KR20170113488A

KR20170113488A - View port assembly structure of vacuum chamber or pressure chamber

Info

Publication number: KR20170113488A
Application number: KR1020170075587A
Authority: KR
Inventors: 김선영
Original assignee: 김선영
Priority date: 2017-01-14
Filing date: 2017-06-15
Publication date: 2017-10-12
Also published as: KR101857965B1; WO2018131774A1

Abstract

The present invention can shorten the time required for assembling a view port installed to observe an object to be processed through a vacuum chamber or a pressurizing chamber or monitor a progress in a chamber, Which can reduce the number of parts required for the vacuum chamber or the pressure chamber, and can reduce the cost and the assemblability remarkably.

Description

[0001] The present invention relates to a vacuum chamber or a pressure chamber,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a visible window assembly structure of a chamber, and more particularly, to a visible window assembly structure for a visible window, which is installed to observe an object to be processed or to monitor a phenomenon in a chamber through a chamber of a vacuum chamber or a pressurizing chamber a view window assembly structure of a vacuum chamber or a pressure-resistant chamber for assembling a view port.

In general, when a work environment such as a special coating operation or an etching operation requires a vacuum, a process is performed inside a vacuum chamber in which a chamber can be maintained in a vacuum atmosphere. Particularly, it is necessary to perform high-precision control in manufacturing processes of liquid crystal display devices such as LCD, OLED, and PDP, which are image display liquid crystal devices. In such apparatuses capable of high-precision control, it is essential to remove impurities by maximizing the degree of vacuum in the chamber. In addition, mass spectrometers and semiconductor inspection equipment are used not only for inspecting and analyzing samples in a vacuum chamber, but also in various fields. For example, in order to improve the impregnation property of an electrolyte solution of a secondary battery, A pressurizing chamber is used to pressurize the interior of the cell.

Such a vacuum chamber or a pressurized chamber is provided with a view port for observing the object to be inspected through the chamber during the course of the process in the chamber or for monitoring the phenomenon in the chamber, Respectively. Such a visible window is a technique in which a window (visible window) itself is opened by making it possible to rotate about one support pin coupled with a side wall of a chamber, for example, as in Patent Registration No. 596331 "window of a vacuum chamber" .

In addition, the patent registration No. 1058829 "inspection window of the vacuum chamber" is a structure in which a check window (visible window) is fixed to the side wall of the chamber, and a ring-shaped sealing plate provided on both sides of the o- And a transparent plate is placed on the outer side of the sealing plate, and then a fixing block is fixed to the outer side of the pressure plate with a ring-shaped pressure plate interposed therebetween.

3A and 3B, an opening portion is formed in the side wall of the chamber 1, and a ring-shaped sealing material 2 having an O-ring 3 on both sides thereof is inserted into the opening edge A window 4 such as tempered glass is placed outside the sealing material 2 made of Teflon or the like and the cover 6 is fastened to the outside of the window 4 with the damper ring 5 interposed therebetween So that the window 4 is fixed. However, the assembly structure of such a visible window (inspection window) and the above-mentioned Patent Registration No. 1058829 have the following problems.

First, since the number of parts used for assembling the visible window (inspection window) is too large, not only the cost increases but also the assembling work itself is difficult. In particular, in the case of the vacuum chamber, There is a problem that it takes too much and the workability is very bad.

Second, when the visible window (inspection window) is assembled to the vertical wall of the chamber, assembly work is difficult and difficult because the component can not be assembled if the operator does not hold the component while assembling. Therefore, it is impossible to assemble a worker by himself / herself because the O-ring must be closely attached to the accurate position of the vertical wall of the chamber while preventing the O-ring from being separated from the sealing material, and the ring interposed between the cover and the window must be accurately adhered to the edge of the window. Even if two people work, the assembly work itself is very difficult and takes a lot of time.

Thirdly, since the assembling operation itself is difficult, the assembled position of each part is not accurate even if the skilled artisan assembles, which may lead to deterioration of the quality of the vacuum chamber or the pressurizing chamber itself.

Fourthly, the centering specified in the ISO standard has been used so far. Since the center ring has a flange formed on both sides along the inner peripheral surface of the ring-shaped metal ring and the rubber ring is fitted to the outside of the metal ring, In order to prevent breakage caused by contact of the window (tempered glass) with the metal ring, a member made of a material such as Teflon should be inserted between the window and the metal ring Therefore, there is a problem that the number of parts is increased as a whole.

SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a vacuum chamber or a pressure chamber which is installed to monitor an object to be processed, a view window assembly structure of a vacuum chamber or a pressure chamber capable of remarkably improving cost reduction and assemblability by reducing the number of parts required for assembly by modularizing the time required for assembling the view port, .

The visible window assembling structure of the vacuum chamber or the pressure-resistant chamber according to the present invention comprises a ring-shaped main body part and a plurality of projecting parts which are protruded at a predetermined height toward the center of the ring shape at the end part of the main body part, A cover having an O-ring insertion groove formed on an inner circumferential surface of the protrusion and having a centering recess formed along an inner circumferential surface of a tip end portion of the protrusion; An O-ring inserted into the O-ring insertion groove of the cover; A window inserted into the ring shape of the cover of the cover to be assembled; A centering ring formed of a ring-shaped metal ring and a rubber ring fitted along an outer circumferential surface of the metal ring, the rubber ring being assembled in a centering hole formed in the cover; And a fixing bolt for fixing the cover to the chamber. When assembled, one side of the rubber ring contacts the one side of the window in the centering ring, and the O- In which the base member is assembled so as to be brought into close contact with each other.

Preferably, the centering ring is a ring-shaped ring having a constant width and thickness, a metal ring in which a flange is formed along one side of the ring-shaped inner peripheral surface, and a rubber ring seat portion is formed in a concave groove along a ring-shaped outer peripheral surface; And a rubber ring which is ring-shaped, has a circular cross-section, is made of rubber or a resin material, and is fitted in the recessed groove of the rubber ring seat portion, and one side of the rubber ring, when assembled, Thereby being brought into contact with the side surface.

The visible window assembling structure of the vacuum chamber or the pressure-resistant chamber according to the present invention is characterized in that a groove for inserting an O-ring is formed in an inner circumferential surface of a protrusion located at an outer portion of a cover for holding a window, By cutting the metal ring part that comes into contact with the window when assembling in the centering and making the rubber ring fitted to the outside of the metal ring come into contact with the window, the sealing material to be inserted between the metal ring and the window is not used. . In addition, since the centering recess is formed in the inner peripheral surface of the front end portion of the main body of the cover, the window is inserted into the cover and the centering is placed in the centering recess. Assembled with a set of window and centering assemblies are assembled by a simple operation of fastening the cover to the chamber with a bolt, the assembling work is very easy and the labor and time for assembling are greatly reduced, So that it is possible to improve the quality of the chamber.

1 is a cross-sectional view of a chamber in which a visible window according to the present invention is assembled.
Fig. 2 is an exploded view showing an arrangement for assembling a visible window.
3 is a view showing the centering used in the present invention.
4A and 4B are assembly and exploded views of a conventional visible window assembled into a chamber.

The most significant technical feature of the visible window assembling structure of the vacuum chamber or the pressure-resistant chamber according to the present invention is that the number of parts used in assembling the visible window to the vacuum chamber or the pressurizing chamber is remarkably reduced and modularized, Cost savings.

The present invention relates to a structure for assembling a visible window (10) for observing the inside of a chamber (20) from outside of the chamber (20) to observe or monitor an object in the chamber. Is a centering ring 13 that is positioned between the outer circumferential surface of the chamber and the transparent window 12 and the window 12 so as to be able to see through the interior.

The cover 11 is configured to fix the visible window 10 to the chamber 20 by fixing the body portion 111 and the protruding portion 112 integrally. The body portion 111 is ring-shaped, and holes for fastening the fastening bolts 15 are formed at equal intervals along the ring-shaped circumferential direction. Further, at the end of the main body 111, which is positioned at the outer side of the chamber (when it is assembled away from the outer peripheral surface of the chamber when assembled) at the time of tightening, And a protruding portion 112 are integrally formed (see Fig. 1).

An O-ring insertion groove 113 into which the O-ring 14 is to be inserted is formed in the inner circumferential surface of the protrusion 111 so that the O-ring 14 is inserted into the O-ring insertion groove 113 in advance, It is not necessary to separately clean the inside of the module in order to insert the O-ring 14 into the cover 11 at the assembly site, thereby reducing the number of parts and simplifying the assembling work.

The centering guide groove 114 is formed along the inner circumferential surface of the proximal end portion of the projecting portion 11 to contact the outer circumferential surface of the chamber when assembled. Since the ring 132 is seated in the centering hole 114 and the rubber ring 132 is not released during the assembling work of the visible window, the assembling work is very convenient and the worker can work alone.

The window 12 is made of transparent tempered glass or quartz so that it can be seen from the outside through the inside of the chamber. The window 12 is inserted into the ring shape of the body 111, Or polygons.

The O-ring 14 is configured to prevent the edge portion of the window 12 made of tempered glass or quartz from being damaged by direct contact with the cover projection 112 made of metal. And after the assembly, the O-ring 14 is brought into contact with the other side of the window 12 (the window surface away from the chamber).

The centering ring 13 is composed of a metal ring 131 made of a metal and made of a metal material and a rubber ring 132 made of a material such as rubber or resin fitted along the outer circumferential surface of the metal ring 131, The ring 131 has a ring shape having a predetermined width and thickness, and a flange 131a is formed along one side of the ring-shaped inner circumferential surface. A rubber ring shaped portion 132b is formed by a concave groove along the ring- Respectively.

The rubber ring 132 is ring-shaped, has a circular cross-section, is made of rubber or a resin material, and is fitted in the concave groove of the rubber ring portion 131b formed on the outer peripheral surface of the metal ring. The size of the cross section of the annular groove 132 should be larger than the diameter of the concave groove of the rubber ring portion 131b. Since the rubber ring portion 131b allows the rubber ring 132 to be seated without being detached from the cover 11, the operator can attach the cover 12 to the cover 12 in a state where the window 12 and the center ring 13 are assembled to the cover 11. [ The bolt hole formed in the chamber 11 is aligned with the tab formed on the outer circumferential surface of the chamber 20 and only the fastening bolt 15 is fastened and fixed.

Since the flange 131a is formed only on one side of the metal ring 131 and the sectional diameter of the rubber ring 132 is formed larger than the diameter of the concave groove of the rubber ring portion 131b, One side of the rubber ring 132 (the side where the flange is not formed in the metal ring) contacts the one side of the window 12 (that is, the side of the window that is located closer to the outer peripheral surface of the chamber when assembled) . The window 12 made of tempered glass or the like when the cover 11 is fixed to the chamber 20 as the one side of the rubber ring 132 is brought into contact with the one side of the window 12, Since the window 12 is not in contact with the window 131, there is no possibility of damaging the window 12, so that a separate member for preventing damage is not needed, so that the number of parts can be reduced. In addition, the rubber ring 132 seals the space between the chamber 20 and the cover 11 to serve as a sealing member.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention. Various modifications and variations will be possible without departing from the spirit of the invention. Therefore, the scope of the present invention should be construed as being covered by the scope of the appended claims, and technical scope within the scope of equivalency thereof should be construed as being included in the scope of the present invention.

10: visible window 11: cover
111: main body part 112:
113: O-ring insertion groove 114: Centering anchor groove
12: window 13: centering
131: metal ring 132: rubber ring
14: O-ring 15: fastening bolt
20: chamber

Claims

In assembling the view port for observing the object to be examined through the inside of the chamber,
Wherein the assembly structure of the visible window includes:
Shaped body portion and a protruding portion protruding at a predetermined height toward the center of the ring shape at an end portion of the main body portion positioned at the outer side in assembling, and an O-ring insertion groove is formed in the inner peripheral surface of the protruding portion A cover having a centering recess formed along the inner circumferential surface of a tip end portion of the protruding portion;
An O-ring inserted into the O-ring insertion groove of the cover;
A window inserted into the ring shape of the cover of the cover to be assembled;
A centering ring formed of a ring-shaped metal ring and a rubber ring fitted along an outer circumferential surface of the metal ring, the rubber ring being assembled in a centering hole formed in the cover;
A fastening bolt for fastening the cover to the chamber;
Wherein one end of the rubber ring is brought into contact with one side surface of the window in the center ring when assembled and an O-ring positioned in the O-ring insertion groove of the projecting surface of the cover is assembled so as to be in contact with the other side surface of the window. Or a visible window assembly structure of the pressure chamber.

The method according to claim 1,
A metal ring having a ring shape having a predetermined width and thickness, a flange formed on one side along a ring-shaped inner circumferential surface, and a rubber ring seating portion formed by a concave groove along a ring-shaped outer circumferential surface;
A rubber ring which is ring-shaped, has a circular cross-section, is made of rubber or a resin material, and is fitted in the recessed groove of the rubber ring housing part;
Wherein one side of the rubber ring is brought into contact with one side of the window at the time of assembling, and the visible window assembly structure of the vacuum chamber or the pressure-resistant chamber.