KR20170076413A - Apparatus for detecting rotation angle - Google Patents

Apparatus for detecting rotation angle Download PDF

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Publication number
KR20170076413A
KR20170076413A KR1020150186646A KR20150186646A KR20170076413A KR 20170076413 A KR20170076413 A KR 20170076413A KR 1020150186646 A KR1020150186646 A KR 1020150186646A KR 20150186646 A KR20150186646 A KR 20150186646A KR 20170076413 A KR20170076413 A KR 20170076413A
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KR
South Korea
Prior art keywords
rotating body
interlocking
attached
housing
magnet
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Application number
KR1020150186646A
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Korean (ko)
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KR101755132B1 (en
Inventor
정영태
송진영
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주식회사 현대케피코
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Priority to KR1020150186646A priority Critical patent/KR101755132B1/en
Publication of KR20170076413A publication Critical patent/KR20170076413A/en
Application granted granted Critical
Publication of KR101755132B1 publication Critical patent/KR101755132B1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B62LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62DMOTOR VEHICLES; TRAILERS
    • B62D6/00Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits
    • B62D6/002Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits computing target steering angles for front or rear wheels
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B62LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62DMOTOR VEHICLES; TRAILERS
    • B62D6/00Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits
    • B62D6/08Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits responsive only to driver input torque
    • B62D6/10Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits responsive only to driver input torque characterised by means for sensing or determining torque
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/30Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/24Housings ; Casings for instruments
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/038Measuring direction or magnitude of magnetic fields or magnetic flux using permanent magnets, e.g. balances, torsion devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Transportation (AREA)
  • Mechanical Engineering (AREA)
  • Mathematical Physics (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The present invention relates to a rotation angle detecting device and includes a rotating body 21 having a magnet 23 attached thereto and disposed in a housing 11, And a magnet 29 which is disposed in the housing 11 and has a polarity opposite to that of the magnet 23 attached to the rotating body 21 so that when the rotating body 21 is rotated And a housing (11) for shielding between the rotating body (21) and the interlocking body (27) so as to prevent the inflow of moisture into the interlocking body (27) The shielding film 30 may be formed of a metal.
The present invention has an advantage in that operational reliability can be ensured without fundamentally blocking external moisture inflow and requiring no separate sealing parts.

Figure P1020150186646

Description

[0001] APPARATUS FOR DETECTING ROTATION ANGLE [0002]

The present invention relates to a rotation angle detecting device, and more particularly, to a rotation angle detecting device using a magnet.

The rotation angle detecting device is mainly used for detecting the rotational angle and rotational torque of the steering of the vehicle, and controlling the amount of depression of the electronic accelerator pedal.

The rotation angle detecting device detects the number of revolutions, that is, the number of times the magnet has passed through the resistance element, by applying a structure in which a magnetic field is intermittently applied to the resistance element when the magnet fixed to the rotating body rotates.

1, the conventional rotation angle detecting device 1 includes a rotating body 3 and a resistance element 5 disposed in a housing 7, A sealing member 9 such as an O-ring or an oil seal for the rotating body 3 is attached to the periphery of the rotating body 3.

The sealing part 9 prevents the problem that the rotating angle detecting device 1 fails to exhibit its performance and malfunctions when external moisture such as rainwater flows into the rotating body 3 and the resistance element 5 .

However, in the conventional rotation angle detecting device 1, a load is increased by the sealing part, and the rotating body 3 may not rotate well. A malfunction of the rotation angle detecting device can cause a serious accident.

SUMMARY OF THE INVENTION An object of the present invention is to provide a rotation angle detecting device which is capable of fundamentally shutting off external moisture inflow and does not require a separate sealing part, thereby allowing smooth rotation of the rotating body and excellent operational reliability.

According to an aspect of the present invention for achieving the above object, the present invention provides a magnetic bearing device comprising: a rotating body disposed in a housing and having a magnet attached thereto; a rotating shaft connected to one side of the rotating body through the housing; Wherein the magnet is attached to the rotating body so as to have a polarity opposite to that of the magnet, the rotating body is rotated together with the rotating body to induce a change in magnetic flux, And a shielding film provided on the housing to prevent moisture from flowing into the housing.

Wherein a plurality of magnets attached to the rotating body are attached in such a manner that N and S poles are alternately repeated along the circumferential direction of the rotating body and magnets attached to the rotating body rotate along the circumferential direction of the rotating body, And may be attached at a corresponding position so as to have a polarity opposite to that of the magnet attached to the magnet.

The shielding film may be provided with a support protrusion for holding and rotating the interlocking body, and a concave recess for inserting the support protrusion into the interlocking body.

And a processing circuit for processing a signal of the resistance element and outputting a signal about a rotation angle of the interlocking body.

An elastic member may be provided on the shielding film to prevent the interlocking body from coming into close contact with the shielding film and to increase an electrical contact signal between the resistance element and the processing circuit.

The present invention relates to a structure in which a rotating body to which a magnet is attached is rotated, and a moving body to which attraction force acts is rotated together to induce a change in magnetic flux. A shielding film is interposed between the rotating body and the interlocking body, .

Therefore, since no separate sealing parts for preventing external inflow of water are required, rotation of the rotating body is smooth, and when the rotating body rotates at the position where the inflow of water is blocked, the rotating body is rotated together to induce a change in the magnetic flux Therefore, it is possible to solve the problem of malfunction due to inflow of water and to secure the operation reliability.

1 is a view showing a conventional rotation angle detecting device.
2 is a view showing an embodiment of a rotation angle detecting device of the present invention.
3 is a view showing a state where a magnet is attached to a rotating body and an interlocking body of the rotation angle detecting device of the present invention.
Fig. 4 is a view showing a state where the rotating body of the rotation angle detecting device of the present invention, the position where the rotating body and the interlocking body are attached when the magnet is attached, and the case where the position is shifted.
5 is a view showing another embodiment of the rotation angle detecting device of the present invention.
6 is a view showing the principle of detecting the rotation angle by the rotation angle detecting device of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2, the rotation angle detecting apparatus of the present invention includes a rotating body 21 disposed in a housing 11 and having a magnet 23 attached thereto, and a rotating body 21, which passes through the housing 11, A magnet 29 is attached so as to have an opposite polarity to a magnet 23 disposed in the housing 11 and attached to the rotating body 21 so that when the rotating body 21 is rotated, And a shielding film (30) for shielding between the rotating body (21) and the interlocking body (27).

The housing 11 is formed in a substantially cylindrical shape and includes a housing space 12 in which a rotating body 21 and an interlocking body 27 are disposed and an insertion hole 13 into which a rotary shaft 25 is inserted. . The insertion hole 13 is provided with a bearing 15 so that the rotation shaft 25 can rotate smoothly.

The housing 11 may be formed by combining three parts of the lower body 11a, the upper body 11b and the upper cover 11c to facilitate the disposition of the rotating body 21 and the interlocking body 27 therein . The lower body, the upper body, and the upper cover can be coupled in various ways with a sealing force, such as a screw connection.

The rotating body 21 is formed in a disk shape and connected to the rotating shaft 25 so that the rotating body 25 rotates integrally with the rotating shaft 25 when the rotating shaft 25 rotates. The rotating body 21 is for rotating the interlocking body 27.

The rotating shaft 25 is electrically connected to the steering wheel, the accelerator pedal, and the like of the vehicle so that the rotational speed of the rotating shaft 25 can be adjusted according to the amount of rotation of the steering wheel or the amount of depression of the accelerator pedal.

The interlocking body (27) has a disk shape corresponding to the rotating body (21). The interlocking body 27 can be rotated together with the magnet 29 attached thereto so as to rotate together when the rotating body 21 rotates.

3, a plurality of magnets 23 are attached along the circumferential direction of the rotating body 21 such that the N pole and the S pole are alternately repeated, and the magnets 23 attached to the rotating body 21, The magnets are also attached to the interlocking body 27 so as to correspond to the interlocking body 27. The magnet 29 attached to the interlocking body 27 is attached to the corresponding position so as to have a polarity opposite to that of the magnet 23 attached to the rotating body 21 along the circumferential direction of the interlocking body 27.

When magnets are attached to the interlocking body 27 so as to have a polarity opposite to that of the magnets 23 attached to the rotating body 21, a gravitation force is exerted therebetween and interlocked with the rotation of the rotating body 21, Can be rotated.

As shown in FIG. 4 (a), a plurality of N poles and S poles are alternately and repeatedly attached to the rotating body 21, and N poles and S poles are alternately repeated in the interlocking body 27 Is attached. The magnet 29 attached to the interlocking member 27 has an S pole at a position facing the N pole of the rotating body 21 and an N pole at a position opposite to the S pole of the rotating body, , 29).

The engaging body 27 can be rotated together when the rotating body 21 rotates due to attraction between the magnets 23 attached to the rotating body 21 and the magnets 29 attached to the interlocking body 27 have.

When the magnets 23 and 29 are attached to the rotating body 21 and the interlocking body 27, they must be attached to face each other with the opposite polarity and the positions thereof must be matched.

The polarities of the magnets 23 attached to the rotating body 21 and the magnets 29 attached to the interlocking body 27 do not coincide with each other and are shifted to the same polarity as shown in Figure 4 (b) So that when the rotating body 21 is rotated, the interlocking bodies 27 are not rotated together at the same speed.

The number of magnets attached to the rotating body 21 and the interlocking body 27 can be appropriately adjusted according to the strength of the magnets and the mounting conditions.

The shielding film 30 shields the space between the rotating body 21 and the interlocking body 27 so that the interlocking body 27 is prevented from inflow of moisture. Specifically, the shielding film 30 divides the housing space 12 of the housing 11 into two portions, that is, a first housing space 12a and a second housing space 12b, .

The rotary body 21 is disposed in the first housing space 12a of the housing 11 and the interlocking body 27 is disposed in the second housing space 12b and the first housing space 12a and the second housing space 12b are arranged, The moisture absorbed into the first accommodation space 12a through the insertion hole 13 can not penetrate into the second accommodation space 12b.

The first housing space 12a and the second housing space 12b are formed by combining three parts of the lower body 11a, the upper body 11b and the upper cover 11c, But it is not limited thereto and may be provided in the housing 11 made of one body in the manufacturing process.

Even if the interlocking body 27 is disposed in the second accommodating space 12b and the rotating body 21 is disposed in the first accommodating space 12a and the magnet 23 attached to the rotating body 21 and the interlocking body 27 When the rotating body 21 is rotated by the attractive force of the magnet 29 attached to the rotating body 21, the interlocking body 27 can be rotated together to induce a change in the magnetic flux.

The shielding film 30 is provided with a support protrusion 30a for positioning the interlocking body 27 and allowing the interlocking body 27 to rotate. The interlocking body 27 is formed with a recessed groove 27a into which the supporting protrusion 30a of the shielding film 30 is inserted. The supporting protrusion 30a and the recessed groove 27a support the interlocking body 27 at a position corresponding to the rotating body 21 so that the interlocking body 27 can rotate smoothly.

The supporting protrusion 30a and the recessed groove 27a may be formed in various shapes as long as they are rotatable while keeping the position of the interlocking body 27.

As shown in FIG. 5, the shielding film 30 is provided with an elastic member 31 for preventing the interlocking body 27 from coming into close contact with the shielding film 30. It is difficult to smoothly rotate the interlocking body 27 when the interlocking body 30 is closely contacted with the shielding film 30 so that the interlocking body 27 is provided with the elastic member 31 so as to be spaced apart from the shielding film 30 by a predetermined distance, do.

The shielding film 30 is formed with a seating groove portion 30b for supporting the elastic member 31 and a supporting groove portion 27b is formed at a corresponding position of the corresponding interlocking body 27, 30 and can be arranged rotatably and stably. The elastic member 31 may be a spring.

The elastic member 31 is provided to increase the electrical contact signal between the resistive element 33 and the processing circuit 37 to be described later. The resilient member 31 pushes up the interlocking body 27 upwardly so that the contact force between the resistance element 33 and the processing circuit 37 is improved and the operation reliability of the rotation angle detecting device 10 is improved.

And a processing circuit 37 for processing signals of the resistance element 33 and the resistance element 33 for detecting a change in magnetic flux of the interlocking body 27 and outputting a signal about the rotation angle of the interlocking body 27 can do.

The resistive element 33 is attached to one side of the upper surface of the interlocking body 27 and the processing circuit 37 is provided in the fixed body 35 disposed on the upper side of the interlocking body 27. The resistance element 33 is brought into contact with the processing circuit 37 in accordance with the rotation of the interlocking body 27 and the rotation angle according to the change of the magnetic flux can be measured accordingly.

Alternatively, the rotation angle of the interlocking body 27 can be measured by the processing circuit 37 in which the resistance element 33 is attached to the interlocking body 27 and disposed in the vicinity thereof.

As shown in FIG. 6, the processing circuit 37 can detect the rotation angle by generating a change amount of the magnetic flux sensed by the resistance element 33 as a voltage.

The operation of the present invention will be described below.

The rotation angle detecting device of the present invention is such that the rotating shaft 25 is electrically connected to the steering of the vehicle, the accelerator pedal, or the like so that the rotational speed is adjusted in accordance with the amount of rotation of the steering wheel or depression of the accelerator pedal.

For example, when the user depresses the accelerator pedal of the vehicle, the rotary shaft 25 rotates, and the rotation of the rotary shaft 25 rotates the rotary body 21 integrally connected to the rotary shaft 25, Rotates the interlocking body 27, which is attracted to each other by a magnet.

The rotation of the interlocking body 27 generates a magnetic flux and induces a change in the magnetic flux according to the rotation speed. The change in the magnetic flux is detected by the resistance element 33 and the amount of change in the magnetic flux sensed by the resistance element 33 is generated by the processing circuit 37 in electrical contact with the resistance element 33 to detect the rotation angle.

At this time, the rotating body 21 is disposed in the first housing space 12a of the housing 11, and the interlocking body 27, the resistor element 33, and the processing circuit 37 are disposed in the second housing space 12b The first housing space 12a and the second housing space 12b are shielded so that even if water and foreign matter are introduced into the insertion hole 13 for installing the rotary shaft 25, (33) and the processing circuit (37) are interrupted, there is no problem of malfunction.

Even when the rotating body 21 uses the attracting force of the magnet in the course of rotating the interlocking body 27 to shield the rotating body 21 and the interlocking body 27 with the shielding film 30, It is possible to rotate the interlocking body 27 in the same manner as the rotation, and the operation reliability can be secured.

Particularly, the structure in which the N poles and the S poles are arranged alternately and repeatedly in the rotating body 21 is arranged in a position corresponding to the magnet 23 attached to the rotating body 21 so as to have an opposite polarity, So that the interlocking body 27 can be rotated in the same manner as the rotation of the rotating body 21, so that the reliability of operation can be secured.

Since the structure as described above can fundamentally block the inflow of external moisture and does not require a separate sealing part, the rotation of the rotary body 21 is smooth and the rotation axis 25, And thus the reliability of operation is ensured.

In addition, the elastic member provided in the shielding film 30 enhances the electrical contact signal between the resistance element and the processing circuit, thereby contributing to a better response.

The rotation angle detecting device of the present invention can be used as a rotation sensor and an angle measurement sensor.

The scope of the present invention is not limited to the embodiments described above, but may be defined by the scope of the claims, and those skilled in the art may make various modifications and alterations within the scope of the claims It is self-evident.

10: rotation angle detecting device 11: housing
11a: Lower body 11b: Upper body
11c: upper cover 12: accommodation space
12a: first accommodation space 12b: second accommodation space
13: Insertion ball 15: Bearing
21: Rotor 23: Magnet
25: rotation shaft 27:
27a: recessed groove portion 27b: support groove portion
29: magnet 30: shielding film
30a: Supporting protrusion 30b:
31: elastic member 33: resistance element
35: Fixture 37: Processing circuit

Claims (5)

A rotating body disposed within the housing and having a magnet attached thereto;
A rotating shaft passing through the housing and connected to one side of the rotating body;
An interlocking member disposed in the housing and attached to the magnet so as to have a polarity opposite to that of the magnet attached to the rotating body, the interlocking member being rotated together with the rotating body to induce a change in magnetic flux;
And a shielding film provided on the housing for shielding between the rotating body and the interlocking body to prevent water from flowing into the interlocking body.
The method according to claim 1,
A plurality of magnets attached to the rotating body are mounted so that N poles and S poles are alternately repeated along the circumferential direction of the rotating body,
Wherein the magnet attached to the interlocking body is attached at a corresponding position so as to have an opposite polarity to a magnet attached to the rotating body along the circumferential direction of the interlocking body.
The method according to claim 1,
Wherein the supporting block has a support protrusion formed on the shielding film so as to hold and rotate the interlocking member, and a concave portion into which the supporting protrusion is inserted is formed in the interlocking member.
The method according to claim 1,
A resistance element for sensing a change in magnetic flux of the interlocking body
Further comprising: a processing circuit for processing a signal of the resistance element and outputting a signal regarding a rotation angle of the interlocking body.
The method of claim 4,
Wherein the shielding film is provided with an elastic member for preventing the interlocking member from coming into close contact with the shielding film and for increasing an electrical contact signal between the resistance element and the processing circuit.
KR1020150186646A 2015-12-24 2015-12-24 Apparatus for detecting rotation angle KR101755132B1 (en)

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KR1020150186646A KR101755132B1 (en) 2015-12-24 2015-12-24 Apparatus for detecting rotation angle

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Application Number Priority Date Filing Date Title
KR1020150186646A KR101755132B1 (en) 2015-12-24 2015-12-24 Apparatus for detecting rotation angle

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KR101755132B1 KR101755132B1 (en) 2017-07-06

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109973785A (en) * 2019-04-12 2019-07-05 中国科学院长春光学精密机械与物理研究所 A kind of hall device positioning device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002131013A (en) * 2000-10-19 2002-05-09 Yazaki Corp Rotating angle indicator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109973785A (en) * 2019-04-12 2019-07-05 中国科学院长春光学精密机械与物理研究所 A kind of hall device positioning device
CN109973785B (en) * 2019-04-12 2020-05-15 中国科学院长春光学精密机械与物理研究所 Hall device positioning device

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