KR20170045939A

KR20170045939A - Angle valves

Info

Publication number: KR20170045939A
Application number: KR1020150146071A
Authority: KR
Inventors: 김도열
Original assignee: 김도열
Priority date: 2015-10-20
Filing date: 2015-10-20
Publication date: 2017-04-28

Abstract

The present invention provides an angle valve capable of ensuring reliability through life extension of a first bellows. According to the present invention, the angle valve comprises: a valve body part (100) including a partition part (150) which has a main shaft moving hole (151) perforated in the center thereof and an opening/closing rod unit moving hole (152) perforated in an edge side thereof while sections an inner space to form an inlet part (110) connected to a cleaning module in a lower part, to form an outlet part (120) connected to a processing chamber on one side, and to form a fluid moving part (130) and a shaft moving part (140) inside; a cylinder (200) combined with the upper part of the valve body part (100); a sub shaft (300) combined with the cylinder (200) to be vertically moved in the shaft moving part (140) in accordance with operation of the cylinder (200); an opening/closing rod unit (400) penetrating the main shaft moving hole (151) and the opening/closing rod moving hole (152) and connecting to the sub shaft (300) to open/close the inlet part (110) in accordance with the operation of the cylinder (200), and having a bellows installation part (410) formed of a space inside and a main shaft (402) connected to the sub shaft (300) through the main shaft moving hole (151) in the center of the bellows installation part (410); and a first bellows (500) installed in the lower part of the partition part (150) to surround the main shaft (420).

Description

[0001]

The present invention relates to an angle valve comprising an inlet 110 connected to a cleaning module (not shown) at the bottom, an outlet 120 connected to a process chamber (not shown) at one side, 130 and a shaft moving part 140 are respectively formed in the center of the main shaft and a main shaft moving hole 151 is formed at the center of the main shaft moving hole 151. On the side of the main shaft moving hole 151, A cylinder 200 coupled to an upper portion of the valve body 100 and a valve 200 coupled to the cylinder 200 to allow the valve 200 to be opened and closed, A main shaft moving hole 151 and an opening and closing rod unit pass through the pores 152 to move the main shaft moving hole 151 and the opening and closing rod unit to the sub shaft 300, And opens and closes the inlet 110 according to whether the cylinder 200 is driven or not, And a main shaft 420 connected to the sub shaft 300 through the main shaft moving hole 151 is formed at the center of the bellows mounting part 410. The bellows mounting part 410 includes a bellows mounting part 410, And a first bellows 500 installed at a lower portion of the diaphragm 150 and surrounding the main shaft 420. The first bellows 500 includes a first bellows 400,

In general, LCDs, LEDs, semiconductor devices and the like are required to have high density, high cleanliness, high precision, and special manufacturing technology.

For this reason, LCDs, LEDs, and semiconductor devices are manufactured in a vacuum state that can completely block the contact of foreign substances contained in the air, and the vacuum working area of the semiconductor manufacturing apparatus and the airtight sealing technique are also used for the quality of semiconductor products affect.

The gate valve of various shapes is installed in the process section for manufacturing the semiconductor as described above, thereby performing the function of transferring or blocking the gas passing through the cleaning module between the chambers.

Such a gate valve is coupled to an inlet and an outlet between a process chamber and a process chamber or a vibration pump, respectively, so that the outlet or inlet is connected to each other. As the cylinder is driven, the sealing member opens and closes the inlet, To be transmitted or blocked.

A bellows type safety valve (Korean Patent Registration No. 10-1507461) of Patent Document 1 as an example of such an angle valve is provided with an inlet port 11 connected to a channel and an inlet port 11 connected to the inlet port 11 A valve case 10 having a discharge port 12 for discharging the fluid to the outside; A valve disc 50 movably installed above the inlet port 11 to open and close the inlet port 11; A valve stem (51) installed upwardly at the center of the valve disc (50) and moving up and down together with the valve disc (50); A fixing plate (40) fixedly installed in the valve case (10); A compression coil spring (30) for resiliently supporting the valve stem (51) against the valve case (10); The lower end of the valve disc 50 is fixed to the valve disc 50 and the upper end of the valve disc 50 is fixed to the fixed plate 40 to seal the valve disc 50. The wrinkle 21 is formed in a spiral shape, And an elongated bellows tube (20); A leakage fluid outlet 15 connected to an external fluid sensing sensor is provided at an upper end of the valve case 10 so that when leakage of the fluid occurs due to breakage of the bellows tube 20, There is an advantage that it is possible to recognize the breakage of the bellows tube 20 by discharging through the fluid outlet 15.

However, the " bellows type safety valve " of Patent Document 1 has a problem in that the powder generated during the process is adhered or adhered to the surface of the bellows tube, thereby causing mechanical defects in shrinking or relaxing operation of the bellows tube, There is a problem in that the powder adhered to the process chamber is drawn into the process chamber and the reliability of the semiconductor device is lowered.

Patent Document 1: Korean Patent Publication No. 10-1507461

SUMMARY OF THE INVENTION The present invention has been made in an effort to solve the above problems, and it is an object of the present invention to provide an air conditioner having an opening and closing rod unit for opening and closing an inflow portion, a first bellows for enclosing a main shaft formed inside the opening and closing rod unit, By forming the two bellows, it is possible to prevent the powder from being generated in the first bellows through the contact of the gas, thereby ensuring reliability through extension of the service life of the first bellows and providing an angle valve capable of stable process progress through smooth operation .

In order to solve the above problems, the angle valve according to the present invention includes an inlet 110 connected to a cleaning module (not shown) at the bottom, an outlet 120 connected to a process chamber (not shown) A main shaft moving hole 151 is formed at the center of the space, and an opening / closing rod unit is formed on the side of the main shaft moving hole 151, A cylinder 200 coupled to an upper portion of the valve body 100 and a cylinder 200 coupled to an upper portion of the valve body 100. The valve body 100 is formed with a partition plate 150, A main shaft moving hole 151 and an opening and closing rod unit that pass through the hole 152. The main shaft moving hole 151 and the opening and closing rod unit pass through the hole 152, And is connected to the sub shaft 300 to open the inlet 110 according to whether the cylinder 200 is driven or not. A main shaft 420 connected to the sub shaft 300 through the main shaft moving hole 151 at the center of the bellows mounting part 410; And a first bellows 500 installed at a lower portion of the diaphragm 150 and surrounding the main shaft 420. The first bellows 500 may include a first bellows 500,

When the gas introduced through the inlet 110 is introduced into the bellows mounting part 410, the gas is prevented from contacting the first bellows 500, And a second bellows 600 connected to the second bellows 600. [

The height of the second bellows 600 may be lower than the height of the first bellows 500.

When the gas introduced through the inlet 110 is introduced into the bellows mounting part 410, the partition plate 150 may be filled with a powder generated in the first and second bellows 500, And a sensing unit 153 for sensing gas is formed.

As described above, according to the present invention, by forming the opening and closing rod unit for opening and closing the inlet portion, the first bellows surrounding the main shaft formed inside the opening and closing rod unit, and the second bellows on the outside of the first bellows, It is possible to prevent the generation of powder in the first bellows through the contact of the gas, to ensure the reliability by extending the service life of the first bellows and to stably perform the process by smooth operation.

1 is a perspective view showing the entirety of an angle valve according to a preferred embodiment of the present invention;
2 is an exploded perspective view showing an exploded view of an angle valve according to a preferred embodiment of the present invention.
3 is a cross-sectional view showing a state in which the opening / closing rod unit of the angle valve according to the preferred embodiment of the present invention is closed
4 is a cross-sectional view showing a state in which the opening and closing rod unit of the angle valve according to the preferred embodiment of the present invention is opened

Hereinafter, an angle valve 1 according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, it should be noted that, in the drawings, the same components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, a detailed description of known functions and configurations incorporated herein will be omitted so as to avoid obscuring the subject matter of the present invention.

1 or 2, the angle valve 1 according to an embodiment of the present invention includes a valve body 100, a cylinder 200, a sub shaft 300, an opening and closing rod unit 400, A first bellows 500, and a second bellows 600.

First, the valve body 100 will be described. 1 or 2, the valve body 100 is a component installed between a process chamber (not shown) and a cleaning module (not shown), and is connected to a cleaning module (not shown) An inlet 110 is formed and an outlet 120 connected to a process chamber (not shown) is formed on one side.

The diaphragm 150 is formed on the inside of the valve body 100 to define a space inside the valve body 100 so that the fluid moving part 130 and the shaft moving part 140 are formed, Refers to a cleaning gas introduced from a cleaning module (not shown) or a corrosive gas including a powder existing inside the valve body part 100 to the shaft moving part 140 where the sub shaft 300 to be described later is installed. The first bellows 500 to be described later is coupled to the lower portion of the partition plate 150 to be described later, and the opening / closing rod unit 400, which will be described later, To guide the vertical movement of the lens.

At this time, a main shaft moving hole 151 is formed at the center of the partition plate 150 so that a main shaft 410 to be described later is connected to the sub shaft 300 through the main shaft moving hole 151 And the opening and closing rod unit is formed with a hole 152 at the edge of the partition plate 150 so that the opening and closing rod unit 400 to be described later can be connected to the sub shaft 300.

That is, the diaphragm 150 is located inside the valve body 100 in the inside of the valve body 100.

3 or 4, when the gas introduced through the inlet 110 is introduced into the bellows fitting part 410 of the diaphragm 150, The sensing unit 153 for sensing the powder gas generated in the first and second bellows 500 and 600 to be described later is formed to prevent damage to the first and second bellows 500 and 600 So that it is possible to replace and reinstall the first and second bellows 500 and 600 before they are broken.

The cover body 160 is formed at the center of the valve body 100 with a hole 161 through which the sub shaft 300 passes.

Next, the cylinder 200 will be described. 1 and 2, the cylinder 200 is coupled to an upper portion of the valve body 100 so that an opening / closing rod unit 400 provided inside the valve body 100, which will be described later, The configuration of the cylinder 200 corresponds to a level of technology at a level well known in the art to which the present invention belongs, and therefore, a detailed description thereof will be omitted.

Next, the sub shaft 300 will be described. 3 or 4, the sub shaft 300 is installed in the shaft moving part 140 to connect the cylinder 200 and the opening and closing rod unit 400 to each other to determine whether the cylinder 200 is driven The driving force is transmitted to the opening / closing rod unit 400 to allow the opening / closing rod unit 400 to move in the vertical direction.

Next, the opening and closing rod unit 400 will be described. The opening and closing rod unit 400 is formed in a cylindrical shape as shown in FIG. 2, FIG. 3 and FIG. 4, and the shaft insertion hole 401 is formed in an upper portion of the opening and closing rod unit 400 to couple the sub shaft 300 and the main shaft 420. The main shaft moving hole 151 and the opening and closing rod unit pass through the hole 152 and are connected to the sub shaft 300 And serves to open and close the inlet 110 according to whether the cylinder 200 is driven or not.

The opening and closing rod unit 400 is formed with a bellows mounting part 410 having an inner space and the center of the bellows mounting part 410 passes through the main shaft moving hole 151, The main shaft 420 is connected to the inlet portion 110 and the blade portion 430 contacting the inlet portion 110 when the opening and closing rod unit 400 closes the inlet portion 110, .

Next, the first bellows 500 will be described. 3 or 4, the first bellows 500 is installed at a lower portion of the partition plate 150 so as to enclose the main shaft 420, so that the first bellows 500 can be vertically moved And prevents the gas introduced into the bellows mounting part 410 from contacting with the main shaft 420 to prevent the powder from sticking to the main shaft 420. [

Next, the second bellows 600 will be described. As shown in FIG. 3 or 4, the second bellows 600 is a component that is connected to the first bellows 500 on the outside of the first bellows 500. The second bellows 600 includes the inlet 110 The gas is prevented from contacting the first bellows 500 to prevent the powder from being generated in the first bellows 500, , Securing reliability through extension of the life of the first bellows (500), and stable process progress through smooth operation.

3 or 4, the height of the second bellows 600 may be lower than the height of the first bellows 500, so that the height of the second bellows 600 may be lower than the height of the first bellows 500, When the opening / closing rod unit 400 rises to open the inlet 110 so as to allow the gas supplied from the cleaning module (not shown) to be drawn in for cleaning, the opening / closing rod unit 400 is moved to a predetermined height Of the second bellows (500), which is repeatedly operated after the second bellows (500) is contracted due to contact with the lower portion of the partition wall portion (150) and less contracted than the first bellows (500) .

(In general, it is difficult for the gas to enter the bellows mounting part 410 because the blade part 430 seals the inflow part 110 when the inflow part 110 is closed, and the inflow part Since the gas passes sequentially through the inflow section 110, the fluid moving section 120 and the outflow section 130 in the open state of the bellows mounting part 120, 410). &Lt; / RTI >

Optimal embodiments have been disclosed in the drawings and specification. Although specific terms have been employed herein, they are used for purposes of illustration only and are not intended to limit the scope of the invention as defined in the claims or the claims. Therefore, those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1: Angle valve
100: valve body part 110: inlet part
120: outlet part 130: fluid moving part
140: Shaft diaphragm 150: Diaphragm
151: main shaft moving hole 152: opening / closing rod unit
153: leakage pipe 160: cover part
161: Shaft in place
200: Cylinder
300: Sub shaft
400: opening / closing rod unit 401: shaft insertion hole
402: Leak through and hole 410: Bellows mounting part
420: main shaft 430: blade portion
500: 1st bellows
600: second bellows

Claims

An outflow part 120 connected to a process chamber (not shown) on one side, and a fluid moving part 130 and a shaft moving part 140 on the inner side are connected to a cleaning module (not shown) And a valve body 150 in which a main shaft moving hole 151 is formed at the center thereof and in which an opening and closing rod unit is formed with a hole 152 and a partition plate 150 is formed, (100);
A cylinder 200 coupled to an upper portion of the valve body 100;
A sub shaft (300) coupled with the cylinder (200) and moving up and down by the shaft moving part (140) according to the driving of the cylinder (200);
The main shaft moving hole 151 and the opening and closing rod unit pass through the pores 152 and are connected to the sub shaft 300 to open and close the inlet 110 according to whether the cylinder 200 is driven, And a main shaft 420 connected to the sub shaft 300 through the main shaft moving hole 151 is formed at the center of the bellows mounting part 410 An opening / closing rod unit (400);
And a first bellows (500) installed at a lower portion of the partition plate (150) to surround the main shaft (420).

The method according to claim 1,
When the gas introduced through the inlet 110 is drawn into the bellows mount 410, the gas is prevented from contacting the first bellows 500, And a second bellows (600) are connected.

The method according to claim 2,
Wherein the height of the second bellows (600) is lower than the height of the first bellows (500).

The method of claim 3,
When the gas introduced through the inlet 110 is introduced into the bellows mounting part 410, the powder gas generated in the first and second bellows 500, And a sensing part (153) for sensing the sensing part (153).

The method according to claim 1,
When the gas introduced through the inlet 110 is drawn into the bellows mount 410, the gas is prevented from contacting the first bellows 500, 2 bellows 600 are connected and formed,
The height of the second bellows 600 is lower than the height of the first bellows 500,
When the gas introduced through the inlet 110 is introduced into the bellows mounting part 410, the powder gas generated in the first and second bellows 500, And a sensing part (153) for sensing the sensing part (153).