KR20170060630A - Clamp short detection device of film forming apparatus - Google Patents

Clamp short detection device of film forming apparatus Download PDF

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Publication number
KR20170060630A
KR20170060630A KR1020150164446A KR20150164446A KR20170060630A KR 20170060630 A KR20170060630 A KR 20170060630A KR 1020150164446 A KR1020150164446 A KR 1020150164446A KR 20150164446 A KR20150164446 A KR 20150164446A KR 20170060630 A KR20170060630 A KR 20170060630A
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KR
South Korea
Prior art keywords
clamp
resistance
platen
film forming
power supply
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KR1020150164446A
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Korean (ko)
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KR101769132B1 (en
Inventor
박영택
이원용
조현근
이용해
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(주)이루자
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Priority to KR1020150164446A priority Critical patent/KR101769132B1/en
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    • G01R31/025—
    • G01R31/02—
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/185—Electrical failure alarms

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  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Abstract

An embodiment of the present invention relates to a clamp short-circuit detection apparatus for a film forming apparatus. The technical problem to be solved is to measure an electrical resistance between a clamp and a ground, generate an alarm when the measured value is less than a reference value, Which is capable of accurately determining whether the film is short-circuited or not.
To this end, the present invention provides a power supply system comprising: a power supply unit for supplying DC power; A reference resistor electrically connected to the power supply; A clamp electrically connected to the reference resistor and fixed in an insulated state to a platen on which the substrate is mounted; And a sensing unit electrically connected between the reference resistor and the clamp to sense whether the electrical resistance of the clamp is smaller than the reference resistance.

Description

[0001] The present invention relates to a clamp short detection device for film forming apparatus,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for detecting a short circuit of a film forming apparatus.

Generally, a film forming apparatus refers to a device that forms a coating layer such as a dielectric layer or a conductive layer on a flat panel display device or a solar cell substrate (for example, a glass substrate) with a certain thickness (for example, a thin film or a thick film). The film forming apparatus can deposit a coating layer by depositing a substrate on the inside of a vacuum chamber, ionizing and diffusing the film forming material by irradiating the film forming material with a plasma beam, and depositing ionized film forming particles on the surface of the substrate.

The film forming apparatus includes a platen on which the substrate is placed and a plurality of clamps coupled to the outside of the platen to fix the edge of the substrate. When the film forming process is performed inside the film forming apparatus, the film forming particles diffused from the film forming material are deposited not only on the surface of the substrate but also on the clamp located outside the platen. On the other hand, the insulation property between the clamp and the platen should be maintained. However, as the film formation process time accumulates, the deposition characteristics of the clamp and the platen increase, and the electrical resistance, for example, electrical resistance decreases. In addition, as the amount of deposition particles to be deposited increases, the quality of the deposition of the coating layer deposited on the substrate may change as the insulation characteristics between the clamp and the substrate are changed. In addition, when the substrate is formed of a glass substrate, the glass substrate may be damaged by sparks generated between the clamp and the substrate. Therefore, the clamp must be separated from the platen after the film forming process time to remove the coating layer deposited on the surface.

However, since the film forming apparatus maintains the vacuum state during the process, it is impossible to confirm to what extent the deposition particles are deposited on the clamp in the naked eye. Therefore, when the film forming process time is longer than the set maintenance time, The efficiency of the deposition process is deteriorated. Here, the maintenance process refers to a process of removing the deposition particles deposited on the surface of the clamp by separating the clamp from the deposition apparatus. If the deposition time does not exceed the maintenance time but the deposition particles deposited on the clamp are larger than usual, an appropriate maintenance process may not proceed, and if the maintenance process is unnecessarily performed in the opposite case . Particularly, in the case where the number of deposition particles abnormally deposited in any one of the clamps is increased, it is difficult to perform appropriate maintenance, so that the deposition may be uneven or the glass substrate may be broken during the deposition process.

Meanwhile, the above-described information disclosed in the background of the present invention is only for improving the understanding of the background of the present invention, and therefore may include information not constituting the prior art.

SUMMARY OF THE INVENTION The present invention provides a clamp short detection device for a film forming apparatus capable of measuring an electrical resistance between a clamp and a ground and generating an alarm when the measured value is equal to or less than a reference value, .

The apparatus for detecting a short circuit of a film forming apparatus according to an embodiment of the present invention includes a power supply unit for supplying DC power; A reference resistor electrically connected to the power supply; A clamp electrically connected to the reference resistor and fixed in an insulated state to a platen on which the substrate is mounted; And a sensing unit electrically connected between the reference resistor and the clamp to sense whether the electrical resistance of the clamp is smaller than the reference resistance.

The sensing unit may further include an alarm unit for outputting an alarm signal when the electrical resistance is smaller than the reference resistance.

Further, a switch may be further connected between the power supply unit and the reference resistor.

Further, the reference resistor may be a variable resistor.

Further, the platen may be grounded to the ground, and the electrical resistance of the clamp may be the electrical resistance between the clamp and the ground.

In addition, a plurality of clamps may be installed along the periphery of the platen.

The sensing unit may be configured to measure a resistance value of each of the plurality of clamps.

In addition, the sensing unit may be configured to detect whether the sum resistance of the plurality of clamps is smaller than the reference resistance by comparing the sum resistance of the clamps with the reference resistance.

The clamp short detection apparatus according to the present invention measures the electrical resistance between the clamp and the ground and generates an alarm when the measured value is less than a reference value to accurately determine the maintenance period of the clamp.

In addition, the apparatus for detecting a short-circuit of a clamp according to the present invention independently senses the electrical resistance of a plurality of clamps installed on a platen, and generates an alarm when the electrical resistance in any one of the clamps is reduced, So that it is possible to determine an accurate maintenance period of time.

1A is a perspective view showing an example of a clamp, and FIG. 1D is a perspective view showing a region in which deposition particles are deposited in a clamp .
FIGS. 2A to 2C are cross-sectional views illustrating an electrical configuration of a clamp short-circuit detection apparatus of a film forming apparatus according to an embodiment of the present invention.
3A to 3C are photographs illustrating a method of detecting a short circuit using the apparatus for detecting a short circuit of a film forming apparatus according to an embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are described in order to more fully explain the present invention to those skilled in the art, and the following embodiments may be modified into various other forms, It is not limited to the embodiment. Rather, these embodiments are provided so that this disclosure will be more faithful and complete, and will fully convey the scope of the invention to those skilled in the art.

In the following drawings, thickness and size of each layer are exaggerated for convenience and clarity of description, and the same reference numerals denote the same elements in the drawings. As used herein, the term "and / or" includes any and all combinations of one or more of the listed items. In the present specification, the term " connected "means not only the case where the A member and the B member are directly connected but also the case where the C member is interposed between the A member and the B member and the A member and the B member are indirectly connected do.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a," "an," and "the" include singular forms unless the context clearly dictates otherwise. Also, " comprise, " and / or "comprising, " when used in this specification, are intended to be interchangeable with the said forms, numbers, steps, operations, elements, elements and / And does not preclude the presence or addition of one or more other features, integers, operations, elements, elements, and / or groups.

Although the terms first, second, etc. are used herein to describe various elements, components, regions, layers and / or portions, these members, components, regions, layers and / It is obvious that no. These terms are only used to distinguish one member, component, region, layer or section from another region, layer or section. Thus, a first member, component, region, layer or section described below may refer to a second member, component, region, layer or section without departing from the teachings of the present invention.

It is to be understood that the terms related to space such as "beneath," "below," "lower," "above, But may be utilized for an easy understanding of other elements or features. Terms related to such a space are for easy understanding of the present invention depending on various process states or use conditions of the present invention, and are not intended to limit the present invention. For example, if an element or feature of the drawing is inverted, the element or feature described as "lower" or "below" will be "upper" or "above."

First, a structure of a platen and a clamp to which a clamp short-circuit detecting apparatus of a film forming apparatus according to an embodiment of the present invention is applied will be described.

1A is a perspective view showing an example of a clamp, and FIG. 1D is a perspective view showing a region in which deposition particles are deposited in a clamp .

As shown in FIG. 1A, the platen 160 constituting the film forming apparatus may be formed in a substantially rectangular flat plate shape, and a substrate, for example, a glass substrate to be deposited on the upper surface is seated. A plurality of clamps 170 are coupled to the platen 160 in an insulated state around the platen 160 so as to stably support the glass substrate on the upper surface of the platen 160.

The platen 160 may be grounded through the ground of the deposition apparatus, and the clamp 170 may be mechanically / mechanically coupled only electrically insulated to the platen 160. As shown in FIG. 1A, the clamp 170 is coupled to three or four platens 160 on one side of the platen 160. As the size of the glass substrate and the platen 160 increases, .

1B to 1D, the clamp 170 is formed on the upper surface of the platen 160 so that a part of the region (for example, the upper region) . In addition, the clamp 170 may protrude and / or be exposed through a side of the platen 160 to some other area (e.g., a lower region). Thus, the clamp may be deposited together with the deposition particles during the deposition of the glass substrate in the area indicated by a circle in FIG. 1d. Particularly, when the film-forming particles deposited on the clamp 170 have electrical conductivity, the electrical resistance is significantly lowered between the clamp 170 and the platen 160, thereby deteriorating the film-forming quality and, in some cases, An unnecessary spark, an arc, or a spark is generated between the substrate and the clamp 170. When a spark is generated between the glass substrate and the clamp 170, the glass substrate may be broken by the impact.

1B to 1D, the platen 160 may further include a plurality of plates and a frame, and the clamp 170 may be formed of a plurality of parts, Therefore, a description thereof will be omitted.

Next, a clamp short-circuit detecting apparatus of a film forming apparatus according to an embodiment of the present invention will be described.

FIGS. 2A to 2C are cross-sectional views illustrating an electrical configuration of an apparatus 100 for detecting a short circuit of a film forming apparatus according to an embodiment of the present invention.

2A and 2B, a clamp short detection device 100 of a film forming apparatus according to the present invention includes a power supply unit 110, a switch 120, a reference resistor 130, a sensing unit 140 And an alarm unit 150, as shown in FIG.

 The clamp 170 is installed in an insulated state in the platen 160. The reference resistor 130 and the sensing unit 140 are electrically connected to the clamp 170. The platen 160 is connected to the ground 180). The power supply unit 110 and the sensing unit 140 are grounded to the ground unit 180 and have a common ground potential with the platen 160.

The power supply unit 110 supplies the DC power supply voltage to the reference resistor 130 through the switch 120. For example, the power supply 110 may be a switched mode power supply and may output a 24V DC supply voltage.

The switch 120 is electrically connected between the power supply unit 110 and the reference resistor 130 so that the DC power supply voltage of the power supply unit 110 is supplied or not supplied to the reference resistor 130. That is, when the switch 120 is turned on, the DC power supply voltage is supplied to the reference resistor 130 to operate the clamp short detection device 100. When the switch 120 is turned off, the DC power supply voltage The clamp short detection device 100 does not operate. The switch 120 may be one selected from a conventional two-terminal toggle switch, a two-terminal pushbutton switch, and the like, but the type is not limited in the present invention.

The reference resistor 130 is electrically connected between the switch 120 and the sensing unit 140 and the clamp 170. The reference resistor 130 may be a fixed resistor or a variable resistor. That is, the reference resistor 130 may be formed of a fixed resistor having an appropriate resistance value according to electrical resistance generated between the clamp and the ground, or may be formed of a variable resistor having a variable resistance value. The variable resistor 130 may be one selected from a one-time variable resistor, a semi-fixed resistor, a direct-acting variable resistor, and equivalents thereof, but the kind thereof is not limited in the present invention.

The sensing unit 140 is electrically connected between the reference resistor 130 and the clamp 170 and measures the electrical resistance between the clamp 170 and the grounding unit 180. When the measured resistance value is lower than the reference resistance 130 ) Or not. If the measured resistance value is smaller than the reference resistance 130, the sensing unit 140 outputs an alarm signal to inform the user that maintenance of the clamp 170 is required. If the measured resistance value is greater than the reference resistance 130, the sensing unit 140 does not output an alarm signal. Meanwhile, the sensing unit 140 may further include a display unit 141, and the sensed voltage and whether or not an alarm is present may be displayed.

The alarm unit 150 is electrically connected to the sensing unit 140 and receives an alarm signal from the sensing unit 140. The alarm unit 150 outputs an alarm signal to the user visually and / or audibly when the alarm unit 140 outputs the alarm signal. Accordingly, the alarm unit 150 allows the user to immediately know whether the maintenance of the clamp 170 is necessary or not. The alarm unit 150 may be, for example, a speaker or a light emitting diode, but the present invention is not limited thereto. Also, as described above, the display unit 141 itself may perform the function of the alarm unit 150 visually.

The clamp 170 is coupled to the platen 160 formed of a conductive material in an insulated state and the platen 160 is electrically grounded to the grounding unit 180. Accordingly, since the conductive film forming material is formed on the surface of the clamp 170 in the process of forming the conductive film material on the glass substrate during the film forming process, the electrical resistance between the clamp 170 and the platen 160 .

The clamp 170 may be fixed to the platen 160 in an electrically insulated state with the platen 160 by means of a fixing means such as a bolt, for example, and an insulating plate. In addition, the clamp 170 may be formed of stainless steel for the purpose of fixing the glass substrate. However, the fixed shape and material of the clamp 170 are not limited here, and may include various fixed shapes and materials.

In addition, the sensing unit 140 may include one semiconductor integrated circuit. For example, the semiconductor integrated circuit includes terminals A1 and A2 as power input terminals, terminals C2 and C3 as low voltage alarm signal output terminals, terminals C5 and C6 as high voltage alarm signal output terminals, E2 terminal, and an E6 terminal which is a ground terminal. However, the semiconductor integrated circuit is only an example for understanding the present invention, and the present invention can be implemented by a conventional analog circuit or other digital circuit in addition to such a semiconductor integrated circuit.

The clamp short detection apparatus 100 of the present invention can easily grasp the time when the electrical resistance between the clamp 170 and the platen 160 becomes lower than the reference resistance 130, . In the clamp short-circuit detection device, a plurality of clamps 170 are provided on the platen 160. When at least one electrical resistance among the clamps 170 is smaller than the reference resistance 130, a maintenance process is performed .

2C shows an apparatus 100 for detecting a short circuit of a film forming apparatus according to the present invention in an equivalent circuit. As shown in FIG. 2C, the clamp short detection device 100 has one end of the switch 120 connected to the positive terminal of the power supply unit 110 that outputs the 24 V DC power supply voltage, and the other end of the switch 120 And is connected to one end of the reference resistor 130. One end of the sensing unit 140 is connected to the other end of the reference resistor 130 and the other end of the sensing unit 140 is connected to the negative terminal of the power supply unit 110 (ground unit 180). The plurality of clamps 170 may be equivalent to a plurality of resistors R11 to R17. The resistors are connected in parallel at both ends of the sensing unit 140 at both ends thereof.

The power supply unit 110 is connected in series to a combined resistance of the reference resistor 130 and the clamp 170 (resistances R11 to R17) to supply a power supply voltage of 24 V. The sensing unit 140 has a resistance value of And senses a proportional voltage.

For example, the reference resistor 130 is set to the same resistance value as the composite resistance of the first clamp so that the sensing portion 140 senses a voltage of approximately 12V. If the electric resistance of the clamp 170 is lowered to correspond to a voltage of approximately 8 V (the electric resistance of the clamp 170 is reduced by 50% from the initial value) as the film formation process proceeds, And transmits an alarm signal to the alarm unit 150. [0064] Therefore, the clamp short detection device informs that the maintenance of the clamp 170 is necessary. For example, when the resistance value of R11 to R17 corresponding to each of the clamps 170 is approximately 9 M OMEGA, the total resistance of the clamp 170 is approximately 1.3 M OMEGA. If the resistance value of any one of R11 to R17 is about 200 k [Omega], the total resistance of the clamp 170 can be about 180 k [Omega]. Also, when the resistance value of one of R11 to R17 is approximately 1 M OMEGA, the total resistance of the clamp 170 can be approximately 142 K OMEGA. Accordingly, the sensing unit 140 can accurately sense the voltage change according to the reference resistance 130 and the combined resistance of R11 to R17, whose electrical resistance is changed.

Next, a method of detecting a short circuit of a clamp short-circuit detecting apparatus of a film forming apparatus according to an embodiment of the present invention will be described.

3A to 3C are photographs illustrating a method of detecting a short circuit using the apparatus for detecting a short circuit of a film forming apparatus according to an embodiment of the present invention. Here, the CSD (Clamp Short Detector) shown in the photograph means the sensing unit.

3A, the resistance value of the reference resistor 130 is selected. For example, the resistance value of the reference resistor 130 may be varied, and the resistance value of the reference resistor 130 may be changed through the display unit 141 of the sensing unit 140 The resistance value at the time when approximately 12 V is displayed is measured. The resistance value measured by the sensing unit 140 may be measured to be approximately 1 M OMEGA.

3B, one terminal of the sensing unit 140 is connected to the clamp 170, and the other terminal of the sensing unit 140 is connected to the grounding unit 180. As shown in FIG. That is, one terminal of the sensing unit 140 is connected to the surface of the clamp 170 on which the deposition particles are deposited, and the other terminal of the sensing unit 140 is directly connected to the ground of the deposition apparatus or the platen 160 do.

Next, as shown in FIG. 3C, the voltage displayed through the display unit 141 of the sensing unit 140 is checked. A voltage of about 3.4 V may be displayed through the display unit 141 of the sensing unit 140 and an alarm may be generated. Therefore, the user can judge that the maintenance of the clamp 141 is necessary.

Actually, the electric resistance between the clamp 170 and the grounding unit 180 was measured, and the measurement was made at about 290 kohms. Accordingly, a voltage of about 3.4 V was displayed through the display unit 141, 150). That is, as described above, although the reference resistor 130 is initially set to 1 MΩ, the resistance value of the clamp 170 is smaller than the reference resistor 130, and thus an alarm is output.

The apparatus for detecting a short circuit of a film forming apparatus according to an embodiment of the present invention is installed in a film forming apparatus from the beginning and may be formed to measure the resistance value of the clamp in real time as the film forming process progresses. Therefore, the clamp short detection device can quickly and accurately detect the electrical resistance of the clamp in which the film deposition particles are deposited during the film formation process, and if the electrical resistance of the detected clamp is smaller than a preset reference resistance, , The user or the manager can determine the precise maintenance timing of the clamp on the film deposition apparatus. Therefore, the present invention allows the maintenance to be performed at an appropriate time when the maintenance timing of the clamp is not too late or too early as in the conventional case.

It is to be understood that the present invention is not limited to the above-described embodiment, and that various modifications and changes may be made without departing from the scope of the present invention as defined in the appended claims. It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

100; The clamp short detection device of the film forming apparatus according to the present invention
110; Power supply 120; switch
130; Reference resistor 140; The sensing unit
141; A display unit 150; Alarm part
160; Platen 170; clamp
180; Grounding portion

Claims (8)

A power supply unit for supplying DC power;
A reference resistor electrically connected to the power supply;
A clamp electrically connected to the reference resistor and fixed in an insulated state to a platen on which the substrate is mounted;
And a sensing unit electrically connected between the reference resistor and the clamp to measure whether the resistance value of the clamp is smaller than the reference resistance by measuring an electrical resistance value of the clamp, Short-circuit detection device. The method according to claim 1,
And an alarm unit for outputting an alarm signal when the electrical resistance is smaller than the reference resistance is further connected to the sensing unit. The method according to claim 1,
And a switch is further connected between the power supply unit and the reference resistor. The method according to claim 1,
Wherein the reference resistor is a variable resistor. The method according to claim 1,
Wherein the platen is grounded at a grounding portion,
Wherein the electrical resistance of the clamp is an electrical resistance between the clamp and the ground. The method according to claim 1,
Wherein a plurality of clamps are provided along the periphery of the platen. The method according to claim 6,
Wherein the sensing unit is configured to measure a resistance value of each of the plurality of clamps. 8. The method of claim 7,
Wherein the sensing unit is configured to detect whether the sum of the resistance values of the plurality of clamps is smaller than the reference resistance by comparing the sum resistance of the clamps with the reference resistance.
KR1020150164446A 2015-11-24 2015-11-24 Clamp short detection device of film forming apparatus KR101769132B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018212554A1 (en) 2017-05-16 2018-11-22 주식회사 엘지화학 Method for manufacturing metal foam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018212554A1 (en) 2017-05-16 2018-11-22 주식회사 엘지화학 Method for manufacturing metal foam

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