CN114019641A - Double-indium-ring sealing structure and application thereof - Google Patents

Double-indium-ring sealing structure and application thereof Download PDF

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Publication number
CN114019641A
CN114019641A CN202111375001.0A CN202111375001A CN114019641A CN 114019641 A CN114019641 A CN 114019641A CN 202111375001 A CN202111375001 A CN 202111375001A CN 114019641 A CN114019641 A CN 114019641A
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China
Prior art keywords
flange
indium
ring
double
indium ring
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Pending
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CN202111375001.0A
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Chinese (zh)
Inventor
付柏山
廖奕
牛冉
杨祖盛
韩旭东
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Southwest University of Science and Technology
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Southwest University of Science and Technology
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Priority to CN202111375001.0A priority Critical patent/CN114019641A/en
Publication of CN114019641A publication Critical patent/CN114019641A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Gasket Seals (AREA)

Abstract

The invention discloses a double-indium-ring sealing structure and application thereof, wherein the double-indium-ring sealing structure comprises a first flange connected to vacuum equipment, a second flange fixed with the first flange through a bolt, an optical lens adhered to the second flange, and an inner indium ring and an outer indium ring clamped between the first flange and the second flange; a screw hole is formed in the space between the inner indium ring and the outer indium ring and used for being matched and fixed with the bolt; the double-indium-ring sealing structure is divided into the inner indium ring and the outer indium ring, when the second flange is fixed by screwing the bolt, the second flange can be embedded in parallel along the mounting hole, the phenomenon of over-tightening or tilting caused by interaction between the bolt and the indium ring when the bolt is fastened is avoided, and the optical window of the low-temperature vacuum equipment is better in sealing effect, stable and reliable in performance. Because the sealing effect is improved, the heat insulation effect is enhanced, the service life of the optical window is prolonged, and the maintenance cost of the equipment is reduced.

Description

Double-indium-ring sealing structure and application thereof
Technical Field
The invention relates to the technical field of low-temperature vacuum equipment sealing, in particular to a double-indium-ring sealing structure and application thereof.
Background
In cryogenic optical devices, there is often a sealing problem with mounting a cryogenic optical window on a cryogenic test sample chamber in a vacuum environment. Due to low temperature, the common rubber ring seal cannot be used, and only the indium ring sealing technology can be adopted. In the prior art, the single indium ring of the optical window is commonly used for sealing in the field of low-temperature optics.
The optical window single indium ring is adopted for sealing, so that the optical windows of different types can be conveniently replaced, and the optical windows can be replaced only by disassembling the sealing of the indium ring. However, in the process of practical use, the problem is gradually exposed, because the cylinder wall of the optical window support is very thin, and in addition, when the optical window is installed, because a circle of indium wire ring is clamped between the sealing surfaces, the stress of the surrounding installation bolt is not uniform, under the condition of low temperature, tiny deformation can be generated around the bonded lens, and the phenomenon of leakage can be generated around the optical lens due to the tiny deformation and shrinkage under the low temperature.
Accordingly, the prior art is yet to be improved and developed.
Disclosure of Invention
In view of the defects of the prior art, the invention aims to provide a double-indium-ring sealing structure and application thereof, and aims to solve the problem that the service life of an optical window is shortened due to the fact that the periphery of a bonded lens is slightly deformed due to uneven stress caused by the fact that a single indium wire is adopted for sealing the low-temperature optical window in the prior art.
The technical scheme of the invention is as follows:
a double-indium-ring sealing structure comprises a first flange connected to vacuum equipment, a second flange fixed with the first flange through bolts, an optical lens adhered to the second flange, and an inner indium ring and an outer indium ring clamped between the first flange and the second flange;
wherein, the first flange is provided with a mounting hole; an optical window is formed in the second flange, the edge of the optical window extends vertically towards the first flange to form a supporting cylinder, and the optical lens is bonded to one end, far away from the second flange, of the supporting cylinder; the supporting cylinders are embedded into the mounting holes in parallel.
The double-indium-ring sealing structure is characterized in that a first groove and a second groove are formed in the contact surface of the first flange, which is in contact with the second flange, of the first flange; the inner indium ring is placed in the first groove, and the outer indium ring is placed in the second groove.
The double-indium-ring sealing structure is characterized in that a screw hole is formed between the first groove and the second groove, an unthreaded hole matched with the screw hole is formed in the second flange, and the second flange penetrates through the unthreaded hole and the screw hole through bolts to be fixedly connected with the first flange.
The double-indium-ring sealing structure is characterized in that the screw holes comprise at least three screw holes which are uniformly distributed along the circumferential direction.
The double indium ring sealing structure is characterized in that the optical window is circular.
The double-indium-ring sealing structure is characterized in that the cross section diameters of the inner indium ring and the outer indium ring are the same.
The double-indium-ring sealing structure is characterized in that the number of the screw holes is four, and the second flange is connected with the first flange through four bolts.
The double-indium-ring sealing structure is characterized in that the second flange is an embedded optical window flange.
The double-indium-ring sealing structure is applied to sealing of an optical window of low-temperature vacuum equipment.
Has the advantages that: the invention provides a double-indium-ring sealing structure and application thereof, wherein the double-indium-ring sealing structure comprises a first flange arranged on vacuum equipment, a second flange fixed with the first flange through bolts, an optical lens adhered to the second flange, and an inner indium ring and an outer indium ring clamped between the first flange and the second flange; the double-indium-ring sealing structure is divided into the inner indium ring and the outer indium ring, when the second flange is fixed by screwing the bolt, the second flange can be embedded in parallel along the mounting hole, the phenomenon of over-tightening or tilting caused by interaction between the bolt and the indium ring when the bolt is fastened is avoided, and the optical window of the low-temperature vacuum equipment is better in sealing effect, stable and reliable in performance. Because the sealing effect is improved, the heat insulation effect is enhanced, the service life of the optical window is prolonged, and the maintenance cost of the equipment is reduced.
Drawings
FIG. 1 is a schematic perspective view of a double indium ring sealing structure according to the present invention;
FIG. 2 is an exploded view of a dual indium ring seal structure according to the present invention;
FIG. 3 is a cross-sectional view taken along line A-A of a double indium ring seal structure of the present invention;
fig. 4 is an enlarged schematic view of a double indium ring sealing structure B according to the present invention.
Detailed Description
The invention provides a double-indium-ring sealing structure and application thereof, and the invention is further described in detail below in order to make the purpose, technical scheme and effect of the invention clearer and clearer. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present application, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus should not be construed as limiting the present application. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features.
At present, the common installation form in the field of low temperature optics is called embedded optical window, the optical window is formed by bonding an optical lens with a thin-wall supporting cylinder in a sealing way by a low temperature bonding method, and then a sealing flange at the other end of the thin-wall supporting cylinder seals the optical window on a sample chamber by using an indium wire ring. Sealing the optical window to the sample chamber in this manner has the advantage of facilitating replacement of different types of optical windows, which can be replaced by simply removing the seal of the indium ring. However, in the practical use process, it is found that, in view of heat conduction, the supporting cylinder wall of the optical window is very thin, and in addition, when the optical window is installed, because a circle of indium wire ring is clamped between the sealing surfaces, the stress of the surrounding installation bolts is easily uneven, the supporting cylinder wall can be slightly deformed under the low-temperature condition, and the slight deformation and the shrinkage under the low temperature cause some leakage at the bonding position of the optical lens, so that the sample chamber generates vacuum leakage, the heat insulation effect is influenced, the service life of the optical window is shortened, and the maintenance cost is increased.
In view of the above, referring to fig. 1-2, the present invention provides a double indium ring sealing structure, which includes a first flange 20 connected to a vacuum apparatus 10, a second flange 40 fixed to the first flange 20 by a bolt 30, an optical lens 50 bonded to the second flange 40, and an inner indium ring 60 and an outer indium ring 70 interposed between the first flange 20 and the second flange 40.
In this embodiment, the apparatus 10 is a cold chamber for laboratory samples. It should be noted that the apparatus 10 provided in the drawings of the present invention is illustrated by reference only and is not intended to limit the scope of the apparatus 10 of the present invention.
In this embodiment, the first flange 20 is provided with a mounting hole 201; an optical window 401 is formed on the second flange 40, the edge of the optical window 401 extends vertically to the first flange 20 to form a supporting cylinder 402, and the optical lens 50 is adhered to one side of the supporting cylinder 402 away from the second flange 40; the support cylinder 402 is inserted in parallel into the mounting hole 201.
In some embodiments, the support cartridge may be used in the context of an eyewitness apparatus 10; alternatively, the viewing apparatus 10 may be viewed indirectly, using the viewing apparatus extending into the support cylinder.
Specifically, as shown in fig. 3 to 4, the double indium ring sealing structure further includes a low temperature sealant 80, the diameter of the optical lens is equal to the inner diameter of the supporting cylinder, so that the optical lens is just clamped on the inner wall of the supporting cylinder, and then the low temperature sealant 80 is used to perform sealing treatment on the side of the edge of the optical lens away from the second flange, so as to ensure the sealing performance of the device.
In the prior art, when a single indium ring is adopted, the optical window flange is fixed on equipment by using bolts, and a lever principle occurs, namely, when the bolts are screwed, the single indium ring can serve as a fulcrum, so that the other end of the optical window flange is warped, the sealing effect is poor, and vacuum leakage is easy to occur; or, due to the fact that the contact surface of the indium ring and the flange is not flat due to fine defects on the surface of the indium ring, such as protrusions or depressions, a tiny lever structure is formed, when the flange presses the indium ring, the sealing position is over-tight or tilted, the sealing effect is poor, and the condition of vacuum leakage is caused.
In the embodiment, the second flange is mounted on the first flange by adopting the double-indium-ring sealing structure, so that a sealing surface is flat, the sealing effect is good, and the vacuum degree of vacuum equipment is improved, so that a good heat insulation effect is achieved; the enhancement of the heat insulation effect also greatly prolongs the service life of the optical window.
In some embodiments, the first flange 20 has a first groove 202 and a second groove 203 on a contact surface where the first flange 20 and the second flange 40 contact; the inner indium ring 60 is placed in the first groove 202, and the outer indium ring 70 is placed in the second groove 203. Specifically, as shown in fig. 4, after the inner indium ring and the outer indium ring are placed in the groove, the indium ring should be partially exposed out of the groove to bear the pressure of the second flange and then be flattened, so as to seal the optical window.
In this embodiment, place the indium circle in the slot, the location of indium circle when easy to assemble when compressing tightly through the bolt, indium circle pressurized back and second flange in close contact with can be so that optical window's sealed effect is better.
In some embodiments, a screw hole 204 is provided between the first groove 202 and the second groove 203, an optical hole 403 matching with the screw hole 204 is provided on the second flange 40, and the second flange 40 passes through the optical hole 403 and the screw hole 204 through a bolt 30 to form a fixed connection with the first flange 20. With screw 204 set up in first slot 202 with between the second slot 203, be favorable to screwing fixedly during bolt 30, second flange 40 produces an even pressure to interior indium circle 60 and outer indium circle 70 for interior indium circle and outer indium circle are even to be compressed tightly, have avoided because of the bolt fastening or the tight or perk phenomenon that produces of interact between the indium circle, and two indium circle seal structures make sealed face level and smooth, have guaranteed that the junction of optical lens can not have obvious deformation appearance at low temperature. In other words, the screw holes are arranged between the first groove 202 and the second groove 203, when the bolts pass through the unthreaded holes to fix the second flange on the first flange, and the bolts are screwed, the inner indium ring and the outer indium ring jointly support the second flange, so that a lever structure of a single indium ring is avoided, the contact surface between the second flange and the first flange is flat, and a good sealing effect is achieved.
In some embodiments, the screw holes 204 include at least three and are uniformly distributed along the circumferential direction; for example: when the number of the screw holes is three, the distance between the screw holes is one third of the circumference of a circle where the screw holes are located; when the number of the screw holes is four, the distance between the screw holes is the circumference of a circle where a quarter of the screw holes are located; and so on.
In this embodiment, there are four screw holes 204, and the second flange 40 is connected to the first flange by four bolts. Specifically, the four bolts pass through the unthreaded holes 403 to fix the second flange 40 on the first flange 20, an indium ring placed in a groove is further clamped between contact surfaces of the first flange and the second flange, and the indium ring is pressed flatly and is in close contact with the flange by using the pressure of the bolts on the second flange, so that the sealing effect is achieved.
In this embodiment, a wrench with a bolt torquer is preferably used for locking when the bolt is tightened, so as to ensure that the second flange is properly installed, and finally, a vacuum-pumping and leak-detecting test is performed until the use requirement of the low-temperature optical window is met.
In some embodiments, the optical window is circular. In the implementation, because the double-indium-ring sealing structure is applied to low-temperature vacuum equipment or ultra-vacuum equipment, the difference between the internal pressure and the external pressure of the double-indium-ring sealing structure is large, the flange can be subjected to uniform force by using the circular optical window, the local stress is prevented from being large, and the cracking of the optical window caused by uneven stress due to the difference between the internal pressure and the external pressure is reduced.
In some embodiments, the inner indium ring and the outer indium ring have the same cross-sectional diameter. The first groove is the same as the second groove in cross section aperture, so that an inner indium ring and an outer indium ring with the same cross section diameter are placed in the groove, the contact surfaces of the inner indium ring and the outer indium ring and the second flange are at the same horizontal height, stress uniformity of the two indium rings is facilitated, and the phenomenon of over-tightening or tilting is avoided.
In this embodiment, the second flange is an embedded optical window flange.
In some embodiments, the double indium ring seal structure is used for optical window sealing of a low temperature vacuum apparatus.
In this embodiment, the double indium ring sealing structure is used for sealing an optical window of a vacuum device of a 1K system.
In summary, the present invention provides a double indium ring sealing structure and an application thereof, where the double indium ring sealing structure includes a first flange connected to a vacuum device, a second flange fixed to the first flange by a bolt, an optical lens adhered to the second flange, and an inner indium ring and an outer indium ring clamped between the first flange and the second flange; a screw hole is formed in the space between the inner indium ring and the outer indium ring and used for being matched and fixed with the bolt; the double-indium-ring sealing structure is divided into the inner indium ring and the outer indium ring, when the second flange is fixed by screwing the bolt, the second flange can be embedded in parallel along the mounting hole, the phenomenon of over-tightening or tilting caused by interaction between the bolt and the indium ring when the bolt is fastened is avoided, and the optical window of the low-temperature vacuum equipment is better in sealing effect, stable and reliable in performance. Because the sealing effect is improved, the heat insulation effect is enhanced, the service life of the optical window is prolonged, and the maintenance cost of the equipment is reduced.
It is to be understood that the invention is not limited to the examples described above, but that modifications and variations may be effected thereto by those of ordinary skill in the art in light of the foregoing description, and that all such modifications and variations are intended to be within the scope of the invention as defined by the appended claims.

Claims (9)

1. A double-indium-ring sealing structure is characterized by comprising a first flange connected to vacuum equipment, a second flange fixed with the first flange through bolts, an optical lens adhered to the second flange, and an inner indium ring and an outer indium ring clamped between the first flange and the second flange;
wherein, the first flange is provided with a mounting hole; an optical window is formed in the second flange, the edge of the optical window extends vertically towards the first flange to form a supporting cylinder, and the optical lens is bonded to one end, far away from the second flange, of the supporting cylinder; the supporting cylinders are embedded into the mounting holes in parallel.
2. The double indium ring sealing structure according to claim 1, wherein the first flange is provided with a first groove and a second groove on a contact surface of the first flange with the second flange; the inner indium ring is placed in the first groove, and the outer indium ring is placed in the second groove.
3. The double indium ring sealing structure according to claim 2, wherein a screw hole is provided between the first groove and the second groove, an optical hole matched with the screw hole is provided on the second flange, and the second flange is fixedly connected with the first flange by passing a bolt through the optical hole and the screw hole.
4. The double indium ring sealing structure according to claim 3, wherein the screw holes include at least three and are evenly distributed in the circumferential direction.
5. The double indium ring seal structure according to claim 4, wherein there are four screw holes, and the second flange is connected to the first flange by four bolts.
6. The double indium ring seal structure of claim 1, wherein the optical window is circular.
7. The double indium ring seal structure of claim 1, wherein the inner indium ring and the outer indium ring have the same cross-sectional diameter.
8. The double indium ring seal structure of claim 1, wherein the second flange is an embedded optical window flange.
9. Use of a double indium ring seal structure according to any one of claims 1 to 8 for sealing an optical window of a low-temperature vacuum apparatus.
CN202111375001.0A 2021-11-19 2021-11-19 Double-indium-ring sealing structure and application thereof Pending CN114019641A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111375001.0A CN114019641A (en) 2021-11-19 2021-11-19 Double-indium-ring sealing structure and application thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111375001.0A CN114019641A (en) 2021-11-19 2021-11-19 Double-indium-ring sealing structure and application thereof

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Publication Number Publication Date
CN114019641A true CN114019641A (en) 2022-02-08

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114296202A (en) * 2022-02-25 2022-04-08 复旦大学 Vacuum seal type optical lens adjusting device
CN117524815A (en) * 2023-10-31 2024-02-06 中国科学院近代物理研究所 Microwave feed-in sealing device of ion source and manufacturing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114296202A (en) * 2022-02-25 2022-04-08 复旦大学 Vacuum seal type optical lens adjusting device
CN117524815A (en) * 2023-10-31 2024-02-06 中国科学院近代物理研究所 Microwave feed-in sealing device of ion source and manufacturing method thereof
CN117524815B (en) * 2023-10-31 2024-06-11 中国科学院近代物理研究所 Microwave feed-in sealing device of ion source and manufacturing method thereof

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