KR20170099221A

KR20170099221A - Test socket

Info

Publication number: KR20170099221A
Application number: KR1020160021324A
Authority: KR
Inventors: 신동진
Original assignee: (주)마이크로컨텍솔루션
Priority date: 2016-02-23
Filing date: 2016-02-23
Publication date: 2017-08-31
Also published as: KR101809218B1

Abstract

The present invention relates to a semiconductor chip test socket, and more particularly, to a semiconductor chip test socket having a heat dissipation cover, wherein the heat dissipation cover can easily be brought into close contact with the semiconductor chip, And a semiconductor chip test socket.

Description

Semiconductor chip test socket {TEST SOCKET}

The semiconductor device is subjected to a manufacturing process and then an inspection for determining the electrical performance is performed. The performance test of the semiconductor device is carried out with a semiconductor test socket formed so as to be in electrical contact with a terminal of the semiconductor device inserted between the semiconductor device and the test circuit board. In addition to the inspection of semiconductor devices, semiconductor test sockets are also used in a burn-in test process during the manufacturing process of semiconductor devices.

In the test process of such a semiconductor, considerable heat is generated. Failure to adequately dissipate such heat can result in failure of the test socket as well as the semiconductor.

In the past, a predetermined heat radiation cover was used. However, such a heat radiation cover can not be widely applied to semiconductors of various thicknesses, so that there is a disadvantage in the process of changing the heat radiation cover or a problem in which adhesion between the semiconductor and the heat radiation cover is not achieved .

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SUMMARY OF THE INVENTION The present invention is conceived to solve the above problems, and an object of the present invention is to provide a test socket body, And it is an object of the present invention to provide a semiconductor chip test socket in which the heat dissipation effect of the semiconductor chip test socket can be further improved.

A semiconductor chip test socket according to an embodiment of the present invention includes: a test socket body on which a semiconductor chip is mounted; And a heat radiating cover disposed on the test socket body, wherein the heat radiating cover is in direct contact with the semiconductor chip mounted in the test socket body to dissipate heat generated during a test process,

The test socket body includes a main body portion on which a semiconductor chip is mounted, a socket hole disposed on the main body portion and vertically penetrating the semiconductor chip so as to be mounted on the main body portion, And a latch system for supporting the semiconductor chip mounted on the main body portion in accordance with the vertical displacement of the main cover,

Wherein the heat radiating cover has a lower heat radiating member whose lower surface is inserted into the socket hole and whose lower surface is in direct contact with the upper surface of the semiconductor chip, a lower heat radiating member which is located on the upper surface of the lower heat radiating member, An upper heat radiating member covering the body cover, a connection portion located between the lower heat radiator and the upper heat radiator, an elastic member disposed between the connection portion and the lower heat radiator, and a clip portion disposed at a side of the connection portion,

The lower heat discharging body is configured to be displaceable up and down by a predetermined distance with respect to the connecting portion, and the elastic member is disposed between the connecting portion and the lower heat emitting body to elastically bias the lower heat emitting body and the connecting portion in the vertical direction And the clip portion clips the main cover so that the heat radiating cover is fixed in position with respect to the socket body, and the elastic member urges the lower heat radiating member downward against the connecting portion, Is in close contact with the semiconductor chip.

Preferably, the lower heat sink includes a lower head having a predetermined area and thickness and inserted into the socket hole in a vertical direction, the lower surface being in close contact with an upper surface of the semiconductor chip, and a lower neck portion located on the lower head Wherein the upper heat discharging body includes an upper head having a predetermined area and thickness, an upper neck portion located below the upper head and having an area smaller than that of the upper head and closely connected to the lower neck portion, , A connecting body having a predetermined area and thickness, and a through hole vertically penetrating the center of the connecting body, wherein the upper neck portion is located in the through hole so that the connecting body surrounds the upper portion of the upper neck portion Wherein the thickness of the connecting body is less than the thickness of the upper neck portion, The connection body is vertically displaceable between the extension head and the upper head, the elastic member is disposed between the lower surface of the connection body and the upper surface of the lower neck portion, and is disposed between the connection portion and the lower heat sink And the elastic member applies elastic force in a downward direction with respect to the lower heat radiating member in a state in which the clip portion clips the main cover and the connection portion connected to the clip portion is fixed in position, Is brought into close contact with the semiconductor chip.

Preferably, the clip portion includes: a clip bar symmetrically disposed on both sides of the connection portion, the clip bar extending vertically; a clip jig provided at an intermediate portion of the clip bar and having a clip hole; And a clip spring for applying elasticity to the clip bar, wherein the connection body includes a second depression that is located on both sides corresponding to the position where the clip is disposed, the depression being recessed inward, Wherein the clip shaft passes through the clip hole and the shaft hole so that the clip bar is hinged with respect to the connection body, and the clip shaft passes through the clip hole and the shaft hole, And the upper head is disposed on both sides corresponding to the positions where the clip portions are disposed, And a spring insertion groove formed in the first depression and partially recessed inward in the inner direction so that the clip spring is arranged to apply elasticity to the clip bar in an outward direction The clip spring is disposed at a position higher than the clip jig and elastically biases the upper portion of the clip bar outwardly so that the clip bar is pivoted about the clip shaft and the lower end of the clip bar is deflected inward, And clips the socket body.

Preferably, the upper portion of the lower neck portion is provided with a spring beam extending in the vertical direction and having a predetermined length. The lower portion of the connection body has a predetermined length corresponding to the position of the spring beam, And the elastic member is disposed around the spring beam and inserted into the spring receiving groove.

Preferably, the connection portion includes a guide body extending a predetermined length to a lower portion of the connection body and having a guide hole formed on an inner side thereof so as to surround the lower neck portion, and a connection shaft passing through the guide body in a lateral direction, Wherein the connecting shaft has a shaft beam having a predetermined length and diameter and a shaft head provided at a longitudinal end of the shaft beam, the lower neck portion having a through hole penetrating laterally to penetrate the shaft beam, And the inner diameter of the through hole is larger than the diameter of the shaft beam.

Preferably, the difference between the thickness of the connecting body and the thickness of the upper neck portion, and the difference between the inner diameter of the through hole and the diameter of the shaft beam have the same configuration.

According to the present invention, since the heat radiating cover and the semiconductor chip are easily brought into close contact with each other, the heat radiation effect of the semiconductor chip testing socket can be further improved.

That is, since the lower heat dissipating body and the upper heat dissipating body can be appropriately displaced in the vertical direction with the heat dissipation cover fixed to the body portion by the clip portion, even when the semiconductor chip has various thicknesses, And it is also possible to achieve close contact between the heat radiating cover and the semiconductor chip without changing the structure of the heat radiating cover with respect to the semiconductor chips of various thicknesses.

1 is a view showing a semiconductor chip test socket according to the present invention.
2 is a view showing a test socket body of a semiconductor chip test socket according to the present invention.
3 and 4 are views showing a structure of a heat dissipation cover of a semiconductor chip test socket according to the present invention.
5 and 6 are views showing a structure of a lower heat sink of a semiconductor chip test socket according to the present invention.
7 and 8 are views showing a structure of an upper heat sink of a semiconductor chip test socket according to the present invention.
9 and 10 are views showing the structure of a connection portion of a semiconductor chip test socket according to the present invention.
11 and 12 are views showing the structure of a clip portion of a semiconductor chip test socket according to the present invention.
13 to 15 are views showing connection structures of respective parts of the heat dissipation cover of the semiconductor chip test socket according to the present invention.
16 is a view showing the size relation and the positional displacement between the connection shaft and the through hole of the heat dissipation cover of the semiconductor chip test socket according to the present invention.
17 is a view showing a connection between a test socket body and a heat radiation cover of a semiconductor chip test socket according to the present invention.
18 is a view showing the operation of the heat radiation cover according to the connection between the test socket body and the heat radiation cover of the semiconductor chip test socket according to the present invention.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.

Referring to FIG. 1, a semiconductor chip test socket according to an embodiment of the present invention includes a test socket body 10 on which a semiconductor chip is mounted; And a heat radiating cover (20) disposed on the test socket body (10).

2, the test socket body 10 includes a main body 11 on which a semiconductor chip is mounted, a semiconductor chip 11 mounted on the main body 11, A main body cover 12 having a socket hole 13 penetrating in the vertical direction and being displaceable in the vertical direction on the main body portion 11; And a latch system 14 for supporting a semiconductor chip mounted on the semiconductor chip 11.

3 and 4, the heat radiating cover 20 includes a lower heat sink 100, an upper heat sink 200, a connecting portion 300, and a clip portion 400.

First, the lower heat sink 100 will be described with reference to FIGS. 5 and 6. FIG.

The lower heat sink 100 may be made of a material having a high thermal conductivity so as to closely contact the semiconductor chip and transmit the heat transmitted from the semiconductor chip directly. As a whole, the three-dimensional shape of a rectangular parallelepiped can have a three-dimensional shape.

The lower heat discharging body 100 has a predetermined area and thickness and is vertically inserted into the socket hole 13 of the test socket body 10 so that the lower surface of the lower head 120 closely contacts the upper surface of the semiconductor chip, And a lower neck 110 positioned on the lower head 120. [

The lower head 120 is formed as a solid having a rectangular parallelepiped shape as a whole, and has a lower heat radiating surface 122 which is inserted into the socket hole 13 to closely contact with the upper surface of the semiconductor chip. A first engaging hole 124 is formed at an intermediate portion of the lower head 120 so as to penetrate the engaging member 140 in a vertical direction and a coupling member 140 such as a predetermined screw is passed through the first engaging hole 124, .

The lower neck portion 110 is located on the upper portion of the lower head 120 and has a larger area than the lower head 120 and may have a predetermined thickness. A predetermined second coupling hole may be formed at an intermediate portion of the lower head 120 so that the coupling member 140 can pass upward. At this time, the second engagement hole may have an inner diameter smaller than that of the first engagement hole 124.

At least one through hole 112 is formed at the side of the lower neck 110 in the lateral direction. The through hole 112 may have a predetermined inner diameter and the size thereof may be larger than the inner diameter of the shaft beam 342 of the connection shaft 340 described later. Details will be described later.

The upper surface of the lower neck 110 is formed with a lower contact surface 118 which is in close contact with the upper heat emitting body 200 described later. At least a portion of the outer portion of the lower contact surface 118 may be recessed to form a receiving groove 114 in which a later-described elastic spring 130 can be received. A beam 116 may be provided and a predetermined elastic spring 130 may be disposed around the spring beam 116 to apply elastic force in the vertical direction.

Next, the upper heat sink 200 will be described with reference to FIGS. 7 and 8. FIG.

The upper heat discharging body 200 includes an upper head 210 having a predetermined area and a predetermined thickness and an upper surface 210 disposed below the upper head 210 and having a smaller area than the upper head 210, And a top neck 220 connected thereto.

The upper heat discharging body 200 is made of a material having a high thermal conductivity so as to facilitate heat dissipation like the lower heat discharging body 100.

The upper head 210 may be formed of a plate-shaped member having a predetermined area and thickness.

On both sides of the upper head 210, there may be a first depression 212 which is recessed inward corresponding to a position where the clip unit 400 described later is disposed. In addition, the first depression (212) may be formed with a predetermined spring intercalation groove (214) which is recessed inward to some extent.

The upper neck portion 220 has a smaller area than the upper head 210 and can have a predetermined thickness. The lower surface of the upper neck 220 may include an upper contact surface 222 closely contacting the upper surface of the lower heat sink 100 to receive heat. Meanwhile, a predetermined third coupling hole penetrating through the upper neck portion 220 at a predetermined depth in a vertical direction is formed at an intermediate portion of the upper neck portion 220, and the coupling member 140 is inserted together with the first coupling hole and the second coupling hole, The heat discharging body 200 and the lower heat discharging body 100 may be connected.

The upper neck portion 220 is connected to the lower neck portion 110, and the upper neck portion 220 has an area smaller than the lower neck portion 110. Accordingly, when the upper heat discharging body 200 and the lower heat discharging body 100 are connected to each other, the portion where the upper neck 220 is located is recessed inward to form the neck portion.

Next, the connection unit 300 will be described with reference to FIGS. 9 and 10. FIG.

The connection portion 300 is disposed between the upper heat discharging body 200 and the lower heat discharging body 100. The connection unit 300 includes a connection body 310 located at an upper portion and a guide body 320 located at a lower portion.

The connection body 310 is formed of a plate-shaped member having a predetermined thickness and area, and an insertion hole 332 penetrating in the vertical direction is formed at the center. The shape and area of the insertion hole 332 corresponds to the sectional shape and area of the upper neck 220 and the upper neck 220 can be inserted into the insertion hole 332. At this time, the thickness of the connection body 310 is smaller than the thickness of the upper neck 220 of the upper heat sink 200.

The connection body 310 may have a second depression 312 on both sides of the connection body 310 that is recessed inwardly corresponding to the position of the clip unit 400, such as the upper head 210. Meanwhile, a protruding breaker 319 may be provided under the second depression 312 to prevent excessive rotation of the clip unit.

As the second depression 312 is formed, protruding heads 314 protruding in opposite directions to the depression direction of the depressed portion are provided on both sides of the second depressed portion 312, 314 may be formed with shaft holes 316 penetrating in the forward and backward directions.

In addition, a predetermined spring receiving groove 318 may be formed on the lower surface of the connection body 310. [ The spring receiving groove 318 is formed at a position corresponding to the spring disposed on the upper contact surface 222 of the upper surface of the lower heat sink 100 so that the upper portion of the elastic spring 130 can be inserted .

The guide body 320 is formed of an annular member having a predetermined height and is provided at a lower portion of the connection body 310. The guide body 320 also has a guide hole 334 penetrating the guide body 320 in the vertical direction, and the insertion hole 332 and the guide hole 334 communicate with each other in the vertical direction. The lower surface of the connection body 310 is exposed downward in the inner region as well as the outer region of the guide hole 334 by making the guide hole 334 larger than the area of the insertion hole 332. [ That is, the spring receiving grooves 318 and 114 formed on the lower surface of the connection body 310 are formed on the lower surface of the connection body 310 exposed in the inner region of the guide hole 334.

The shape and area of the guide hole 334 may correspond to the sectional shape and area of the lower neck 110 and the lower neck 110 may be inserted into the insertion hole 332. That is, as described above, the insertion hole 332 corresponds to the upper neck portion 220, and the guide hole 334 corresponds to the lower neck portion 110, so that the insertion hole 332 is smaller than the guide hole 334 Area.

On the surfaces of the guide body 320 facing each other on the circumferential surfaces thereof, a connection hole 322 through which the guide body 320 is laterally passed is formed. At least one pair of connection holes 322 are formed at positions facing each other.

The connection shaft 340 is inserted and fixed in the connection hole 322. The connection shaft 340 has a shaft beam 342 and a shaft head 344. The shaft beam 342 is composed of a beam having a long length and the inner diameter of the shaft beam 342 and the inner diameter of the connection hole 322 correspond to each other so that the connection shaft 340 is firmly fixed to the guide body 320 . Both ends of the shaft beam 342 are provided with a shaft head 344 for fixing the shaft beam 342 with respect to the guide body 320. The shaft head 344 is positioned on the outer surface of the guide body 320 so that the connection shaft 340 is fixed to the guide body 320.

Hereinafter, the clip unit 400 will be described with reference to FIG.

The clip unit 400 is symmetrically provided on both sides of the connection unit 300 so as to form at least one pair. The clip portion 400 includes a clip bar 410, a clip jig 412, a clip shaft 420, and a clip spring 430.

The clip bar 410 may be elongated in the vertical direction, and an operation head may be provided at an upper portion of the clip bar 410. A hook portion may be provided at a lower portion of the clip bar 410 to project partially inward in the lateral direction. The latching part is hooked on the lower part of the socket cover 12 so that the clip part 400 can grip the main cover 12. [ In addition, a clip groove 416 may be formed in the upper side of the clip bar 410 in the lateral direction to accommodate one end of a clip spring 430 described later. Here, the position of the clip groove 416 is a position between the operation head at the upper end of the clip bar 410 and the clip jig 412.

The clip jig 412 is provided laterally inward of the longitudinal center portion of the clip bar 410 and protrudes inward. The clip jig 412 is formed with a clip hole 414 penetrating in the forward and backward directions so that the clip shaft 420 can pass through.

The clip shaft 420 is made of a shaft-shaped member having a predetermined length and an outer diameter to penetrate the clip hole 414.

The clip spring 430 is composed of a predetermined spring, and applies elasticity to the clip bar 410. The clip spring 430 is inserted into the clip groove 416 described above.

Hereinafter, the coupling relationship of each part of the heat radiating cover 20 according to the present invention will be described with reference to Figs. 12 to 14. Fig.

12, when the clip jig 412 of the clip unit 400 is coupled to the connection body 310 of the connection body 310, as shown in FIG. 12, Is located within the second depression (312). The clip hole 414 formed in the clip jig 412 and the shaft hole 316 formed in the protrusion head 314 of the coupling body 310 are passed through each other in a line. The clip bar 410 passes through the shaft hole 316 and the clip hole 414 so that the clip bar 410 is hingedly connected to the connection part 300. Accordingly, the clip bar 410 can be rotated about the clip shaft 420.

The upper heat discharging body 200 is configured such that the upper neck 220 is inserted into the through hole of the connecting body 310, (112). The clip bar 410 is positioned in the first recessed portion 212 of the upper head 210 of the upper heat sink 200 and the spring receiving recess 214 formed in the first recessed portion 212 A clip spring 430 is disposed. Therefore, the clip spring 430 in the spring receiving groove 214 is elastically biased in the lateral direction so that the upper portion of the clip bar 410 is elastically biased in the outward direction, The clip shaft 420 is pivoted about the clip shaft 420, and the engagement portion of the lower end of the clip bar 410 is deflected inward.

Next, the combination of the lower heat sink 100, the upper heat sink 200, and the connection 300 will be described with reference to FIG. The lower neck 110 of the lower heat sink 100 is inserted into the guide hole 334 of the guide body 320 of the connection part 300. Since the lower neck portion 110 is inserted into the guide hole 334 in a state where the connection shaft 340 is not inserted into the guide body 320, the lower neck portion 110 is not caught in the guide hole 334 To be inserted. The upper contact surface 222 of the lower heat sink 100 is in close contact with the lower contact surface 118 of the upper heat sink 200 as described above. In addition, the upper heat discharging body 200 and the lower heat emitting body 100 are closely contacted to each other by the predetermined coupling member 140 described above.

At this time, the elastic spring 130 provided outside the upper contact surface 222 of the lower neck 110 contacts the lower surface of the connection body 310. Accordingly, the elastic spring 130 applies elasticity between the upper surface of the lower neck 110 and the lower surface of the coupling body 310.

When the lower neck portion 110 is inserted into the guide hole 334, the connection hole 322 formed in the guide body 320 and the through hole 112 formed in the lower neck portion 110 are aligned in a row and penetrated in one direction . The connection shaft 340 is passed through the connection hole 322 and the through hole 112 and the shaft 304 is fixed to both ends of the connection shaft 340 to connect the connection portion 300 and the lower heat sink (100). Of course, the lower heat sink 100 and the upper heat sink 200 are closely connected by the connecting member described above.

Accordingly, the upper neck portion 220 is inserted into the connection body 310 and the lower neck portion 110 is inserted into the guide hole 334. The inner diameter of the through hole 112 formed in the lower neck 110 is larger than the inner diameter of the connection shaft 340 and the thickness of the upper neck 220, The connecting body 310 of the connecting part 300 is vertically moved between the upper head 210 and the lower neck part 110 because the distance between the lower head part 222 and the upper head 210 is greater than the thickness of the connecting body 310. [ Can be displaced. At this time, the displaceable range is equal to the difference between the inner diameters of the connection shaft 340 and the through hole 112. Or the difference between the thickness of the upper neck 220 and the thickness of the connecting body 310. Conversely, when the position of the connection portion 300 is fixed, the upper heat discharging body 200 and the lower heat discharging body 100 may be considered to be displaceable in the vertical direction with respect to the connecting portion 300 by the above-described interval .

15 and 16, FIG. 15 is a view illustrating a configuration in which the connection body 310 and the guide body 320 of the connection portion 300 are omitted from the heat radiating cover 20, and FIG. 16 is an enlarged view of a portion A in Fig. As described above, the inner diameter N of the through hole 112 is larger than the inner diameter M of the connection shaft 340. [ Accordingly, the connection shaft 340 can be vertically displaced in the through hole 112 as shown by arrows in FIG. 16, and the connection part 300 connected to the connection shaft 340 is also vertically displaceable. Conversely, when the position of the connection part 300 connected to the connection shaft 340 is fixed, the lower heat sink 100 and the upper heat sink 200 can be displaced in the vertical direction.

Hereinafter, the operation of the heat dissipation cover 20 of the semiconductor chip testing socket according to the present invention will be described with reference to FIGS. 17 and 18. FIG.

As shown in Fig. 17, the heat radiating cover 20 is fixed to the body portion by the clip portion 400. Fig. At this time, the clip portion 400 clips the cover of the main body portion. The clip portion 400 is hinged to the connection portion 300 so that the position of the connection portion 300 of the heat radiation cover 20 is fixed when the clip portion 400 clips the cover of the main body portion.

First, when no external force is applied to the heat dissipation cover 20, the elastic spring 130 applies elasticity between the lower heat dissipating body 100 and the connection portion 300, as shown in FIG. 18 (a). The lower heat discharging body 100 and the upper heat discharging body 200 are pushed downward by the elastic spring 130 and positioned in the downward direction with respect to the positions of the connecting part 300 and the clip part 400 do.

18 (b), if the semiconductor chip or the like is positioned below the lower heat sink 100 and the lower heat sink 100 is pushed upward as shown by the arrow K, The elastic force of the elastic spring 130 is overcome and the elastic force of the elastic spring 130 is displaced upward. At this time, as described above, the difference between the thickness of the upper neck portion 220 and the thickness of the connection body 310, and the difference between the inner diameter of the through hole 112 and the inner diameter of the connection shaft 340, And the upper heat discharging body 200 can be displaced in the vertical direction.

Accordingly, the elastic force of the elastic spring 130 makes the lower surface of the lower heat sink 100 and the semiconductor chip located at the lower portion of the lower heat sink 100 closely contact each other. Of course, at this time, the heat radiating cover 20 is firmly fixed to the body portion by the clip portion 400. [

According to the present invention, since the heat radiating cover 20 and the semiconductor chip are easily brought into close contact with each other, the heat dissipating effect of the semiconductor chip testing socket can be further improved.

That is, since the lower heat sink 100 and the upper heat sink 200 can be appropriately displaced in the vertical direction in a state where the heat radiating cover 20 is fixed to the body portion by the clip portion 400, It is possible to apply one heat dissipation cover 20 to semiconductor chips of various thicknesses without changing the structure of the heat dissipation cover 20 with respect to semiconductor chips of various thicknesses, It is possible to achieve close contact between the chips.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary,

It will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the present invention.

10: Test socket body
11:
12: Body cover
13: Socket hole
14: Latch system
20: Heat-radiating cover
100: Lower heat sink
110: Lower neck portion
112: Through hole
114: receiving groove
116: spring beam
118: Lower contact surface
119: Second coupling hole
120: Lower head
122: Lower discharge surface
124: first coupling hole
130: Elastic spring
140:
200: upper heat sink
210: upper head
212: first depression
214: Spring internally inserted groove
220: upper neck
222: upper contact surface
224: third coupling hole
300: connection
310: connection body
312: second depression portion
314: extrusion head
316: Shaft hole
318: Spring receiving groove
319: Breaker
320: Guide body
322: Connection hole
332: Insertion hole
334: Guide hole
340: connecting shaft
342: Shaft Beam
344: Shaft head
400: clip portion
410: Clip bar
412: Clip jig
414: clip hole
416: clip home
420: Clip shaft
430: clip spring

Claims

In a semiconductor chip test socket,
A test socket body on which a semiconductor chip is mounted;
And a heat radiating cover disposed on the test socket body,
Wherein the heat radiating cover is configured to directly heat the semiconductor chip mounted in the test socket body to dissipate heat generated during the test process,
The test socket body includes:
A main body portion on which the semiconductor chip is mounted,
A main cover disposed on the main body and having a socket hole vertically penetrating the semiconductor chip so as to be mounted on the main body, the main cover being vertically displaceable on the main body;
And a latch system which is opened and closed in accordance with the vertical displacement of the main cover to support the semiconductor chip mounted on the main body portion
The heat-
And a lower surface inserting body having a lower surface inserted into the socket hole and having a lower surface in direct contact with an upper surface of the semiconductor chip,
An upper heat radiator disposed at an upper portion of the lower heat radiator and connected to the lower heat radiator in close contact with the upper portion to cover the main cover,
A connection portion positioned between the lower heat sink and the upper heat sink,
An elastic member disposed between the connection portion and the lower heat sink,
And a clip portion disposed on a side of the connection portion
The lower heat discharging body is configured to be displaceable up and down by a predetermined distance with respect to the connecting portion, and the elastic member is disposed between the connecting portion and the lower heat emitting body to elastically bias the lower heat emitting body and the connecting portion in the vertical direction ,
The clip portion clips the main cover so that the heat radiating cover is positioned with respect to the socket body so that the lower heat radiating member applies elastic force downward to the connection portion by the elastic member, And is configured to be in close contact with the semiconductor chip.

The method according to claim 1,
The lower heat-
A lower head having a predetermined area and thickness and inserted into the socket hole in a vertical direction, the lower surface being in close contact with the upper surface of the semiconductor chip,
And a lower neck portion located on the lower head,
The upper heat-
An upper head having a predetermined area and thickness,
And an upper neck portion located below the upper head and having an area smaller than that of the upper head and closely connected to the lower neck portion,
The connecting portion
A connecting body having a predetermined area and thickness, and
And a through hole penetrating through the center of the connecting body in a vertical direction,
Wherein the upper neck portion is located in the through hole so that the connecting body is positioned between the upper head and the lower neck portion with the outer side of the upper neck portion,
Wherein the connecting body has a thickness smaller than the thickness of the upper neck portion so that the connecting body is vertically displaceable between the expansion head and the upper head, the elastic member is disposed between the lower surface of the connection body and the upper surface of the lower neck portion, And applying elasticity between the connection portion and the lower heat sink,
The elastic member urges the elastic member in a downward direction with respect to the semiconductor chip so that the lower surface of the lower head contacts the semiconductor chip, Close-coupled semiconductor chip test socket.

The method of claim 2,
The clip portion includes:
Wherein the connecting portion is symmetrically disposed on both sides of the connecting portion,
A clip bar extending long in the vertical direction,
A clip jig provided at an intermediate portion of the clip bar and having a clip hole,
A clip shaft passing through the clip hole,
And a clip spring for applying elasticity to the clip bar,
The connection body includes:
A second depressed portion located on both sides corresponding to a position at which the clip portion is disposed,
A protruding head located on both sides of the second depression,
And a shaft hole penetrating the protruding head and provided so as to penetrate the clip shaft,
The clip shaft passes through the clip hole and the shaft hole so that the clip bar is hingedly connected to the connection body,
Wherein the upper head comprises:
A first depressed portion located on both sides corresponding to a position at which the clip portion is disposed, the first depressed portion being recessed inward;
And a spring insertion groove formed in the first depression and partially recessed inwardly,
The clip spring is disposed in the spring insertion groove so as to apply elastic force to the clip bar in the outward direction,
The clip spring is disposed at an upper position than the clip jig and elastically biases the upper portion of the clip bar outwardly so that the clip bar is rotated about the clip shaft to deflect the lower end of the clip bar inward, Semiconductor chip test socket to clip the body.

The method of claim 2,
A spring beam extending in a vertical direction and having a predetermined length is provided on an upper portion of the lower neck portion,
A spring receiving groove having a predetermined length corresponding to the position of the spring beam and into which the spring beam is inserted is provided in a lower portion of the connecting body,
And the elastic member is disposed around the spring beam and inserted into the spring receiving groove.

The method of claim 2,
The connecting portion
A guide body having a guide hole formed on an inner side thereof so as to surround an outer side of the lower neck portion,
And a connecting shaft which penetrates the guide body laterally,
The connecting shaft having a shaft beam having a predetermined length and diameter, and a shaft head provided at the longitudinal end of the shaft beam,
Wherein the lower neck portion has a through hole penetrating laterally to penetrate the shaft beam,
Wherein an inner diameter of the through hole is larger than a diameter of the shaft beam.

The method of claim 5,
A difference between a thickness of the connection body and a thickness of the upper neck portion,
Wherein a difference between an inner diameter of the through hole in the vertical direction and a diameter of the shaft beam is equal to each other.