KR20170079892A - Touch sensitive device and display device comprising the same - Google Patents

Abstract

A display device including a contact sensitive element and a contact sensitive element is provided. The contact sensitive device comprises a substrate, at least one first electrode disposed on one side of the substrate and one or more second electrodes spaced apart from the first electrode, and at least one piezoelectric nanofiber in contact with the first and second electrodes, ).

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a touch sensing device,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a display device including a touch sensitive device and a touch sensitive device, and more particularly, to a touch sensitive device using a piezoelectric nanofiber To a display device.

The touch panel is a device for detecting a user's touch input such as a screen touch or a gesture on a display device, and is used for a portable display device such as a smart phone or a tablet PC, a display device of a public facility, Devices. Such a touch panel is classified into a resistance film type, a capacitive type, an ultrasonic type, and an infrared type depending on an operation method.

However, in recent years, research on a haptic device that transmits tactile feedback that can be felt by a user's finger or a stylus pen of a user as feedback on a touch input of a user has been conducted .

A haptic device using ERC (Eccentric Rotating Mass), a haptic device using LRA (Linear Resonant Actuator), and a haptic device using Piezo Ceramic Actuator have been used as the haptic device. However, the above-described haptic devices are made of opaque materials and can not vibrate the entire display device other than a specific part of the display device, provide various vibration sensations, have low durability, and are easily broken by an external impact.

 [Related Technical Literature]

1. Haptic effect generation method and haptic support system using ERM actuator (Korean Patent Application No. 10-2013-0011958)

Accordingly, a problem to be solved by the present invention is to provide a contact-sensitive element and a contact-sensitive element that can realize various tactile feedback by using piezoelectric nanofibers and adjusting the length of piezoelectric nanofibers or utilizing harmonics phenomenon. And a display device including the display device.

Another problem to be solved by the present invention is to provide a display device including a contact-sensitive element and a contact-sensitive element each having high permeability characteristics by using piezoelectric nanofibers aligned in one direction.

The problems of the present invention are not limited to the above-mentioned problems, and other problems not mentioned can be clearly understood by those skilled in the art from the following description.

According to an aspect of the present invention, there is provided a touch sensing device including a substrate, at least one first electrode disposed on one surface of the substrate, at least one second electrode spaced apart from the first electrode, And at least one piezoelectric nanofiber in contact with the first electrode and the second electrode.

According to an aspect of the present invention, there is provided a display device including a touch panel, a touch panel, and a touch panel, the touch panel including a substrate, at least one first An electrode, at least one second electrode, and a contact-sensitive element having at least one piezoelectric nanofiber connecting the first electrode and the second electrode.

The details of other embodiments are included in the detailed description and drawings.

The present invention has the effect of improving the transmittance of the contact-sensitive element by using the piezoelectric nanofibers as vibrating sources and by forming the piezoelectric nanofibers to be aligned in one direction.

In addition, the present invention has the effect of providing various tactile feedback to the user by adjusting the length and the harmonic order of the piezoelectric nanofibers.

The effects according to the present invention are not limited by the contents exemplified above, and more various effects are included in the specification.

1 is a schematic plan view for explaining a touch sensing device according to an embodiment of the present invention.
2A is a schematic enlarged plan view for explaining a cell of a touch sensing element according to an embodiment of the present invention.
2B is a schematic cross-sectional view of the contact sensitive element according to IIb-IIb 'of FIG. 2A.
3A and 3B are schematic enlarged plan views for explaining a contact-sensitive element according to another embodiment of the present invention.
FIGS. 4A and 4B are schematic enlarged plan views for explaining the measurement results of the vibration frequency with respect to the length of the piezoelectric nanofibers. FIG.
5 is a schematic enlarged plan view for explaining a touch sensing device according to another embodiment of the present invention.
6A and 6B are schematic enlarged plan views for explaining a touch sensitive element according to various embodiments of the present invention.
7 is a schematic enlarged plan view for explaining a contact-sensitive element according to another embodiment of the present invention.
8A is a schematic enlarged plan view for explaining a contact-sensitive element according to another embodiment of the present invention.
8B is a schematic cross-sectional view of the touch sensitive element according to VIIIb-VIIIb 'of FIG. 8A.
9A and 9B are schematic cross-sectional views for explaining a contact-sensitive element according to another embodiment of the present invention.
10 is a schematic cross-sectional view for explaining a display device according to an embodiment of the present invention.
11 is a schematic cross-sectional view illustrating a display device according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims.

The shapes, sizes, ratios, angles, numbers, and the like disclosed in the drawings for describing the embodiments of the present invention are illustrative, and thus the present invention is not limited thereto. Like reference numerals refer to like elements throughout the specification. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail. Where the terms "comprises", "having", "done", and the like are used in this specification, other portions may be added unless "only" is used. Unless the context clearly dictates otherwise, including the plural unless the context clearly dictates otherwise.

In interpreting the constituent elements, it is construed to include the error range even if there is no separate description.

In the case of a description of the positional relationship, for example, if the positional relationship between two parts is described as 'on', 'on top', 'under', and 'next to' Or " direct " is not used, one or more other portions may be located between the two portions.

An element or layer is referred to as being another element or layer "on ", including both intervening layers or other elements directly on or in between.

Although the first, second, etc. are used to describe various components, these components are not limited by these terms. These terms are used only to distinguish one component from another. Therefore, the first component mentioned below may be the second component within the technical spirit of the present invention.

Like reference numerals refer to like elements throughout the specification.

The sizes and thicknesses of the individual components shown in the figures are shown for convenience of explanation and the present invention is not necessarily limited to the size and thickness of the components shown.

It is to be understood that each of the features of the various embodiments of the present invention may be combined or combined with each other partially or entirely and technically various interlocking and driving is possible as will be appreciated by those skilled in the art, It may be possible to cooperate with each other in association.

In this specification, a contact-sensitive element means an element capable of transmitting tactile feedback to a user in response to a user's contact with the contact-sensitive element.

Various embodiments of the present invention will now be described in detail with reference to the accompanying drawings.

1 is a schematic plan view for explaining a touch sensing device according to an embodiment of the present invention. Referring to FIG. 1, a touch sensing device 100 includes a substrate 110, a plurality of cells CE, a first wiring 161, a second wiring 162, and an FPCB 151.

The substrate 110 is a substrate for supporting various components of the contact-sensitive element 100. The substrate 110 is made of an insulating material. In particular, the substrate 110 may be made of a transparent insulating material. Since the touch sensing device 100 according to an embodiment of the present invention can be employed in a display device in a manner that it is disposed on a front surface of a display panel, the substrate 110 can be made of a transparent insulating material. For example, the substrate 110 may be made of glass, polyimide (PI), or acrylic based plastic material.

The substrate 110 is configured to have an active area AA. The active region AA of the substrate 110 is a region for transmitting tactile feedback to the user and includes a plurality of cells CE (first electrode) 120, a second electrode 130 and a piezoelectric nanofiber 140 ). Here, the cell CE is the smallest unit area that can transmit tactile feedback to the user, and each cell CE can independently transmit tactile feedback.

The area of each cell CE of the substrate 110 can be determined in consideration of the size of a finger of a general person. Since the touch sensitive device 100 transmits tactile feedback to the user's touch input, the cell CE, which is the minimum unit area that can transmit the tactile feedback to the user, can be determined in consideration of the area where the user's touch input occurs have. In this case, since the area where the user's touch input is generated is determined according to the size of a finger of a general person, the area of the cell CE of the substrate 110 can also be determined based on the size of a finger of a general person.

Hereinafter, FIGS. 2A and 2B will be referred to for a more detailed description of the first electrode 120 and the second electrode 130 disposed in each cell CE and the cell CE.

2A is a schematic enlarged plan view for explaining a cell CE of a touch sensing element according to an embodiment of the present invention. 2B is a schematic cross-sectional view of the contact sensitive element according to IIb-IIb 'of FIG. 2A. 2A and 2B show only one cell CE of the plurality of cells CE of the contact sensitive device 100 and all of the plurality of cells CE of the contact sensitive device 100 are shown in FIGS. May be configured the same as the cell CE shown in FIG.

The first electrode 120 and the second electrode 130 are electrodes for applying a voltage to the piezoelectric nanofibers 140 and are made of a conductive material. The first electrode 120 and the second electrode 130 may be made of a transparent conductive material in order to secure the transmittance of the touch sensing device 100. [ For example, the first electrode 120 and the second electrode 130 may be formed of a transparent conductive material such as ITO (Indium Tin Oxide), PEDOT: PSS, silver-nanowire, or the like. The materials of the first electrode 120 and the second electrode 130 are not limited to those described above and various transparent conductive materials may be used as the material of the first electrode 120 and the second electrode 130 . The first electrode 120 and the second electrode 130 may be formed of the same material or different materials.

Referring to FIGS. 2A and 2B, the first electrode 120 and the second electrode 130 are disposed on one side of the substrate 110 in one cell CE. That is, the first electrode 120 and the second electrode 130 are formed on the same surface of the substrate 110, and the first electrode 120 and the second electrode 130 are both formed on each of the plurality of cells CE . For example, the first electrode 120 and the second electrode 130 may be formed on the upper surface of the substrate 110 as shown in FIG. 2B and spaced apart from each other.

The first electrode 120 and the second electrode 130 may be formed on one surface of the substrate 110 in various manners. For example, the first electrode 120 and the second electrode 130 may be formed on the upper surface of the substrate 110 in a manner such as sputtering, printing, or slit coating. In particular, when the first electrode 120 and the second electrode 130 are formed of the same material, the first electrode 120 and the second electrode 130 may be formed at the same time.

Referring to FIGS. 2A and 2B, a plurality of piezoelectric nanofibers 140 are disposed on a substrate 110 in each of a plurality of cells CE. The piezoelectric nanofiber 140 means a fiber having piezoelectricity and solubility and having a diameter of several tens to several hundred nanometers. For example, the piezoelectric nanofibers 140 may be made of polyvinylidene fluoride (PVDF), poly (vinylidenefluoride-trifluoroethylene), poly (vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) , P (VDF-TRFE-CTFE), poly (vinylidene fluoride-trifluoroethylene-chlorotrifluoroethylene), and ZnO.

2A and 2B, a plurality of piezoelectric nanofibers 140 are electrically connected to the first electrode 120 and the second electrode 130 to electrically connect the first electrode 120 and the second electrode 130, Connect. One end of the plurality of piezoelectric nanofibers 140 is disposed between the first electrode 120 and the substrate 110 to be in contact with the first electrode 120 and the other end is connected to the second electrode 130 and the substrate 110. [ 110 so as to contact the second electrode 130. Accordingly, the plurality of piezoelectric nanofibers 140 can electrically connect the first electrode 120 and the second electrode 130. However, the present invention is not limited thereto, and only one piezoelectric nanofiber 140 may be disposed in one cell CE, and the first electrode 120 and the second electrode 130 may be formed only by one piezoelectric nanofiber 140 And can be electrically connected. Electrodes may be additionally disposed between the piezoelectric nanofibers 140 and the substrate 110 so that the electrodes are disposed on both the top and bottom of the piezoelectric nanofibers 140. [ One piezoelectric nanofiber 140 may be disposed between the first electrode 120 and the second electrode 130, but a plurality of piezoelectric nanofibers 140 may be disposed to increase the vibration intensity.

2A, a plurality of piezoelectric nanofibers 140 extend in a first direction (X-axis direction) and are arranged to be parallel to each other. A more detailed description of how a plurality of piezoelectric nanofibers 140 are aligned in one direction will first be described.

The piezoelectric nanofibers 140 are manufactured through an electrospinning method. First, a nozzle for electrospinning is filled with a piezoelectric material. The piezoelectric material is a material that can constitute the piezoelectric nanofiber 140. The piezoelectric nanofiber 140 may be filled in the nozzle in a state that it is dissolved in a solvent and may be filled in the nozzle through a pump or the like. Thereafter, a first voltage may be applied to the nozzle, the substrate 110 may be grounded, or a second voltage of the opposite polarity to the first voltage may be applied. For example, when the substrate 110 is grounded, the first voltage applied to the nozzle may be a high voltage of about 400V. Here, grounding the substrate 110 may mean not only directly grounding the substrate 110 but also grounding the substrate supporting portion supporting the substrate 110 during the manufacturing process.

As the first voltage is applied to the nozzle, electric dipoles of the piezoelectric material in the solution state are aligned at this time, resulting in a bias in the electric charge. That is, as the solution passes through the nozzle to which the high voltage is applied, the anions are moved to the nozzle surface acting as the anode, and the cations dissolved in the solution are repelled by the liquid curved surface formed on the nozzle tip do. This phenomenon is referred to as charge separation phenomenon. When the first voltage applied to the nozzle is a high voltage, the mutual repulsive force of the electric force and the positive ions becomes greater than the surface tension of the solution, and droplets are split and emitted from the nozzle tip. At this time, the piezoelectric material that is radiated through the nozzle can be charged with an electric charge having the same polarity as the first voltage. Here, a cone-shaped liquid curved surface is formed in the nozzle tip, which is called a Taylor cone. The emitted piezoelectric material moves in the direction of the substrate 110 to which the second voltage having the opposite polarity to the first voltage is applied or grounded. During the electrospinning process, the liquid piezoelectric material is arranged on the substrate 110 in the form of nanofibers, accompanied by the volatilization of the solvent before reaching the substrate 110.

When manufacturing the touch sensing device 100 according to an embodiment of the present invention, a plurality of piezoelectric nanofibers 140 may be formed parallel to each other by shortening the distance between the nozzle and the substrate 110. For example, when the distance between the nozzle and the substrate 110 is set to 50 to 500 mu m and the electrospinning process is performed, a plurality of piezoelectric nanofibers 140 are formed on the substrate 110 so as to be aligned in one direction . Accordingly, the space between the plurality of piezoelectric nanofibers 140 can be sufficiently secured, and the contact-sensitive device 100 including the piezoelectric nanofibers 140 can be realized to have a high transmittance of 90% or more. That is, when the distance between the nozzle and the substrate 110 is larger than 500 mu m, the piezoelectric nanofibers 140 may be aligned in a random direction so that the transmittance of the contact-sensitive element 100 may be very low, When the distance between the substrates 110 is less than 50 mu m, it can be very difficult to control the piezoelectric nanofibers 140 to be aligned in a desired position and direction.

In addition, the piezoelectric nanofiber 140 is formed of a fiber having a highly crystalline? -Phase. As described above, when the piezoelectric nanofiber 140 is manufactured through the electrospinning method, a high voltage is applied to the nozzle during the manufacturing process and the spinning is performed. Accordingly, since the piezoelectric nanofiber 140 automatically has a high-crystallinity? -Phase during the manufacturing process, an extrusion process, a drawing process, a poling process, or the like, which is a process for imparting piezoelectricity to a commonly used PVDF material Is unnecessary.

The piezoelectric nanofibers 140 are arranged to be polarized in the longitudinal direction. That is, since a high voltage is applied to the nozzle in the manufacturing process of the piezoelectric nanofiber 140 through the electrospinning method, one side of the piezoelectric nanofiber 140 is automatically positively charged and the other side is negatively charged align. The piezoelectric nanofibers 140 are polarized in the longitudinal direction and polarities of portions of the piezoelectric nanofibers 140 in contact with the first electrode 120 and portions in contact with the second electrode 130 may be different from each other have.

Referring to FIG. 1 again to explain the driving method of the touch sensing device 100, the first electrode 120 and the second electrode 130 in the plurality of cells CE are electrically connected to the first electrode 120 and the second electrode 130, respectively. A wiring 161 and a second wiring 162 are formed on the substrate 110. Specifically, the first wiring 161 is electrically connected to the first electrode 120 in the plurality of cells CE, the second wiring 162 is electrically connected to the second electrode 130 in the plurality of cells CE, And is electrically connected. The first wiring 161 and the second wiring 162 may be formed of the same material as the first electrode 120 and the second electrode 130 or may be made of different materials. When the first wiring 161 and the second wiring 162 are made of the same material as the first electrode 120 and the second electrode 130, the first wiring 161 and the second wiring 162 are formed in the first And may be formed simultaneously with the electrode 120 and the second electrode 130.

An FPCB (Flexible Printed Circuit Board) 151 is disposed on one side of the substrate 110. The FPCB 151 is electrically connected to the first wiring 161 and the second wiring 162. The FPCB 151 is electrically connected to the first electrode 120 through the first wiring 161 and the second wiring 162, And a wiring for applying a voltage to the second electrode 130 may be formed. The FPCB 151 is electrically connected to a separate PCB (Printed Circuit Board) 152. That is, the wiring of the FPCB 151 is electrically connected to the wiring formed on the PCB 152, and is electrically connected to the first electrode (not shown) of the contact sensing device 100 through the circuit part 153 such as a driving IC, A voltage may be applied to the first electrode 120 and the second electrode 130. Although the circuit unit 153 is illustrated as being embedded in the PCB 152 in FIG. 1, the circuit unit 153 may be embedded in the FPCB 151 such as a chip on film (COF).

The touch sensing device 100 according to an embodiment of the present invention can be driven as follows. For example, when tactile feedback is to be transmitted through one cell CE of the substrate 110, the first electrode 120 of the cell CE is connected to the first electrode 120 electrically connected to the first electrode 120, The first voltage is applied through the wiring 161 and the second voltage is applied to the second electrode 130 of the cell CE through the second wiring 162 electrically connected to the second electrode 130 . For example, an AC voltage having a specific frequency is applied to one electrode of the first electrode 120 and the second electrode 130, and the other electrode is grounded, so that the first electrode 120 and the second electrode 130 130 may be generated. The electric potential is applied to the piezoelectric nanofibers 140 disposed in the corresponding cells CE of the contact sensing element 100 to cause the piezoelectric nanofibers 140 to vibrate so that the user can feel the tactile feedback . The first wiring 161 and the second wiring 162 are directly connected to the first electrode 120 and the second electrode 130. The present invention is not limited to this, A plurality of thin film transistors electrically connected to the first electrode 120 and the second electrode 130 may be disposed and the first electrode 120 and the second electrode 130 may be formed by a method of receiving a voltage from the thin film transistor .

In the case of ERM or LRA conventionally used for transmitting tactile feedback to the user, there is a problem that it can not be disposed on the front surface of the display panel because it is made of opaque material. A touch sensitive device for transmitting tactile feedback to a user has also been studied by forming electrodes on upper and lower transparent electroactive layers and generating an electric field in the electroactive layer by applying a voltage to the electrodes. However, even though the electroactive layer and the electrodes are made of a transparent material, the light incident on the contact sensitive device must transmit through both the electroactive layer, the electrode disposed on the electroactive layer, and the electrode disposed under the electroactive layer, Respectively.

The touch sensing device 100 according to an embodiment of the present invention includes a first electrode 120 and a second electrode 130 disposed on both sides of a substrate 110 and a first electrode 120 and a second electrode 130, The piezoelectric nanofibers 140 are disposed between the first electrode 130 and the second electrode 130, so that the transmittance of the contact-sensitive device 100 can be improved. That is, only the substrate 110 and the piezoelectric nanofiber 140 can transmit light incident on the contact-sensitive element 100, and in particular, the piezoelectric nanofiber 140 is a very thin fiber having a diameter of several tens to several hundreds of nanometers , More light can pass through the piezoelectric nanofibers 140 than when light passes through the electrodes. In the touch sensing device 100 according to an embodiment of the present invention, the piezoelectric nanofibers 140 may be aligned in one direction and disposed parallel to each other, so that loss of permeability due to the contact sensing device 100 may be minimized have.

Also, the touch sensing device 100 according to an embodiment of the present invention can be implemented to enable low power driving. First, since the piezoelectric nanofiber 140 generating vibration in the contact sensing element 100 has a very small diameter, strong vibrations can be generated even at a driving voltage lower than that in the case where vibration is generated using the electroactive layer have. Further, since the piezoelectric nanofiber 140 is applied with a high voltage in the process of forming the piezoelectric nanofiber 140 by the electrospinning method, the piezoelectric nanofiber 140 may have a highly crystalline? -Phase. In addition, one end of the piezoelectric nanofiber 140 can be automatically positively charged while the other end is self-aligned during the manufacturing process. Thus, the piezoelectric nanofibers 140 are polarized and arranged in the longitudinal direction. Therefore, the desired vibration intensity can be obtained even at low power driving by the characteristics of the piezoelectric nanofiber 140 as described above. Particularly, the first electrode 120 is electrically connected to one end of the piezoelectric nanofiber 140 in accordance with the self-aligned dipole direction of the piezoelectric nanofiber 140, and the second electrode 130 is electrically connected to the piezoelectric nanofiber 140 And the other end thereof. In this case, when voltages of different polarities are applied to the first electrode 120 and the second electrode 130 in consideration of the polarities of both ends of the piezoelectric nanofibers 140, the contact-sensitive element 100 is more improved Power characteristics.

Meanwhile, in order to manufacture a touch sensitive device that transmits tactile feedback to a user by using the above-described electroactive layer, an extrusion process, a stretching process, and a polling process, which are processes for imparting piezoelectricity to the electroactive layer, are required. Followed by various post-processes such as a lamination process. However, in the case of the touch sensing device 100 according to an embodiment of the present invention, the piezoelectric nanofibers 140 may be formed by directly radiating on the substrate 110 by, for example, an electrospinning method. Therefore, the piezoelectric nanofiber 140 can be formed only by the electrospinning process, so that convenience in the manufacturing process can be improved.

3A and 3B are schematic enlarged plan views for explaining a contact-sensitive element according to another embodiment of the present invention. 3A and 3B each show only the first cell CE1 and the second cell CE2 which can be applied to the contact-sensitive elements 300A and 300B. The contact sensitive devices 300A and 300B shown in FIGS. 3A and 3B are different from the contact sensitive device 100 shown in FIGS. 1 and 2B in that the first electrodes 320A and 320B and the second electrodes 330A And 330B are different from each other only in the lengths of the piezoelectric nanofibers 340A and 340B, and the other components are substantially the same, so redundant description is omitted.

3A, a first electrode 320A includes a plurality of first sub-electrodes 321A, 322A, 323A, 324A, 325A, and 326A in a first cell CE1, 330A includes a plurality of second sub-electrodes 331A, 332A, 333A, 334A, 335A, 336A. A plurality of first sub-electrodes 321A, 322A, 323A, 324A, 325A, and 326A and a plurality of second sub-electrodes 331A, 332A, 333A, 334A, 335A, and 336A are spaced apart from each other. Each of the first sub-electrodes 321A, 322A, 323A, 324A, 325A, and 326A includes a plurality of second sub-electrodes 331A, 332A, 333A, 334A, 335A, and 336A by piezoelectric nanofibers 340A. Respectively. At this time, the plurality of piezoelectric nanofibers 340A are arranged so as to be parallel to each other.

The first sub-electrodes 321A, 322A, 323A, 324A, 325A and 326A, the second sub-electrodes 331A, 332A, 333A, 334A, 335A and 336A and the first sub- The piezoelectric nanofibers 340A contacting the second sub-electrodes 331A, 332A, 333A, 334A, 335A, and 336A may be defined as one vibration unit. For example, the first sub-electrode 321A disposed at the uppermost position in the first cell CE1, the second sub-electrode 331A disposed at the uppermost position, and the first sub-electrode 321A and the second sub-electrode 331A The piezoelectric nanofibers 340A that are in contact with the first sub-electrode 321A and the second sub-electrode 331A can independently generate vibration as voltages are applied to the first sub-electrode 321A and the second sub-electrode 331A.

The touch sensing device 300 according to another embodiment of the present invention may provide various levels of tactile feedback in one of the plurality of cells, for example, the first cell CE1. For example, when only a part of the six vibration units disposed in the first cell CE1 is driven, a low level vibration can be provided, and all of the six vibration units disposed in the first cell CE1 are driven A high level of vibration can be provided. That is, when n vibration intensity levels are to be transmitted to the user in the first cell CE1, n first sub-electrodes and n second sub-electrodes are connected to the first cell CE1 of the contact- And the contact-sensitive element 300 can be manufactured by a method of forming the piezoelectric nanofibers 340A electrically connecting the first sub-electrode and the second sub-electrode. Therefore, a desired level of vibration can be transmitted to the user by applying a voltage to the desired number of first sub-electrodes and second sub-electrodes.

Referring to FIG. 3B, in the second cell CE2, the first electrode 320B includes a plurality of first sub-electrodes 321B, 322B, 323B, 324B, 325B, and 326B, (330B) includes a plurality of second sub-electrodes (331B, 332B, 333B, 334B, 335B, 336B). The plurality of first sub-electrodes 321B, 322B, 323B, 324B, 325B and 326B and the plurality of second sub-electrodes 331B, 332B, 333B, 334B, 335B and 336B are spaced apart from each other, 340B. When the arrangement of the electrodes of the first cell CE1 and the second cell CE2 is compared, the first electrode 320A and the second electrode 330A, which are disposed in the first cell CE1, The first electrode 320B and the second electrode 330B disposed in the second cell CE2 are spaced apart from each other by a second interval L2 and the first interval L1 is spaced apart from the second interval (L2). That is, the piezoelectric nanofibers between the first sub-electrodes 321A, 322A, 323A, 324A, 325A, 326A and the second sub-electrodes 331A, 332A, 333A, 334A, 335A, 336A in the first cell CE1, 322B, 323B, 324B, 325B, 326B and the second sub-electrodes 331B, 332B, 333B, 334B, 335B, 336B in the second cell CE2, Is longer than the length of the piezoelectric nanofibers 340B. Here, the length of the piezoelectric nanofiber between the first sub electrode and the second sub electrode means the length of the remaining portion of the piezoelectric nanofiber excluding the portion overlapping the first sub electrode and the second sub electrode.

As described above, in the touch sensing device 300 according to another embodiment of the present invention, between the first electrodes 320A and 320B and the second electrodes 330A and 330B disposed for the plurality of cells CE1 and CE2, The distance can be different. That is, the length of the piezoelectric nanofibers 340AB between the first electrodes 320A and 320B and the second electrodes 330A and 330B may be different for each of the cells CE1 and CE2. Accordingly, the touch sensing device 300 according to another embodiment of the present invention can transmit haptic feedback with a different feeling to each of the cells CE1 and CE2. In detail, the contact sensing element 300 adjusts the length of the piezoelectric nanofibers 340AB connecting the first electrodes 320A and 320B and the second electrodes 330A and 330B, and adjusts the length of the piezoelectric nanofibers 340AB for each of the cells CE1 and CE2 Output vibrations of different vibration frequencies can be obtained.

The vibration frequency f of the piezoelectric nanofiber is affected by the weight M, the length L and the tension F of the piezoelectric nanofiber. The expression is expressed by Equation 1 below.

[Equation 1]

Referring to Equation (1), as the length (L) of the piezoelectric nanofiber increases, the vibration frequency decreases and a slower vibration occurs. As the length (L) of the piezoelectric nanofiber decreases, the vibration frequency increases, Lt; / RTI > Theoretically, if the length L of the piezoelectric nanofiber is reduced to 1/2, the weight M of the piezoelectric nanofiber is also reduced to 1/2. Therefore, when the length L of the piezoelectric nanofiber is reduced to 1/2, the vibration frequency f is doubled. When the length (L) of the piezoelectric nanofiber is doubled, the weight (M) of the piezoelectric nanofiber is also doubled, so that the vibration frequency is 1/2.

Referring to Equation (1), vibration frequencies of different magnitudes can be output in the first cell (CE1) and the second cell (CE2) shown in FIGS. 3A and 3B, respectively. That is, the length L1 of the piezoelectric nanofibers 340A between the first electrode 320A and the second electrode 330A in the first cell CE1 is smaller than the length L1 of the piezoelectric nanofibers 340A between the first electrode 320B And the length L2 of the piezoelectric nanofibers 340B between the second electrode 330B and the second electrode 330B. Therefore, when the touch sensing device 300 is driven, the input frequencies of the voltages input to the first cell CE1 and the second cell CE2 are the same, but the vibration frequency in the first cell CE1 is the same as the input frequency of the second cell CE2 ) Is smaller than the oscillation frequency in Fig. Accordingly, the touch sensing device 300 according to another embodiment of the present invention vibrates the piezoelectric nanofibers 340B disposed in the second cell CE2 to generate a strong vibration force at a high frequency, Can be driven in such a manner as to vibrate the piezoelectric nanofibers 340A disposed in the first cell CE1 to generate a vibration force, and thus can transmit tactile feedback of a different feeling to the user. For example, in order to transmit harsh tactile feedback such as touching gravel, beads, etc., the user vibrates the piezoelectric nanofibers 340A disposed in the first cell CE1 having a small vibration frequency, The touch sensitive device 300 can be driven in such a manner as to vibrate the piezoelectric nanofibers 340B disposed in the second cell CE2 having a large vibration frequency.

Further, in the touch sensing device 300 according to another embodiment of the present invention, since various vibration frequencies can be obtained by the length of the piezoelectric nanofibers 340A and 340B when AC voltage of the same frequency is applied, Is not required. In the conventional touch sensing device 300, a variable frequency circuit capable of outputting each frequency is used in order to transmit tactile feedback of a different feeling to the user. However, there is a problem that such a variable frequency circuit is very complicated and the area occupied by the contact sensitive device 300 is wide. However, in the touch sensing device 300 according to another embodiment of the present invention, since various vibration frequencies can be obtained by varying the lengths of the piezoelectric nanofibers 340A and 340B even if the same voltage source is used, The driving circuit of the contact sensitive element 300 can be designed easily.

3A and 3B, the touch sensing device 300 includes a plurality of cells CE1 and CE2 and the first electrodes 320A and 320B and the second electrodes 330A and 330B in each of the cells CE1 and CE2. The intervals between the first electrodes 320A and 320B and the second electrodes 330A and 330B in the plurality of cells CE1 and CE2 are equal to each other You may.

Hereinafter, FIGS. 4A and 4B will be referred to together with the measurement result of the vibration frequency with respect to the length of the piezoelectric nanofiber as described above.

FIGS. 4A and 4B are schematic enlarged plan views for explaining the measurement results of the vibration frequency with respect to the length of the piezoelectric nanofibers. FIG.

4A is a plan view of the touch sensing device 400A according to the first embodiment, and the length L of the piezoelectric nanofibers 140 is 6 cm. 4B is a plan view of the touch sensing device 400B according to the second embodiment, wherein the length (L / 2) of the piezoelectric nanofibers 140 is 3 cm. 4A and 4B, the width W1 of the region where the piezoelectric nanofibers 140 are arranged is equal to 6 cm. In Examples 1 and 2, the first substrate 110 made of glass and having a thickness of 1.5 mm was used. In the first and second embodiments, the first electrode 120 disposed at one end of the piezoelectric nanofibers 140 is disposed at both the upper and lower ends of the piezoelectric nanofibers 140, And the second electrode 130 disposed at the other end is disposed at both the upper and lower ends of the piezoelectric nanofibers 140. The first electrode 120 and the second electrode 130 are all made of ITO, and the thickness of the first electrode 120 and the second electrode 130 is 50 nm.

An input voltage of sine wave of AC 1000V was applied to the first electrode 120 of the touch sensing devices 400A and 400B according to the first and second embodiments and the second electrode 130 was grounded . The frequency of the input voltage is 100 Hz. When the input voltage as described above is applied, the vibration frequency and the vibration acceleration in the first and second embodiments are as shown in Table 1 below.

Vibration frequency Vibration acceleration Example 1 100Hz 0.45G Example 2 212Hz 0.21G

The length L / 2 of the piezoelectric nanofibers 140 in the contact sensitive device 400B according to the second embodiment is the same as the length L / 2 of the piezoelectric nanofibers 140 in the contact sensor 400A according to the first embodiment, ). Therefore, the weight of the piezoelectric nanofiber 140 in the contact sensitive element 400B according to the second embodiment is also half the weight of the piezoelectric nanofiber 140 in the contact sensitive element 400A according to the first embodiment. Based on the above equation (1), the vibration frequency in the contact-sensitive element 400B according to the second embodiment is theoretically twice the vibration frequency in the contact-sensitive element 400A according to the first embodiment. However, with reference to Table 1, it was measured that the vibration frequency in the contact sensitive device 400B according to the second embodiment is 2.12 times the vibration frequency in the contact sensitive device 400A according to the first embodiment. There are some differences between the theoretical result and the experimental result, but this is due to an error that may occur in the process of manufacturing the contact sensitive devices 400A and 400B, and the vibration frequency in the contact sensitive devices 400A and 400B is It can be confirmed that the length of the piezoelectric nanofiber 140 is inversely proportional to the length of the piezoelectric nanofiber 140.

On the other hand, referring to Table 1, it was measured that the vibration acceleration in the second embodiment is about 47% of the vibration acceleration in the first embodiment. As the length of the piezoelectric nanofiber 140 is reduced to 1/2, the vibration acceleration is proportionally reduced. The length of the piezoelectric nanofibers 140 of the contact sensitive elements 400A and 400B is reduced and the vibrational units disposed on the contact sensitive elements 400A and 400B, The number of groups composed of the piezoelectric nanofibers 130 and the piezoelectric nanofibers 140 can be increased to acquire the vibration frequency of the high frequency and to maintain the value of the vibration acceleration.

5 is a schematic enlarged plan view for explaining a touch sensing device according to another embodiment of the present invention. The contact sensing element 500 shown in FIG. 5 is different from the contact sensing element 300 shown in FIGS. 3A and 3B in that the arrangement of the first electrode 520 and the second electrode 530 and the arrangement of the piezoelectric nanofibers 540 ), And the other components are substantially the same, so redundant explanations are omitted. In FIG. 5, only one cell CE among a plurality of cells CE is shown for convenience of explanation.

5, a plurality of first sub-electrodes 521, 522, 523, 524, 525, and 526 of the first electrode 120 and a plurality of second sub- The distances L1, L2, L3, L4, L5, and L6 between the two sub-electrodes 531, 552, 533, 534, 535, That is, the first sub-electrode 521 is separated from the second sub-electrode 531 electrically connected by the first piezoelectric nanofibers 541 by a first gap L1, and the first sub- 2 piezoelectric nanofiber 542. The second sub-electrode 532 is electrically separated from the first sub-electrode 532 by a second gap L2. The first sub-electrode 523 is spaced apart from the second sub-electrode 533 electrically connected by the third piezoelectric nanofibers 543 by a third gap L3. The first sub- The fourth sub-electrode 525 is separated from the second sub-electrode 534 electrically connected by the fourth piezoelectric nanofiber 544 by a fourth interval L4 and the first sub-electrode 525 is electrically separated by the fifth piezoelectric nanofiber 544 The first sub-electrode 526 is separated from the second sub-electrode 535 by a fifth interval L5 and the second sub-electrode 536 electrically connected by the sixth piezoelectric nanofibers 546 and the sixth sub- And is spaced apart by an interval L6. Therefore, the distance between the first sub-electrodes 521, 522, 523, 524, 525, 526 electrically connected to each other and the second sub-electrodes 531, 532, 533, 534, 535, They may be different from each other. The piezoelectric nanofibers 541, 542, 543, and 544 between the first sub-electrodes 521, 522, 523, 524, 525, 526 and the second sub-electrodes 531, 532, 533, 534, 535, 545 and 546 may be different for each sub electrode pair in which the respective piezoelectric nanofibers 541, 542, 543, 544, 545 and 546 are electrically connected.

In the touch sensing device 500 according to another embodiment of the present invention, tactile feedback of various senses can be transmitted in one cell CE. For example, in order to transmit haptic feedback corresponding to a high vibration frequency to a user in one cell CE of the contact-sensitive element 500, a first sub-electrode electrically connected to the piezoelectric nanofiber having a relatively short length, In order to generate a high vibration frequency by applying a voltage to two sub-electrodes and transmit tactile feedback corresponding to a low vibration frequency to the user, a first sub-electrode electrically connected to the piezoelectric nanofiber having a relatively long length, A low vibration frequency can be generated. Accordingly, a plurality of first sub-electrodes 521, 522, 523, 524, 525, 526 and a plurality of second sub-electrodes 531, 532, 533, 534, 535, 536, The tactile feedback of various senses can be provided to the user in one cell CE.

6A and 6B are schematic enlarged plan views for explaining a touch sensitive element according to various embodiments of the present invention. The contact sensitive elements 600A and 600B shown in Figs. 6A and 6B are different from the contact sensitive element 300 shown in Fig. 3A only in that the piezoelectric nanofibers 640A and 640B are different from each other, So duplicate description is omitted. 6A shows only one cell CE of a plurality of cells CE, and FIG. 6B shows a first cell CE1 and a second cell CE2.

Referring to FIG. 6A, a plurality of first sub-electrodes 621, 622, 623, 624, 625, and 626 (first and second sub-electrodes) 621 and 622 that constitute a first electrode 620 and a second electrode 630, respectively, And the plurality of second sub-electrodes 631, 632, 633, 634, 635, and 636 may be electrically connected to each other by one piezoelectric nanofiber 640A.

The nozzle used in the electrospinning method reciprocates between the positions where the first electrode 620 and the second electrode 630 are to be disposed so as to form the piezoelectric nanofibers 640A, ). ≪ / RTI > For example, the nozzle radiates the piezoelectric nanofibers 640A while reciprocating between the positions where the first sub-electrode 621 and the second sub-electrode 631 are to be arranged. When the piezoelectric nanofibers 640A are completely spun between the positions where the first sub-electrode 621 and the second sub-electrode 631 are to be disposed, the nozzles are spaced apart from the neighboring first sub-electrode 622 and the second sub- 662 and radiates the piezoelectric nanofibers 640A continuously. At this time, since the nozzle radiates the piezoelectric nanofibers 640A continuously without stopping the spinning, the piezoelectric nanofibers 640A are also emitted between the adjacent first sub-electrodes 621 and 622 and between the second sub-electrodes 631 and 662, (640A) may be disposed. When the piezoelectric nanofiber 640A is radiated while the nozzle reciprocates and moves in the above-described manner, a plurality of first sub-electrodes 621, 622, and 623 in one cell CE, as shown in FIG. 6A, 624, 625 and 626 and the plurality of second sub-electrodes 631, 632, 633, 634, 635 and 636 can be electrically connected by one piezoelectric nanofiber 640A. When the piezoelectric nanofiber 640A having the above-described structure is formed by using the electrospinning method, the piezoelectric nanofiber 640A disposed in one cell CE can be easily and easily .

Referring to FIG. 6B, a plurality of first sub-electrodes 621, 622, 623, and 624 (first and second sub-electrodes) 621 and 622 that constitute a first electrode 620 and a second electrode 630 disposed in neighboring cells CE1 and CE2, 625 and 626 and the plurality of second sub-electrodes 631, 632, 633, 634, 635 and 636 may be electrically connected to each other by a single piezoelectric nanofiber 640B. For example, as shown in FIG. 6B, a plurality of first sub-electrodes 621, 622, 623, 624, 625, 622, 626 and the plurality of second sub-electrodes 631, 632, 633, 634, 635, 636 may be electrically connected by one piezoelectric nanofiber 640B. When the electrospinning process of the piezoelectric nanofibers 640B with respect to the first cell CE1 is completed in the manner as described with reference to FIG. 6A, the first cell CE1 and the column direction The electrospinning to the adjacent second cell CE2 can be continuously performed. Accordingly, a plurality of first sub-electrodes 621, 622, 623, 624, 625, and 626 disposed in the first cell CE1 and the second cell CE2 adjacent to each other in the column direction, The piezoelectric layers 631, 632, 633, 634, 635, and 636 may be electrically connected to each other by one piezoelectric nanofiber 640B. Therefore, the piezoelectric nanofibers 640B disposed in the plurality of cells CE1 and CE2 can be easily and easily formed through one electrospinning process. Although the piezoelectric nanofibers 640B are continuously formed over the plurality of cells CE1 and CE2, only the first electrode 620 and the second electrode 630 disposed in the first cell CE1 are energized When no voltage is applied to the first electrode 620 and the second electrode 630 disposed in the second cell CE2, only the piezoelectric nanofibers 640B disposed in the first cell CE1 are energized The piezoelectric nanofibers 640B are formed over the plurality of cells CE1 and CE2, but there is no problem in independent operation for each of the cells CE1 and CE2.

Although not shown in FIGS. 6A and 6B, in some embodiments, a plurality of first sub-electrodes and a plurality of second sub-electrodes disposed in a plurality of cells adjacent to each other in the row direction are electrically Can be connected. That is, when the piezoelectric nanofiber is formed by the method in which the nozzle continues to move in the row direction and electrospunning the piezoelectric nanofibers, a plurality of first sub-electrodes and a plurality of second sub- Or may be electrically connected by nanofibers.

7 is a schematic enlarged plan view for explaining a contact-sensitive element according to another embodiment of the present invention. 7, the shape and arrangement of the first electrode 720 and the second electrode 730 are different from that of the contact-sensitive element 300 shown in FIG. 3A, and the piezoelectric nanofiber 700 shown in FIG. The lengths of the first and second electrodes 740 and 740 are different, and the other elements are substantially the same. For convenience of explanation, only one cell CE among a plurality of cells CE is shown in FIG.

Referring to Fig. 7, the cell CE includes a first area A1 and a second area A2. The first region A1 is a region for transmitting tactile feedback to the user and includes a first electrode 720 including a plurality of first sub-electrodes 721, 722, 723, and 724, a plurality of second sub- The first electrode 730 and the second electrode 730 are electrically connected to each other in the first region A1 and the second electrode 730 is electrically connected to the second electrode 730. [ . The second region A2 is a region for securing the transmittance of the touch sensing device 700. In the second region A2, a first electrode 720, a second electrode 730, The nanofibers 740 are not disposed.

In the touch sensing device 700 according to another embodiment of the present invention, a voltage is applied to the first electrode 720 and the second electrode 730 disposed in the first area A1 of each cell CE Tactile feedback can be delivered to the user by vibrating the piezoelectric nanofiber 740 in a method. The number of pairs of voltage applied to the first sub-electrodes 721, 722, 723, and 724 and the plurality of second sub-electrodes 731, 732, 733, and 734 may be adjusted, Can be provided. The first electrode 720, the second electrode 730 and the piezoelectric nanofibers 740 are disposed only in the first region A1 that is not the entire region of the cell CE, The light incident on the second region A2 only needs to be transmitted through the substrate 110 so that the transmittance of the contact sensitive device 700 can be improved.

8A is a schematic enlarged plan view for explaining a contact-sensitive element according to another embodiment of the present invention. 8B is a schematic cross-sectional view of the touch sensitive element according to VIIIb-VIIIb 'of FIG. 8A. The contact sensing element 800 shown in FIGS. 8A and 8B differs from the contact sensing element 300 shown in FIG. 3A only in the shape of the substrate 810, and the other elements are substantially the same, The description will be omitted. For convenience of explanation, only one cell CE of a plurality of cells CE is shown in Figs. 8A and 8B.

8A and 8B, the substrate 810 includes a recess portion 811 in one cell CE. That is, the substrate 810 has a trench structure whose upper surface is fine in one cell CE. The recessed portion 811 of the substrate 810 is formed so as to overlap the piezoelectric nanofibers 840. That is, a first electrode 820 including a plurality of first sub-electrodes 821, 822, 823, 824, 825, and 826 and a plurality of second sub-electrodes 831, 832, 833, 834, 835, And the piezoelectric nanofiber 840 is disposed on the substrate 810 so as to overlap with the recessed portion 811 to form the first electrode 830. The second electrode 830 is formed on each side of the recess portion 811 in the substrate 810, The first electrode 820 and the second electrode 830 are electrically connected to each other. Thus, the piezoelectric nanofibers 840 are spaced apart from the substrate 810 on the recessed portion 811.

The recess portion 811 of the substrate 810 can be formed through, for example, an etching process. That is, a trench structure may be formed in the substrate 810 by using a photolithography method or a surface etching method using a mask, so that the recessed portion 811 having the upper surface of the substrate 810 can be formed. However, the present invention is not limited thereto, and any process can be applied as long as the recess portion 811 can be formed on the substrate 810.

When the piezoelectric nanofiber 840 vibrates while being in contact with the one surface of the substrate 810, the amplitude of the piezoelectric nanofiber 840 may be limited. In addition, the vibration of the piezoelectric nanofiber 840 is absorbed by the substrate 810 rather than on the upper side, so that the intensity of the tactile feedback felt by the user is hardly maximized. In the touch sensing device 800 according to another embodiment of the present invention, the substrate 810 has a recess portion 811, and the piezoelectric nanofibers 840 are disposed on the recess portion 811 The piezoelectric nanofibers 840 can freely oscillate at a large amplitude and the vibration energy lost by the substrate 810 can be reduced and the vibration in the user direction can be further maximized.

The depth d of the recess portion 811 in the substrate 810 can be determined in consideration of the amplitude of the piezoelectric nanofiber 840. [ When the electric field is applied to the piezoelectric nanofiber 840, the piezoelectric nanofiber 840 vibrates up and down with a predetermined amplitude, and the depth d of the recess portion 811 is smaller than the amplitude of the piezoelectric nanofiber 840 It can have a large value. For example, the depth d of the recessed portion 811 may be 30 to 50 占 퐉.

8A, the recess portion 811 is shown to be formed in one cell CE, but the shape of the recess portion 811 is not limited thereto. For example, the recesses 811 in the plurality of cells CE may be connected to each other to form one unit. 6B, when the first cell CE1 and the second cell CE2 are adjacent to each other in the column direction, the recess portion 811 formed in the first cell CE1 and the second cell CE1, The recess portion 811 formed in the recess CE2 may be formed to be connected to each other, and the recess portion 811 may have a shape extending in the column direction.

8A and 8B, the substrate 810 is shown having the recess portion 811, but a separate spacer may be used to form the spacing space between the substrate 810 and the piezoelectric nanofiber 840 have. That is, the trench structure can be implemented by disposing the spacer corresponding to the protrusion of the substrate 810 on the substrate 810 having a uniform thickness in Fig. 8B. Further, a plurality of spacers are disposed on the substrate 810 having a uniform thickness, and the first electrode 820 and the second electrode 830 are formed by spinning the piezoelectric nanofibers 840 on the plurality of spacers , And the piezoelectric nanofibers 840 may be spaced apart from the substrate 810.

9A and 9B are schematic cross-sectional views for explaining a contact-sensitive element according to another embodiment of the present invention. 9A and 9B is different from the touch sensing device 800 shown in Figs. 8A and 8B only in that the supporting nodes 915A and 915B are added. In the touch sensing device 900 shown in Figs. 9A and 9B, Elements are substantially the same, so duplicate descriptions are omitted. 9A is a cross-sectional view of a first one of a plurality of cells of the touch sensing device 900, and FIG. 9B is a cross-sectional view of a second cell of the plurality of cells of the touch sensing device 900. FIG.

Referring to FIGS. 9A and 9B, support nodes 915A and 915B are disposed on recesses 811 on a substrate 810. The supporting nodes 915A and 915B are nodes for supporting a part of the piezoelectric nanofibers 840 disposed on the recessed portion 811 and are provided between the recessed portion 811 and the piezoelectric nanofibers 840, Is disposed to contact the fibers (840).

Support nodes 915A and 915B are made of an insulating material. Specifically, the support nodes 915A and 915B may be made of a transparent insulating material. Since the touch sensitive element 900 can be employed in a display device in a manner disposed at the front of the display panel, the support nodes 915A and 915B can be made of a transparent insulating material. For example, the support nodes 915A, 915B may be made of a plastic material of the glass, polyimide, or acrylic series.

In the touch sensing device 900 according to another embodiment of the present invention, the support nodes 915A and 915B for supporting the piezoelectric nanofibers 840 are disposed in the recesses 811 of the substrate 810, the oscillation frequency of the vibration provided in one cell can be variously set by using the overtone phenomenon.

The vibration frequency f of the piezoelectric nanofiber is affected by the harmonic order n, the weight M of the piezoelectric nanofiber, the length L and the tension F, 2.

&Quot; (2) "

Referring to Equation (2), as the harmonic order (n) increases, the vibration frequency increases and faster vibration occurs. As the harmonic order n decreases, the vibration frequency decreases and slower vibration occurs. Theoretically, when the harmonic order n is 2, the vibration frequency is twice the input frequency, and when the harmonic order n is 3, the vibration frequency is three times the input frequency.

With reference to Equation (2), the positions of the support nodes 915A and 915B can be variously set to change the vibration frequency.

First, to set the harmonic order (n) to 2, that is, there is a support node (915A) may be disposed at a central portion of the recess portion 811 to generate a second harmonic (2 ^nd harmonics). 9A, when the support node 915A is disposed at a position half of the width W of the recess portion 811, that is, when the piezoelectric nanofiber 840 ) Is vibrated, and a second harmonic wave can be generated. In this case, since the harmonic order n is 2, the vibration frequency can theoretically be twice the input frequency.

Further, in order to set the harmonic order n to 3, that is, the support node 915B is disposed at a point 1/3 of the width W of the recess portion 811 in order to generate the third harmonic (3 ^rd harmonics) As shown in FIG. 9B, when the support node 915B is disposed at a position that is 1/3 of the width W of the recess portion 811, the piezoelectric nanofibers 840 So that a third harmonic can be generated. In this case, since the harmonic order n is 3, the vibration frequency can theoretically be three times the input frequency.

In order to measure the vibration frequency according to the harmonic order n as described above, the contact-sensitive device according to Example 3 was manufactured. Specifically, the contact sensing device 900 having the structure shown in Fig. 9B configured to generate the third harmonic wave was manufactured. The width W of the recessed portion 811 is 6 cm and the length of the piezoelectric nanofibers 840 overlapping the recessed portion 811 is also 6 cm. The thickness of the protruding portion where the first electrode 820 and the second electrode 830 are disposed in the first substrate 810 is 1.5 mm and the thickness of the first electrode 820 in the recess portion 811 is 0.5 mm. The first substrate 810 is made of glass. The first electrode 820 disposed at one end of the piezoelectric nanofiber 840 is disposed at both the upper and lower ends of the piezoelectric nanofiber 840 and the second electrode 820 disposed at the other end of the piezoelectric nanofiber 840, The electrodes 830 are arranged to be disposed at both the upper and lower ends of the piezoelectric nanofibers 840. The first electrode 820 and the second electrode 830 are all made of ITO, and the thickness of the first electrode 820 and the second electrode 830 is 50 nm. The support node 915B is disposed at 1/3 of the width W of the recess portion 811 so that the third harmonic is generated. The width of the upper surface of the supporting node 915B is 100 mu m.

An input voltage of sine wave of AC 1000V was applied to the first electrode 820 of the touch sensing device 900 according to the third embodiment as described above and the second electrode 830 was grounded. The frequency of the input voltage is 100 Hz. When the input voltage as described above is applied, the vibration frequency and the vibration acceleration in the third embodiment are shown in the following Table 2.

Vibration frequency Vibration acceleration Example 3 350Hz 0.30G

In the contact sensitive device 900 according to the third embodiment, since the support node 915B is disposed at a position that is 1/3 of the width W of the recess portion 811, the third harmonic . Based on Equation (2), theoretically, the vibration frequency in the touch sensing device 900 according to the third embodiment is three times the vibration frequency in the touch sensing device 900 according to the first embodiment described above. However, with reference to Table 2, it was measured that the vibration frequency of the touch sensing device 900 according to the third example is 3.5 times the vibration frequency of the touch sensing device 900 according to the first embodiment. There are some differences between the theoretical results and the experimental results, but this is due to errors that may occur in the process of manufacturing the touch sensing device 900, and the vibration frequency in the touch sensing device 900 is the harmonic order n ). ≪ / RTI >

Based on the above description, vibration frequencies of different sizes may be output depending on the positions of the support nodes 915A and 915B disposed in one cell. That is, in the case of a cell where the support node 915A among the plurality of cells is arranged to generate the second harmonic (Fig. 9A) and a cell in which the support node 915B among the plurality of cells generates the third harmonic (Fig. 9B), vibration frequencies of different sizes can be output. Accordingly, tactile feedback of different senses can be transmitted in the cells where harmonics of different orders are generated.

The touch sensing device 900 according to another embodiment of the present invention can generate harmonics of different orders in each cell using the harmonic phenomenon. That is, a second harmonic can be generated in the first cell of the plurality of cells, and a third harmonic can be generated in the second cell of the plurality of cells. In addition, the positions of the support nodes 915A and 915B disposed in the plurality of cells CE can be changed to generate harmonics of a desired order. Accordingly, the touch sensing device 900 can generate vibrational frequencies of different sizes for a plurality of cells, thereby providing various tactile feedbacks to the user. Further, in the touch sensing device 900 according to another embodiment of the present invention, various vibration frequencies can be easily output by a simple process of arranging the support nodes 915A and 915B in the recessed portion of the substrate 810 .

9A and 9B, a method of disposing separate support nodes 915A and 915B physically separated from the substrate 810 is used. However, in some embodiments, the substrate 810 itself may be disposed within the recess 811 It may have more than one protrusion. That is, when the recessed portion 811 of the substrate 810 is formed, a surface etching method using a photolithography method or a mask is performed so that the substrate 810 has a protruding portion in the recessed portion, Protrusions can be formed and the protrusions can contact the piezoelectric nanofibers 840 to perform the functions of the support nodes 915A and 915B described above.

10 is a schematic cross-sectional view for explaining a display device according to an embodiment of the present invention. 10, the display device 1000 includes a display panel 1010, a touch sensitive device 800, a touch panel 1080, a cover 1070, and a spacer 1090. [

Referring to FIG. 10, a display panel 1010 is disposed below a display device 1000. The display panel 1010 refers to a panel in which a display device for displaying an image on the display device 1000 is disposed. As the display panel 1010, for example, various display panels such as an organic light emitting display panel, a liquid crystal display panel, an electrophoretic display panel, and the like can be used.

On the display panel 1010, a contact-sensitive element 800 including piezoelectric nanofibers 840 is disposed. In Fig. 10, the contact sensing element 800 is shown as the contact sensing element 800 shown in Figs. 8A and 8B, but the present invention is not limited thereto. The contact sensing element 800 shown in Figs. 1 to 3B, 5 to 9B Any one of the touch sensitive elements 800 of the sensitive elements can be applied to the display apparatus 1000. [

10, a substrate 810 having a first electrode 820, a second electrode 830 and a piezoelectric nanofiber 840 electrically connecting the first electrode 820 and the second electrode 830 is disposed. Is opposed to the display panel 1010. The display panel 1010 includes a display panel 1010, 10, when the first electrode 820, the second electrode 830 and the piezoelectric nanofibers 840 are disposed on the upper surface of the substrate 810 of the touch sensing device 800, The lower surface of the substrate 810 of the element 800 is arranged so as to face the display panel 1010. [

A touch panel 1080 is disposed on the touch sensitive device 800. The touch panel 1080 refers to a panel that senses a user's touch input to the display device 1000. As the touch panel 1080, for example, a capacitance type, a resistive type, an ultrasonic type, an infrared type, or the like can be used, but it is preferable that the capacitive touch panel 1080 is used as the touch panel 1080 .

Referring to FIG. 10, a spacer 1090 is disposed between the touch sensing device 800 and the touch panel 1080. The spacer 1090 may be disposed between the touch panel 1080 and the first electrode 820 and the second electrode 830 of the touch sensitive device 800 as shown in Fig. Or between the substrate 810 of the touch panel 800 and the touch panel 1080. The spacer 1090 is made of an insulating material, and may further include an adhesive material. Accordingly, the touch sensitive device 800 and the touch panel 1080 can be fixed by the spacer 1090. [

As the spacer 1090 is disposed between the touch sensing element 800 and the touch panel 1080, the piezoelectric nanofibers 840 can freely oscillate at a large amplitude. 10, when the substrate 810 has the recess portion 811, a space is also present between the substrate 810 and the piezoelectric nanofibers 840, and the piezoelectric nanofibers 840, And the touch panel 1080. [0216] FIG. Therefore, the vibration of the piezoelectric nanofibers 840 can occur freely, so that the vibration energy lost by the substrate 810 or the touch panel 1080 is reduced, and the vibration in the user direction can be further maximized.

The area of each cell of the touch sensing device 800 may be determined in consideration of the area of the pixel of the touch panel 1080. [ For example, when the area of the cell of the touch sensing device 800 is determined in the same manner as the pixel of the touch panel 1080 in which the touch input of the user is sensed, the touch panel 1080 senses the touch sensitivity of the touch sensing device 800, The cell of the contact sensing element 800 can be matched with 1: 1, so that the contact sensing element 800 can be driven more easily.

A cover 1070 is disposed on the touch panel 1080. The cover 1070 is a structure for protecting the display apparatus 1000 from an impact from the outside of the display apparatus 1000. The cover 1070 may be made of a transparent insulating material.

The adhesive layer may be disposed between the display panel 1010 and the touch sensitive device 800 and between the touch panel 1080 and the cover 1070, although not shown in FIG. The adhesive layer may be, for example, an optical clear adhesive (OCA) or an optical clear resin (OCR), but is not limited thereto.

10, in a display device 1000 according to an embodiment of the present invention, piezoelectric nanofibers 840 are formed on an upper surface of a touch sensing device 800 that is relatively adjacent to a cover 1070 to which a user touches . Thus, stronger vibration can be transmitted to the user even at a low driving voltage, as compared with the case where the piezoelectric nanofiber 840 is disposed on the lower surface of the touch sensing device 800 relatively far from the cover 1070.

The high voltage of about 400 V is applied to the first electrode 820 or the second electrode 830 of the touch sensing device 800 in order to drive the touch sensing device 800 as described above. Therefore, the display panel 1010 can be abnormally driven by the high voltage applied to the first electrode 820 or the second electrode 830. For example, when the display panel 1010 is the liquid crystal display panel 1010, the electric field between the first electrode 820 and the second electrode 830, which is generated by the high voltage, May not be changed in a desired direction, so that interference may occur in the liquid crystal display panel 1010. FIG. A shielding layer such as a transparent conductive film is disposed between the display panel 1010 and the contact sensitive element 800 to prevent noise signals from the contact sensitive element 800 from being transmitted to the display panel 1010 side. .

However, in the touch sensing device 800 included in the display device 1000 according to an embodiment of the present invention, the first electrode 820 and the second electrode 830 of the touch sensing device 800 and the display panel 1010 The substrate 810 of the contact sensing element 800 is disposed. Accordingly, the substrate 810 of the touch sensing device 800 can perform the same function as the shielding layer. Therefore, in the display apparatus 1000 according to the embodiment of the present invention, abnormal driving of the display panel 1010, which may be caused by the voltage applied to the first electrode 820 or the second electrode 830, is suppressed And the thickness of the display device 1000 can be minimized since a separate shielding layer is not required.

11 is a schematic cross-sectional view illustrating a display device according to another embodiment of the present invention. The display device 1100 shown in Fig. 11 differs from the touch display device 1000 shown in Fig. 10 only in the fixing means between the touch sensitive device 800 and the touch panel 1080, Are omitted because they are substantially the same.

Referring to FIG. 11, an adhesive layer 1190 is disposed between the touch sensing device 800 and the touch panel 1080. The adhesive layer 1190 may be disposed between the first electrode 820 and the second electrode 830 of the touch sensitive device 800 and the touch panel 1080 as shown in FIG. Or between the substrate 810 of the touch panel 800 and the touch panel 1080. Accordingly, the touch sensitive device 800 and the touch panel 1080 can be fixed by the adhesive layer 1190. [ As the adhesive layer 1190, for example, OCA may be used, but it is not limited thereto.

Since the adhesive layer 1190 is disposed between the touch sensing device 800 and the touch panel 1080 in the display device 1100 according to another embodiment of the present invention, 1080). ≪ / RTI > 11, when the piezoelectric nanofiber 840 contacts the adhesive layer 1190 and the adhesive layer 1190 contacts the touch panel 1080, the vibration of the piezoelectric nanofiber 840 is transmitted to the touch panel 1080, 0.0 > 1080 < / RTI > Therefore, the vibration of the piezoelectric nanofiber 840 can be transmitted to the user through a wide transmission path, so that stronger tactile feedback can be provided to the user.

10 and 11, the touch panel 1080 is an add-on type touch panel 1080 manufactured separately from the display panel 1100 and disposed on the display panel 1100. However, The touch panel 1080 may be an in-cell type touch panel 1080. That is, the display panel 1100 may be a panel including a display element for displaying an image on the display device 1100, and may function as a touch panel 1080. [ In this case, the touch sensing element 800 may be disposed on both the display panel 1100 and the touch panel 1080, the cover 1070 may be disposed on the touch sensitive element 800, And the touch panel 1080 may be disposed on the touch sensitive device 800 and the cover 1070 may be disposed on the display panel 1100 and the touch panel 1080. [

Although the embodiments of the present invention have been described in detail with reference to the accompanying drawings, it is to be understood that the present invention is not limited to those embodiments and various changes and modifications may be made without departing from the scope of the present invention. . Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

110, 810: substrate
811: recessed part
915A, 915B: Support Node
120, 320A, 320B, 520, 620, 720, 820:
322B, 323B, 324B, 325B, 326B, 521, 522, 523, 524, 525, 526, 621, 622, 623, 624, 625, 626, 721, 321A, 322A, 323A, 324A, 325A, 326A, 722, 723, 724, 821, 822, 823, 824, 825, and 826:
130, 330A, 330B, 530, 630, 730, 830:
331A, 332A, 333A, 334A, 335A, 336A, 331B, 332B, 333B, 334B, 335B, 336B, 531, 532, 533, 534, 535, 536, 631, 632, 633, 634, 635, 732, 733, 734, 831, 832, 833, 834, 835, 836:
140, 340A, 340B, 540, 640A, 640B, 740, 840: Piezoelectric nanofibers
541: first sub-piezoelectric nanofiber
542: second sub-piezoelectric nanofiber
543: third sub-piezoelectric nanofiber
544: fourth sub-piezoelectric nanofiber
545: fifth sub-piezoelectric nanofiber
546: sixth sub-piezoelectric nanofiber
151: FPCB
152: PCB
153:
161: first wiring
162: second wiring
100, 300, 400A, 400B, 500, 600A, 600B, 700, 800, 900:
1110: Display panel
1170: cover
1180: Touch panel
1190: Spacer
1290: Adhesive layer
1100, 1200: display device
AA: active area
A1: first region
A2: second region
CE: Cell
CE1: 1st cell
CE2: Second cell

Claims (16)

Board;
At least one first electrode disposed on one side of the substrate and one or more second electrodes spaced from the first electrode; And
And at least one piezoelectric nanofiber in contact with the first electrode and the second electrode. The method according to claim 1,
Wherein the substrate has a plurality of cells,
Wherein the first electrode, the second electrode, and the piezoelectric nanofiber are disposed in each of the plurality of cells. 3. The method of claim 2,
The number of the first electrodes and the number of the second electrodes disposed in one of the plurality of cells is one,
Wherein the number of the piezoelectric nanofibers is plural. The method of claim 3,
And the plurality of piezoelectric nanofibers are arranged so as to be parallel to each other. 3. The method of claim 2,
Wherein the first electrode includes a plurality of first sub-electrodes,
The second electrode includes a plurality of second sub-electrodes spaced apart from the plurality of first sub-electrodes,
And each of the plurality of first sub-electrodes is connected to each of the plurality of second sub-electrodes by the piezoelectric nanofibers. 6. The method of claim 5,
One of the plurality of first sub-electrodes is spaced apart from the second sub-electrode connected to each other by a first interval,
And the other of the plurality of first sub-electrodes is spaced apart from the first sub-electrode by a second interval different from the first interval. 6. The method of claim 5,
Wherein the plurality of first sub-electrodes and the plurality of second sub-electrodes are connected by one piezoelectric nanofiber. 3. The method of claim 2,
Wherein the first electrode and the second electrode disposed in a first cell of the plurality of cells are spaced apart from each other by a first interval,
Wherein the first electrode and the second electrode disposed in a second one of the plurality of cells are spaced apart from each other by a second interval different from the first interval. 3. The method of claim 2,
Each of the plurality of cells including a first region and a second region,
Wherein the first electrode, the second electrode, and the piezoelectric nanofiber are disposed only in the first region. The method according to claim 1,
Wherein the piezoelectric nanofibers are polarized in the longitudinal direction so that a polarity of a portion in contact with the first electrode and a polarity in a portion in contact with the second electrode are different from each other. The method according to claim 1,
Wherein the substrate includes a recessed portion overlapping with the piezoelectric nanofibers,
And the piezoelectric nanofibers are spaced apart from the substrate on the recessed portion. 12. The method of claim 11,
And a support node disposed between the recessed portion and the piezoelectric nanofiber and contacting the piezoelectric nanofiber. The method according to claim 1,
Wherein the first electrode and the second electrode are made of a transparent conductive material,
Wherein the substrate is made of a transparent insulating material. Touch panel; And
One or more first electrodes and one or more second electrodes disposed on one side of the substrate and one or more second electrodes which are disposed on the touch panel or below the touch panel and which connect the first electrode and the second electrode, Or more of the piezoelectric nanofibers. 15. The method of claim 14,
And a display panel disposed under the contact sensitive element,
And the opposite surface of one side of the substrate faces the display panel. 16. The method of claim 15,
Wherein the touch panel is fixed to the contact sensitive element by a spacer or an adhesive layer disposed on the contact sensitive element.

Images