KR20180065909A - Vitrified bond grinding stone - Google Patents

Abstract

An objective of the present invention is to provide a vitrification-bonded grinding stone properly consumed by grinding due to a lower sintering temperature and maintaining mechanical strength or water resistance. According to the present invention, the vitrification-bonded grinding stone comprises an abrasive grain and a binder. The binder comprises: a network forming oxide as a main component; and a network modifier oxide and an intermediate oxide as an additive. The network forming oxide includes SiO_2, Al_2O_3, and B_2O_3, the network modifier oxide includes Na_2O, CaO, K_2O, BaO, or Li_2O, and the intermediate oxide includes ZnO and Zr_2O_3.

Description

{VITRIFIED BOND GRINDING STONE}

The present invention relates to a non-trippled bonded grinding wheel mounted on a grinding wheel provided in a grinding apparatus for grinding a workpiece.

A device chip is formed by grinding the back surface of a wafer having a plurality of devices formed on its surface to thin the wafer to a predetermined thickness and thereafter dividing the wafer along a predetermined dividing line. BACKGROUND ART Device chips including devices such as ICs and LSIs are used in large quantities in electronic devices such as cellular phones and personal computers.

A grinding apparatus is used for grinding the back surface of the wafer. The grinding apparatus includes a disc-shaped grinding wheel, a spindle for rotatably supporting the grinding wheel, and a motor for rotating the spindle. The grinding wheel is equipped with a plurality of grinders for grinding a workpiece in contact with a workpiece such as a wafer.

A grindstone called a non-trephide bond stone is widely used as a grindstone mounted on the grinding wheel. The non-trippled bond stone is formed by mixing and sintering abrasive grains and a binder containing glass as a main component.

Generally, when a workpiece is ground by a grinding wheel equipped with a grinding wheel, the binder is appropriately consumed and a self-generated blade, in which unused grains contained in the grinding stone are sequentially exposed from the binder, occurs. Therefore, the grinding performance of the grinding wheel is maintained at a constant level. However, the above-mentioned non-tripred bonded grits having a glassy binder mainly composed of a mesh-forming oxide such as SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ are very hard and difficult to be consumed It is difficult to sufficiently induce the native sprouts and it is difficult to keep the grinding performance constant.

Further, for example, the general sintering temperature of the non-tripred bond-shaped grinding wheel having the binder mainly composed of the mesh-forming oxide is high at 1200 ° C. to 1300 ° C. When the non-tripred bond-grinding stone is sintered at a high temperature, The abrasive grains are easily deteriorated by carbonization or the like. Even if the grinding process is carried out using the non-trippled bonded grindstone with deteriorated grindstone, the grindstone can not exhibit expected performance.

Therefore, in order to make it easy to cause self-ignition of the grinding wheel and to prevent the deterioration of the abrasive grains, a technique of reducing the sintering temperature of the non-trippled bonded abrasive grains is also carried out by adding a modifying oxide to the material of the grinding stone . When the sintering temperature of the non-trippled bond stone is lowered, the binder is appropriately consumed, and self-ignition of the stone is likely to occur. On the other hand, examples of the mesh oxide include Na ₂ O, CaO, K ₂ O, BaO and Li ₂ O.

Here, the network-forming oxide is an oxide capable of forming a network structure (glass structure) by itself because of its strong covalent bonding. In addition, the network-modified oxide is an oxide that does not form a network structure itself but changes the physical properties or chemical properties of the network structure of the network-forming oxide.

Japanese Patent Application Laid-Open No. 2000-288881

The addition of such a network-modifying oxide to the binder constituting the non-trippled bond stone lowers the mechanical strength of the non-tripred bond stone and poses a problem. In addition, in grinding the workpiece by the grinding wheel, the grinding fluid is supplied to the grinding portion of the workpiece. When the grinding-type oxide is added to the binder, the water resistance of the non-trippled bond stone is lowered, It becomes easy to become a problem.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and it is an object of the present invention to provide a non-trippled bonded abrasive that is relatively low in sintering temperature and appropriately consumed by grinding, while maintaining mechanical strength and water resistance.

According to one aspect of the present invention, there is provided a non-trippled bonded abrasive with abrasive grains and a binder, wherein the binder comprises a network forming oxide as a main component, a network modifying oxide as an additive and an intermediate oxide, , SiO _2, Al ₂ O _3, and consists of a B ₂ O _3, the mesh equation oxide, Na ₂ O, CaO, K ₂ O, BaO, or are, ZnO include Li ₂ O, and the intermediate oxide , And Zr ₂ O ₃ .

According to another aspect of the present invention, there is provided a non-tribophide bonded grinding wheel having abrasive grains and a binder, wherein the binder contains a network forming oxide as a main component, a network modifying oxide as an additive and an intermediate oxide, Wherein the forming oxide comprises SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ , wherein the mesh oxide comprises Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O, Wherein the non-tribophide bonded grinding wheel is made of ZnO.

According to another aspect of the present invention, there is provided a non-tribophide bonded grinding wheel having abrasive grains and a binder, wherein the binder contains a network forming oxide as a main component, a network modifying oxide as an additive and an intermediate oxide, Wherein the forming oxide comprises SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ , wherein the mesh oxide comprises Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O, Is made of Zr ₂ O ₃ .

In the non-tripred bonded grinding wheel according to an embodiment of the present invention, a mesh-forming oxide as a main component and a mesh-form oxide as an additive are included. Wherein the mesh-forming oxide comprises SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ , and the mesh oxide includes Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O. The sintering temperature of the non-tripred bond stone can be lowered by the function of the mesh-form oxide, and the binder can be appropriately consumed.

In addition, the non-tripred bond stone according to an embodiment of the present invention includes an intermediate oxide composed of ZnO and Zr ₂ O ₃ , an intermediate oxide composed of ZnO, or an intermediate oxide composed of Zr ₂ O ₃ . The intermediate oxide can not form a network structure alone, but it is an oxide capable of forming a network structure or modifying a network structure by a multi-component system. When the intermediate oxide is added to the binder of the non-trippled bond stone, the mechanical strength and water resistance of the non-trippled bond in which the sintering temperature is lowered by the addition of the network oxide can be kept high.

Therefore, according to the present invention, it is possible to provide a non-trippled bonded abrasive which is appropriately consumed by grinding due to a low sintering temperature, while maintaining mechanical strength and water resistance.

1 is a perspective view schematically showing a structure of a grinding wheel.

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described with reference to the accompanying drawings. 1 is a perspective view schematically showing a structure of a grinding wheel equipped with a non-trippled bonded grinding wheel according to the present embodiment.

As shown in Fig. 1, the grinding wheel 2 equipped with the non-trippled bond grindstone according to the present embodiment has a disk-shaped (annular) base 4 made of stainless steel, aluminum or the like. The base 4 has a first surface 4a and a second surface 4b which are parallel to each other and at the center thereof the base 4 is formed so as to penetrate from the first surface 4a to the second surface 4b An opening 4c having a circular shape is formed. On the second surface 4b of the base 4, a plurality of non-trippled bonded grinding wheels 6 according to the present embodiment are annularly arranged.

The workpiece can be ground by rotating the grinding wheel 2 to urge the non-trippled bond stone 6 against the surface to be grounded of the workpiece. Typically, the workpiece is a semiconductor wafer, a resin substrate, a ceramics substrate, or the like, but another substrate may be a workpiece.

Each non-trippled bond stone 6 has abrasive grains and a binder. The abrasive grains are formed of, for example, diamond, CBN (Cubic Boron Nitride) or the like. On the other hand, the abrasive grains can be appropriately selected in accordance with the specification of the non-trippled bond grindstone 6 or the like.

The binder of the non-tripred bonded grinding wheel (6) includes a mesh-forming oxide as a main component and a mesh-form oxide as an additive. Wherein the mesh-forming oxide comprises SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ , and the mesh oxide includes Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O.

The sintering temperature of the non-trippled bond grindstone composed of a general binder mainly composed of the aforementioned mesh-forming oxide of vitreous silica composed of SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ is as high as about 1200 ° C. to 1300 ° C. Therefore, during sintering, the abrasive grains are deteriorated by carbonization or the like. In addition, the non-tripred bond stone composed of a binder mainly composed of vitreous is very hard and hard to consume, so that it is difficult to sufficiently induce native sprouts and it is difficult to keep grinding performance constant.

The sintering temperature of the non-trippled bond steels can be lowered to 700 ° C to 1000 ° C by adding the above-mentioned mesh oxide made of Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O to the binding material. When the sintering temperature is lowered, the non-tripped bond stone is appropriately consumed by the grinding process to sufficiently generate the self-lubricating abrasive to maintain a constant grinding performance.

However, the non-tripred bonded-type grindstone composed of a binder to which such a network-modified oxide is added has a low mechanical strength and a low water resistance. During grinding of the workpiece, a large force is exerted on the non-trippled bond stone mounted on the grinding wheel. At the time of grinding, a grinding liquid containing water is provided at a portion to be processed of the work. Therefore, when grinding is performed with a non-trippled bond stone having low mechanical strength and water resistance, damage to the non-trippled bond stone tends to occur, which is problematic.

On the other hand, in the non-trippled bonded grinding wheel 6 according to the present embodiment, the bonding material includes an intermediate oxide of ZnO and Zr ₂ O ₃ , an intermediate oxide of ZnO, or an intermediate oxide of Zr ₂ O ₃ . When such an intermediate oxide is included in the binder, the mechanical strength of the non-tripred bond-stone composed of the binder to which the mesh-form oxide is added is increased, and the water resistance is also increased.

Therefore, the non-trippled bonded grinding wheel according to the present embodiment has a low sintering temperature and is appropriately consumed at the time of grinding, while retaining the mechanical strength and water resistance, so that it is suitable for grinding.

[Example]

In this embodiment, a non-tripred bonded stone comprising ZnO and an intermediate oxide composed of Zr ₂ O ₃ , an intermediate oxide composed of ZnO, or an intermediate oxide composed of Zr ₂ O ₃ is formed by modifying the intermediate oxide and its compounding amount Respectively. Two types of intermediate oxides were prepared by changing the blending amount to prepare six kinds of non-trippled bond grits in total. Then, the water resistance and the transverse strength of each of the produced non-trippled bond steels were tested.

The names of the non-trippled bond grits including the intermediate oxide composed of ZnO and Zr ₂ O ₃ are referred to as "Example 1-1" and "Example 1-2", respectively. The names of the non-tripred bond grits including the intermediate oxide made of ZnO are referred to as "Examples 2-1" and "2-2", respectively. The names of non-trippled bonded grits including an intermediate oxide composed of Zr ₂ O ₃ are referred to as "Examples 3-1" and "3-2", respectively. In addition, as a comparative example, a non-tripred bonded stone containing no intermediate oxide was produced. The sample name is referred to as "comparative example ".

As the material of the non-trippled bond stone, a mesh-forming oxide, a mesh-form oxide and an intermediate oxide were prepared. Each material was mixed by a predetermined method and sintered at a relatively low temperature ranging from 700 ° C to 1000 ° C to prepare a non-trippled bond stone. The mixing ratio of each material contained in the binder of each non-tripide bond is shown in Table 1 below.

Next, experiments were conducted to evaluate the water resistance and the transverse strength of each of the non-trippled bond grits manufactured.

For the test of the transverse strength, a hardness measuring apparatus "AGI-1 kN" manufactured by Shimadzu Seisakusho was used. The press speed was set at 1 mm / min, the load capacity was set at 0 N to 1 kN, the produced non-trippled bond grindstone was pressed, and the pressure value at the time of fracture was recorded as the transverse strength. Then, relative values of the transverse rupture strengths of the respective triphosphide bonded grinding wheels according to the examples were calculated, assuming that the transverse rupture strength of the non-tripred bonded grinding wheel according to the comparative example was 100. Table 2 shows relative values of the transverse strength of each non-tripred bond stone.

In the water resistance evaluation experiment, each of the non-trippled bond grits was immersed in a hot water for a predetermined time, and the weight was measured before and after the immersion. On the other hand, the reason why the hot water is used in this test is to make the test environment closer to the environment at the time of grinding in consideration of the fact that the non-trippled bond stone becomes hot due to the heat generated by the grinding process.

First, for each non-trippled bond stone, the weight was measured before immersion in hot water. Next, after immersing in hot water for a predetermined time, the non-trippled bond stone was dried and then the weight was measured again. Then, a numerical value obtained by dividing the weight of each non-tripred bonded stone before immersion by the weight after immersion of the grinding stone was calculated as the solubility height. Then, the relative solubility of each of the non-tripred bonded gypsum according to the examples was calculated by taking the solubility value of the non-tripred bonded stone according to the comparative example as 100. [

The smaller the relative value of the solubility is, the lower the solubility in the grinding water and the higher the water resistance. That is, the numerical value becomes lower as the weight change of the non-trippled bond stone is small and the water resistance is high. Table 2 shows the relative solubility values of the respective tritiated bond grits according to the examples.

As shown in Table 2, each of the non-tribbed bonded grits including the intermediate oxide according to the examples had a water resistance and a transverse stiffness in comparison with the non-tritide bonded grits that did not include the intermediate oxide according to the comparative example It is understood that the greatly improved. It is understood that the non-trippled bonded grindstone (Example 1-1, Example 1-2) according to the embodiment including the intermediate oxide composed of ZnO and Zr ₂ O ₃ has particularly high water resistance and transverse rupture strength.

As described above, even when the non-tripred bonded grits comprising an intermediate oxide of ZnO and Zr ₂ O ₃ , an intermediate oxide of ZnO, or an intermediate oxide of Zr ₂ O ₃ are produced by sintering at a relatively low temperature, And the water resistance can be maintained at a high level.

If the grinding process is performed using a non-trippled bond stone produced at a relatively low sintering temperature, the grinding process is appropriately consumed and self-priming is liable to occur. Therefore, according to one aspect of the present invention, it has been confirmed that a sintering temperature is low and the sintered body is suitably consumed by grinding, while providing a non-trippled bonded stone maintaining mechanical strength and water resistance.

On the other hand, the present invention is not limited to the description of the above embodiments, but can be modified in various ways. The structures, methods, and the like according to the above embodiments can be suitably modified and carried out without departing from the scope of the present invention.

2: grinding wheel 4: base
4a, 4b: surface 4c: opening
6: Non-treated bond stone

Claims (3)

A non-tribophide bonded grinding wheel having abrasive grains and a binder,
Wherein the binder comprises a mesh-forming oxide as a main component, a mesh oxide as an additive, and an intermediate oxide,
Wherein the mesh-forming oxide is composed of SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ ,
Wherein the mesh oxide includes Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O,
Wherein the intermediate oxide is composed of ZnO and Zr ₂ O ₃ . A non-tribophide bonded grinding wheel having abrasive grains and a binder,
Wherein the binder comprises a mesh-forming oxide as a main component, a mesh-form oxide as an additive, and an intermediate oxide,
Wherein the mesh-forming oxide is composed of SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ ,
Wherein the mesh oxide includes Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O,
Wherein the intermediate oxide is made of ZnO. A non-tribophide bonded grinding wheel having abrasive grains and a binder,
Wherein the binder comprises a mesh-forming oxide as a main component, a mesh-form oxide as an additive, and an intermediate oxide,
Wherein the mesh-forming oxide is composed of SiO ₂ , Al ₂ O ₃ , and B ₂ O ₃ ,
Wherein the mesh oxide includes Na ₂ O, CaO, K ₂ O, BaO, or Li ₂ O,
Wherein the intermediate oxide is composed of Zr ₂ O ₃ .

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