KR20160124384A - Sensor element for sensing particle concentration - Google Patents

Sensor element for sensing particle concentration Download PDF

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Publication number
KR20160124384A
KR20160124384A KR1020150054662A KR20150054662A KR20160124384A KR 20160124384 A KR20160124384 A KR 20160124384A KR 1020150054662 A KR1020150054662 A KR 1020150054662A KR 20150054662 A KR20150054662 A KR 20150054662A KR 20160124384 A KR20160124384 A KR 20160124384A
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KR
South Korea
Prior art keywords
measuring
measurement
temperature
electrodes
insulating substrate
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Application number
KR1020150054662A
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Korean (ko)
Inventor
김경원
배상한
정광현
김관수
이한복
Original Assignee
경원산업 주식회사
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Priority to KR1020150054662A priority Critical patent/KR20160124384A/en
Publication of KR20160124384A publication Critical patent/KR20160124384A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/043—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a granular material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/045—Circuits
    • G01N27/046—Circuits provided with temperature compensation

Abstract

The present invention relates to a sensor element for sensing gas to measure particle concentration in a gas mixture, which comprises: at least one measurement electrode (14, 16) wherein the sensor element (10) is exposed to gas to be measured; at least one temperature measurement element (30) integrated with the sensor element (10); and at least one heating element (40) integrated with the sensor element (10), and arranged between the measurement electrode (14, 16) and the temperature measurement element (30) in a space of the sensor element (10).

Description

TECHNICAL FIELD [0001] The present invention relates to a sensor element for measuring particle concentration,

The present invention relates to a sensor element for measuring particle concentration in a gas mixture.

As environmental legislation is further strengthened, the importance of the exhaust gas aftertreatment system, which can filter or remove the soot particles contained in the combustion exhaust gas, is increasing. In order to check or monitor the reliability of such an exhaust gas aftertreatment system, there is a need for a sensor that can accurately determine the instantaneous particle concentration present in the exhaust gas even when used for a long time. In addition, by using such sensors, it is necessary to predict the degree of saturation of the diesel particulate filter provided in the exhaust gas system, in order to increase the safety of the system and enable the use of more cost effective filter materials.

As prior art, U.S. Patent Application Publication No. 2013/0257460 A1 (Feb. 3, 2013) "Particulate matter sensor with two pairs of sensing electrodes and methods of using same" describes a sensor for detecting a substance in a fluid flow, Such a sensor is disposed on a ceramic multilayer substrate. The sensor includes two measuring electrodes disposed at a distance from the counterpart and exposed to the combustion exhaust gas to be detected. If soot particles are piled up between two electrodes, these soot particles cause a current to flow between the measuring electrodes in response to the voltage applied to the measuring electrodes. The heating element, in the form of a layer, is able to remove the soot accumulated on the electrode and its surroundings through heat generation.

However, in such a conventional sensor structure, since the measuring electrode is formed of a metal conductor, due to the nature of the metal conductor, expansion and contraction occur depending on the temperature, so that the electrical resistance of the measuring electrode changes with temperature. Moreover, resistance changes due to such temperature changes as well as resistance changes due to soot particles occur at the same time, resulting in errors in the measurement signal.

It is an object of the present invention to provide a sensor element for measuring the concentration of particles for measuring the concentration of particles in a gas mixture which can be precisely controlled in temperature and can be carried out cost-effectively.

In order to achieve the above object, a sensor element according to the present invention is a sensor element for measuring a concentration of a particle in a gas mixture, the sensor element being composed of two measurement electrodes separated from each other so as to be cross- A measuring element which is exposed to the mixture and in which particles in the gas mixture are deposited between the two measuring electrodes so that the resistance between the two measuring electrodes fluctuates so that a current can be generated; A temperature measuring element for sensing the temperature of the measuring device; And a heating element disposed between the measurement element and the temperature measurement element spatially and heating the measurement element to remove the accumulated particles.

And, the above particles may be the soot particles, and the sensor element according to the present invention evaluates the particle concentration in the gas mixture from the resistance value or current value of the measuring element.

In addition, the measurement element, the heating element and the temperature measurement element may be formed on a separate electrically insulating substrate, or the measurement element may be disposed on the same electrically insulating substrate as at least one of the heating element and the temperature measurement element .

In addition, the distance between the measurement element and the heating element and the distance between the measurement element and the temperature measurement element can be designed to be the same.

Also, the material of the electrically insulating substrate may be selected from the group consisting of alumina, cordierite, and mullite, and the surface of the electrically insulating substrate may be coated with a ceramic insulating film made of barium-containing alumina.

The material of the measuring electrode may be Pt or Pt containing Al 2 O 3 .

The temperature measuring element and the temperature measuring element may be composed of Pt or an electrode made of Pt containing Al 2 O 3 . At least a part of the temperature measuring element may be coated with an insulating film.

The two measuring electrodes of the measuring element are arranged at one end of the electrically insulating substrate, and the two measuring electrodes are arranged at the other end of the electrically insulating substrate opposite to the one end of the measuring electrode. And are separately connected through two lead wires extending in the longitudinal direction, respectively, thereby receiving a voltage from each of the terminals. At this time, the two lead wires may be coated with an insulating film.

1 is an exploded perspective view showing a configuration of a sensor element according to the present invention.
FIG. 2 is a partial perspective view showing a measuring electrode, a heating element and a temperature measuring element constituting the sensor according to the present invention in FIG. 1; FIG.

In the present invention, the two measurement electrodes of the above-described sensor element are arranged in an interdigital manner so as to form a narrow width and a serpentine shape between the electrodes. In this case, the resistance between these electrodes is greatly influenced by the minute accumulation amount of the soot particles, so that the electrical sensitivity can be greatly increased.

Further, in the present invention, the reliability of the measured value can be improved by sensing the temperature of the measuring electrode region and monitoring the current change according to the temperature change.

Hereinafter, the present invention will be described in detail with reference to the drawings.

1 and 2 show a structure of an embodiment of a sensor element according to the present invention. FIG. 1 is an exploded perspective view of a sensor element, and FIG. 2 shows a measurement electrode, a heating electrode, Partial perspective view.

Referring to Figs. 1 and 2, such a ceramic sensor element 10 is used for measuring a particle concentration, such as a soot concentration, in an ambient gas mixture.

The sensor element 10 includes, for example, a structure in which a plurality of insulating layers or insulating substrates 11a and 11b are laminated. The material of these insulating layers is preferably an insulating material selected from the group consisting of alumina (Al 2 O 3 ), cordierite and mullite, and may be formed, for example, in the form of a ceramic foil or a planar ceramic body . The insulating layer may be laminated by tape-casting the above ceramic composition slurry, for example, using a normal doctor blade or the like.

A plurality of insulating films 12a and 12b are coated on the surfaces of the insulating layers 11a and 11b. For example, ceramic paste may be formed by screen printing. Such a ceramic composition is preferably barium-containing alumina (Al 2 O 3 ) which maintains a constant high electrical resistance value even under changes in temperature over a long period of time (for example, in the range of 600 ° C. or higher) . However, CeO 2 may be used instead, or other alkaline earth oxides may be added. The laminated ceramic body is simultaneously fired with the measuring electrode, the heating electrode, and the temperature electrode described below.

As shown in FIGS. 1 and 2, for example, two measuring electrodes 14 and 16 are coated on one surface of the sensor element 10, and they may be composed of interdigital electrodes arranged crossing each other. These interdigital electrodes are cross-disposed to each other, so that electrical resistance or conductivity is sensitive to the soot deposited between these electrodes. The measurement electrodes 14 and 16 are preferably made of a metal conductor, preferably Pt, or a Pt material containing alumina or other ceramics.

The terminals 18 and 20 of the measurement electrodes 14 and 16 are preferably formed in the opposite end regions far from the gas mixture and the lead wires 18 and 20 extending from the terminals 18 and 20 to the measurement electrodes 14 and 16 The region may be coated with the insulating film 12b for shielding from the gas mixture. It is preferable that the insulating film has a thickness larger than the height of the two measuring electrodes.

When the gas mixture is flowed around the sensor element 10 to which DC or AC power is applied, the soot particles will be deposited on the surface of the sensor element 10 particularly if the gas mixture contains soot. When the surfaces of the measuring electrodes 14 and 16 are sufficiently saturated with soot, the soot particles have a predetermined conductivity, so that the current increases between the measuring electrodes 14 and 16 in accordance with the degree of saturation. According to the present invention, by adjusting the applied voltage supplied to the measurement electrodes 14 and 16, the sensitivity can be adjusted by adjusting the magnitude of the generated current.

By sensing the change in the current value, data on the particles of the gas mixture can be collected as follows. As an example, conclusions can be drawn from the integrated value of the amount of current over time for sediment particle mass and momentary particle mass flow, in particular soot particle mass flow, particle concentration in the gas mixture, and the like. As another example, conclusions can be drawn regarding the accumulation particle mass, the instantaneous particle mass, in particular the soot particle mass and the particle concentration in the gas mixture, from the current differential over time, i.e. current differential coefficient with time. That is, these measured values can be used to calculate the particle concentration based on the flow rate of the gas mixture, and the flow rate or volumetric flow rate of such a gas mixture can be measured by a suitable sensor.

If the accumulation of the gas mixture material continuously accumulates between the measurement electrodes 14 and 16 of the sensor element 10 as described above, continuous measurement becomes difficult, so that it is heated to the temperature of the gas mixture, And a heating electrode 40 for burning the deposited soot particles. The heating electrode 40 is constructed as an electrical resistance circuit conductor, and the resistance circuit conductor is made of Pt or Al 2 O 3 , And the like. The terminals 41 and 42 of the heating electrode 40 are connected to the terminal electrodes 61 and 62 through the via holes 51 and 52 as shown in FIG. Can operate. In addition, this voltage can be varied to control the heating temperature.

On the other hand, it is necessary to monitor the temperature because the electrical resistance between the sensor element 10 and the measurement electrodes 14 and 16 greatly depends on the temperature. For this purpose, according to the present invention, as shown in FIG. 1, a metal conductor, in particular Pt or Al 2 O 3 And a temperature-sensitive electrode 30 made of an electrode made of a composition of Pt containing ceramic. The temperature electrode 30 may also be formed of a conventional resistance temperature detector (RTD).

The temperature electrode 30 can detect the temperature by sensing the resistance which varies with the temperature through the terminals 31 and 32 disposed at the end thereof. Further, like the lead wires of the measuring electrodes 14 and 16, the temperature electrode 30 can be coated with the insulating film 12a at least in part for shielding from the gas mixture. For example, the entirety of the temperature electrode 30 may be coated with the insulating film 12a except for the regions of the terminals 31 and 32 as shown in FIG.

In particular, since the temperature electrode 30 is spaced apart from the measuring electrodes 14 and 16 by a layer of the heating electrode 40 due to lack of space on the surface of the measuring electrodes 14 and 16 as shown in FIG. 1, The temperature of the heating electrode 40 should also be taken into account with respect to the measured temperature value. That is, when the arrangement of the heating electrodes 40 with respect to the measurement electrodes 14, 16 and the temperature electrode 30 is symmetrical or equidistant, the measurement electrodes 14 , 16) can be calculated.

The sensor element according to the present invention having the above structure can measure the concentration of particles in the gas mixture, and in particular, it is possible to always monitor the temperature of the sensor and accurately measure the concentration of the particles. Thus, for example, It is suitable for monitoring the operating condition of the engine and for monitoring the reliability or saturation of the particle filter.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention as defined by the appended claims. It should be seen as belonging.

The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of manufacturing a semiconductor device, comprising the steps of: , 41, 42: heating electrode terminal, 51, 52: via hole, 61, 62: terminal electrode

Claims (14)

A sensor element for measuring a particle concentration in a gas mixture,
Wherein the two measuring electrodes are arranged such that they are interdigitally arranged in an interdigital fashion and are impressed with voltage, wherein the particles in the gas mixture are deposited between the two measuring electrodes so that the resistance between the two measuring electrodes A measurement element capable of generating a current that fluctuates;
A temperature measuring element for sensing the temperature of the measuring device;
And a heating element disposed between the measurement element and the temperature measurement element spatially and heating the measurement element to remove accumulated particles. The method according to claim 1,
Wherein the particle is a soot particle. The method according to claim 1,
And the particle concentration in the gas mixture is evaluated from the resistance value or the current value of the measurement element. The method according to claim 1,
Wherein the measuring element, the heating element and the temperature measuring element are formed on a separate electrically insulating substrate. The method according to claim 1,
Wherein the measuring element is disposed on the same electrically insulating substrate as at least one of the heating element and the temperature measuring element. The method according to claim 4 or 5,
Wherein the distance between the measurement element and the heating element and the distance between the measurement element and the temperature measurement element are the same. The method according to claim 4 or 5,
Wherein the material of the electrically insulating substrate is selected from the group consisting of alumina, cordierite, and mullite. The method according to claim 4 or 5,
Wherein the surface of the electrically insulating substrate is coated with a ceramic insulating film made of barium-containing alumina. The method according to claim 1,
Wherein the measuring electrode is made of Pt or Pt containing Al 2 O 3 . The method according to claim 1,
Wherein the temperature measuring element is made of Pt or an electrode made of Pt containing Al 2 O 3 . The method according to claim 4 or 5,
Wherein the two measurement electrodes of the measurement element are disposed at one end of the electrically insulating substrate, and the two measurement electrodes have two terminals arranged on another end of the electrically insulating substrate opposite to the one end, And two lead wires extending in the longitudinal direction, respectively, and are supplied with voltages from the terminals, respectively. 12. The method of claim 11,
Wherein the two lead wires are coated with an insulating film. The method according to claim 1,
Wherein the temperature measuring element is made of Pt or an electrode made of Pt containing Al 2 O 3 . The method according to claim 4 or 5,
Wherein at least a part of the temperature measuring element is coated with an insulating film.
KR1020150054662A 2015-04-17 2015-04-17 Sensor element for sensing particle concentration KR20160124384A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190102195A (en) * 2016-12-28 2019-09-03 로베르트 보쉬 게엠베하 Sensor element for detecting particles of the measuring gas in the measuring gas chamber
WO2021020597A1 (en) * 2019-07-26 2021-02-04 (주)인터플렉스 Temperature sensor and heating structure comprising same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190102195A (en) * 2016-12-28 2019-09-03 로베르트 보쉬 게엠베하 Sensor element for detecting particles of the measuring gas in the measuring gas chamber
WO2021020597A1 (en) * 2019-07-26 2021-02-04 (주)인터플렉스 Temperature sensor and heating structure comprising same

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