - Google Patents

Abstract

The present invention relates to a method of manufacturing a transparent electrode having high transmittance and low resistance properties and the transparent electrode having the high transmittance and low resistance properties manufactured by using the same. The method of manufacturing the transparent electrode having the high transmittance and low resistance properties in accordance with an embodiment of the present invention comprises: a step of forming a polymer fiber on a substrate by using an electrospinning method to form the polymer fiber on the substrate through spinning; a step of heat-treating the polymer fiber; a step of treating the heat-treated polymer fiber with ultraviolet (UV) radiation; a step of forming a metal layer on the ultraviolet-treated polymer fiber; and a step of removing the polymer fiber to form a transparent electrode including nanofibers.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a transparent electrode having a high transmittance and a low resistance, and a transparent electrode having a high transmittance and a low resistance, MANUFACTURED USING THE METHOD}

The present invention relates to a method of manufacturing a transparent electrode having a high transmittance and a low resistance, and a transparent electrode having a high transmittance and a low resistance characteristic.

Due to the recent development of smart electronic devices, research is being conducted on a flexible display device or a stretchable display device that replaces a conventional solid display device. A transparent electrode having transparency is required for the display device, and indium tin oxide (ITO) has been conventionally used. However, such ITO is low in flexibility and stretchability, and thus is hardly applicable to flexible display devices. In order to overcome the limitations of ITO, transparent electrodes including other materials such as graphene, silver nanowires having various advantages such as transparency, conductivity and flexibility, and transparent electrodes using conductive polymers have been widely used in industry and academia I am interested. However, since the transparent electrode using graphene, nanowire, and conductive polymer has a complicated process, and particularly, graphene causes a reduction in the transmittance of about 2.3% per one layer (mono-layer) It is impossible to use graphenes having a certain number of layers or more in order to obtain a sufficient sheet resistance value.

An object of the present invention is to solve the above-mentioned problems, and an object of the present invention is to provide a transparent electrode having a high transmittance and a low resistance characteristic, which can produce a transparent electrode having high permeability, A method of manufacturing a transparent electrode, and a transparent electrode having a high transmittance and a low resistance property manufactured by using the method.

However, the problems to be solved by the present invention are not limited to the above-mentioned problems, and other matters not mentioned can be clearly understood by those skilled in the art from the following description.

In one embodiment, there is provided a method comprising: spinning a polymeric material onto a substrate using electrospinning to form a polymeric fiber on the substrate; Heat treating the polymer fiber; Treating the thermally treated polymer fiber with ultraviolet (UV) radiation; Forming a metal layer on the ultraviolet treated polymer fiber; And removing the polymer fibers to form a transparent electrode including nanofibers. The method includes the steps of: preparing a transparent electrode having a high transmittance and a low resistance;

In one aspect, the step of heat-treating the polymer fiber may be performed at a glass transition temperature for 30 minutes to 3 hours.

In one aspect, the ultraviolet (UV) treatment of the thermally treated polymer fiber may be performed by irradiating ultraviolet light having a wavelength of 150 nm to 370 nm with an intensity of 1 kW to 25 kW for 10 seconds to 5 minutes .

In one aspect, the step of ultraviolet (UV) treatment of the thermally treated polymer fibers may be performed simultaneously with ozone (O ₃ ) treatment.

In one aspect, the step of forming the polymer fiber on the substrate may be performed by applying a negative voltage to the substrate.

On one side, the negative voltage may be a DC voltage or an AC voltage in the range of -1 KV to -10 KV.

On one side, the transparent electrode may have a transmittance of 80% or more and a sheet resistance of 100 Ω / sq or less.

In one aspect, the diameter of the polymer fiber may be 100 nm to 1 占 퐉.

In one aspect, the polymer material is at least one selected from the group consisting of polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), polyacrylic, polyurethane, polyether (PMA), polyvinyl acetate (PVAc), polyacrylonitrile (PAN), polypyryl alcohol (PPFA), polystyrene, polyethylene (PE), polyvinyl pyrrolidone (PEO), polypropylene oxide (PPO), polycarbonate (PC), polyvinyl chloride (PVC), polycaprolactone, polyvinyl fluoride and polyamide have.

On one side, the substrate may be a free standing substrate.

The metal layer may be formed of a metal such as Ag, Cu, Pt, Au, Co, Sc, Ti, Cr, (Mn), Fe (Fe), Ni, Cu, Zn, Y, Zr, Al, Tantalum (Ta), tungsten (W), rhenium (Re), osmium (Os), and tantalum (Ti), ruthenium (Ru), rhodium (Rh), palladium (Pd), cadmium (Cd), hafnium Iridium (Ir), or the like.

On one side, the thickness of the metal layer may be 50 nm to 1 占 퐉.

In another embodiment, a method of fabricating a transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment, wherein the hollow nanofibers are arranged to have a mesh shape or a web shape, A transparent electrode having low resistance characteristics is provided.

On one side, the transparent electrode may have a transmittance of 80% or more.

On one side, the transparent electrode may have a sheet resistance of 100? / Sq or less.

A method of manufacturing a transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment of the present invention is a method of manufacturing a transparent electrode having a high transparency (high light transmittance) through heat treatment and ultraviolet ray treatment, An electrode can be manufactured.

The transparent electrode having high transmittance and low resistance characteristics according to an embodiment of the present invention may have a high transmittance of 80% or more and a low resistance (high electrical conductivity) of 100 Ω / sq or less.

1 is a flowchart showing a method for manufacturing a transparent electrode having high transmittance and low resistance characteristics according to an embodiment of the present invention.
FIG. 2 is a schematic view showing a step of forming a polymer fiber on a rectangular freestanding substrate according to an embodiment of the present invention. FIG.
3 is a schematic view of a polymer material according to an embodiment of the present invention, a metal layer formed on the polymer material, and a nanofiber having a hollow structure.
4 is a photograph showing a manufacturing process of a transparent electrode according to an embodiment of the present invention.
5 is a scanning electron microscope (SEM) image of a nanofiber without heat treatment according to a comparative example of the present invention ((a) low magnification and (b) high magnification).
6 is a scanning electron microscope (SEM) image of the heat-treated nanofibers according to the embodiment of the present invention ((a) low magnification and (b) high magnification).
7 is a scanning electron microscope (SEM) image of a nanofiber according to an embodiment of the present invention before (a) ultraviolet treatment and (b) ultraviolet treatment immediately before metal deposition.
8 is a photograph of a transparent electrode manufactured according to an embodiment of the present invention.
9 is a graph illustrating transmittance of a transparent electrode according to an embodiment of the present invention.
10 is a graph showing the sheet resistance of a transparent electrode manufactured according to Comparative Examples and Examples of the present invention.
11 is a graph illustrating transmittance according to the thickness of a metal layer of a transparent electrode according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. In addition, terms used in this specification are terms used to appropriately express the preferred embodiments of the present invention, which may vary depending on the user, the intention of the operator, or the practice of the field to which the present invention belongs. Therefore, the definitions of these terms should be based on the contents throughout this specification. Like reference symbols in the drawings denote like elements.

Throughout the specification, when a member is located on another member, it includes not only when a member is in contact with another member but also when another member exists between the two members.

Throughout the specification, when an element is referred to as "comprising ", it means that it can include other elements as well, without excluding other elements unless specifically stated otherwise.

Hereinafter, a method of manufacturing a transparent electrode having a high transmittance and a low resistance characteristic according to the present invention and a transparent electrode having a high transmittance and a low resistance characteristic manufactured using the method will be described in detail with reference to embodiments and drawings. However, the present invention is not limited to these embodiments and drawings.

In one embodiment, there is provided a method comprising: spinning a polymeric material onto a substrate using electrospinning to form a polymeric fiber on the substrate; Heat treating the polymer fiber; Treating the thermally treated polymer fiber with ultraviolet (UV) radiation; Forming a metal layer on the ultraviolet treated polymer fiber; And removing the polymer fibers to form a transparent electrode including nanofibers. The method includes the steps of: preparing a transparent electrode having a high transmittance and a low resistance;

1 is a flowchart showing a method for manufacturing a transparent electrode having high transmittance and low resistance characteristics according to an embodiment of the present invention. Referring to FIG. 1, a method of fabricating a transparent electrode having high transmittance and low resistance characteristics includes a polymer fiber forming step 110; A polymer fiber heat treatment step 120; Polymeric fiber ultraviolet treatment step 130; A metal layer forming step (140) on the polymer fiber; And a transparent electrode forming step (150) of removing the polymer fibers and including the nanofibers.

On one side, the polymer fiber forming step 110 may be to spin the polymeric material onto the substrate using an electrospinning method to form a polymeric fiber on the substrate.

FIG. 2 is a schematic view showing a step of forming a polymer fiber on a rectangular freestanding substrate according to an embodiment of the present invention. FIG. Referring to FIG. 2, the polymeric material 220 may be spun on the substrate 210 by electrospinning to form the polymeric fibers 230.

In one aspect, a transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment of the present invention includes an electrospinning device (not shown) including a spinning solution tank, a spinning nozzle, a spinning nozzle tip, Hour). ≪ / RTI > The collector substrate may be the same as the substrate in the present invention. The spinning solution tank can store the spinning solution. The spinning solution can be changed depending on the substance to be spinned.

On one side, the substrate 210 may be a free standing substrate. The freestanding substrate may be a substrate having a central portion penetrating therethrough and not supporting the lower portion in a shape composed of an outer rim. In particular, the substrate 210 may include any type of substrate capable of forming a target of a free standing structure. As shown in FIG. 2, the substrate 210 may have a square shape with a central portion opened and an outer edge connected thereto. Further, the substrate may have a polygonal shape such as a triangle, a pentagon, as well as a square, and may have a polygonal shape in which a central portion is perforated and an outer edge is not connected. Further, the substrate 210 may have an annular shape having a central portion opened and an outer edge connected thereto. In addition, the substrate may have a horseshoe shape with a central portion open and an outer edge connected. Further, it may have a polygonal shape in which a central portion is perforated with a lattice structure and an outer edge is connected.

On one side, the spinning solution tank of the spinning device can pressurize the spinning solution using a built-in pump to provide a spinning solution to the spinning nozzle. The spinning nozzle can receive the spinning solution from the spinning solution tank and spin the spinning solution through the tip of the spinning nozzle located at one end. The spinning nozzle tip can spin the spinning solution by the voltage applied by the external power source after the spinning solution is pressurized by the pump and the inner nozzle tube is filled.

On one side, the spinning solution may comprise the electrospunable polymer material and a solvent.

In one aspect, the polymer material is at least one selected from the group consisting of polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), polyacrylic, polyurethane, polyether (PMA), polyvinyl acetate (PVAc), polyacrylonitrile (PAN), polypyryl alcohol (PPFA), polystyrene, polyethylene (PE), polyvinyl pyrrolidone (PEO), polypropylene oxide (PPO), polycarbonate (PC), polyvinyl chloride (PVC), polycaprolactone, polyvinyl fluoride and polyamide have.

In one aspect, the solvent is selected from the group consisting of water, methanol, ethanol, propanol, butanol, acetone, trifluoroethylene (TFE), trifluoroacetic acid (TFA), dimethylformamide (DMF), dimethylacetamide At least one selected from the group consisting of sulfoxides, sulfoxides, hexafluoroisopropanol (HFIP), hexane, benzene, acetic acid, formic acid, chloroform, tetrahydrofuran (THF) and dichloromethane (DCM).

In one side, the concentration of the spinning solution is suitable to maintain the shape of the polymer fiber upon electrospinning, and is suitably in the range of 5 wt% to 90 wt% based on the polymeric material with respect to the solvent. When the proportion of the polymer material is less than 5% by weight, dropping due to low concentration is formed rather than forming the polymer fiber during electrospinning, so that the polymer fiber can not be formed in many cases. When the content of the polymer material is more than 90% There is a possibility that a polymer fiber can not be formed. Therefore, it is necessary to prepare a spinning solution in a suitable concentration range in which the polymer fiber can be formed according to the polymer material to be used. In particular, when one or more polymeric materials are blended and spun, the polymer and solvent should be compatible and should be performed under conditions that do not cause phase separation. In addition, it is preferable that one or two kinds of solvents are mixed to prepare a spinning solution while considering the volatilization of the solvent.

In one embodiment, the step 110 of forming the polymer fiber on the substrate may be performed by applying a negative voltage to the substrate.

On one side, the negative voltage may be a DC voltage or an AC voltage in the range of -1 KV to -10 KV. The voltage may vary depending on the type of spinning solution and the amount of spinning.

On one side, the spinning rate of the spinning solution is set on the substrate for 3 minutes to 10 minutes under electrospinning conditions of 0.1 ml / h to 10 ml / h, spinning distance of 3 cm to 30 cm and relative humidity of 1% to 50% Polymeric materials can be emitted. The polymer fibers obtained under the above-mentioned range of electrospinning conditions have excellent mechanical properties such as tensile strength and elongation at break, have increased flexibility, and have a high specific surface area.

In one aspect, the diameter of the polymer fiber may be 100 nm to 1 占 퐉. When the diameter of the polymer fiber is less than 100 nm, there is a possibility that the light transmittance of the transparent electrode including the nanofibers having a hollow structure produced after the polymer fiber is removed in the future is lowered. In the case of 1 m, Can be increased.

Thus, the inner diameter and outer diameter of the hollow nanofibers can be adjusted according to the diameter range of the polymer fibers obtained at the initial spinning.

On one side, the polymer fiber heat treatment step 120 may be performed at a glass transition temperature for 30 minutes to 3 hours. The heat treatment can increase the bonding force between the polymer fibers. The heat treatment may be performed in an air atmosphere, an inert atmosphere containing argon gas or nitrogen gas, or a reducing atmosphere containing hydrogen gas.

In one aspect, the polymer fiber ultraviolet (UV) treatment step 130 may be performed immediately before forming the metal layer on the polymer fiber. By activating the surface of the polymer fiber by the ultraviolet (UV) treatment, the bonding strength between the polymer fiber and the metal layer can be improved.

In one aspect, the ultraviolet (UV) treatment of the thermally treated polymer fiber may be performed by irradiating ultraviolet light having a wavelength of 150 nm to 370 nm with an intensity of 1 kW to 25 kW for 10 seconds to 5 minutes . In the case of a wavelength lower than the wavelength range of the ultraviolet ray, the effect of the present invention in which the bonding strength between the polymer fiber and the metal layer is increased may not occur, and when the wavelength is higher than the above range, the effect of the present invention can not be obtained beyond the UV wavelength range. If the ultraviolet ray irradiation intensity is less than 1 kW or the irradiation time is less than 10 seconds, the effect of the present invention in which the bonding strength between the polymer fiber and the metal layer is increased can not be obtained. When the irradiation intensity exceeds 25 kW or exceeds 5 minutes, .

On one side, the ultraviolet (UV) treatment of the thermally treated polymer fiber can be performed, for example, by ultraviolet (UV) treatment 1 hour after the heat treatment.

In one aspect, the step of ultraviolet (UV) treatment of the thermally treated polymer fibers may be performed simultaneously with ozone (O ₃ ) treatment.

In one aspect, the heat treatment and ultraviolet (UV) treatment step according to the present invention can improve the bonding strength between the polymer fiber and the metal layer at low cost.

On one side, the metal layer forming step (140) on the preprocessed polymer fiber may be to form a metal layer on the pretreated polymer fiber, and a metal layer may be formed by surrounding at least a part of the outer side of the polymer fiber .

On one side, the metal layer may be formed by a method including at least one selected from the group consisting of sputtering, vapor deposition, ion plating, electroless plating and electrolytic plating.

The metal layer may be formed of a metal such as Ag, Cu, Pt, Au, Co, Sc, Ti, Cr, (Mn), Fe (Fe), Ni, Cu, Zn, Y, Zr, Al, Tantalum (Ta), tungsten (W), rhenium (Re), osmium (Os), and tantalum (Ti), ruthenium (Ru), rhodium (Rh), palladium (Pd), cadmium (Cd), hafnium Iridium (Ir), or the like.

On one side, the thickness of the metal layer may be 50 nm to 1 占 퐉. Preferably, the thickness of the metal layer is 50 nm to 500 nm. If the thickness of the metal layer is less than 50 nm, it is difficult to form a uniform thickness, and the electrical conductivity of the electrode is too low to increase the electrical resistance. If the thickness exceeds 1 탆, polymer fibers used in the template may be broken .

The transparent electrode forming step 150 includes removing the polymer fiber to form a transparent electrode including a nanofiber, and the polymer fiber is heat-treated or treated with an organic solvent to remove the polymer fiber, . ≪ / RTI >

On one side, the organic solvent may include any kind of solvent capable of dissolving the polymer fiber. The solvent may be selected from the group consisting of Alkanes such as hexane, Aromatics such as toluene, ethers such as diethyl ether, alkyl halides such as chloroform, Alkyl halides, Esters, Aldehydes, Ketones, Amines, Alcohols, Amides, Carboxylic acids, and the like. Water, and the like. In addition, it is also possible to use acetone, fluoroalkanes, pentanes, hexane, 2,2,4-trimethylpentane, decane, cyclohexane, Cyclopentane, Diisobutylene, 1-Pentene, Carbon dissulfide, Carbon tetrachloride, 1-Chlorobutane, 1-Chlorobutane, 1-Chloropentane, Xylene, Diisopropyl ether, 1-Chloropropane, 2-Chloropropane, Toluene, , Dichlorobenzene, benzene, bromoethane, diethyl ether, diethyl sulfide, chloroform, dichloromethane, 4-methyl Methyl-2-propanone, tetrahydrofuran, 1,2-dichloroethane, 2-butanone, 1- 1-Nitropropane, 1,4-dioxane, ethyl acetate, methyl acetate, 1-pentanol, dimethylsulfoxide, sulfoxide, aniline, diethylamine, nitromethane, acetonitrile, pyridine, 2-butoxyethanol, 1-propanol, , 2-propanol, 2-propanol, ethanol, methanol, ethylene glycol, and acetic acid.

3 is a schematic view of a polymer material according to an embodiment of the present invention, a metal layer formed on the polymer material, and a nanofiber having a hollow structure. 3, the metal layer 240 is formed by surrounding at least a part of the outer side of the polymer fiber 230. Therefore, when the polymer fiber 230 is removed, the metal layer 240 is hollow, So that the hollow nanofibers 250 are formed. The nanofibers 250 may be composed of materials having various nano shapes and include at least one selected from the group consisting of nanowires, nanotubes, and nanorods, for example. .

In one side, the transparent electrode having high transmittance and low resistance characteristics according to an embodiment of the present invention includes a one-dimensional, two-dimensional or three-dimensional conductive network structure formed by overlapping nanofibers of hollow structure 250, . ≪ / RTI > Such a transparent electrode having a high transmittance and a low resistance characteristic by a network structure can secure a conductivity of a certain level or higher. In addition, the transparent electrodes having high transmittance and low resistance characteristics can be arranged in a shape having a predetermined pattern, for example, a mesh shape, or can be arranged to have a web shape .

A transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment of the present invention includes a second substrate (not shown) disposed below the free standing substrate, lifting the second substrate, A transparent electrode having high transmittance and low resistance characteristics in which nanofibers are arranged in mesh or web form on a second substrate from a substrate can be used. The second substrate may comprise a transparent material that transmits light or a material that selectively passes light of a desired wavelength. The second substrate may comprise, for example, glass, quartz, silicon oxide, aluminum oxide or a polymer, and may be formed of, for example, polyimide, polyethylene naphthalate (PEN), polyethyleneterephthalate (PET), polymethyl methacrylate (PMMA), and polydimethylsiloxane (PDMS). The second substrate may include a flexible material, and thus the transparent electrode having the high transmittance and low resistance characteristics manufactured may have a flexible characteristic.

A method of manufacturing a transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment of the present invention is a method of manufacturing a transparent electrode having a high transparency (high light transmittance) through heat treatment and ultraviolet ray treatment, An electrode can be manufactured.

In another embodiment, a method of fabricating a transparent electrode having a high transmittance and a low resistance characteristic according to an embodiment, wherein the hollow nanofibers are arranged to have a mesh shape or a web shape, A transparent electrode having low resistance characteristics is provided.

On one side, the transparent electrode may be a surface of 25 cm ² or more. The area of the transparent electrode having high transmittance and low resistance characteristics is not particularly limited and can be controlled as much as necessary depending on the equipment. When performed through the equipment used in the present invention, the area of the graphene transparent electrode was 25 cm ² , and such an area is not limited.

On one side, the transparent electrode may have a transmittance of 80% or more, preferably 85% or more.

On one side, the transparent electrode may have a sheet resistance of 100? / Sq or less.

In one side, the permeability and sheet resistance can be controlled by adjusting the metal layer content in the manufacturing process and can be produced to meet the product specification range to be applied. For example, a transparent electrode having a high transmittance and a low resistance, which is made of nanofibers having a hollow structure according to the present invention, can be used instead of the transparent electrode used for a touch panel or a smart phone.

Hereinafter, the present invention will be described in detail with reference to the following examples and comparative examples. However, the technical idea of the present invention is not limited or limited thereto.

[Example]

1.6 g of polyvinylpyrrolidone (PVP) and 20 ml of ethanol were mixed and mixed at 40 DEG C and 750 ppm for 10 minutes to 15 minutes to prepare a spinning solution. The spinning solution was placed in the spinning solution of the spinning device and electrospun on a metal template at a spinning speed of 20 cm at a relative humidity of 50% at a release rate of 1.0 ml / h and a voltage of 9.0 kV for 3 minutes to 10 minutes. 4 is a photograph showing a manufacturing process of a transparent electrode according to an embodiment of the present invention. As shown in Fig. 4 (a), a web-shaped polymer fiber was prepared by electrospinning and superimposed on each other. The prepared polymer fiber of web type was heat treated at 150 ° C for 1.5 hours. Immediately after the heat treatment, the thermally treated polymer fiber immediately before the metal deposition was irradiated with ultraviolet rays (UV) for 60 seconds. Then, silver (Ag) having a thickness of 100 nm was deposited on the polymer fiber as a metal material to be used as an electrode. 4 (b) is a photograph of silver (Ag) deposited on the polymer fiber. Next, as shown in FIG. 4 (c), the PVP structure was dissolved and removed using acetone to prepare a transparent electrode having nanofibers of a hollow structure in the form of a web.

[Comparative Example]

A transparent electrode was prepared in the same manner as in Example except that the substrate was not heat-treated.

5 is a scanning electron microscope (SEM) image ((a) low magnification and (b) high magnification) of a nanofiber without heat treatment according to a comparative example of the present invention, (SEM) image of the fiber ((a) low magnification, and (b) high magnification). Referring to FIGS. 5 and 6, it can be seen that the nanofibers manufactured according to the embodiment of the present invention are not separated from each other but attached to each other.

7 is a scanning electron microscope (SEM) image of a nanofiber according to an embodiment of the present invention before (a) ultraviolet treatment and (b) ultraviolet treatment immediately before metal deposition. 7 (a) and 7 (b), it can be confirmed that the metal is uniformly deposited on the nanofibers by ultraviolet treatment immediately before the metal deposition.

FIG. 8 is a photograph of a transparent electrode manufactured according to an embodiment of the present invention, and FIG. 9 is a graph illustrating transmittance according to a wavelength band of a transparent electrode manufactured according to an embodiment of the present invention. Referring to FIGS. 8 and 9, it can be seen that the transparent electrode manufactured according to the embodiment of the present invention exhibits a transparency close to 90% uniformly in the entire wavelength range.

FIG. 10 is a graph showing the sheet resistance of the transparent electrode manufactured according to the comparative example and the example of the present invention, and FIG. 11 is a graph showing transmittance according to the thickness of the metal layer of the transparent electrode according to the embodiment of the present invention. Referring to FIGS. 10 and 11, although the thickness of the deposited metal layer is increased and the sheet resistance is lowered, there is no significant difference in the transmittance.

While the invention has been shown and described with reference to certain preferred embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. This is possible. Therefore, the scope of the present invention should not be limited by the described embodiments, but should be determined by the equivalents of the appended claims, as well as the appended claims.

210: substrate
220: Polymeric material
230: polymer fiber
240: metal layer
250: nanofiber

Claims (15)

Spinning a polymeric material onto a substrate using electrospinning to form a polymeric fiber on the substrate;
Heat treating the polymer fiber;
Treating the thermally treated polymer fiber with ultraviolet (UV) radiation;
Forming a metal layer on the ultraviolet treated polymer fiber; And
Removing the polymer fibers to form a transparent electrode including nanofibers;
Wherein the transparent electrode has a high transmittance and a low resistance.
The method according to claim 1,
Wherein the step of heat-treating the polymer fiber is performed at a glass transition temperature for 30 minutes to 3 hours, wherein the polymer fiber has a high transmittance and a low resistance.
The method according to claim 1,
Treating the heat-treated polymer fiber with ultraviolet (UV) radiation comprises irradiating ultraviolet rays having a wavelength of 150 nm to 370 nm with an intensity of 1 kW to 25 kW for 10 seconds to 5 minutes, Wherein the transparent electrode is a transparent electrode.
The method according to claim 1,
Wherein the ultraviolet (UV) treatment of the heat-treated polymer fibers is performed simultaneously with ozone (O ₃ ) treatment.
The method according to claim 1,
The step of forming the polymer fiber on the substrate may include:
Wherein a negative voltage is applied to the substrate to perform a high transparency and a low resistance.
6. The method of claim 5,
Wherein the negative (-) voltage is a DC voltage or an AC voltage in the range of -1 KV to -10 KV, and has a high transmittance and a low resistance.
The method according to claim 1,
Wherein the transparent electrode has a transparency of 80% or more and a sheet resistance of 100? / Sq or less.
The method according to claim 1,
Wherein the polymer fiber has a diameter of 100 nm to 1 占 퐉, wherein the polymer fiber has a high transmittance and a low resistance.
The method according to claim 1,
The polymer material may be at least one selected from the group consisting of polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), polydimethylsiloxane (PDMS), polyacryl, polyurethane, polyether urethane, Cellulose acetate butyrate, cellulose acetate propionate, polymethyl acrylate (PMA), polyvinyl acetate (PVAc), polyacrylonitrile (PAN), polyperfuryl alcohol (PPFA), polystyrene, polyethylene oxide (PEO) Wherein the film comprises at least one selected from the group consisting of polypropylene oxide (PPO), polycarbonate (PC), polyvinyl chloride (PVC), polycaprolactone, polyvinyl fluoride and polyamide. A method of manufacturing a transparent electrode having resistance characteristics.
The method according to claim 1,
Wherein the substrate is a free standing substrate. 2. The method of claim 1, wherein the substrate is a free standing substrate.
The method according to claim 1,
The metal layer may be at least one selected from the group consisting of Ag, Cu, Pt, Au, Co, Sc, Ti, Cr, (Fe), Ni, Cu, Zn, Y, Zr, Al, Nb, Mo, (Ru), Rh (Rh), Pd, Cd, hafnium (Hf), tantalum (Ta), tungsten (W), rhenium (Re), osmium Wherein the transparent electrode has a high transmittance and a low resistance.
The method according to claim 1,
Wherein the thickness of the metal layer is 50 nm to 1 占 퐉.
A method of manufacturing a transparent electrode having high transmittance and low resistance characteristics according to any one of claims 1 to 12,
Wherein the hollow nanofibers are arranged so as to have a mesh shape or a web shape.
14. The method of claim 13,
Wherein the transparent electrode has a transmittance of 80% or more.
14. The method of claim 13,
Wherein the transparent electrode has a sheet resistance of 100? / Sq or less.

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