KR20180092771A

KR20180092771A - Inspection apparatus, and inspection method using the same apparatus

Info

Publication number: KR20180092771A
Application number: KR1020170018950A
Authority: KR
Inventors: 이호준
Original assignee: 주식회사 고영테크놀러지
Priority date: 2017-02-10
Filing date: 2017-02-10
Publication date: 2018-08-20
Also published as: KR101967372B1; WO2018146657A1

Abstract

The technical idea of the present invention provides an inspection apparatus which can precisely and quickly inspect the appearance of a product, particularly the appearance of a product having a hexahedron structure, and an inspection method using the apparatus. The inspection apparatus includes a physically separate and independently operating input stage and a flip / discharge stage, so that different inspection targets can be arranged in the input stage and the flip / discharge stage at a predetermined stage. Accordingly, the inspection apparatus according to the technical idea of the present invention can directly inspect another inspection object waiting in the input stage after inspection of one inspection object in the flip / discharge stage.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inspection apparatus and an inspection method using the same,

Technical aspects of the present invention relate to an inspection apparatus, and more particularly to an inspection apparatus and method for inspecting the appearance of a product.

In general, various kinds of patterns and symbols are formed by imprinting or printing on various electronic products such as a cellular phone, a digital camera, and a telephone, and the material thereof is also made of various materials such as a plastic material, a metal material, and a ceramic material. The surface of such a case may have defects, including scratches or scratches, during coating, production and transportation, and the reliability of the product may be reduced when such defective cases are used in the manufacture of electronic devices. Therefore, the case requires a visual inspection process for checking whether or not a surface defect has occurred, and generally, visual inspection can be performed through the naked eye. However, visual inspection by the naked eye deteriorates the workability, and there is a possibility that defects can not be found due to mistakes.

On the other hand, a plurality of cameras provided outside the conveyance belt take images of the case in various angles and acquire images of the respective faces of the case while transferring the case in one direction while placing the case on the conveyance belt, Can be checked. However, this inspection apparatus using a conveyance belt and a camera is costly disadvantageous in that it includes a large number of cameras, and in the case where the case is not seated in a proper position of the conveyance belt, it is difficult to obtain a precise image, An error may occur.

An object of the present invention is to provide an inspection apparatus capable of precisely and quickly inspecting the appearance of a product, particularly the appearance of a product having a hexahedron structure.

Another object of the present invention is to provide an inspection method capable of precisely and quickly inspecting the appearance of a product by optimizing a process of inspecting the appearance of the product using the equipment.

In order to solve the above-described problems, the technical idea of the present invention is to provide a first stage for transferring a charged first inspection object to an inspection position and inspecting a front surface or a back surface of the first inspection object at the inspection position. And a second stage, which is disposed adjacent to the first stage and receives the first inspection object from the first stage or transfers the first inspection object to the first stage, rotates the first inspection object, Wherein the first inspection object comprises a first stage for moving from the first stage to the second stage, a second stage for moving from the second stage to the first stage, , And a third transfer from the first stage to the second stage, wherein, when the first inspection object is in the second stage after the third transfer, the second inspection object is transferred to the first stage The inspection apparatus being provided.

In one embodiment of the present invention, the first stage includes a first rail portion having a first fixed rail and a first moving rail, and the second stage includes a second stationary rail and a second movable rail, Wherein a width between the first fixed rail and the first movable rail is adjusted by the operation of the first movable rail and the second fixed rail is fixed to the second fixed rail by the operation of the second movable rail, And the first moving rail and the second moving rail can operate independently of each other.

In one embodiment of the present invention, the first stage includes a direction switching unit that rotates the first examination subject in parallel with the front surface or the back surface in the posture in which the front surface or the back surface is directed upward, The stage may be arranged so that the side of the first inspection object faces upward in the posture in which the front surface or the rear surface faces upward or in a posture in which the side surface faces upward, And a flipper for rotating the inspection object.

In one embodiment of the present invention, the first inspection object moves from the inspection position to the flipper by the first rail at the first transfer, rotates at the flipper before the second transfer, And the second rail is moved from the flipper to the redirecting unit by the first rail, rotated by the redirecting unit before the third transfer, and then is moved from the redirecting unit to the inspection position Wherein the first inspection object is moved by the first rail to the flipper from the inspection position and is rotated by the flipper after the third transfer and the first inspection object is rotated by the flipper after the rotation by the flipper, Wherein the first inspection object is discharged from the second stage by a second rail part, and the second inspection object is discharged from the second stage before the first inspection object is discharged from the second stage, It can be added to the Stage.

In an embodiment of the present invention, the flipper may rotate the first inspection object up or down.

In one embodiment of the present invention, the flipper may rotate the first inspection object within a predetermined angle in a clockwise or counterclockwise direction in a posture in which the side surface faces upward.

In an embodiment of the present invention, the flipper may include a slip ring structure to allow infinite rotation.

In an embodiment of the present invention, the flipper includes a clamp plate for fixing the first inspection object in close contact with the first inspection object, and the clamp plate may have a structure separated into two.

In one embodiment of the present invention, at least one inspection unit that receives light reflected from the first inspection target and inspects the first inspection target, wherein the inspection unit moves the first 1 front side or back side inspection of the inspection object and inspection of the side surfaces of the first inspection object in the second stage.

In one embodiment of the present invention, two inspection apparatuses are disposed adjacent to each other, and the inspection unit can perform inspection while moving between the two inspection apparatuses.

In an embodiment of the present invention, the inspection unit may inspect the first inspection target using a pattern illumination.

According to another aspect of the present invention, there is provided a method of inspecting an object to be inspected, the method comprising: a first stage for transferring a charged first inspection object to an inspection position and inspecting a first surface of the first inspection object at the inspection position; And a second stage, which is disposed adjacent to the first stage and receives the first inspection object from the first stage or transfers the first inspection object to the first stage, rotates the first inspection object, And a second stage for allowing the second surface of the other first inspection object to be inspected, wherein the first inspection object reciprocates between the first stage and the second stage, And a second inspection object is put into the first stage when the inspection object is finally transferred to the stage and is in the second stage.

In one embodiment of the present invention, the first stage includes a first rail including a first stationary rail and a first movable rail, and a second rail extending from the first rail to the first rail, Wherein the second stage includes a second rail having a second stationary rail and a second movable rail and a second stationary rail intersecting perpendicularly to a direction in which the second stationary rail extends and parallel to the first surface And a flipper that rotates the first inspection object about one straight line.

In one embodiment of the present invention, the first inspection object is moved from the inspection position to the flipper by the first rail, is rotated in the flipper, and the first rail is moved from the flipper to the flipper The first inspection target moves to the direction switching unit, rotates in the direction switching unit, moves to the inspection position by the first rail, and moves back and forth between the first stage and the second stage in the order of moving to the flipper, The first inspection object is rotated by the flipper after the final transfer and is discharged from the second stage by the second rail, and the second inspection object is rotated by the first stage before the first inspection object is discharged from the second stage, Lt; / RTI >

Further, in order to solve the above-mentioned problems, the technical idea of the present invention is to include a step of inserting a first object to be inspected so that its front surface faces upward in the first stage of an inspection apparatus having a first stage and a second stage; Inspecting a front surface of the first inspection target using an inspection unit; The first inspection object is moved to the second stage and the first side of the first inspection object and the third side opposite to the first side are directed upward by using a flipper, 1) rotating the object to be inspected and inspecting the first side and the third side using the inspection unit; Wherein the flipper is used to rotate the first object to be inspected so that the rear surface opposite to the front surface faces upward and move the first object to be inspected to the direction switching unit of the first stage, 1 rotating the object to be inspected parallel to the rear surface; Inspecting a back side of the first inspection target using the inspection unit; And moving the first inspection target to the second stage and moving the second side of the first inspection target side and the fourth side opposite to the second side face upward using the flipper, And inspecting the second side and the fourth side by using the inspection unit while rotating the first inspection object, wherein in the step of inspecting the second and fourth sides, And putting it in the first stage to wait.

In one embodiment of the invention, the step of inspecting the first side and the third side, and inspecting the second side and the fourth side, the flipper causes the first inspection object to move up or down .

In one embodiment of the present invention, the flipper rotates the first inspection object within a predetermined angle in a clockwise or counterclockwise direction in a posture in which any one of the first to fourth sides faces upward .

In one embodiment of the present invention, the first stage includes a first rail portion having a first fixed rail and a first moving rail, and the second stage includes a second stationary rail and a second movable rail, Wherein the first movable rail and the second movable rail operate independently of each other so that the first width between the first fixed rail and the first movable rail and the second fixed rail between the first fixed rail and the first movable rail, 2 moving rails may be different from each other.

In one embodiment of the present invention, in the step of inspecting the second aspect and the fourth aspect, when the inspection of the second side and the fourth side of the first inspection object is completed, 2 stage, and the front side inspection of the second inspection object can be performed immediately after the inspection of the second side and the fourth side is completed.

In one embodiment of the present invention, two inspection apparatuses are disposed adjacent to each other, and the inspection unit performs inspection while moving between the two inspection apparatuses, The movement operation of the inspection object can be performed in the other one.

The inspection apparatus according to the technical idea of the present invention includes the first stage and the second stage that are physically separated and operate independently so that different inspection targets can be arranged in the first stage and the second stage at a predetermined stage . Accordingly, the inspection apparatus according to the technical idea of the present invention can immediately inspect another inspection object waiting in the first stage after inspection of one inspection object in the second stage, so that a quick and accurate appearance Inspection can be performed.

Further, in the inspection method according to the technical idea of the present invention, by using the inspection apparatus, the inspection of the inspection object can be carried out more quickly and accurately. For example, when the visual inspection of the inspection object is performed in the order of the front surface inspection in the first stage, the first lateral inspection in the flipper in the second stage, the back inspection in the first stage, and the second inspection in the flipper again, When the second side inspection of the first inspection target is completed by waiting the second inspection target at the surface inspection position of the first stage at the time of performing the second side inspection on the first inspection target, A frontal inspection can be performed. Therefore, the inspection method according to the technical idea of the present invention can shorten the inspection time by the discharge of the first inspection object and the movement time to the input and surface inspection position of the second inspection object.

1 and 2 are a perspective view and a plan view showing a testing apparatus according to an embodiment of the present invention.
3 is a perspective view showing a structure in which an inspection object is actually arranged in the inspection apparatus of FIG.
4A to 4D are side views showing the operation of the inspection units according to the embodiments of the present invention and the positional relationship of inspection objects.
FIGS. 5 and 6 are perspective views showing the flipper portion of the inspection apparatus of FIG. 1 in more detail.
7 is a flowchart schematically illustrating an inspection method according to an embodiment of the present invention.
8 is a flowchart schematically showing an inspection method according to an embodiment of the present invention.
9A to 9H are perspective views showing the inspection method of FIG. 8 applied to the inspection apparatus of FIG.
10 is a perspective view for explaining the principle of inspecting the slopes of the side surfaces to be inspected in the inspection apparatus of FIG.
11 is a perspective view schematically showing an inspection apparatus according to an embodiment of the present invention.
12A to 12F are side views illustrating a method of inspecting an inspection object using an inspection apparatus according to an embodiment of the present invention.
13 is a perspective view of a system having two inspection apparatuses according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following description, when an element is described as being connected to another element, it may be directly connected to another element, but a third element may be interposed therebetween. Similarly, when an element is described as being on top of another element, it may be directly on top of the other element, and a third element may be interposed therebetween. In addition, the structure and size of each constituent element in the drawings are exaggerated for convenience and clarity of description, and a part which is not related to the explanation is omitted. Wherein like reference numerals refer to like elements throughout. It is to be understood that the terminology used is for the purpose of describing the present invention only and is not used to limit the scope of the present invention.

1 and 2 are a perspective view and a plan view schematically showing an inspection apparatus 1000 according to an embodiment of the present invention.

Referring to FIGS. 1 and 2, the inspection apparatus 1000 of the present embodiment can largely include a first stage 100 portion and a second stage 200 portion. In some embodiments, the first stage 100 may be an entry stage. In some embodiments, the second stage 200 may be a flip / exit stage.

The first stage 100 is provided with a first surface F1 and / or a second surface S1 of the inspection object S by the inspection portion (see 300 in Fig. 9A) at the surface inspection position 132, It may be the portion where the inspection of the surface F2 is performed. Here, the object S to be inspected may be an unfinished product requiring an appearance inspection during in-line production, or may be a finished product through all the processes. Accordingly, the inspection apparatus 1000 may be provided after the specific process facility for manufacturing the inspection object among the in-line facilities, and the inspection apparatus 1000 may be provided immediately after the inspection object S is discharged from the specific process facility The appearance of the inspection object S can be inspected in a plurality of predetermined directions.

For example, the inspection object S may be a metal product manufactured through a precision machining process (CNC). The inspection object S has an arbitrary three-dimensional shape and is arranged on the first surface F1 when the first surface F1 is determined with convenience, A second surface F2 in a direction substantially opposite to the first surface F1 and a side surface between the first surface F1 and the second surface F2 may be respectively defined. In other words, the first surface F1, the second surface F2, or the sides of the object S to be inspected herein is the object to be inspected in each of a plurality of directions that are convenient, functional, or ideally determined in the three- Can mean the partial appearance of the object S. [ In some embodiments, when the inspection object S is put into the inspection apparatus 1000 in a neutral and stable posture, the appearance of the inspection object S seen from above can be defined as the first surface, The second surface F2 and the sides may be determined based on the first surface F1. The side faces have a side having a first width W1 corresponding to the width of the first stage 100 when the inspection object S is inserted into the inspection apparatus 1000 and a side having a first width W1 corresponding to the direction of the first width W1 And a second width W2 that is a width in a different direction from the width W2. In this context, the direction in which the inspection object S is put into the inspection apparatus 1000 is referred to as the longitudinal direction of the inspection object S, and the direction orthogonal to the longitudinal direction thereof can be referred to as the width direction of the inspection object. The longitudinal direction and the width direction may not necessarily be orthogonal. That is, the first surface F1, the second surface F2, or the side surfaces may be substantially orthogonal to each other, so that the first surface F1, the second surface F2, And the boundaries of the sides, the boundaries of the second surface F2 and the sides, and the sides, respectively, may be blended and overlapping.

In some embodiments, the object S to be examined may have a hexahedral structure, or a structure that may be approximated thereto. For example, the inspection object S may have a rectangular shape having long sides and short sides on the x-y plane, and a hexahedron structure having a predetermined thickness in the z-axis direction. When the inspection object S has a hexahedral structure or a structure that can be approximated thereto, the inspection apparatus 1000 of the present embodiment may be a six-sided inspection apparatus. Of course, the material of the inspection object S is limited to metal, or the structure of the inspection object S is not limited to the hexahedron.

The first stage 100 may include a first rail 110, a redirection unit 120, and a clamp 130.

The inspection target S can be put into the first rail part 110. [ In some embodiments, the first rail 110 may include a first fixed rail 112 and a first movable rail 114. The first fixed rail 112 is a fixed rail, and the first movable rail 114 may be a movable rail. For example, the first movable rail 114 moves in the direction indicated by the first arrow a1 (i.e., the + y direction or the -y direction), and the first fixed rail 112 and the first movable rail 114 Can be adjusted to fit the width of the object S to be inspected. Each of the first fixed rail 112 and the first movable rail 114 may be provided with a conveyance belt 115. The conveyance belt 115 may be configured such that the inspection target S is seated thereon so that the inspection target S can be moved together with the movement of the conveyance belt 115. The conveyor belt 115 is movable along one or more orbits along each of the first fixed rail 112, the first movable rail 114, the second fixed rail 212, and / or the second movable rail 214 It can have a band shape. However, the present invention is not limited to this conveyance belt 115, and the inspection object S may be conveyed using another conveying means. The first rail 110 is disposed between the first fixed rail 112 and the first movable rail 114 so that the inspection object can be transferred to a predetermined position via the conveyance belt 115. For example, the first rail 110 may move the inspected object to the surface inspection position 132 after the inspection is performed on the first surface F1 or the second surface F2, or after the inspection of the flipper 220, After the side inspection of the inspection object is performed in the flipper, the inspection target S can be transferred to the position of the redirection unit 120 again. The grooves G are formed in the first fixed rail 112 and the first movable rail 114. When the gap between the first fixed rail 112 and the first movable rail 114 is narrowed, The groove G can receive the gripping fingers 122 of the direction switching unit 120. [

On the other hand, in the first rail 110, the positions of the first fixed rail 112 and the first movable rail 114 can be changed. In addition, the first rail 110 may be structured such that two rails can move simultaneously, instead of a fixed rail and a movable rail.

The direction switching unit 120 may rotate the inspection object horizontally by a predetermined angle, for example, about 90 degrees. Here, turning the lens at a predetermined angle horizontally may mean changing the direction by a predetermined angle using the z axis as a rotation axis in the xy plane. For example, the direction switching unit 120 rotates the inspection object arranged in the longitudinal direction between the first fixed rail 112 and the first movable rail 114 by about 90 degrees horizontally, 112 and the first movable rail 114 in the width direction. For this, the direction switching unit 120 may rotate the inspection object S by a predetermined angle, for example, about 90 degrees from the elevated state. Specifically, the direction switching unit 120 can raise the inspection object S carried in the longitudinal direction. Then, the inspection object S can be rotated by a predetermined angle in the raised state, for example, in the width direction. At this time, the first movable rail 114 may be moved with respect to the first fixed rail 112 so as to have a distance corresponding to the width of the inspection object S. When the rotation of the inspection object S and the movement of the first moving rail 114 are completed, the direction switching unit 120 moves down the inspection target S and moves the inspection target S Can be seated. The step of rotating the inspection object S by a predetermined angle in the raised state and the step of moving the first movable rail 114 relative to the first fixed rail 112 may be performed sequentially or simultaneously.

In some embodiments, when the first movable rail 114 is moved with respect to the first fixed rail 112, the direction switching unit 120 is moved in the same direction as the first movable rail 114 Lt; / RTI > However, the distance that the direction switching unit 120 moves may be different from the distance that the first moving rail 114 moves. For example, the distance that the direction switching unit 120 moves may be half the distance that the first moving rail 114 moves. In some embodiments, the redirection unit 120 may be configured to be positioned at the center between the first movable rail 114 and the first fixed rail 112.

In some embodiments, the redirection unit 120 may rotate the inspection object longitudinally in the width direction. Here, the horizontal means a surface parallel to the first surface (F1) or the second surface (F2) when the first surface (F1) or the second surface (F2) of the inspection object faces upward, A state in which the first surface F1 or the second surface F2 of the object S faces upward is referred to as a 'horizontal state'. The horizontal rotation of the inspection object S may include a rotation about the normal line of the first surface F1 or the second surface F2. The longitudinal direction is a direction parallel to the first fixed rail 112 or the first movable rail 114 in the long side of the inspection target S and the short side of the inspection target S is parallel to the first fixed rail 112 or the first And may be in a direction parallel to the movable rail 114. [

As shown in the drawing, the direction switching unit 120 includes fingering fingers 122 for holding an object to be inspected in the longitudinal direction so that the object is horizontally rotated . In other words, the inspection object placed on the first rail part 110 moves up and down from the first rail part 110 through the direction switching part 120, descends after rotating about 90 °, 110). On the other hand, the rotation of the inspection object through the direction switching unit 120 may be performed simultaneously in the ascending or descending process. The rotation of the inspection object through the direction switching unit 120 may be performed through one rotation or several rotations.

Although the structure and operation of the redirecting unit 120 have been briefly described above, this is merely an example, and the structure and operation of the redirecting unit 120 are not limited thereto. For example, it is needless to say that the structure and operation of all the direction switching units that can rotate the object to be inspected by about 90 degrees without colliding with the rail can be applied to the inspection apparatus 1000 of the present embodiment.

The clamp 130 may function to fix the object to be inspected at the surface inspection position 132. For example, when the inspection target is moved to the surface inspection position 132 through the first rail 110, the clamp 130 presses the side of the inspection target and firmly fixes the inspection target, And can be performed precisely.

The second stage 200 may include a second rail 210 and a flipper 220.

When the inspection of the object to be inspected is completed, the object to be inspected may be discharged to the outside through the second rail 210. The second rail 210 also has a fixed second fixed rail 212 and a movable second movable rail 214. The second movable rail 214 has a second arrow a2). < / RTI > In addition, the conveyance belt 215 may be provided on the second fixed rail 212 and the second movable rail 214, respectively. The position of the second fixed rail 212 and the position of the second movable rail 214 in the second rail 210 can be changed. In some cases, the second rail 210 may have a structure in which the second fixed rail 212 and the second movable rail 214 can move simultaneously.

The flipper 220 may be a device for flipping the inspection object S such that one side of the inspection object S faces upward. Here, the flipping may mean a rotation or a direction change by a predetermined angle with the imaginary straight line in the y direction connecting the center of the two flipper 220 as the flipping axis C. [ Meanwhile, the flipping axis C may be perpendicular to the direction in which the second fixing rail 212 extends, and may be parallel to the first or second surface of the object to be inspected. Hereinafter, a state in which one side of the inspection target S faces upward is referred to as a " vertical state ".

More specifically, when the first surface (F1) or the second surface (F2) of the inspection object (S) having the first side, the second side, the third side and the fourth side is in a horizontal state facing upward , The flipper 220 can flip the inspection object S at a predetermined angle, for example, about 90 degrees, so that the first side, which is one of the four sides of the inspection object, is turned upside down. When the inspection object S is in the vertical state, the flipper 220 flips the inspection object S about 180 degrees so as to be in the vertical state again. However, the flipper 220 is provided with the first side and the opposite side 3 position of the side can be changed. For example, when the first side of the inspection object S faces upward, the flipper 220 flips the inspection object S by approximately 180 degrees so that the third side opposite to the first side faces upward . Further, when the second side of the inspection object S faces upward, the flipper 220 flips the inspection object S by approximately 180 degrees, so that the fourth side opposite to the second side faces upward . On the other hand, the inspection object S may be positioned so that the side portion to be inspected is aligned with one end of the flipper 220, or may be positioned to protrude slightly from the end. The side portion to be inspected slightly protrudes from one end of the flipper 220 so that the end of the flipper 220 can be excluded from the focus range for inspection by the inspection portion. Therefore, the extent to which the side portion to be inspected protrudes from the end can be determined in consideration of this point.

As the flipper 220 flips the inspection target S, the distance between the inspection target side of the inspection target S and the inspection unit can be changed. Therefore, at the same time or at the same time as the step of flipping the inspection target S to secure the distance between the inspection target side of the inspection target S and the inspection unit for the proper inspection or the relative distance between the flipping axis C and the inspection unit Can be adjusted. In some embodiments, if the subject S is flipped approximately 90 degrees, the flipper 220 may descend after flipping or flipping, or may be flipped after flipping or flipping of the flipper 220. In some embodiments, At the same time as the ripping, the test part may rise. In addition, when the inspection object S is flipped about 180 degrees, the flipper 220 can flip up about 90 degrees while descending, flip the remaining about 90 degrees, and achieve about 180 degrees overall flipping . Further, the flipper 220 may flip upward by about 180 ° and then descend again. It will be appreciated that a typical technician may then lower and / or raise the inspector instead of lifting and / or lowering the flipper 220. The reason for adjusting the relative distance between the flipper 220 and the inspection unit is to ensure a proper distance between the inspection target side of the inspection target S and the inspection unit for accurate inspection. On the other hand, in the case of flipping the inspection target S by about 180 degrees, the inspection target S may be positioned so that the side portion to be inspected is aligned with the end portion of the flipper 220, It is possible. The side portion to be inspected slightly protrudes from one end of the flipper 220 so that the end of the flipper 220 can be excluded from the focus range for inspection by the inspection portion. Therefore, the extent to which the side portion to be inspected protrudes from the end can be determined in consideration of this point. The specific structure of the flipper 220 will be described in more detail in the description of FIGS. 5 and 6. FIG.

The second rail 210 and the flipper 220 are connected together in the same frame. Accordingly, the width adjustment of the second rail 210 and the flipper 220 can be performed together. In other words, the y-directional position of the second fixed rail 212 and the flipper 220 adjacent thereto in the x direction can be fixed. The second moving rail 214 and the flipper 220 adjacent to the second moving rail 214 in the x direction are movable in the y direction so that they can move along the width of the inspection target S together. However, the structure of the inspection apparatus 1000 of the present embodiment is not limited thereto. For example, the flipper 220 may be configured to move independently of the second rail 210. On the other hand, the movement of the flipper 220 means movement in the direction of the second arrow a2, and the flipping of the flipper 220 can be performed independently of the movement of the second rail 210.

In the inspection apparatus 1000 of the present embodiment, the first stage 100 and the second stage 200 can be configured to be independently operable under the control of the controller. More specifically, the first rail 110 of the first stage 100 and the second rail 210 of the second stage 200 are physically separated so that the first rail 110, The width of the second rail 210 and the width of the second rail 210 are independently controlled so that the first rail 110 and the second rail 210 have different widths Lt; / RTI > 2, the first rail 110 maintains a first width W1 and the second rail 210 has a second width W2 that is smaller than the first width W1, Lt; / RTI >

The first stage 100 and the second stage 200 so that the inspection object can move between the first stage 100 and the second stage 200, The distance between the rails 110 and the flipper 220 may be appropriately controlled and the distance between the first rail 110 and the flipper 220 in the x direction may be appropriately determined.

Due to this structural feature, in the inspection apparatus 1000 of this embodiment, different inspection targets can be arranged in the first stage 100 and the second stage 200 at a predetermined partial stage. For example, a first inspection object is disposed on the second stage 200 to perform a side inspection, and a second inspection object is disposed on the first stage 100 to inspect the first surface F1 or the second surface F2 Or the inspection of the first side (F1) or the second side (F2) may be performed. More specifically, when performing an inspection using one inspection unit and performing a side inspection on the first inspection target in the second stage 200, a second inspection target is charged into the first stage 100, It can wait for inspection of the surface F1 or the second surface F2. When the side surface inspection for the first inspection object is completed in the second stage 200, the first surface F1 or the second surface F2 for the second inspection object standing by in the first stage 100, The inspection can be performed immediately.

The inspection apparatus 1000 of the present embodiment includes the first stage 100 and the second stage 200 that are physically separated and independently operable so that the first stage 100 and the second stage 200 can be moved at a predetermined stage, So that different inspection objects can be arranged in the inspection area. Accordingly, the inspection apparatus 1000 of the present embodiment can simultaneously inspect two inspection targets arranged in the first stage 100 and the second stage 200 using two inspection units, It is possible to quickly and accurately perform the appearance inspection on the inspection object.

3 is a perspective view showing a structure in which an inspection object is actually arranged in the inspection apparatus of FIG.

3, in the inspection apparatus of the present embodiment, the first inspection object 1500-1 is disposed in the second stage 200 and the second inspection object 1500-2 is disposed in the first stage 100 . The first inspection object 1500-1 is arranged in the longitudinal direction of the second rail 210 so that the first inspection object 1500-1 is positioned between the second fixed rail 212 and the second movable rail 214 of the second rail 210 May have a second width W2 corresponding to the short side of the first inspection object 1500-1. On the other hand, the second inspection object 1500-2 is arranged in the width direction on the first rail 110 so that the first stationary rail 112 and the first movable rail 114 of the first rail 110, May have a first width W1 corresponding to the long side of the second inspection object 1500-2.

The first inspection object 1500-1 is disposed on the flipper 220 and is moved to a second width of the first inspection object 1500-1 after the posture is changed to a vertical state by flipping by the flipper 220 W2 can be inspected through the inspection unit. While the first inspection object 1500-1 is inspected for the side of the second width W2, the second inspection object 1500-2 is disposed at the surface inspection position 132 where the clamp 130 is located , Or may be examined via a separate inspection unit.

In the inspection apparatus 1000 of this embodiment, one inspection unit may be provided. The side inspection of the first inspection object 1500-1 is performed first in the second stage 200 and then the inspection unit moves so that the second inspection object 1500-2 is moved in the first stage 100, A first side inspection can be performed on the first side. Of course, the first side inspection of the second inspection target 1500-2 may be performed first, and the side inspection of the first inspection target 1500-1 may be performed. In some cases, the inspection apparatus of this embodiment can have two or more inspection units. In the case where two or more inspection units are provided, a side inspection of the first inspection target 1500-1 in the second stage 200 and a side inspection of the first inspection target 1500-1 in the first stage 100, Inspection and / or second side inspection may be performed simultaneously.

On the other hand, depending on whether any of the first inspection object 1500-1 and the second inspection object 1500-2 is put upward in the first stage 100 and / The directions of the first surface and the second surface of the first inspection object 1500-1 and the second inspection object 1500-2 in accordance with the inspection time points of the first inspection object 1500-1 and the second inspection object 1500-2 are Can be changed.

More specifically, the first inspection object 1500-1 and the second inspection object 1500-2 are moved in the direction of the first surface (or the second surface) when they are brought into the first stage 100 The first surface and the second surface may be opposite to each other. For example, in the case where the front surface of the first inspection object 1500-1 and the front surface of the second inspection object 1500-2 are put into the first stage 100 so as to face upward, The first inspection object 1500-1 is disposed on the flipper 220 of the second stage 200 so that the second surface F2 faces upward and the second inspection object 1500-2 is disposed on the flipper 220 of the second stage 200 as shown in FIG. May be disposed on the first stage 100 so that the first surface F1 faces upward. In the case where the first inspection object 1500-1 and the second surface F2 of the second inspection object 1500-2 are put into the first stage 100 so as to face upward, The inspection object 1500-1 is disposed on the flipper 220 of the second stage 200 so that the first surface faces upward and the second inspection object 1500-2 is disposed so that the second surface faces upward And may be placed in the first stage 100 and disposed.

In addition, the first inspection object 1500-1 and the second inspection object 1500-2 may be opposite to the first and second surfaces depending on the inspection time point. For example, the first inspection object 1500-1 and the second inspection object 1500-2 can face the first surface or the second surface upward at the surface inspection position 132 according to the time of inspection, and the flipper 220 May be any side of the inspection objects 1500-1 and 1500-2. The present invention can combine the first inspection object 1500-1 and the second inspection object 1500-2 in the upward direction at the surface inspection position 132 and the upward direction in the flipper 220 Include all possible cases.

Depending on whether the first inspection object 1500-1 and the second inspection object 1500-2 are inserted into the first stage 100 in the longitudinal direction or in the width direction, -1) and the second inspection object 1500-2 may be changed. For example, when the object to be inspected is inserted in the width direction, it may have the arrangement direction as shown in Fig. However, if the inspection object is loaded in the longitudinal direction, the first inspection object 1500-1 is arranged in the width direction in the second stage 200, and the second inspection object 1500- 2 may be arranged in the longitudinal direction.

Whether the first surface or the second surface is directed upwardly, or whether the first surface or the second surface is loaded in the longitudinal direction or the width direction, etc., may be only illustrative. For example, in the inspection apparatus 1000 of the present embodiment, the first stage 100 and the second stage 200 can operate independently, and when the objects to be inspected are put into the first stage 100, The back side, the longitudinal direction or the width direction can be variously selected. Accordingly, the upward facing surfaces and the placement directions of the inspection objects in the first stage 100 and the second stage 200 may vary.

4A to 4D are side views illustrating the operation of the inspection units 300, 300a, 300b, 300s, and 300sb and the positional relationship between the inspection objects 1500-1 and 1500-2 according to the embodiments of the present invention.

Referring to FIG. 4A, a first inspection object 1500-1 is flipped on a flipper 220, and a second inspection object 1500-2 is disposed on a surface inspection position 132 . The surface inspection position 132 may be a position adjacent to the clamp 130. At this time, the direction in which the second inspection target 1500-2 faces upward may be the first surface or the second surface.

In some other embodiments, the first inspection object 1500-1 is flipped in the flipper 220 and the second inspection object 1500-2 is placed in the flipped position (see FIG. 1) Can be located. At this time, the direction in which the second inspection object 1500-2 faces upward may also be arbitrarily selected from the first direction and the second direction. At this time, while the first inspection object 1500-1 is inspected by the inspection unit 300, immediately before or immediately after the inspection, the second inspection object 1500-2 is exposed to the surface adjacent to the clamp 130 To the inspection position.

In some embodiments, the inspector 300 examines the side of the first inspection object 1500-1 and then moves to the surface inspection position and moves to the surface inspection position where the second inspection object 1500-2 is located The first surface or the second surface of the second inspection object 1500-2 can be inspected.

In some embodiments, the width of the flipper 220 may be adjusted to have a first width or a second narrower width to flip the first object 1500-1. Embodiments of the present invention include all possible embodiments where the first rail 110 has a first width or a narrower second width for each of the possible widths of the flipper 220.

4B is a sectional view of the flipper 220 according to an embodiment of the present invention. Referring to FIG. 4B, the flipper 220 includes a first inspection unit 300a located at the top of the flipper 220 and a second inspection unit 300s located at the surface inspection position. It is the same as the example. Therefore, the following description will focus on the differences and the description will be omitted.

4B further includes a second inspection unit 300s positioned at the surface inspection position, so that the inspection unit 300 can be moved between the flipper 220 and the surface inspection position as in the embodiment described with reference to FIG. 4A So that the inspection time can be shortened accordingly.

4C is a cross sectional view of the flipper 220 shown in FIG. 4A except that it includes a first inspection unit 300a located at an upper portion of the flipper 220 and a third inspection unit 300b positioned at a lower portion of the flipper 220. FIG. Is the same as the embodiment described above. Therefore, the following description will focus on the differences and the description will be omitted.

In the embodiment of FIG. 4C, since the first inspection unit 300a and the third inspection unit 300b can simultaneously inspect the sides located on the opposite sides of the flipped inspection object, the inspection object is rotated 180 ° No flipping is required. Therefore, the inspection time in the flipper 220 can be greatly shortened.

The first surface and the second surface of the object to be inspected at the surface inspection position can be inspected simultaneously or after the inspected object placed on the flipper 220 is inspected. Therefore, it is not necessary to perform additional inspection at the surface inspection position to inspect the other surface of the first and second surfaces, thereby shortening the inspection time.

FIG. 4D shows a first inspection unit 300a and a third inspection unit 300b located at upper and lower portions of the four inspection units, that is, the flipper 220, and a second inspection unit 300s and a fourth inspecting unit 300sb, which are the same as the embodiments described with reference to FIG. 4A. Therefore, the following description will focus on the differences and the description will be omitted.

The embodiment of FIG. 4D can simultaneously inspect the first and second sides at the surface inspection location, while the flipper 220 simultaneously inspects the sides opposite to the two flipped inspection objects. After inspecting the side faces (for example, the short sides) flipped by the flipper 220, the flipper 220 performs a direction change in the direction changing unit and then the remaining two sides of the subject to be inspected ), All tests may be terminated. Therefore, the inspection time can be greatly shortened because all the inspection can be completed by changing the direction of the inspection target once.

FIGS. 5 and 6 are perspective views showing the flipper portion of the inspection apparatus of FIG. 1 in more detail.

Referring to FIG. 5, as described above, the flipper 220 can function to flip one side to be inspected upward from the remaining sides of the inspection object in a state in which some sides of the inspection target are fixed have. Alternatively, the flipper 220 may have a function of raising or lowering the object to be inspected in the flipper 220 or raising or lowering the flipper 220 itself such that the side to be inspected is located at a predetermined distance from the inspection unit Can also be performed.

When the conveyance belt 222 of the flipper 220 is in a position capable of interlocking with the conveyance belt 115 of the first stage 100, the object to be inspected is conveyed through the first rail 100 to the first stage 100 To the flipper 220 portion. The flipper 220 may include a conveyance belt 222 that can convey an object to be inspected in conjunction with the conveyance belt 115 of the first rail 110. The conveyance belt 222 can move the inspection object to the proper position of the flipper 220. [ The flipper 220 may be provided with a sensor for determining whether the object to be inspected is in an appropriate position. Here, the proper position may correspond to a position where the side to be inspected of the inspection object coincides with one end of the flipper 220, or a position slightly protruding from one end.

As the driving signal for flipping the flipper 220, an electric signal may be applied to the flipper 220. In the testing apparatus of the present embodiment, the slip rings 224, a slip ring structure may be employed. Since the structure of the slip ring 224 is already known, a detailed description thereof will be omitted. Since the structure of the slip ring 224 is adopted in the flipper 220, the flipper 220 can rotate infinitely in the same direction. For reference, in a case where an electrical signal is applied through a wiring having a general direct structure instead of a structure of a slip ring, twisting of wiring may occur due to unidirectional rotation of the flipper 220. Therefore, in this case, the flipper 220 may be restricted from rotating the flipper 220 in the opposite direction to untangle the wiring after rotating in one direction. However, in the inspection apparatus of this embodiment, the flipper 220 can be freely rotated at any rotation angle and direction without any problem of wire twisting by employing the slip ring 224 structure.

6, the flipper 220 is provided with a drive gear 272, drive pulleys 246 and 248, a flipper belt 240, a first idle gear 274, a second idle gear 276, a clamp plate 226, clamp plate) can be disposed.

The flipper belt 240 may be comprised of a first belt 222 and a second belt 224 spaced up and down on the inner surface of the flipper 220. The first belt 222 and the second belt 224 may be supported by drive pulleys 246 and 248 and two or more support rollers 249 respectively and as the drive pulleys 246 and 248 rotate Can be driven.

A drive gear 272 rotatably mounted on the flipper 220 to drive the first belt 222 and the second belt 224 and a drive gear 272 mounted on the outer surface of the flipper 220 A first idle gear 274 and a second idle gear 276, which are rotatably installed, may be provided. The first idle gear 274 may be coupled to a drive pulley 246 that supports the first belt 222 and a second idle gear 276 may be coupled to the drive pulley 246 that supports the second belt 224, 248 via a rotary shaft.

The drive gear 272 may be rotated to engage with either the first idle gear 274 or the second idle gear 276 to transfer the object to be inspected. For example, when the second idle gear 276 connected to the second belt 224 is engaged with the driving gear 272, the second idle gear 276 rotates in accordance with the rotation of the driving gear 272, Can be driven. If the first idle gear 274 connected to the first belt 222 is engaged with the driving gear 272 when the flipper 220 is rotated by about 180 °, The first belt 222 can be driven while the first idle gear 274 rotates. That is, the first belt 222 and the second belt 224 are driven independently, and the inspection object can be transferred.

The clamping plate 226 can compress and fix the object to be inspected when the object to be inspected comes to a proper position of the flipper 220 so that the object to be inspected can be firmly fixed to the flipper 220 during rotation and / As shown, the clamp plate 226 may have a two-piece structure. For example, the clamp plate 226 may have a first plate portion 226a and a second plate portion 226b separated from each other at a central portion.

The clamp plate 226 is moved inward by the clamp cylinder 228 to press the object to be inspected. When the clamp cylinder 228 is disposed on both sides of the outer periphery and the clamp plate is integrally formed long, Can be weakened. In addition, there may be a case where the object to be inspected is pressed and fixed only at one end of the flipper 220. The inspection apparatus 1000 of the present embodiment includes clamp plates 226a and 226b separated from each other by a first plate portion 226a and a second plate portion 226b for improving the force transmission at the central portion and / ) Can be employed. Of course, in the inspection apparatus 1000 of the present embodiment, the clamp plate 226 may be formed as an integral structure. Further, the position of the clamp cylinder 228 may be changed. Here, reference numeral 229 denotes a guide shaft, and a return spring is disposed on the guide shaft 229 so as to facilitate returning of the clamp plate 226.

7 is a flowchart schematically illustrating an inspection method according to an embodiment of the present invention.

Referring to FIG. 7, the first inspection object 1500-1 may be brought into the first stage 100 (S110). The first inspection object 1500-1 may be carried to the upper portion of the one-end direction switching unit 120 by, for example, the first rail 110 in the longitudinal direction.

The first inspection object 1500-1 may be transferred to the surface inspection position 132 via the direction switching unit 120. [ Subsequently, the first surface of the first inspection object 1500-1 at the surface inspection position 132 may be inspected by the inspection unit (S120).

After inspecting the first side, the first inspection object 1500-1 may be transferred to the flipper 220 for lateral inspection. The flipper 220 flips the first inspection object 1500-1 and the opposite sides of the first inspection object 1500-1 can be inspected by the inspection unit S130. In some embodiments, after one side of the first inspection object 1500-1 is inspected, the flipper 220 may flip the first inspection object 1500-1 about 180 °, The opposite side can be inspected by the inspection part. However, the present invention is not limited thereto. If the inspection portion is disposed on the upper and lower portions of the flipper 220, about 180 ° flipping of the first inspection object 1500-1 may be unnecessary.

Then, the first inspection object 1500-1 may be transferred to the upper portion of the direction switching unit 120 and then be reversed (S142). In other words, the first inspection object 1500-1 can be turned by about 90 degrees in the horizontal direction so that the first inspection object 1500-1 brought in the longitudinal direction can have a width direction. For this, the direction switching unit 120 raises the first inspection object 1500-1 to the upper portion of the conveyance belt 115, changes the direction by about 90 degrees in the horizontal direction, and then turns the first inspection object 1500-1 Can be seated on the conveying belt 115.

Then, after the first inspection object 1500-1 is transferred to the surface inspection position 132, the inspection may be performed on the second surface of the first inspection object 1500-1 (S148). In some embodiments, the width of the first rail 110 (see FIG. 1) at the surface inspection location when inspecting the first side and inspecting the second side may be different.

Then, the first inspection object 1500-1 is transferred to the flipper 220, the flipper 220 flips the first inspection object 1500-1, and the first inspection object 1500-1, (S160). In this case, the inspection unit may check the other two opposite sides of the inspection surface (S160). FIG. 8 is a flow chart showing the inspection method according to an embodiment of the present invention shown in FIG. 7 in more detail, and FIGS. 9A to 9E are perspective views showing the inspection method of FIG. 8 applied to the inspection apparatus of FIG.

Referring to FIGS. 8 and 9A, a first inspection target 1500-1 is inserted into the first stage 100 (S110). Thereafter, the first inspection object 1500-1 moves to the surface inspection position 132 and the first surface inspection is performed (S120). More specifically, the first inspection object 1500-1 inserted into the first stage 100 is moved to the surface inspection position through the first rail 110 (S122), and then moved to the first inspection position via the clamp 130 The inspection object 1500-1 is fixed (S124). When the first inspection object 1500-1 is fixed, the first surface inspection for the first inspection object 1500-1 is performed through the inspection unit 300 (S126).

As shown in FIG. 9A, the first inspection object 1500-1 may be inserted into the first stage 100 such that the first surface thereof faces upward in the longitudinal direction. However, as described above, the first inspection object 1500-1 is not limited to this, but may be inserted into the first stage 100 so that the second surface faces upward, . If the second surface is put in the first stage 100 so as to face upward, the first surface inspection for the first inspection object 1500-1 may be changed to the second surface inspection.

9A, the width of the flipper 220 is adjusted to be equal to the width of the first stage 100. If the side of the object to be inspected immediately before was being inspected, the flipper 220 may have been widened to the longitudinal direction of the object to be inspected immediately before. The width of the flipper 220 can be narrowed in accordance with the arrangement of the object to be inspected when the object immediately before the object is inspected and discharged, and can be brought into a state as shown in Fig. 9A.

The inspection unit 300 can capture a plurality of images of the front surface of the first inspection object 1500-1 while moving in one direction as indicated by the third arrow a3. Of course, when the size of the object to be inspected is small, the entire image may be obtained through one imaging. The inspection unit 300 may be, for example, a CCD camera. Of course, the inspection unit 300 is not limited to the CCD camera. For example, the inspection unit 300 may be a high-performance CMOS camera such as a sCMOS (Scientific CMOS) camera. Furthermore, the inspection unit 300 may include any kind of sensor or detector capable of detecting a defect of the inspection object in a non-contact manner.

For example, the inspection unit 300 irradiates the inspection object with the pattern illumination while changing the phase, receives the light reflected from the inspection object, and analyzes the two-dimensional image obtained therefrom, And devices for acquiring image information. The principle of acquiring a three-dimensional shape or a two-dimensional image using the pattern illumination is well known to those of ordinary skill in the art and a detailed description thereof will be omitted.

Meanwhile, in the inspection apparatus 1000 of the present embodiment, the inspection unit 300 may be connected to another analysis apparatus (not shown) to complete the inspection through image processing or the like. The analyzing apparatus may be a computer equipped with a program capable of processing and analyzing the acquired image, and may be a general personal computer (PC), a workstation, a super computer, or the like.

8 and 9B, when the front surface inspection of the first inspection object 1500-1 is completed, the first inspection object 1500-1 moves to the flipper 220 of the second stage 200 The inspection of the side surfaces S1, S3 on the short side is performed (S130).

More specifically, the first inspection object 1500-1 moves to the proper position of the flipper 220 through the first rail 110 and the conveyance belts 115 and 222 of the flipper 220 (S131). Here, the proper position is a position at which the first side surface S1 of the first inspection object 1500-1 to be inspected, for example, the short side of the first inspection object 1500-1 is matched to one end of the flipper 220 Position, or a slightly protruding position at one end.

8 and 9C, the first inspection object 1500-1 is firmly fixed to the flipper 220 by the clamp plate 226 and rotates about 90 degrees while the flipper 220 descends, The inspection object 1500-1 is also rotated by about 90 degrees to become a vertical state (S132). Meanwhile, the flipper 220 may be lowered after the rotation. The flipper 220 may rotate clockwise or counterclockwise. In this embodiment, the flipper 220 rotates in the counterclockwise direction so that the back surface of the first inspection object 1500-1 can be oriented toward the second stage 200. The reason for lowering the flipper 220 is to keep the upper side of the first inspection object 1500-1 and the inspection unit 300 at an appropriate distance for accurate inspection as described above. However, in another embodiment of the present invention, the inspection unit 300 may be raised instead of lowering the flipper 220.

The first side face S1 of the first inspection object 1500-1 is directed upward by the rotation of the flipper 220 by about 90 degrees and the first side face S1 of the first inspection object 1500-1 1 side S1 is inspected (S133).

Thereafter, as the flipper 220 rotates by about 180 degrees, the first inspection object 1500-1 also rotates by about 180 degrees and becomes a vertical state again (S134). The rotation of the flipper 220 by about 180 may be performed by the following methods. For example, the flipper 220 may be rotated by about 90 ° while the flipper 220 is lifted, rotated by about 90 °, and then rotated by about 180 °. Alternatively, the flipper 220 may be rotated by about 180 ° after the flipper 220 is lifted. May be rotated by about 180 during the lifting or lowering of the lifter 220. However, the present invention is not limited thereto. Rotation of the flipper 220 by about 180 may also be performed in a clockwise or counterclockwise direction. For reference, the reason why the flipper 220 is lifted up and down at about 180 ° of the flipper 220 is that the space is limited and can not be rotated in the downward state. Of course, when a space is provided so as to be rotatable even in the lowered state, the flipper 220 may rotate immediately without lifting and lowering.

On the other hand, when the flipper 220 is rotated by about 180 degrees, the first inspection object 1500-1 can be moved such that a side portion to be inspected through the conveyance belt is located at the end portion of the flipper 220. [ For example, the first inspection object 1500-1 may be moved through the conveyance belt so that the third side surface S3 of the first inspection object 1500-1 is located at the end of the flipper 220. [ The movement of the first inspection object 1500-1 may be changed according to the rotation method of the flipper 220 by about 180 degrees. For example, when the flipper 220 rotates by approximately 90 degrees, the first inspection object 1500-1 can be moved after the first rotation of about 90 degrees.

The third side surface S3 on the end face of the first inspection object 1500-1 is directed upward by the rotation of the flipper 220 by about 180 degrees and the first inspection object 1500-1 is inspected through the inspection unit 300, The inspection of the third side S3 is performed (S135). As shown in FIG. 9A, the third side S3 may be a side opposite the first side S1.

After the inspection of the third side surface S3 of the first inspection object 1500-1, the flipper 220 is rotated by about 90 degrees while the first inspection object 1500-1 is rotated by about 90 degrees, (S136). Of course, the flipper 220 may rotate after the lift. For reference, in this step, rotation of the flipper 220 by about 90 ° can be performed so that the opposite surface of the surface of the first inspection object 1500-1 already inspected in the first stage 100 faces upward . For example, when the first surface of the first inspection object 1500-1 is inspected in the first stage 100, the second surface of the first inspection object 1500-1 is rotated through about 90 degrees of the flipper 220, The face can be directed upward.

Referring to FIGS. 8 and 9D, the first inspection object 1500-1 may be transferred to the direction switching unit 120 of the first stage 100 (S137).

8, 9E, and 9F, the first inspection object 1500-1 rotates horizontally in the direction switching unit 120, moves to the front / rear inspection positions, and the rear duplex inspection is performed S140).

8 and 9E, the first inspection object 1500-1 moves to the direction switching unit 120 through the first rail 110, and as shown in FIG. 9E, the direction switching unit The first inspection object 1500-1 is rotated about 90 degrees horizontally (S142). The rotation of the direction switching unit 120 may be performed by raising, rotating, raising, rotating, or descending so as not to collide with the rails. On the other hand, the arrangement of the first inspection object 1500-1 in the longitudinal direction can be changed to the arrangement in the width direction by the rotation of the direction switching unit 120. [ Therefore, the interval of the first rail 110 can be changed to correspond to the long side of the first inspection object 1500-1 through the movement of the first movable rail 114. [ Of course, when the first inspection object 1500-1 is initially inserted into the first stage 100 in the width direction, the first inspection object 1500-1 is rotated by the rotation of the direction switching unit 120, The arrangement may be changed to a longitudinal arrangement, and the spacing of the first rail 110 may be changed accordingly. Also, the interval of the flipper 220 can be changed as well.

8 and 9F, the first inspection object 1500-1 moves to the surface inspection position via the first rail 110 (S144), and the first inspection object 1500 -1) is fixed (S146). When the first inspection object 1500-1 is fixed, the back surface inspection for the first inspection object 1500-1 is performed through the inspection unit 300 (S148). As shown in FIG. 9F, the back surface inspection of the first inspection object 1500-1 can also be performed while the inspection unit 300 moves in the direction of the fourth arrow a4. Of course, when the size of the first inspection object 1500-1 is small, the backside inspection may be performed through one imaging.

8, 9G and 9H, after the back surface inspection for the first inspection object 1500-1 is completed, the first inspection object 1500-1 is moved to the second stage 200, The inspection of the side surfaces S2 and S4 of the first and second substrates is performed (S160). Also, the second inspection object 1500-2 is charged into the first stage 100 and waits at the surface inspection position (S150). The inspection of the side surfaces S2 and S4 on the long side of the first inspection object 1500-1 and the waiting in the first stage 100 of the second inspection object 1500-2 can be performed together.

8 and 9G, after the inspection of the back surface of the first inspection object 1500-1 is completed, the first inspection object 1500-1 is moved to the flipper 220 of the second stage 200 (S161). The width of the first rail 110 after the first inspection object 1500-1 moves to the flipper 220 may be adjusted to correspond to the width of the second inspection object 1500-2 to be transferred later.

Referring to FIGS. 8 and 9H, a second inspection object 1500-2 is inserted into the first stage 100 in the longitudinal direction so that the first surface faces upward (S152). The second inspection object 1500-2 moves to the surface inspection position through the first rail 110 (S154) and is fixed through the clamp 130 (S156). Thereafter, the second inspection object 1500-2 waits at the surface inspection position (S158). If there is a redundant inspection portion, the first inspection may be performed without waiting for the second inspection target 1500-2.

The first inspection object 1500-1 moved to the second stage 200 moves to the proper position of the flipper 220 in step S161 and is fixed to the flipper 220 through the clamp plate 226 , The flipper 220 is lowered and rotated by about 90 degrees so that the first inspection object 1500-1 is in the vertical state (S162). Also, the flipper 220 may be lowered after rotation. The flipper 220 rotates in the counterclockwise direction so that the first surface of the first inspection object 1500-1 faces the second stage 200. Of course, the flipper 220 may also rotate clockwise.

The second side surface S2 of the first inspection object 1500-1 is directed upward by the rotation of the flipper 220 by about 90 degrees and the first inspection object 1500- 1) is performed (S163). Thereafter, as the flipper 220 rotates by about 180 degrees, the first inspection object 1500-1 also rotates about 180 degrees and becomes a vertical state again (S164). The rotation of the flipper 220 by about 180 ° may be rotated by about 90 ° while the rotation of the flipper 220 is rotated by about 90 °. Of course, rotation of the flipper 220 by about 180 may be performed through other methods, as noted above with the rotation on the short side. In addition, movement of the first inspection object 1500-1 may be included in rotation of about 180 degrees.

The fourth side surface S4 of the first inspection object 1500-1 is directed upward by the rotation of the flipper 220 by about 180 degrees and the first inspection object 1500-1 is inspected through the inspection unit 300, The inspection of the fourth side (S4) of the wafer W is performed (S165). As shown in Fig. 9D, the fourth side S4 may be a side opposite to the second side S2.

After the inspection of the fourth side surface S4 of the first inspection object 1500-1, the first inspection object 1500-1 also rotates by about 90 degrees by rotating the flipper 220 by about 90 degrees (S166). Of course, the flipper 220 may rotate after the lift. Since the inspection of both the front surface and the back surface of the first inspection object 1500-1 has been performed, the surface of the first inspection object 1500-1 due to the rotation of the flipper 220 by about 90 degrees There may be no limitations.

Thereafter, the first inspection object 1500-1 starts to the exit of the second stage 200 through the second rail 210 (S167).

The first inspection object 1500-1 arriving at the exit of the second stage 200 is discharged from the second stage 200 (S170). That is, the appearance inspection of the first inspection object 1500-1 in the inspection apparatus 1000 of the present embodiment is completed. On the other hand, the frontal inspection of the second inspection object 1500-2 can be performed immediately during the discharging process of the first inspection object 1500-1.

The inspection method of the present embodiment uses the inspection apparatus 1000 of FIG. 1 in which the first stage 100 and the second stage 200 are physically separated and operate independently, And can be performed accurately. For example, when the flipper 220 of the second stage 200 inspects the second side surface S2 and the fourth side surface S4 of the first inspection object 1500-1, the second inspection object 1500- 2 is placed at the surface inspection position of the first stage 100 so that the inspection of the side faces S2 and S4 of the first inspection object 1500-1 is completed immediately after the inspection of the second inspection object 1500-2 You can perform a frontal inspection on your face. Therefore, the inspection time can be shortened by the discharge of the first inspection object 1500-1 and the movement time of the second inspection object 1500-2 to the input and surface inspection positions. On the other hand, if there are two inspection portions, the inspection time of the front surface of the second inspection object 1500-2 can be shortened.

10 is a perspective view for explaining the principle of inspecting the slopes of the side surfaces to be inspected in the inspection apparatus of FIG.

Referring to FIG. 10, the inspection apparatus 1000 of the present embodiment rotates the inspection object 1500 by about 90 ° or about 180 ° through the flipper 220 to make the inspection object 1500 vertical, The inspected object 1500 can be further rotated in the clockwise direction and the counterclockwise direction by the first angle?. In this manner, the slope of the side surface of the inspection object 1500 can be inspected through the inspection unit 300 by further rotating the inspection object 1500 in the vertical state by the first angle?.

8, in each of the first side inspection step (S133), the third side inspection step (S135), the second side inspection step (S163), and the fourth side inspection step (S165) S2, S3, and S4 by further rotating the first inspection object 1500-1 by the first angle? And imaging the inspection object 300 with the inspection unit 300 ) Each slope can be inspected. On the other hand, the angle of rotation in the clockwise direction and counterclockwise direction in the vertical state of the inspection object 1500 may be the same as the first angle?. However, depending on the case, the angle of rotation in the clockwise direction and the counterclockwise direction in the vertical state of the inspection object 1500 may be different from each other.

11 is a perspective view schematically showing an inspection apparatus 1000a according to an embodiment of the present invention. 12A to 12F are side views illustrating a method of inspecting an inspection object using the inspection apparatus 1000a according to an embodiment of the present invention. 11 shows an imaginary line in which the inspection object 1500-1 is located at various positions, for example, the entrance portion of the second stage 200 and the flipper 220. However, Can be positioned in various directions and orientations.

In the embodiments shown in Figs. 1 to 10, the object (s) to be inspected is put into the first stage, inspected, and then discharged through the second stage. In the embodiment of Figs. 11 and 12A to 12F, the object to be inspected is put through the second stage, inspected, and then discharged through the first stage.

Referring to FIGS. 11 and 12A, the first inspection object 1500-1 is transferred to the second stage 210. FIG. When the first inspection object 1500-1 is brought in, the upper surface may be defined as the first surface. Further, when the first inspection object 1500-1 is brought in, it may be carried in the direction of its long side or may be carried in the direction of its short side.

Referring to FIGS. 11 and 12B, the first inspection object 1500-1 is transferred to the flipper 220 and is flipped, and then the opposite sides are inspected. Details of inspection by the flipper 220 are described in detail with reference to FIGS. 9B, 9C, and so on, and a detailed description thereof will be omitted here.

11 and 12C, the first inspection object 1500-1 is horizontally positioned adjacent to the clamp 130 at the surface inspection position 132. As shown in FIG. If the width of the first stage 100 before the first inspection object 1500-1 is transferred to the first stage 100 is inappropriate for bringing the first inspection object 1500-1 into the first stage 100 ) May be further performed.

The first inspection object 1500-1 may be positioned at the surface inspection position 132 and then the first inspection object 1500-1 may be fixed to the clamp 130 to perform inspection on the surface facing upward. have. For this, the inspection unit 300 may move to the upper portion of the surface inspection position 132. [ The surface to be inspected at this time may be the first surface or the second surface.

Referring to FIGS. 11 and 12D, the first inspection object 1500-1 whose inspection of the upper surface has been completed can be transferred to the direction switching unit 120, elevated, and then horizontally rotated about 90 degrees. If the first inspection object 1500-1 is carried in the long-side direction by the second stage 200, the short-side direction can be obtained by the direction change. If the first inspection object 1500-1 is carried in the short-side direction by the second stage 200, it can have a long-side direction by the direction change.

11 and 12E, the first inspection object 1500-1 is conveyed to the flipper 220 again for flipping, and then the remaining two unexamined sides are inspected.

11 and 12F, the first inspection object 1500-1 is horizontally positioned adjacent to the clamp 130 at the surface inspection position 132. As shown in FIG. At this time, the surface of the first inspection object 1500-1 facing upward is the opposite surface of the surface facing upward in FIG. 12C. When the first inspection object 1500-1 is positioned at the surface inspection position 132, after the width of the second stage 200 is adjusted, the second inspection object 1500-2 is brought into the second stage 200 .

When the inspection of the first inspection object 1500-1 of the surface inspection position 132 is completed, the first inspection object 1500-1 may be discharged to the outside through the first stage 100-1.

13 is a perspective view of an inspection system having two inspection apparatuses according to an embodiment of the present invention.

Referring to FIG. 13, the inspection system 2000 of the present embodiment may include two inspection apparatuses 1000-1 and 1000-2 arranged adjacent to each other. Each of the first inspection apparatus 1000-1 and the second inspection apparatus 1000-2 may be substantially the same as the inspection apparatus of FIG. However, the first inspection apparatus 1000-1 and the second inspection apparatus 1000-2 may share one inspection unit 300. In other words, the inspection system 2000 of the present embodiment is configured to move between the first inspection apparatus 1000-1 and the second inspection apparatus 1000-2 by using one inspection unit 300, The external appearance inspection can be performed simultaneously. Generally, the inspection unit 300 is expensive, and the imaging by the inspection unit 300 is performed in a very short time, while the movement and rotation of the inspection object may take a relatively long time. Therefore, it is possible to inspect the appearance of two inspection objects sufficiently effectively while moving between the two inspection devices 1000-1 and 1000-2 using one inspection unit 300. [

For example, in the first stage 100-1 of the first inspection apparatus 1000-1, the first surface inspection for the first inspection object is performed through the inspection unit 300. [ Thereafter, the first inspection object moves to the second stage 200-1, flipping is performed by the first flipper 220-1, and during this process, the third stage of the second inspection apparatus 1000-2, The first surface inspection is performed on the second inspection object through the inspection unit 300 in the first inspection unit 100-2. In some embodiments, the third stage 100-2 may be an input stage.

The second inspection target moves to the fourth stage 200-2 and flipping is progressed by the second flipper 220-2. During this process, the inspection target 300 is moved to the side of the shorter side of the first inspection target side . Thereafter, the first inspection target moves to the first stage 100-1 and is horizontally changed in the direction switching unit and moves to the surface inspection position. During this process, inspection of the side surfaces on the short side of the second inspection object is performed through the inspection unit 300.

The second inspection object moves to the third stage 100-2 and is horizontally changed in the direction switching unit and moves to the surface inspection position. During this process, the second surface of the first inspection object is inspected through the inspection unit 300 do. Thereafter, the first inspection object moves to the second stage 200-1, flipping is performed by the first flipper 220-1, and during this process, the second inspection object 300 The surface is inspected.

The second inspection object moves to the fourth stage 200-2 and flipping is progressed by the second flipper 220-2. During this process, the inspection object 300 is moved to the side of the long side of the first inspection object side . Thereafter, the first inspection object is discharged through the second rail portion, and the inspection of the side surfaces on the long side of the second inspection object is performed through the inspection unit 300 during this process.

In summary, using one inspection unit 300, inspection of the first surface of the first inspection object, inspection of the first surface of the second inspection object, inspection of the cross-sectional side surfaces of the first inspection object, Side surface inspection, the second surface inspection of the second inspection object, the second surface inspection of the second inspection object, the long side surface side inspection of the first inspection object, and the long side surface side inspection of the second inspection object . Of course, in the inspection system 2000 of the present embodiment, the movement order of the inspection unit 300 is not limited to the above-described order. For example, in the inspection system 2000 of the present embodiment, the movement of the inspection unit 300 can be moved in the order that the two inspection apparatuses 1000-1 and 1000-2 can perform the inspection in the optimum and shortest time .

The present invention may be illustrated as being implemented in a suitable computing environment. In addition, various methods according to the present invention can be provided as a recording medium on which computer software embodying the present invention is recorded.

The recording medium typically includes a variety of computer readable media and may be provided in any available medium that can be accessed by a computer. The recording medium may also include volatile or non-volatile media, removable or non-removable media, and the like. For example, the recording medium may include all media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data. The recording medium may be a RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, DVD or other optical disk storage, magnetic cassette, magnetic tape, magnetic disk storage or other magnetic storage device, Or any other medium that can be accessed by a computer, which may be used to store the desired information, and the like.

The recording medium may widely include a communication medium if it is computer readable. The communication medium typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal, such as a carrier wave or other transport mechanism, and includes any information delivery media.

While the present invention has been described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. will be. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

A first moving rail and a second moving rail are provided on the first moving rail and the first moving rail, A conveyance belt 120 a direction switching unit 130 a clamp 200 a second stage 210 a second rail part 212 a second fixing rail 213 a second moving rail 220 a flipper 224 a slip ring 226 : Clamp plate, 228: Clamp cylinder, 229: Guide shaft, 1500, 1500-1, 1500-2: Inspection object

Claims

A first stage for transferring the charged first inspection object to the inspection position and inspecting the front surface of the first inspection object at the inspection position; And
Wherein the first stage is disposed adjacent to the first stage and receives the first inspection object from the first stage or transfers the first inspection object to the first stage and rotates the first inspection object, A second stage for allowing the sides to be inspected,
Wherein the first inspection object is a first inspection target, the first inspection target includes a first conveyance from the first stage to the second stage, a second conveyance from the second stage to the first stage, and a second conveyance from the first stage to the second stage, 3 transfer, and during or after the third transfer, a second inspection object is put into the first stage.

The method according to claim 1,
The first stage includes a first rail portion having a first fixed rail and a first movable rail,
The second stage includes a second rail portion having a second fixed rail and a second movable rail,
The width between the first fixed rail and the first movable rail is adjusted by the operation of the first movable rail,
The width between the second fixed rail and the second movable rail is adjusted by the operation of the second movable rail,
Wherein the first moving rail and the second moving rail operate independently of each other.

3. The method of claim 2,
Wherein the first stage includes a direction switching unit that rotates the first inspection object in parallel with the front surface or the back surface in a state in which the front surface or the rear surface faces upward,
The second stage may be configured such that the side surface of the first examination subject is directed upward in the posture in which the front surface or the back surface is directed upward or in a posture in which the side surface is directed upward and the opposite side surface of the side surface is directed upward And a flipper for rotating the first inspection object.

The method of claim 3,
Wherein the first inspection object comprises:
Moving from the inspection position to the flipper by the first rail at the first transfer, rotating at the flipper before the second transfer,
Wherein the control unit moves from the flipper to the direction switching unit by the first rail at the second transfer, rotates at the direction switching unit before the third transfer, Lt; / RTI >
Moving from the inspection position to the flipper by the first rail in the third transfer, rotating in the flipper after the third transfer,
Wherein the first inspection object is discharged from the second stage by the second rail after rotation by the flipper.

5. The method of claim 4,
Wherein the second inspection object is charged into the first stage before the first inspection object is discharged from the second stage.

The method of claim 3,
Wherein the flipper rotates the first inspection object while raising or lowering the first inspection object.

The method of claim 3,
Wherein the flipper rotates the first inspection object within a predetermined angle in a clockwise or counterclockwise direction with the side surface facing upward.

The method of claim 3,
Wherein the flipper includes a slip ring structure to allow infinite rotation.

The method of claim 3,
Wherein the flipper includes a clamp plate which is in close contact with the first inspection target and fixes the first inspection target, wherein the clamp plate has a structure divided into two.

The method according to claim 1,
And at least one inspection unit for receiving light reflected from the first inspection target and inspecting the first inspection target,
Wherein the inspection unit performs inspection of the front surface or the back surface of the first inspection object in the first stage and inspection of the side surfaces of the first inspection object in the second stage while moving the inspection unit.

10. The method of claim 9,
Wherein two inspection apparatuses are arranged adjacent to each other,
Wherein the inspection unit performs inspection while moving between the two inspection apparatuses.

A first stage for transferring the charged first inspection object to the inspection position and inspecting the first surface of the first inspection object at the inspection position; And
Wherein the first stage is disposed adjacent to the first stage and receives the first inspection object from the first stage or transfers the first inspection object to the first stage, And a second stage for causing the second surface of the first inspection object to be inspected,
Wherein the first inspection object reciprocates between the first stage and the second stage, and after the first inspection object is transported or transferred for a second time from the first stage to the second stage, Is put into the first stage.

13. The method of claim 12,
Wherein the first stage includes a first rail having a first fixed rail and a first moving rail and a direction switching unit rotating the first inspection object about the normal line of the first surface,
Wherein the second stage includes a second rail having a second fixed rail and a second movable rail and a second rail having a straight line intersecting perpendicularly to a direction in which the second fixed rail extends and parallel to the first surface, And a flipper for rotating the first inspection object.

14. The method of claim 13,
Wherein the first inspection object moves from the inspection position to the flipper by the first rail and is rotated by the flipper and moves from the flipper to the direction switching unit by the first rail, And moves back and forth between the first stage and the second stage in the order of moving to the inspection position by the first rail and moving to the flipper,
Wherein the first inspection object rotates in the flipper after the final transfer and is discharged from the second stage by the second rail.

A step of inserting a first object to be inspected so that its front surface faces upward in the first stage of the inspection apparatus having the first stage and the second stage;
Inspecting a front surface of the first inspection target using an inspection unit;
The first inspection object is moved to the second stage and the first side of the first inspection object and the third side opposite to the first side are directed upward by using a flipper, 1) rotating the object to be inspected and inspecting the first side and the third side using the inspection unit;
Wherein the flipper is used to rotate the first object to be inspected so that the rear surface opposite to the front surface faces upward and move the first object to be inspected to the direction switching unit of the first stage, 1 rotating the object to be inspected parallel to the rear surface;
Inspecting a back side of the first inspection target using the inspection unit; And
Moving the first inspection target to the second stage and moving the second side of the first inspection target side and the fourth side opposite to the second side face upward using the flipper, 1) rotating an object to be inspected, and inspecting the second side and the fourth side using the inspection unit,
Wherein during or after the step of inspecting the second side and the fourth side, a second inspection object is placed in the first stage and is queued.

16. The method of claim 15,
Inspecting the first side and the third side, and inspecting the second side and the fourth side,
Wherein the flipper rotates the first inspection object while raising or lowering the first inspection object.

17. The method of claim 16,
Wherein the flipper rotates the first object to be inspected within a predetermined angle in a clockwise or counterclockwise direction in an orientation in which one of the first to fourth sides faces upward.

16. The method of claim 15,
The first stage includes a first rail portion having a first fixed rail and a first movable rail,
The second stage includes a second rail portion having a second fixed rail and a second movable rail,
The first moving rail and the second moving rail operate independently of each other so that a first width between the first fixing rail and the first moving rail and a second width between the second fixing rail and the second moving rail Wherein the first and second detection signals are different from each other.

16. The method of claim 15,
Wherein when the inspection of the second side and the fourth side of the first inspection object is completed, the first inspection object is discharged from the second stage,
Wherein the front surface inspection of the second inspection object is performed immediately after the inspection of the second and fourth aspects is completed.

16. The method of claim 15,
Wherein two inspection apparatuses are arranged adjacent to each other,
Wherein the inspection unit performs inspection while moving between the two inspection apparatuses,
Wherein when the inspection operation is performed by the inspection unit in any one of the two inspection apparatuses, the inspection operation of the inspection object is performed in the other inspection apparatus.