KR20170051700A - Nano-texture heat sink plate and method for manufacturing the same - Google Patents

Nano-texture heat sink plate and method for manufacturing the same Download PDF

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KR20170051700A
KR20170051700A KR1020150152111A KR20150152111A KR20170051700A KR 20170051700 A KR20170051700 A KR 20170051700A KR 1020150152111 A KR1020150152111 A KR 1020150152111A KR 20150152111 A KR20150152111 A KR 20150152111A KR 20170051700 A KR20170051700 A KR 20170051700A
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South Korea
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nozzle
thermally conductive
coating liquid
base plate
nano
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KR1020150152111A
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Korean (ko)
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KR101780555B1 (en
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윤석구
이종건
김도연
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고려대학교 산학협력단
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating
    • H05K7/2039—Modifications to facilitate cooling, ventilating, or heating characterised by the heat transfer by conduction from the heat generating element to a dissipating body
    • H05K7/20509—Multiple-component heat spreaders; Multi-component heat-conducting support plates; Multi-component non-closed heat-conducting structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
    • B05D1/04—Processes for applying liquids or other fluent materials performed by spraying involving the use of an electrostatic field
    • B05D1/06—Applying particulate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • B22F1/0003—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00—Metallic composition of the powder or its coating
    • B22F2301/25—Noble metals, i.e. Ag Au, Ir, Os, Pd, Pt, Rh, Ru
    • B22F2301/255—Silver or gold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites

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  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Spinning Methods And Devices For Manufacturing Artificial Fibers (AREA)

Abstract

The present invention relates to a nano-texture heat sink capable of improving heat dissipation performance by generating nano-texture on the surface by a coating method using a thermally conductive nano-structure, and a manufacturing method thereof. The nano-texture heat sink according to the present invention comprises: a base plate which forms a frame; and a nano-texture layer which is formed by laminating a thermally conductive nano-structure on the surface of the base plate. The manufacturing method of the nano-texture heat sink according to the present invention comprises: a step of preparing a base plate forming a frame; and a step of coating a thermally conductive nano-structure on the surface of the base plate to form a nano-texture layer formed of the thermally conductive nano-structure. The nano-texture heat sink according to the present invention is provided with the nano-texture layer on which the thermally conductive nano-structure with excellent thermal conductivity is laminated on the surface of the base plate forming a frame, the surface area capable of emitting heat is maximized, and heat dissipation efficiency is excellent.

Description

TECHNICAL FIELD [0001] The present invention relates to a nano-textured heat sink and a method of manufacturing the same,

The present invention relates to a heat sink, and more particularly, to a nano-texture heat sink capable of improving the heat dissipation performance by forming a nanotructure on a surface by a coating method using a thermally conductive nanostructure, and a method of manufacturing the same.

BACKGROUND ART [0002] In recent years, electronic devices used in automobiles, electric / electronic fields, and the like have been sought to be lightweight, thin, miniaturized, and versatile. As these electronic devices become more highly integrated, more heat is generated. Such generated heat not only deteriorates the function of the device but also causes malfunction of the peripheral device and deterioration of the substrate. Therefore, much attention and research have been conducted on the heat dissipation technology.

A heat sink of a metal such as a heat sink is mainly used for dissipating heat generated in the device. A conventional heat sink is made of a metal having a high thermal conductivity and is disposed adjacent to the maximum heat generating portion of the device to absorb unnecessary heat generated in the device and to dissipate the heat to the outside.

Such a conventional heat sink is generally manufactured by a method of heating and melting aluminum, copper and an alloy thereof at a high temperature and extrusion molding using a mold having a certain shape.

However, the manufacturing process of the heat dissipating plate by the extrusion molding method using the metal mold is complicated and requires a separate metal mold for manufacturing the heat dissipating plate having various shapes. Further, in order to secure required physical properties such as electrical insulation and oxidation resistance, a separate process such as anodizing must be performed. In this process, a large amount of acid or basic waste is generated and additional processing costs are incurred.

Furthermore, conventional heat sinks made of metal such as aluminum, copper, iron, zinc, silver and gold require a complicated structure in order to lower the heat generated per unit area to a desired level. As a result, the amount of metal used is large, resulting in an increase in the weight and volume of the entire product, and the price is also increased.

Korean Registered Patent No. 1058156 (Aug. 24, 2011) Korean Registered Patent No. 0944373 (Feb. 26, 2010) Korean Patent Laid-Open Publication No. 2014-0041807 (Apr.

Disclosure of Invention Technical Problem [8] The present invention has been made in order to solve the problems of the prior art as described above, and it is an object of the present invention to provide a nanotexture structure on a surface by coating a fine thermally conductive nanostructure to maximize a surface area, And to provide a method of manufacturing the same.

In order to solve the above-mentioned problems, the nano-texture heat sink of the present invention includes a base plate forming a framework and a nano texture layer formed by laminating a thermally conductive nanostructure on a surface of the base plate.

The thermally conductive nanostructure constituting the nano-texture layer may be a thermally conductive nanowire.

The thermally conductive nanowire may be a silver-nanowire.

The thermally conductive nanostructure constituting the nano-texture layer may include nanofibers and a metal layer laminated on the surface of the nanofibers.

The thermally conductive nanostructure constituting the nano-texture layer may include nanoparticles and a thermally conductive particle layer laminated on the surface of the nanoparticles.

The thermally conductive particle layer constituting the thermally conductive nanostructure may be made of thermally conductive particles selected from carbon nanotubes and conductive nanowires.

According to another aspect of the present invention, there is provided a method of manufacturing a nano-texture heat dissipation plate including the steps of: (a) preparing a base plate constituting a framework; (b) forming a thermally conductive nanostructure on the surface of the base plate; And forming a nano-texture layer made of the thermally conductive nanostructure.

In the step (b), the thermally conductive nanowire may be coated on the surface of the base plate by a coating method selected from a spray coating method, a spin coating method and a dip coating method as the thermally conductive nanostructure, .

The step (b) uses a spray coating method. The step (b) includes a supersonic injection nozzle for injecting the working gas in a supersonic state, a mixed-solution supply device for storing the mixed solution containing the thermoconductive nanowire and connected to the supersonic injection nozzle And supplying the mixed solution stored in the mixed solution supply device to the supersonic spray nozzle to spray the mixed solution through the supersonic spray nozzle to spray the working gas through the supersonic spray nozzle And depositing the thermally conductive nanowires on the base plate by spraying the base plate with the working gas.

The step (b) may further include a step of heating the base plate on which the thermally conductive nanowires are deposited and coated.

The step (b) may further include the step of irradiating a laser beam onto the thermally conductive nanowire deposited on the base plate.

The step (b) comprises: electrospinning the nanofibers on the surface of the base plate; plating the nanofibers electrospun on the base plate to form the thermally conductive nanostructure in a structure in which the nanofibers are plated with a metal layer; Forming a coating on the surface of the base plate.

The step of electrospinning the nanofibers comprises: an electrospinning nozzle for subjecting the spinning fluid to fiberization through a high voltage; a high voltage generator for applying a high voltage to the electrospinning nozzle; A step of preparing an electrospinning device including a ground power source for forming an electric field in a space between the electrospinning nozzle and a gas injection nozzle for injecting a working gas so that the base plate is spaced apart from the gas injection nozzle And a step of spraying the spinning solution into the air stream of the working gas through the spinning nozzle while spraying the working gas toward the base plate through the gas spraying nozzle so as to operate the fibers discharged from the spinning nozzle And laminating the base plate with a fluid force of gas All.

In the step of electrospinning the nanofibers, the ground power source may be connected to the gas injection nozzle to guide the fibers discharged from the electrospinning nozzle toward the gas injection nozzle by an electrostatic force.

The method of claim 1, wherein the step (b) comprises: supplying a nanoparticle feeder to supply the nanoparticles to the nanoparticle feeder; A high-voltage generator for applying a high voltage to the coating liquid spraying nozzle, a high-voltage generator for applying a high voltage to the coating liquid spraying nozzle, a high-voltage generator for applying a high voltage to the coating liquid spraying nozzle, Preparing a surface coating device including a ground power source for forming an electric field in a space between the coating liquid spray nozzle and the coating liquid spray nozzle so that the coating liquid discharged from the coating liquid spray nozzle is induced by an electrostatic force; Disposing it so as to face away from the injection nozzle, By spraying the coating liquid supplied from the coating liquid feeder into the flow of the nanoparticles through the coating liquid injection nozzle while spraying the nanoparticles supplied from the nozzle particle feeder toward the base plate through the nanoparticle spray nozzle, Forming a thermally conductive nanostructure having a structure in which the nanoparticles are covered with the thermally conductive particles of the coating liquid on the surface of the base plate by attaching the coating liquid to the surface of the nanoparticles injected into the coating liquid by an electric field can do.

In the step (b), the thermally conductive particles constituting the coating liquid may be selected from carbon nanotubes and conductive nanowires.

The step (b) may further include heating the base plate coated with the nanostructure.

In the step (b), the grounding power source may be connected to the nanoparticle spraying nozzle so that the coating liquid discharged in a droplet form from the coating liquid spraying nozzle may be guided toward the nanoparticle spraying nozzle by an electrostatic force.

In the step (b), a plurality of the coating liquid spray nozzles may be disposed around the flow flow of the nanoparticles by the nanoparticle spray nozzles, and the coating liquid may be sprayed into the flow of the nanoparticles from the plurality of coating liquid spray nozzles.

In the step (b), the surface coating apparatus includes a nozzle support disposed outside the flow of nanoparticles by the nanoparticle spraying nozzle so as to support the plurality of coating solution spraying nozzles, Further comprising a coating liquid distributing channel provided in the nozzle support to connect the nozzle so as to allow fluid movement while distributing the coating liquid supplied from the coating liquid supplier to the plurality of coating liquid spray nozzles through the coating liquid distributing channel, The coating solution can be sprayed from the coating solution spraying nozzle of FIG.

In the step (b), the surface coating apparatus may further include a grounding member disposed in the flow of the nanoparticles by the nanoparticle spraying nozzle to be connected to the grounding power supply, wherein the grounding member The coating solution can be sprayed toward the surface of the substrate.

In the nano-texture heat sink according to the present invention having the above-described structure, the nano-texture layer in which the thermally conductive nano-structure having excellent thermal conductivity is laminated on the surface of the base plate constituting the framework is provided, . Therefore, the heat dissipation efficiency is excellent.

FIG. 1 shows an example of a nano-texture heat sink according to the present invention in which a nano-texture layer is formed using silver-nanowires as a thermally conductive nano-structure, in comparison with a general heat sink.
2 is an SEM image showing an enlarged portion of the portion 'A' in FIG.
3 is an SEM image showing an enlarged view of a portion 'B' in FIG.
FIG. 4 is a graph showing an experimental result of comparing heat dissipation performance of a nano-texture heat sink according to the present invention shown in FIG. 1 and a general heat sink.
FIG. 5 schematically shows an example of a coating apparatus for manufacturing a nano-texture heat sink according to the present invention.
6 schematically shows another example of a coating apparatus for manufacturing a nano-texture heat sink according to the present invention.
7 schematically shows an electrospinning apparatus for manufacturing a nanofitre heat sink according to the present invention.
8 is a schematic view of a plating apparatus for manufacturing a nano-texture heat sink according to the present invention.
9 is a schematic view of a surface coating apparatus for manufacturing a nano-texture heat sink according to the present invention.
10 is a schematic cross-sectional view of a portion of a nanofitre heat sink fabricated by the surface coating apparatus shown in FIG.
11 and 12 are a front view and a side view for explaining a modification of the surface coating apparatus for manufacturing the nano-texture heat sink according to the present invention.

Hereinafter, a nano-texture heat sink according to the present invention and a method of manufacturing the same will be described with reference to the drawings.

FIG. 1 shows an example of a nano-texture heat sink according to the present invention in which a nano-texture layer is formed by using silver-nanowires as a thermally conductive nano-structure. FIG. 2 is a cross- 3 is an SEM image showing an enlarged view of a portion 'B' in FIG. 2. FIG.

1 to 3, the nano-texture heat sink 100 according to the present invention includes a base plate 110 forming a framework and a nano-texture layer 120 formed on a surface of the base plate 110. The nano texture heat sink 100 has a heat dissipation efficiency higher than that of the conventional heat sink 10 because the nano texture layer 120 maximizes heat exchange surface area.

The base plate 110 is preferably made of a material having excellent thermal conductivity such as metal. The nano texture layer 122 is formed to cover the surface of the base plate 110 by stacking the thermally conductive nanostructure 121 on the base plate 110. The thermally conductive nanostructure may be a thermally conductive nanowire 121 having excellent thermal conductivity such as silver-nanowire or a metal layer coated on the surface of the nanofiber 401 (see FIG. 7) or nanoparticles 603 ) Coated with a thermally conductive particle layer 605 (see FIG. 10) on the surface of the thermally conductive particle layer 605 (see FIG. 10). As the nanoparticles 603 constituting the thermally conductive nanostructure, silver, aluminum, copper, nickel, or the like may be used. The thermally conductive particle layer 605 may be formed of carbon nanotubes (CNT) or conductive nanowires.

Examples of a method of forming the nanotructure layer by coating the various types of thermally conductive nanostructures on the base plate 110 include a spray coating method, an electrospinning method, a spin coating method, a dip coating method, and the like according to the kind of the thermally conductive nanostructure Various methods can be used.

The nano-texture heat sink 100 according to the present embodiment is formed by coating silver-nanowires on a base plate 110 as a thermally conductive nano-structure 121 to form a nano-texture layer 120. In this embodiment, a copper substrate is used as the base plate 110, and the silver-nanowire is coated on the base plate 110 through a low-temperature spraying method under a pressure of 4 bar and a temperature of 300 degrees. 2 and 3, it can be seen that the thermally conductive nanostructures 121 made of silver nanowires are laminated on the surface of the base plate 110 in the form of a web to form the nanotructure layer 120.

FIG. 4 is a graph showing experimental results comparing heat dissipation performance of the nano-texture heat sink 100 and the general heat sink 10 according to the present embodiment. In the heat dissipation performance comparison experiment, the nano-texture heat sink 100 according to the present invention and the general heat sink 10 were brought into contact with the heat source using an electric heating device, and the temperature changes of the heat sources with time were measured, . The temperature of the heat source changes depending on the amount of power supplied. The coated structure of the silver-nanowire changes depending on the coating conditions, which may cause a difference in heat dissipation efficiency.

4, it can be seen that the nano-texture heat sink 100 according to the present invention exhibits an excellent heat dissipation effect as compared with a general heat sink 10.

As described above, the nano-texture heat sink 100 according to the present embodiment is provided with the nano-texture layer 120 in which the thermally conductive nano-structure 121 having excellent thermal conductivity is laminated on the surface of the base plate 110, The surface area capable of emitting heat is maximized and the heat radiation efficiency is superior to that of the conventional heat sink 10.

The nano-texture heat sink according to the present invention can be manufactured by various methods such as a spray coating method, an electrospinning method, a spin coating method, and a dip coating method.

For example, FIGS. 5 and 6 illustrate a method of fabricating a nanofitre heatsink according to the present invention using a low temperature spray coating apparatus.

5 includes a supersonic jet nozzle 210, a heater 220, and a mixed solution supply unit 230. The coating unit 200 includes a supersonic jet nozzle 210, a heater 220, The coating apparatus 200 may be configured such that a mixed solution in which a thermally conductive nanowire 201 as a thermally conductive nanostructure and a liquid 202 having fluidity are mixed is sprayed onto the base plate 110 at high speed, The nano-texture layer may be formed by laminating the thermally conductive nanowires 201 on the nano- As the liquid 202 constituting the mixed solution, various liquids having fluidity such as volatile liquids which can easily volatilize at room temperature such as ethanol can be used.

The supersonic injection nozzle 210 injects the working gas into the supersonic state toward the base plate 110. The supersonic injection nozzle 210 receives the mixed solution from the mixed solution supplier 230 in the supersonic injection process of the working gas and injects the mixed solution into the particulate droplet D state. As an operating gas for high-speed injection of the supersonic injection nozzle 210, a chemically stable gas such as air, hydrogen, nitrogen, or helium, which can suppress the chemical reaction with the mixed solution, may be used.

The heater 220 heats the working gas supplied to the supersonic jetting nozzle 210. The heater 220 is mounted in front of the inlet portion of the supersonic injection nozzle 210 and heats the operating gas to a predetermined temperature (for example, 350 ° C) during the flow of the working gas into the supersonic injection nozzle 210. As another example, the heater may be installed in a structure that directly heats the reservoir of working gas. By heating the working gas through the heater 220, it is possible to easily induce the mixed solution into the particulate droplet (D) state in the process of spraying the mixed solution of the mixed solution feeder 230 together with the working gas, (D), the evaporation of the liquid 202 can be further accelerated.

The mixed solution supply unit 230 stores the mixed solution in the state where the thermally conductive nanowires 201 such as silver-nanowires and the volatile liquid 202 are mixed and supplies the mixture solution to the supersonic spray nozzle 210, And is connected to the nozzle 210. The mixed solution supply unit 230 may be configured to supply a predetermined amount of mixed solution to the supersonic jet nozzle 210, such as a syringe pump, or simply to store the mixed solution. The mixed solution may be introduced into the supersonic injection nozzle 210 by a pressure drop phenomenon occurring when the working gas is injected into the supersonic injection nozzle 210, even though the mixed solution supply unit 230 does not have a function of extruding the mixed solution. The flow rate of the mixed solution supplied to the supersonic injection nozzle 210 can be set to several tens of μl / mim to several hundred μl / mim, and the supply flow rate can be variously adjusted according to the needs of the user.

In this coating apparatus 200, when the supersonic jet nozzle 210 ejects the working gas, the mixed solution is introduced into the supersonic jet nozzle 210 from the mixed solution supplier 230 and is injected at supersonic speed together with the working gas. At this time, since the mixed solution is heated by the temperature of the working gas and accelerated to the supersonic state, the mixed solution is injected into the particulate droplet D state in the process of being injected through the supersonic injection nozzle 210. That is, the mixed solution is injected through the supersonic injection nozzle 210 in a state of the particulate droplet (D) in which the thermally conductive nanowire 201 forms the nucleus and the liquid 202 surrounds it.

The droplet 202 is evaporated while the particulate droplet D reaches the surface of the base plate 110 from the outlet of the supersonic jet nozzle 210 in the course of ejection. Thus, the thermally conductive nanowires 201 are vapor-deposited on the surface of the base plate 110 with the liquid 202 evaporated. Particularly, since the working gas is injected while being heated by the heater 220, the particulate droplets D are heated by the temperature of the working gas even while the particulate droplets D are being injected, So that the thermally conductive nanowires 201 in a more pure state can be deposited on the surface of the base plate 110 by vapor deposition.

Accordingly, the nano texture layer 122, in which the thermally conductive nanowires 201 are laminated, is formed through a simple spraying method that does not require a complicated manufacturing process such as a separate etching process and a transfer process, without using a chemical vapor deposition process which is a conventional vacuum process The surface of the base plate 110 can be coated by vapor deposition. Also, since the thermally conductive nanowires 201 can be deposited and coated in a relatively low temperature state, a nano-texture heat sink having nanotube layers can be manufactured using a base plate of a material susceptible to heat.

The coating apparatus 300 shown in FIG. 6 further includes a heater 310 and a laser irradiator 320 for heating the base plate 110 as compared with the coating apparatus 200 shown in FIG. The heater 310 heats the base plate 110 in the process of stacking the thermally conductive nanowires 201 on the surface of the base plate 110 by spraying the supersonic injection nozzle 210 in contact with the base plate 110 . The heater 310 can heat the base plate 110 to evaporate the liquid 202 of the mixed solution injected onto the surface of the base plate 110 more quickly. When the liquid 202 reaches the surface of the base plate 110 together with the thermally conductive nanowires 201, a liquid film is formed, and this liquid film pushes out the thermally conductive nanowires 201 arriving at the base plate 110 The thermal conductive nanowires 201 may be aggregated together to lower the coating quality. Such a problem can be reduced by heating the base plate 110 using the heater 310 and rapidly evaporating the liquid 202 that has reached the base plate 110. The heater 310 may be provided in various structures such as a direct contact type to the base plate 110, or a non-contact type type.

The laser irradiator 320 improves the uniformity of the nanotructure layer 330 made of the thermally conductive nanowires 201 by irradiating a laser beam onto the thermally conductive nanowires 201 stacked on the base plate 110. That is, through the above-described spraying process, the thermally conductive nanowires 201 may be laminated on the base plate 110 in an irregular form in a supersonic flow or may be laminated in a crumpled form. In the thermally conductive nanowires 201, Irradiation and high energy are applied to improve the irregular shape and wrinkled shape of the thermally conductive nanowires 201. When thermal energy is applied to the thermally conductive nanowire 201, the nanowire layer 330 having a flat and broad surface area can be formed by applying a high energy such as a laser beam to the thermally conductive nanowire 201. .

7 and 8 illustrate a method of manufacturing a nano-texture heat sink according to the present invention by electrospinning.

The electrospinning method is a method of forming a thermally conductive nanostructure having a structure in which a metal layer is coated on a surface of a nanofiber by electro-spinning nanofibers to prepare a nanostructure and plating the nanostructure. As the electrospinning method, the electrospinning apparatus 400 as shown in Fig. 7 and the plating apparatus 500 as shown in Fig. 8 can be used.

The electrospinning apparatus 400 shown in Fig. 7 includes an electrospinning nozzle 410, a high voltage generator 420, a ground power source 430, and a gas injection nozzle 440.

The electrospinning nozzle 410 is formed by discharging the polymer spinning liquid through a high voltage to be fiberized. The polymer spinning liquid is supplied from the spinning liquid feeder 450 and discharged. The spinneret feeder 450 may be a syringe pump that feeds the polymer spinning solution in a quantitative manner. The electrospinning nozzle 410 may be a nozzle of a conglomerate type for supplying and discharging the polymer spinning solution from the syringe pump.

The polymer spinning solution may be a solution or the like used in a general electrospinning apparatus. For example, a mixed solution of PVA (polyvinyl alcohol) and water may be used, and a polymer having excellent mechanical properties such as nylon may be used together with a strong acidic solution such as formic acid.

The high voltage generator 420 applies a high voltage to the electrospinning nozzle 410 and a separate ground power source 430 is provided at a position spaced apart from the electrospinning nozzle 410. The ground power source 430 may be connected to a separate ground plate 435 spaced apart from the electrospinning nozzle 410 so as to form an electric field in a space between the ground plate 435 and the electrospinning nozzle 410 . According to this electric field, the nanofibers 401 discharged from the electrospinning nozzle 410 are guided to flow from the electrospinning nozzle 410 toward the ground plate 435 by an electrostatic force.

7, when the grounding power source 430 is connected to the ground plate 435 located at the vertically lower portion of the electrospinning nozzle 410 and the electrospinning nozzle 410 is located at the upper portion, The nanofibers 401 discharged from the high voltage generator 410 are discharged from the high voltage generator 420 in a state of being charged with a high voltage. The nanofibers 401 discharged from the electrospinning nozzle 410 are guided to flow toward the ground plate 435 under a downward electrostatic force by an electric field formed between the electrospinning nozzle 410 and the ground plate 435 .

The ground plate 435 may be omitted and the ground power source 430 may be connected to the gas injection nozzle 440 to electrospun nanofiber 401. In this case, the ground power source 430 may be connected to the gas injection nozzle 440 to form an electric field in the space between the gas injection nozzle 440 and the electrospinning nozzle 410. According to this electric field, the nanofibers 401 discharged from the electrospinning nozzle 410 can be guided to flow from the electrospinning nozzle 410 toward the gas injection nozzle 440 by the electrostatic force.

The gas injection nozzle 440 is configured to inject the working gas in a direction different from the direction of the electrostatic force of the electric field. The gas injection nozzle 440 can be configured to inject the working gas into supersonic flow of Mach number 1 (about 300 m / s) or more. The gas injection nozzle 440 is disposed such that the nanofibers 401 discharged from the electrospinning nozzle 410 can flow into the gas flow F1 of the working gas injected thereby.

Accordingly, the nanofibers 401 discharged from the electrospinning nozzle 410 receive a force induced by the electrostatic force and simultaneously receive a force due to the flow of the working gas injected from the gas injection nozzle 440. At this time, the force due to the flow of the working gas is greater than the force induced by the electrostatic force.

The direction of the electrostatic force by the electric field acting on the nanofibers 401 discharged from the electrospinning nozzle 410 and the direction of the electromotive force of the working gas by the gas injection nozzle 440 form a predetermined angle with respect to each other. The angle between the electrostatic force direction of the electrospinning nozzle 410 and the operating gas flow direction of the gas injection nozzle 440 is shown as an angle between the electrostatic force direction and the operating force direction of the operating gas, 430, the distance between the electrospinning nozzle 410 and the gas injection nozzle 440, and the like.

The state of the collected nanofibers 401 may vary depending on the positions of the electrospinning nozzle 410 and the gas injection nozzle 440. It is preferable that the electrospinning nozzle 410 and the gas injection nozzle 440 are mutually disposed such that the flow of the working gas injected from the gas injection nozzle 440 does not act as a resistance element that interferes with the electrospinning nozzle 410 . To this end, the electrospinning nozzle 410 is preferably arranged to be spaced apart from the gas injection nozzle 440 by a certain distance d in a direction perpendicular to the flow F1 of the working gas injected from the gas injection nozzle 440.

The electrospinning device 400 having such a structure is configured such that the nanofibers 401 discharged from the electrospinning nozzle 410 are injected from the gas injection nozzle 440 in the process of being guided to the ground plate 435 by the electrostatic force, And the gas flow acting in the direction perpendicular to the direction of the arrow. By this gas flow, the nanofibers 401 are subjected to shear stress to become thinner, and thus nanofibers 401 of finer and uniform diameter (for example, diameters of 100 nm or less) can be formed.

At this time, since the flow force of the working gas is greater in the nanofiber 401 than in the electrostatic force, the nanofiber 401 flows along the flow direction of the gas by the flow of the working gas in the process of being induced by the electrostatic force do. Therefore, by arranging the base plate 110 so as to face the gas injection nozzle 440, it is possible to collect uniformly fine nanofibers 401 of uniform diameter on the base plate 110. The nanofibers 401 collected on the base plate 110 may be laminated in a web form.

After the nanofibers 401 are laminated on the base plate 110, the nanofibers 401 are plated using a plating apparatus 500 as shown in FIG. 8 to form a thermally conductive nanostructure The nano-texture layer 122 may be formed. The plating apparatus 500 has a conventional structure. After the base plate 110 and the metal plate 530, in which the nanofibers 401 are collected, are immersed in the plating solution 520 contained in the vessel 510, The nanofibers 401 collected on the base plate 110 can be plated with the metal material of the metal plate 530 by connecting the metal plate 540 to the base plate 110. The plating time may be varied depending on the collection density of the nanofibers 401 collected on the base plate 110, the area of the base plate 110, the type of the plating liquid, the current density of the plating power supply 540, .

9 shows another surface coating apparatus 600 capable of manufacturing a nano-texture heat sink according to the present invention.

The surface coating apparatus 600 shown in FIG. 9 uses a low temperature spray coating method and an electrostatic spray coating method to form a nano texture heat sink 601 having a nano texture layer 602 formed on a surface of a base plate 110 as shown in FIG. 10 ) Can be produced. The surface coating apparatus 600 includes a low temperature spray coating unit 610 using a low temperature spraying method and an electrostatic spray coating unit 615 using an electrostatic spraying method.

The low temperature spray coating unit 610 includes a nanoparticle feeder 620, a nanoparticle injection nozzle 630, and a working gas feeder 640. The low temperature spray coating unit 610 deposits the nanoparticles 603 on the surface of the base plate 110 by jetting the nanoparticles 603 toward the base plate 110 at a high speed.

The nanoparticle feeder 620 is installed to be connected to the nanoparticle injection nozzle 630. The nanoparticle feeder 620 stores the nanoparticles 603 and supplies the stored nanoparticles 603 to the nanoparticle spraying nozzles 630. As the nanoparticles 603, silver, aluminum, copper, nickel, or the like may be used.

The nano-particle jetting nozzles 630 jet the working gas at high speed toward the base plate 110, which are spaced apart from each other and arranged to face each other. The nanoparticle injection nozzle 630 receives operating gas from the working gas feeder 640. The nanoparticle injection nozzle 630 receives the nanoparticles 603 from the nanoparticle feeder 620 during high-speed injection of the working gas and injects the nanoparticles 603 toward the base plate 110 at high speed. As the working gas, a chemically stable gas such as air, hydrogen, nitrogen, or helium, which can suppress the chemical reaction with the nanoparticles 603, may be used. Although not shown in the drawing, a heater for heating the working gas may be installed in the nano particle spraying nozzle 630.

The electrostatic spray coating unit 615 includes a coating liquid supply unit 650, a coating liquid spray nozzle 660, a high voltage generator 670, and a ground power source 680. The electrostatic spray coating unit 615 discharges the surface of the nanoparticles 603 to the coating liquid 604 by spraying the coating liquid 604 into the flow flow F2 of the nanoparticles 603 by the low temperature spray coating unit 610. [ Coating.

The coating liquid supply unit 650 is installed to be connected to the coating liquid spray nozzle 660. The coating liquid supplier 650 stores the coating liquid 604 and supplies the coating liquid 604 to the coating liquid spray nozzle 660. The coating liquid 604 contains thermally conductive particles in a liquid having fluidity. As the thermally conductive particles, thermally conductive nanowires such as silver-nanowires or carbon nanotubes (CNTs), various fine particles having excellent thermal conductivity may be used.

The coating liquid injection nozzle 660 ejects the coating liquid 604 supplied from the coating liquid feeder 650 into the flow flow F2 of the nanoparticles 603 by the low temperature spray coating unit 610. The coating liquid spraying nozzle 660 ejects the coating liquid 604 by the electrostatic force by the high voltage generator 670 and the ground power source 680.

The high voltage generator 670 applies a high voltage to the coating liquid spray nozzle 660 and a separate ground power source 680 is provided at a position spaced apart from the coating liquid spray nozzle 660 in correspondence thereto. The ground power source 680 is connected to the nanoparticle spraying nozzle 630 of the low temperature spray coating unit 610 to form an electric field in the space between the nanoparticle spraying nozzle 630 and the coating liquid spraying nozzle 660. According to this electric field, the coating liquid 604 discharged from the coating liquid jetting nozzle 660 is guided to flow from the coating liquid jetting nozzle 660 toward the nanoparticle jetting nozzle 630 by electrostatic force.

That is, the coating liquid 604 discharged from the coating liquid spray nozzle 660 in a state in which the coating liquid spray nozzle 660 is disposed above the flow F2 of the nanoparticles 603 by the low temperature spray coating unit 610, The high voltage is applied from the generator 670 and discharged in a state of being charged. The coating liquid 604 discharged from the coating liquid spray nozzle 660 flows toward the nanoparticle spray nozzle 630 under a downward electrostatic force by an electric field formed between the nanoparticle spray nozzle 630 and the coating liquid spray nozzle 660 . In this process, the charged coating liquid 604 is adhered to the surface of the flowing nanoparticles 603 flowing into the flow flow F2 of the nanoparticles 603 by the low temperature spray coating unit 610, And flows toward the base plate 110 together with the nanoparticles 603 by the fluidity of the working gas injected from the coating unit 610. [

10, a thermally conductive nanostructure 606 having a structure in which nanoparticles 603 are covered with a thermally conductive particle layer 605 made of thermally conductive particles of a coating liquid 604 is laminated on the base plate 110 . The thermally conductive nanostructure 606 forms a nano-texture heat sink 601 having a maximized heat transfer surface area by forming a nano-texture layer 602 covering the surface of the base plate 110.

The base plate 110 may be heated by the heater 690 in the process of stacking the thermally conductive nanostructures 606. The heater 690 contacts the base plate 110 and heats the base plate 110 to rapidly evaporate the liquid in the coating liquid 604 that has reached the base plate 110 together with the nanoparticles 603. [ The liquid in the coating liquid 604 coated on the surface of the nanoparticles 603 forms a liquid film on the surface of the nanoparticles 603 and the liquid film is thermally conductive in the coating liquid 604 adhered to the surface of the nanoparticles 603. [ The coating quality of the thermally conductive particle layer 605 may be lowered by pushing out the particles to aggregate the thermally conductive particles together. When the base plate 110 is heated using the heater 690, the liquid is quickly evaporated from the thermally conductive nanostructure 606 attached to the surface of the base plate 110 by the heat, thereby forming a coating of the thermally conductive nanostructure 606 It is possible to reduce the problem of degrading the quality. The heater 690 may be provided in various structures such as a direct contact type to the base plate 110 as shown, or a non-contact type.

9, a surface coating apparatus 600 as shown in FIG. 9 is used to spray the nanoparticles 603 toward the base plate 110 at a high speed through the low temperature spray coating unit 610 while the electrostatic spray coating unit 615 The coating liquid 604 containing the thermally conductive particles can be injected into the flow stream F2 of the nanoparticles 603 by the low temperature spray coating unit 610. [ The nanoparticles 603 are formed of a thermally conductive nanostructure 606 having a structure in which the nanoparticles 603 are covered with a thermally conductive particle layer 605 having a constant thickness and a uniform thickness of the nanostructure layer 606 made of the thermally conductive nanostructure 606 (602) can be efficiently coated on the surface of the base plate (110).

The electrostatic force direction due to the electric field acting on the coating liquid 604 discharged from the coating liquid jetting nozzle 660 and the flow direction of the working gas by the nanoparticle jetting nozzle 630 form a predetermined angle with each other. The angle between the electrostatic force direction of the electrostatic spray coating unit 615 and the working gas flow direction of the low temperature spray coating unit 610 is shown in the figure as the angle between the electrostatic force direction and the working gas flow direction of the working gas, The structure of the power supply 680 and the distance between the coating liquid spraying nozzle 660 and the nano-particle spraying nozzle 630, etc., can be appropriately changed.

Although the drawing shows that the ground power source 680 is connected to the nanoparticle spray nozzle 630 of the low temperature spray coating unit 610, the ground power source 680 is electrically connected to the coating liquid spray nozzle 660, May be provided at various other locations to form the < RTI ID = 0.0 >

For example, the ground power source 680 may be connected to a separate ground member 730 that is spaced apart from the coating liquid injection nozzle 660, as shown in FIGS.

11 and 12 are a front view and a side view for explaining a modification of the surface coating apparatus for manufacturing the nano-texture heat sink according to the present invention. The surface coating apparatus according to this modified example is a modification of a part of the configuration of the electrostatic spray coating unit 615 as compared with the surface coating apparatus 600 shown in Fig. That is, the electrostatic spray coating unit 615 includes a nozzle unit 710 having a coating liquid supply unit 650, a high voltage generator 670, a plurality of coating liquid spray nozzles 660 in addition to the ground power supply 680, And a grounding member 730 connected to the grounding member 680.

The nozzle unit 710 includes a plurality of coating liquid spray nozzles 660 and a nozzle support 711 for supporting a plurality of coating liquid spray nozzles 660. A plurality of coating liquid spray nozzles 660 are disposed to be spaced from each other around the flow flow F2 of the nanoparticles 603 ejected from the low temperature spray coating unit 610. [ Specifically, a plurality of coating liquid spray nozzles 660 are arranged radially spaced at regular angular intervals around the flow F2 of the nanoparticles 603.

The nozzle support 711 is in the form of a ring and is connected to the nanoparticle injection nozzle 630 of the low temperature spray coating unit 610 so that the nanoparticles 603 ejected from the low temperature spray coating unit 610 can pass through the center thereof And a base plate 110 disposed to face the nano-particle injection nozzle 630. [ The nozzle support 711 is disposed outside the flow stream F2 of the nanoparticles 603 so as not to interfere with the flow of the nanoparticles 603 that are ejected from the nanoparticle ejection nozzles 630 and toward the base plate 110. The nozzle support 711 is combined with a plurality of coating liquid spray nozzles 660 to support these coating liquid spray nozzles 660. The high voltage generator 670 is electrically connected to the plurality of coating liquid spray nozzles 660 through the nozzle support 711, respectively. The plurality of coating liquid spray nozzles 660 are respectively supplied with high voltage from the high voltage generator 670 so that the coating liquid 604 supplied to each of the coating liquid spray nozzles 660 flows in the state of being charged And is discharged into the flow F2.

Inside the nozzle support 711, a coating liquid distributing channel 712 for fluidly connecting the coating liquid supply device 650 and the plurality of coating liquid spray nozzles 660 is provided. The coating liquid distributing channel 712 is connected to a coating liquid supply pipe 720 connected to the coating liquid supply device 650 and distributes the coating liquid 604 supplied from the coating liquid supply device 650 to each of the plurality of coating liquid spray nozzles 660.

The grounding member 730 is connected to the ground power supply 680 and disposed inside the nozzle support 711. The grounding member 730 may be disposed at the center of the nozzle support 711 so that the distance from the plurality of coating liquid injection nozzles 660 is all the same. Through such an arrangement structure, a uniform electric field can be formed between the grounding member 730 and each coating liquid spraying nozzle 660.

By using such a surface coating apparatus, the nanoparticles 603 are sprayed toward the base plate 110 at a high speed by using the low temperature spray coating unit 610, and the thermally conductive particles are sprayed through the plurality of coating liquid spray nozzles 660 The coating liquid 604 can be jetted in various directions into the flow F2 of the nanoparticles 603 by electrostatic force. The coating liquid 604 can be uniformly coated on the entire surface of the nanoparticles 603 flowing toward the base plate 110 so that the nanoparticles 603 are covered with the thermally conductive particle layer 605 having a constant thickness, The nanostructure 606 can be formed more effectively. A high quality nano texture layer 602 made of a thermally conductive nanostructure 606 having a thermally conductive particle layer 605 of uniform thickness can be formed on the base plate 110 more effectively.

In the surface coating apparatus according to the present embodiment, the specific configuration of the nozzle unit 710 and the grounding member 730 can be variously changed. For example, the number and arrangement of the coating liquid spray nozzles 660 constituting the nozzle unit 710 and the specific structure of the nozzle supporter 711 are not limited to those shown in the drawings, but may be variously changed.

The foregoing description is merely illustrative of the technical idea of the present invention, and various changes and modifications may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

100 ... nano texture heat sink 110 ... base plate
120, 330, 602 ... nano texture layer 121, 606 ... thermally conductive nanostructure
200, 300 ... coating device 210 ... supersonic jet nozzle
220 ... heater 230 ... mixed solution supply unit
310, 690 ... heater 320 ... laser irradiator
400 ... Electrospinning device 410 ... Electrospinning nozzle
420, 670 ... high voltage generator 430, 680 ... ground power
435 ... ground plate 440 ... gas injection nozzle
450 ... Radial fluid feeder 500 ... Plating device
530 ... metal plate 540 ... plating power source
600 ... Surface Coating Apparatus 610 ... Low Temperature Spray Coating Unit
615 ... electrostatic spray coating unit 620 ... nano particle supplier
630 ... nano particle spray nozzle 640 ... working gas feeder
650 ... coating liquid feeder 660 ... coating liquid spray nozzle
710 ... nozzle unit 711 ... nozzle support
712 ... coating liquid distribution channel 720 ... coating liquid supply pipe
730 ... grounding member

Claims (21)

A base plate forming a skeleton; And
And a nano texture layer formed by laminating a thermally conductive nanostructure on a surface of the base plate. The method according to claim 1,
Wherein the thermally conductive nanostructure constituting the nano-texture layer is a thermally conductive nanowire. 3. The method of claim 2,
Wherein the thermally conductive nanowire is a silver-nanowire. The method according to claim 1,
Wherein the thermally conductive nanostructure constituting the nano texture layer comprises nanofibers and a metal layer laminated on the surface of the nanofibers. The method according to claim 1,
Wherein the thermally conductive nanostructure constituting the nano-texture layer comprises nanoparticles and a thermally conductive particle layer laminated on the surface of the nanoparticles. 6. The method of claim 5,
Wherein the thermally conductive particle layer constituting the thermally conductive nanostructure comprises thermally conductive particles selected from carbon nanotubes and conductive nanowires. (a) preparing a base plate constituting a skeleton; And
(b) coating a thermally conductive nanostructure on a surface of the base plate to form a nanotructure layer of the thermally conductive nanostructure. 8. The method of claim 7,
The step (b) comprises coating the surface of the base plate with a thermally conductive nanowire as the thermally conductive nanostructure by a coating method selected from a spray coating method, a spin coating method and a dip coating method to form the nano texture layer Of the nano-texture heat sink. 9. The method of claim 8,
The step (b) uses a spray coating method,
Preparing a coating apparatus including a supersonic spray nozzle for spraying an operating gas in a supersonic state, and a mixed-solution supplying device for storing a mixed solution containing the thermoconductive nanowire and connected to the supersonic spray nozzle,
Injecting the working solution through the supersonic spray nozzle and supplying the mixed solution stored in the mixed solution supply device to the supersonic spray nozzle to spray the mixed solution to the base plate together with the working gas through the supersonic spray nozzle And depositing and coating the thermally conductive nanowires on the base plate. ≪ RTI ID = 0.0 > 8. < / RTI > 10. The method of claim 9,
Wherein the step (b) further comprises heating the base plate on which the thermally conductive nanowires are deposited and coated. 10. The method of claim 9,
Wherein the step (b) further comprises the step of irradiating a laser beam onto the thermally conductive nanowire deposited on the base plate. 8. The method of claim 7,
The step (b)
The base plate is electrospinned with nanofibers and the electrospun nanostructure is plated on the base plate so that the nanofibers are plated with a metal layer so that the thermally conductive nanostructure is coated on the surface of the base plate And forming the nano-texture heat sink. 13. The method of claim 12,
The step of electrospinning the nanofibers comprises:
A high voltage generator for applying a high voltage to the electrospinning nozzle, and a high voltage generator for generating a voltage between the electrospinning nozzle and the electrospinning nozzle so that the fibers discharged from the electrospinning nozzle are guided by an electrostatic force, Preparing an electrospinning device including a grounding power source for forming an electric field in the gas injection nozzle for injecting the working gas,
Disposing the base plate so as to face away from the gas injection nozzle;
Wherein the base plate is made of a synthetic resin and the base plate is made of a synthetic resin and the base plate is made of a synthetic resin. Wherein the nano-texture heat sink comprises a plurality of nano-texture heat sinks. 14. The method of claim 13,
Wherein the step of electrospinning the nanofibers comprises the steps of connecting the ground power source to the gas injection nozzle and guiding the fibers discharged from the electrospinning nozzle toward the gas injection nozzle by an electrostatic force . 8. The method of claim 7,
The step (b)
A nanoparticle feeder connected to the nanoparticle feeder for spraying nanoparticles supplied from the nanoparticle feeder using an operating gas, and a coating liquid containing thermally conductive particles, A high-voltage generator for applying a high voltage to the coating liquid spraying nozzle, and a high-voltage generator for applying a high voltage to the coating liquid spraying nozzle from the coating liquid spraying nozzle in a droplet form Preparing a surface coating apparatus including a ground power source that forms an electric field in a space between itself and the coating liquid spray nozzle so that the coating liquid to be discharged is induced by an electrostatic force;
Disposing the base plate so as to face the nano particle jetting nozzle,
The nanoparticles supplied from the nanoparticle feeder are injected toward the base plate through the nanoparticle injection nozzle and the coating liquid supplied from the coating liquid feeder is injected into the flow of the nanoparticles through the coating liquid injection nozzle, Forming the thermally conductive nanostructure having a structure in which the nanoparticles are covered with the thermally conductive particles of the coating liquid on the surface of the base plate by attaching the coating liquid to the surface of the nanoparticles sprayed by the plate by an electric field Wherein the method comprises the steps of: 16. The method of claim 15,
Wherein the thermally conductive particles constituting the coating liquid in the step (b) are selected from carbon nanotubes and conductive nanowires. 16. The method of claim 15,
Wherein the step (b) further comprises heating the base plate coated with the nanostructure. 16. The method of claim 15,
Wherein the step (b) comprises connecting the grounding power source to the nanoparticle spraying nozzle and guiding the coating liquid discharged in a droplet form from the coating liquid spraying nozzle toward the nanoparticle spraying nozzle by an electrostatic force Way. 16. The method of claim 15,
Wherein a plurality of the coating liquid spray nozzles are arranged around the flow of the nanoparticles by the nanoparticle spray nozzles and the coating liquid is sprayed into the flow of the nanoparticles from the plurality of coating liquid spray nozzles. Wherein the method comprises the steps of: 20. The method of claim 19,
In the step (b), the surface coating apparatus includes a nozzle support disposed outside the flow of nanoparticles by the nanoparticle spraying nozzle so as to support the plurality of coating solution spraying nozzles, Further comprising a coating liquid distributing channel provided in the nozzle support to connect the nozzle so as to allow fluid movement while distributing the coating liquid supplied from the coating liquid supplier to the plurality of coating liquid spray nozzles through the coating liquid distributing channel, Wherein the coating liquid is sprayed from the coating liquid spraying nozzle of the nano-texture heat sink. 20. The method of claim 19,
In the step (b), the surface coating apparatus may further include a grounding member disposed in the flow of the nanoparticles by the nanoparticle spraying nozzle to be connected to the grounding power supply, wherein the grounding member Wherein the coating liquid is sprayed toward the nano-texture heat sink.
KR1020150152111A 2015-10-30 2015-10-30 Nano-texture heat sink plate and method for manufacturing the same KR101780555B1 (en)

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KR20190042330A (en) * 2017-10-16 2019-04-24 주식회사 인스텍 A heat sink element having an increased heat radiating surface and manufacturing method thereof

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KR101079775B1 (en) * 2010-04-01 2011-11-03 경희대학교 산학협력단 Preparation Method of Electroconductive Nanofiber through Electrospinning followed by Electroless Plating
KR101382860B1 (en) * 2011-10-12 2014-04-08 고려대학교 산학협력단 Electrospinning apparatus with supersonic stream nozzle
KR101518545B1 (en) * 2013-01-09 2015-05-07 고려대학교 산학협력단 Apparatus for Coating Graphene Film Using Cold Spray
KR101558418B1 (en) * 2013-03-15 2015-10-07 주식회사 아모그린텍 An adhesive tape and manufacturing method thereof

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Publication number Priority date Publication date Assignee Title
KR20190042330A (en) * 2017-10-16 2019-04-24 주식회사 인스텍 A heat sink element having an increased heat radiating surface and manufacturing method thereof
WO2019078446A1 (en) * 2017-10-16 2019-04-25 주식회사 인스텍 Radiator having increased heat dissipation surface area and manufacturing method therefor

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