KR20190013483A - Insulation checking device and insulation checking method - Google Patents

Abstract

An objective of the present invention is to provide a device and method for insulation inspection capable of downplaying the concern that damage to a substrate due to discharge is enlarged. The device for insulation inspection (10) comprises: probes (Pr1 to Pr4) contacting conductor patterns (P1 to P4) on a substrate (P) to be inspected; a power unit (2) outputting a voltage between any one first pattern and any one second pattern except for the first pattern of the conductor patterns (P1 to P4) through the probes (Pr1 to Pr4); and a discharge inspection unit (6) detecting the occurrence of at least one of spark and partial discharge between the first and second patterns and stopping or reducing voltage output by the power source unit (2) when the occurrence of at least one of the spark and partial discharge is detected.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an insulated inspecting apparatus,

The present invention relates to an insulation inspection apparatus and an insulation inspection method for inspecting a substrate on which a plurality of conductor patterns are formed.

Conventionally, a DC voltage is supplied from a power supply part between a pair of conductor patterns to calculate an insulation resistance value from a voltage value and a current value obtained between conductor patterns. When the calculation of the resistance value is completed, (See, for example, Patent Document 1). Patent Literature 1 discloses that when a detection signal is output from the discharge detection section until the completion of the determination of the insulation state based on the resistance value immediately after the start of the output of the direct current voltage by the power source section, A spark is generated in the sensor.

Japanese Patent Application Laid-Open No. 2015-10880 (paragraphs 0043 and 0044)

Incidentally, when sparks occur between the conductor patterns, the substrate between the conductor patterns may be carbonized or contaminated, and the resistance value between the conductor patterns may be lowered. In addition, there is a case where a conductor pattern is lost due to sparking. In addition, if a conductor pattern is missing, the spark may be more likely to occur at the edge of the missing portion, or the resistance value between the conductor patterns may be lowered, which may cause more sparking.

As described above, if a discharge such as sparking is continued for a long time or a discharge such as sparking is repeated, there is a problem that damage to the substrate is enlarged.

SUMMARY OF THE INVENTION An object of the present invention is to provide an insulation inspection apparatus and insulation inspection method which can reduce the possibility of damage to a substrate due to discharge.

An insulation inspection apparatus according to the present invention includes a plurality of probes for contacting a plurality of conductor patterns on a substrate to be inspected on which a plurality of conductor patterns are formed and a plurality of probes A power source section for outputting a voltage between a first pattern and a second pattern other than the first pattern; and a control section for detecting generation of at least one of a spark and a partial discharge between the first pattern and the second pattern And a power control unit for stopping or reducing the voltage output by the power supply unit when the occurrence of the at least one of the at least one occurrence is detected by the discharge detection unit.

Further, an insulation inspection method according to the present invention is a method for inspecting insulation between a first pattern and a second pattern other than the first pattern among the plurality of conductor patterns in a substrate to be inspected on which a plurality of conductor patterns are formed A discharge detection step of detecting at least one of a spark and a partial discharge occurring between the first pattern and the second pattern when the at least one occurrence is detected; And a power supply control step of stopping or reducing the voltage output by the output step.

According to these structures, when at least one of the spark and the partial discharge between the first pattern and the second pattern is detected and at least one of the first pattern and the second pattern is inspected, The at least one occurrence is detected and the voltage output between the first pattern and the second pattern is stopped or lowered for the insulation inspection. As a result, it is possible to reduce the possibility that the discharge of spark or the like continues for a long time or that the discharge is repeated, and the damage of the substrate due to discharge is enlarged.

It is preferable that the apparatus further comprises a forced discharge unit for conducting the first pattern and the second pattern when the at least one occurrence is detected by the discharge detection unit.

According to this configuration, when at least one of the above-mentioned occurrences is detected, the first pattern and the second pattern become conductive, the stray capacitance of the first pattern and the second pattern are discharged, and the potentials of the first pattern and the second pattern are equalized Therefore, it is possible to reduce the possibility that the discharge of the spark or the like is continued for a long time or that the discharge is repeated, and the damage of the substrate due to the discharge is enlarged.

And a switch for opening / closing a conductive path extending from the power supply unit to at least one of the first pattern and the second pattern at a position different from a conduction path made conductive by the forcedly discharging unit for outputting the voltage And the power source control section stops the voltage output by the power source section by opening the switch when the generation of the at least one of the voltages is detected by the discharge detection section.

According to this structure, when at least one of the spark and the partial discharge is generated, the switch is opened and the power supply portion is separated from at least one of the first pattern and the second pattern, so that the voltage output of the power supply portion between the first and second patterns becomes quick . This prevents the spark or partial discharge from continuing for a long time or repetition of the spark or partial discharge, thereby reducing the possibility that the damage of the substrate due to spark or partial discharge is enlarged. Also, since the switch opens and closes the conductive path from the power supply unit to the first or second pattern to be inspected at a position different from the conduction path that is the path of the discharge by the forced discharge unit, The discharge of the charge charged in the second pattern is not hindered.

It is preferable that the discharge detector is configured using an FPGA, an ASIC, a real-time OS, or a microcomputer not using an OS.

According to this configuration, it is possible to determine at a high speed that the determination as to whether or not a spark has occurred is made by a computer using an information system OS such as a personal computer, so that it is possible to reduce the possibility .

It is preferable to further include a determination unit that determines the insulation between the patterns based on the voltage and the current between the first pattern and the second pattern.

According to this structure, the insulating property between the first pattern and the second pattern can be determined.

The insulation inspection apparatus and insulation inspection method having such a configuration can reduce the possibility that the damage of the substrate due to discharge is enlarged.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic block diagram of an insulation inspection apparatus using an insulation inspection method according to an embodiment of the present invention; FIG.
Fig. 2 is a block diagram showing an example of the configuration of the discharge detecting section shown in Fig. 1. Fig.
3 is a flowchart showing an example of the operation of the insulation inspection apparatus shown in Fig.
4 is an explanatory diagram for explaining a circuit operation of a power supply control process;

Best Mode for Carrying Out the Invention Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the drawings, the same reference numerals denote the same components, and a description thereof will be omitted. 1 is a schematic block diagram of an insulation inspection apparatus 1 using an insulation inspection method according to an embodiment of the present invention. 1 shows a state in which a substrate P to be inspected is connected to the insulation inspection apparatus 1 for insulation inspection.

The substrate P to be inspected may be a printed wiring board, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for display such as a liquid crystal display or an EL (Electro-Luminescence) A transparent conductive plate for a panel or the like, a package substrate for a semiconductor package, a film carrier, a semiconductor wafer, a semiconductor substrate such as a semiconductor chip or a CSP (Chip Size Package), or the like.

Fig. 1 shows an example in which four conductor patterns P1, P2, P3, and P4 (conductor patterns) are formed on the surface of a substrate P. Fig.

The insulation inspection apparatus 1 shown in Fig. 1 includes probes Pr1, Pr2, Pr3, Pr4, a power supply 2, a current detection unit 3, a voltage detection unit 4, a switching circuit unit 5, 6 (power supply control section), a switching element SW1 (forced discharge section), a switching element SW2 (switch) and a control section 7.

The probes Pr1, Pr2, Pr3, and Pr4 are contacts that are in contact with the conductor patterns P1, P2, P3, and P4 of the substrate P, respectively. The number of conductor patterns and probes may be plural, but not limited to four. The switching elements SW1 and SW2 are constituted by using, for example, a semiconductor switching element such as a transistor or a relay switch.

The power supply unit 2 is a power supply circuit that outputs a voltage for insulation inspection between conductor patterns to be inspected. The power supply unit 2 is, for example, a DC constant-voltage power supply circuit configured by using a switching power supply circuit or the like. The positive side output terminal of the power supply section 2 is connected to the switching circuit section 5 via the switching element SW2, the discharge detection section 6 and the positive side wiring Lp. The negative side output terminal of the power supply section 2 is connected to the switching circuit section 5 via the current detecting section 3 and the minus side wiring line Lm. The minus side output terminal of the power supply unit 2 is connected to the circuit ground and the minus side wiring Lm is connected to the circuit ground via the current detection unit 3. [

The power supply unit 2 is not necessarily limited to the constant voltage power supply circuit. The power source unit may be a variable voltage source. For example, as described in Japanese Patent Laid-Open Publication No. 2015-45542, a constant current source and a limiter circuit for limiting the output voltage of the constant current source to not exceed a predetermined upper limit voltage It may be combined with the power supply unit. As the power supply unit 2, for example, a step-up switching power supply circuit described in Japanese Patent Application Laid-Open No. 2001-178137 can be used.

The current detection unit 3 is configured by using, for example, a shunt resistor, a Hall element, an analog / digital converter, or the like. The current detection section 3 detects the current I flowing through the minus side wiring line Lm and outputs a signal indicating the detected current I to the control section 7. [

The voltage detecting section 4 is constituted by using, for example, a voltage dividing resistor or an analog / digital converter. The voltage detecting section 4 detects the voltage V between the positive side wiring Lp and the circuit ground and outputs a signal indicating the detected voltage V to the control section 7. [ The circuit ground is connected to the minus-side wiring Lm through the current detecting unit 3. The voltage detecting unit 4 detects the voltage V between the positive-side wiring Lp and the minus-side wiring Lm, That is, the voltage V between the conductor patterns to be inspected.

The switching circuit unit 5 is constituted by using a plurality of switching elements which are turned on and off in accordance with a control signal from the control unit 7, for example. The switching circuit unit 5 is a circuit for connecting the positive side wiring Lp and the probes Pr1, Pr2, Pr3 and Pr4 and the connection between the minus side wiring Lm and the probes Pr1 , Pr2, Pr3, and Pr4 can be switched.

Thus, when inspecting the insulation between the conductor patterns P1 and P2, for example, the control section 7 connects the probe Pr1 and the positive-side wiring Lp by the switching circuit section 5, And the probe Pr2 and the minus-side wire Lm are connected. As a result, an output voltage from the power supply unit 2 is applied between the conductor patterns P1 and P2, a current flowing between the conductor patterns P1 and P2 is detected by the current detection unit 3, P2 are detected by the voltage detecting unit 4. [ In this case, the conductor pattern P1 corresponds to an example of the first pattern, and the conductor pattern P2 corresponds to an example of the second pattern.

Further, the control section 7 may inspect insulation between one of the plurality of conductor patterns and the remaining wiring pattern. In this case, the control unit 7 may be configured such that the probe Pr1 and the positive side wiring Lp are connected by the switching circuit unit 5 and the probes Pr2, Pr3, and Pr4 are connected to the minus side wiring Lm do. In this case, the conductor pattern P1 corresponds to an example of the first pattern, and the conductor patterns P2, P3, and P4 correspond to an example of the second pattern.

In order to simplify the explanation, insulation inspection between the conductor patterns P1 and P2 is exemplified. The switching circuit portion 5 connects the probe Pr1 and the positive side wiring Lp, and the probe Pr2 ) And the minus-side wiring Lm are connected to each other (Fig. 1).

One end of the switching element SW1 is connected to the power supply portion 2 via the switching element SW2 and is connected to the positive side wiring Lp via the discharge detection portion 6. For example, The other end of the switching element SW1 is connected to the circuit ground. The switching element SW1 is turned on and off in accordance with a control signal from the control unit 7. [ The switching element SW1 is normally off.

When the switching element SW1 is turned on, the conductor pattern to be inspected, for example, the conductor pattern P1 and the conductor pattern P2 are electrically connected to the circuit ground, the current detecting portion 3, the switching circuit portion 5 and the probes Pr1, Pr2. As a result, the conductor patterns P1 and P2 are almost at the same potential.

The switching element SW1 corresponds to an example of the forced discharge unit. Further, the forced discharge unit is not limited to the example constituted by a single switching element SW1. For example, the forced discharge unit may be constituted by a series circuit of a switching element and a resistor.

The discharge detecting section 6 detects the occurrence of sparks and partial discharges between the conductor patterns to be inspected, for example, between the conductor patterns P1 and P2. When detecting the occurrence of a spark or a partial discharge, the discharge detection section 6 outputs a discharge detection signal to the switching element SW1 to turn on the switching element SW1. The partial discharge is an electric discharge which partially bridges the insulating portion, for example, as described in the definition of the term of JIS C60664-1 (IEC60664-1).

When the occurrence of spark or partial discharge is detected, the discharge detection section 6 outputs a discharge detection signal to the power supply section 2 to stop the switching operation of the power supply section 2 and to output the voltage output of the power supply section 2 Stop. The discharge detection section 6 outputs the discharge detection signal to the switching element SW2 to separate the power supply section 2 from the conductor pattern P1 to generate the power supply section 2, And stops the voltage output of the inverter. The discharge detecting section 6 shown in Fig. 1 also serves as a power supply control section for stopping the voltage output by the power supply section 2 when the occurrence of spark or partial discharge is detected.

When detecting the occurrence of spark or partial discharge, the discharge detection section 6 outputs a discharge detection signal to the control section 7, and notifies the control section 7 of the occurrence of spark or partial discharge.

2 is a block diagram showing an example of the configuration of the discharge detector 6 shown in Fig. 2 includes a current detection circuit 61, a voltage detection circuit 62, a high-speed AD converter 63, and an FPGA (Field Programmable Gate Array)

The current detection circuit 61 detects a current flowing in the positive side wiring Lp, that is, a current I flowing between the conductor patterns P1 and P2, and outputs a voltage signal corresponding to the current value to the high-speed AD converter 63 . As the current detection circuit 61, for example, a shunt resistor or a Hall element can be used.

The voltage detection circuit 62 detects the voltage of the circuit ground and the positive side wiring Lp, that is, the voltage V between the conductor patterns P1 and P2 and outputs the voltage signal corresponding to the voltage value to the high-speed AD converter 63). As the voltage detection circuit 62, for example, a voltage-dividing resistor may be used, or the wiring for directly connecting the positive-side wiring Lp to the high-speed AD converter 63 may be used.

The high-speed AD converter 63 is a so-called analog-to-digital converter that converts the voltage signal output from the current detection circuit 61 and the voltage detection circuit 62 into a digital value and outputs the digital value to the FPGA 64. The high-speed AD converter 63 preferably has a higher conversion speed.

The FPGA 64 is programmed with a predetermined logic operation circuit. The FPGA 64 determines the occurrence of the spark and the partial discharge based on the voltage signal output from the current detection circuit 61 or the voltage detection circuit 62. The FPGA 64 can determine that a spark has occurred, for example, when the current I detected by the current detection circuit 61 increases momentarily. Alternatively, the FPGA 64 can determine that a spark has occurred when, for example, the voltage V detected by the voltage detection circuit 62 drops momentarily.

 Alternatively, the FPGA 64 may determine that the current I measured by the current detection circuit 61 falls below a predetermined threshold value after the current supply to the conductor pattern to be inspected by the power supply section 2 is started, for example, , It may be determined that a spark or a partial discharge has occurred.

When the generation of the spark and the partial discharge is judged in the personal computer using the information system OS (Operating System) such as the control unit 7 which will be described later by judging the generation of the spark and the partial discharge in the FPGA 64 The occurrence of the spark and the partial discharge can be judged in a short time. The discharge detecting unit 6 may be configured to use an application specific integrated circuit (ASIC) or a real time OS (Operating System) instead of the FPGA 64 or a microcomputer that does not use an OS to perform spark and partial discharge The occurrence may be judged.

The discharge detecting section 6 is not provided with the current detecting circuit 61 and the voltage detecting circuit 62 and instead the current detecting section 3 and the current I detected by the voltage detecting section 4, , And the voltage (V).

The discharge detecting section is not limited to the example in which the occurrence of the spark and the partial discharge can be detected, and the generation of the spark and the partial discharge is determined using the FPGA. Various detection methods can be used. As a method for detecting the occurrence of sparks, for example, Japanese Patent No. 3546046, Japanese Patent No. 3953087, Japanese Patent No. 4369949, Japanese Patent No. 4918339, Japanese Patent No. 5866943 , Japanese Patent Application Laid-Open Nos. 2015-10880 and 2015-45542, and the like may be used to detect the spark.

The discharge detecting section may detect the occurrence of the partial discharge based on the temporal change of the current I measured by the current detecting circuit 61, as described in, for example, Japanese Patent Application Laid-Open No. 2015-45542 . Further, as described in, for example, Japanese Patent Laid-Open Publication No. 2010-32457, the discharge detecting section determines that a partial discharge has occurred when an electromagnetic wave generated when a partial discharge is generated is detected, May be detected. Alternatively, the discharge detecting section may detect the partial discharge based on a method described in a standard standard such as JIS C60664-1 (IEC60664-1).

Further, the discharge detecting section is not limited to the example of detecting the occurrence of the spark and the partial discharge, and may be configured to detect either the spark or the partial discharge.

The control unit 7 includes, for example, a CPU (Central Processing Unit) for executing a predetermined logical operation, a RAM (Random Access Memory) for temporarily storing data, a nonvolatile storage unit for storing a predetermined control program, A peripheral circuit, and the like. The control unit 7 is configured using, for example, a personal computer using an information system OS (Operating System). The control unit 7 functions as the inspection control unit 71 and the determination unit 72 by executing the control program.

The inspection control unit 71 sequentially selects the first pattern and the second pattern to be inspected from the plurality of conductor patterns formed on the substrate P and supplies the positive side wiring Lp by the switching circuit unit 5. [ Side wiring Lm is conducted to the second pattern, and the power supply unit 2 outputs the voltage V between the first pattern and the second pattern.

The determination unit 72 determines the insulation between the first pattern and the second pattern based on the current I detected by the current detection unit 3 and the voltage V detected by the voltage detection unit 4 . More specifically, the determination unit 72 calculates the insulation resistance R between the first pattern and the second pattern from the current I and the voltage V based on the following equation (1).

Insulation resistance (R) = V / I ... (One)

When the insulation resistance R is equal to or higher than the reference resistance Rref, it is determined that the insulation state is good, and the insulation resistance R R is less than the reference resistance Rref, it is determined that the insulation is defective.

The insulation inspection apparatus 1 may not include the voltage detection unit 4 and the determination unit 72 may determine the insulation state based on the preset voltage V as the output voltage of the power supply unit 2. [

Next, the operation of the insulation inspection apparatus 1 configured as described above will be described. 3 is a flowchart showing an example of the operation of the insulation inspection apparatus 1 shown in Fig. First, in the initial state, the switching element SW1 is turned off, the switching element SW2 is turned on, and the power source section 2 performs a switching operation to output the voltage V (step S1).

Subsequently, the inspection control unit 71 selects the first and second patterns to be inspected among the conductor patterns P1, P2, P3, and P4 (step S2). Subsequently, the inspection control unit 71 connects the first pattern and the positive side wiring Lp by the switching circuit unit 5, and connects the second pattern and the minus side wiring Lm. As a result, the voltage V from the power supply unit 2 is output between the first pattern and the second pattern (step S3: power supply output step).

When the voltage (V) is applied between the first pattern and the second pattern, the stray capacitances of the first pattern and the second pattern are filled, and the voltage between the first pattern and the second pattern rises. Thus, the inspection control unit 71 is configured to perform the discharging from the discharge detecting unit 6 during the period until a preset waiting time elapses after the voltage is applied or until the detection voltage of the voltage detecting unit 4 becomes stable, It is monitored whether a detection signal is detected (step S4).

The determination unit 72 compares the current I detected by the current detection unit 3 with the current I detected by the voltage detection unit 4 in step S4, The insulation resistance R is calculated by the above formula (1) based on the voltage (V) detected at step S5.

Then, the determination unit 72 compares the reference resistance Rref with the insulation resistance R (step S6: determination step). If the insulation resistance R does not reach the reference resistance Rref (step S6: NO "), it is determined that the substrate P is insulated (step S9), and the process is terminated.

On the other hand, if the insulation resistance R is equal to or larger than the reference resistance Rref (YES in step S6), the determination section 72 determines that the insulation state between the first pattern and the second pattern is good, It is determined whether or not the insulation inspection has been completed with respect to the entire conductor pattern in step S7 (step S7). When the insulation inspection is completed for the entire conductor pattern (YES in step S7), the determination unit 72 determines that the substrate P is good (step S10) and ends the processing.

On the other hand, if there remains a conductor pattern that has not yet been subjected to the insulation inspection in step S7 ("NO" in step S7), the inspection control section 71 selects a new first pattern from among the conductor patterns yet to undergo the insulation inspection , The second pattern is selected from the conductor patterns other than the first pattern (step S8), and the processing after step S3 is executed again.

On the other hand, if the occurrence of spark or partial discharge is detected by the discharge detection section 6 (YES in step S4), the discharge detection section 6 determines that the spark or partial discharge has occurred And outputs the detection signal to the switching elements SW1 and SW2, the power supply section 2 and the control section 7. [

Thereby, the switching element SW1 is turned on (forced discharge step), the switching element SW2 is turned off, the power supply part 2 stops switching, and the output of the voltage V is stopped or lowered (power supply control step) (Step S11). Further, the control unit 7 is notified of the occurrence of spark or partial discharge, and the determination unit 72 determines that the insulation of the substrate P is defective (step S9), and ends the processing.

4 is an explanatory view for explaining the circuit operation of the forced discharge process and the power source control process of step S11. When the switching element SW1 is turned on, the probe Pr1 connected to the conductor pattern P1 (first pattern) and the probe Pr2 connected to the conductor pattern P2 (second pattern) are connected to the switching elements SW1 And the conductor pattern P1 and the conductor pattern P2 quickly rise up in coincidence (forced discharge step). This prevents the spark or partial discharge from continuing for a long time or repetition of the spark or partial discharge, thereby reducing the possibility that the damage of the substrate due to spark or partial discharge is enlarged.

When the switching element SW2 is turned off, the power supply unit 2 is disconnected from the conductor pattern P1, so that the voltage output of the power supply unit 2 between the conductor patterns P1 and P2 is stopped (power supply control step) . This prevents the spark or partial discharge from continuing for a long time or repetition of the spark or partial discharge, thereby reducing the possibility that the damage of the substrate due to spark or partial discharge is enlarged.

Also, by stopping the switching operation of the power supply unit 2, the voltage output of the power supply unit 2 between the conductor patterns P1 and P2 is stopped or lowered. As described in, for example, Japanese Patent Laid-Open Publication No. 2001-178137, a switching power supply circuit used in the power supply section 2 is composed of a rectifying circuit for rectifying a commercial AC power supply voltage and a capacitor for smoothing a rectified voltage And a step-up chopper circuit for chopping the converted direct-current voltage with a chopping coil by switching operation of the switching element, and smoothing and outputting the chopped coil with a power smoothing capacitor.

Therefore, even if the switching operation of the power supply section 2 is stopped, the voltage is held by the charge charge of the power smoothing capacitor, so that it takes time to lower the output voltage of the power supply section 2. [ Even if the power supply circuit is different from the above-described switching power supply circuit, since the smoothing capacitor is usually provided at the output terminal of the power supply circuit, even if the operation of the power supply circuit is stopped, It takes.

Further, in the switching power supply circuit having the above-described conversion circuit and step-up chopper circuit, the switching operation is stopped, so that the step-up by the step-up chopper circuit is stopped and the output voltage is lowered. However, even if the switching operation is stopped, the DC conversion by the conversion circuit continues, and the output of the DC-converted voltage may continue.

In this case also, when the occurrence of spark or partial discharge is detected in step S4, the switching element SW2 is turned off and the power supply part 2 is disconnected from the positive side wiring Lp, It is possible to reduce the possibility of spark or partial discharge continuing for a long time or reducing the possibility of repetition of spark or partial discharge and reducing the possibility that the damage of the substrate due to spark or partial discharge is enlarged.

The switching element SW2 opens and closes the conductive path from the power supply part 2 to the first or second pattern to be inspected at a position different from the conductive path L1 that is conducted by the switching element SW1, Even if the switching element SW2 is turned off, the discharge of the charges charged in the first and second patterns by the switching element SW1 is not hindered.

It is not always necessary to detect both the spark and the partial discharge in step S4. When the spark is detected ("YES" in step S4), the process goes to step S11. If no spark is detected ("NO" in step S4), the discharge detector 6 It may be implemented. Alternatively, the discharge detecting section 6 executes only the detection of the partial discharge. When the partial discharge is detected (YES in step S4), the process proceeds to step S11. If the partial discharge is not detected (NO in step S4) ) Step S5 may be performed.

The power supply unit 2 is not limited to the switching power supply circuit, and the method of stopping or reducing the voltage output of the power supply unit 2 is not limited to stopping the switching operation. For example, by stopping the supply of the primary side power source voltage to the power source unit 2, the voltage output of the power source unit 2 may be stopped or lowered.

Also, the switching element SW2 may not necessarily be provided. When the switching element SW2 is not provided, the electric charge stored in the smoothing capacitor at the output terminal of the power source 2 is discharged from the switching element SW1, and the voltage is rapidly reduced. As a result, it is possible to reduce the risk of spark or partial discharge continuing for a long time, or repetition of spark or partial discharge, thereby reducing the possibility that the damage of the substrate due to spark or partial discharge is enlarged.

Also, the switching element SW1 may not necessarily be provided. Even if the switching element SW1 is not provided, when the occurrence of spark or partial discharge is detected in step S4, the supply voltage is stopped by turning off the switching element SW2, As a result of stopping or lowering, the supply of new electric power from the power source unit 2 is reduced. As a result, it is possible to reduce spark or partial discharge for a long time or reduce the possibility of repetition of spark or partial discharge, It is possible to reduce the possibility that the damage of the substrate due to the defects is enlarged.

1: Insulation inspection device
2:
3: current detector
4: Voltage detector
5:
6:
7:
61: Current detection circuit
62: Voltage detection circuit
63: High-speed AD converter
71:
72:
L1: Challenge path
Lm: Negative side wiring
Lp: positive side wiring
P: substrate
P1: Conductor pattern
P1, P2, P3, P4: conductor pattern
Pr1, Pr2, Pr3, Pr4: Probe
R: Insulation resistance
Rref: Reference resistance
SW1: Switching element (forced discharge part)
SW2: Switching element (switch)

Claims (6)

A plurality of probes for contacting the plurality of conductor patterns on a substrate to be inspected on which a plurality of conductor patterns are formed,
A power supply unit for outputting a voltage between any first pattern and any second pattern other than the first pattern among the plurality of conductor patterns through the plurality of probes;
A discharge detecting section for detecting occurrence of at least one of spark and partial discharge between the first pattern and the second pattern;
And a power supply control unit for stopping or reducing the voltage output by the power supply unit when the at least one occurrence is detected by the discharge detection unit. The inspecting apparatus according to claim 1, further comprising a forced discharge unit for conducting the first pattern and the second pattern when the at least one occurrence is detected by the discharge detection unit. 3. The apparatus according to claim 2, wherein the conductive path extending from the power supply part to at least one of the first pattern and the second pattern for outputting the voltage is opened and closed at a position different from the conduction path conducted by the forced discharge part Further comprising a switch,
Wherein the power supply control section stops the voltage output by the power supply section by opening the switch when the discharge detection section detects the occurrence of at least one of the voltages. The insulation inspection apparatus according to any one of claims 1 to 3, wherein the discharge detection unit is configured using an FPGA, an ASIC, or a microcomputer using a real-time OS or using no OS. The insulation inspection apparatus according to any one of claims 1 to 4, further comprising: a determination section that determines insulation between the patterns based on a voltage and a current between the first pattern and the second pattern. A power supply outputting step of outputting a voltage between any one of the plurality of conductor patterns and a second pattern other than the first pattern in a substrate to be inspected on which a plurality of conductor patterns are formed;
A discharge detecting step of detecting at least one of a spark and a partial discharge between the first pattern and the second pattern;
And a power supply control step of stopping or reducing the voltage output by said power output step when said at least one occurrence is detected.

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