KR20170066847A - Dehumidifier for Treating Process Waste Gas - Google Patents

Dehumidifier for Treating Process Waste Gas Download PDF

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Publication number
KR20170066847A
KR20170066847A KR1020150173001A KR20150173001A KR20170066847A KR 20170066847 A KR20170066847 A KR 20170066847A KR 1020150173001 A KR1020150173001 A KR 1020150173001A KR 20150173001 A KR20150173001 A KR 20150173001A KR 20170066847 A KR20170066847 A KR 20170066847A
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South Korea
Prior art keywords
hole
tube
cooling tube
waste gas
unit
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KR1020150173001A
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Korean (ko)
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KR101866397B1 (en
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박용근
안성익
홍성호
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박용근
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02046—Dry cleaning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/265—Drying gases or vapours by refrigeration (condensation)
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H01L2021/60007—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process
    • H01L2021/60022—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process using bump connectors, e.g. for flip chip mounting
    • H01L2021/60097—Applying energy, e.g. for the soldering or alloying process
    • H01L2021/60172—Applying energy, e.g. for the soldering or alloying process using static pressure
    • H01L2021/60187—Isostatic pressure, e.g. degassing using vacuum or pressurised liquid

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)

Abstract

The present invention relates to an internal combustion engine having an outer housing formed in a hollow box shape and having a waste gas inlet, a waste gas outlet, a first lower connector and a first upper connector, An inner housing having an exhaust gas discharge port, a first inner lower connection, a first inner upper connection, and a first tube penetration, the inner housing being located inside the outer housing, and the inner waste gas inlet A first cooling tube unit for cooling and collecting moisture contained in the waste gas by allowing the rising waste gas to flow upward in the zigzag direction while contacting the first upper cooling tube and the first lower cooling tube, Wherein one end of the first upper cooling tube and one end of the first lower cooling tube are coupled A first connection flange coupled to the first upper connection and having a first upper connection flange to which the first upper cooling tube and the other end of the first lower cooling tube are coupled A dehumidifier for treating waste gas is disclosed.

Description

Background Art [0002] Dehumidifiers for Treating Process Waste Gas [0003]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dehumidifier for processing waste gas generated in a manufacturing process such as a semiconductor manufacturing process, a flat panel display device manufacturing process, and a solar cell panel manufacturing process.

Waste gas generated in a manufacturing process such as a semiconductor manufacturing process, a flat panel display device manufacturing process, and a solar panel manufacturing process includes harmful gases such as acidic gas generated from process equipment, reaction by-product particles, moisture and the like. The waste gas is discharged to the exhaust pipe of the process line through the combustion process and the water treatment process in the scrubber installed at the rear end of the process equipment.

The waste gas discharged from the scrubber contains moisture together with gas components and reaction by-product particles. Since the moisture has a temperature and a humidity higher than the internal temperature of the exhaust pipe, the moisture is condensed while the temperature inside the exhaust pipe lowers and the reaction by-product particles are also collected. The moisture condensed in the exhaust pipe becomes acidic to damage the exhaust pipe, shortening the replacement cycle of the exhaust pipe, and increasing the risk that the acid material is leaked when the exhaust pipe is replaced.

An object of the present invention is to provide a dehumidifier for process waste gas treatment capable of efficiently collecting and removing moisture contained in waste gas discharged from a scrubber.

The process waste gas treatment dehumidifier of the present invention is formed in a hollow box shape and has an outer housing having a waste gas inlet port, a waste gas outlet port, a first lower connection port and a first upper connection port, An inner housing having an inner waste gas inlet, an inner waste gas outlet, a first inner lower connector, a first inner upper connector, and a first tube penetrating hole, the inner housing being located inside the outer housing; A first cooling tube unit for cooling and collecting water contained in the waste gas by allowing the waste gas flowing in and flowing through the waste gas inlet to flow in a zigzag direction while contacting the first upper cooling tube and the first lower cooling tube in an upward direction, A first upper cooling tube coupled to the first lower connector and having a first lower cooling tube, A first lower connection flange coupled to one end of the sub cooling tube and a first upper connection flange coupled to the first upper connection port and coupled to the other end of the first upper cooling tube and the first lower cooling tube, And a second connection unit provided on the first connection unit.

The dehumidifier for the process waste gas treatment according to the present invention allows the waste gas discharged from the scrubber to pass through the cooling tubes spaced vertically and staggeredly apart to increase the contact area between the cooling tube and the waste gas, There is an effect to remove.

In addition, the dehumidifier for processing exhaust gas according to the present invention has the effect of condensing water effectively on the surface of the cooling tube by passing the waste gas discharged from the scrubber through a mesh-shaped low-temperature cooling tube.

Further, the dehumidifier for processing exhaust gas according to the present invention has the effect of making the flow of the waste gas smooth by causing droplets of water condensed on the surface of the cooling tube to fall downward.

Further, the dehumidifier for processing exhaust gas according to the present invention has the effect of reducing the phenomenon of condensation in the exhaust pipe because the exhaust gas is cooled by discharging the exhaust gas below the dew point.

1 is a perspective view of a dehumidifier for process waste gas treatment according to an embodiment of the present invention, viewed from one side to the other.
2 is a perspective view of the dehumidifier for processing waste gas according to one embodiment of the present invention, viewed from one side to the other.
3 is a perspective view of an inner housing located within the outer housing of FIG.
4 is a vertical sectional view taken along the line AA in Fig.
5 is a vertical cross-sectional view of BB of Fig.
6 is a perspective view of an inner housing according to another embodiment of the present invention.
7 is an enlarged view of "B" in FIG.
Figure 8 is a perspective view of the inner housing with the first tube support block and the second tube support block removed in Figure 6;

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a dehumidifier for processing exhaust gas according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

First, the structure of a dehumidifier for processing exhaust gas according to an embodiment of the present invention will be described.

1 is a perspective view of a dehumidifier for process waste gas treatment according to an embodiment of the present invention, viewed from one side to the other. 2 is a perspective view of the dehumidifier for processing waste gas according to one embodiment of the present invention, viewed from one side to the other. 3 is a perspective view of an inner housing located within the outer housing of FIG. 4 is a vertical cross-sectional view taken along line A-A in Fig. 5 is a vertical sectional view taken along the line B-B in Fig.

In the following description, one side or one side corresponds to the -x direction in FIG. 1, and the other side or the other side means the x direction. Further, the front side or front side means -y direction, and the rear side or rear side means y direction. The upper or upper direction means the + z direction, and the lower or lower direction means the z direction. However, the above-described directions may be changed relative to each other.

1 to 5, a dehumidifier for processing exhaust gas according to an embodiment of the present invention includes an outer housing 100, an inner housing 200, a first cooling tube unit 300, and a first connecting unit 400 and a water injection unit 500 are formed. The process waste gas treatment dehumidifier may further include a second cooling tube unit 600 and a second connection unit 700.

The outer housing 100 includes a waste gas inlet 110, a waste gas outlet 120, a first lower connector 130, a first upper connector 140, and a nozzle connector 150. In addition, the outer housing 100 may further include a second lower connector 160 and a second upper connector 170.

The outer housing 100 is formed in a hollow box shape and has a polygonal cylinder shape such as a cylindrical shape, a rectangular tube shape, or a hexagonal tube shape. The outer housing 100 may be formed in a rectangular tube shape. When the outer housing 100 is formed, it may include upper and lower surfaces, a side surface, a side surface, a front surface and a rear surface.

The waste gas inlet 110 is formed in the shape of a through-hole on the lower surface of the outer housing 100 and is formed to have a predetermined diameter according to the amount of the waste gas introduced. The waste gas inlet 110 is connected to the scrubber by a separate supply pipe (not shown) and provides a path through which waste gas treated in the scrubber flows.

The waste gas outlet (120) is formed in the shape of a through hole on the upper surface of the outer housing (100). The waste gas outlet 120 is preferably formed at a position vertically corresponding to the waste gas inlet 110 located below the outer housing 100. The waste gas outlet 120 provides a path through which the waste gas from which moisture is removed from the inner housing 200 is discharged to an exhaust pipe (not shown).

The first lower connector 130 is formed in the lower portion of one side of the outer housing 100 as a through hole. The first lower connection 130 is connected to the first cooling tube unit 300 and provides an inflow path of the cooling water supplied to the first cooling tube unit 300.

The first upper connector 140 is formed in a shape of a through-hole at an upper portion of one side of the outer housing 100. The first upper connector 140 is preferably formed in the same straight line in the vertical direction with the first lower connector 130 located below one side of the outer housing 100. The first upper connector 140 is connected to the first cooling tube unit 300 and provides a flow path for the cooling water flowing through the first cooling tube unit 300.

The nozzle connecting hole 150 is formed in the shape of a through hole on the rear surface of the outer housing 100, and is formed in a plurality of holes. The plurality of nozzle connection ports 150 are preferably spaced apart from each other in the vertical direction, and the number of the nozzle connection ports 150 increases as the height of the outer housing 100 increases. A water injection unit 500 is coupled to the nozzle connection port 150 and provides a water supply path for injecting water into the outer housing 100.

The second lower connector 160 is formed in the lower part of the front surface of the outer housing 100 as a through hole. The second lower connector 160 is connected to the second cooling tube unit 600 and provides the inflow path of the cooling water supplied to the second cooling tube unit 600.

The second upper connector (170) is formed in the upper part of the front surface of the outer housing (100) as a through hole. The second upper connector 170 is preferably formed in the same straight line in the vertical direction with the second lower connector 160 located at the lower front of the outer housing 100. The second upper connector (170) is connected to the second cooling tube unit (600) and provides a flow path for the cooling water flowing through the second cooling tube unit (600).

The inner housing 200 includes an inner waste gas inlet 210, an inner waste gas outlet 220, a first inner lower connector 230, a first inner upper connector 240, a first tube penetrating opening 250, (Not shown). The inner housing 200 may further include a second inner lower connector 270, a second inner upper connector 280, and a second tube through hole 290.

The inner housing 200 is formed in a hollow box shape, and is formed in a polygonal cylinder shape such as a cylindrical shape, a rectangular tube shape, or a hexagonal tube shape. The inner housing 200 is preferably formed in the same shape as the outer housing 100. For example, referring to FIG. 3, the inner housing 200 may be formed in a rectangular tube shape. When the inner housing 200 is formed, it may include upper and lower surfaces, a side surface, a side surface, a front surface and a rear surface. At this time, the front side and the rear side may be formed by arranging a plurality of blocks in the vertical direction.

The inner housing 200 is formed in a volume accommodated in the outer housing 100. The inner housing 200 may have a horizontal area smaller than a horizontal area of the outer housing 100. The height of the inner housing 200 may be less than or equal to the height of the outer housing 100. Accordingly, the inner housing 200 is formed such that its outer surface is spaced apart from the inner surface of the outer housing 100. The upper surface of the inner housing 200 is in contact with the upper surface of the outer housing 100 and the lower surface of the inner housing 200 is in contact with the lower surface of the outer housing 100.

The inner housing 200 is located inside the outer housing 100 and the cooling tubes constituting the first cooling tube unit 300 and the second cooling tube unit 600 are connected to each other inside the outer housing 100 And fixed to maintain a predetermined constant interval.

The inner waste gas inlet 210 is formed in the shape of a through hole on the lower surface of the inner housing 200 and is formed in a rectangular or circular shape. The inner waste gas inlet 210 is formed to have the same central axis as the waste gas inlet 110 of the outer housing 100. The internal waste gas inlet 210 is formed to have the same area or a small area as the waste gas inlet 110. The inner waste gas inlet 210 provides a path through which the waste gas passing through the waste gas inlet 110 of the outer housing 100 flows into the interior of the inner housing 200.

The inner waste gas outlet 220 is formed in the shape of a through-hole on the upper surface of the inner housing 200, and is formed in a rectangular or circular shape. The inner waste gas discharge port 220 is formed to have the same central axis as the waste gas discharge port 120 of the outer housing 100. The inner waste gas outlet 220 is formed to have the same diameter or a smaller diameter as the waste gas outlet 120. The inner waste gas outlet 220 provides a path through which the waste gas passing through the interior of the inner housing 200 is discharged to the waste gas outlet 120 of the outer housing 100.

The first inner lower connection part 230 is formed in the lower part of one side of the inner housing 200 as a through hole. The first inner lower connection part 230 is connected to the first lower connection part 130.

The first inner upper connector 240 is formed in a shape of a through hole at an upper portion of one side of the inner housing 200. The first inner upper connector 240 is preferably formed on the same straight line in the vertical direction with the first inner lower connector 230 located below one side of the inner housing 200. In addition, the first inner upper connector 240 is connected to the first upper connector 140.

The first tube through-hole 250 is formed as a plurality of through holes 250a on one side surface and the other side surface of the inner housing 200. The first tube through-hole 250 is formed to include a first upper tube through-hole 251 and a first lower tube through-hole 253. The first upper tube through-hole 251 and the first lower tube through-hole 253 are formed at the same position in the inner housing 200 and have the same structure.

The first upper tube through-holes 251 are formed by a plurality of first upper through-hole units 251a spaced apart from each other in the vertical direction. The first upper through-hole unit 251a is formed as a plurality of through holes 250a spaced apart from each other at a predetermined horizontal distance Dh on one side surface and the other side surface of the inner housing 200. The first upper through-hole unit 251a may have the same height or different heights on one side and the other side. The horizontal distance Dh is formed at a distance smaller than the diameter of the through hole 250a or the diameter of the cooling tube constituting the first cooling tube unit 300. [ The first upper through-hole unit 251a is formed at a predetermined vertical distance Dv in the vertical direction at one side surface and the other side surface of the inner housing 200. However, the first upper through-hole unit 251a is not formed in the area where the first inner lower connection 230 or the first upper upper connection 240 is formed on the opposite side.

The first lower tube through-hole 253 is formed by a plurality of first lower through-hole units 253a. The first lower through-hole unit 253a is formed in the same manner as the first upper through-hole unit 251a. That is, the first lower through-hole unit 253a is formed with a plurality of through holes 250a spaced apart from each other at a predetermined horizontal distance Dh on one side surface and the other side surface of the inner housing 200. In addition, the first lower perforation unit 253a may be formed at the same height or at different heights on one side and the other side. The horizontal distance Dh is formed at a distance smaller than the diameter of the through hole 250a or the diameter of the cooling tube constituting the first cooling tube unit 300. [ The first lower perforation unit 253a is formed at a predetermined vertical distance Dv in the vertical direction at one side and the other side of the inner housing 200. However, the first upper through-hole unit 251a is not formed in a region where the first inner lower connection 230 or the first upper upper connection is formed on the opposite side.

In addition, the first lower through-hole unit 253a is formed as a pair with the first upper through-hole unit 251a. The first lower through-hole unit 253a is located below the first upper through-hole unit 251a and is spaced apart from the first upper through-hole unit 251a by a predetermined vertical distance Dud. The vertical distance Dud is formed to be larger than the diameter of the through hole. The through holes 250a of the first lower through hole unit 253a are offset from the through holes 250a of the first upper through hole unit 251a in the horizontal direction.

The water injection port 260 is formed in the rear surface of the inner housing 200 as a through hole and penetrates through the nozzle connection port 150. The water injection port 260 may be formed to have the same central axis as the nozzle connection port 150. The water jetting port 260 provides a path through which water injected from the water injection unit 500 is injected into the interior of the inner housing 200. Or the water jet opening 260 provides a path through which the pipe or nozzle of the water injection unit 500 extends into the interior of the inner housing 200.

The second inner lower connection part 270 is formed in the lower part of the front surface of the inner housing 200 as a through hole. The second inner lower connector 270 is formed to pass through the second lower connector 160.

The second inner upper connector 280 is formed in the upper part of the front surface of the inner housing 200 as a through hole. The second inner upper connector 280 is preferably formed on the same straight line in the vertical direction with the second inner lower connector 270 located at the lower front of the outer housing 100. In addition, the second inner upper connector 280 is formed to pass through the second upper connector 170.

The second tube through-hole 290 is formed as a plurality of through holes 290a on the front and rear sides of the inner housing 200. The second tube through-hole 290 is formed to include a second upper tube through-hole 291 and a second lower tube through-hole 293. The second upper tube through-hole 291 and the second lower tube through hole 293 are formed in the same structure only at the positions formed in the inner housing 200.

The second upper tube through-hole 291 is formed by a plurality of second upper through-hole units 291a. The second upper through-hole unit 291a is formed with a plurality of through holes 290a spaced apart from each other by a predetermined horizontal distance Dh on the front and rear sides of the inner housing 200. The second upper through-hole unit 291a is preferably formed at the same height on the front side and the rear side. The horizontal distance Dh is formed at a distance smaller than the diameter of the through-hole 290a or the diameter of the cooling tube constituting the second cooling tube unit 600. [ The second upper through-hole unit 291a is spaced apart from the front and rear sides of the inner housing 200 by a predetermined vertical distance Dv in the vertical direction. However, the second upper through-hole unit 291a is not formed in a region where the second inner lower connector 270 or the second inner upper connector 280 is formed on the opposite side.

The second lower tube through-hole 293 is formed by a plurality of second lower through-hole units 293a. The second lower through-hole unit 293a is formed in the same manner as the second upper through-hole unit. That is, the second lower through-hole unit 293a is formed with a plurality of through holes 290a spaced apart from each other at a predetermined horizontal distance Dh on the front and rear sides of the inner housing 200. In addition, the second lower through-hole unit 293a may be formed at the same height, preferably at the front side and the rear side. The horizontal distance Dh is formed at a distance smaller than the diameter of the through-hole 290a or the diameter of the cooling tube constituting the second cooling tube unit 600. [ In addition, the second lower perforation unit 293a is spaced apart from the front and rear sides of the inner housing 200 by a predetermined vertical distance Dv in the vertical direction. However, the second upper through-hole unit 291a is not formed in a region where the second inner lower connection hole 270 or the second inner upper connection hole 280 is formed on the opposite side.

In addition, the second lower through-hole unit 293a is formed as a pair with the second upper through-hole unit 291a. The second lower through-hole unit 293a is located below the second upper through-hole unit 291a, and is spaced apart from the second upper through-hole unit by a predetermined vertical distance Dv. The vertical distance Dv is formed to be larger than the diameter of the through hole 290a. In addition, the through holes 290a of the second lower through-hole unit 293a are offset from the through holes of the second upper through-hole unit 291a in the horizontal direction.

The first cooling tube unit 300 is formed to include a first upper cooling tube 310 and a first lower cooling tube 320. The first upper cooling tube 310 and the first lower cooling tube 320 are formed in the same structure as the first cooling tube 310 and are located up and down on the inner housing 200.

The first upper cooling tube 310 and the first lower cooling tube 320 are vertically spaced apart from each other and are offset from each other with respect to the horizontal direction so that the plane of the inner housing 200 Shielding. Accordingly, the first cooling tube unit 300 flows in the interior of the inner housing 200 through the inner waste gas inlet 210 and is lifted upward by the first upper cooling tube 310 and the first lower cooling Flows in the zigzag direction while contacting with the tube 320, and the water contained in the waste gas is cooled and collected.

The first upper cooling tubes 310 are formed in a plurality of through holes 250a of the first upper through-hole unit 251a so as to form a zigzag shape from the lower portion of the inner housing 200 upwardly, . In addition, a plurality of the first upper cooling tubes 310 are spaced apart from each other in the horizontal direction. The first upper cooling tubes 310 are preferably formed in a number corresponding to the number of the through holes 250a of the first upper through-hole unit 251a.

The first upper cooling tube 310 includes a first upper inlet 311, a first upper straight portion 313, a first upper connection 315, and a first upper outlet 317. The first upper cooling tube 310 has a first upper inlet 311 and a plurality of first upper linear portions 313 spaced apart from each other by a vertical distance Dv in the vertical direction, 1 upper outlet 317 is located. The first upper cooling tube 310 includes a plurality of first upper connecting portions 315 connected to the first upper inlet 311 and the plurality of first upper straight portions 313 and the first upper outlet 317, And are formed so as to have a zigzag shape as a whole.

More specifically, the first upper inflow portion 311 has one end extending through the first inner lower connection portion 230 and extending to the first lower connection portion 130, and the other end of the first upper inflow portion 311 is positioned at the bottom To the lower end of the first upper connection portion 315. The first upper rectilinear section 313 is connected to the first upper inlet 311 by engaging with the upper end of the first upper connecting section 315 at the other end of the first upper rectilinear section 313 located at the lowest position . The first upper rectilinear section 313 may be positioned horizontally or may be inclined such that one end or the other end is relatively high. When the first upper rectilinear section 313 is formed to be inclined, the collected moisture flows along the inclined surface to be agglomerated so that moisture is more efficiently removed from the surface. The first upper straight line part 313 is connected to the lower end of the first upper connecting part 315 at one end of the first upper connecting part 315 and the upper end of the first upper connecting part 315 is located directly above the first upper connecting part 315. [ 1 upper rectilinear section 313 and connected to the first upper rectilinear section 313. The first upper outlet 317 is coupled to an upper end of a first upper connection part 315 whose other end is positioned at the uppermost position of the other side, and one end of the first upper outlet 317 passes through the first upper connection hole, 140). In this way, the first upper cooling tubes 310 are arranged such that the first upper connection portions 315, which are alternately positioned on both sides of the first upper straight line portions 313 and the first upper straight line portions 313, Respectively. The first upper cooling tube 310 has a first upper inflow portion 311 at a lower portion thereof and a first upper outflow portion 317 at an upper portion thereof. Meanwhile, the first upper inflow portion 311 and the first upper inflow portion 317 may be vertically shifted from each other.

A plurality of the first upper rectilinear sections 313 are coupled through the through holes 250a of the first upper tube through hole 251 formed on both side surfaces of the inner housing 200. The first upper rectilinear section 313 is divided into a plurality of through holes 250a of the first upper through-hole unit 251a by a horizontal distance Dh in the horizontal direction, 251a, 252a, 251a, 252a, 251a, 251a, 251a, 251a,

The first lower cooling tube 320 is formed in the same structure as the first upper cooling tube 310. That is, the first lower cooling tube 320 includes a first lower inflow portion 321, a first lower rectilinear portion 323, a first lower connection portion 325, and a first lower outflow portion 327 do. In other words, the first lower cooling tube 320 has first and second lower connection portions 325 alternately arranged on both sides of the first lower straight portion 323 and the first lower straight portion 323, do. The first lower cooling tube 320 is formed with a first lower inflow portion 321 at a lower portion and a first lower outflow portion 327 at an upper portion thereof. Meanwhile, the positions of the first lower inflow portion 321 and the first lower inflow outflow portion 327 may be reversed.

A plurality of the first lower rectilinear sections 323 are coupled through the through holes 250a of the first lower tube through-holes 253 formed on both sides of the inner housing 200. At this time, a plurality of the first lower straight line portions 323 corresponding to the number of the through holes 250a of the first lower through-hole unit 253a are horizontally spaced from each other by a horizontal distance, And is formed to be flat at the same height by being coupled to the through hole 250a. The first lower rectilinear section 323 may be positioned horizontally or may be inclined such that one end or the other end is relatively high. When the first lower rectilinear section 323 is formed to be inclined, the collected moisture flows along the inclined surface to be agglomerated so that moisture is more efficiently removed from the surface. The first lower rectilinear section 323 is spaced apart from the first upper rectilinear section 313 by half the horizontal distance Dh in the horizontal direction according to the position of the through hole 250a of the first lower through- Are spaced apart. The first lower rectilinear section 323 shields the gap between the first upper rectilinear sections 313 located at the upper portion when viewed from below. Accordingly, the waste gas rising from the lower portion of the first lower rectilinear section 323 does not directly pass through the space between the first upper rectilinear sections 313, so that the flow velocity is reduced, and the outer peripheral surface of the first lower rectilinear section 323 And again contacts the outer circumferential surface of the first upper rectilinear section 313, so that the contained moisture is more efficiently removed.

The first connection unit 400 is formed to include a first lower connection flange 410 and a first upper connection flange 420.

The first lower connection flange 410 is formed in a general flange shape and includes a first lower tube coupling hole 411. The first lower connection flange 410 is coupled to the first lower connection 130.

The first lower tube coupling hole 411 is formed to penetrate from one side to the other side of the first lower coupling flange 410. The other end of the first lower tube coupling hole 411 is provided with a first upper inlet 311 located at the lower portion of the first upper cooling tube 310 and a lower portion of the first lower cooling tube 320, All the ends of the portion 321 are coupled. An external cooling water supply pipe (not shown) is coupled to one end of the first lower tube fitting hole 411. Accordingly, the first lower tube fitting hole 411 provides a path through which cooling water is supplied to the first upper cooling tube 310 and the first lower cooling tube 320.

The first upper connection flange 420 is formed in the same structure as the first lower connection flange 410 and includes a first upper tube coupling hole 421. The first upper connection flange 420 is coupled to the first upper connector 140.

The first upper tube coupling hole 421 is formed to penetrate from one side to the other side of the first upper coupling flange 420. The other end of the first upper tube coupling hole 421 is provided with a first upper cooling tube 310 and a first upper cooling tube 317 located above the first lower cooling tube 320, (327) are all coupled. An external cooling water discharge pipe (not shown) is coupled to one end of the first upper tube fitting hole 421. Accordingly, the first upper tube fitting hole 421 provides a path for discharging cooling water flowing to the first upper cooling tube 310 and the first lower cooling tube 320 to the outside.

The water injection unit 500 includes an injection nozzle 510 and an injection pipe 520. The water injection unit 500 injects water onto the surfaces of the first upper cooling tube 310 and the first lower cooling tube 320 located inside the inner housing 200 to remove foreign matter do. The first upper cooling tube 310 and the first lower cooling tube 320 are in contact with the waste gas so that the foreign particles contained in the waste gas are adhered to the surface and the thermal conductivity is lowered to lower the cooling efficiency of the waste gas and the moisture collection efficiency do.

The injection nozzle 510 is formed of a general nozzle used for spraying water. The injection nozzle 510 is coupled to the nozzle connector 150 of the outer housing 100. The injection nozzle 510 may extend to the water injection port 260 of the inner housing 200. The injection nozzles 510 are formed in a number corresponding to the nozzle connector 150. When the height of the outer housing 100 is increased, the number of the injection nozzles 510 increases with the number of the water injection holes 260.

The injection pipes 520 are formed in a number corresponding to the number of the injection nozzles 510 and are connected to a water supply pipe (not shown) after one end is connected to the injection nozzle 510 and the other ends are connected together. The injection pipe 520 may be formed so that the other end thereof is connected to the water supply pipe.

The second cooling tube unit 600 is formed to include a second upper cooling tube 610 and a second lower cooling tube 620. The second cooling tube unit 600 is formed to have the same overall structure as the first cooling tube unit 300. The second upper cooling tube 610 and the second lower cooling tube 620 are formed in the same or similar structure as the first upper cooling tube 310 and the first lower cooling tube 320 in structure and coupling relationship. The second upper cooling tube 610 includes a second upper inlet portion 611, a second upper straight portion 613, a second upper connection portion 615, and a second upper outlet portion 617. The second lower cooling tube 620 includes a second lower inflow portion 621, a second lower straight portion 623, a second lower connection portion 625, and a second lower outflow portion 627 do. The second upper rectilinear section 613 of the second upper cooling tube 610 and the second lower rectilinear section 623 of the second lower cooling tube 620 are connected to the first And is located above or below the first lower straight portion 323 of the upper straight portion 313 and the first lower cooling tube 320. The second upper rectilinear section 613 of the second upper cooling tube 610 and the second lower rectilinear section 623 of the second lower cooling tube 620 are connected to the first upper cooling tube 310, And the first lower rectilinear section 323 of the first lower cooling tube 320 and the upper rectilinear section 313 are installed in a direction perpendicular to the horizontal plane. That is, the second upper rectilinear section 613 of the second upper cooling tube 610 and the second lower rectilinear section 623 of the second lower cooling tube 620 extend in the y-axis direction in FIG. 1, The first upper rectilinear section 313 of the upper cooling tube 310 and the first lower rectilinear section 323 of the first lower cooling tube 320 are installed to extend in the x axis direction. The second upper rectilinear section 613 of the second upper cooling tube 610 and the second lower rectilinear section 623 of the second lower cooling tube 620 are connected to the first upper straight line The first cooling tube unit 300 and the second cooling tube unit 320 form a mesh structure with respect to the horizontal plane together with the first lower cooling pipe unit 313 and the first lower rectilinear section 323 of the first lower cooling tube 320, Thereby increasing the time of contact with the cooling tube unit 600. Accordingly, the first cooling tube unit 300 and the second cooling tube unit 600 cool the waste gas more efficiently, thereby increasing the moisture collection efficiency.

The second upper cooling tube 610 is positioned such that a second upper inlet 611 is located at a lower portion and a plurality of second upper linear portions 613 are spaced apart at a vertical distance in the upper direction, A portion 617 is located. The second upper cooling tube 610 includes a plurality of second upper connection portions 615 connected to the second upper inlet portion 611 and the plurality of second upper straight portions 613 and the second upper outlet portion 617, And are formed so as to have a zigzag shape as a whole.

The second upper straight portion 613 is connected to the lower end of the second upper connection portion 615 having one end on the lowermost one side and the upper end of the second upper connection portion 615, And is connected to the second upper straight line portion 613 while being connected to one end of the straight line portion 613.

The second upper inflow portion 611 has one end extending through the second inner lower connection portion 230 and extending to the first lower connection portion 130 and the other end of the second upper inflow portion 611 extending from the second upper connection portion 130, (Not shown). The second upper outlet portion 617 is coupled to an upper end of a second upper connection portion 615 whose other end is located at the uppermost portion of the other side, And extends to the upper connector 140.

A plurality of the second upper rectilinear sections 613 are coupled through the through holes 290a of the second upper tube through-holes 291 formed on the front and rear sides of the inner housing 200. In this case, a plurality of the second upper straight line portions 613 corresponding to the number of the through holes 290 of the second upper through-hole unit 291a are horizontally spaced apart from each other by a horizontal distance, Hole 290 and is formed to be flat at the same height. The second upper rectilinear section 613 may be positioned horizontally or may be inclined such that one end or the other end is relatively high. When the second upper rectilinear section 613 is formed obliquely, the collected moisture flows along the inclined surface to be agglomerated so that moisture is more efficiently removed from the surface.

The second lower cooling tubes 620 are coupled such that the second lower connection portions 625 alternately located on both sides of the second lower straight portions 623 and the second lower straight portions 623 form a zigzag shape. The second lower cooling tube 620 has a second lower inflow portion 621 at a lower portion thereof and a second lower outflow portion 627 at an upper portion thereof. A plurality of second lower linear portions 623 are coupled through the through holes 290a of the second lower tube through-hole 293 formed on both side surfaces of the inner housing 200. At this time, a plurality of the second lower straight line portions 623 corresponding to the number of the through holes 290a of the second lower through-hole unit 293a are horizontally spaced by a horizontal distance, Hole 290 and is formed to be flat at the same height. The second lower rectilinear section 623 may be positioned horizontally or may be inclined such that one end or the other end is relatively high. When the second lower rectilinear section 623 is formed to be inclined, the collected moisture flows along the inclined surface to be agglomerated so that moisture is more efficiently removed from the surface. The second lower rectilinear section 623 is spaced apart from the second upper rectilinear section 613 by half the horizontal distance Dh in the horizontal direction according to the position of the through hole 290 of the second lower through- Are spaced apart. The second lower rectilinear section (623) shields the gap between the second upper rectilinear sections (613) located at the upper part when viewed from below. Therefore, the waste gas rising from the lower portion of the second lower rectilinear section 623 does not directly pass through the space between the second upper rectilinear sections 613, so that the flow velocity is reduced, and the outer peripheral surface of the second lower rectilinear section 623 And again contacts the outer circumferential surface of the second upper rectilinear section 613, so that the contained moisture is more efficiently removed.

The second connection unit 700 is formed to include a second lower connection flange 710 and a second upper connection flange 720.

The second lower connection flange 710 is formed in a general flange shape and includes a second lower tube coupling hole 711. The second lower connection flange 710 is coupled to the second lower connection 160.

The second lower tube coupling hole 711 is formed to penetrate from one side to the other side of the second lower coupling flange 710. The other end of the second lower tube coupling hole 711 is provided with a second upper inflow portion 611 and a second lower inflow portion 611 located below the second upper cooling tube 610 and the second lower cooling tube 620, (621) are all connected. An external cooling water supply pipe (not shown) is coupled to one end of the second lower tube fitting hole 711. Accordingly, the second lower tube fitting hole 711 provides a path through which cooling water is supplied to the second upper cooling tube 610 and the second lower cooling tube 620.

The second upper connection flange 720 is formed in the same structure as the second lower connection flange 710 and includes a second upper tube coupling hole 721. The second upper connection flange 720 is coupled to the second upper connector 170.

The second upper tube coupling hole 721 is formed through one side of the second upper coupling flange 720 to the other side. The other end of the second upper tube coupling hole 721 is provided with a second upper outlet portion 617 and a second lower outlet portion 617 located above the second upper cooling tube 610 and the second lower cooling tube 620, (627) are all coupled. An external cooling water discharge pipe (not shown) is coupled to one end of the second upper tube coupling hole 721. Accordingly, the second upper tube fitting hole 721 provides a path for discharging cooling water flowing to the second upper cooling tube 610 and the second lower cooling tube 620 to the outside.

Next, the inner housing of another embodiment applied to the dehumidifier for processing exhaust gas of the present invention will be described.

6 is a perspective view of an inner housing according to another embodiment of the present invention. 7 is an enlarged view of "B" in FIG. Figure 8 is a perspective view of the inner housing with the first tube support block and the second tube support block removed in Figure 6;

6 to 8, the inner housing 1200 according to another embodiment of the present invention includes a first tube through-hole 1250 and a second tube through- 1290 are formed differently from each other. The inner housing 1200 further includes a first tube support block 1300 and a second tube support block 1400.

The first tube through-hole 1250 includes a first upper tube through-hole 1251 and a first lower tube through-hole 1253.

The first upper tube through-hole 1251 is formed as a through-hole 1250a that extends in the horizontal direction and has a width greater than the height, and one side thereof is opened to one side of the inner housing 1200. That is, the first upper tube through-hole 1251 is formed so that the through-hole 250a forming the first upper through-hole unit 251a in the inner housing 200 of FIG. 3 is connected to each other. A plurality of the first upper tube through-holes 1251 are vertically spaced apart from each other.

The first lower tube through-hole 1253 is formed as a through-hole 1250a that extends in the horizontal direction and is longer than the height, and one side of the first lower tube through-hole 1253 is opened to one side of the inner housing 1200. That is, the first lower tube through-hole 1253 is formed so that the through-hole 250a forming the first lower through-hole unit 253a in the inner housing 200 of FIG. 3 is connected to each other. The plurality of first lower tube through-holes 1253 are spaced apart from each other by a predetermined vertical distance Dv in the vertical direction. The first lower tube through-hole 1253 is spaced apart from the first upper tube through-hole 1251 by a predetermined vertical distance Dud.

The second tube through-hole 1290 is formed to include a second upper tube through-hole 1291 and a second lower tube through-hole 1293. The second tube through-hole 1290 is formed in the same structure as the first tube through-hole 1250, and only a difference is formed in a position formed in the inner housing 1200.

The second upper tube through-hole 1291 is formed as a through hole 1290a extending in the horizontal direction and having a width greater than the height, and one side of the second upper tube through hole 1291 is opened to one side of the inner housing 1200. That is, the second upper tube through-hole 1291 is formed so that the through-holes 290a forming the second upper through-hole unit 291a in the inner housing 200 of FIG. 3 are connected to each other. A plurality of the second upper tube through-holes 1291 are vertically spaced apart from each other.

The second lower tube through-hole 1293 is formed as a through hole 1290a that extends in the horizontal direction and has a longer width than the height, and is formed so that one side opens to one side of the inner housing 1200. That is, the second lower tube through-hole 1293 is formed so that the through holes 290a forming the second lower through-hole unit 293a in the inner housing 200 of FIG. 3 are connected to each other. The plurality of second lower tube through-holes 1293 are spaced apart by a vertical distance Dv in the vertical direction. The second lower tube through-hole 1293 is spaced apart from the second upper tube through-hole 1291 by a predetermined vertical distance Dud.

The first tube support block 1300 includes a first upper support block 1310 and a first lower support block 1320.

The first upper support block 1310 is formed in a block shape having an area larger than the area of the first upper tube through hole 1251 and includes a first upper tube coupling hole 1311 spaced a predetermined distance do. The first upper support block 1310 is coupled to the inner housing to shield the first upper tube through-hole 1251 as a whole. The first upper support block 1310 supports the cooling tube passing through the first upper tube through-hole 1251 to maintain a constant gap.

A plurality of the first upper tube coupling holes 1311 are formed in a hole shape that opens in a downward direction while being penetrated from one surface of the first upper support block 1310 to the other surface. The first upper tube fitting hole 1311 is formed at a position corresponding to the through hole 250a forming the first upper penetrating unit 251a in the inner housing 1200 of FIG.

The first lower support block 1320 is formed in a block shape having an area larger than the area of the first lower tube through-hole 1253 and includes a first lower tube coupling hole 1321 spaced a predetermined distance do. The first lower support block 1320 is coupled to the inner housing 1200 to shield the first lower tube through-hole 1253 as a whole. The first lower support block 1320 supports the cooling tube passing through the first lower tube through-hole 1253 to maintain a predetermined gap therebetween.

A plurality of the first lower tube coupling holes 1321 are formed in a hole shape that opens in a downward direction or an upward direction while passing through one surface of the first lower support block 1320 from the other surface. The first lower tube fitting hole 1321 is formed at a position corresponding to the through hole 250a forming the first lower penetrating unit 253a in the inner housing 200 of FIG.

The second tube support block 1400 includes a second upper support block 1410 and a second lower support block 1420.

The second upper support block 1410 is formed in a block shape having an area larger than the area of the second upper tube through-hole 1291 and includes a first upper tube coupling hole 1411 spaced apart by a predetermined distance do. The second upper support block 1410 is coupled to the inner housing to shield the second upper tube through-hole 1291 as a whole. The second upper support block 1410 supports the cooling tube passing through the second upper tube through-hole 1291 to maintain a constant gap.

A plurality of the second upper tube coupling holes 1411 are formed in a hole shape that opens in a downward direction while being penetrated from one surface of the second upper support block 1410 to the other surface. The second upper tube coupling hole 1411 is formed at a position corresponding to the through hole 290a forming the second upper penetrating unit 291a in the inner housing 200 of FIG.

The second lower support block 1420 is formed in a block shape having an area larger than the area of the second lower tube through-hole 1293, and includes a second lower tube coupling hole 1421 spaced apart by a predetermined distance do. The second lower support block 1420 is coupled to the inner housing 1200 to shield the second lower tube through-hole 1293 as a whole. The second lower support block 1420 supports the cooling tube passing through the second lower tube through-hole 1293 to maintain a constant gap.

The second lower tube coupling hole 1421 is formed in a hole shape which is opened in the upper direction or the lower direction while a plurality of the second lower tube coupling holes 1421 penetrate from one surface of the first lower support block 1420 to the other surface. The second lower tube fitting hole 1421 is formed at a position corresponding to the through hole 290a forming the first lower penetrating unit 293a in the inner housing 200 of FIG.

100: outer housing
110: Waste gas inlet 120: Waste gas outlet
130: first lower connection port 140: first upper connection port
150: nozzle connector 160: second lower connector
170: second upper connector
200, 1200: inner housing
210: internal waste gas inlet 220: internal waste gas outlet
230: first inner lower connection port 240: first inner upper connection port
250, 1250: first tube through-hole 260: water jet opening
270: second inner lower connection 280: second inner upper connection
290, 1290: a second tube through-
300: first cooling tube unit
310: first upper cooling tube 320: first lower cooling tube
400: first connection unit
410: first lower connection flange 420: first upper connection flange
500: Water injection unit
510: injection nozzle 520: injection pipe
600: second cooling tube unit
610: second upper cooling tube 620: second lower cooling tube
700: second connecting unit
710: second lower connection flange 720: second upper connection flange
1300: first tube support block
1310: first upper support block 1320: first lower support block
1400: second tube supporting block
1410: second upper support block 1420: second lower support block

Claims (1)

An outer housing having an inner hollow formed in a box shape and having a waste gas inlet, a waste gas outlet, a first lower connector and a first upper connector;
The inner housing having an inner waste gas inlet, an inner waste gas outlet, a first inner lower connector, a first inner upper connector and a first tube through hole, the inner housing being located inside the outer housing, ,
The waste gas flowing in and flowing through the inner waste gas inlet from the inside of the inner housing flows in a zigzag direction in contact with the first upper cooling tube and the first lower cooling tube in the upward direction to cool the moisture contained in the waste gas A first cooling tube unit for collecting
A first lower coupling flange coupled to the first lower coupling and coupled to one end of the first upper cooling tube and the first lower cooling tube, and a second lower coupling flange coupled to the first upper coupling, And a first connection unit having a first upper connection flange to which the other end of the first lower cooling tube is coupled.
KR1020150173001A 2015-12-07 2015-12-07 Dehumidifier for Treating Process Waste Gas KR101866397B1 (en)

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Application Number Priority Date Filing Date Title
KR1020150173001A KR101866397B1 (en) 2015-12-07 2015-12-07 Dehumidifier for Treating Process Waste Gas

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KR102530853B1 (en) 2022-07-21 2023-05-10 아이디에스 주식회사 Dehumidifier

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005279486A (en) * 2004-03-30 2005-10-13 Eiichi Uratani Cooling type dehumidification apparatus of compressed air
JP2007160148A (en) * 2005-12-09 2007-06-28 Daihatsu Motor Co Ltd Dehumidifying apparatus of compressed air
JP2008013643A (en) * 2006-07-05 2008-01-24 Kayaba System Machinery Kk Dry distillation gas cooler
KR101029774B1 (en) * 2010-11-08 2011-04-19 유동호 Vapor condensing and dripping apparatus for fresh water

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613748A (en) * 1984-06-18 1986-01-09 王子油化合成紙株式会社 Synthetic paper printable in high gloss manner
KR20080013643A (en) * 2006-08-09 2008-02-13 김재석 Easy open beverage can

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005279486A (en) * 2004-03-30 2005-10-13 Eiichi Uratani Cooling type dehumidification apparatus of compressed air
JP2007160148A (en) * 2005-12-09 2007-06-28 Daihatsu Motor Co Ltd Dehumidifying apparatus of compressed air
JP2008013643A (en) * 2006-07-05 2008-01-24 Kayaba System Machinery Kk Dry distillation gas cooler
KR101029774B1 (en) * 2010-11-08 2011-04-19 유동호 Vapor condensing and dripping apparatus for fresh water

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