KR101857965B1 - View port assembly structure of vacuum chamber or pressure chamber - Google Patents
View port assembly structure of vacuum chamber or pressure chamber Download PDFInfo
- Publication number
- KR101857965B1 KR101857965B1 KR1020170075587A KR20170075587A KR101857965B1 KR 101857965 B1 KR101857965 B1 KR 101857965B1 KR 1020170075587 A KR1020170075587 A KR 1020170075587A KR 20170075587 A KR20170075587 A KR 20170075587A KR 101857965 B1 KR101857965 B1 KR 101857965B1
- Authority
- KR
- South Korea
- Prior art keywords
- ring
- chamber
- window
- cover
- rubber
- Prior art date
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/91—O-ring seal
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Gasket Seals (AREA)
Abstract
The present invention can shorten the time required for assembling a view port installed to observe an object to be processed through a vacuum chamber or a pressurizing chamber or monitor a progress in a chamber, Which can reduce the number of parts required for the vacuum chamber or the pressure chamber, and can reduce the cost and the assemblability remarkably.
Description
BACKGROUND OF THE
In general, when a work environment such as a special coating operation or an etching operation requires a vacuum, a process is performed inside a vacuum chamber in which a chamber can be maintained in a vacuum atmosphere. Particularly, it is necessary to perform high-precision control in manufacturing processes of liquid crystal display devices such as LCD, OLED, and PDP, which are image display liquid crystal devices. In such apparatuses capable of high-precision control, it is essential to remove impurities by maximizing the degree of vacuum in the chamber. In addition, mass spectrometers and semiconductor inspection equipment are used not only for inspecting and analyzing samples in a vacuum chamber, but also in various fields. For example, in order to improve the impregnation property of an electrolyte solution of a secondary battery, A pressurizing chamber is used to pressurize the interior of the cell.
Such a vacuum chamber or a pressurized chamber is provided with a view port for observing the object to be inspected through the chamber during the course of the process in the chamber or for monitoring the phenomenon in the chamber, Respectively. Such a visible window is a technique in which a window (visible window) itself is opened by making it possible to rotate about one support pin coupled with a side wall of a chamber, for example, as in Patent Registration No. 596331 "window of a vacuum chamber" .
In addition, the patent registration No. 1058829 "inspection window of the vacuum chamber" is a structure in which a check window (visible window) is fixed to the side wall of the chamber, and a ring-shaped sealing plate provided on both sides of the o- And a transparent plate is placed on the outer side of the sealing plate, and then a fixing block is fixed to the outer side of the pressure plate with a ring-shaped pressure plate interposed therebetween.
3A and 3B, an opening portion is formed in the side wall of the
First, since the number of parts used for assembling the visible window (inspection window) is too large, not only the cost increases but also the assembling work itself is difficult. In particular, in the case of the vacuum chamber, There is a problem that it takes too much and the workability is very bad.
Second, when the visible window (inspection window) is assembled to the vertical wall of the chamber, assembly work is difficult and difficult because the component can not be assembled if the operator does not hold the component while assembling. Therefore, it is impossible to assemble a worker by himself / herself because the O-ring must be closely attached to the accurate position of the vertical wall of the chamber while preventing the O-ring from being separated from the sealing material, and the ring interposed between the cover and the window must be accurately adhered to the edge of the window. Even if two people work, the assembly work itself is very difficult and takes a lot of time.
Thirdly, since the assembling operation itself is difficult, the assembled position of each part is not accurate even if the skilled artisan assembles, which may lead to deterioration of the quality of the vacuum chamber or the pressurizing chamber itself.
Fourthly, the centering specified in the ISO standard has been used so far. Since the center ring has a flange formed on both sides along the inner peripheral surface of the ring-shaped metal ring and the rubber ring is fitted to the outside of the metal ring, In order to prevent breakage caused by contact of the window (tempered glass) with the metal ring, a member made of a material such as Teflon should be inserted between the window and the metal ring Therefore, there is a problem that the number of parts is increased as a whole.
SUMMARY OF THE INVENTION The present invention has been conceived to solve the above-mentioned problems, and it is an object of the present invention to provide a vacuum chamber or a pressure chamber which is installed to monitor an object to be processed, a view window assembly structure of a vacuum chamber or a pressure chamber capable of remarkably improving cost reduction and assemblability by reducing the number of parts required for assembly by modularizing the time required for assembling the view port, .
The visible window assembling structure of the vacuum chamber or the pressure-resistant chamber according to the present invention comprises a ring-shaped main body part and a plurality of projecting parts which are protruded at a predetermined height toward the center of the ring shape at the end part of the main body part, A cover having an O-ring insertion groove formed on an inner circumferential surface of the protrusion and having a centering recess formed along an inner circumferential surface of a tip end portion of the protrusion; An O-ring inserted into the O-ring insertion groove of the cover; A window inserted into the ring shape of the cover of the cover to be assembled; A centering ring formed of a ring-shaped metal ring and a rubber ring fitted along an outer circumferential surface of the metal ring, the rubber ring being assembled in a centering hole formed in the cover; The O-ring is inserted into the O-ring insertion groove formed in the protrusion of the cover before being assembled into the chamber, and is modularized into a single part. When the O-ring is assembled into the chamber, The rubber ring inserted into the rubber ring portion is brought into contact with one side surface of the window and the O-ring inserted into the O-ring insertion groove formed in the protruding portion of the cover is brought into contact with the other side surface of the window.
Preferably, the centering ring is a ring-shaped ring having a constant width and thickness, a metal ring in which a flange is formed along one side of the ring-shaped inner peripheral surface, and a rubber ring seat portion is formed in a concave groove along a ring-shaped outer peripheral surface; And a rubber ring which is ring-shaped, has a circular cross-section, is made of rubber or a resin material, and is fitted in the recessed groove of the rubber ring seat portion, and one side of the rubber ring, when assembled, Thereby being brought into contact with the side surface.
The visible window assembling structure of the vacuum chamber or the pressure-resistant chamber according to the present invention is characterized in that a groove for inserting an O-ring is formed in an inner circumferential surface of a protrusion located at an outer portion of a cover for holding a window, By cutting the metal ring part that comes into contact with the window when assembling in the centering and making the rubber ring fitted to the outside of the metal ring come into contact with the window, the sealing material to be inserted between the metal ring and the window is not used. . In addition, since the centering recess is formed in the inner peripheral surface of the front end portion of the main body of the cover, the window is inserted into the cover, and the centering is positioned in the centering recess. Assembled with a set of window and centering assemblies are assembled by a simple operation of fastening the cover to the chamber with a bolt, the assembling work is very easy and the labor and time for assembling are greatly reduced, So that it is possible to improve the quality of the chamber.
1 is a cross-sectional view of a chamber in which a visible window according to the present invention is assembled.
Fig. 2 is an exploded view showing an arrangement for assembling a visible window.
3 is a view showing the centering used in the present invention.
4A and 4B are assembly and exploded views of a conventional visible window assembled into a chamber.
The most significant technical feature of the visible window assembly structure of the vacuum chamber or the pressure-resistant chamber according to the present invention is that the number of components used in assembling the visible window to the vacuum chamber or the pressure chamber is remarkably reduced and modularized, Cost savings.
The present invention relates to a structure for assembling a visible window (10) for observing the inside of a chamber (20) from outside of the chamber (20) to observe or monitor an object in the chamber. Is a centering
The
An O-
The
The
The O-
The centering
The
Since the
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention. Various modifications and variations will be possible without departing from the spirit of the invention. Therefore, the scope of the present invention should be construed as being covered by the scope of the appended claims, and technical scope within the scope of equivalents thereof should be construed as being included in the scope of the present invention.
10: visible window 11: cover
111: main body part 112:
113: O-ring insertion groove 114: Centering anchor groove
12: window 13: centering
131: metal ring 132: rubber ring
14: O-ring 15: fastening bolt
20: chamber
Claims (2)
Wherein the assembly structure of the visible window includes:
Shaped body portion and a protruding portion protruding at a predetermined height toward the center of the ring shape at an end portion of the main body portion positioned at the time of assembling, and an O-ring insertion groove is formed in the inner peripheral surface of the protruding portion A cover having a centering recess formed along an inner circumferential surface of a tip end portion of the protruding portion;
An O-ring inserted into the O-ring insertion groove of the cover;
A window inserted into the ring shape of the cover of the cover to be assembled;
A centering ring formed of a ring-shaped metal ring and a rubber ring fitted along an outer circumferential surface of the metal ring, the rubber ring being assembled in a centering hole formed in the cover;
A fastening bolt for fastening the cover to the chamber;
The O-ring is inserted into the O-ring insertion groove formed in the protrusion of the cover before being assembled into the chamber, and is modularized into a single part. When the O-ring is assembled, the rubber ring fitted to the rubber ring portion of the centering ring And the O-ring inserted into the O-ring insertion groove formed in the protruding portion of the cover is assembled in contact with the other side of the window.
A metal ring having a ring shape having a predetermined width and thickness, a flange formed on one side along a ring-shaped inner circumferential surface, and a rubber ring seating portion formed by a concave groove along a ring-shaped outer circumferential surface;
A rubber ring which is ring-shaped, has a circular cross-section, is made of rubber or a resin material, and is fitted in the recessed groove of the rubber ring housing part;
Wherein one side of the rubber ring is brought into contact with one side of the window at the time of assembling, and the visible window assembly structure of the vacuum chamber or the pressure-resistant chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/KR2017/011500 WO2018131774A1 (en) | 2017-01-14 | 2017-10-18 | View port assembling structure of vacuum chamber or pressure-resistant chamber |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020170006627 | 2017-01-14 | ||
KR20170006627 | 2017-01-14 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20170113488A KR20170113488A (en) | 2017-10-12 |
KR101857965B1 true KR101857965B1 (en) | 2018-05-15 |
Family
ID=60140752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020170075587A KR101857965B1 (en) | 2017-01-14 | 2017-06-15 | View port assembly structure of vacuum chamber or pressure chamber |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101857965B1 (en) |
WO (1) | WO2018131774A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110940576B (en) * | 2019-12-05 | 2023-03-07 | 中国航发四川燃气涡轮研究院 | Optical observation window capable of being used in high-temperature and high-pressure environment |
CN114277431A (en) * | 2021-12-29 | 2022-04-05 | 西安奕斯伟材料科技有限公司 | Observation window and single crystal furnace |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3843645B2 (en) * | 1999-04-27 | 2006-11-08 | 富士電機システムズ株式会社 | Reduced pressure heat treatment equipment |
JP2007010100A (en) * | 2005-07-04 | 2007-01-18 | Nichias Corp | Outer ring and clamp type fitting for vacuum device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000136813A (en) * | 1998-10-30 | 2000-05-16 | Nissin Electric Co Ltd | Part connecting mechanism of vacuum treatment equipment |
JP2002250445A (en) * | 2001-02-21 | 2002-09-06 | Musashino Eng:Kk | O-ring with center ring for icf |
KR20040110174A (en) * | 2003-06-18 | 2004-12-31 | 삼성전자주식회사 | Etching apparatus of semiconductor |
KR100983785B1 (en) * | 2008-05-08 | 2010-09-27 | 주식회사 테스 | Chamber of producing a semiconduct |
KR101058829B1 (en) * | 2008-12-31 | 2011-08-24 | 엘아이지에이디피 주식회사 | Inspection window of the vacuum chamber |
-
2017
- 2017-06-15 KR KR1020170075587A patent/KR101857965B1/en active IP Right Grant
- 2017-10-18 WO PCT/KR2017/011500 patent/WO2018131774A1/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3843645B2 (en) * | 1999-04-27 | 2006-11-08 | 富士電機システムズ株式会社 | Reduced pressure heat treatment equipment |
JP2007010100A (en) * | 2005-07-04 | 2007-01-18 | Nichias Corp | Outer ring and clamp type fitting for vacuum device |
Also Published As
Publication number | Publication date |
---|---|
KR20170113488A (en) | 2017-10-12 |
WO2018131774A1 (en) | 2018-07-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101857965B1 (en) | View port assembly structure of vacuum chamber or pressure chamber | |
JP2020504269A (en) | Mounting device for flat gaskets of flange joints | |
KR101067036B1 (en) | Conditioning system of the battery case | |
CN114019641A (en) | Double-indium-ring sealing structure and application thereof | |
CN210109158U (en) | Automatic fixing device of miniaturized wave filter | |
CN209043536U (en) | Rubber detects jig and detection device | |
CN114858833A (en) | EBSD sample dismounting and mounting table and EBSD detection method of sample | |
JP2001002114A (en) | Sealed case structure | |
CN117168702A (en) | Air tightness detection device and air tightness detection method of electronic component | |
US20020193042A1 (en) | Apparatus and method for measuring cathode-ray tube neck alignment and tilt | |
CN220366993U (en) | Detection device for sight glass assembly | |
KR20210048872A (en) | Door frame for vehicle | |
KR101029119B1 (en) | Blind Tooling Hole Bushing | |
CN216717749U (en) | Tightness testing device | |
CN216285905U (en) | Double-indium-ring sealing structure | |
JP2006348968A (en) | Method of installing tank and method of inspecting tank installation part | |
CN217765424U (en) | Pressure maintaining cabin and air tightness testing device | |
CN112147164B (en) | Liquid sample chamber of electron microscope and assembling method and mounting method thereof | |
CN217230928U (en) | Observation window and MPCVD equipment for MPCVD equipment | |
CN219416601U (en) | Sealed terminal leakage test fixture | |
CN215374486U (en) | Test bench for testing check valve in tile | |
JP5360868B2 (en) | Viewing window and airtight container | |
CN210322198U (en) | Thread air tightness detection device for pre-coated sealant bolt | |
JP2013036920A (en) | Septum and sample charging inlet using the same | |
CN219013602U (en) | Sealing structure of high-pressure test jig |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
G15R | Request for early opening | ||
A302 | Request for accelerated examination | ||
E902 | Notification of reason for refusal | ||
N231 | Notification of change of applicant | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant |