KR20170058768A - Multilayer polyvinylidene polymer piezoelectril film and the preparing method thereof - Google Patents
Multilayer polyvinylidene polymer piezoelectril film and the preparing method thereof Download PDFInfo
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- KR20170058768A KR20170058768A KR1020150162802A KR20150162802A KR20170058768A KR 20170058768 A KR20170058768 A KR 20170058768A KR 1020150162802 A KR1020150162802 A KR 1020150162802A KR 20150162802 A KR20150162802 A KR 20150162802A KR 20170058768 A KR20170058768 A KR 20170058768A
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- polyvinylidene fluoride
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- H01L41/193—
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F14/18—Monomers containing fluorine
- C08F14/22—Vinylidene fluoride
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
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- H01L41/18—
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- H01L41/183—
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- H01L41/187—
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Abstract
The present invention relates to a laminated polyvinylidene fluoride polymer piezoelectric film and a method of manufacturing the same. More particularly, the present invention relates to a laminated polyvinylidene fluoride polymer piezoelectric film having improved d33 value and excellent vibration characteristics, To a laminated polyvinylidene fluoride polymer piezoelectric film capable of securing a lightweight material and a miniaturized driving body through integration with a sensor and a vibration element, and a method for manufacturing the same.
Description
The present invention relates to a laminated polyvinylidene fluoride polymer piezoelectric film and a method of manufacturing the same. More particularly, the present invention relates to a laminated polyvinylidene fluoride polymer piezoelectric film having improved d33 value and excellent vibration characteristics, To a laminated polyvinylidene fluoride polymer piezoelectric film capable of securing a lightweight material and a miniaturized driving body through integration with a sensor and a vibration element, and a method for manufacturing the same.
Recently, with the development of multimedia devices and the convergence of electronic devices, multi-function and high-end portable electronic devices are being developed in succession. These portable devices include a piezoelectric device for haptic The device is used as a means to transmit stereoscopic touch to a user when driving various applications such as a game or a character input.
Currently, most mobile devices including smart phones are performing character input and applications using a touch screen. Conventionally, a vibration motor built in a mobile device is driven by a driving voltage generated by a current applied when a touch screen is contacted However, since it has a disadvantage that the response speed is slower than the low cost, it has been rapidly replaced with a piezoelectric device in recent mobile devices aiming at high-end.
A piezoelectric element is operated by an electric field formed between two electrodes of a positive electrode and a negative electrode by applying a voltage to a piezo piezoelectric body and the electric field movement causes a deformation of the structure due to a dipole generated inside the piezoelectric body , The vibration can be generated by the mechanical displacement characteristic in the longitudinal direction or the cross sectional direction through the structural deformation.
Such a piezoelectric element converts an electrical signal into a mechanical displacement. Since the reaction speed is several times faster than that of a conventional vibration motor, an instantaneous haptic function can be realized.
On the other hand, since the polyvinylidene fluoride polymer piezoelectric film exhibits piezoelectricity in a molecular structure having a? -Form crystal structure, in order to change the? -Form crystal structure into a? -Form crystal structure in order to impart piezoelectricity to the film, And stretching.
The polyvinylidene fluoride polymer piezoelectric film can be used as an actuator driven by an electrical signal. At present, the piezoelectric vibrator using the polyvinylidene fluoride polymer exhibits significantly lower vibration characteristics than the vibrator using the ceramic element. Accordingly, in order to manufacture a transparent actuator that can be applied to various fields, it is necessary to improve the vibration characteristics of PVDF.
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a laminated body by alternately stacking a polyvinylidene fluoride polymer piezoelectric film with an electrode layer to improve a d33 value, A laminated polyvinylidene fluoride polymer piezoelectric film which can be applied to various fields based on a transparent PVDF material with a lower rate of degradation and can secure a lightweight and miniaturized driving body by integrating with a touch sensor and a vibration element and a manufacturing method thereof .
The present invention is characterized in that it includes a laminate in which an internal electrode layer is formed between two polyvinylidene fluoride polymer thin film layers arranged in the same polarization direction, and a surface electrode layer is formed on both sides of the outermost surface of the laminate A piezoelectric film is provided.
In a preferred embodiment of the present invention, the laminate may include the same or different polyvinylidene fluoride piezoelectric films.
In one preferred embodiment of the present invention, the thickness of the polyvinylidene fluoride-based polymer thin film is 1 to 100 탆, and the thickness of the electrode layer is 50 nm to 1 탆.
In a preferred embodiment of the present invention, the thickness ratio of the polyvinylidene fluoride polymer thin film to the surface electrode layer or the internal electrode layer may be 1: 0.00001 to 1.
In one preferred embodiment of the present invention, the polyvinylidene fluoride-based polymer thin film is formed of at least one of vinylidene fluoride, TrFE, , hexafluorepropylene) may be included.
In a preferred embodiment of the present invention, the polyvinylidene fluoride piezoelectric film laminate may have a piezoelectric coefficient D33 of 15 pC / N or more.
In a preferred embodiment of the present invention, the internal electrode layer may be an adhesive electrode layer.
In one preferred embodiment of the present invention, the adhesive electrode layer may include one selected from the group consisting of a conductive metal, silicon added with ceramics, an epoxy resin, a urethane resin, and an acrylic resin.
In an exemplary embodiment of the present invention, the internal electrode layer may include an electrode layer attached to one surface of the polyvinylidene fluoride-based polymer thin film facing one another at an interface at which the polyvinylidene fluoride-based polymer thin film is stacked; And an adhesive layer for adhering them.
In one preferred embodiment of the present invention, the electrode layer includes a thin film surface-coated with at least one selected from the group consisting of a metal, a conductive polymer, a conductive ceramic, and a conductive transparent electrode of 1 k? / Square or less, An epoxy resin, a urethane resin, an acrylic resin, and an adhesive sheet.
In one preferred embodiment of the present invention, the surface electrode layer may include a thin film surface-coated with at least one selected from the group consisting of a metal, a conductive polymer, a conductive ceramic, and a conductive transparent electrode of 1 k? / Square or less.
In a preferred embodiment of the present invention, the vibration displacement of the laminated polyvinylidene fluoride polymer piezoelectric film can be improved by 10% or more as compared with the monolayer polyvinylidene fluoride polymer piezoelectric film.
In an exemplary embodiment of the present invention, the electrode assembly includes two or more PVDF polymer thin film layers, and an internal electrode may be formed between each PVDF polymer thin film layer and the PVDF polymer thin film layer.
In one preferred embodiment of the present invention, the polyvinylidene fluoride-based polymer thin film may include a polymer thin film containing 1 to 50 wt% of a piezoelectric ceramic including PZT, PLZT, BiTiO 3 , SBT, and the like.
The present invention relates to a laminated polyvinylidene fluoride polymer piezoelectric film and a method of manufacturing the same, and more particularly, to a laminated polyvinylidene fluoride polymer piezoelectric film produced by alternately laminating a polyvinylidene fluoride polymer piezoelectric film and an electrode layer, It can be applied to various fields based on transparent PVDF material with low rate of transparency lowering with excellent vibration characteristics. Laminated polyvinylidene fluoride polymer capable of securing a light weight material and a miniaturized driving body by integrating with touch sensor and vibration element To a piezoelectric film.
1 is a cross-sectional view of a laminated piezoelectric film according to a preferred embodiment of the present invention.
2 is a cross-sectional view of an internal electrode layer according to a preferred embodiment of the present invention.
3 is a cross-sectional view of a laminated piezoelectric film according to a preferred embodiment of the present invention.
4 is a cross-sectional view of a laminated piezoelectric film according to a preferred embodiment of the present invention.
Hereinafter, the present invention will be described in more detail.
The present invention includes a laminated body in which internal electrode layers (30, 33) are formed between two polyvinylidene fluoride polymer thin film layers (10) arranged in the same polarization direction, and on both outermost surfaces of the laminated body, (20) is formed on the surface of the piezoelectric film. Thus, the piezoelectric film can be applied to various fields based on a transparent PVDF material with a low rate of decrease in transparency while having excellent vibration characteristics. It is possible to secure a lightweight and miniaturized drive body.
In a preferred embodiment of the present invention, the laminate may include the same or different polyvinylidene fluoride piezoelectric films, but any of polyvinylidene fluoride piezoelectric films laminated to improve the vibration characteristics And it is not particularly limited to the kind.
As described above, in the polyvinylidene fluoride polymer piezoelectric film laminated in the same polarization direction, the piezoelectric coefficient D33 is proportionally increased and the vibration characteristics can be improved.
Also, in a preferred embodiment of the present invention, the laminate includes at least three polyvinylidene fluoride polymer thin film layers, and between the respective polyvinylidene fluoride polymer thin film layers and the polyvinylidene fluoride polymer thin film layer, May be formed. When the laminate includes three or more polyvinylidene fluoride polymer thin film layers, the piezoelectric coefficient D33 may be proportionally increased to improve the vibration characteristics.
At this time, the polyvinylidene fluoride polymer piezoelectric film can use a polyvinylidene fluoride polymer piezoelectric film containing 50% or more of a? -Type crystal structure with respect to the entire crystal structure of the piezoelectric film, and the ratio of the? -Type crystal structure is FT- Can be determined as the ratio of the peak intensity of the? -Form crystal structure and the? -Type crystal structure observed through IR.
In a preferred embodiment of the present invention, the thickness of the polyvinylidene fluoride polymer thin film is 1 to 100 μm, and the thickness of the surface electrode layer or the internal electrode layer is 50 nm to 1 μm. When the thickness of the polyvinylidene fluoride polymer thin film is less than 1 탆, the improvement of the vibration characteristics is deteriorated due to the thickness ratio with the electrode. When the thickness exceeds 100 탆, the polarization efficiency due to the application of a very high voltage is decreased There is a problem.
In one preferred embodiment of the present invention, the thickness ratio of the polyvinylidene fluoride piezoelectric film to the surface electrode layer or the internal electrode layer may be 1: 0.00001 to 1. When the thickness ratio of the polyvinylidene fluoride piezoelectric film to the surface electrode layer or the internal electrode layer is less than 1: 0.00001, the electrode efficiency may decrease. When the thickness ratio exceeds 1: 1, the efficiency of improving the vibration characteristics is low .
In this case, the internal electrode layer may be an adhesive electrode layer 33, and the adhesive electrode layer 33 may be formed of a conductive metal, a ceramic resin such as CB, CNT or Graphene, an epoxy resin, a urethane resin, and an acrylic resin And may be used as an electrode layer while exhibiting adhesiveness.
Alternatively, the internal electrode layer may include an
In this case, each of the surface electrode layer and the internal electrode layer may include a thin film surface-coated with at least one selected from the group consisting of a metal having a surface resistance of 1 k? / Square or less, a conductive polymer, a conductive ceramic, and a conductive transparent electrode, It is preferable to use a conductive transparent electrode. When a conductive transparent electrode is used as an electrode layer, a transparent piezoelectric film laminate can be manufactured and a transparent actuator including the transparent piezoelectric film laminate can be manufactured. It can be applied to portable and small portable electronic devices. For example, the laminated polyvinylidene fluoride polymer piezoelectric film according to the present invention is applicable to all types of communication terminals such as a digital camera, a personal digital assistant (PDA) A portable multimedia player (PMP), an MP3 player, a digital broadcasting player, a smart phone, and the like, as well as multimedia appliances and applications thereof.
At this time, the metal having a surface resistance of 1 k? /? Or less may be Cu, Al, Ag, Pt, Au, etc., and the surface resistance may preferably be 100? /? Or less. The conductive polymer may include at least one polymer selected from the group consisting of PEDOT (poly 3,4-ethylenedioxythiophene), PPy (poly pyrrole), and PANI (polyaniline). The ceramic conductor may include ITO, AZO And carbon nanotubes (CNTs), graphene, and the like.
In a preferred embodiment of the present invention, the polyvinylidene fluoride piezoelectric film laminate may have a piezoelectric coefficient D33 of 15 pC / N or more.
In a preferred embodiment of the present invention, the vibration displacement of the laminated polyvinylidene fluoride polymer piezoelectric film can be improved by 10% to 30% or more as compared with the monolayer polyvinylidene fluoride polymer piezoelectric film.
At this time, the vibration displacement was measured by attaching the laminated polyvinylidene fluoride polymer piezoelectric film to a 0.5 mm thick acrylic sheet using a 3 탆 adhesive layer, applying an AC voltage, and measuring the vibration displacement of the thin film at a certain frequency through a laser displacement sensor Can be measured.
The present invention also provides a process for producing the laminated polyvinylidene fluoride polymer piezoelectric film. The method for producing the laminated polyvinylidene fluoride polymer piezoelectric film includes the steps of: preparing a polyvinylidene fluoride-based polymer thin film; Stretching the thin film through uniaxial or biaxial stretching; A third step of polarizing the oriented polyvinylidene fluoride polymer thin film; And a fourth step of laminating the polarized polyvinylidene fluoride piezoelectric film
According to the above method, the polyvinylidene fluoride polymer thin film is laminated to produce a laminated body, and the value of d33 is improved to provide a vibration sensor with low vibration durability and low transparency, which can be applied to various fields based on a transparent PVDF material. It is possible to manufacture a laminated polyvinylidene fluoride polymer piezoelectric film capable of securing a lightweight material and a miniaturized driving body. Hereinafter, the present invention will be described in more detail by step.
In the method of manufacturing a piezoelectric film according to the present invention, the step 1 is a step of preparing a polyvinylidene fluoride polymer thin film, and the polyvinylidene fluoride polymer composition is prepared in the form of a thin film by extrusion or casting . At this time, the polyvinylidene fluoride-based polymer in the first step is composed of vinylidene fluoride, TrFE, chlorotrifluoroethylene (CTrFE), and hexafluoropropylene (HFP). , Preferably at least 100 wt% of a polymer of vinylidene fluoride, or at least one copolymer selected from the group consisting of trifluoroethylene, chlorotrifluoroethylene, hexafluoroethylene, Based on the total weight of the polyvinylidene fluoride-based polymer thin film is 10 to 60% by weight. At this time, it is preferable that the polyvinylidene fluoride polymer of the first stage has a melting point of 170 캜 or less.
In addition, the thin film in the first step may further include at least one selected from the group consisting of a tetravalent ammonium salt, an inorganic substance surface-treated with a tetravalent ammonium salt, and an organic substance surface-treated with a tetravalent ammonium salt. When the thin film is extruded, it can be mixed with the polyvinylidene fluoride polymer thin film, and an organic substance surface-treated with the quaternary ammonium salt, quaternary ammonium salt, or quaternary ammonium salt can be introduced as an additive, The? -Form crystal structure of the lithium fluoride-based polymer thin film can be improved.
At this time, the thickness of the thin film in the first step may be 5 ~ 1000 탆, preferably 80 ~ 1000 탆. If the thickness of the thin film is less than 5 탆, the thin film may be damaged during the stretching process. If the thickness exceeds 1000 탆, the flexibility of the thin film is decreased.
In the method of manufacturing a piezoelectric film according to the present invention, the second step is a step of stretching a polyvinylidene fluoride polymer thin film through one axis or biaxial,
The stretching may be performed at 70 to 160 ° C at 100 to 600%, preferably at 70 to 120 ° C at 200 to 400%. The polyvinylidene fluoride-based polymer thin film may be used in an unstretched state, but when stretched, the polyvinylidene fluoride crystal structure is transformed from non-polar α form to polar form β form (I form) Piezoelectricity (superconductivity) may appear. If the stretching is performed at a temperature lower than 70 ° C, stretching is not easily performed. If the stretching is performed at a temperature higher than 160 ° C, the thin film may melt. In addition, when the film is stretched to 400% or more, the thin film may be broken.
In the method of manufacturing a piezoelectric film according to the present invention, the above step 3 is a step of polarizing a stretched polyvinylidene fluoride polymer thin film. In the above step 3, the polarization method is introduced by a contact method or a polarization method using a corona discharge . The polarization may be performed by applying a voltage of 50 to 500 V / m, and preferably by applying a voltage of 100 to 400 V / m. When a voltage of less than 50 V / 탆 is applied, the piezoelectric property of the piezoelectric film is not expressed, and when a voltage exceeding 500 V / 탆 is applied, insulation breakdown easily occurs
In the method for manufacturing a piezoelectric film according to the present invention, the step 4 is a step of laminating a polarized polyvinylidene fluoride polymer thin film to form a laminate, wherein the polarized polyvinylidene fluoride polymer thin film is aligned in a direction The internal electrode layer and the surface electrode layer may be formed on both sides of the outermost surface of the laminate. The internal electrode layer and the surface electrode layer may be formed of a transparent electrode And thus a transparent piezoelectric film laminate can be manufactured, and a transparent actuator including the transparent piezoelectric film laminate can be manufactured. It can be applied to portable and small portable electronic devices.
Hereinafter, the present invention will be described in more detail with reference to the following examples. The following examples are provided to illustrate the present invention and do not limit the scope of the present invention.
[ Example ]
Example 1: Preparation of laminated polyvinylidene fluoride polymer piezoelectric film
A PVDF piezoelectric film having a piezoelectric coefficient D33 of 21 pC / N was deposited on the ITO electrode in the same polarization direction to form a bimorph polyvinylidene fluoride polymer piezoelectric film by laminating two layers having alternating electrodes.
Example 2: Preparation of laminated polyvinylidene fluoride polymer piezoelectric film
PVDF piezoelectric films each having a piezoelectric coefficient D33 of 21 pC / N were aligned in the same polarization direction
ITO electrodes were deposited and stacked in a four-layer structure with alternating electrodes to form a multi-layer structure
To prepare a polyvinylidene fluoride polymer piezoelectric film.
Example 3: Preparation of laminated polyvinylidene fluoride polymer piezoelectric film
PVDF piezoelectric films each having a piezoelectric coefficient D33 of 21 pC / N were laminated in a two-layer structure by depositing ITO electrodes in the same polarization direction to form a bimorph structure without internal electrodes.
Comparative Example One. Laminated type Polyvinylidene fluoride Manufacture of polymer piezoelectric film
ITO electrodes were deposited on both sides of a PVDF piezoelectric film having a piezoelectric coefficient D33 of 21 pC / N
Comparative Example 2. Laminated type Polyvinylidene fluoride Manufacture of polymer piezoelectric film
A PVDF piezoelectric film having a piezoelectric coefficient D33 of 21 pC / N is disposed in a direction opposite to the polarization direction
ITO electrodes were deposited and laminated in a two - layer structure with alternating electrodes to form a bimorph structure.
[ Experimental Example ]
Experimental Example One. Laminated type Polyvinylidene fluoride Manufacture of polymer piezoelectric film
In each of Examples 1 to 3 and Comparative Examples 1 and 2, the laminated PVDF piezoelectric film was bonded to a 0.5 mm acrylic sheet through a 3 탆 adhesive layer, an AC voltage of 500 V was applied, and a laser displacement sensor was connected to measure the vibration displacement Respectively. In this case, the AC waveform and the frequency at the vibration displacement measurement were measured as a square wave and a vibration displacement at 300 Hz. The results are shown in Table 1 below.
(pC / N)
(탆)
According to Examples 1 to 3, the two-layer PVDF piezoelectric film laminated in the same polarization direction had a piezoelectric coefficient value D33 superior to the PVDF of Comparative Example 1 made of a single layer, and the vibration displacement value was also improved by 10% or more I could confirm. Also, it was confirmed that the PVDF piezoelectric film of Comparative Example 2, which is laminated in two layers, but laminated in the opposite polarization direction, significantly decreases the piezoelectric coefficient value and decreases the vibration acceleration value.
10: polyvinylidene fluoride-based polymer piezoelectric film
20: surface electrode layer
30: internal electrode layer
31: Adhesive layer
32: electrode layer
33: Adhesive electrode layer
Claims (13)
Wherein a surface electrode layer is formed on both surfaces of the outermost layer of the laminate.
The laminated polyvinylidene fluoride polymer piezoelectric film according to any one of claims 1 to 3, wherein the laminate comprises the same or different polyvinylidene fluoride piezoelectric films.
Wherein the thickness of the polyvinylidene fluoride polymer thin film is 1 to 100 占 퐉 and the thickness of the electrode layer is 50 nm to 1 占 퐉.
Wherein the thickness ratio of the polyvinylidene fluoride polymer thin film to the surface electrode layer or the internal electrode layer is 1: 0.00001 to 1, respectively.
The polyvinylidene fluoride-based polymer thin film is preferably a thin film of a polymer selected from the group consisting of vinylidene fluoride, TrFE, chlorotrifluoroethylene (CTrFE), hexafluoropropylene (HFP), hexafluoropropylene Polyvinylidene fluoride polymer piezoelectric film comprising at least one kind of polymer thin film.
Wherein the polyvinylidene fluoride piezoelectric film laminate has a piezoelectric coefficient D33 of 15 pC / N or more.
Wherein the internal electrode layer is an adhesive electrode layer.
Wherein the adhesive electrode layer includes one selected from the group consisting of a conductive metal, silicon added with ceramics, epoxy resin, urethane resin, and acrylic resin.
Wherein the internal electrode layer comprises: an electrode layer attached to one surface of the polyvinylidene fluoride-based polymer thin film facing one another at an interface at which the polyvinylidene fluoride-based polymer thin film is stacked; And an adhesive layer for adhering these layers. The laminated polyvinylidene fluoride polymer piezoelectric film according to claim 1,
Wherein the electrode layer comprises a thin film surface-coated with at least one selected from the group consisting of a metal, a conductive polymer, a conductive ceramic, and a conductive transparent electrode of 1 k? / Square or less, the adhesive layer being made of silicon, epoxy resin, urethane resin, And an adhesive sheet. The laminated polyvinylidene fluoride polymer piezoelectric film according to claim 1,
Wherein the surface electrode layer comprises a thin film surface-coated with at least one selected from the group consisting of a metal of 1 k? / Square or less, a conductive polymer, a conductive ceramic, and a conductive transparent electrode.
Wherein the electrode body comprises at least two polyvinylidene fluoride polymer thin film layers and an inner electrode is formed between each polyvinylidene fluoride polymer thin film layer and the polyvinylidene fluoride polymer thin film layer. Fluoropolymer piezoelectric film.
Wherein the polyvinylidene fluoride-based polymer thin film comprises a polymer thin film containing 1 to 50 wt% of a piezoelectric ceramic including PZT, PLZT, BiTiO 3 , SBT, and the like.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883650A (en) * | 2020-07-20 | 2020-11-03 | 清华大学深圳国际研究生院 | Preparation method of flexible multilayer composite piezoelectric film and flexible multilayer composite piezoelectric film |
| CN113483883A (en) * | 2021-07-05 | 2021-10-08 | 南京理工大学 | Self-powered visual sound sensor |
| US20220348729A1 (en) * | 2021-04-30 | 2022-11-03 | Meta Platforms Technologies, Llc | Pvdf thin film having a bimodal molecular weight and high piezoelectric response |
-
2015
- 2015-11-19 KR KR1020150162802A patent/KR20170058768A/en not_active Application Discontinuation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111883650A (en) * | 2020-07-20 | 2020-11-03 | 清华大学深圳国际研究生院 | Preparation method of flexible multilayer composite piezoelectric film and flexible multilayer composite piezoelectric film |
| CN111883650B (en) * | 2020-07-20 | 2023-09-15 | 清华大学深圳国际研究生院 | Preparation method of flexible multilayer composite piezoelectric film and flexible multilayer composite piezoelectric film |
| US20220348729A1 (en) * | 2021-04-30 | 2022-11-03 | Meta Platforms Technologies, Llc | Pvdf thin film having a bimodal molecular weight and high piezoelectric response |
| CN113483883A (en) * | 2021-07-05 | 2021-10-08 | 南京理工大学 | Self-powered visual sound sensor |
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