KR20170106722A - Optical leak sensor - Google Patents
Optical leak sensor Download PDFInfo
- Publication number
- KR20170106722A KR20170106722A KR1020160030164A KR20160030164A KR20170106722A KR 20170106722 A KR20170106722 A KR 20170106722A KR 1020160030164 A KR1020160030164 A KR 1020160030164A KR 20160030164 A KR20160030164 A KR 20160030164A KR 20170106722 A KR20170106722 A KR 20170106722A
- Authority
- KR
- South Korea
- Prior art keywords
- base member
- optical sensor
- ground
- light
- installation space
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 43
- 239000012530 fluid Substances 0.000 claims abstract description 25
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 238000009434 installation Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 12
- 238000001125 extrusion Methods 0.000 claims description 6
- 238000003754 machining Methods 0.000 claims description 5
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 abstract description 3
- 239000002585 base Substances 0.000 description 47
- 238000001514 detection method Methods 0.000 description 12
- 239000000126 substance Substances 0.000 description 7
- ZTQSAGDEMFDKMZ-UHFFFAOYSA-N Butyraldehyde Chemical compound CCCC=O ZTQSAGDEMFDKMZ-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- NEXSMEBSBIABKL-UHFFFAOYSA-N hexamethyldisilane Chemical compound C[Si](C)(C)[Si](C)(C)C NEXSMEBSBIABKL-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
- G01N21/8507—Probe photometers, i.e. with optical measuring part dipped into fluid sample
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
- G01J2001/4446—Type of detector
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention relates to a base member formed of a plate-like structure having at least a part of its bottom surface opened so as to form a predetermined gap with the ground when placed on the ground; And a photosensor installed in an open space of the base member and irradiating light toward the ground and analyzing the collected light to sense the presence of fluid, the optical leakage sensor comprising: Non-conductive fluid such as oil, HMDS, NBA or the like which does not flow.
Description
BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an optical leakage sensing apparatus for sensing a fluid that does not flow current.
In general, many chemicals are used in the semiconductor manufacturing process. For example, a cleaning liquid used in a cleaning process after cutting and polishing the wafer, a photosensitive liquid used in the photosensitive process of the wafer, a developing solution used in the developing process of the wafer, an etching solution used in the wafer etching process, .
These chemicals are transported from inside and outside to the position where each process is performed through the transfer pipe (piping), and chemical substances may leak out of the transfer pipe due to defective or deteriorated transfer pipe. Leaked chemicals have an adverse effect on people and other devices and parts of the semiconductor manufacturing site, so it is necessary to detect leakage of the transfer pipe and take quick action.
Japanese Patent Registration No. 10-1505439 discloses a leak detection sensor capable of detecting leakage of a chemical substance and a method of manufacturing the same. The leak detection sensor disclosed in this prior art is an area type leakage detection sensor in which a sensor layer having a predetermined area is formed by applying or printing a mixture of a liquid fluorine resin and a conductive material on a plate base layer according to a predetermined pattern, When the leaked fluid comes into contact with the sensor layer, current flows to detect the leakage.
Japanese Patent Registration No. 10-1538507 also discloses a side detection type leak detection sensor capable of detecting leakage of a chemical substance. The leakage detection sensor disclosed in this prior art is a side-sensing type leak detection sensor in which a sensor layer is formed by applying or printing a mixture of a liquid fluororesin and a conductive material on a top surface and a side surface of a plate-like base layer according to a predetermined pattern, When the leaked fluid comes into contact with the upper surface and the side surface of the conductive sensor layer, current flows to detect the leakage.
However, the leakage detection sensors disclosed in the above-mentioned prior art documents can detect leakage only when a conductive fluid through which current flows is in contact with the sensor layer, and when a non-conductive fluid that does not flow current contacts the sensor layer Can not detect it. For example, substances such as HMDS (Hexamethyl Di Silane, Si2 (CH3) 6) and NBA (n-butyraldehyde) used in oils such as light oil or semiconductor wafer processing processes do not flow current, The leak detection sensor could not detect the leakage.
An object of the present invention is to provide an optical leakage sensing device capable of sensing leakage of a non-conductive fluid by irradiating light to a fluid that does not flow current.
In order to achieve the above object, the present invention provides a base structure comprising: a base member formed of a rectangular structure having at least a part of a bottom surface thereof opened so as to form a predetermined gap with a ground when placed on the ground; And a photosensor installed in the open space of the base member and irradiating light toward the ground and analyzing the collected light to sense the presence of the fluid.
Preferably, the base member has a side surface having a stepped shape at one side of the side along the longitudinal direction, a space for installing a photosensor is formed at the bottom of the stepped portion of the base member, Is provided on the stepped bottom surface of the base member, and irradiates light vertically downward.
Preferably, the base member has a step on one side of the side along the longitudinal direction, and the bottom surface of the stepped portion of the base member has two inclined surfaces inclined so that the side surface has a letter shape, And a light receiving unit of the optical sensor is installed on the other of the inclined surfaces of the optical sensor.
Here, the light emitting portion and the light receiving portion of the optical sensor are arranged in a plurality of along the longitudinal direction of the inclined surfaces, and the size of the light receiving portion is larger than that of the light emitting portion.
Alternatively, the base member is formed such that both side surfaces thereof have stepped portions along the longitudinal direction, and optical sensor installation spaces are formed on the bottom surface of the stepped portions on both side surfaces of the base member.
Preferably, the base member and the optical sensor installation space are formed by extrusion molding or machining.
The optical leakage detecting device according to the present invention can detect non-conductive fluid such as oil, HMDS, NBA, etc., which does not flow current by irradiating light to a leakage fluid.
1 is a perspective view schematically showing an optical leakage detection apparatus according to a first embodiment of the present invention,
FIG. 2A is a side view showing the base member of FIG. 1 in which a space for installing a photosensor is formed by extrusion molding,
FIG. 2B is a side view of the base member of FIG. 1 in which the optical sensor installation space is formed by machining,
3 is a perspective view schematically showing an optical leakage detection apparatus according to a second embodiment of the present invention,
Fig. 4 is a rear view of Fig. 2; Fig.
Fig. 5A is a side view of the base member of Fig. 3 in which a space for installing a photosensor is formed by extrusion molding,
FIG. 5B is a side view of the base member of FIG. 3,
6 is a side view showing the base member of the optically-effective leakage sensing apparatus according to the third embodiment of the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of an optical leakage detection device according to the present invention will be described with reference to the accompanying drawings. In the following description of the present invention, it is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the technical scope of the present invention. Will be.
1, an optical leakage sensing apparatus according to a first embodiment of the present invention includes a plate-
The
The
Preferably, the
2A, the
Alternatively, referring to FIG. 2B, the light
As described above, the optical leakage detecting apparatus according to the first embodiment of the present invention detects the leakage of fluid in a noncontact manner in which light is irradiated to the fluid without using a method of sensing the fluid by electric current through contact with the fluid can do. Therefore, it is possible to detect not only a conductive fluid through which current flows but also a non-conductive fluid through which no current flows.
3 and 4, the optical leak detecting apparatus according to the second embodiment of the present invention differs from the first embodiment in the shape of the stepped bottom surface of the
Specifically, as in the first embodiment, the
The
The configuration of the
Preferably, the
5A, the
5B, the
Referring to FIG. 6, the optical leakage sensor according to the third embodiment of the present invention may be configured to detect leakage fluid from both sides of the
To this end, the
The embodiments of the present invention described above are merely illustrative of the technical idea of the present invention, and the scope of protection of the present invention should be interpreted according to the claims. It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined by the appended claims. It should be interpreted that it is included in the scope of right.
Claims (6)
And an optical sensor installed in an open space of the base member and irradiating light toward the ground and analyzing the collected light to detect the presence of the fluid.
The base member has a side surface having a stepped shape at one side of the side along the longitudinal direction, a light sensor installation space is formed at the bottom of the stepped portion of the base member,
Wherein the optical sensor is provided on a bottom surface of the stepped portion of the base member and irradiates light vertically downward.
Wherein the base member has a step on one side of the side along the longitudinal direction, and the bottom surface of the stepped portion of the base member has two inclined surfaces inclined so that the side surface has a Λ shape, An installation space is formed,
Wherein one of the inclined surfaces is provided with a light emitting portion of the optical sensor, and the other one of the inclined surfaces is provided with a light receiving portion of the optical sensor.
Wherein the light emitting portion and the light receiving portion of the optical sensor are arranged in a plurality of along the longitudinal direction of the inclined surfaces, and the size of the light receiving portion is larger than that of the light emitting portion.
Wherein the base member is formed such that both sides of the base member have stepped portions along the longitudinal direction, and optical sensor installation spaces are formed on the bottom surfaces of the stepped portions on both side surfaces of the base member.
Wherein the base member and the optical sensor installation space are formed by extrusion molding or machining.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160030164A KR20170106722A (en) | 2016-03-14 | 2016-03-14 | Optical leak sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160030164A KR20170106722A (en) | 2016-03-14 | 2016-03-14 | Optical leak sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20170106722A true KR20170106722A (en) | 2017-09-22 |
Family
ID=60034868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020160030164A KR20170106722A (en) | 2016-03-14 | 2016-03-14 | Optical leak sensor |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR20170106722A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102049580B1 (en) * | 2018-06-26 | 2019-11-27 | 플로우닉스 주식회사 | Beam type leak detector |
| KR20230174599A (en) | 2022-06-21 | 2023-12-28 | 김기오 | An anti-condensation and heat transfer fluid leak detection system for low-temperature chiller |
-
2016
- 2016-03-14 KR KR1020160030164A patent/KR20170106722A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102049580B1 (en) * | 2018-06-26 | 2019-11-27 | 플로우닉스 주식회사 | Beam type leak detector |
| KR20230174599A (en) | 2022-06-21 | 2023-12-28 | 김기오 | An anti-condensation and heat transfer fluid leak detection system for low-temperature chiller |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9863833B2 (en) | Leak sensor for side detection | |
| KR20170106722A (en) | Optical leak sensor | |
| ATE434178T1 (en) | SURFACE TESTING USING A NON-VIBRATING CONTACT POTENTIAL PROBE | |
| KR20140112462A (en) | Acidic solution leakage sensor | |
| KR101505439B1 (en) | Leakage sensor and Manufacturing method thereof | |
| JP2015125003A (en) | Luminaire | |
| JP7040871B2 (en) | Board processing equipment and parts inspection method for substrate processing equipment | |
| KR101842541B1 (en) | Leak sensor for detecting of non-conducting liquid | |
| CN101689541B (en) | Integrated circuits on a wafer and methods for manufacturing integrated circuits | |
| KR101799834B1 (en) | Multiple leak detection sensor | |
| KR101693761B1 (en) | Leak sensor for top and lateral face detection | |
| JP4630945B1 (en) | Defect inspection equipment | |
| KR20130054187A (en) | Etching apparatus and methods | |
| KR101742558B1 (en) | Amplifier integrated leakage sensor | |
| KR102049580B1 (en) | Beam type leak detector | |
| KR101538509B1 (en) | Pipe type leakage sensor | |
| KR101806762B1 (en) | Wall adhesion type leak detection sensor | |
| KR20180035536A (en) | Area division type leak sensor | |
| JP2005292090A (en) | Inspection device, test jig, and test method | |
| KR101538504B1 (en) | Leak sensor for distance detection | |
| KR20180075943A (en) | Signal distinguishing type multiple leak detection sensor | |
| KR101431747B1 (en) | Apparatus for detecting fluid leakage | |
| KR101777152B1 (en) | Apparatus for inspection of defect and inspecting method of defect using it | |
| KR20200041009A (en) | Leakage sensor for nozzle | |
| WO2019133641A1 (en) | Method and apparatus of chemical detection to prevent process degradation |