KR20180111219A - Device for probe pin using laser welding, method for assembling probe pin using laser welding, and system for electro-optical welding therefor - Google Patents

Abstract

According to the present invention, a method for assembling a probe pin comprises the following steps of: preparing a lower jig provided with a lower hole; preparing an upper jig provided with an upper hole; assembling the upper jig and the lower jig for the upper hole and the lower hole to be mutually aligned in a vertical direction; inserting a barrel into the upper hole and the lower hole; inserting a bottom plunger into the barrel; inserting a coil spring into the barrel; inserting a top plunger into the barrel; pressurizing the top plunger for the top plunger to respond to a restriction section of the barrel in spite of a tensile force of the coil spring; and bonding the barrel to the top plunger in the restriction section. According to the present invention, deformation of the probe pin is minimized to reduce a defective rate.

Description

TECHNICAL FIELD [0001] The present invention relates to a probe pin assembled using laser welding, a method of assembling the probe pin, and an electro-optical welding system of a probe pin used in the probe pin. electro-optical welding therefor}

The present invention relates to a probe pin assembled using laser welding, an assembling method thereof, and an electro-optical welding system, and more particularly, to a probe pin assembled using laser welding, And welding the barrel and the top plunger by melting and welding with a small amount of light energy only in the required confining section. Therefore, welding yield is greatly improved through precision welding while minimizing the deformation of the probe pin. In particular, the mechanical caulking caulking, a method for assembling the probe pin, and an electro-optical welding system used therein.

Generally, a semiconductor chip is formed by accumulating minute electronic circuits at a high density and tests whether each electronic circuit is normal during the manufacturing process.

In the test of such a semiconductor chip, a probe pin for electrically connecting a ball terminal of the semiconductor chip and a contact pad of a test board for applying a test signal is used.

1 shows a conventional probe pin 2 and includes a cylindrical barrel 10, an upper plunger 20 inserted into the upper portion of the barrel 10, a lower plunger 30 inserted into the lower portion of the barrel 10, And a spring 40 which is an elastic body interposed between the upper plunger 20 and the lower plunger 30 at the center of the barrel 10. [

Such a conventional probe pin 2 is configured such that the upper plunger tip 22 contacts the ball terminal of a test object such as a semiconductor chip and the lower plunger tip 32 contacts the contact pad of the test board, It plays a role.

The electrical signal for inspection is transmitted from the ball terminal of the semiconductor chip to the barrel 10 through the upper plunger 20 in contact with the lower portion of the barrel 10 and then to the lower plunger 30 through the barrel 10, It is delivered to the Contact pad.

As shown in FIG. 1, the probe pin 2 includes a double type probe pin (double pin) in which upper and lower plungers 20 and 30 are slidably coupled to both ends of the barrel 10, The lower plunger 30 is slidably coupled to the lower end of the barrel 10 while the upper plunger 20 may include a single type of probe pin constrained to the upper end of the barrel 10. [

3, the single-type probe pin 2 is arranged in the jig Z in a state where the probe pin 2 is assembled and is fixed to the upper end (constraint section) of the barrel 10 by means of rolling caulking means R The upper plunger 20 can be restrained. 2C) of the upper plunger 20 to constrain the upper plunger 20 to the barrel 10 by the rolling coating means R, And the barrel portion corresponding to the barrel portion is mechanically pressed using the rolling caulking means R. When the restricting section of the barrel 10 is pressed by the rolling caulking means R, it is caulked to the caulking section C of the upper plunger 20 while being deformed by the pressure. This assembly is completed.

In this case, although it is sufficient if the pressure is provided only in the restraining section required for caulking, impact is applied to a portion where caulking is unnecessary by the rolling caulking means R, resulting in the overall deformation of the barrel 10 and other probe pins 2, . Such defective assembling is usually raised in excess of 10% to raise the cost.

Korean Patent Publication No. 10-2017-0000572

SUMMARY OF THE INVENTION The present invention has been made in order to solve the problems of the prior art as described above, and it is an object of the present invention to provide a probe pin assembly using laser welding for joining a barrel and a top plunger without using a mechanical method using a tool , An assembling method thereof, and an electro-optical welding system.

Another object of the present invention is to provide a probe pin, a method of assembling the probe pin, and an electro-optical welding system, which are assembled using laser welding to constrain the barrel and the top plunger while minimizing the deformation of the probe pin.

According to an aspect of the present invention, there is provided a method of assembling a probe pin, the method comprising: a cylindrical barrel having upper and lower openings; a bottom plunger inserted into a lower portion of the barrel; A method for assembling a probe pin including a top plunger and a coil spring disposed between the bottom plunger and the top plunger, the method comprising: assembling the barrel, the bottom plunger, the coil spring, and the top plunger; The bottom plunger, the bottom plunger, the bottom plunger, the bottom plunger, the bottom plunger, the bottom plunger, the bottom plunger, and the top plunger, .

According to another aspect of the present invention, there is provided a method of assembling a probe pin, comprising: preparing a lower jig having a lower hole; preparing an upper jig having an upper hole; Assembling the upper jig and the lower jig so as to be mutually aligned, inserting a barrel into the upper hole and the lower hole, inserting a bottom plunger into the barrel, inserting a coil spring into the barrel, Pressing the top plunger so that the top plunger can correspond to the confining section of the barrel in spite of the tensile force of the coil spring, and pressing the top plunger so that the barrel is joined to the top plunger Lt; / RTI >

According to another aspect of the present invention, there is provided an electro-optical welding system of a probe pin of the present invention, comprising: a probe pin in which a barrel, a bottom plunger, a coil spring and a top plunger are inserted in order, A probe pin electro-optical welding system for joining a barrel to a top plunger in the confinement zone to form a confinement section, comprising: a laser head for generating a laser beam as a laser oscillation device; a laser head for irradiating the irradiated laser beam to a confinement section At least one optical cable for coupling the laser head and the lens head, a laser driver for supplying power for operating the laser head, and for adjusting data of the laser beam output from the laser head Means for receiving the power and the data It comprises an electrical cable to provide the laser head.

As described above, according to the configuration of the present invention, the following effects can be expected.

First, by not providing a separate caulking section, the process of placing the caulking section in the top plunger is omitted, and the process of shortening the process is expected by omitting the aligning process so that the blow of the tooling is coincident with the caulking section.

Secondly, it is expected to improve the yield by preventing the assembly failure that gives mechanical impact to the barrel and causes deformation in other areas not related to caulking.

Third, it is possible to control the laser power required for joining the barrel and the top plunger, which enables mass production to optimize the assembly process of the probe pin.

1 is a partially cutaway perspective view showing a configuration of a conventional double-type probe pin;
2 is a partially cutaway perspective view showing a configuration of a single type probe pin according to the prior art.
3 is a perspective view showing a caulking method using a tool of the prior art.
FIGS. 4, 5, and 6 are a perspective view, an exploded perspective view, and a cross-sectional view, respectively, showing a configuration of a probe pin assembled using laser welding according to the present invention.
7 is a cross-sectional view illustrating a step of assembling a probe pin according to the present invention.
8 is a cross-sectional view showing the main assembly step of the probe pin according to the present invention.
9 is a schematic view showing the concept of an electro-optical welding system of a probe pin according to the present invention;
10 is a sectional view showing a press coking method according to the present invention.

Brief Description of the Drawings The advantages and features of the present invention, and how to achieve them, will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. The dimensions and relative sizes of parts and regions in the figures may be exaggerated for clarity of illustration. Like reference numerals refer to like elements throughout the specification.

Embodiments described herein will be described with reference to plan views and cross-sectional views, which are ideal schematics of the present invention. Thus, the shape of the illustrations may be modified by assembly techniques and / or tolerances. Accordingly, the embodiments of the present invention are not limited to the specific shapes shown, but also include changes in shapes that are generated according to the assembling process. Thus, the regions illustrated in the figures have schematic attributes, and the shapes of the regions illustrated in the figures are intended to illustrate specific forms of regions of the components and are not intended to limit the scope of the invention.

Hereinafter, preferred embodiments of the probe pin assembled using the laser welding according to the present invention having the above-described structure will be described in detail with reference to the accompanying drawings.

4, 5 and 6, the probe pin 100 includes a barrel 110 having a cylindrical shape with an open top and a bottom. The probe pin 100 is inserted into a lower portion of the barrel 110, A top plunger 130 inserted in the upper portion of the barrel 110 and restrained by the movement prevention stopper 110b and a bottom plunger 120 and a top plunger 130 disposed at the center of the barrel 110. The bottom plunger 120, 130 to provide a tensile force therebetween.

The bottom plunger 120 contacts the Contact pad (not shown) of the test apparatus. The bottom plunger 120 includes a slide portion 122 having a diameter substantially equal to an inner diameter of the barrel 110, a pad contact portion 124 having a diameter smaller than the diameter and contacting the contact pad, a slide portion 122, And includes a round portion 126 in which the barrel 110 is round-coked between the contact portions 124.

The top plunger 130 contacts the conductive ball (not shown) of the semiconductor device. The top plunger 130 has a restricting portion 132 whose diameter is substantially coincident with the inner diameter of the barrel, a step portion 134 which is larger than the diameter so as to be caught on the end portion of the barrel 110, And an optical fused joint portion 138 which is joined to the barrel 110 at one side of the contacted ball contact portion 136 and the restricting portion 132.

The probe pin 100 of the present invention is designed to be slidable upward and downward by a load during inspection in the case of the bottom plunger 120 while the single plunger 130 is fixedly designed so as not to slide in spite of a load, Pin (single-type probe pin).

According to the single type probe pin 100, the bottom stopper 110a is caulked at the lower end of the barrel 110 so that the bottom plunger 120 moves up and down without any deviation from the barrel 110, . On the other hand, a movement prevention stopper 110b is formed on the upper side of the barrel 110 by laser or other electro-optical laser welding so that the top plunger 130 is fixed.

As described above, the separation prevention stopper 110a and the movement prevention stopper 110b are provided by different bonding methods.

The departure prevention stopper 110a is formed by the existing caulking method. For example, by round caulking. According to the round calking, by forming a round at the end of the barrel 110 by using the press, the round portion 126 of the bottom plunger 120 is fixed and prevented from being separated.

The movement prevention stopper 110b is formed by an optical welding method. For example, laser optical welding is used.

Hereinafter, a method of assembling a probe pin using laser welding will be described in detail with reference to the drawings.

The method of assembling a probe pin using laser welding includes an assembling step and an assembling step.

Referring to FIG. 7, the assembling step involves temporarily assembling the barrel 110, the bottom plunger 120, the coil spring 140, and the top plunger 130. The assembling step consists of inserting the barrel 110, the bottom plunger 120, the coil spring 140 and the top plunger 130 in order.

For example, it is possible to insert the barrel 110 into the upper / lower holes 222 and 212 by assembling the upper / lower jigs 220 and 210 so that the upper / lower holes 222 and 212 are vertically aligned , Inserting the bottom plunger 120 into the barrel 110 (see FIG. 1), inserting the coil spring 140 into the barrel 110 (see FIG. And inserting the top plunger 130 (see Fig.

A bottom plunger 120 is disposed at a lower portion of the barrel 110, a coil spring 140 is disposed at a center of the barrel 110, and a top plunger 130 is disposed at an upper portion of the bottom plunger 120.

Referring to FIG. 8, the present assembling step is a step of completing the assembly of the probe pin 100 by forming a separation preventing stopper 110a and a movement preventing stopper 110b using a round caulking or laser welding method .

The present assembling step consists of a laser welding step and a round calking step. The bottom plunger 120 under the barrel 110 is slid up and down with respect to the release preventing stopper 110a and the top plunger 130 on the barrel 110 is locked and fixed by the moving stopper 110b .

Referring again to FIG. 7, the assembling step will be described.

And a lower jig 210 having a lower hole 212 is prepared. The lower hole 212 extends in the vertical direction in the lower jig 210. The lower hole 212 includes a step to prevent the bottom plunger 120 from escaping from the barrel 110 during the assembling step. Although not shown in the drawing, the lower jig 210 may be divided into upper end lower jig and lower end lower jig to provide a step difference.

An upper jig 220 having an upper hole 222 is prepared. The upper hole 222 extends in the vertical direction in the upper jig 220. The upper holes 222 are aligned with each other in the vertical direction with the lower holes 212.

At least one welding hole 232 communicating with the upper hole 222 may be formed in the upper jig 220. The lower jig 210 may be formed with one or more welding holes 232 communicating with the lower holes 212. For example, the welding hole 232 may extend horizontally in the lower hole 212 or the upper hole 222. Alternatively, the welding hole 232 may extend between the lower jig 210 and the upper jig 220. Alternatively, the welding operation can be performed on the lower jig 210 without the separate upper jig 220 and the welding hole 232.

Two welding holes 232 may be formed on both sides of the barrel 110 according to the embodiment. Or may be formed around the barrel 110 in the front, back, left, and right directions. In the other case, a plurality of radial directions may be formed around the barrel 110.

Although a welding hole 232 is formed between the upper and lower jigs 220 and 210 for convenience of description, a single jig may be used according to an embodiment of the present invention, It does not exclude that it can be formed on one side of a single jig.

Subsequently, the assembling step will be described with reference to Fig.

On the other hand, before the welding, the step portion 134 of the top plunger 130 is pressed so as to be in close contact with the upper end of the barrel 110. A top plunger urging means 150 for urging the top plunger 130 so that the top plunger 130 can be fixed at an appropriate position in spite of the tensile force of the coil spring 140 in addition to the upper and lower jigs 220 and 210, May be further included.

Referring to FIG. 9, an electro-optical welding system 300 is installed in the welding hole 232.

According to the electro-optical welding system 300 of the present invention, the top plunger 130 is constrained to the barrel 110 by laser optical welding. Since the barrel 110 and the top plunger 130 are welded by a concentrated heat source with an increased energy density by condensing the laser beam, the thermal influence to the barrel 110 is minimized and the output can be controlled as much as necessary for the semi-melting welding We will adopt a layer optical welding method.

To this end, the electro-optical welding system 300 includes a laser head 310 for generating a laser beam as a laser oscillating device, a probe head 100 for irradiating the irradiated layer beam with a lens and / At least one lens head 320 for condensing the laser beam 310 in the confining section of the laser head 310 and an optical fiber 330 for connecting the laser head 310 and the lens head 320, And an electric cable (not shown) for supplying the power and data to the laser head 310 from the laser driving means 340 and the laser driving means 340 for adjusting various data of the laser beam outputted from the laser oscillating apparatus 350).

Of course, the laser head 310 and the lens head 320 can be provided to the integral machining head 322 without being connected through the optical cable 330. For example, the processing head 322 may integrally include a laser output device for oscillating a laser beam and a lens / mirror other laser beam guiding optical device.

The one or more lens heads 320 may be installed in the welding holes 232. As described above, the welding hole 232 is a portion corresponding to the confining section of the barrel 110.

The barrel 110 may be formed using nickel (Ni), gold (Au), or copper (Cu), which is excellent in corrosion resistance and electrical conductivity, and may be formed by plating the above-described metal on a ceramic or plastic material. Therefore, in the laser welding of the confinement section, an oxidation reaction heat is generated. In order to remove the reaction heat and cool it, a processing gas may be used. Such a processing gas may be oxygen, argon gas or helium gas.

As described above, according to the laser optical welding, since the laser light source is used to concentrate the light energy only in the confining section, the thermal influence on the welding peripheral region is small and the deformation of the barrel 110 is minimized, Since the weld is welded only to the region, defects due to mechanical impact can be solved once.

Next, a round caulking method using a press will be described.

10, after the assembly of the top plunger 130 and the barrel 110 is completed, the probe pin 100 is mounted on the first round caulking jig 260. The bottom plunger 120 and the barrel 110 assembled after the laser welding of the top plunger 130 and the barrel 110 are installed in the first round caulking jig 260 so that the lower end portion of the barrel 110 is exposed do. When the second round coating jig 270 is mechanically pressed and caulked, a motion prevention stopper 110a is provided. This completes the entire assembling process of the probe pin 100.

As described above, according to the point corking method of the tool of the present invention, since the pressure is applied to the confining section between the top plunger and the barrel with the tool, the pressure region is forced to be large and the probe pin is deformed. It is understood that the technical idea is to remove the defects because the barrel and the top plunger correspond to each other and instantly use the strong current and the property of fusion bonding using the high-density heat source. Many other modifications will be possible to those skilled in the art, within the scope of the basic technical idea of the present invention.

100: probe pin 110: barrel
110a: Disengagement prevention stopper 110b: Motion prevention stopper
120: bottom plunger 130: top plunger
140: coil spring 300: electro-optical welding system
310: laser head 320: lens head
330: optical cable 340: laser driving means
350: Electric cable

Claims (11)

A bottom plunger inserted into a lower portion of the barrel, a top plunger inserted into an upper portion of the barrel, and a coil spring interposed between the bottom plunger and the top plunger, As a result,
Assembling the barrel, the bottom plunger, the coil spring, and the top plunger; And
A bottom stopper is provided at a lower portion of the barrel to limit the movement of the bottom plunger and a stopper is provided at an upper portion of the barrel so as to fix the top plunger to prevent the bottom plunger, And then assembling the probe pin assembly. The method according to claim 1,
In the assembling step,
The bottom plunger, the bottom plunger, the coil spring, and the top plunger are sequentially inserted so that a bottom plunger is disposed at a lower portion with respect to the barrel, a coil spring is disposed at a center, and a top plunger is disposed at an upper portion The method of claim 1, further comprising: 3. The method of claim 2,
In the present assembling step,
The release prevention stopper is formed by a round coating method,
Wherein the movement preventing stopper is formed by using a laser melting method. The method of claim 3,
The probe pin is designed to be slidable up and down by a load during inspection in the case of the bottom plunger, while the probe pin is designed to be fixed so as not to slide in spite of a load, The method of claim 1, wherein the at least one probe pin is a metal. Preparing a lower jig having a lower hole;
Preparing an upper jig having an upper hole;
Assembling the upper jig and the lower jig such that the upper hole and the lower hole are mutually aligned in a vertical direction;
Inserting a barrel into the upper hole and the lower hole;
Inserting a bottom plunger into the barrel;
Inserting a coil spring into the barrel;
Inserting a top plunger into the barrel;
Pressing the top plunger so that the top plunger can correspond to the constraining zone of the barrel despite the tensile force of the coil spring; And
And bonding the barrel to the top plunger in the confining interval. ≪ RTI ID = 0.0 > 11. < / RTI > 6. The method of claim 5,
Wherein the lower hole extends in the vertical direction in the lower jig,
Wherein at least one welding hole communicating with the lower hole is formed in the lower jig. 6. The method of claim 5,
The upper hole extends in the vertical direction in the upper jig,
Wherein at least one welding hole communicating with the upper hole is formed in the upper jig. 8. The method according to claim 6 or 7,
The welding head is equipped with a lens head by a probe pin electro-optical welding system, and the barrel and the top plunger are welded by condensing the laser beam in the confining section, thereby minimizing deformation applied to the barrel Of the probe pins. A probe pin electro-optical welding system for bonding a barrel to a top plunger in the confining section to confine the top plunger to the barrel in a probe pin in which a barrel, a bottom plunger, a coil spring and a top plunger are successively inserted and assembled As a result,
1. A laser oscillator comprising: a laser head for generating a laser beam;
At least one lens head for condensing the irradiated laser beam in a confining section using a lens and a mirror;
At least one optical cable connecting the laser head and the lens head;
Laser driving means for supplying power for operating the laser head and adjusting data of the laser beam output from the laser head; And
And an electrical cable for providing the power and the data from the laser driving means to the laser head. 10. The method of claim 9,
A vertical hole is formed in the vertical direction and a welding hole is formed in the horizontal direction so as to communicate with the vertical hole, wherein the welding hole includes a jig on which the lens head is mounted; And
The top plunger is pressed against the top plunger so as to overcome the tensile force of the coil spring and to be fixed at a proper position in a state in which the barrel, the bottom plunger, the coil spring, Further comprising a top plunger urging means. ≪ Desc / Clms Page number 20 > A cylindrical barrel having upper and lower openings, respectively;
A bottom plunger inserted into a lower portion of the barrel and being restricted in movement by a departure prevention stopper;
A top plunger inserted into an upper portion of the barrel and restrained by a movement prevention stopper; And
And a coil spring for providing a tensile force between the bottom plunger and the top plunger at the center of the barrel,
The escape prevention stopper is formed by caulking,
Wherein the movement prevention stopper is formed by laser welding. ≪ RTI ID = 0.0 > 11. < / RTI >

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