KR20180122815A - Method of manufacturing semiconductor package and appraratus for the same - Google Patents

Abstract

The present disclosure relates to a semiconductor package manufacturing method including the steps of: preparing a package substrate on which a plurality of unit packages are arranged; processing a portion between the unit packages of the package substrate with a laser; and sawing the package substrate along the processed portion, and a semiconductor package manufacturing apparatus used therefor. Accordingly, the present invention can prevent resin burr.

Description

TECHNICAL FIELD [0001] The present invention relates to a method of manufacturing a semiconductor package,

The present disclosure relates to a semiconductor package manufacturing method, for example, a method of manufacturing a fan-out semiconductor package that can extend a connection terminal to an area outside a region where a semiconductor chip is disposed, and a semiconductor package manufacturing apparatus used therefor.

One of the main trends of technology development related to semiconductor chips in recent years is to reduce the size of components. Accordingly, in the field of packages, it is required to implement a large number of pins with a small size in response to a surge in demand of small semiconductor chips and the like .

One of the proposed semiconductor package technologies to meet this requirement is a Wafer Level Package (WLP). There are fan-in wafer level packages and fan-out wafer level packages in the wafer level package, and fan-out semiconductor packages are being actively developed that are useful for implementing multiple pins with a small size.

On the other hand, a wafer level package is generally manufactured by cutting a plurality of unit packages through a sawing process after manufacturing a plurality of unit packages on a wafer or a carrier substrate. At this time, a resin burr may be generated while the soft material at the outermost portion of the package is cut in the soaking process.

One of the objects of the present disclosure is to provide a new semiconductor package manufacturing method and an apparatus therefor which can solve the problem of resin burr occurring when sacking a package substrate including a plurality of package units.

One of the solutions proposed through the present disclosure is to process the outermost soft material using a laser and sack the package substrate along the processing line before sacking the package substrate including the plurality of package units.

For example, a method of manufacturing a semiconductor package according to an example proposed through the present disclosure may include preparing a package substrate on which a plurality of unit packages are arranged, laser processing between the unit packages on the package substrate, And sowing the substrate along the processed portion.

In addition, a semiconductor package manufacturing apparatus according to an example proposed by the present disclosure includes a laser processing unit for laser processing between unit packages of a package substrate on which a plurality of unit packages are arranged, And a scooping portion that sags along the laser-processed portion.

It is possible to provide a new semiconductor package manufacturing method and an apparatus therefor which can solve the problem that resin burrs are generated when sacking a package substrate including a plurality of package units as one of the effects of the present disclosure.

1 is a block diagram schematically showing an example of an electronic equipment system.
2 is a perspective view schematically showing an example of an electronic apparatus.
3 is a cross-sectional view schematically showing the front and rear of the package of the fan-in semiconductor package.
4 is a cross-sectional view schematically showing a packaging process of a fan-in semiconductor package.
5 is a cross-sectional view schematically showing a case where a fan-in semiconductor package is mounted on an interposer substrate and finally mounted on a main board of an electronic apparatus.
6 is a cross-sectional view schematically showing a case where a fan-in semiconductor package is embedded in an interposer substrate and finally mounted on a main board of an electronic apparatus.
7 is a cross-sectional view showing a schematic view of a fan-out semiconductor package.
8 is a cross-sectional view schematically showing a case where the fan-out semiconductor package is mounted on a main board of an electronic apparatus.
9 is a plan view schematically showing an example of a package substrate on which a plurality of unit packages are arranged.
FIG. 10 is a schematic sectional view taken along the line I-I 'of the package substrate of FIG. 9; FIG.
11 is a plan view schematically showing a process of laser processing between unit packages of the package substrate of Fig.
12 is a schematic sectional elevation II-II 'sectional view of the package substrate of FIG.
Fig. 13 is a plan view schematically showing the sawing along the laser-processed portion of the package substrate of Fig. 11; Fig.
FIG. 14 is a schematic sectional view III-III 'of the package substrate of FIG. 13; FIG.

Hereinafter, the present disclosure will be described with reference to the accompanying drawings. The shape and size of elements in the drawings may be exaggerated or reduced for clarity.

Electronics

1 is a block diagram schematically showing an example of an electronic equipment system.

Referring to the drawings, an electronic device 1000 accommodates a motherboard 1010. The motherboard 1010 is physically and / or electrically connected to the chip-related components 1020, network-related components 1030, and other components 1040. They are also combined with other components to be described later to form various signal lines 1090.

Chip related components 1020 include memory chips such as volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, etc.; An application processor chip such as a central processor (e.g., a CPU), a graphics processor (e.g., a GPU), a digital signal processor, a cryptographic processor, a microprocessor, Analog-to-digital converters, and logic chips such as application-specific integrated circuits (ICs), and the like, but it is needless to say that other types of chip-related components may be included. It goes without saying that these components 1020 can be combined with each other.

IEEE 802.11 family, etc.), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA +, HSDPA +, HSUPA +, EDGE, GSM , And any other wireless and wired protocols designated as GPS, GPRS, CDMA, TDMA, DECT, Bluetooth, 3G, 4G, 5G and later, as well as any other wireless or wired Any of the standards or protocols may be included. It goes without saying that the network-related component 1030 may be combined with the chip-related component 1020, as well.

Other components 1040 include high-frequency inductors, ferrite inductors, power inductors, ferrite beads, low temperature co-firing ceramics (LTCC), EMI (Electro Magnetic Interference) filters, and MLCC (Multi-Layer Ceramic Condenser) But is not limited to, passive components used for various other purposes, and the like. It is also understood that other components 1040 may be combined with each other with the chip-related component 1020 and / or the network-related component 1030.

Depending on the type of electronic device 1000, the electronic device 1000 may include other components that may or may not be physically and / or electrically connected to the motherboard 1010. Other components include, for example, a camera 1050, an antenna 1060, a display 1070, a battery 1080, an audio codec (not shown), a video codec (not shown), a power amplifier (not shown), a compass (Not shown), a CD (compact disk) (not shown), and a DVD (not shown), an accelerometer (not shown), a gyroscope a digital versatile disk (not shown), and the like. However, the present invention is not limited thereto, and other components used for various purposes may be included depending on the type of the electronic device 1000.

The electronic device 1000 may be a smart phone, a personal digital assistant, a digital video camera, a digital still camera, a network system, a computer a computer, a monitor, a tablet, a laptop, a netbook, a television, a video game, a smart watch, an automotive, and the like. However, it is needless to say that the present invention is not limited thereto and may be any other electronic device that processes data.

2 is a perspective view schematically showing an example of an electronic apparatus.

Referring to the drawings, a semiconductor package is applied to various electronic apparatuses as described above for various purposes. For example, a main board 1110 is accommodated in the body 1101 of the smartphone 1100, and various components 1121, 122, and 123 are physically and / or electrically connected to the main board 1110 have. Other parts, such as the camera 1130, which are physically and / or electrically connected to the main board 1110 or not, are contained within the body 1101. Some of the components 1121, 122, and 123 may be chip-related components, and the semiconductor package 100-1 may be, for example, an application processor, but is not limited thereto. It is needless to say that the electronic device is not necessarily limited to the smartphone 1100, but may be another electronic device as described above.

Semiconductor package

In general, a semiconductor chip has many microelectronic circuits integrated therein, but itself can not serve as a finished product of a semiconductor, and there is a possibility of being damaged by external physical or chemical impact. Therefore, the semiconductor chip itself is not used as it is, and the semiconductor chip is packaged and used as electronic devices in a package state.

The reason for the necessity of semiconductor packaging is that there is a difference in circuit width between the semiconductor chip and the main board of the electronic device from the viewpoint of electrical connection. Specifically, in the case of a semiconductor chip, the size of the connection pad and the spacing between the connection pads are very small. On the other hand, in the case of the main board used in electronic equipment, the size of the component mounting pad and the interval between the component mounting pads are much larger than the scale of the semiconductor chip . Therefore, there is a need for a packaging technique which makes it difficult to directly mount a semiconductor chip on such a main board and can buffer the difference in circuit width between the semiconductor chips.

The semiconductor package manufactured by such a packaging technique can be classified into a fan-in semiconductor package and a fan-out semiconductor package depending on the structure and use.

Hereinafter, the fan-in semiconductor package and the fan-out semiconductor package will be described in more detail with reference to the drawings.

(Fan-in semiconductor package)

3 is a cross-sectional view schematically showing the front and rear of the package of the fan-in semiconductor package.

4 is a cross-sectional view schematically showing a packaging process of a fan-in semiconductor package.

The semiconductor chip 2220 includes a body 2221 including silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like; A connection pad 2222 including a conductive material and a passivation film 2223 such as an oxide film or a nitride film formed on one surface of the body 2221 and covering at least a part of the connection pad 2222. [ May be an integrated circuit (IC) in a bare state. At this time, since the connection pad 2222 is very small, the integrated circuit (IC) is difficult to be mounted on a medium-level printed circuit board (PCB) as well as a main board of an electronic apparatus.

A connection member 2240 is formed on the semiconductor chip 2220 in accordance with the size of the semiconductor chip 2220 in order to rewire the connection pad 2222. [ The connecting member 2240 is formed by forming an insulating layer 2241 with an insulating material such as a photosensitive insulating resin (PID) on the semiconductor chip 2220 and forming a via hole 2243h for opening the connecting pad 2222, The wiring pattern 2242 and the via 2243 can be formed. Thereafter, a passivation layer 2250 for protecting the connecting member 2240 is formed, and an under-bump metal layer 2260 or the like is formed after the opening 2251 is formed. That is, through a series of processes, a fan-in semiconductor package 2200 including, for example, a semiconductor chip 2220, a connecting member 2240, a passivation layer 2250, and an under bump metal layer 2260, do.

As described above, the fan-in semiconductor package is a package in which all the connection pads of the semiconductor chip, for example, I / O (Input / Output) terminals are disposed inside the element, and the fan-in semiconductor package has good electrical characteristics and can be produced at low cost have. Accordingly, many devices incorporated in a smart phone are manufactured in the form of a fan-in semiconductor package. Specifically, development is being made in order to implement a small-sized and fast signal transmission.

However, in the fan-in semiconductor package, all of the I / O terminals must be disposed inside the semiconductor chip, so that there are many space limitations. Therefore, such a structure is difficult to apply to a semiconductor chip having a large number of I / O terminals or a semiconductor chip having a small size. In addition, due to this vulnerability, the fan-in semiconductor package can not be directly mounted on the main board of the electronic device. This is because even if the size and spacing of the I / O terminals of the semiconductor chip are enlarged by the rewiring process, they do not have a size and a gap enough to be directly mounted on the electronic device main board.

5 is a cross-sectional view schematically showing a case where a fan-in semiconductor package is mounted on an interposer substrate and finally mounted on a main board of an electronic apparatus.

6 is a cross-sectional view schematically showing a case where a fan-in semiconductor package is embedded in an interposer substrate and finally mounted on a main board of an electronic apparatus.

Referring to the drawing, the fan-in semiconductor package 2200 is again rewired with the connection pads 2222 of the semiconductor chip 2220, that is, the I / O terminals through the interposer substrate 2301, May be mounted on the main board 2500 of the electronic device with the fan-in semiconductor package 2200 mounted on the interposer substrate 2301. At this time, the solder ball 2270 and the like can be fixed with the underfill resin 2280 and the outside can be covered with the molding material 2290 or the like. Alternatively, the fan-in semiconductor package 2200 may be embedded in a separate interposer substrate 2302, and the interposer substrate 2302 may be embedded in the connection pads 2220 of the semiconductor chip 2220, The I / O terminals 2222, i.e., the I / O terminals, may be re-routed again and finally mounted on the main board 2500 of the electronic device.

Since the fan-in semiconductor package is difficult to be directly mounted on the main board of the electronic apparatus, it is mounted on a separate interposer substrate and then re-packaged to be mounted on the electronic device main board, And is mounted on an electronic device main board while being embedded in a substrate.

(Fan-out semiconductor package)

7 is a cross-sectional view showing a schematic view of a fan-out semiconductor package.

In the fan-out semiconductor package 2100, for example, the outer sides of the semiconductor chips 2121, 122, and 123 are protected by a sealing material 2130, and the semiconductor chips 2121, The connection pads 2122 are rewired to the outside of the semiconductor chips 2121, 122, and 123 by the connecting member 2140. At this time, a passivation layer 2150 may be further formed on the connecting member 2140, and an under bump metal layer 2160 may be further formed on the opening of the passivation layer 2150. A solder ball 2170 may be further formed on the under bump metal layer 2160. The semiconductor chips 2121, 122 and 123 may be an integrated circuit (IC) including a body 2121, a connection pad 2122, a passivation film (not shown), and the like. The connecting member 2140 includes an insulating layer 2141, a re-wiring layer 2142 formed on the insulating layer 2241, and a via 2143 for electrically connecting the connecting pad 2122 and the re-wiring layer 2142 .

As described above, the fan-out semiconductor package is formed by rewiring the I / O terminals to the outside of the semiconductor chip through the connecting member formed on the semiconductor chip. As described above, in the fan-in semiconductor package, all of the I / O terminals of the semiconductor chip must be disposed inside the semiconductor chip. If the element size is reduced, the ball size and pitch must be reduced. On the other hand, in the fan-out semiconductor package, the I / O terminals are rewired to the outside of the semiconductor chip through the connecting member formed on the semiconductor chip so that the size of the semiconductor chip is reduced. And can be mounted on a main board of an electronic device without a separate interposer substrate as will be described later.

8 is a cross-sectional view schematically showing a case where the fan-out semiconductor package is mounted on a main board of an electronic apparatus.

Referring to the drawings, the fan-out semiconductor package 2100 may be mounted on a main board 2500 of an electronic device through a solder ball 2170 or the like. That is, as described above, the fan-out semiconductor package 2100 is provided with the connection pads 2122 on the semiconductor chips 2121, 122, and 123 to the fan-out area out of the size of the semiconductor chips 2121, 122, The standardized ball layout can be used as it is, and as a result, it can be mounted on the main board 2500 of the electronic apparatus without a separate interposer substrate or the like.

Since the fan-out semiconductor package can be mounted on the main board of the electronic device without using a separate interposer substrate, the thickness of the fan-out semiconductor package can be reduced compared to a fan-in semiconductor package using the interposer substrate. Do. In addition, it has excellent thermal characteristics and electrical characteristics and is particularly suitable for mobile products. In addition, it can be implemented more compactly than a general POP (Package on Package) type using a printed circuit board (PCB), and it is possible to solve a problem caused by a bending phenomenon.

On the other hand, the fan-out semiconductor package means a package technology for mounting the semiconductor chip on a main board or the like of an electronic device and protecting the semiconductor chip from an external impact, and the scale, (PCB) such as an interposer substrate having a built-in fan-in semiconductor package.

Hereinafter, a method of manufacturing a new semiconductor package and a device used therefor, which can solve the problem of resin burrs occurring when sling a package substrate including a plurality of package units, will be described with reference to the drawings.

9 is a plan view schematically showing an example of a package substrate on which a plurality of unit packages are arranged.

FIG. 10 is a schematic sectional view taken along the line I-I 'of the package substrate of FIG. 9; FIG.

The package substrate 100 includes a support member 110 having a plurality of through holes 110H and including a rewiring layer 112 electrically connected to the connection pads 120P of the plurality of semiconductor chips 120, A plurality of semiconductor chips 120 disposed on each of the plurality of through holes 110H and having an active surface on which the connection pad 120P is disposed and an inactive surface disposed on the opposite side of the active surface, A sealing member 130 for sealing at least a part of the semiconductor chip 120, a support member 110 and connection pads 120P of a plurality of semiconductor chips 120, which are disposed on the active surfaces of the plurality of semiconductor chips 120, A passivation layer 150 disposed on the connection member 140 and a passivation layer 150 formed on the opening of the passivation layer 150 to electrically connect the connection member 140 to the connection member 140. [ An under bump metal layer 160 electrically connected to the wiring layer 142 and an under bump metal layer 160 disposed on the passivation layer 150, And a plurality of connection terminals 170 electrically connected to the redistribution layer 142 of the connection member 140 through the plurality of connection terminals.

The support member 110 can improve the degree of freedom in designing the bar connecting member 140 including the redistribution layer 112. If necessary, the rigidity of the package substrate 100 can be further improved in accordance with the specific material of the insulating layer 111 constituting it. Also, the support member 110 may play a role of ensuring uniformity of the thickness of the sealing material 130, and the like. Also, each unit package 100-1 can be utilized by the support member 110 in the package-on-package apparatus. The support member 110 has a plurality of through holes 110H and the semiconductor chip 120 is disposed in the plurality of through holes 110H so as to be spaced apart from the support member 110 by a predetermined distance. Therefore, the semiconductor chip 120 can be stably disposed. The periphery of the side surface of the semiconductor chip 120 may be surrounded by the supporting member 110, but this is only an example. In some cases, the supporting member 110 may be omitted.

The support member 110 is electrically connected to the rewiring layer 112 formed in the different layers through the insulation layer 111, the rewiring layer 112 disposed in or on the insulation layer 111, and the insulation layer 111, As shown in FIG. A part of the redistribution layer 112 can be embedded in one side of the insulating layer 111 and the other part can be embedded in the center side of the insulating layer 111 while the other part is in contact with the connecting member 140, Layer 111 on the other side. The rewiring layer 112 of the supporting member 110 may be thicker than the rewiring layer 142 of the connecting member 140. [ That is, the rewiring layer 112 of the supporting member 110, which can have a thickness of about the semiconductor chip 120, can be formed by a process of a larger scale, and the rewiring layer 142 can be formed by a smaller scale process.

The material of the insulating layer 111 is not particularly limited. For example, an insulating material may be used. As the insulating material, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as polyimide, or a mixture of these resins with an inorganic filler, or a glass fiber Such as a prepreg, an Ajinomoto Build-up Film (ABF), a bismaleimide triazine (BT), or the like, may be used. If desired, a photosensitive insulator (PID) resin may be used.

The re-wiring layer 112 can rewire the connection pad 120P of the semiconductor chip 120. [ The rewiring layer 112 may be formed of copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium Or an alloy thereof may be used. The rewiring layer 112 may perform various functions according to the design design of the layer. For example, it may include a ground (GND) pattern, a power (PoWeR: PWR) pattern, a signal (S: S) pattern, Here, the signal S pattern includes various signals except for a ground (GND) pattern, a power (PWR) pattern, and the like, for example, a data signal. It may also include via pads, wire pads, connection terminal pads, and the like.

The vias 113 electrically connect the redistribution layers 112 formed in the different layers, thereby forming an electrical path in the support member 110. The via 113 may also be formed of a conductive material. The via 113 may be completely filled with a conductive material, or a conductive material may be formed along the wall surface of the via hole. In addition, not only tapered but also all known shapes such as a cylindrical shape can be applied. However, if the connecting member 140 has a taper shape opposite to the via 143 as shown in the drawing, it may be easier to form the connecting member 140 in the process.

The semiconductor chip 120 may be an integrated circuit (IC) in which hundreds to millions of devices are integrated into one chip. The integrated circuit may be a memory chip, an application processor chip, a logic chip, and the like, but is not limited thereto. The semiconductor chip 120 may be formed on the basis of an active wafer. In this case, silicon (Si), germanium (Ge), gallium arsenide (GaAs), or the like may be used as a base material. The body may have various circuits formed. Each semiconductor chip 120 has a connection pad 120P. The surface on which the connection pad 120P is disposed is referred to as an active surface, and the surface opposite thereto is referred to as an inactive surface. The connection pad 120P may include a conductive material such as aluminum (Al), but is not limited thereto. A passivation film (not shown) may be formed on the body to expose the connection pad 120P. An insulating film (not shown) may be further disposed at a necessary position. A re-wiring layer (not shown) for rewiring the connection pad 120P may be formed on the active surface of the semiconductor chip 120, if necessary.

The sealing member 130 can protect the supporting member 110, the semiconductor chip 120, and the like. The sealing shape is not particularly limited and may be any shape that covers at least a part of the supporting member 110, the semiconductor chip 120, and the like. For example, the sealing material 130 may cover the inactive surfaces of the supporting member 110 and the semiconductor chip 120, and may fill a space between the wall surface of the through hole 110H and the side surface of the semiconductor chip 120 have. By filling the through hole 110H with the sealing material 130, it is possible to reduce buckling while performing an adhesive function according to a specific material. The sealing material 130 may be composed of a plurality of sealing materials as required.

The material of the sealing material 130 is not particularly limited. For example, an insulating material may be used. As the insulating material, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as polyimide, or a mixture of these resins with an inorganic filler, or a glass fiber Such as a prepreg, an Ajinomoto Build-up Film (ABF), a bismaleimide triazine (BT), or the like, may be used. Preferably, an ABF (Ajinomoto Build-up Film) containing an insulating resin and an inorganic filler can be used.

The connection member 140 may rewire the connection pad 120P of the semiconductor chip 120. [ The connection pads 120P of dozens of hundreds of semiconductor chips 120 having various functions can be rewired through the connection member 140. The connection pads 120P can be physically and / . The connecting member 140 includes an insulating layer 141 disposed on the active surface of the supporting member 110 and the semiconductor chip 120, a re-wiring layer 142 disposed on or in the insulating layer 141, And a via 143 electrically connecting the connection pad 120P and the re-wiring layer 142 formed in the different layers. The number of layers of the insulating layer 141, the re-distribution layer 142, and the vias 143 of the connection member 140 is not particularly limited and may vary depending on the design.

As the material of the insulating layer 141, an insulating material may be used. In addition to the insulating material as described above, a photosensitive insulating material such as a PID (Photo Imagable Dielectric) resin may be used as the insulating material. That is, the insulating layer 141 may be a photosensitive insulating layer. When the insulating layer 141 has photosensitivity, the insulating layer 141 can be made thinner and the pitch of the via 143 can be more easily achieved. Since the insulating layer 141 has a strong modulus of resin itself, the insulating layer 141 has a generally rigid nature, so that even if the sowing process is carried out, the problem of resin bur is hardly generated.

The re-distribution layer 142 may serve to rewire the connection pad 120P. The re-distribution layer 142 may be formed of copper (Cu), aluminum (Al), silver (Ag), tin (Ni), lead (Pb), titanium (Ti), or an alloy thereof may be used. The re-distribution layer 142 may perform various functions according to the design of the layer. For example, it may include a ground (GND) pattern, a power (PoWeR: PWR) pattern, a signal (S: S) pattern, Here, the signal S pattern includes various signals except for a ground (GND) pattern, a power (PWR) pattern, and the like, for example, a data signal. It may also include via pads, connection terminal pads, and the like.

The vias 143 electrically connect the rewiring layer 142, the connection pads 120P, and the like, which are formed on different layers, thereby forming an electrical path in the connection member 140. The via 143 may be formed of copper (Cu), aluminum (Al), silver (Ag), tin (Sn), gold (Au), nickel (Ni), lead (Pb), titanium A conductive material such as an alloy thereof may be used. The vias 143 can be fully filled with a conductive material, or a conductive material can be formed along the walls of the vias. In addition, any shape known in the art, such as a tapered shape, a cylindrical shape, etc., can be applied. However, it is advantageous in terms of the process that the support member 140 has a tapered shape in the direction opposite to the rewiring layer 142.

The passivation layer 150 may protect the connecting member 140 from external physical chemical damage or the like. The passivation layer 150 may have openings that expose at least a portion of the rewiring layer 142 of the connecting member 140. Such openings may be formed in the passivation layer 150 in several tens to several thousand. The material of the passivation layer 150 is not particularly limited. For example, an insulating material may be used. As the insulating material, a thermosetting resin such as an epoxy resin, a thermoplastic resin such as polyimide, or a mixture of these resins with an inorganic filler, or a glass fiber Such as a prepreg, an Ajinomoto Build-up Film (ABF), a bismaleimide triazine (BT), or the like, may be used. Alternatively, a solder resist may be used. Preferably, ABF (Ajinomoto Build-up Film) including an insulating resin and an inorganic filler may be used as the sealing material 130.

The under bump metal layer 160 improves the connection reliability of the connection terminal 170, and as a result, improves the board level reliability of the unit package 100-1. The under bump metal layer 160 is connected to the re-wiring layer 142 of the connection member 140 exposed through the opening of the passivation layer 150. The under bump metal layer 160 may be formed at the opening of the passivation layer 150 by a known metallization method using a known conductive material, that is, metal. However, the under bump metal layer 160 is not limited thereto. In some cases, the under bump metal layer 160 may be omitted.

The connection terminal 170 physically and / or electrically connects each unit package 100-1 to the outside. For example, each unit package 100-1 may be mounted on the main board of the electronic apparatus through the connection terminal 170 after soldering. Alternatively, each unit package 100-1 may be mounted on another semiconductor package through a connection terminal 170, in which case a package-on-a-package device may be manufactured. The connection terminal 170 may be formed of a conductive material, for example, a solder or the like, but this is merely an example and the material is not particularly limited thereto. The connection terminal 170 may be a land, a ball, a pin, or the like. The connection terminal 170 may be formed as a multilayer or a single layer. In the case of a multi-layered structure, it may include a copper pillar and a solder. In the case of a single layer, tin-silver may include solder or copper. However, the present invention is not limited thereto. .

The number, spacing, arrangement type, etc. of the connection terminals 170 are not particularly limited and can be sufficiently modified according to the design specifications of the ordinary artisan. For example, the number of the connection terminals 170 may be several tens to several thousands depending on the number of the connection pads 120P, and may have more or less numbers. When the connection terminal 170 is a solder ball, the connection terminal 170 may cover the side surface formed on the one side of the passivation layer 150 of the under-bump metal layer 160, and the connection reliability may be further improved. At least one of the connection terminals 170 is disposed in the fan-out area. The fan-out area means an area outside the area where the semiconductor chip 120 is disposed. The fan-out package is more reliable than the fan-in package, allows multiple I / O terminals, and facilitates 3D interconnection. Compared with BGA (Ball Grid Array) package and LGA (Land Grid Array) package, it is possible to make package thickness thinner and excellent price competitiveness.

Though not shown in the drawings, a metal thin film may be formed on the wall surface of each of the through holes 110H for the purpose of heat radiation and / or electromagnetic wave shielding, if necessary. In addition, if necessary, a separate passive component such as an inductor or a capacitor may be disposed in each of the through holes 110H.

11 is a plan view schematically showing a process of laser processing between unit packages of the package substrate of Fig.

12 is a schematic sectional elevation II-II 'sectional view of the package substrate of FIG.

Referring to the drawings, before the package substrate 100 is cut in the soaking process in order to obtain each unit package 100-1, the space between the unit packages 100-1 of the package substrate 100 is covered with the laser processing unit 200 ) With a laser (200 V). More specifically, the passivation layer 150 made of a soft material such as ABF is processed with a laser (200 V). The passivation layer 150 is removed by processing to form the first processed portion 201 having an opening shape. When sowing proceeds along the first processed portion 201, almost no resin bur is generated even if the passivation layer 150 includes a soft material such as ABF.

On the other hand, when the sealing material 130 includes a soft material such as ABF, the sealing material 130 can be processed with the laser (200 V) when the passivation layer 150 is processed with the laser (200 V). The sealing material 130 is removed by the processing so that the second processed portion 202 having the opening shape can be formed. The second processed portion 202 may be located at the same level with the first processed portion 201 in the direction perpendicular to the surface of the passivation layer 150. Accordingly, when the sawing process is performed in the subsequent process, The first processed portion 201 and the second processed portion 202 can be simultaneously sown. When sowing proceeds along the second processed portion 202, little resin bur is generated even if the sealing material 130 includes a soft material such as ABF.

Fig. 13 is a plan view schematically showing the sawing along the laser-processed portion of the package substrate of Fig. 11; Fig.

FIG. 14 is a schematic sectional view III-III 'of the package substrate of FIG. 13; FIG.

Referring to the drawing, after the passivation layer 150 and / or the sealing material 130 are laser-processed (200 V) using the laser processing unit 200, the package substrate 100 ). In this case, the passivation layer 150 and / or the sealing material 130, which are made of a soft material, are hardly sacked, so that resin burrs or the like which are generated by sowing hardly occur. The sawing unit 300 may be a sawing unit, and the sawing unit 300 may be a known equipment using a saw. The support member 110 and the support member 140 and the like are cut along the cut portion 301 by sawing so that each unit package 100-1 can be separated. That is, a plurality of semiconductor packages 100-1 are formed by sawing.

The semiconductor package 100-1 includes a support member 110 having a through hole 110H and including a re-wiring layer 112 electrically connected to the connection pad 120P of the semiconductor chip 120, a through hole 110H A supporting member 110 and at least a part of the semiconductor chip 120, which has an active surface on which the connection pad 120P is disposed and an inactive surface disposed on the opposite side of the active surface, A connection member 140 (not shown) including a material 130, a support member 110, and a re-wiring layer 142 disposed on the active surface of the semiconductor chip 120 and electrically connected to the connection pad 120P of the semiconductor chip 120 A passivation layer 150 disposed on the connection member 140, an under bump metal layer 160 formed on the opening of the passivation layer 150 and electrically connected to the re-wiring layer 142 of the connection member 140, And is disposed on the passivation layer 150 and electrically connected to the re-wiring layer 142 of the connecting member 140 through the under- But it is not limited thereto.

In the present disclosure, the term "bottom", "bottom", "bottom" and the like refer to the direction in which the connection terminals of the fan-out semiconductor package or the package- Direction. It should be noted, however, that this is a definition of a direction for the sake of convenience of explanation, and it is needless to say that the scope of rights of the claims is not particularly limited by description of such direction.

The meaning of being connected in this disclosure includes not only a direct connection but also an indirect connection through an adhesive layer or the like. In addition, the term "electrically connected" means a concept including both a physical connection and a non-connection. Also, the first, second, etc. expressions are used to distinguish one component from another, and do not limit the order and / or importance of the components. In some cases, without departing from the scope of the right, the first component may be referred to as a second component, and similarly, the second component may be referred to as a first component.

The expression " exemplary " used in this disclosure does not mean the same embodiment but is provided for emphasizing and explaining different unique features. However, the above-mentioned examples do not exclude that they are implemented in combination with the features of other examples. For example, although the description in the specific example is not described in another example, it can be understood as an explanation related to another example, unless otherwise described or contradicted by the other example.

The terms used in this disclosure are used only to illustrate an example and are not intended to limit the present disclosure. Wherein the singular expressions include plural expressions unless the context clearly dictates otherwise.

1000: electronic device 1010: main board
1020: Chip related parts 1030: Network related parts
1040: Other parts 1050: Camera
1060: antenna 1070: display
1080: Battery 1090: Signal line
1100: Smartphone 1101: Smartphone body
1110: Smartphone mainboard 1111: mainboard insulation layer
1112: main board wiring 1121, 122, 123: parts
1130: Smartphone camera 2200: Fan-in semiconductor package
2220: semiconductor chip 2221: body
2222: connection pad 2223: passivation film
2240: connecting member 2241: insulating layer
2242: re-wiring layer 2243: via
2250: passivation layer 2260: under bump metal layer
2270: solder ball 2280: underfill resin
2290: molding material 2500: main board
2301: Interposer substrate 2302: Interposer substrate
2100: fan-out semiconductor packages 2121, 122, 123: semiconductor chips
2121: Body 2122: Connection pad
2140: connecting member 2141: insulating layer
2142: re-wiring layer 2143: via
2150: passivation layer 2160: under bump metal layer
2170: solder ball 100-1: semiconductor package, unit package
100: Package substrate
110: connecting member 111: insulating layer
112: rewiring layer 113: via
120: semiconductor chip 120P: connection pad
130: sealing member 140: connecting member
141: insulating layer 142: rewiring layer
143: Vias 150: Passivation layer
160: under bump metal layer 170: connection terminal
200: laser processing unit 201, 202:
200V: Laser 300:
301: Cutting section

Claims (10)

Preparing a package substrate on which a plurality of unit packages are arranged;
Laser processing between the unit packages of the package substrate; And
Sagging the package substrate along the processed portion; / RTI >
A method of manufacturing a semiconductor package.
The method according to claim 1,
Wherein the package substrate comprises a plurality of semiconductor chips having an active surface on which connection pads are disposed and an inactive surface disposed on the opposite side of the active surface, a sealing material for sealing at least a part of the plurality of semiconductor chips, And a re-wiring layer electrically connected to the connection pads of the plurality of semiconductor chips, a passivation layer disposed on the connection member, and a redistribution layer disposed on the passivation layer, And a plurality of electrically connected connection terminals,
Wherein the step of processing the laser processes the passivation layer.
A method of manufacturing a semiconductor package.
3. The method of claim 2,
Wherein the passivation layer comprises an Anjinomoto build-up film (ABF)
A method of manufacturing a semiconductor package.
3. The method of claim 2,
Wherein the step of laser processing further processes the seal material.
A method of manufacturing a semiconductor package.
5. The method of claim 4,
Wherein the sealant comprises an Anginomoto build-up film (ABF)
A method of manufacturing a semiconductor package.
5. The method of claim 4,
Wherein the processing portion of the passivation layer is located at the same level as the processing portion of the sealing material and perpendicular to the surface of the passivation layer,
A method of manufacturing a semiconductor package.
3. The method of claim 2,
Wherein the package substrate further comprises a support member having a plurality of through holes,
Wherein each of the plurality of semiconductor chips is disposed in each of the plurality of through holes,
Wherein the connecting member and the supporting member are sown in the sowing step,
A method of manufacturing a semiconductor package.
8. The method of claim 7,
Wherein the supporting member includes a re-wiring layer electrically connected to connection pads of the plurality of semiconductor chips,
A method of manufacturing a semiconductor package.
8. The method of claim 7,
By the sowing step,
A semiconductor chip having a support member having a through-hole, an active surface disposed in the through-hole and having an active surface on which the connection pad is disposed and an inactive surface disposed on the opposite side of the active surface, a seal for sealing at least a part of the support member and the semiconductor chip A connecting member disposed on the active surface of the support member and the semiconductor chip and including a re-wiring layer electrically connected to the connection pad of the semiconductor chip, a passivation layer disposed on the connection member, and a passivation layer disposed on the passivation layer, And a plurality of semiconductor packages including a plurality of connection terminals electrically connected to the rewiring layer of the connecting member,
A method of manufacturing a semiconductor package.
A laser processing unit for laser processing between the unit packages of a package substrate on which a plurality of unit packages are arranged; And
A soldering portion for soldering the package substrate along the laser machined portion between the unit packages; / RTI >
A semiconductor package manufacturing apparatus.

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