CN109307826B - Insulation inspection device and insulation inspection method - Google Patents

Insulation inspection device and insulation inspection method Download PDF

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Publication number
CN109307826B
CN109307826B CN201810810143.7A CN201810810143A CN109307826B CN 109307826 B CN109307826 B CN 109307826B CN 201810810143 A CN201810810143 A CN 201810810143A CN 109307826 B CN109307826 B CN 109307826B
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pattern
discharge
power supply
voltage
unit
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CN109307826A (en
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笠井淳
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Nidec Advance Technology Corp
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Nidec Read Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/12Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
    • G01R31/1227Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
    • G01R31/1263Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
    • G01R31/129Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation of components or parts made of semiconducting materials; of LV components or parts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/025Measuring very high resistances, e.g. isolation resistances, i.e. megohm-meters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Relating To Insulation (AREA)
  • Manufacture Of Motors, Generators (AREA)

Abstract

The invention provides an insulation inspection device and an insulation inspection method, wherein the insulation inspection device (1) comprises: a plurality of probes for contacting with the plurality of conductor patterns in the substrate of the inspection object; a power supply unit that outputs a voltage between a first pattern and a second pattern via a probe, the first pattern being any one of the conductor patterns, the second pattern being any one of the conductor patterns other than the first pattern; a discharge detection unit that detects at least one of occurrence of an electric spark and a partial discharge between the first pattern and the second pattern; and a power supply control unit that stops or reduces the voltage output of the power supply unit when the discharge detection unit detects the occurrence of at least one of the electric spark and the partial discharge.

Description

Insulation inspection device and insulation inspection method
Technical Field
The present invention relates to an insulation inspection apparatus and an insulation inspection method for performing insulation inspection on a substrate on which a plurality of conductor patterns are formed.
Background
Conventionally, there is known a technique in which a dc voltage is supplied from a power supply unit between a pair of conductor patterns, an insulation resistance value is calculated from a voltage value and a current value obtained between the conductor patterns, and the power supply unit is controlled to decrease an applied voltage value when the calculation of the resistance value is completed. Japanese patent laying-open No. 2015-10880 discloses a technique for detecting the occurrence of a spark between a pair of conductor patterns when a detection signal is output from a discharge detection unit during a period from immediately after output of a dc voltage by a power supply unit to completion of determination of an insulation state based on a resistance value.
However, if sparks occur between the conductor patterns, the substrate between the conductor patterns may be carbonized or stained, and the resistance value between the conductor patterns may be reduced. In addition, the conductor pattern may be broken by spark discharge. If the conductor pattern is broken, spark discharge is more likely to occur at the edge of the broken portion, and spark may be more likely to occur due to a decrease in the resistance value between the conductor patterns.
As described above, if the discharge such as spark is continued for a long time or repeated, there is a problem that damage to the substrate is increased.
Disclosure of Invention
The invention aims to provide an insulation inspection device and an insulation inspection method which can reduce the possibility of damage expansion of a substrate caused by discharge.
An insulation inspection device according to an exemplary embodiment of the present invention includes: a plurality of probes for contacting the plurality of conductor patterns in a substrate to be inspected on which the plurality of conductor patterns are formed; a power supply unit that outputs a voltage between a first pattern and a second pattern via the plurality of probes, the first pattern being any one of the plurality of conductor patterns, the second pattern being any one of the plurality of conductor patterns other than the first pattern; a discharge detection unit that detects at least one of occurrence of an electric spark and partial discharge between the first pattern and the second pattern; and a power supply control unit that stops or reduces a voltage output of the power supply unit when the discharge detection unit detects the occurrence of at least one of the spark and the partial discharge.
In addition, an insulation inspection method according to an exemplary embodiment of the present invention includes: a power supply output step of outputting a voltage between a first pattern and a second pattern, the first pattern being any one of a plurality of conductor patterns in a substrate to be inspected on which the plurality of conductor patterns are formed, and the second pattern being any one of the plurality of conductor patterns other than the first pattern; a discharge detection step of detecting at least one of generation of an electric spark and a partial discharge between the first pattern and the second pattern; and a power supply control step of stopping or reducing the voltage output in the power supply output step when the occurrence of at least one of the spark and the partial discharge is detected.
According to these configurations, the occurrence of at least one of a spark and a partial discharge between the first pattern and the second pattern is detected, and when the occurrence of at least one of a spark and a partial discharge between the first pattern and the second pattern to be subjected to the insulation inspection is detected, the occurrence of at least one of a spark and a partial discharge is detected, and the voltage output to be output between the first pattern and the second pattern is stopped or decreased for the insulation inspection. As a result, it is possible to reduce the possibility that the discharge such as spark continues for a long time or the discharge is repeated, and the possibility that the damage of the substrate due to the discharge is spread can be reduced.
The insulation inspection apparatus and the insulation inspection method configured as described above can reduce the possibility of the damage of the substrate spreading due to the discharge.
The above and other features, elements, steps, features and advantages of the present invention will be more clearly understood from the following detailed description of the preferred embodiments of the present invention taken in conjunction with the accompanying drawings.
Drawings
Fig. 1 is a schematic configuration diagram of an insulation inspection apparatus using an insulation inspection method according to an embodiment of the present invention.
Fig. 2 is a block diagram showing an example of the configuration of the discharge detection unit shown in fig. 1.
Fig. 3 is a flowchart showing an example of the operation of the insulation inspection apparatus shown in fig. 1.
Fig. 4 is an explanatory diagram for explaining a circuit operation in the power supply control step.
Description of the reference numerals
1: insulation inspection device
2: power supply unit
3: current detection unit
4: voltage detection unit
5: switching circuit unit
6: discharge detection unit
7: control unit
61: current detection circuit
62: voltage detection circuit
63: high-speed AD converter
71: inspection control unit
72: determination unit
L1: conductive path
Lm: negative electrode side wiring
Lp: positive electrode side wiring
P: substrate
P1: conductor pattern
P1, P2, P3, P4: conductor pattern
Pr1, pr2, pr3, pr4: probe needle
R: insulation resistance
Rref: reference resistance
SW1: switch element (forced discharge part)
SW2: switch element (switch)
Detailed Description
Embodiments of the present invention are described below with reference to the drawings. Note that, in the drawings, the same reference numerals denote the same components, and a description thereof will be omitted. Fig. 1 is a schematic configuration diagram of an insulation inspection apparatus 1 using an insulation inspection method according to an embodiment of the present invention. Fig. 1 shows a state in which a substrate P to be inspected is connected to an insulation inspection apparatus 1 for performing insulation inspection.
The substrate P to be inspected may be, for example, a printed wiring board, an epoxy glass substrate, a flexible substrate, a ceramic multilayer wiring board, an electrode plate for a display panel such as a liquid crystal display panel or an EL (Electro-Luminescence) display panel, a transparent conductive plate for a touch panel, a Package substrate or a carrier film for a semiconductor Package, a semiconductor wafer, a semiconductor Chip, a semiconductor substrate such as a CSP (Chip Size Package), or the like.
Fig. 1 shows an example in which four conductor patterns P1, P2, P3, and P4 (conductor patterns) are formed on the surface of a substrate P.
The insulation inspection apparatus 1 shown in fig. 1 includes probes Pr1, pr2, pr3, pr4, a power supply unit 2, a current detection unit 3, a voltage detection unit 4, a switching circuit unit 5, a discharge detection unit 6 (power supply control unit), a switching element SW1 (forced discharge unit), a switching element SW2 (switch), and a control unit 7.
The probes Pr1, pr2, pr3, and Pr4 are contact terminals that are in contact with the conductor patterns P1, P2, P3, and P4 of the substrate P, respectively. The number of the conductive patterns and the number of the probes are not limited to four, as long as they are plural. The switching elements SW1 and SW2 are configured using, for example, a semiconductor switching element such as a transistor and/or a delay switch.
The power supply unit 2 is a power supply circuit that outputs a voltage for insulation inspection between conductor patterns to be inspected. The power supply unit 2 is a dc constant voltage power supply circuit configured using, for example, a switching power supply circuit. The positive-side output terminal of the power supply unit 2 is connected to the switching circuit unit 5 via the switching element SW2, the discharge detection unit 6, and the positive-side wiring Lp. The negative-side output terminal of the power supply unit 2 is connected to the switching circuit unit 5 via the current detection unit 3 and the negative-side wiring Lm. The negative side output terminal of the power supply unit 2 is connected to a circuit ground point, and the negative side wiring Lm is connected to the circuit ground point via the current detection unit 3.
Note that the power supply unit 2 is not necessarily a constant voltage power supply circuit. The power supply unit may be a variable voltage source, and for example, as described in japanese patent application laid-open No. 2015-45542, a constant current source and a limiter circuit that limits an output voltage of the constant current source so as not to exceed a predetermined upper limit voltage may be combined to form the power supply unit. As the power supply unit 2, for example, a boost switching power supply circuit described in japanese patent application laid-open No. 2001-178137 can be used.
The current detection unit 3 is configured using, for example, a shunt resistor, a hall element, an analog-digital converter, or the like. The current detection unit 3 detects a current I flowing through the negative-side wiring Lm, and outputs a signal indicating the detected current I to the control unit 7.
The voltage detection unit 4 may be configured using, for example, a voltage dividing resistor and/or an analog-digital converter. The voltage detection unit 4 detects a voltage V between the positive-side wiring Lp and the circuit ground point, and outputs a signal indicating the detected voltage V to the control unit 7. Since the circuit ground point is connected to the negative-side wiring Lm via the current detection unit 3, the voltage detection unit 4 detects the voltage V between the positive-side wiring Lp and the negative-side wiring Lm, that is, the voltage V between the conductor patterns to be inspected.
The switching circuit unit 5 is configured using a plurality of switching elements that are turned on and off in response to a control signal from the control unit 7, for example. The switching circuit unit 5 can switch the connection relationship between the positive-side wiring Lp and the probes Pr1, pr2, pr3, and Pr4 and the connection relationship between the negative-side wiring Lm and the probes Pr1, pr2, pr3, and Pr4 by the on/off combination of the switching elements.
Thus, for example, when the insulation inspection between the conductor patterns P1 and P2 is performed, the control unit 7 connects the probe Pr1 and the positive-side wiring Lp and connects the probe Pr2 and the negative-side wiring Lm via the switching circuit unit 5. As a result, the output voltage from the power supply unit 2 is applied between the conductor patterns P1 and P2, the current flowing between the conductor patterns P1 and P2 is detected by the current detection unit 3, and the voltage between the conductor patterns P1 and P2 is detected by the voltage detection unit 4. In this case, the conductive pattern P1 corresponds to an example of the first pattern, and the conductive pattern P2 corresponds to an example of the second pattern.
The control unit 7 may perform insulation inspection between one of the plurality of conductor patterns and the remaining wiring patterns. In this case, the control unit 7 can connect the probe Pr1 to the positive electrode side wiring Lp and connect the probes Pr2, pr3, and Pr4 to the negative electrode side wiring Lm by the switching circuit unit 5. In this case, the conductive pattern P1 corresponds to an example of the first pattern, and the conductive patterns P2, P3, and P4 correspond to an example of the second pattern.
Hereinafter, for simplicity of explanation, an insulation inspection between the conductor patterns P1 and P2 is exemplified, and a case where the probe Pr1 is connected to the positive-side wiring Lp and the probe Pr2 is connected to the negative-side wiring Lm by the switching circuit unit 5 is explained (fig. 1).
One end of the switching element SW1 is connected to the power supply unit 2 via the switching element SW2, and is connected to the positive electrode-side wiring Lp via the discharge detection unit 6, for example. The other end of the switching element SW1 is connected to a circuit ground point. The switching element SW1 is turned on and off in accordance with a control signal from the control unit 7. The switching element SW1 is normally turned off.
When the switching element SW1 is turned on, the conductor pattern to be inspected, for example, the conductor pattern P1 and the conductor pattern P2 are turned on via the circuit ground point, the current detection unit 3, the switching circuit unit 5, and the probes Pr1 and Pr 2. As a result, the conductor patterns P1 and P2 immediately become approximately the same potential.
The switching element SW1 corresponds to an example of a forced discharging unit. The forced discharging unit is not limited to the example in which it is configured by the switching element SW1 alone. For example, the forced discharging portion may be configured by a series circuit of a switching element and a resistor.
The discharge detection unit 6 detects the occurrence of sparks and partial discharges between conductor patterns to be inspected, for example, between the conductor patterns P1 and P2. When the occurrence of the spark or the partial discharge is detected, the discharge detector 6 outputs a discharge detection signal to the switching element SW1 and closes the switching element SW1. As described in the definition of the term of JIS C60664-1 (IEC 60664-1), for example, a partial discharge (partial discharge) is an electrical discharge that partially bridges an insulating portion.
When the occurrence of the spark or the partial discharge is detected, the discharge detection unit 6 outputs a discharge detection signal to the power supply unit 2 to stop the switching operation of the power supply unit 2, thereby stopping the voltage output of the power supply unit 2. When the occurrence of the spark or the partial discharge is detected, the discharge detection unit 6 outputs a discharge detection signal to the switching element SW2, thereby disconnecting the power supply unit 2 from the conductor pattern P1 and stopping the voltage output of the power supply unit 2. When the occurrence of the spark or the partial discharge is detected, the discharge detection unit 6 shown in fig. 1 also serves as a power supply control unit that stops the voltage output of the power supply unit 2.
Further, when detecting the occurrence of the spark or the partial discharge, the discharge detection unit 6 outputs a discharge detection signal to the control unit 7, and notifies the control unit 7 of the occurrence of the spark or the partial discharge.
Fig. 2 is a block diagram showing an example of the configuration of the discharge detector 6 shown in fig. 1. The discharge detection unit 6 shown in fig. 2 includes a current detection circuit 61, a voltage detection circuit 62, a high-speed AD converter 63, and an FPGA (Field Programmable Gate Array) 64.
The current detection circuit 61 detects a current flowing through the positive-side wiring Lp, that is, a current I flowing between the conductor patterns P1 and P2, and outputs a voltage signal corresponding to the current value to the high-speed AD converter 63. As the current detection circuit 61, for example, a shunt resistor or a hall element can be used.
The voltage detection circuit 62 detects a voltage between the circuit ground point and the positive-side wiring Lp, that is, a voltage V between the conductor patterns P1 and P2, and outputs a voltage signal corresponding to the voltage value to the high-speed AD converter 63. The voltage detection circuit 62 may be, for example, a voltage dividing resistor, or may be a line directly connecting the positive electrode-side line Lp and the high-speed AD converter 63.
The high-speed AD converter 63 is a so-called analog-digital converter, and converts the voltage signals output from the current detection circuit 61 and the voltage detection circuit 62 into digital values and outputs the digital values to the FPGA 64. The conversion speed of the high-speed AD converter 63 is preferably as high as possible.
The FPGA64 programs a predetermined logical operation circuit. The FPGA64 determines the occurrence of an electric spark or a partial discharge based on the voltage signal output from the current detection circuit 61 or the voltage detection circuit 62. For example, in the case where the current I detected by the current detection circuit 61 momentarily increases, the FPGA64 may determine that an electric spark is generated. Alternatively, for example, when the voltage V detected by the voltage detection circuit 62 drops instantaneously, the FPGA64 determines that an electric spark has occurred.
Alternatively, for example, when the time required until the current I measured by the current detection circuit 61 falls below a predetermined threshold value after the power supply unit 2 starts supplying a current to the conductor pattern to be inspected exceeds a predetermined time, the FPGA64 determines that an electric spark or a partial discharge has occurred.
By determining the occurrence of the spark and the partial discharge by the FPGA64, the occurrence of the spark and the partial discharge can be determined in a shorter time than the case where the occurrence of the spark and the partial discharge is determined by a personal computer using an information System OS (Operating System) such as the control unit 7 described later. The discharge detection unit 6 may use an ASIC (application specific integrated circuit) or a microcomputer using a real-time OS (Operating System) or not using an OS, instead of the FPGA64, to determine the occurrence of the electric spark or the partial discharge.
The discharge detector 6 may not include the current detector 61 and the voltage detector 62, but instead, may determine that an electric spark or a partial discharge has occurred based on the current I and the voltage V detected by the current detector 3 and the voltage detector 4.
The discharge detection unit is not limited to the example of determining the occurrence of the spark and the partial discharge using the FPGA, and various detection methods can be used as long as the occurrence of the spark and the partial discharge can be detected. As a method for detecting the occurrence of the spark, the discharge detecting section may detect the spark by using a spark detection method described in, for example, japanese patent laid-open No. 3546046, japanese patent laid-open No. 3953087, japanese patent laid-open No. 4369949, japanese patent laid-open No. 4918339, japanese patent laid-open No. 5866943, japanese patent laid-open No. 2015-10880, and japanese patent laid-open No. 2015-45542.
As described in, for example, japanese laid-open patent publication No. 2015-45542, the discharge detector may detect the occurrence of the partial discharge based on a temporal change in the current I measured by the current detection circuit 61. As described in, for example, japanese laid-open patent publication No. 2010-32457, the discharge detection unit may detect the occurrence of the partial discharge by determining that the partial discharge has occurred when the electromagnetic wave generated when the partial discharge has occurred is detected. Alternatively, the discharge detector may detect the partial discharge by a standard method such as JIS C60664-1 (IEC 60664-1).
The discharge detection unit is not limited to an example of detecting occurrence of a spark and a partial discharge, and may be configured to detect only one of a spark and a partial discharge.
The control Unit 7 is configured to include, for example, a CPU (Central Processing Unit) that performs a predetermined logical operation, a RAM (Random Access Memory) that temporarily stores data, a nonvolatile storage Unit that stores a predetermined control program, and peripheral circuits thereof. The control unit 7 is configured to use a personal computer to which an information System OS (Operating System) is applied, for example. The control unit 7 functions as the inspection control unit 71 and the determination unit 72 by executing a control program.
The inspection control unit 71 sequentially selects a first pattern and a second pattern to be inspected from among a plurality of conductor patterns formed on the substrate P, and switches the circuit unit 5 to conduct the positive-side wiring Lp and the first pattern and the negative-side wiring Lm and the second pattern, thereby outputting the voltage V between the first pattern and the second pattern via the power supply unit 2.
The determination unit 72 determines the insulation between the first pattern and the second pattern based on the current I detected by the current detection unit 3 and the voltage V detected by the voltage detection unit 4. Specifically, the determination unit 72 calculates the insulation resistance R between the first pattern and the second pattern based on the following formula (1) from the current I and the voltage V.
Insulation resistance R = V/I (1)
The determination unit 72 compares a preset reference resistance Rref and an insulation resistance R, determines that the insulation state is good if the insulation resistance R is equal to or greater than the reference resistance Rref, and determines that the insulation is poor if the insulation resistance R is smaller than the reference resistance Rref.
The insulation inspection apparatus 1 may not include the voltage detection unit 4, and the determination unit 72 may determine the insulation state based on the voltage V set in advance as the output voltage of the power supply unit 2.
Next, the operation of the insulation inspection apparatus 1 configured as described above will be described. Fig. 3 is a flowchart showing an example of the operation of the insulation inspection apparatus 1 shown in fig. 1. First, in the initial state, the switching element SW1 is turned off, the switching element SW2 is turned on, and the power supply unit 2 performs a switching operation to output the voltage V (step S1).
Next, the inspection control unit 71 selects a first pattern and a second pattern to be inspected from among the conductor patterns P1, P2, P3, and P4 (step S2). Next, the inspection control unit 71 connects the first pattern to the positive-side wiring Lp and connects the second pattern to the negative-side wiring Lm via the switching circuit unit 5. As a result, the voltage V from the power supply section 2 is output between the first pattern and the second pattern (step S3: power supply output step).
When a voltage V is applied between the first pattern and the second pattern, parasitic capacitances of the first pattern and the second pattern are charged, and the voltage between the first pattern and the second pattern rises. Therefore, the inspection control unit 71 monitors whether or not the discharge detection signal is not detected by the discharge detection unit 6, for example, during a period from when the voltage is applied until a preset standby time elapses or until the detection voltage of the voltage detection unit 4 is stabilized (step S4).
When neither of the spark and the partial discharge is detected by the discharge detection unit 6 (no in step S4), the determination unit 72 calculates the insulation resistance R by the above equation (1) based on the current I detected by the current detection unit 3 and the voltage V detected by the voltage detection unit 4 (step S5).
Subsequently, the determination unit 72 compares the reference resistance Rref and the insulation resistance R (step S6: determination step), and if the insulation resistance R is smaller than the reference resistance Rref (no in step S6), determines that the substrate P is defective in insulation (step S9), and ends the process.
On the other hand, when the insulation resistance R is equal to or higher than the reference resistance Rref (yes in step S6), the determination unit 72 determines that the insulation state between the first pattern and the second pattern is good, and determines whether or not the insulation inspection is completed for all the conductor patterns to be inspected (step S7). When the insulation inspection is completed for all the conductor patterns (yes in step S7), the determination unit 72 determines that the substrate P is a non-defective product (step S10) and ends the process.
On the other hand, if there are still conductor patterns for which insulation inspection has not been completed in step S7 (no in step S7), the inspection control unit 71 selects a new first pattern from among the conductor patterns for which insulation inspection has not been completed, selects a second pattern from among the conductor patterns other than the first pattern (step S8), and performs the processing after step S3 again.
On the other hand, when the discharge detection unit 6 detects the occurrence of a spark or a partial discharge in step S4 (yes in step S4), the discharge detection unit 6 outputs a discharge detection signal indicating the occurrence of a spark or a partial discharge to the switching elements SW1 and SW2, the power supply unit 2, and the control unit 7.
As a result, the switching element SW1 is turned on (forced discharge step), the switching element SW2 is turned off, the power supply unit 2 stops the switching and stops or reduces the output of the voltage V (power supply control step) (step S11), the occurrence of spark or partial discharge is notified to the control unit 7, the determination unit 72 determines that the substrate P is an insulation failure (step S9), and the process is terminated.
Fig. 4 is an explanatory diagram for explaining circuit operations in the forced discharge step and the power supply control step in step S11. When the switching element SW1 is turned on, the probe Pr1 connected to the conductor pattern P1 (first pattern) and the probe Pr2 connected to the conductor pattern P2 (second pattern) are turned on by the conductive path L1 passing through the switching element SW1, and the conductor pattern P1 and the conductor pattern P2 are rapidly brought to the same potential (forced discharge step). This prevents the occurrence of sparks or partial discharges from continuing to occur for a long time or the occurrence of sparks or partial discharges from repeating, and thus reduces the possibility of the substrate being damaged and expanded by discharges such as sparks or partial discharges.
When the switching element SW2 is turned off, the power supply unit 2 is turned off from the conductor pattern P1, and thus the output voltage from the power supply unit 2 to the conductor patterns P1 and P2 is stopped (power supply control step). This prevents the occurrence of sparks or partial discharges from continuing to occur for a long time or the occurrence of sparks or partial discharges from repeating, and thus reduces the possibility of the substrate being damaged and expanded by discharges such as sparks or partial discharges.
Even when the switching operation of the power supply unit 2 is stopped, the voltage output from the power supply unit 2 to the conductor patterns P1 and P2 is stopped or decreased. As described in, for example, japanese patent application laid-open No. 2001-178137, a switching power supply circuit used in the power supply unit 2 includes: a conversion circuit for converting an ac voltage into a dc voltage by a rectifier circuit for rectifying a commercial ac power supply voltage and a capacitor for smoothing the rectified voltage; and a boost chopper circuit that chops the converted dc voltage by switching operation of the switching element, boosts the dc voltage by the choke coil, and smoothly outputs the dc voltage through the power supply smoothing capacitor.
Therefore, even when the switching operation of the power supply unit 2 is stopped, the voltage is maintained by the charge charged in the power supply smoothing capacitor, and therefore it takes time to decrease the output voltage of the power supply unit 2. In addition, even in a power supply circuit of a different type from the switching power supply circuit, since a smoothing capacitor is usually provided in an output stage of the power supply circuit, it takes time to reduce an output voltage even when an operation of the power supply circuit is stopped.
In the switching power supply circuit including the converter circuit and the boost chopper circuit as described above, the switching operation is stopped to stop the boosting by the boost chopper circuit and to reduce the output voltage. However, even if the switching operation is stopped, the dc conversion by the converter circuit may continue, and the output of the dc-converted voltage may continue.
Even in such a case, when the occurrence of sparks or partial discharges is detected in step S4, the switching element SW2 is turned off to cut off the power supply unit 2 and the positive-side wiring Lp, and therefore, the supply of the power supply voltage by the power supply unit 2 is immediately stopped, and the possibility of occurrence of sparks or partial discharges continuing for a long time or occurrence of sparks or partial discharges repeatedly can be reduced, thereby reducing the possibility of expansion of damage to the substrate due to discharges such as sparks or partial discharges.
Further, since the switching element SW2 opens and closes the conductive path from the power supply unit 2 to the first pattern or the second pattern of the inspection target at a position different from the conductive path L1 that is turned on by the switching element SW1, even if the switching element SW2 is turned off (on), the discharging of the charges charged in the first pattern and the second pattern by the switching element SW1 is not hindered.
In step S4, it is not always necessary to detect both spark discharge and partial discharge. The discharge detection unit 6 may execute only spark detection, and may shift to step S11 when spark is detected (yes in step S4) and shift to step S5 when spark is not detected (no in step S4). Alternatively, the discharge detection unit 6 may execute only partial discharge detection, and may shift to step S11 when partial discharge is detected (yes in step S4), or to step S5 when partial discharge is not detected (no in step S4).
The power supply unit 2 is not necessarily a switching power supply circuit, and the method of stopping or reducing the voltage output of the power supply unit 2 is not limited to stopping the switching operation. For example, the voltage output of the power supply unit 2 may be stopped or decreased by cutting off the supply of the primary-side power supply voltage to the power supply unit 2.
In addition, the switching element SW2 is not necessarily provided. When the switching element SW2 is not provided, the electric charge stored in the smoothing capacitor in the output stage of the power supply unit 2 is discharged through the switching element SW1, and the voltage is rapidly decreased. As a result, it is possible to reduce the possibility that the spark or the partial discharge continues to occur for a long time or the spark or the partial discharge repeats, and the possibility that the damage of the substrate is spread due to the discharge such as the spark or the partial discharge.
The switching element SW1 may not be provided. Even if the switching element SW1 is not provided, when it is checked in step S4 that a spark or a partial discharge is generated, the switching element SW2 is turned off to stop the supply of the power supply voltage, or the output voltage of the power supply unit 2 is stopped or decreased, so that the new power supply from the power supply unit 2 is reduced, and as a result, the possibility of occurrence of a spark or a partial discharge continuing for a long time or occurrence of a spark or a partial discharge repeating, and the possibility of expansion of damage to the substrate due to a discharge such as a spark or a partial discharge can be reduced.

Claims (6)

1. An insulation inspection apparatus, comprising:
a plurality of probes for contacting the plurality of conductor patterns in a substrate to be inspected on which the plurality of conductor patterns are formed;
a power supply unit that outputs a voltage between a first pattern and a second pattern via the plurality of probes, the first pattern being any one of the plurality of conductor patterns, the second pattern being any one of the plurality of conductor patterns other than the first pattern;
a discharge detection unit that detects at least one of spark discharge and partial discharge generated between the first pattern and the second pattern;
a power supply control unit that stops or reduces a voltage output of the power supply unit when the discharge detection unit detects that at least one of the spark discharge and the partial discharge has occurred; and
and a forced discharge unit that conducts the first pattern and the second pattern when the discharge detection unit detects that at least one of the spark discharge and the partial discharge has occurred.
2. The insulation inspection apparatus according to claim 1, further comprising a switch that opens and closes a conductive path from the power supply unit to at least one of the first pattern and the second pattern in order to output the voltage, at a position different from a conductive path that is conducted by the forced discharge unit,
the power supply control unit turns off the switch to stop the voltage output from the power supply unit when the discharge detection unit detects that at least one of the spark discharge and the partial discharge is generated.
3. The insulation inspection apparatus according to claim 1 or 2,
the discharge detection unit is configured using a field programmable gate array, an application specific integrated circuit, or a microcomputer using a real-time operating system or an unused operating system.
4. The insulation inspection apparatus according to claim 1 or 2, further comprising a determination unit that determines insulation between the first pattern and the second pattern based on a voltage and a current between the first pattern and the second pattern.
5. The insulation inspection apparatus according to claim 3, further comprising a determination unit that determines insulation between the first pattern and the second pattern based on a voltage and a current between the first pattern and the second pattern.
6. An insulation inspection method, comprising:
a power supply output step of outputting a voltage between a first pattern and a second pattern, the first pattern being any one of a plurality of conductor patterns in a substrate to be inspected on which the plurality of conductor patterns are formed, and the second pattern being any one of the plurality of conductor patterns other than the first pattern;
a discharge detection step of detecting at least one of spark discharge and partial discharge generated between the first pattern and the second pattern;
a power supply control step of stopping or reducing the voltage output in the power supply output step when the occurrence of at least one of the spark discharge and the partial discharge is detected;
and a forced discharge step of conducting the first pattern and the second pattern when the discharge detection step detects that at least one of the spark discharge and the partial discharge has occurred.
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