KR20170000517A - quartz crucible inner pore imaging system using auto-rotation device and camera - Google Patents

quartz crucible inner pore imaging system using auto-rotation device and camera Download PDF

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Publication number
KR20170000517A
KR20170000517A KR1020150089486A KR20150089486A KR20170000517A KR 20170000517 A KR20170000517 A KR 20170000517A KR 1020150089486 A KR1020150089486 A KR 1020150089486A KR 20150089486 A KR20150089486 A KR 20150089486A KR 20170000517 A KR20170000517 A KR 20170000517A
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KR
South Korea
Prior art keywords
quartz crucible
camera
crucible
quartz
bubbles
Prior art date
Application number
KR1020150089486A
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Korean (ko)
Inventor
박경봉
김기태
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(주) 보람케메탈
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Priority to KR1020150089486A priority Critical patent/KR20170000517A/en
Publication of KR20170000517A publication Critical patent/KR20170000517A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/10—Scanning
    • G01N2201/104—Mechano-optical scan, i.e. object and beam moving
    • G01N2201/1047—Mechano-optical scan, i.e. object and beam moving with rotating optics and moving stage

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The present invention relates to a method of manufacturing a silicon single crystal by a method of manufacturing a silicon single crystal by using a method for manufacturing a silicon single crystal, This is to improve the cause of the drop in the water yield.
To this end, the present invention relates to a method of photographing and monitoring an inner surface at a constant speed by placing a quartz crucible on an inner photographing shelf with a quartz crucible turned over and installing a camera and an automatic rotating device in the center of the quartz crucible, (bubble) of the quartz crucible, and establishing the bubble inspection standard and inspection method of the quartz crucible.

Description

Technical Field [0001] The present invention relates to a quartz crucible inner pore imaging system using an auto-rotation device and a camera,

The present invention relates to a method of photographing an internal pore of a ceramic crucible, and more particularly, to a device for photographing the inside of a quartz crucible by wire or wire using an automatic rotating device and a camera to determine whether the product is defective.

Quartz crucibles are mainly made of high-purity quartz glass as a bowl and are divided into an outer portion where bubbles exist and an inner portion which does not contain bubbles.

Outside the crucible, there are innumerable small bubbles, which are intended to facilitate radiation scattering from the heating element in the process of manufacturing monocrystalline silicon, and the inner layer is free of bubbles as much as possible.

The reason for this is that the bubbles can be decomposed during the melting process of silicon and have a large influence on the orientation of the growing single crystal silicon.

The presence of bubbles in the quartz crucible used for uniform growth of the silicon single crystal and the state of the inner surface are very important. If the state is not uniform, local crystallization of the quartz crucible occurs at a high temperature and heterogeneous crystalline quartz Which may cause a decrease in the yield of single crystal silicon growth.

In other words, the heterogeneous crystalline quartz interferes with the growth of the silicon single crystal, so that the growth of the single crystal is partially stopped. In this case, the single crystal generating electric furnace should be cooled and re-set for a long time.

Therefore, the bubbles inside the quartz crucible must be minimized during the production of the quartz crucible because the bubbles in the quartz crucible are directly related to the yield of the silicon ingot such as the heat resistance of the crucible and the running time of the silicon ingot production.

However, the method of visually checking the bubbles existing inside the quartz crucible or using an expensive microscope system is mainly used. In the case of a small scale crucible producing company, the bubble inspection standard and the standard inspection method are set I have a problem.

The present invention relates to a quartz glass crucible having a built-in quartz crucible, a smart device with a camera or a camera, and an automatic rotating device, The purpose of the test is to present the method.

In order to grasp bubbles by photographing the inside of a quartz crucible, and to determine whether or not the quartz crucible is defective, a shelf for placing the completed quartz crucible on the inside and placing the crucible thereon is manufactured. The center of the lathe is placed at the center of the quartz crucible so that a camera or a camera equipped with the camera can be installed, and the inside of the crucible is photographed while rotating at a constant speed. And a step of establishing the step.

 The present invention is effective for quickly and intuitively checking internal bubbles by monitoring and photographing while rotating at a constant speed using a camera and an automatic rotating device at the center of a quartz crucible.

Therefore, due to the internal bubble, local crystallization of the quartz crucible occurs at a high temperature, and heterogeneous crystalline quartz is generated on the surface, thereby improving the cause of decrease in the yield of single crystal silicon growth and reducing the time and economic loss.


BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a morphology of a crucible inner pore photographing apparatus using an automatic turning apparatus and a camera according to an embodiment of the present invention. Fig.

The present invention will now be described in detail with reference to the accompanying drawings.

1 is a perspective view of a crucible support (not shown) mounted on a quartz crucible and an automatic rotating device 4 and a camera 3 support 6 for measuring the internal air bubbles existing in the interior of the quartz crucible, 5), which can be confirmed by using an automatic rotation device and a camera in which bubbles existing on the inside surface of the quartz crucible turned upside up are mounted on the support table 6. [

The process of measuring the bubbles existing in the quartz crucible, that is, the surface of the transparent layer portion 1, through the apparatus shown in FIG. 1 will be described below.

The automatic rotating device 4 and the camera 3 used for measuring the bubbles inside the crucible supporter 5 for measuring the bubbles existing in the surface of the quartz crucible, that is, the surface of the transparent layer part 1, The quartz crucible to be measured is placed on the crucible supporter 5 so that the quartz crucible is placed on the quartz crucible. Thereafter, various lines for operating the automatic rotating device 4 and the camera 3 and a remote control are connected. Then, the camera 3 is connected to the PC device. Thereafter, the camera 3 is rotated at a constant speed using a remote controller of the automatic rotating device 4, and the image transmitted to the connected PC device is monitored in real time by monitoring the inside of the quartz crucible, To measure and confirm the presence of bubbles.

The method of connecting a PC, a camera or a camera with a camera can be wirelessly using WiFi or bluetooth.

The bubbles measured by Fig. 1 are evaluated according to the following criteria. When the image transmitted from the PC device is confirmed through real-time monitoring, the product of the quartz crucible when the bubbles in the quartz crucible, that is, the surface of the transparent layer portion (1) It is evaluated as passing the inspection.

When measuring the bubbles existing in the surface of the quartz crucible, that is, the surface of the transparent layer 1 by real-time monitoring through the image transmitted by connecting the automatic rotating device 4 and the camera 3 installed in Fig. 1 to the PC device, By adjusting the parameters, it is possible to measure and confirm the bubbles in a more improved manner. This method is as follows.

1, a negative effect or an inverting effect is carried out among the filter effects inherent in the camera 3 installed in FIG. 1, and the image is transmitted to the PC device, so that air bubbles existing in the surface of the quartz crucible, It can be measured and verified in an improved way.

(3) a smart device with a camera or a camera, (4) an automatic rotation device, (5) a crucible support, and (5) a quartz crucible. , (6) Automatic rotation device and camera support

Claims (1)

In order to photograph a crucible with a crucible turned over on a quartz crucible, a camera or a camera equipped with a smart device and an automatic rotation device are positioned in the center of the crucible and then rotated at a constant speed through an automatic rotation device. How to check bubbles by connecting wired and wireless.
A method of establishing an internal bubble inspection standard and inspection method after grasping the presence of internal pores of a quartz crucible by the above photographing method.
KR1020150089486A 2015-06-24 2015-06-24 quartz crucible inner pore imaging system using auto-rotation device and camera KR20170000517A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150089486A KR20170000517A (en) 2015-06-24 2015-06-24 quartz crucible inner pore imaging system using auto-rotation device and camera

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150089486A KR20170000517A (en) 2015-06-24 2015-06-24 quartz crucible inner pore imaging system using auto-rotation device and camera

Publications (1)

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KR20170000517A true KR20170000517A (en) 2017-01-03

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KR1020150089486A KR20170000517A (en) 2015-06-24 2015-06-24 quartz crucible inner pore imaging system using auto-rotation device and camera

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109580782A (en) * 2018-12-25 2019-04-05 宁波宝斯达坩埚保温制品有限公司 A kind of quartz crucible surface on-line measuring device
CN113607643A (en) * 2021-07-20 2021-11-05 江苏拓正茂源新能源有限公司 Polycrystalline silicon ingot casting quartz crucible detection device
KR102477912B1 (en) * 2022-03-21 2022-12-15 부흥감리이엔지 주식회사 AI-based monitoring system for electric switchboards in apartment houses
CN116518894A (en) * 2023-07-05 2023-08-01 西安地山视聚科技有限公司 Method for detecting thickness of transparent layer of double-layer composite quartz crucible

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109580782A (en) * 2018-12-25 2019-04-05 宁波宝斯达坩埚保温制品有限公司 A kind of quartz crucible surface on-line measuring device
CN109580782B (en) * 2018-12-25 2021-07-06 宁波宝斯达坩埚保温制品有限公司 Quartz crucible surface on-line measuring device
CN113607643A (en) * 2021-07-20 2021-11-05 江苏拓正茂源新能源有限公司 Polycrystalline silicon ingot casting quartz crucible detection device
KR102477912B1 (en) * 2022-03-21 2022-12-15 부흥감리이엔지 주식회사 AI-based monitoring system for electric switchboards in apartment houses
CN116518894A (en) * 2023-07-05 2023-08-01 西安地山视聚科技有限公司 Method for detecting thickness of transparent layer of double-layer composite quartz crucible
CN116518894B (en) * 2023-07-05 2023-09-12 西安地山视聚科技有限公司 Method for detecting thickness of transparent layer of double-layer composite quartz crucible

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