KR20180012616A - Multi focus image acquisition apparatus and sample surface inspection system - Google Patents

Multi focus image acquisition apparatus and sample surface inspection system Download PDF

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Publication number
KR20180012616A
KR20180012616A KR1020160095673A KR20160095673A KR20180012616A KR 20180012616 A KR20180012616 A KR 20180012616A KR 1020160095673 A KR1020160095673 A KR 1020160095673A KR 20160095673 A KR20160095673 A KR 20160095673A KR 20180012616 A KR20180012616 A KR 20180012616A
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South Korea
Prior art keywords
sample
illuminations
illumination
respect
camera
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KR1020160095673A
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Korean (ko)
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KR101854401B1 (en
Inventor
김민영
김병학
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경북대학교 산학협력단
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Priority to KR1020160095673A priority Critical patent/KR101854401B1/en
Priority to PCT/KR2017/007674 priority patent/WO2018021748A1/en
Publication of KR20180012616A publication Critical patent/KR20180012616A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6447—Fluorescence; Phosphorescence by visual observation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/10—Bifocal lenses; Multifocal lenses

Abstract

A multifocal image acquisition device and a sample surface inspection system for sample surface inspection are provided. A multi-focus image acquiring apparatus according to an embodiment of the present disclosure includes a first illumination unit including a plurality of first surface illuminations arranged in different directions with respect to a sample placement position, A second illuminating unit including a plurality of second surface illuminators arranged in a row, a camera capable of taking a sample in the upper direction of the sample disposing position, a first illuminating unit and a second illuminating unit sequentially flashing to change the illumination incidence angle for the sample, And a processor for controlling the camera to take a sample and acquire a plurality of images having different focal lengths.

Description

TECHNICAL FIELD [0001] The present invention relates to a multi-focus image acquiring apparatus and a sample surface inspection system,

The present disclosure relates to a multifocal image acquiring apparatus and a sample surface inspection system, and more particularly, to a multifocal image acquiring apparatus and a sample surface inspection system capable of inspecting a defect of a contour or a transparent material of a deformed- .

[0002] Recently, mobile devices having a cover glass in a curved shape are increasing. Examples include edge-type smartphones with side curvature, SmartWatch, and VR (Virtual Reality) devices.

The surface inspection of the conventional planar cover glass was performed by a single illumination side photographing or a line photographing scan photographing method. However, the inspection of the curved cover glass surface has various reflection angles of light reflected on the surface, and in the case of a transparent material, there is a problem that it is difficult to obtain a focus image for the surface.

Further, due to the curved surface and the miniaturization of the cover glass, there is a need to continuously change the focal length and take a photograph.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and it is an object of the present invention to provide a multifocal image acquiring apparatus and a sample surface inspection system capable of solving both a problem of illumination and a problem of focus which occur when a mirror- do.

According to an aspect of the present invention, there is provided a multifocal image acquiring apparatus for inspecting a sample surface, comprising: a first illumination unit including a plurality of first surface illuminants arranged in different directions with respect to a sample placement position, A second illuminating unit including a plurality of second side illuminations respectively disposed on the upper side of the plurality of first side illuminations, a camera capable of taking a sample in the upper direction of the sample placing position, and a second illuminating unit including the first illuminating unit and the second illuminating unit And a processor for controlling the camera to photograph the sample to acquire a plurality of images having different focal lengths.

The processor may selectively flash the plurality of first surface illuminations and the plurality of second surface illuminations in accordance with a predetermined pattern, respectively.

The plurality of first surface illuminations may be eight surface illuminations continuously arranged in an octagonal shape with reference to the sample arrangement position, and the plurality of second surface illuminations may be arranged on the upper side of each of the plurality of first surface illuminations And may be eight arranged side lights.

The plurality of first surface illuminations is a plurality of surface illuminations spaced apart from each other with respect to the sample placement position, and the plurality of second surface illuminations are arranged on the upper side of each of the plurality of first surface illuminations Wherein the multifocal image acquiring device further comprises a rotation unit for collectively rotating the plurality of first surface illuminations and the plurality of second surface illuminations so as to illuminate different directions with respect to the sample placement position, The processor may control the rotation unit to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit.

According to another aspect of the present disclosure, there is provided a multifocal image acquiring apparatus for sample surface inspection, comprising: a surface illumination disposed on one side of a sample placement position; a variable focus lens; And a processor that controls the camera to acquire a plurality of images having different focal lengths by photographing a sample placed at the sample placement position while changing a shape of the variable focus lens and a camera disposed at an opposite side of the illumination .

According to another aspect of the present invention, there is provided a sample surface inspection system comprising: a first inspection device for photographing a sample on the upper side of a sample to acquire a multifocal image; And a transfer device for transferring the sample to one of the first inspection device and the second inspection device, wherein the first inspection device is configured to transfer the sample to one of the first inspection device and the second inspection device, And the sample can be photographed using a plurality of plane lights arranged.

The first inspection apparatus includes a first illumination unit including a plurality of first surface illuminations arranged in different directions with respect to a sample placement position, a plurality of first illumination units arranged on the upper side of the plurality of first surface illuminations, A second illumination unit including two-sided illumination, a first camera capable of capturing the sample in an upper direction of the sample arrangement position, and a first illumination unit and a second illumination unit sequentially flashing to change the illumination incidence angle of the sample And a first processor for controlling the first camera to photograph the sample and acquire a plurality of images having different focal distances.

The plurality of first surface illuminations may be eight surface illuminations continuously arranged in an octagonal shape with reference to the sample arrangement position, and the plurality of second surface illuminations may be arranged on the upper side of each of the plurality of first surface illuminations And may be eight arranged side lights.

The plurality of first surface illuminations is a plurality of surface illuminations spaced apart from each other with respect to the sample placement position, and the plurality of second surface illuminations are arranged on the upper side of each of the plurality of first surface illuminations Wherein the first inspection apparatus further comprises a rotation unit for rotating the first surface illumination and the plurality of second surface illumination collectively so as to illuminate different directions with respect to the sample placement position, The first processor may control the rotating unit to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit.

The second inspection apparatus may further include a second camera disposed on one side of the sample placement position and having a variable focus lens, the second camera being disposed on the side opposite to the side illumination with respect to the sample placement position, And a second processor for controlling the second camera to acquire a plurality of images having different focal distances by taking a sample placed at the sample placement position while changing the shape of the focus lens.

According to the various embodiments of the present disclosure as described above, uniform illumination can be irradiated even in the case of a sample such as a cover glass having a curved surface, and an effect of detecting a minute defect with a minimum of photographing occurs.

Figures 1 and 2 illustrate a multifocal image acquisition device for sample curvature inspection according to one embodiment of the present disclosure;
3A and 3B illustrate a sample image acquired by the multifocal image acquiring apparatus when the low angle illumination is examined,
FIGS. 4A and 4B show a sample image acquired by the multifocal image acquiring apparatus when illuminating the high angle illumination,
Figure 5 illustrates a multifocal image acquisition device for sample top surface inspection according to one embodiment of the present disclosure;
FIG. 6A is a view showing a far-focus image obtained in the apparatus for acquiring a multifocal image according to an embodiment of the present disclosure;
FIG. 6B is a diagram illustrating a middle-distance focused image obtained by the apparatus for acquiring a multifocal image according to an embodiment of the present disclosure;
6C is a diagram illustrating a near focus image acquired by the apparatus for acquiring a multifocal image according to an embodiment of the present disclosure;
FIG. 7 illustrates a multi-focus image acquisition apparatus using a lens array according to an embodiment of the present disclosure,
8A and 8B are views for explaining a TAG lens usable in a multifocal image acquiring apparatus according to an embodiment of the present disclosure.

Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description of the present invention, detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present disclosure rather unclear. And the terms used below are terms defined in consideration of the functions in this disclosure, which may vary depending on the user, operator or custom. Therefore, the definition should be based on the contents throughout this specification.

Terms including ordinals such as first, second, etc. may be used to describe various elements, but the elements are not limited by terms. Terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component. The term " and / or " includes any combination of a plurality of related items or any of a plurality of related items.

The terminology used herein is for the purpose of describing the embodiments only and is not intended to limit and / or to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this specification, terms such as "comprising", "having", or the like are intended to specify that there are stated features, numbers, operations, acts, elements, parts or combinations thereof, , But do not preclude the presence or addition of one or more other features, elements, components, components, or combinations thereof.

The multifocal image acquisition apparatus according to various embodiments of the present disclosure is typically applied to an image inspection apparatus for inspecting parts of a mobile device of a bendable cover, an image inspection apparatus for inspecting the surface of an optical lens, and a vision inspection apparatus for automatic prescription drug packaging .

FIG. 1 is a diagram illustrating a multi-focus image acquisition apparatus 100 according to an embodiment of the present disclosure. Referring to FIG. 1, the apparatus 100 for acquiring a multifocal image may include a first illumination unit 110-1, a second illumination unit 110-2, and a camera 120. FIG. The processor 130 is not an externally visible configuration and is not shown in the embodiment of FIG.

The multifocal image acquiring apparatus 100 according to the embodiment of FIG. 1 is an apparatus for photographing and examining a surface defect of a curved surface located on a side of a sample (for example, a cover of a smartwatch) having a deformed curved surface .

In order to examine the curved surface, various reflection images should be obtained. For this purpose, illumination with various angles is required in many directions while illuminating a uniform amount of light. In addition, since there is a change in height due to excitation, a camera capable of capturing a multifocal image is needed.

The first illumination unit 110-1 may include a plurality of first side illuminations arranged in different directions with respect to the sample placement position. For example, as shown in FIG. 1, the plurality of first side illuminations can be eight side illuminations that are successively arranged in an octagonal shape with respect to the sample placement position.

Planar illumination is illumination that emits uniformly over a large area. In the case of conventional line illumination, point illumination is used, so there is a problem that a part of the sample is irradiated with a lot of light and the other part is irradiated with less light, so that it is difficult to detect defects due to reflected light. If the light is uniformly illuminated, the possibility that the reflection image of the illumination is detected as a noise component in the image processing for defect detection is reduced. For example, the surface illumination can be manufactured by a method using a material in which scattering occurs, a method using an OLED element, or the like.

The second illuminating unit 110-2 may include a plurality of second side illuminations respectively disposed on the upper side of the plurality of first side illuminations. For example, as shown in Fig. 1, the plurality of second side illuminations may be eight side illuminations disposed above each of the plurality of first side illuminations.

The first illuminating unit 110-1 and the second illuminating unit 110-2 may consist of a plurality of plane illuminations successively arranged in a polygonal shape to irradiate the sample with uniform illumination. In FIG. 1, a plurality of plane lights arranged in an octagonal shape are shown, but the arrangement of the lights is not limited to an octagonal shape.

That is, the apparatus 100 for acquiring a multifocal image according to an embodiment of the present disclosure is configured such that a plurality of surface illuminations uniformly illuminate light at various angles. The first illuminating unit 110-1 and the second illuminating unit 110-2 are arranged vertically so as to be able to irradiate light suitable for inspecting the curved surface in the height direction.

The processor 130 may selectively flash a plurality of first side illuminations and a plurality of second side illuminations, respectively, according to a predetermined pattern. The processor 130 may simultaneously turn on the plurality of first side illuminations constituting the first illuminating section 110-1, but may turn on only the side illuminations at a specific position according to the region of interest (ROI). For example, the processor 130 may selectively flash a plurality of surface lights according to a predetermined pattern that prevents two facing surface lights from turning on at the same time. In the case where there are eight plane lights of the octagonal shape as shown in FIG. 1, the processor 130 turns on the first, third, fourth, and sixth plane lights and turns off the second, fifth, The surface illumination can be selectively blinked.

When the first illumination unit 110-1 disposed at the lower end is used, the sample can be irradiated with light at a low angle. The low angle illumination is for illuminating the light on the lower side of the side surface. Further, by using low angle illumination, the reflectance of a surface having a transparent material can be increased.

If the second illumination unit 110-2 disposed at the upper end is used, the sample can be irradiated with light at a high angle. The high angle illumination is for irradiating light to the apex of the curved surface near the top surface.

Referring to FIG. 1, the first illumination unit 110-1 may irradiate light to a region of interest (ROI) _YEL region of a sample. The second illumination unit 110-2 can irradiate the ROI_GRN region of the sample with light.

The processor 130 may sequentially turn on and off the first illumination unit 110-1 and the second illumination unit 110-2 to change the illumination incidence angle in the height direction with respect to the sample. For example, the processor 130 may first turn on the first illumination unit 110-1 to illuminate the sample with a low angle. The processor 130 may then turn on the first illumination unit 110-1 and turn on the second illumination unit 110-2 to illuminate the sample at a high angle. That is, the processor 130 may sequentially irradiate light from the bent lower surface to the upper surface of the sample side to proceed defect inspection on the deformed curved surface.

The camera 120 can take a sample in the upper direction of the sample placement position. The reason why the camera 120 captures a sample at the top of the sample placement position is that the sample is photographed using the light reflected from the sample side.

For example, the camera 120 may include a variable-focus lens 121 to change a focal distance and photograph a sample. The variable focus lens 121 is a shape-changing lens in which an optical fluid and a polymer membrane are combined. For example, when an electric signal is applied to the polymer separation membrane, the shape of the separation membrane changes and the shape of the variable-focus lens 121 changes. The shape change of the variable focus lens 121 may be a change in diameter or a change in thickness. Depending on the change in diameter or thickness, the variable focus lens 121 can change the focus in the depth direction of the sample curved surface.

For example, if the diameter of the variable focus lens 121 is changed in units of several micrometers, optical effects such as moving the entire variable focus lens 121 in units of a few centimeters can be obtained. Therefore, the photographing time can be shortened by 10 times or more (in units of 100 ms -> 10 ms) as compared with the case where the camera 120 is moved by the conventional motor driving method.

The processor 130 can control the camera 120 to acquire a plurality of images having different focal lengths by taking a sample placed at the sample placement position while changing the shape of the variable focus lens.

As another example, the camera 120 may include a lens array to simultaneously photograph a plurality of images having different focal distances. The lens array may include a plurality of lenses having different focal lengths arranged in two dimensions. By using the lens array, it is possible to acquire as many images as the number of lenses constituting the lens array in one shot. Therefore, since the number of times of photographing can be reduced, the time required for the sample inspection can be shortened.

As another example, the camera 120 may include a TAG (Tunable Acoustic Gradient) lens to adjust the width of the focused area. The camera 120 may apply a sound wave to the TAG lens to cause a change in the density of the lens. Thereby changing the index of refraction of the TAG lens. Depending on the power of the sound waves to be applied, the area where the TAG lens is focused becomes wider.

FIG. 2 is a diagram illustrating a multi-focus image acquisition apparatus 100 'according to an embodiment of the present disclosure. In the embodiment of FIG. 1, the multifocal image acquiring apparatus 100 includes the illumination unit configuration in which the surface illumination is continuously arranged, whereas in the embodiment of FIG. 2, the multifocal image acquiring apparatus 100 ' And may include a plurality of plane illuminations spaced apart in different directions by reference.

The multifocal image acquiring apparatus 100 'further includes a rotation unit 140 for rotating the plurality of first surface illuminations and the plurality of second surface illuminations collectively so as to illuminate different directions with respect to the sample placement position .

The processor 130 may control the rotation unit 140 to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit. For example, the plurality of first side illuminations and the plurality of second side illuminations may each consist of two side illuminations, and the processor 130 rotates the side illuminations in units of 45 degrees so that all of the side portions of the sample are sequentially The rotation unit 140 can be controlled to be irradiated.

3A and 3B show actual samples taken with the multifocal image acquiring apparatus 100 when the light is irradiated using the first illumination unit 110-1 (i.e., when the low angle illumination is irradiated) Of the cover glass). In Fig. 3A, a scratch of about 20 μm × 300 μm was detected. In FIG. 3B, a fingerprint stain having a side of about 20 μm was detected.

4A and 4B show actual samples taken with the multifocal image acquiring apparatus 100 when the light is irradiated using the second illumination unit 110-2 (that is, when the high angle illumination is irradiated) Of the cover glass). In FIG. 4A, a scratch of about 10 μm × 300 μm was detected. In FIG. 4B, a foreign matter of about 20 μm × 800 μm was detected.

FIG. 5 is a diagram illustrating a multi-focus image acquisition device 200 according to an embodiment of the present disclosure. Referring to FIG. 5, the apparatus 200 for obtaining a multifocal image may include a surface illumination 210 and a camera 220. The processor 130 is not an externally visible configuration and is not shown in the embodiment of FIG.

The multifocal image acquiring apparatus 200 according to the embodiment of FIG. 5 is an apparatus for photographing and inspecting defects on the upper surface of a sample (for example, a cover glass of Smartwatch). To inspect the top surface, both the planar illumination 210 and the camera 220 are placed on the side of the sample placement location.

The planar illumination 210 may be disposed on one side of the sample placement position. In the embodiment of FIG. 5, a single plane illumination 210 is shown illuminating the sample with light, assuming that the top surface of the sample is planar. However, by arranging additional surface illumination (not shown) at the top of the surface illumination 210, uniform light can be irradiated onto the sample even when the upper surface of the sample is curved.

The camera 220 has a variable focus lens 221 and may be disposed on the opposite side of the surface illumination 210 with respect to the sample placement position. Since the camera 220 photographs the surface of the sample using the light reflected by the plane illumination 210, the placement position should be determined in consideration of the incident angle and the reflection angle of the light.

Due to the miniaturization of the sample, the entire area of the sample upper surface can not be precisely inspected with a single focal length. The conventional multi-focus image capturing apparatus 200 according to an embodiment of the present invention uses a single camera to perform an inspection using a plurality of cameras, There is an advantage that the area can be inspected.

When the light irradiated with a uniform amount of light in the plane illumination 210 is reflected on the sample surface, the processor 230 rapidly changes the focus from the distance F to the near point N using the variable focus lens 221, Lt; RTI ID = 0.0 > 220 < / RTI >

6A to 6C are images of actual samples taken using the apparatus for acquiring multi-focus images 200 according to an embodiment of the present disclosure. The sample shown in the images of Figs. 6A to 6C is a cover glass for a smart watch.

6A is a long-distance focus image obtained by photographing a portion F far from the camera 220. FIG. 6B is a middle-distance focused image obtained by photographing a portion M at a medium distance from the camera 220. FIG. 6C is a close-up focused image obtained by photographing a portion N near the camera 220. FIG.

The multifocal image acquiring apparatus 200 can acquire all the images from the near focus image to the far focus image using the variable focus lens without moving the camera 220. [ 6A to 6C, the apparatus 200 for obtaining a multifocal image includes a hair of 100 μm unit, a stain of 20 μm unit on one side, a stain of 10 μm unit Can be detected.

FIG. 7 is a diagram illustrating a multi-focus image acquisition device 200 'according to one embodiment of the present disclosure. The difference from the apparatus 200 for obtaining a multifocal image according to the embodiment of FIG. 5 is that a lens array 221 'is used instead of the variable focus lens 221.

The camera 220 'includes a lens array to simultaneously photograph a plurality of images having different focal lengths. The lens array may include a plurality of lenses having different focal lengths arranged in two dimensions. In the embodiment of FIG. 7, the number of lenses constituting the lens array is nine (3 by 3), but the number of lenses is not limited thereto. However, in order to improve the resolution, it is desirable to minimize the number of lenses. The number of the multifocus images to be obtained varies depending on the size of the sample and the like, so that the number of lenses constituting the lens array can be changed according to the sample.

By using the lens array, it is possible to acquire as many images as the number of lenses constituting the lens array at the same time. For example, in the embodiment of FIG. 7, a plurality of multifocus images to be photographed over 9 times can be acquired only by taking one shot.

According to another embodiment of the present disclosure, a multifocal image acquisition device can use a TAG lens instead of a variable focus lens or a lens array. 8A and 8B are views for explaining a TAG lens.

As shown in FIG. 8A, the TAG lens is a lens whose refractive index changes when a sound wave is applied. As the refractive index of the TAG lens is changed, the distance of the area to be focused can be changed.

In the example of FIG. 8B, when a sound wave is not applied, a region having a thickness of 9 占 퐉 based on the focal distance center point corresponds to a focused region of the TAG lens. As the power of the sound wave applied to the TAG lens is increased, the more focused areas such as 12 μm, 20 μm and 45 μm are widened based on the focal distance center point. Therefore, by applying a sound wave to the TAG lens, the multifocal image capturing apparatus can adjust the size of the region having the same resolution and capable of inspecting the sample surface. The multifocal image acquiring device may apply a sound wave having power corresponding to the size of the sample to perform an inspection of the entire area of the sample surface in one shot.

According to one embodiment of the present disclosure, a first inspection apparatus for inspection of the curved surface of the sample side and a second inspection apparatus for inspection of the sample upper surface can be combined and implemented in the sample surface inspection system 1000.

The sample surface inspection system 1000 includes a first inspection apparatus for photographing a sample on the upper side of a sample to obtain a multifocal image, a second inspection apparatus for obtaining a multifocal image by taking a sample in the lateral direction of the sample, And a transfer device for transferring the sample to one of the inspection device and the second inspection device. Then, the first inspection apparatus can photograph the sample using a plurality of plane lights arranged in different directions with respect to the sample placement position.

For example, the sample surface inspection system 1000 may be a system in which the multifocal image acquisition apparatus 100 shown in FIG. 1 and the multifocus image acquisition apparatus 200 shown in FIG. 3 are combined. In addition, the sample surface inspection system 1000 may include a transport device, such as a conveyor belt, for transporting the sample. It is not limited to which of the first inspection apparatus and the second inspection apparatus the sample should be transferred first.

Since the first inspection apparatus and the second inspection apparatus use a camera including a configuration such as a variable focus lens and a lens array, inspection time can be shortened. Shortening the inspection time can shorten the stopping time of the conveying device, and therefore, has an effect of improving inspection yield.

According to one embodiment of the present disclosure, a first inspection apparatus includes a first illumination unit including a plurality of first surface illuminations arranged in different directions with respect to a sample placement position, a plurality of second illumination units arranged on the upper side of the plurality of first surface illuminations, And a second illumination unit including a plurality of second side illumination units. Thus, the first inspection apparatus can change the angle of incidence in the height direction of the curved surface and irradiate light of a uniform amount of light.

And, the first inspection apparatus may include a first camera capable of taking a sample in the upper direction of the sample placement position. In addition, the first inspection apparatus may include a first illuminating unit and a second illuminating unit sequentially blinking to change the incident angle of illumination of the sample, and the first camera is controlled to sample a sample to acquire a plurality of images having different focal distances And a first processor.

For example, the plurality of first side illuminations are eight side illuminations continuously arranged in an octagonal shape with respect to the sample arrangement position, and the plurality of second side illuminations are arranged on the upper side of each of the plurality of first side illuminations And may be eight arranged side lights. The number (or arrangement type) of surface illuminations is not limited to this and can be selected variously.

As another example, the plurality of first surface illuminations may be a plurality of surface illuminations spaced apart from each other with respect to the sample placement position, and the plurality of second surface illuminations may be arranged above each of the plurality of first surface illuminations . The first inspection apparatus may further include a rotation unit that rotates the plurality of first surface illuminations and the plurality of second surface illuminations collectively so as to illuminate the other direction based on the sample placement position. At this time, the first processor may control the rotation unit to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit.

And, the second inspection apparatus may include a plane illumination disposed on one side of the sample placement position and a second camera disposed on the opposite side of the plane illumination based on the sample placement position. For example, the second camera may have a variable focus lens.

The second inspection apparatus may include a second processor for controlling the second camera to acquire a plurality of images having different focal distances by taking a sample placed at the sample placement position while changing the thickness of the variable focus lens.

According to various embodiments of the present disclosure as described above, it is possible to solve both the problem of illumination and the problem of focus that occur when measuring a curved mirror-surface object. In particular, according to various embodiments of the present disclosure, uniform light can be irradiated at various incidence angles to produce various reflective images. Then, a plurality of images having different focal distances can be acquired quickly and precisely.

Although the present disclosure has been described with reference to a limited number of embodiments and drawings, it is to be understood that the present disclosure is not limited to the above-described embodiment, and that various modifications and changes may be made thereto by those skilled in the art. Can be deformed. Therefore, the scope of the present disclosure should not be limited to the embodiments described, but should be determined by the scope of the appended claims, and equivalents thereof.

100, 100 ', 200, 200': Multifocal image acquisition device
110-1: first illumination unit 110-2: second illumination unit
120: camera 130: processor
210: side lighting 220: camera
230: processor 121, 221: variable focus lens
221 ': Lens array 1000: Sample surface inspection system

Claims (10)

A multifocal image acquiring apparatus for sample surface inspection,
A first illumination unit including a plurality of first side illuminations arranged in different directions with respect to a sample placement position;
A second illumination unit including a plurality of second side illuminations respectively disposed on the upper side of the plurality of first side illuminations;
A camera capable of photographing a sample in an upper direction of the sample placing position; And
And a processor for controlling the camera to photograph the sample and obtaining a plurality of images having different focal lengths, wherein the first illumination unit and the second illumination unit are sequentially turned on and off to change an illumination incidence angle for the sample, Multifocal image acquisition device. The method according to claim 1,
The processor comprising:
And selectively flickers the plurality of first side illumination and the plurality of second side illumination according to a predetermined pattern. The method according to claim 1,
Wherein the plurality of first surface illuminations are eight surface illuminations successively arranged in an octagonal shape with respect to the sample placement position,
Wherein the plurality of second surface illuminations are eight surface illuminations disposed above each of the plurality of first surface illuminations. The method according to claim 1,
Wherein the plurality of first surface illuminations is a plurality of surface illuminations spaced apart from each other with respect to the sample arrangement position,
Wherein the plurality of second surface illuminations is disposed on each of the plurality of first surface illuminations,
The multi-focal image acquiring apparatus includes:
Further comprising: a rotating unit which collectively rotates the plurality of first side illumination and the plurality of second side illumination so as to illuminate different directions with respect to the sample arrangement position,
The processor comprising:
And controls the rotation unit to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit. A multifocal image acquiring apparatus for sample surface inspection,
A side illumination disposed on one side of the sample placement position;
A camera having a variable focus lens and disposed on an opposite side of the plane illumination with respect to the sample placement position; And
And a processor for controlling the camera to acquire a plurality of images having different focal distances by taking a sample placed at the sample placement position while changing the shape of the variable focus lens. In a sample surface inspection system,
A first inspection device for photographing the sample on the upper side of the sample to acquire a multifocal image;
A second examining device for photographing the sample in the lateral direction of the sample to acquire a multi-focus image; And
And a transfer device for transferring the sample to one of the first inspection device and the second inspection device,
The first inspection apparatus includes:
Wherein the sample is photographed using a plurality of plane lights arranged in different directions with respect to a sample placement position. The method according to claim 6,
The first inspection apparatus includes:
A first illumination unit including a plurality of first side illuminations arranged in different directions with respect to a sample placement position;
A second illumination unit including a plurality of second side illuminations respectively disposed on the upper side of the plurality of first side illuminations;
A first camera capable of photographing the sample in an upper direction of the sample placing position; And
The first illumination unit and the second illumination unit are sequentially turned on and off to change the illumination incidence angle with respect to the sample, and the first camera is controlled to photograph the sample to acquire a plurality of images having different focal lengths And a processor. 8. The method of claim 7,
Wherein the plurality of first surface illuminations are eight surface illuminations successively arranged in an octagonal shape with respect to the sample placement position,
Wherein the plurality of second surface illuminations is eight surface illuminations disposed above each of the plurality of first surface illuminations. 8. The method of claim 7,
Wherein the plurality of first surface illuminations is a plurality of surface illuminations spaced apart from each other with respect to the sample arrangement position,
Wherein the plurality of second surface illuminations is disposed on each of the plurality of first surface illuminations,
The first inspection apparatus includes:
Further comprising: a rotating unit which collectively rotates the plurality of first side illumination and the plurality of second side illumination so as to illuminate different directions with respect to the sample arrangement position,
Wherein the first processor comprises:
And controls the rotation unit to rotate the plurality of first side planes and the plurality of second side planes in a predetermined angle unit. 10. The method according to any one of claims 6 to 9,
The second inspection apparatus comprises:
A side illumination disposed on one side of the sample placement position;
A second camera having a variable focus lens and disposed on the opposite side of the surface illumination with respect to the sample placement position; And
And a second processor for controlling the second camera to acquire a plurality of images having different focal distances by taking a sample placed at the sample placement position while changing the shape of the variable focus lens.
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CN112702516A (en) * 2020-12-24 2021-04-23 维沃移动通信（杭州）有限公司 Focusing method and device and electronic equipment

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