KR20170015514A - Machining head - Google Patents

Abstract

The present invention relates to a machining head (1) for coupling a laser beam (100) to a liquid jet (200). The machining head 1 comprises an optical unit 2 having at least one optical component 20, 21.1, ..., 21.4 for focusing the laser beam 100, And a coupling unit 3 having a liquid chamber 32 in which a nozzle 33 having a nozzle opening 37 for generating a liquid jet 200 is disposed inside the wall. The laser beam 100 which can be focused by the optical unit 2 is transmitted to the coupling unit 3 in the beam direction with the coupling unit 3 connected to the optical unit 2, To the nozzle opening 37 through the liquid chamber 32 of the nozzle 33 and to the liquid jet 200 that can be generated by the nozzle 33 and move in the beam direction. A liquid interface 50 is formed between the optical unit 2 and the coupling unit 3 so that liquid is supplied from the optical unit 2 to the liquid chamber 32. [ With the coupling unit 3 connected to the optical unit 2 the liquid interface 50 as viewed in the beam direction is located at the optical component 20 of the optical unit 2, , 21.4).

Description

MACHINING HEAD

The invention relates to an optical unit comprising at least one optical component for focusing a laser beam and a liquid chamber defined by a wall and having a nozzle opening for generating a liquid jet, To a machining head for coupling a laser beam to a liquid jet, including a coupling unit disposed therein. With the coupling unit connected to the optical unit, a laser beam, which can be focused by the optical unit, can be sent through the liquid chamber of the coupling unit to the nozzle opening along the beam direction, Lt; RTI ID = 0.0 > jets < / RTI > Here, in order to allow liquid to be supplied from the optical unit to the liquid chamber, a liquid interface is formed between the optical unit and the coupling unit.

A laser machining apparatus is known in which a laser beam is coupled to a thin water jet so that the laser beam is guided to a material machining position as in a light pipe. This laser machining apparatus has the advantage that the laser energy is concentrated in the cross section of the water jet over the length of the water jet. Accordingly, even when the distance from the material machining position is changed, there is no need to continuously track the focus of the laser beam. In addition, such an apparatus has the advantage that the material to be machined may be continuously cooled by a water jet.

This type of laser machining apparatus has a machining head in order to cause a thin water jet to be generated and to allow the laser beam to be coupled to such a water jet. The machining head may be formed in various configurations and shapes. This means that the machining head is formed, for example, so as to be embedded in the remainder of the laser machining apparatus, such that a water jet having an internal laser beam coupled therewith is ejected from the wall of the laser machining apparatus It is possible. In this case, the object to be machined may move relative to the machining head in front of the wall so that the water jet, to which the laser beam is coupled, can reach the machining position of the object. However, the machining head may form the free end of the laser machining apparatus, or it may be disposed on the free end of a movable arm of the laser machining apparatus. Accordingly, the water jet can be moved above the object to be machined so that the water jet having the laser beam coupled thereto reaches the position where the machining should be performed.

Regardless of the manner in which the machining head is formed into a particular shape, the machining head is usually formed of an optical unit and a coupling unit. Here, the optical unit includes at least one optical component, such as a single lens component or a group of lens components, to focus the laser beam. On the other hand, the coupling unit includes a nozzle having a nozzle opening for causing a liquid jet to be generated. Here, the optical unit and the coupling unit are mutually disposed in the machining head in such a manner that the optical unit focuses the laser beam on the liquid jet so that the laser beam is coupled to the liquid jet.

An example of this type of machining head is described in EP 1 833 636 B1 by Synova SA. The machining head includes a coupling unit for generating a liquid jet using a liquid nozzle. The machining head also includes an optical unit for focusing the laser beam in the liquid duct of the liquid nozzle so that the laser beam is coupled to the liquid jet. The coupling unit includes a mounting portion, a window portion, and a closing portion. A conical opening of the optical unit is arranged above the mounting portion. The upper side of the window is located at the shoulder of the mounting portion at the lower end of the conical opening. The closing portion is disposed on the lower side of the window portion and is formed so as to close the bottom side of the thin disc-shaped intermediate space between the window portion and the closing portion. This intermediate space serves as a liquid inflow line for the liquid nozzle inserted in the gap on the upper side of the closing portion facing the intermediate space. The liquid nozzle has a central duct forming a fine liquid jet to which laser radiation is coupled.

Such a machining head is disadvantageous in that it is wide in the vertical direction to the liquid jet. Also, the liquid jet is stable over only a limited length. Thereafter, the liquid jet is decomposed into individual drops, and these droplets are transformed into droplets of substantially spherical shape that are slightly flat across the length of the inclined surface. The effective distance from the liquid nozzle to the machining position is limited since only stable liquid jets can serve as the photoconductor of the laser beam. Thus, only a substantially planar specimen can be immediately machined by this machining head. However, in the context of three-dimensional machining of objects, such a machining head is inadequate if machining should be done in a position where access is more difficult. In this case, if the object is held close to the machining head so that a stable liquid jet, to which the laser beam is coupled, can sufficiently reach the machining position, there is a risk that the machining head will collide with the object due to its wide width have.

The object of the present invention is to provide a machining head capable of three-dimensional machining of an object, which is related to the technical field mentioned at the outset.

The above-mentioned object is achieved by the features of claim 1. According to the present invention, with the coupling unit connected to the optical unit, the liquid interface is disposed in front of the optical component of the optical unit positioned last when viewed in the beam direction as viewed in the beam direction.

Here, the term "liquid interface" means a position at which liquid from the optical unit advances to the coupling unit, so that liquid is supplied to the liquid chamber. To this end, the optical unit has an opening through which liquid to be supplied to the liquid chamber can be discharged from the optical unit. Further, the coupling unit has an opening through which the liquid in the liquid chamber can be introduced. With the coupling unit connected to the optical unit, these two openings are interleaved in such a way that the liquid ejected from the opening of the optical unit can flow into the opening of the coupling unit. Thus, these two openings form a liquid interface, optionally with a region enclosed between the optical unit and the coupling unit such that liquid released from the opening of the optical unit is directed to the opening of the coupling unit.

Here, with the coupling unit connected to the optical unit, these two openings may be located directly above and below each other. In this case, the two openings located above and below each other form a liquid interface. However, the two openings may also be arranged in positions that are somewhat offset from one another in the lateral direction. Regardless of the arrangement of these two openings, the optical unit and the coupling unit may also be arranged so as to surround an area where the liquid emitted from the opening of the optical unit is to be sent to the opening of the coupling unit. This region may be defined, for example, by one or a plurality of seals disposed between the optical unit and the coupling unit. In this case, the liquid interface is formed to extend over these areas and the two openings.

As viewed in the beam direction, the last optical component of the optical unit is the optical component that is the last to travel through the optical unit, before the laser beam leaves the optical unit and is coupled to the liquid jet at the coupling unit . Thus, this last optical element may be, for example, a lens element or a group of lens elements that allows the laser beam to be focused. However, the last optical component in the beam direction may also be a window that closes the optical component from the outside and does not have its own focusing characteristics. Regardless of the specific embodiment of the last optical element as viewed in the beam direction, the laser beam traveling through the optical unit travels firstly past the liquid interface before passing through the last optical element of the optical unit, The liquid interface according to the present invention is disposed in front of this optical component when viewed in the beam direction. Whether the coupling unit is directly connectable to the optical unit or whether the coupling unit is connectable to the optical unit using an intermediate component is irrespective of the solution according to the invention described herein. Likewise, the specific construction of the optical unit and the coupling unit is also irrelevant to the solution according to the invention. Accordingly, the optical unit may be attachable, for example, as a separate unit to the laser machining apparatus. Thus, the laser beam generated by the laser associated with the laser machining apparatus may be moved through the optical unit. The laser beam may be focused by the optical unit and may be coupled to a liquid jet generated by a coupling unit attached to the optical unit. However, the optical unit may also form an end region of the lance of the laser machining apparatus in which the laser beam generated by the laser associated with, for example, the laser machining apparatus is guided. In this case, the lance may constitute a part of the laser machining apparatus, and its end region is connected to the optical unit. Here, the coupling unit may be fastened to the outside of the end region of the lance constituting, for example, a part of the optical unit.

The solution according to the invention has the advantage that the machining head may be constructed in a smaller size. In addition, a portion of the machining head from which the laser jet is coupled to the machining head may be formed to be narrower. Thus, a stable liquid jet and a laser beam coupled to the liquid jet can be reached more quickly in a position difficult to access by the machining head. Therefore, the three-dimensional machining of the object is also promoted.

Advantageously, with the coupling unit connected to the optical unit, the liquid interface has a liquid interface area that is angularly aligned with respect to a plane that is vertically aligned with the beam direction. Here, the liquid interface region extends through the liquid interface and thus extends between the surface of the optical unit surrounding the opening of the optical unit and the surface of the coupling unit surrounding the opening of the coupling unit. Thus, when the opening of the optical unit is located directly above the opening of the coupling unit so that the liquid, which is sent from the optical unit to the coupling unit and supplied to the liquid chamber, flows directly from the opening of the coupling unit to the opening of the coupling unit, Is defined by the optical unit and the surface portion of the coupling unit located above and below each other around the two openings, and these openings continue to be extended even in a portion where the surface of the optical unit and coupling unit is not present. It is not important here whether these surface portions located around the two openings are restricted to the liquid interface or whether the portion extends just beyond the liquid interface. On the other hand, when the opening of the optical unit is not located directly above the opening of the coupling unit, and when the liquid which is released from the opening of the optical unit and supplied to the liquid chamber passes through a portion surrounded by the optical unit and the coupling unit When moved to the opening of the coupling unit, the liquid interface area extends between the optical unit surface portion located about the opening of the optical unit and the coupling unit surface portion located about the opening of the coupling unit. When the gap between the optical unit surface and the coupling unit surface around these openings is constant and the two surfaces extend parallel to each other at this portion, the liquid interface region is parallel to the surface of the optical unit between these two surfaces And extends parallel to the surface of the coupling unit unit, and these openings continue to extend even in a portion where the surface of the optical unit and the coupling unit is not present. It is not important here whether these surface portions located around the two openings are restricted to the liquid interface or whether the portion extends just beyond the liquid interface. On the other hand, if the surface of the optical unit extends at an angle to the surface of the coupling unit such that the distance measured between the two surfaces inside the liquid interface and the measured distance in the vertical direction changes, / RTI > Here, the liquid interface region forms the same angle with respect to the surface of the optical unit and with the surface of the coupling unit, and is continuously extended even in a portion where the surface of the optical unit and the coupling unit is not present due to the opening. It is not important here whether these surface portions located around the two openings are restricted to the liquid interface or whether the portion extends just beyond the liquid interface.

The liquid interface region may also be curved, since the surface of the optical unit located around the aperture of the optical unit and the surface of the coupling unit located around the aperture of the coupling unit may be curved. Thus, the coupling unit may have, for example, a cylindrical portion, and an opening for supplying liquid to the liquid chamber is disposed in the radially outer region of the cylindrical portion. The optical unit may also have, for example, an opening having a circular cross-section, and the cylindrical portion of the coupling unit may be pushed into the opening to connect the coupling unit to the optical unit. In this case, the opening of the optical unit, in which liquid supplied to the liquid chamber may be emitted from the optical unit, may be disposed inside the opening having a circular cross-section. Thus, since the liquid interface is located in the cylindrical portion of the coupling unit, the liquid interface area also conforms to the shape of the cylindrical portion of the coupling unit. Therefore, in this case, the liquid interface area is also curved.

The fact that the liquid interface area is aligned perpendicular to the plane aligned with the beam direction means that within the liquid interface, for each point of the liquid interface area, the normal of this point is at an angle to the beam direction, Which means that they are not aligned parallel to the beam direction. Accordingly, if the coupling unit for coupling to the optical unit is configured to be movable in the direction opposite to the beam direction with respect to the optical unit, and thus configured to be connectable to the optical unit in a simple manner, the liquid interface may be sealed in a simple manner . Here, when the liquid interface is aligned at an angle with respect to the moving direction of the coupling unit, at the time of coupling of the coupling unit to the optical unit, the opening of the coupling unit and the opening of the optical unit, And does not extend in the normal direction of the coupling unit surface portion located around the opening of the coupling unit, but converges in the lateral direction. Thus, the liquid interface may be sealed in a simple manner.

In a preferred variant, the liquid interface region extends in a direction parallel to the beam direction. This means that within the liquid interface, for each point in the liquid interface region, the normal of this point is located in a plane aligned perpendicularly to the beam direction. Thus, here, since the liquid interface region is aligned in a direction parallel to the moving direction of the coupling unit and thus the opening of the coupling unit is pushed along the surface portion of the coupling unit located around the opening in front of the opening of the optical unit, The advantage that the liquid interface can be sealed in a simple manner if the coupling unit for connection to the optical unit is configured to be movable in the direction opposite to the beam direction with respect to the optical unit and thus is connectable to the optical unit in a simple manner have. To achieve this advantage, it does not matter whether the liquid interface area inside the liquid interface is flat or flat or curved. Thus, the coupling unit may have, for example, a cylindrical portion, and an opening for supplying liquid to the liquid chamber is arranged in the radially outer region of the cylindrical portion, while the optical unit has an opening So that the cylindrical portion of the coupling unit may be pushed into the opening to connect the coupling unit to the optical unit. In this case, the opening of the optical unit, in which liquid supplied to the liquid chamber may be emitted from the optical unit, may be disposed inside the opening having a circular cross-section. Therefore, in this case, the liquid interface area is also curved. However, the coupling unit may, for example, have a portion with a square cross section, and an opening for supplying liquid to the liquid chamber is disposed at one of the four flat outer surfaces of this portion. Here, the optical unit may also have an opening having a square cross section, so that a part of the coupling unit may be pushed in the opposite direction of the beam direction into the opening to connect the coupling unit to the optical unit. In this case, the opening of the optical unit, in which the liquid supplied to the liquid chamber may be emitted from the optical unit, may be disposed on one of the four flat sides inside the opening having the square cross section. Thus, in this case, the liquid interface region is formed flat and flat.

As a variant, however, with the coupling unit connected to the optical unit, the liquid interface may have a liquid interface area aligned at least partially in a direction parallel to the plane aligned with the beam direction.

Advantageously, the coupling unit has at least one liquid duct connecting the liquid interface to the liquid chamber. This arrangement allows liquid to be supplied to the liquid chamber in a simple manner such that the liquid transferred from the optical unit is sent to the opening of the coupling unit through which the liquid supplied to the liquid chamber can be moved and sent from the opening to the liquid chamber through the liquid duct There is an advantage that it can be.

As a variant, however, the coupling unit may not have any liquid duct of this type due to the liquid being supplied to the liquid chamber in a different way. This is the case, for example, where the opening of the coupling unit, through which the liquid supplied to the liquid chamber may pass, may be directly connected to the liquid chamber. This type of deformation configuration has the advantage that the machining head may be formed in a more compact configuration and thus the machining head can easily reach a position that was previously difficult to reach so that the three-dimensional machining of the object is simplified have.

The coupling unit is preferably formed in a gradually tapered shape in one direction, and this direction corresponds to the beam direction with the coupling unit connected to the optical unit. Thus, the width of the machining head, which is measured transversely with respect to the beam direction, decreases as the position of the machining head where the liquid jet, which can be generated by the nozzle opening, is emitted from the machining head. Thus, the machining head can easily reach a position where it has been difficult to reach the conventional one, so that the three-dimensional machining of the object is simplified.

As a variant, however, the coupling unit may not be formed in a gradually tapered shape in the direction corresponding to the beam direction with the coupling unit connected to the optical unit. This type of modification configuration may have the advantage that the machining head may be formed in a simple manner and thus may be manufactured in a more cost effective manner.

When the coupling unit is formed in a gradually tapered shape in one direction corresponding to the beam direction with the coupling unit connected to the optical unit, advantageously, this gradually tapering shape is a conical outer shape. In this case, there is an advantage that the gradually tapered shape in the beam direction is consistently uniform. Thus, the machining head may be oriented at an immediate slope with respect to the machining area depending on the cone opening angle of the gradually tapered conical outer shape. This facilitates the approach of the machining head to the previously unattainable position, thereby simplifying the three-dimensional machining of the object.

As a variant, however, it may also be formed so that it tapers to a different shape than the conical outer shape.

When the coupling unit is connected to the optical unit and the coupling unit is formed in a shape gradually tapering in a conical outer shape in one direction corresponding to the beam direction, the rotational symmetry center axis of the conical outer shape and the outer peripheral region of the conical outer shape The cone opening angle of the gradually tapered conical exterior shape measured between the maximum 60 °, maximum 45 °, maximum 30 °, in particular maximum 20 °. This has the advantage that the machining head may be able to arrive in an approachable position in a difficult-to-access position, thereby simplifying the three-dimensional machining of the object.

However, as a variant, the cone opening angle of the conical external shape may exceed 20, exceed 30, exceed 45, or exceed 60. This angle has the advantage of simplifying the formation of the coupling unit.

Preferably, the coupling unit comprises a gas discharge nozzle for shaping the gas jet surrounding the liquid jet. This has the advantage of increasing the length over which the liquid jet remains stable. The effective distance from the machining position to the machining head may be increased since the laser beam is kept coupled only to the stable liquid jet. As a result, machining in a position where the machining head is difficult to access in the past can be made in a simpler manner, so that the three-dimensional machining of the object is simplified.

However, as a variant, the coupling unit may not have a gas discharge nozzle for shaping the gas jet surrounding the liquid jet. This type of modification configuration may have the advantage that the machining head may be formed in a simple manner and thus may be manufactured in a more cost effective manner. In addition, repair of the machining head is simplified.

When the coupling unit has a gas discharge nozzle for shaping a gas jet surrounding the liquid jet, the coupling unit is also arranged so that, when the coupling unit is connected to the optical unit, the gas It is preferable to provide a back pressure chamber. This gas backpressure chamber has the advantage that a gas jet enclosing the liquid jet and extending the length of the liquid jet to maintain a stable state can be generated in a simple manner.

As a variant, however, it is also possible that the coupling unit is not provided with this type of gas backpressure chamber. This has the advantage that the coupling unit may be constructed in a simple manner.

When the coupling unit has a gas discharge nozzle for shaping a gas jet surrounding the liquid jet, the gas discharge nozzle is arranged in the beam direction when viewed from the direction of the nozzle opening, with the coupling unit being connected to the optical unit desirable. Here, the gas discharge nozzle may be arranged immediately behind the nozzle opening in the beam direction when viewed in the direction of the nozzle opening. However, an optionally available gas backpressure chamber may be disposed between the nozzle opening and the gas discharge nozzle. In this case, liquid jets that may be generated by the nozzle openings in the beam direction may move through the gas backpressure chamber and may be ejected from the coupling unit through the gas ejection nozzles. The advantage of disposing the gas ejection nozzles in the beam direction when viewed from the nozzle openings is that the liquid jets that can be generated by the nozzle openings, such that the gas jets surrounding the liquid jets in an optimal manner may be generated by the gas ejection nozzles, And may be discharged through a gas discharge nozzle.

As a variant, however, the gas discharge nozzles may also be arranged in other ways.

When the coupling unit has a gas discharge nozzle for shaping a gas jet surrounding the liquid jet, in order to supply the gas for jetting the gas to the coupling unit, with the coupling unit connected to the optical unit, It is preferable to form a gas interface therebetween. To this end, the optical unit has an opening through which the gas for gas jet may be emitted from the optical unit. The coupling unit also has an opening through which a gas for gas jet may be sent. With the coupling unit connected to the optical unit, these two openings are interleaved in such a way that the gas emitted from the opening of the optical unit can flow into the opening of the coupling unit. These two openings thus form a gas interface, together with the part of the gas which is selectively surrounded between the optical unit and the coupling unit and released from the opening of the optical unit, to the opening of the coupling unit. Here, in a state where the coupling unit is connected to the optical unit, the two openings may be located directly above and below each other to face each other. In this case, two openings located above and below each other form a gas interface. However, the two openings may also be arranged so that they are offset somewhat laterally from each other. Regardless of the arrangement of these two openings, the optical unit and the coupling unit may also be formed so as to surround a part of the gas emitted from the opening of the optical unit being moved to the opening of the coupling unit. This portion may be defined, for example, by one or a plurality of seals disposed between the optical unit and the coupling unit. In this case, the gas interface extends over this portion and the two openings.

The advantage of the gas interface is that the machining head may be constructed in a compact manner, since it is not necessary for the coupling unit to have a connection for supplying the gas for the gas jet separately from the connection with the optical unit. This advantage is achieved irrespective of whether the gas for the gas jet is transferred from the optical unit through the gas interface to the combined unit in a gaseous state or in a liquid state.

However, as a variant, a gas interface may not be formed between the optical unit and the coupling unit to supply the gas for gas jet to the coupling unit with the coupling unit connected to the optical unit. This type of modification configuration has the advantage that the connection of the coupling unit to the optical unit is simplified.

When the coupling unit is connected to the optical unit, a gas interface is formed between the optical unit and the coupling unit so as to supply the gas for the gas jet to the coupling unit. Advantageously, as viewed in the beam direction, Is located in front of the optical component of the last positioned optical unit as viewed in Fig. Thus, the laser beam traveling through the optical unit travels past the gas interface first, bypassing the gas interface, or moving through the gas interface, before passing through the last optical component of the optical unit. This has the advantage of enabling a potentially smaller configuration. Also, the machining head may thus be formed more narrowly in the portion where the laser beam is coupled and the liquid jet enclosed by the gas jet is ejected from the machining head. Thus, a stable liquid jet and its associated laser beam may arrive in a simple manner at a location where the access to the machining head has previously been difficult. Thus, the three-dimensional machining of the object is promoted.

However, as a variant, it is also possible, in terms of the beam direction, to place the gas interface at the same height as the optical component of the last positioned optical unit when viewed in the beam direction, or in the optical configuration of the last positioned optical unit It may be disposed behind the element.

When the joining unit has a gas discharge nozzle for shaping a gas jet surrounding the liquid jet and when a gas interface is formed to supply the gas for gas jet to the coupling unit with the coupling unit connected to the optical unit And a gas interface area which is angularly aligned with respect to a plane in which the gas interface is vertically aligned with the beam direction with the coupling unit connected to the optical unit. Here, it is a problem that the gas interface is disposed in front of, at the rear of, or at the same height as the optical component positioned at the end of the optical unit when viewed in the beam direction with the coupling unit connected to the optical unit It does not.

This gas interface area extends through the gas interface and thus extends between the opening of the optical unit where the gas for gas jet may be emitted from the optical unit and the opening of the coupling unit where the gas for gas jet may be moved, And between the surface of the coupling unit and the optical unit surrounding these openings. Therefore, when the opening of the optical unit is positioned directly above the opening of the coupling unit so that the gas supplied to the gas jet moving from the optical unit to the coupling unit flows directly from the opening of the optical unit to the opening of the coupling unit, And the aperture is defined by two aperture-circumferential portions of the surface of the coupling unit and is extended continuously in the two aperture portions where the surface of the optical unit and coupling unit is not present due to the aperture. Here, it does not matter whether the gas interface is defined by the surface portion located around the two openings or whether the portion extends just beyond the gas interface. Conversely, if the opening of the optical unit is not located directly above the opening of the coupling unit and the gas supplied to the gas jet emitted from the opening of the optical unit is moved to the opening of the coupling unit through the portion enclosed between the optical unit and the coupling unit, The gas interface region extends between the surface portion of the optical unit located around the aperture of the optical unit and the surface portion of the coupling unit located around the aperture of the coupling unit. The distance between the surface of the optical unit and the surface of the coupling unit at the opening perimeter portion is constant so that the two surfaces in this portion extend in mutually parallel directions so that the gas interface area is parallel to the surface of the optical unit, And extends continuously between the two surfaces due to these two openings even at the portions where the individual surfaces of the optical unit and the coupling unit are not present. Here, it does not matter whether the gas interface is defined by surface portions located around the two openings or whether the two openings extend just beyond the gas interface. Conversely, if the surface of the optical unit is extended at an angle to the surface of the coupling unit so that the distance between the two surfaces measured in the direction perpendicular to these surfaces within the gas interface is changed, . Here, the gas interface region has the same angle with respect to the surface of the optical unit and with respect to the surface of the coupling unit, and is continuously extended even in a portion where the optical unit and the individual surface of the coupling unit do not exist due to the opening. Here, it is equally important whether the gas interface is defined by these surface portions located around the two openings or whether the two openings extend just beyond the gas interface.

Since the surface portion of the optical unit located around the opening of the optical unit and the surface portion of the coupling unit located around the opening of the coupling unit may be curved, the gas interface region may also be formed in a curved shape. Thus, the coupling unit may have, for example, a cylindrical portion, and an opening for supplying gas to the gas jet is disposed in the radially outer region of the cylindrical portion. The optical unit may also have, for example, an opening having a circular cross-section, and the cylindrical portion of the coupling unit may be pushed into the opening to connect the coupling unit to the optical unit. In this case, the opening of the optical unit in which the gas for gas jet may be emitted from the optical unit may be disposed inside the opening having the circular cross-section. Thus, since the gas interface is located in the cylindrical portion of the coupling unit, the gas interface area also conforms to the shape of the cylindrical portion of the coupling unit. Therefore, in this case, the gas interface area is also curved.

The fact that the gas interface area is arranged at an angle to a plane aligned perpendicularly to the beam direction means that within the gas interface the normal of this point at each point of the gas interface area is at an angle to the beam direction, Which means that the normal is not aligned parallel to the beam direction accordingly. Accordingly, if the coupling unit for coupling to the optical unit is configured to be movable in the direction opposite to the beam direction with respect to the optical unit and is thus configured to be connectable to the optical unit in a simple manner, the gas interface may be sealed in a simple manner . This is because the gas interface area is arranged at an angle with respect to the moving direction of the coupling unit so that when the coupling unit is connected to the optical unit, the opening of the coupling unit and the opening of the optical unit are aligned with each other, In the normal direction of the surface of the optical unit positioned at the center of the optical unit and the normal direction of the surface of the coupling unit surface located around the opening of the coupling unit. Thus, the gas interface may be sealed in a simple manner.

With the coupling unit connected to the optical unit, the gas interface preferably extends in a direction parallel to the beam direction. This means that within the gas interface, for each point in the gas interface area, the normal of this point is aligned perpendicular to the beam direction. Thus, here, since the gas interface area is aligned in a direction parallel to the moving direction of the coupling unit and thus the opening of the coupling unit is pushed along the surface part of the coupling unit located around the opening in front of the opening of the optical unit, The advantage that the gas interface may be sealed in a simple manner if the coupling unit for connection to the optical unit is configured to be movable in the direction opposite to the beam direction with respect to the optical unit and thus is connectable to the optical unit in a simple manner have. To achieve this advantage, it does not matter whether the gas interface area within the gas interface is planarly flat or curved. Thus, the coupling unit may have, for example, a cylindrical portion, and an opening for supplying gas to the gas jet is arranged in the radially outer region of the cylindrical portion, while the optical unit has an opening So that the cylindrical portion of the coupling unit may be pushed into the opening to connect the coupling unit to the optical unit. In this case, the opening of the optical unit in which the gas for gas jet may be emitted from the optical unit may be disposed inside the opening having the circular cross-section. Therefore, in this case, the gas interface area is also curved. However, the coupling unit may, for example, have a portion with a square cross section, and an opening for supplying gas to the gas jet is disposed at one of the four flat outer surfaces of this portion. Here, the optical unit may also have an opening with a square cross section so that a portion of the coupling unit may be pushed into the opening in the opposite direction of the beam direction to connect the coupling unit to the optical unit. In this case, the opening of the optical unit, from which the gas for gas jet may be emitted from the optical unit, may be disposed on one of the four flat sides to the inside of the opening having a square cross section. Thus, in this case, the gas interface area is formed flat and flat.

As a variant, however, with the coupling unit connected to the optical unit, the gas interface may also have a gas interface area which is aligned in a direction parallel to the plane at least a part of which is aligned vertically with the beam direction.

Advantageously, the coupling unit has at least one gas duct connecting the gas interface to the gas discharge nozzle. Thereby, since the gas delivered from the optical unit is sent to the opening of the coupling unit, where the gas for the gas jet can be moved, and is sent through the gas duct to the gas discharge nozzle, the gas is supplied to the gas discharge nozzle in a simple manner There is an advantage that it can be. Here, it does not matter whether the gas from the gas duct is first sent to an optionally available gas backpressure chamber and then to a gas discharge nozzle, or whether the gas is sent directly to the gas discharge nozzle.

As a variant, however, the coupling unit may not have any gas duct of this type due to the gas being supplied in a different way to the gas discharge nozzle. This is the case, for example, where the opening of the coupling unit, through which the gas for the gas jet may be moved, may be connected directly to the gas discharge nozzle or alternatively to an available gas backpressure chamber. This type of deformation configuration has the advantage that the machining head may be formed in a more compact configuration and therefore can be reached more easily in difficult to reach positions of the machining head, simplifying the three-dimensional machining of the object .

When the coupling unit is provided with a gas discharge nozzle, the coupling unit advantageously has a replaceable head-end unit in which a gas discharge nozzle is disposed. Thus, if the gas discharge nozzle exhibits a wear signal and thus the gas jet, which can be generated by the gas discharge nozzle, no longer encompasses the liquid jet in an optimal manner, the head end unit with the gas discharge nozzle is replaced There is an advantage that it can be.

Alternatively, the coupling unit may not have such a head-end unit with a gas discharge nozzle.

When the coupling unit has the gas discharge nozzle and the head front end unit and the gas discharge nozzle is disposed in the head front end unit, the head front end unit preferably has a conical outer shape. Since the head end unit is disposed at the tip of the machining head, this arrangement has the advantage that the tip of the machining head, from which the liquid jet and the gas jet are emitted, is formed thin. Thus, the machining head can more easily reach a difficult-to-access position, thereby simplifying the three-dimensional machining of the object.

In a preferred variant, the head-end unit is formed so that the liquid jets and the gas jets are gradually tapered to the position where they are ejected from the machining head. This likewise has the advantage that a portion of this position of the machining head is made thinner and therefore the machining head can reach a position that was previously difficult to access. Thus, the three-dimensional machining of the object is simplified.

As a variant, however, the head-end unit is not also formed in a conical shape and may not be formed gradually tapering to the position where the liquid jet and gas jet are ejected from the machining head.

Desirably, the nozzle having a nozzle opening for generating a liquid jet is disposed in a replaceable nozzle block, regardless of whether the coupling unit has a gas discharge nozzle and an optionally replaceable head-end unit. Here, the replaceable nozzle block may be inserted into the wall of the coupling unit defining the liquid chamber, or may form a wall of the coupling unit defining the liquid chamber. The replaceable nozzle block is configured such that the nozzle block with the nozzle is replaced in a simple manner if the nozzle exhibits a wear signal and thus the liquid jet that can be generated by the nozzle opening is stable over a reduced length or is no longer stable at all It is advantageous.

As a variant, however, the coupling unit may not include a replaceable nozzle block in which a nozzle having a nozzle opening for generating a liquid jet is disposed.

The coupling unit advantageously has a cavity in which the optical unit is projected inward with one side open and the coupling unit connected to the optical unit. This provides the advantage that the coupling unit can be connected to the optical unit in a simple manner. It is also advantageous that the optical component located at the end of the optical unit when viewed in the beam direction with the coupling unit connected to the optical unit may be disposed in the cavity and thus be projected outwardly by the coupling unit . Here, nevertheless, when the coupling unit is removed from the optical unit, it may be radially accessible to the optical component located at the end of the optical unit when viewed in the beam direction.

As a variant, however, the coupling unit may not have this type of cavity open on one side.

Regardless of whether the coupling unit is open at one side and the coupling unit is connected to the optical unit, whether or not the optical unit has a cavity protruding inward, it is preferable that the optical unit forms a cover and surrounds the coupling unit at the liquid interface Do. Thus, the liquid interface is disposed inside the cover. Thereby, the opening, in which the liquid supplied to the liquid chamber may be discharged from the optical unit, is located inside the cover. Thus, in the case where the coupling unit is not connected to the optical unit, the opening, through which the liquid supplied to the liquid chamber may be emitted from the optical unit, is better protected. In addition, the lid has the advantage that the connection of the coupling unit to the optical unit is better guided.

As a variant, however, the optical unit may not form a cover, or the optical unit may not enclose the coupling unit at the liquid interface.

One side of the liquid chamber is advantageously closed by a transparent component having transparency to the laser beam of the laser beam and in the state in which the coupling unit is connected to the optical unit, As shown in Fig. This has the advantage that the laser beam that can be focused by the optical unit may be sent to the liquid chamber through the transparent component, thereby facilitating the coupling of the laser beam to the liquid jet.

However, as a variant, one side of the liquid chamber may not be closed by a transparent component having transparency to the laser beam of the laser beam.

The nozzle opening preferably has a diameter in the range of 20 to 150 mu m. In this case, the nozzle may be manufactured in a cost-effective manner and nevertheless has the advantage of having a nozzle opening with a small diameter. The nozzle orifice preferably has a diameter in the range of 40 탆 to 80 탆. In this case, there is an advantage that a liquid jet having a diameter may be generated by which the laser beam may be coupled in an optimal manner by the nozzle opening. In another preferred variant, it is preferred that the diameter of the nozzle opening is less than 40 占 퐉, in particular less than 30 占 퐉 or less than 20 占 퐉. This has the advantage that a liquid jet with a very small diameter may be generated, thus enabling a more refined and more precise machining of the object.

As a variant, however, the nozzle opening may have a diameter greater than 80 占 퐉 or greater than 150 占 퐉.

The laser beam is preferably capable of being focused by the optical unit to a point whose diameter has a magnitude of at most 2/3 of the nozzle opening diameter, particularly preferably at most 1/2. This means that at least 95% of the energy of the laser beam at the focal point is preferably aligned in a direction perpendicular to the beam direction within a circle having a diameter of at most 2/3 of the nozzle opening diameter, It means passing. In an advantageous variant, at least 98% of the energy of the laser beam passes through one region within this circle. There is thus the advantage that the laser beam can be coupled to the liquid jet which can be generated in an optimal manner by the nozzle opening.

As a variant, however, the optical unit may focus on a point where the laser beam has a diameter greater than half the nozzle opening diameter or greater than 2/3 the diameter.

The liquid jet laser machine preferably comprises a machining head according to the invention. However, the machining heads may also be manufactured, marketed and stored separately from the liquid jet laser machine tools.

In the case of a liquid jet laser machine tool comprising a machining head according to the invention, the liquid jet laser machine tool may also advantageously be focused by an optical unit comprising at least one optical component Which can be sent by the optical unit to the nozzle opening through the liquid chamber of the coupling unit in the beam direction with the coupling unit connected to the optical unit and which can be generated by the nozzle opening and which can be coupled to the liquid jet extending in the beam direction And a laser for generating a laser beam. However, it is also possible that the liquid jet laser machine tool does not have such a laser, but only a port for a laser beam which can be generated by a separate laser. Here, the ports may be variously configured as needed. Thus, in order for the laser beam to be directed to the liquid jet laser machine tool, the port may comprise, for example, a window, a lens component, or a mirror, It may be guided forward by the head. However, the port may also be a mating position for attaching the photoconductor, so that the laser beam guided from the separate laser to the liquid jet laser machine tool by the photoconductor is directed into the liquid jet laser machine tool, The beam may be directed forward to the machining head.

Regardless of whether the liquid jet laser machine tool comprises a laser, or whether the laser beam is generated by a separate laser and flows into the liquid jet laser machine tool through the port, the liquid jet laser machine tool comprises a collimation unit . The provision of such a collimation unit offers the advantage that the laser beam may be collimated in an optimal manner before the laser beam is coupled to the liquid jet at the machining head.

As a variant, however, the liquid jet laser machine tool may also not include a collimating unit.

In the case of a liquid jet laser machine tool comprising a collimating unit, it is preferred that the individual optical components of the collimating unit or the entire collimating unit are movable in the opposite direction of the beam direction as well as the beam direction. Here, the term "beam direction" means the direction in which the laser beam is aligned at the portion of the collimating unit. When the laser beam changes its direction of travel between the collimating unit and the optical unit of the machining head, for example by a mirror, the beam direction at the part of the collimating unit may also deviate from the beam direction inside the machining head have. Regardless, as the individual components of the collimating unit or the entire collimating unit can move in the opposite directions of the beam direction and the beam direction, the laser beam at the machining head can be coupled to the liquid jet in an optimal manner And the optical unit of the machining head does not have any movable optical components at all, or at least has only a small number of movable optical components. Thus, the machining head can be constructed in a simpler structure, in a smaller size, and in a more compact manner, and thus the machining head may be manufactured in a more cost effective manner. In addition, the three-dimensional machining of the object is facilitated by such a more compact construction of the machining head.

Alternatively, however, any optical component of the collimating unit may not be movable in the beam direction or in the opposite direction of the beam direction, or the collimating unit itself may not be movable in the beam direction or in the opposite direction of the beam direction have.

 In principle, a liquid jet laser machine tool comprising a machining head according to the present invention may be constructed in any manner. However, the liquid jet laser machine tool according to the second invention described later is advantageous.

The object of the second invention is to achieve a liquid jet laser machine tool which simplifies the coupling of the laser beam to the liquid jet. It is also an object of the second invention to provide a method for focusing a laser beam on a nozzle opening of a nozzle of this type of liquid jet laser machine tool. Here, this method likewise promotes the coupling of the laser beam to the liquid jet.

This object is achieved by the following features. According to a second invention, a liquid jet laser machine tool comprises a machining head for coupling a laser beam to a liquid jet, the machining head comprising a nozzle with a nozzle opening for generating a liquid jet, Is focused on the port of the nozzle opening for the laser beam that is coupled to the liquid jet by the focusing assembly. Here, the liquid jet laser machine tool includes a two-dimensional image sensor for photographing a nozzle nozzle port peripheral nozzle portion. Further, the focus of the laser beam is released around the port of the nozzle opening so that the laser light from the laser beam may be reflected from the nozzle opening port periphery nozzle portion toward the image sensor, so that the scene of the port periphery nozzle portion of the nozzle opening Sensor, and the port of the nozzle opening can be identified in such a shooting scene. The liquid jet laser machine tool advantageously comprises a laser for generating a laser beam. In a likewise advantageous variant, the liquid jet laser machine tool does not comprise such a laser and comprises a port for the laser beam which can be generated by a separate laser. Here, the ports may be variously configured as needed. Thus, the port may include, for example, a window, a lens or a mirror, so that the laser beam is directed to the liquid jet laser machine tool, and the laser beam may be directed forward to the machining head. However, the port may also be a mating position for attaching the photoconductor, so that the laser beam guided from the separate laser to the liquid jet laser machine tool by the photoconductor is directed into the liquid jet laser machine tool, The beam may be directed forward to the machining head.

A method according to the present invention for focusing a laser beam on a nozzle opening of a nozzle of this type of liquid jet laser machine tool to couple the laser beam to a liquid jet generated by the nozzle opening, And a first step of releasing the focus of the laser beam around the port of the nozzle opening so as to be reflected toward the two-dimensional image sensor from the aperture port peripheral nozzle portion. Here, the scene of the nozzle peripheral portion of the nozzle opening can be photographed by the image sensor, and the port of the nozzle opening can be identified in such a photographing scene. In this context, the "reflection" of the laser beam of the laser beam to the two-dimensional image sensor, made up by the port peripheral nozzle portion of the nozzle opening, must be understood in a broad sense. The port periphery nozzle portion of the nozzle opening may be configured to have reflection characteristics in the sense of a reflection mirror that reflects a large part of the laser light, for example. However, the port perimeter nozzle portion of the nozzle opening may also be configured to exhibit, for example, only very weakly reflective characteristics or dispersive scattering properties. It is sufficient that at least a small portion of the laser light of the laser beam is reflected from the port peripheral nozzle portion of the nozzle opening to the two-dimensional image sensor. Therefore, only the port peripheral nozzle portion of the nozzle opening is irradiated with the focused laser beam only to the extent that the port of the nozzle opening is identifiable in the photographing scene of the port peripheral nozzle portion of the nozzle opening, The laser beam of the laser beam may be returned to the image sensor from the peripheral nozzle portion. Here, as long as the port of the nozzle opening can be confirmed in the shooting scene of the nozzle opening peripheral nozzle portion, the proportion of the laser light to be returned or reflected may become larger or considerably smaller.

The machining head included in the liquid jet laser machine tool employed in this method is advantageously the machining head according to the first invention described above. Accordingly, the advantages of the first invention and the advantages of the second invention are achieved. However, the machining head may also be configured in any other way, as long as it has a nozzle with a nozzle opening for generating a liquid jet and is used for the purpose of coupling the laser beam to a liquid jet . In this case, the advantages mentioned in the content of the second invention are achieved.

In addition, the focussing portion, which may cause the laser beam to focus on the port of the nozzle opening, may be configured in any manner, and may also include a plurality of components. Accordingly, the focussing portion may include, for example, an optical unit provided in the machining head as described above. However, the focussing portion may also include an optical unit of completely different configuration. The focussing portion also includes a collimation unit that serves to collimate the laser beam to form, for example, a parallel or approximately parallel beam that can be focused by the optical unit onto the port of the nozzle opening You may.

The manner in which the laser beam can be released from the port of the nozzle opening is irrelevant to the second invention. It is important that the laser beam is defocused so that the laser light of the defocused laser beam can be reflected from the port peripheral nozzle portion of the nozzle opening to the image sensor. Thus, the liquid jet laser machine tool is arranged in the beam path, movable in the direction of the beam path of the laser beam and in the opposite direction, for example, by scattering the laser beam so as to release the focus of the laser beam from the port of the nozzle opening Optical < / RTI > Here, the optical component may transmit the laser beam in a dispersion manner or reflect it in a dispersion manner. However, the liquid jet laser machine tool may also not have this type of optical component in a dispersive scattering mode, so that the scene of the nozzle perimeter portion of the nozzle opening can be photographed by the image sensor, The focal point of the laser beam of the laser beam is released from the nozzle peripheral portion of the nozzle opening and reflected from this portion to the image sensor so that the port of the nozzle opening can be identified, May be aligned in front of or behind the port of the nozzle opening as viewed in the beam direction.

The scene that can be photographed by the image sensor may be, for example, an individual photograph, or in the case of a moving image, a series of photographs. Thus, the image sensor can be configured in various forms. Accordingly, the image sensor can make it possible to take an individual image, for example, or to photograph a continuous image in the case of a moving image. The image sensor may be, for example, a CCD camera or other type of camera. Regardless of the type of construction of the image sensor, it is advantageous for the image sensor to be sensitive to the laser light of the laser beam reflected by the port peripheral nozzle portion of the nozzle opening. Thus, since the nozzle opening does not reflect the laser beam of the laser beam in contrast to the peripheral portion of the nozzle, the ability to identify the port of the nozzle opening in the shooting scene is increased. Accordingly, the nozzle opening appears dark in the photographing scene or appears as a portion where no light is irradiated.

Regardless of the specific configuration of the image sensor, the second invention is achieved, whereby the above-described method and the liquid jet laser machine tool are characterized in that, in order to allow the scene of the nozzle peripheral portion of the nozzle opening to be imaged by the image sensor, It is advantageous that no additional light source is required to allow the light to be irradiated to the port circumferential nozzle portion of the nozzle. Thus, by achieving the second invention as described above, both the liquid jet laser machine tool as well as the method for focusing the laser beam on the nozzle opening of the nozzle are simplified.

The liquid jet laser machine tool preferably includes a first mirror for changing the traveling direction of the laser beam and a second mirror for changing the traveling direction of the laser beam and the first mirror driven by the first motor The mirror is pivotable only about the first axis, and the second mirror driven by the second motor is pivotable only about the second axis. By the turning motion of the first mirror about the first axis, The laser beam is moved across the port perimeter nozzle portion of the nozzle opening by the pivotal movement of the second mirror about the second axis while the beam can move along the first straight line across the port peripheral nozzle portion of the nozzle opening The first axis and the second axis are aligned so as to be movable along two straight lines, and the first and second straight lines are arranged at an angle to each other and thus cross each other. Here, the straight line may be entirely linear, or may have a slight curvature. This curvature may be caused, for example, by distortion of the optical portion that focuses the laser beam. Regardless, the two mirrors, which are driven for pivotal movement, have the advantage of simplifying movement under the control of the focus of the laser beam across the port periphery nozzle portion of the nozzle opening and across the port of the nozzle opening.

In a preferred variant, the first and second straight lines are arranged substantially in mutually perpendicular directions. This arrangement has the advantage that it is possible to move optimally under the control of the focus of the laser beam across the port periphery nozzle portion of the nozzle opening and across the port of the nozzle opening.

In a preferred variant, the liquid jet laser machine tool comprises a first mirror for changing the direction of travel of the laser beam and a second mirror for changing the traveling direction of the laser beam, Wherein the first mirror is pivotable only about a first axis driven by the motor and the second mirror is pivotable about a second axis driven by the second motor and wherein the first axis and the second axis are substantially mutually perpendicular . Thus, likewise, there is the advantage that movement under the control of the focus of the laser beam across the port periphery nozzle portion of the nozzle opening and across the port of the nozzle opening is simplified.

As a variant, however, the liquid jet laser machine tool may not include first and second mirrors of this type, and the focus of the laser beam may cross the nozzle perimeter portion of the nozzle aperture and across the port of the nozzle aperture It may be possible to move in other ways. Accordingly, the liquid jet laser machine tool may also include a mirror which is driven by one or two motors to pivot about a first axis and a second axis, the mirror being adapted to change the traveling direction of the laser beam, The laser beam can be moved along the first straight line across the port periphery nozzle portion of the nozzle opening by the pivotal movement of the mirror about the first axis while the laser beam is moved by the pivotal movement of the mirror about the second axis The first axis and the second axis are aligned so as to be movable along the second straight line across the port periphery nozzle portion of the nozzle opening and the first and second straight lines are disposed at an angle to each other and thus cross each other.

It is advantageous if the focusing section comprises a collimating unit for causing the laser beam to be collimated to form a parallel or approximately parallel beam, and an optical unit for focusing such a parallel or approximately parallel beam. This has the advantage that an optimal focusing of the laser beam is achieved.

As a variant, however, the focussing installation may not include a collimating unit for collimating the laser beam to form a parallel or approximately parallel beam. Accordingly, the focusing unit may include, for example, only an optical unit for focusing the laser beam. However, the focusing section may also include an optical unit for focusing the laser beam, and a plurality of other optical components. This type of modification configuration has the advantage that the liquid jet laser machine tool may be constructed in a simpler manner.

When the focussing installation includes a collimating unit for collimating the laser beam to form a parallel or approximately parallel beam and an optical unit for focusing such a parallel or approximately parallel beam, The individual optical components of the entire collimating unit or preferably the collimating unit may preferably be movable in order to change the collimation state of the collimating unit and thus the distance between the optical unit and the focal point of the laser beam, .

In a preferred variant, in order to allow the collimation state of the laser beam to change and thus the distance between the optical unit and the focal point of the laser beam to change, the individual optical components of the collimating unit or collimating unit, Direction but also in the opposite direction of the beam direction.

In another preferred variant, the collimation state of the laser beam is adjustable in a different manner. Accordingly, the collimation unit may comprise at least one deformable lens, for example, to allow the collimation state of the laser beam to change and thus to change the distance between the optical unit and the focal point of the laser beam .

In the three aforementioned variants, a change in the collimation type means that the shape of the laser beam behind the collimating unit is changed by the collimating unit. Thereby, the laser beam between the collimating unit and the optical unit is perfectly collimated, for example, so that the light beams of the laser beam extend exactly parallel to each other. However, the laser beam between the collimating unit and the optical unit may also not be perfectly collimated, so that the light beams of the laser beam may extend slightly to converge or slightly diffract from each other. In the case of a collimation change of the laser beam, this parallel profile, convergent profile or divergence profile of the light beam of the laser beam between the collimating unit and the optical unit is changed. By such a change, the distance between the optical unit and the focal point of the laser beam is changed, and precise adjustment may be possible even in the case of the optical unit in the non-movable stop state. Here, the non-movable still optical unit may be used. Such an optical unit may be configured in a more compact manner than an optical unit having movable components for re-adjusting the distance between the optical unit and the focal point of the laser beam. Thus, this non-movable stationary optical unit may be disposed closer to the port of the nozzle opening. Thus, the laser beam may be focused at one point smaller in diameter when measured in the lateral direction of the beam direction. Thus, the collimation of the laser beam has the advantage that the laser beam can be coupled to a liquid jet having a smaller cross-section. Further, the smaller the cross section of the liquid jet, the finer the machining of the object to be machined is possible.

As a variant, however, it may not be possible to change the collimation state of the laser beam by the collimating unit.

If the collimation of the laser beam by the collimating unit can be modified so that the distance between the optical unit and the focal point of the laser beam can be modified, the laser beam may be coupled to the liquid jet to focus on the port of the nozzle opening , It is preferable that the focal point of the laser beam be disposed in the port of the nozzle opening. The focus of the laser beam is also released from the port of the nozzle opening so that the laser beam of the laser beam is reflected from the port peripheral nozzle portion of the nozzle opening to the image sensor so that the port of the nozzle opening In order to allow the scene to be captured by the image sensor, it is desirable that the focus of the laser beam be more distant from the optical unit than the port of the nozzle opening. This has the advantage that the laser beam may be coupled to the liquid jet in a simple manner and that the focus may also be released in a simple manner so that the recorded image of the port peripheral nozzle portion of the nozzle opening can be imaged by the image sensor.

As a variant, however, it may be impossible for the focus of the laser beam to be placed at the port of the nozzle opening by changing the collimation of the laser beam, and it may also be possible that the focus is located further from the optical unit than the port of the nozzle opening . Thus, for example, by changing the collimation state of the laser beam, the focal point of the laser beam may be positionable at the port of the nozzle opening, and may be closer to the optical unit than the port of the nozzle opening. Further, in order to make the focal point of the laser beam located at the port of the nozzle opening and located farther from the optical unit than the port of the nozzle opening or closer to the optical unit than the port of the nozzle opening, Individual optical components may be movable.

A method for focusing a laser beam on a nozzle opening of a nozzle of a liquid jet laser machine tool is advantageously characterized in that the nozzle opening is marked using a mark in the scene being imaged by the image sensor, And a second step of delivering to the other scene to set the position of the nozzle opening in another scene to be photographed. Here, the mark may be a mask that can be transferred virtually or physically to another scene. However, the landmarks may be defined by the position coordinates of the nozzle openings of the scene shot by the image sensor, whereby the position of the nozzle openings can be set in other scenes taken by the image sensor. If the image sensor is a CCD camera, then the indicia may be the pixel information of the camera about the part where the nozzle opening is located in the scene. Regardless of the particular form of marking, this has the advantage that the position of the nozzle opening can be confirmed using markers in scenes where the nozzle opening is not identifiable. Thus, the position of the nozzle opening can be set in the scene photographed by the image sensor at the time when the focus of the laser beam is released from the port of the nozzle opening. Here, when this scene is photographed, when the laser beam is focused on one point of the port peripheral nozzle portion of the nozzle opening, and when the focal point of the laser beam is positioned with respect to the port of the nozzle opening The position may be set.

As a variant, however, the method may not include a second step of this type.

When the method includes a second step in which a nozzle opening is displayed in a scene photographed by the image sensor using an indicator capable of being transferred to such another scene to set the position of the nozzle opening in another scene photographed by the image sensor, Advantageously, the indicia is modified by a straight line intersecting in two vertical directions, and the intersection of these straight lines is located at the center of the nozzle opening. This has the advantage that, when a mark is transferred to another scene, the position at which the focus of the laser beam was placed relative to the port of the nozzle opening may be set more immediately when another scene is taken.

In a preferred variant, the marking is modified by one or more other lines which simplify positioning of the focus of the laser beam relative to the port of the nozzle opening in the other scene.

As a variant, however, the markings may not be modified by additional lines.

The method preferably includes an additional step wherein the laser beam is focused at one position of the port peripheral nozzle portion of the nozzle opening and the additional scene of the port peripheral nozzle portion of the nozzle opening is photographed by the image sensor. Here, it is advantageous that the output of the laser beam is reduced by the laser beam so as not to damage the nozzle peripheral portion of the nozzle opening. Conversely, if the material of the port perimeter nozzle of the nozzle opening is not damaged by the laser beam focused at the maximum power, the laser beam may also be focused at the maximum power at one position of the port perimeter nozzle portion. Regardless of the output of the laser beam, this step has the advantage of being able to see how well the laser beam is focused on the nozzle-port portion of the nozzle opening by taking one or more additional shots by the image sensor. By selectively repeating this step, it is possible to set the focus to the same plane as the plane of the nozzle peripheral portion of the nozzle opening. This step also has the advantage of being able to set the manner in which the focus of the laser beam is placed relative to the port of the nozzle opening. Also, if the manner in which the focal point may be moved in a certain distance and in a specific direction across the nozzle perimeter portion of the nozzle opening is known, then the focus of the laser beam of the port is adjusted by the nozzle for coupling the laser beam to the liquid jet Or may be disposed in the port of the opening.

As a variant, however, the method may also not include this type of step.

The nozzle opening is displayed in the scene photographed by the image sensor using markers that can be transferred to these other scenes to set the position of the nozzle opening in another scene taken by the image sensor, A second step in which the intersection of these straight lines is located at the center of the nozzle opening when modified by an intersecting straight line, and wherein the method further comprises the step of focusing the laser beam at one position of the nozzle- If the additional scene of the port circumferential nozzle portion of the aperture comprises an additional step taken by the image sensor, the method advantageously comprises the following three additional steps: First, the focal point of the laser beam is arranged in the first line of the line intersecting in the vertical direction, and the first positioning parameter used for this is stored. Thereafter, the focus of the laser beam is arranged in the second line of the line intersecting in the vertical direction, and the second positioning parameter used for this is stored. Then, based on the stored first and second positioning parameters, the focus of the laser beam is placed in the port of the nozzle opening. For these three steps, the positioning of the focus of each case may be confirmed by taking one or more additional scenes by the image sensor. The advantage of these three steps is that the focus of the laser beam may be optimally positioned in a simple manner at the port of the nozzle opening to couple the laser beam to the liquid jet.

As a variant, however, the method may also not include these three steps.

When a laser machining apparatus including a first mirror for changing the traveling direction of the laser beam and a second mirror for changing the traveling direction of the laser beam is used, the first mirror driven by the first motor is the first mirror A second mirror that is pivotable only about an axis and is driven by a second drive motor is pivotable about a second axis only and a first one of the lines intersecting in a vertical direction has a first mirror, By turning to the center, the focal point of the laser beam corresponds to the movable path of movement, while the other line of the line intersecting in the vertical direction rotates the second mirror about the second axis so that the focal point of the laser beam is moved Respectively. In this case, the first and second positioning parameters are preferably a turning angle or orientation of the first and second mirrors about the first and second axes.

As a variant, however, intersecting lines may also not correspond to these motion paths.

Further advantageous embodiments of the invention and combinations of features are inferred from the following description and the entire claims.

The present invention is effective in providing a machining head capable of three-dimensional machining of an object.

BRIEF DESCRIPTION OF THE DRAWINGS Fig.
Figure 1 schematically shows the penetrating section of a machining head according to the invention taken along the center axis of the machining head;
2 is a schematic exploded view of the penetrating section of the machining head;
Figure 3 schematically shows the cross section of the nozzle block;
Fig. 4 schematically shows the penetrating section of a liquid jet laser machine tool according to the invention with a machining head; Fig.
5a to 5f show a method according to the present invention for focusing a laser beam on a nozzle opening of a nozzle of a liquid jet laser machine tool to couple the laser beam to a liquid jet generated by the nozzle opening by a CCD camera A photographed scene is schematically shown.
In principle, throughout the drawings, like elements are designated by the same reference numerals.

1 schematically shows a penetrating section of a machining head 1 according to the present invention taken along the center axis of the machining head 1. As shown in Fig. In Fig. 1, the central axis extends from the upper side to the lower side of the illustrated plane.

The machining head 1 is associated with a liquid jet laser machine tool (not shown in detail). The liquid jet laser machine tool may include a laser capable of generating a laser beam or may include a port through which a laser beam generated by a separate laser may pass and be guided into the liquid jet laser machine tool You may. In any case, the laser beam 100 can be guided into the liquid jet laser machine tool and coupled to the liquid jet 200 there.

The laser beam 100 is shown in broken lines in the sectional view of FIG. The laser beam 100 travels from the top to the bottom inside the machining head 1 along the central axis of the machining head 1 and is coupled to the liquid jet 200 in the machining head 1, The jet is ejected from the machining head 1 along the central axis of the machining head 1 at the tip of the machining head 1. [ Therefore, the beam direction in the plane shown in Fig. 1 also extends from the upper side to the lower side.

The machining head (1) includes an optical unit (2) and a coupling unit (3). In the figure, the front end of the optical unit 2 is shown as being located below the remaining portion of the optical unit 2. [ The front end has a cylindrical sheath, and the rotational symmetry axis of this cylindrical sheath extends along the central axis of the machining head 1 or along the central axis of the optical unit 2. A lens 20 comprising four lens components 21.1, 21.2, 21.3, 21.4 is located inside the front end of the optical unit 2. The last lens element 21.4 seen in the beam direction forms the end of the front end of the optical unit 2. Thus, the last lens component 21.4 viewed in the beam direction is the last optical component of the optical unit 2 viewed in the beam direction.

The cylindrical sheath at the front end of the optical unit 2 is formed substantially by the front region of the lance 22, which laser beam 100 emerges from the remainder of the liquid jet laser machine tool, 1). The lens 20 is disposed at the front end of the lance 22 and serves to focus the laser beam 100 in front of the optical unit 2. The diameter of the focal point ranges from 25 탆 to 40 탆.

The coupling unit 3 includes a body 36, a transparent component 30, a replaceable nozzle block 33, and a replaceable head end unit 35. With the machining head 1 sandwiched therebetween, the coupling unit 3 is connected to the optical unit 2, as shown in Fig. Here, the body 36 of the coupling unit 3 surrounds the front end of the optical unit 2 including the lens 20 and is formed to extend to the rear of the lens 20 in the direction opposite to the beam direction have. To this end, the body 36 is open at one side and has a cavity with a circular cross-section. A transparent component 30 for allowing the laser beam 100 from the optical unit 2 to enter the coupling unit 3 in the beam direction through the last lens component 21.4 of the lens 20 Lt; / RTI > The lateral direction of the cavity is closed by a tubular wall 31 having a circular cross section. In fact, the outer surface of the wall 31 facing the opposite side of the cavity likewise has a circular cross-section. Contrary to the inner surface, the diameter of the outer surface is not uniform throughout. The diameter of the outer cross section is constant only in one region of the end of the wall 31 facing the optical unit 2 in a state where the machining head 1 is fitted. Thus, the outer surface of the end of the wall 31 in this region has a cylindrical sheath. At the end of the wall 31 facing the optical unit 2, the diameter of the outer cross section of the wall 31 following this cylindrical region initially increases and then gradually decreases to form a pointed tip.

The optical unit 2 has an annular groove surrounding the front end at the proximal end of the front end. Here, the outer circumference of the groove forms a ferrule 23. When the coupling unit 3 is connected to the optical unit 2, one open side of the cavity of the body 36 of the coupling unit 3 is aligned in the opposite direction of the beam direction, and the front end of the optical unit 2 The main body 36 is press fitted onto the front end of the optical unit 2 so as to be located in the cavity of the main body 36. [ An end region of the wall 31 of the main body 36 facing the optical unit 2 in the state where the machining head 1 is fitted is disposed in the groove and is surrounded by the lid 23.

The outer surface of the lid 23 of the optical unit 2 is formed in a conically tapered shape as viewed in the beam direction. This outer surface of the front end of the lid 23 leads to a conically tapered area of the outer surface of the wall 31 of the body 36. Thus, the lid 23 and the body 36 together form a cone of a shape gradually tapering in the beam direction. The opening angle of the cone measured between the rotational symmetry center axis of the cone thus formed and the outer region of the cone is 23 °. However, the cone opening angle may be larger or smaller. Accordingly, the cone opening angle may be, for example, 20 degrees or less. However, depending on the embodiment, the cone opening angle may also be, for example, 30, 45 or 60 or greater than 60.

As described above, the transparent component 30, which is transparent to laser light of the laser beam 100, is disposed at the base of the cavity of the body 36, one side of which is open. The transparent component 30 is disc-shaped and the two main areas are aligned in the vertical direction with respect to the center axis of the machining head 1 or the center axis of the coupling unit 3. One of the main areas of the transparent component 30 forms the majority of the base of the cavity of the body 36, one side of which is open. Conversely, the other main area of the transparent component 30 closes the liquid chamber 32, which is disposed in the body 36, against the cavity. The liquid chamber 32 is also in the form of a disk, and the two main regions are aligned in the vertical direction with respect to the central axis of the coupling unit 3. The replaceable nozzle block 33 closes the opposite side of the transparent component 30 of the liquid chamber 32. This replaceable nozzle block 33 forms a nozzle for generating the liquid jet 200. The nozzle block 33 is cylindrical in its basic shape and has a flat main area at two ends located on the rotational symmetry axis. In one of these two ends, a ring having a diameter measured in a direction perpendicular to the rotational symmetry axis is basically larger than the diameter of the remaining part of the cylindrical shape is arranged concentrically with the basic cylindrical shape. Thus, when the nozzle block 33 is inserted into the body 36 of the coupling unit 3, the ring forms the detent 34, so that the nozzle block 33 is correctly positioned inside the body 36 . Due to the detent 34, the nozzle block 33 is formed into a substantially hat shape.

On the main area of the nozzle block 33 opposite the pawl 34 is provided a nozzle opening 37 having a diameter of 70 mu m and extending along the rotational symmetry axis of the nozzle block 33. [ This main area of the nozzle block 33 faces the liquid chamber 32 while the machining head 1 is sandwiched therebetween and the rotational symmetry axis of the nozzle block 33 coincides with the center axis of the machining head 1 Or along the central axis of the coupling unit 3. Thus, with the machining head 1 fitted, the nozzle opening 37 extends along the center axis of the machining head 1. Here, however, the nozzle opening 37 is not formed through the entire nozzle block 33 but is conically opened when viewed in the direction of the beam and is provided with the detent 34 passing through the nozzle block 33 Leading to an opening 38 extending to the main area of the nozzle block 33. The nozzle block 33 thus allows the liquid jet 200 to be generated through the nozzle opening 37 by the liquid from the liquid chamber 32, And is discharged from the nozzle block 33 in the beam direction through the opening 38 that is conically opened. In this case, the liquid used here is water. However, other liquids other than water may also be used.

The laser beam 100 is focused on the front of the optical unit 2 by the lens 20 of the optical unit 2 during the operation of the machining head 1, as described above. Here, the focal point is adapted to be positioned at the start region of the nozzle opening 37. The laser beam 100 is focused on the liquid jet 200 generated by the nozzle opening 37 and the laser beam 100 is coupled to the liquid jet 200, And remains coupled to the liquid jet by total reflection at the surface of the jet 200.

The optical unit 2 has a liquid duct 51 connected to a liquid source (not shown) so that the liquid is supplied to the liquid chamber 40 and hence also to the liquid jet 200. The liquid duct 51 extends to the inner surface of the lid 23 of the optical unit 2 and is terminated at the opening. The opening of the liquid duct 51 of the optical unit 2 is located in the opening provided at the end of the coupling unit 3 facing the optical unit 2 with the machining head 1 sandwiched therebetween. The opening of the coupling unit 3 forms a port for the additional liquid duct 42 extending through the body 36 of the coupling unit 3 to the liquid chamber 32. Two openings of the optical unit 2 and the coupling unit 3 located above and below each other form a liquid interface 50 in which the liquid from the optical unit 2 to the liquid chamber 32 May be supplied. Thus, liquid may also be supplied to the liquid jet 200 by the liquid interface 50.

The liquid which is moved to the opening of the coupling unit 3 is distributed through the opening of the optical unit 2 in the liquid interface 50. Here, the opening of the optical unit 2 is disposed on the inner surface of the cover 23 having the same shape as the inner surface of the cylindrical outer covering area. The rotational symmetry axis of the cylindrical outer region coincides with the central axis of the optical unit 2 and thus coincides with the central axis of the machining head 1. [ Therefore, in the state where the machining head 1 is fitted, the cylindrical sheath area is aligned in the direction parallel to the beam direction. Conversely, the opening of the coupling unit 3 is disposed on the outer surface of the end of the coupling unit 3 facing the optical unit 2. This outer surface has the same shape as the outer surface of the cylindrical outer covering region, and the rotational symmetrical axis of the outer surface corresponds to the central axis of the combining unit 3. Therefore, when the machining head 1 is fitted, the cylindrical contour region is also aligned in a direction parallel to the beam direction.

The liquid interface region of the liquid interface 50 is defined by the opening of the optical unit 2 associated with the liquid interface 50 and the portion of the cylindrical enclosure region located around the opening of the coupling unit 3 associated with the liquid interface 50 do. Here, the liquid interface area originating from the portion of the cylindrical shell region located around these openings continues to extend forwardly across the opening portion. Thus, the liquid interface region is also located in a cylindrical outer region having a rotational symmetry axis corresponding to the central axis of the coupling unit 3. [ However, here, since the liquid interface 50 is limited to this part, the liquid interface area is also limited to the opening part. Nevertheless, the liquid interface regions are aligned in a direction parallel to the beam direction.

The laser beam 100 is incident on the optical unit 2 because the liquid interface 50 is located at the same height as the lid 23 of the optical unit 2 when viewed in the beam direction with the machining head 1 sandwiched therebetween. Passes through the liquid interface 50 before passing through the lens 20 of the lens 20. Thus, as seen in the beam direction, the liquid interface 50 is positioned in front of the lens component 21.4 located at the end of the lens 20 in the beam direction.

The head end unit 35 of the coupling unit 3 has a substantially conical shape. In the head end unit 35, an opening 39 having a conical shape is formed continuously through the head front end unit 35 along the longitudinal axis of the head front end unit. When the machining head 1 is assembled, the head end unit 35 is fitted to the main body 36 of the coupling unit 3. Here, the front end of the cone in which the longitudinal axis of the head front end unit 35 extends along the central axis of the machining head 1 and the conical outer shape of the head front end unit is formed by the lid 23 and the main body 36 . The inner conical opening 39 is arranged so as to be gradually tapered toward the tip of the outer shape.

The end of the head end unit 35 facing the main body 36 of the coupling unit 3 is inserted into the nozzle block 33 at the proper position inside the main body 36 of the coupling unit 3 in a state in which the machining head 1 is fitted. 33). One side of the opening 39 facing the nozzle block 33 is located in the head front end unit 35 and abuts directly against the opening 38 of the nozzle block 33 which is open conically. The opening 38 of the nozzle block 33 and the opening 39 of the head front end unit 35 form the cavity of the machining head 1 and the joint 38 taken along the center axis of the machining head 1 The cross section is substantially rhombic. This cavity forms a gas backpressure chamber (40). During operation of the machining head 1 the liquid jet 200 generated by the nozzle opening 37 is moved through the gas backpressure chamber 40 such that the gradual opening 39 of the head- And is discharged from the machining head 1 through the side surface of the tapered shape. Here, however, the liquid jet 200 does not come into contact with the circumferential side surface of the gradually tapered shape of the opening 39, but forms a small clearance over the entire circumference. Gas from the gas backpressure chamber 40 may be released through this gap to form a gas jet that surrounds the liquid jet 200. Therefore, one side of the gradually tapered shape of the conical opening 39 of the head end unit 35 forms the gas discharge nozzle 62. [ The gas jets generated by the gas ejection nozzles 62 and surrounding the liquid jets 200 stabilize the liquid jets such that the liquid jets are stable over relatively long distances from the head leading unit 35 and become unstable only thereafter To be decomposed into liquid droplets. Thus, the laser beam 100 can remain coupled to the liquid jet 200 over a longer distance.

In order to supply gas to the gas back pressure chamber 40, the optical unit 2 is provided with a gas duct 61 connected to a gas supply source (not shown). The gas duct 61 extends to the inner side surface of the lid 23 of the optical unit 2 and is terminated at the opening. The opening of the gas duct 61 inside the optical unit 2 is located on the opening provided at the end of the coupling unit 3 facing the optical unit 2 with the machining head 1 sandwiched therebetween. The opening of the coupling unit 3 is connected to the port 36 for the additional gas duct 41 extending through the main body 36 of the coupling unit 3 and the head front end unit 35 to the opening 39 of the head front end unit 35 . Two openings of the optical unit 2 and the coupling unit 3 positioned one above the other form a gas interface 60 to which the gas from the optical unit 2 to the gas backpressure chamber 40 May be supplied. Thus, the gas may also be supplied to the gas jet by the gas interface 60.

The gas interface area of the gas interface 60 is defined by the opening of the optical unit 2 associated with the gas interface 60 and the portion of the cylindrical exterior area located around the opening of the coupling unit 3 associated with the gas interface 60 . Here, the gas interface area originating from the portion of the cylindrical shell region located around these openings continues to extend forward across this opening portion. Thus, the gas interface region is also located on a cylindrical sheathing region having a rotational symmetry axis corresponding to the central axis of the combining unit 3. Here, however, since the gas interface 60 is limited to the opening portion, the gas interface region is also limited to this portion. Nevertheless, the gas interface area is aligned in a direction parallel to the beam direction.

The laser beam 100 is incident on the optical unit 2 because the gas interface 60 is located at the same height as the cover 23 of the optical unit 2 when viewed in the beam direction with the machining head 1 sandwiched therebetween. Passes through the gas interface 60 before passing through the lens 20 of the lens 20. Thus, as seen in the beam direction, the gas interface 60, like the liquid interface 50, is located in front of the lens component 21.4 located at the end of the lens 20 when viewed in the beam direction.

This arrangement of the gas interface 60 and the liquid interface 50 allows the machining head 1 to be configured so that the optical unit 2 and the coupling unit 3 have a sharp profile as viewed in the beam direction . Thereby, the machining head 1 may be positioned at an oblique position with respect to the object to be machined, and nevertheless the object is positioned in the stable area of the liquid jet 200 without risk of collision between the machining head 1 and the object You may. Thus, with this arrangement, the three-dimensional machining of the object is facilitated. Further, the lens 20 is disposed behind the liquid interface as viewed in the beam direction and the gas interface 60 is disposed at the front end of the optical unit 2, The beam 100 may be focused. Thus, the focal length of the lens may be shortened, and nevertheless, the laser beam may be focused on the port area of the nozzle opening 37. Accordingly, the laser beam 100 may be focused at a small diameter. Thus, according to this configuration of the machining head 1, the laser beam 100 may be coupled to the liquid jet 200 having a small diameter.

Even if the gas interface 60 as well as the liquid interface 50 are all located in front of the last lens component 21.4 of the lens 20 when viewed in the beam direction, Rather than being disposed at the same height as the interface 50, but somewhat behind the liquid interface 50 when viewed in the beam direction. Thus, the gas interface 60 and the liquid interface 50 may be separated from each other by a seal. To this end, three annular seals (not shown in Fig. 1), which draw a concentric circle in the cylindrical outer region of the end of the coupling unit 3 facing the optical unit 2 with the machining head 1 sandwiched therebetween . The first of these annular seals is located in front of the liquid interface 50 as viewed in the beam direction and the second of these annular seals is located between the liquid interface 50 and the gas interface 60, The third seal is located behind the gas interface 60 when viewed in the beam direction. The liquid interface 50 and the gas interface 60 are configured such that liquid can not move from the liquid interface 50 to the gas interface 60 and also gas can not travel from the gas interface 60 to the liquid interface 50. [ , And are separated from each other. The liquid interface 50 and the gas interface 60 are sealed to the outside so that escape of both liquid and gas between the optical unit 2 and the coupling unit 3 may not be possible.

Similar to Fig. 1, Fig. 2 schematically shows the penetrating cross section of the machining head 1 taken along the center axis of the machining head 1. [ Contrary to Figure 1, however, Figure 2 is shown as an exploded view. It can thus be seen that the optical unit 2 comprising the lid 23 and the lens 20 at the front end is a separate component of the machining head 1. [ It will also be appreciated that the body 36 of the coupling unit 3, the transparent component 30, the nozzle block 33, and the head end unit 35 are also separate components.

3 is a schematic cross-sectional view of the nozzle block 33. As shown in Fig. The detailed configuration of the nozzle block 33 can be seen with reference to FIG. 3, which is enlarged in comparison with FIGS. 1 and 2. Therefore, it can be seen that the nozzle opening 37 is located in the insertion portion 70 which is recessed in the individual main areas of the nozzle block 33. The insertion portion 70 is cylindrical. The nozzle opening 37 extends along the rotational symmetry axis of the insert portion 70 to the opening 71 of the cone-shaped insert portion 70 and is inserted into one of the two main regions of the insert portion 70 Respectively. When the insert 70 is recessed in the remaining part of the nozzle block 33 the conical opening 71 of the insert 70 leads to the conical opening 38 of the nozzle block 33 as shown .

The first invention is not limited to the exemplary embodiments shown in Figs. Various modifications of this exemplary embodiment are possible. Thus, the contour of the machining head may be other than a conical shape, for example. Further, the coupling unit as well as the optical unit may be formed in different shapes. Further, the liquid interface and the gas interface may be disposed at different positions, or may be formed in different shapes. Accordingly, the interface may be disposed at, for example, the outermost end of the coupling unit end facing the optical unit. The interface regions may also be arranged at an angle, for example, at an angle with respect to the beam direction, or may be located in a plane perpendicular to the beam direction.

Also, the profiles of the liquid ducts and the gas ducts inside the optical unit and in the coupling unit may be formed in different ways. Thus, for example, the gas duct may be formed to extend through the nozzle block rather than being formed to extend from the body of the coupling unit through the head-end unit, or may extend from the body of the coupling unit directly into the gas backpressure chamber . Further, the coupling unit may not have a replaceable head-end unit.

Regardless of these variations, the machining head may also be embodied in a form that does not include a gas backpressure chamber. In this case, the gas duct may be connected directly to, for example, a gas discharge nozzle. However, the machining head may also be unable to generate a gas jet that entirely surrounds the liquid jet. In this case, none of the gas duct, the gas interface, the gas backpressure chamber, or the gas discharge nozzle is required.

Also, the nozzle block may be constructed in a different manner. For example, the nozzle block may be formed in a different shape. The nozzle block may also be integrally formed, and thus may be formed in a shape without an insertion portion. Further, the diameter of the nozzle opening may be a value other than 70 mu m. Accordingly, the diameter of the nozzle opening may be in the range of, for example, 20 탆 to 150 탆. However, the diameter may also be 20 占 퐉 or less or 150 占 퐉 or more. Similarly, the diameter of the focal point of the laser beam 100 may deviate from the range of 25 占 퐉 to 40 占 퐉.

4 is a schematic cross-sectional view of a liquid jet laser machine tool 300 according to the second invention. A cross section extending along the beam path of the laser beam 100 is shown. Thus, the beam path of the laser beam 100 is provided substantially in the plane shown. Here, the liquid jet laser machine tool 300 is shown in a state in which the upper and lower sides of the drawing are aligned in a manner corresponding to the upper and lower sides of the liquid jet laser machine tool 300.

The liquid jet laser machine tool 300 includes a lance 301 surrounding the beam path of the laser beam 100. The lance 301 has three arms 302.1, 302.2, and 302.3 interconnected by a junction. The free end of the first arm 302.1 of the lance 301 is formed by the machining head 1 according to the first invention. In this case, the machining head 1 has been described in detail with reference to Figs. 1 to 3 above. 4, the machining head 1 is shown only in a very simplified manner, and the proportions of the sizes between the illustrated components are precisely matched. The free end of the second arm 302.2 of the lance 301 forms the end of the beam path of the laser beam 100. A CCD camera 303, which is sensitive to light having the wavelength of the laser beam 100, is disposed as an image sensor on the inner surface of the end portion. The lance 301 The free end of the third arm 302.2 is in fact a connection, but has a port 304. The laser beam 100 of the liquid jet laser machine tool 300 generated by a separate laser from the liquid jet laser machine tool 300 is directed by a glass fiber (not shown) or into a hollow conductor (not shown) Through the port 304. As shown in Fig. However, according to a modification of this embodiment, the liquid jet laser machine tool 300 may also include a dedicated laser for generating the laser beam 100, instead of the port 304.

The free end of the third arm 302.3 faces upward so that the port 304 is opened upward. Thus, the laser beam 100 flows from the upper side to the lower side through the port 304 of the liquid jet laser machine tool 300. Therefore, the beam direction of the laser beam 100 inside the free end of the third arm 302.3 is also directed from the upper side to the lower side. Here, the laser beam 100 is moved through the collimating unit 305 which collimates the laser beam 100. [ In order to enable the collimation of the laser beam 100, the collimator unit 305 may be moved in the beam direction or in the opposite direction of the beam direction. Therefore, the collimation of the laser beam 100 after the collimating unit 305 may be perfect due to the proper positioning of the collimating unit 305, so that the light beam of the laser beam 100 after the collimating unit 305, For example, they proceed exactly parallel to each other. However, the collimating unit 305 is also configured to allow the laser beam 100 to be collimated slightly or to be slightly diverged, rather than perfect collimation of the laser beam 100 after the collimating unit 305 But may be disposed in other manners. The parallel, converging or diverging state of the light beam of the laser beam 100 after the collimating unit 305 is thus set in a manner that appropriately positions the collimating unit 305 within the lance 301, .

The third arm 302.3 of the lance 301 is bent at a right angle after the collimator unit 305 as viewed in the beam direction and the lance 301 then extends in the horizontal direction. The laser beam 100 after the first mirror 306 travels along the horizontal region of the lance 301 by placing the first mirror 306 at a right angle bent portion to reflect the laser beam 100. [ A first mirror 306 driven by a motor (not shown) is pivotable about a first axis 307. The first axis 307 is aligned in the horizontal direction and extends in the vertical direction out of the plane shown. Thus, the first axis 307 is aligned in a direction perpendicular to the beam direction of the laser beam 100 at the front and rear of the first mirror 306. [ Therefore, by setting the orientation of the first mirror 306 about the first axis 307, the beam direction of the laser beam 100 after the first mirror 306 is accurately inclined in the horizontal direction or slightly upward Or may be arranged to be inclined slightly downward.

A horizontally extending portion of the third arm 302.3 of the lance 301 extending from the bent portion of the third arm 302.3 extends to the junction of the lance 301. [ Starting from this junction, the first arm 302.1 of the lance 301 extends downward in the vertical direction and the second arm 302.2 of the lance 301 extends upward in the vertical direction. The second mirror 308 is disposed at the junction so as to reflect the laser beam 100 so that the laser beam 100 after the second mirror 308 of the first arm 302.1 of the lance 301 advances downward . The second mirror 308 driven by a motor (not shown) is pivotable about the second axis 309. The second axis 309 is located in the plane shown and thus is aligned vertically with the first axis 307. The second axis 309 is approximately at an angle of 45 DEG from the lower side to the upper side in an inclined direction with respect to the free end direction of the third arm 302.3 of the lance 301. [ By setting the orientation of the second mirror 308 about the second axis 309, the beam direction of the laser beam 100 after the second mirror 308 may be aligned. Accordingly, if necessary, the beam direction of the laser beam 100 after the second mirror 308 can be maintained in a precisely illustrated plane, or slightly inclined toward the observer or in the opposite direction of the observer beyond the illustrated plane .

In the machining head 1, the focal point of the laser beam 100 by the optical unit 2 is aligned with the free end of the first arm 302.1 of the lance 301, which extends vertically downward in the machine tool Loses. Therefore, by setting the orientation of the second mirror 308 about the second axis 309, the position of the focal point of the laser beam 100 may be set perpendicular to the plane shown. By setting the orientation of the first mirror 306 about the first axis 307, the position of the focal point is perpendicular to the alignment direction of the first arm 302.1 of the lance 301 and parallel to the plane shown As shown in Fig. The positioning of the laser beam 100 of the machining head 1 can be achieved by the two mirrors 306 and 308 in a plane perpendicular to the direction in which the first arm 302.1 is aligned .

The distance between the optical unit 2 and the focal point of the laser beam 100 depends on the collimation of the laser beam 100 immediately before the optical unit 2 since the optical unit does not include the movable component. Positioning of the collimating unit 305 in the third arm 302.3 not only enables collimation of the laser beam 100 after the collimating unit 305 but also allows the optical unit 2 and the laser beam 100) of the focal point.

When the focal point of the laser beam 100 is located in front of or behind the wall of the replaceable nozzle block 33 or the wall of the nozzle facing the optical unit 2 as viewed in the beam direction, 100 is released from the port of the nozzle opening 37 so that the laser beam of the laser beam 100 is reflected from the nozzle portion around the port of the nozzle opening 37. The reflected light is returned to the first arm 302.2 of the lance 301 by the optical unit 2 and reaches the second mirror 308 which at least partially transmits the reflected light. At least a portion of the reflected light is directed to the second arm 302.2 of the lance 301 to reach the CCD camera 303 at the free end of the lance 301. [ To this end, the second mirror 308 may be translucent, for example. However, the second mirror 308 may also reflect, for example, light in one polarization direction and light in another polarization direction. In this case, the laser light of the laser beam 100 may enter the polarized state through, for example, the port 304 of the liquid jet laser machine tool 300, (302.1). Here, when the polarization of the laser beam is appropriately selected, the laser beam 100 is reflected from the second mirror 308 to the machining head 1. [ Further, when a lambda quarter plate (not shown) is installed in the first arm 302.1 of the lance 301, the light of the laser beam 100 reflected from the second mirror 308 is incident on the lance 301 and then returns from the nozzle portion around the port of the nozzle opening 37 to the second mirror 308 to pass through the lambda quarter plate again. Thus, the reflected light is re-polarized in the first arm 302.1. Accordingly, the reflected light can be transmitted through the second mirror 308 to reach the CCD camera 303. Therefore, when the focus of the laser is released from the port of the nozzle opening 37, the scene is photographed by the CCD camera 303, and in this shooting scene, the port of the nozzle opening 37 can be seen as a dark spots. In order to clearly show the port contour of the nozzle opening 37 in this shooting scene, the CCD camera 303 may also have a suitable lens that may be movable.

Conversely, when viewed in the beam direction, the focal point of the laser beam 100 is arranged in a plane defined by the wall of the replaceable nozzle block 33 facing the optical unit 2 or the wall of the nozzle, When disposed in the port of the nozzle opening 37, the laser beam 100 is coupled to the liquid jet 200 generated by the nozzle. The liquid jet 200 according to the present embodiment is a water jet. However, liquid other than water may also be used to generate the liquid jet 200.

Hereinafter, a method according to the present invention in which the focus of the laser beam 100 may be arranged in this manner will be described.

5A to 5F show a method of focusing a laser beam 100 on a nozzle opening 37 of a nozzle of a liquid jet laser machine tool 300 to form a laser beam 200 on the liquid jet 200 generated by the nozzle opening 37 100 in accordance with the second aspect of the present invention.

In a first step of this method, the collimator unit 305 is disposed in the third arm 302.3 of the lance 301 so that the focal point of the laser beam 100 is located behind the nozzle as viewed in the beam direction, Is released from the port of the nozzle opening (37). The recorded image of the nozzle portion around the port of the nozzle opening 37 is photographed by the CCD camera 303 while the focussed laser beam 100 illuminates the nozzle. 5A schematically shows such a recorded image in which the port of the nozzle opening 37 is not illuminated and can be seen as a dark spots 337. FIG.

In the second step, the contour of the spot 337 in the scene is indicated using the marker 338. [ As shown in FIG. 5B, the markers 338 are modified using two straight lines 339.1, 339.2 intersecting each other at a center of the spot 337 at right angles. Here, the markers are stored in the intermediate memory so that they may be transmitted to other shooting scenes of the CCD camera 303.

In the third step, the laser beam 100 at the reduced output of the laser is focused on one position of the port peripheral nozzle portion of the nozzle opening 37, and the collimating unit of the third arm 302.3 of the lance 301 (305) are arranged accordingly. Here, by using the recorded image of the CCD camera 303 until the focal point 340 of the laser beam 100 in the photographing scene has the minimum size, the focusing operation of the laser beam 100 in each case is performed stepwise Is confirmed. This type of scene, which includes a laser beam 100 with an optimal focus, is schematically shown in FIG. 5c, in which the mark 338 set in the first two steps of the method is transmitted. For illustrative purposes, here, the focus 340 of bright light is shown as a dark spot.

In the fourth and subsequent steps, the focal point 340 of the laser beam 100 is disposed in the first line 339.1 of the two mutually intersecting lines of the marking 338. Since the movement of the focus 340 along the second line 339.3 of the two intersecting lines is performed by the pivotal movement of the second mirror 308 about the second axis 309, 2 mirror 308 may be sufficient. In this fourth step, in each case, the scene photographed by the CCD camera 303 is recorded and the indicia 338 is transmitted to this scene, so that the focal point 304 of the laser beam 100 is actually the Lt; RTI ID = 0.0 > 339.1. ≪ / RTI > Then, the orientation of the second mirror 308 about the second axis 309 is stored as the first positioning parameter.

In the fifth step, the focal point 340 of the laser beam 100 is placed on the second line 339.2 of the two mutually intersecting lines of the landmark 338. Because the movement of the focus 340 along the first line 339.1 of the two intersecting lines is made by the pivotal movement of the first mirror 306 about the first axis 307, 1 mirror 306 may be sufficient. In order to be able to confirm whether the focus 340 is accurately positioned on the second line 339.2 by recording the scene photographed by the CCD camera 303 and conveying the mark 338 to these scenes, Such that the focal point 340 of the laser beam 100 always travels along the side of the port of the nozzle opening 37 when the first mirror 306 is moved about the first mirror 306, The second mirror 308 is slightly pivotally moved about the second axis 309. As soon as the focus 340 is placed on the second line 339.2 of the indicia 338, the orientation of the first mirror 306 about the first axis 307, as shown in Figure 5e, And stored as position setting parameters.

In a sixth step of this method, the second mirror 308 is oriented about a second axis 309 in accordance with a first positioning parameter, and the first mirror 306 is oriented And is oriented about the first axis 307. The focal point 340 of the laser beam 100 is disposed at the port of the nozzle opening 37 and the laser beam 100 is coupled to the liquid jet 200 generated by the nozzle opening 37. [ In the case of positioning the focal point 340 of this type of laser beam 100, since the light of the laser beam 100 is not reflected from the port peripheral nozzle portion of the nozzle opening to the CCD camera 303, The focus 304 can not be seen. Thus, in FIG. 5F, the focal point 340 of the laser beam 100 is shown only in dashed lines at the center of the indicia 338.

To enable the above-described method to be performed, the liquid jet laser machine tool 300 may include a memory for storing first and second positioning parameters, and an intermediate memory for storing indicia. The liquid jet laser machine tool 300 also controls the positioning of the collimating unit 305 in the third arm 302.3 of the lance 301 and also controls the positioning of the collimating unit 305 about the first or second axis 307, And a control unit for controlling the orientation of the first and second mirrors 306 and 308. However, such memory, intermediate memory or control unit may be configured separately from the liquid jet laser machine tool 300. Accordingly, the memory, intermediate memory and control unit may be formed by a computer to which, for example, a liquid jet laser machine tool is connected.

The second invention is not limited to the liquid jet laser machine tool 300 and the method described in detail with reference to Figs. 5A to 5F. Accordingly, the liquid jet laser machine tool 300 may include, for example, another machining head. Also, the arms of the lance and the lance may be configured in different ways. For example, the lance may not be provided with an abutment to prevent the lance from having any arm extending from the abutment. In addition, the two mirrors may be arranged in different ways, aligned in different ways, or be pivotable about axes aligned in different ways.

In addition, the liquid jet laser machine may be equipped with a two-dimensional image sensor of a type other than a CCD camera. It may also be unnecessary for the entire collimating unit to be movable in the beam direction or in the opposite direction of the beam direction. Accordingly, the collimation unit may also also have only individual movable components, for example. Likewise, however, the liquid jet laser machine tool may not include this type of collimating unit and may only include only the optical unit. Depending on the embodiment, the optical unit may be assigned to the machining head, or may be formed to be embedded separately from the machining head.

Also, the method for focusing the laser beam at the nozzle opening of the nozzle of the liquid jet laser machine tool to couple the laser beam to the liquid jet generated by the nozzle opening is not limited to the method described in detail above. Accordingly, the method may include, for example, an additional step. In addition, modifications or omissions of each of the above-described steps may be made. For example, modification of a mark with two mutually intersecting lines may be omitted. This step may be removed without an alternate step, or it may be replaced with a step where another line is added to the indicia.

In summary, a machining head for a liquid jet laser machine tool is also provided which is also capable of three-dimensional machining of objects. A liquid jet laser machine tool is also achieved which simplifies the coupling of the laser beam to the liquid jet. In addition, a method for focusing a laser beam on a nozzle opening of a nozzle of this type of liquid jet laser machine tool is achieved, which simplifies the coupling of the laser beam to the liquid jet.

1: Machining head 2: Optical unit
3: coupling unit 20: optical component
32: liquid chamber 33: nozzle
37: nozzle opening 50: liquid interface
100: laser beam 200: liquid jet

Claims (22)

A machining head (1) for coupling a laser beam (100) to a liquid jet (200)
a) an optical unit (2) having at least one optical component (20, 21.1, ..., 21.4) for focusing the laser beam (100), and
b) a coupling unit (3) having a liquid chamber (32) defined by a wall, in which a nozzle (33) having a nozzle opening (37) for generating a liquid jet (200) ),
The laser beam 100 which can be focused by the optical unit 2 is transmitted to the coupling unit 3 in the beam direction with the coupling unit 3 connected to the optical unit 2, Can be sent to the nozzle opening 37 through the liquid chamber 32 of the nozzle 33 and can be coupled to the liquid jet 200 that can be generated by the nozzle 33 and move in the beam direction,
A liquid interface 50 is provided between the optical unit 2 and the coupling unit 3 so as to allow liquid to be supplied from the optical unit 2 to the liquid chamber 32, ),
With the coupling unit 3 connected to the optical unit 2 the liquid interface 50 as viewed in the beam direction is located at the optical component 20 of the optical unit 2, , 21.4). ≪ / RTI > 2. A method according to claim 1, characterized in that, with the coupling unit (3) connected to the optical unit (2), the liquid interface (50) (1), characterized in that it has an interface area. 3. The machining head (1) according to claim 2, wherein the liquid interface region extends parallel to the beam direction. 4. The optical unit according to any one of claims 1 to 3, wherein the coupling unit (3) is formed gradually tapering in one direction, the coupling unit (3) being connected to the optical unit Wherein said beam direction corresponds to said beam direction. The machining head (1) according to claim 4, characterized in that the gradually tapering shape is a conical outer shape. 6. The method of claim 5, wherein the cone opening angle of the gradually tapering shape of the conical external shape measured between the rotational symmetric center axis of the conical external shape and the outer region of the conical external shape is at most 60, at most 45, at most 30 °, in particular at most 20 [deg.]. 7. Machine according to any one of claims 1 to 6, characterized in that the coupling unit (3) comprises a gas discharge nozzle (62) for forming a gas jet surrounding the liquid jet (200) Head (1). The optical module according to claim 7, characterized in that the coupling unit (3) is arranged behind the nozzle opening (37) when viewed in the beam direction, with the coupling unit (3) And a gas back pressure chamber (40) which is connected to the gas back pressure chamber (40). The gas jet printer according to claim 7 or 8, wherein in order that the gas for jetting the gas is supplied to the coupling unit (3) while the coupling unit (3) is connected to the optical unit (2) (60) is formed between the optical unit (2) and the coupling unit (3), and the gas interface (60) comprises an optical component (2) located at the end of the beam direction when viewed in the beam direction Are arranged in front of the elements (20, 21.4). 10. A method as claimed in claim 9, characterized in that, with the coupling unit (3) connected to the optical unit (2), the gas interface (60) (1), characterized in that it has an interface area. 11. Machining head (1) according to claim 10, characterized in that the gas interface extends parallel to the beam direction, with the coupling unit (3) connected to the optical unit (2). 12. The optical unit (2) according to any one of claims 1 to 11, wherein the coupling unit (3) is an optical unit (2) with one side opened and the coupling unit (3) And a cavity projecting into the interior of the machining head (1). 13. Machine tool according to any one of the preceding claims, characterized in that the optical unit (2) forms a lid (23) and surrounds the coupling unit in the liquid interface (50) ). A liquid jet laser machine tool (300) comprising a machining head (1) for coupling a laser beam (100) to a liquid jet (200), said machining head (1) Wherein the laser beam 100 is focused on a port of the nozzle opening 37 by means of a focusing arrangement 2 305 so that the laser beam 100 is focused A liquid jet laser machine tool (300) that can be coupled to a liquid jet (200) and includes a two dimensional image sensor (303) for imaging of a portion of a peripheral perimeter of the nozzle opening (37)
The focus of the laser beam 100 is focused on the surface of the nozzle opening 37 so that the laser beam from the laser beam 100 is reflected from the port periphery nozzle 33 portion of the nozzle opening 37 toward the image sensor 303. [ Port of the nozzle opening 37 can be photographed by the image sensor 303 so that the port of the nozzle opening 37 of the nozzle opening 37 can be photographed by the image sensor 303, (300). ≪ / RTI > The apparatus of claim 14, further comprising a first mirror (306) for changing the traveling direction of the laser beam (100), and a second mirror (308) for changing the traveling direction of the laser beam , ≪ / RTI &
The first mirror 306 driven by the first motor is pivotable about the first axis 307 and the second mirror 308 driven by the second motor is rotated about the second axis 309 Centered,
The laser beam 100 is moved along the first straight line across the port periphery nozzle 33 of the nozzle opening 37 by the pivotal movement of the first mirror 306 about the first axis 307 While the second mirror 308 is pivotally moved about the second axis 309 so that the laser beam 100 traverses the second straight line across the port periphery nozzle 33 of the nozzle opening 37 The first axis 307 and the second axis 309 are aligned so as to be movable along the first axis 307,
Wherein the first and second straight lines are disposed at an angle to each other and thus cross each other. 16. The apparatus according to claim 14 or 15, wherein the focusing assembly (2, 305) comprises a collimator unit (305) for collimating the laser beam (100) to form a parallel or approximately parallel beam, Characterized in that it comprises an optical unit (2) for causing a substantially parallel beam to be focused on the focal point (340). The method according to claim 16, characterized in that the individual optical elements of the total collimating unit (305) or the collimating unit (305) are arranged to change the collimation of the laser beam (100) And a focal point (340) of the laser beam (340). A method for manufacturing a liquid jet laser machine tool (300) according to any one of claims 14 to 17, characterized by focusing the laser beam (100) on a nozzle opening (37) of a nozzle (33) A method for coupling a laser beam (100) to a liquid jet (200)
The focus of the laser beam 100 is focused on the nozzle opening 37 so that the laser beam from the laser beam 100 is reflected from the port periphery nozzle 33 portion of the nozzle opening 37 toward the two- And the port of the nozzle opening 37 of the nozzle opening 37 is photographed by the image sensor 303 and the port of the nozzle opening 37 is identified The method comprising a first step. 19. The method according to claim 18, wherein the nozzle opening (37) is displayed using a marking (308) in a scene photographed by the image sensor (303) And a second step of delivering to the other scene for setting the position of the nozzle opening (37). 20. A method as claimed in claim 19, characterized in that the markings (338) are modified by straight lines (339.l, 339.2) intersecting in two vertical directions and the intersections of these straight lines are arranged in the center of the nozzle opening Lt; / RTI > 21. A method according to any one of claims 18 to 20, characterized in that the laser beam (100) is focused at a position on the port peripheral nozzle (33) portion of the nozzle opening (37) Characterized in that an additional scene of the port circumferential nozzle (33) portion of the image is taken by the image sensor (303). 22. The method according to claim 20 or 21,
a) First, the focal point 340 of the laser beam 100 is located in the first line 339.1 of the lines intersecting in the vertical direction, and a first positioning parameter used for this is stored;
b) Next, the focal point 340 of the laser beam 100 is located in the second line 339.2 of the line intersecting in the vertical direction and the second positioning parameter used for this is stored
c) then placing the focus 340 of the laser beam 100 at the port of the nozzle opening 37, based on the stored first and second positioning parameters. .

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