JP2016099169A - Particulate substance detection sensor - Google Patents

Particulate substance detection sensor Download PDF

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JP2016099169A
JP2016099169A JP2014234935A JP2014234935A JP2016099169A JP 2016099169 A JP2016099169 A JP 2016099169A JP 2014234935 A JP2014234935 A JP 2014234935A JP 2014234935 A JP2014234935 A JP 2014234935A JP 2016099169 A JP2016099169 A JP 2016099169A
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detection
particulate matter
detection sensor
pair
electrodes
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田村 昌之
Masayuki Tamura
昌之 田村
豪 宮川
Go Miyagawa
豪 宮川
小池 和彦
Kazuhiko Koike
和彦 小池
弘宣 下川
Hironobu Shimokawa
弘宣 下川
友隆 毛利
Tomotaka Mori
友隆 毛利
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Denso Corp
Soken Inc
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Denso Corp
Nippon Soken Inc
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Priority to JP2014234935A priority Critical patent/JP2016099169A/en
Priority to PCT/JP2015/079251 priority patent/WO2016080120A1/en
Publication of JP2016099169A publication Critical patent/JP2016099169A/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01NGAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/02Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
    • F01N3/021Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
    • F01N3/023Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters using means for regenerating the filters, e.g. by burning trapped particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance

Abstract

PROBLEM TO BE SOLVED: To provide a particulate substance detection sensor capable of improving the detection sensitivity of particulate substance.SOLUTION: A particulate substance detection sensor 1 includes: an accumulation part 10 for accumulating a part of particulate substance contained in an exhaust gas discharged from an internal combustion engine; and at least a pair of detection electrodes 12 disposed on the accumulation part 10. In a direction of alignment of the pair of detection electrodes 12, the width t of the detection electrodes 12 is smaller than a distance S between the pair of detection electrodes 12. With the particulate substance detection sensor 1, the detection sensitivity of the particulate substance can be improved.SELECTED DRAWING: Figure 1

Description

本発明は、粒子状物質検出センサに関する。   The present invention relates to a particulate matter detection sensor.

内燃機関の排気管には、排ガスに含まれる粒子状物質(Particulate Matter:PM)を捕集する排ガス浄化装置が設けられている。この排ガス浄化装置は、排ガスに含まれる粒子状物質の量を検出する粒子状物質検出センサを有する粒子状物質検出装置を備えており、この粒子状物質検出装置によって得られた情報を基に、排ガス浄化装置の故障検知が行われている。   An exhaust gas purification apparatus that collects particulate matter (PM) contained in the exhaust gas is provided in an exhaust pipe of the internal combustion engine. This exhaust gas purification device includes a particulate matter detection device having a particulate matter detection sensor that detects the amount of particulate matter contained in the exhaust gas, and based on information obtained by this particulate matter detection device, Failure detection of the exhaust gas purification device is performed.

排ガス浄化装置に用いられる粒子状物質検出センサとしては、例えば、特許文献1に示されたものがある。特許文献1の粒子状物質検出センサは、電気絶縁性を有する基板と、基板の表面に形成された一対の電極とを有している。   As a particulate matter detection sensor used in an exhaust gas purification apparatus, for example, there is one disclosed in Patent Document 1. The particulate matter detection sensor of Patent Document 1 has a substrate having electrical insulation and a pair of electrodes formed on the surface of the substrate.

特開昭59−197847号JP 59-197847

しかしながら、特許文献1に示された粒子状物質検出センサには以下の課題がある。
粒子状物質検出センサにおいては、検出感度の向上が望まれており、検出感度を向上する手段としては、一対の電極間の距離を短縮することが知られている。このとき、一対の電極間の距離が小さい程、粒子状物質検出センサにおける検出感度が向上するが、一対の電極間の距離は、一対の電極の形成精度や形成条件によって制限される。そのため、一対の電極間の距離を短縮するには、限界があり、より検出感度を向上することができる粒子状物質検出センサが望まれている。
However, the particulate matter detection sensor disclosed in Patent Document 1 has the following problems.
In the particulate matter detection sensor, improvement in detection sensitivity is desired, and as a means for improving detection sensitivity, it is known to shorten the distance between a pair of electrodes. At this time, the smaller the distance between the pair of electrodes, the better the detection sensitivity of the particulate matter detection sensor. However, the distance between the pair of electrodes is limited by the formation accuracy and forming conditions of the pair of electrodes. Therefore, there is a limit to shortening the distance between the pair of electrodes, and a particulate matter detection sensor that can further improve detection sensitivity is desired.

本発明は、かかる背景に鑑みてなされたものであり、粒子状物質の検出感度を向上することができる粒子状物質検出センサを提供しようとするものである。   The present invention has been made in view of such a background, and an object of the present invention is to provide a particulate matter detection sensor capable of improving the detection sensitivity of particulate matter.

本発明の一態様は、内燃機関から排出される排ガスに含まれる粒子状物質の一部を堆積させる被堆積部と、該被堆積部に配置された少なくとも一対の検出電極とを備えており、
上記一対の検出電極の並び方向において、上記検出電極の幅は、上記一対の検出電極の間の距離以下であることを特徴とする粒子状物質検出センサにある。
One aspect of the present invention includes a depositing part for depositing a part of particulate matter contained in exhaust gas discharged from an internal combustion engine, and at least a pair of detection electrodes arranged in the depositing part,
The particulate matter detection sensor is characterized in that, in the arrangement direction of the pair of detection electrodes, a width of the detection electrode is equal to or less than a distance between the pair of detection electrodes.

上記粒子状物質検出センサにおいて、上記粒子状物質検出センサの上記一対の検出電極に捕集電圧を印加すると、上記検出電極の周囲に電界が形成され、粒子状物質が上記検出電極へと引き寄せられ付着する。上記一対の検出電極のうち一方の上記検出電極の表面に付着した粒子状物質は、該検出電極の表面を移動し、他方の上記検出電極と対向する端部に堆積する。   In the particulate matter detection sensor, when a collection voltage is applied to the pair of detection electrodes of the particulate matter detection sensor, an electric field is formed around the detection electrodes, and the particulate matter is attracted to the detection electrodes. Adhere to. Particulate matter adhering to the surface of one of the pair of detection electrodes moves on the surface of the detection electrode and is deposited on the end facing the other detection electrode.

仮に、上記検出電極の上記幅が、上記一対の検出電極の間の距離よりも大きい場合、上記検出電極に、導通パスを形成するために十分な量の粒子状物質が付着したとしても、上記検出電極上を移動する間は導通パスが形成されない。そのため、導通パスの形成に時間がかかり、検出感度が低下する。   If the width of the detection electrode is larger than the distance between the pair of detection electrodes, even if a sufficient amount of particulate matter adheres to form a conduction path on the detection electrode, A conduction path is not formed while moving on the detection electrode. Therefore, it takes time to form a conduction path, and the detection sensitivity is lowered.

上記粒子状物質検出センサにおいては、上記検出電極の幅が、上記一対の検出電極の間の距離以下である。そのため、上記検出電極に付着した粒子状物質が、上記検出電極の表面において、粒子状物質が移動する距離を短縮することができる。これにより、上記検出電極に付着した粒子状物質を速やかに上記一対の検出電極の間へと移動させ、上記一対の検出電極の間に粒子状物質によって導通パスを速やかに形成することができる。これにより、上記粒子状物質検出センサにおける検出感度を向上することができる。   In the particulate matter detection sensor, the width of the detection electrode is equal to or less than the distance between the pair of detection electrodes. For this reason, the distance that the particulate matter attached to the detection electrode moves on the surface of the detection electrode can be shortened. Thereby, the particulate matter adhering to the detection electrode can be quickly moved between the pair of detection electrodes, and a conduction path can be quickly formed by the particulate matter between the pair of detection electrodes. Thereby, the detection sensitivity in the said particulate matter detection sensor can be improved.

以上のごとく、上記粒子状物質検出センサによれば、粒子状物質の検出感度を向上することができる。   As described above, according to the particulate matter detection sensor, the detection sensitivity of particulate matter can be improved.

実施例1における、粒子状物質検出センサを示す説明図。FIG. 3 is an explanatory diagram illustrating a particulate matter detection sensor according to the first embodiment. 実施例1における、粒子状物質検出センサの被堆積部の拡大図。FIG. 3 is an enlarged view of a portion to be deposited of the particulate matter detection sensor in the first embodiment. 実施例1における、粒子状物質検出センサの構造を示す説明図。FIG. 3 is an explanatory diagram illustrating a structure of a particulate matter detection sensor in the first embodiment. 実施例2における、粒子状物質検出センサを示す説明図。FIG. 9 is an explanatory diagram showing a particulate matter detection sensor in Example 2. 実施例2における、粒子状物質検出センサの被堆積部の拡大図。The enlarged view of the depositing part of the particulate matter detection sensor in Example 2. FIG.

上記粒子状物質検出センサにおいて、上記一対の検出電極の間の距離は、5μm〜50μmであることが好ましい。この場合には、上記一対の検出電極の成形性を確保しつつ、上記粒子状物質検出センサの検出感度を向上することができる。   In the particulate matter detection sensor, the distance between the pair of detection electrodes is preferably 5 μm to 50 μm. In this case, the detection sensitivity of the particulate matter detection sensor can be improved while ensuring the moldability of the pair of detection electrodes.

また、上記検出電極の幅は、上記一対の検出電極の間の距離の1/2以下であることが好ましい。この場合には、上記粒子状物質検出センサにおける、検出感度及び検出精度をより向上することができる。また、上記検出電極の幅は、上記一対の検出電極の間の距離の1/4以下であることがより好ましい。この場合には、上記粒子状物質検出センサにおける、検出感度及び検出精度をさらに向上し、高性能な上記粒子状物質検出センサを得ることができる。   Further, the width of the detection electrode is preferably ½ or less of the distance between the pair of detection electrodes. In this case, the detection sensitivity and detection accuracy in the particulate matter detection sensor can be further improved. The width of the detection electrode is more preferably ¼ or less of the distance between the pair of detection electrodes. In this case, the detection sensitivity and detection accuracy in the particulate matter detection sensor can be further improved, and the particulate matter detection sensor with high performance can be obtained.

また、上記検出電極の上記幅は、2.0μm以上であることが好ましい。この場合には、上記検出電極の成形性を確保しながら、上記粒子状物質検出センサの検出感度を向上することができる。   The width of the detection electrode is preferably 2.0 μm or more. In this case, the detection sensitivity of the particulate matter detection sensor can be improved while ensuring the moldability of the detection electrode.

また、複数の上記検出電極と、電気絶縁性を有する複数の絶縁部材とを交互に積層した積層部を有していることが好ましい。この場合には、上記検出電極の上記幅及び一対の検出電極の間の距離を、容易に小さくすることができる。   Moreover, it is preferable to have the laminated part which laminated | stacked the said some detection electrode and the several insulating member which has electrical insulation alternately. In this case, the width of the detection electrode and the distance between the pair of detection electrodes can be easily reduced.

(実施例1)
上記粒子状物質検出センサにかかる実施例について、図1〜図3を参照して説明する。
図1に示すごとく、粒子状物質検出センサ1は、内燃機関から排出される排ガスに含まれる粒子状物質の一部を堆積させる被堆積部10と、被堆積部10に配置された少なくとも一対の検出電極12とを備えている。一対の検出電極12の並び方向において、検出電極12の幅tは、一対の検出電極12の間の距離S以下である。
Example 1
Examples relating to the particulate matter detection sensor will be described with reference to FIGS.
As shown in FIG. 1, the particulate matter detection sensor 1 includes a depositing part 10 for depositing a part of particulate matter contained in exhaust gas discharged from an internal combustion engine, and at least a pair of parts disposed in the depositing part 10. And a detection electrode 12. In the arrangement direction of the pair of detection electrodes 12, the width t of the detection electrode 12 is not more than the distance S between the pair of detection electrodes 12.

以下さらに詳細に説明する。
本例の粒子状物質検出センサ1は、自動車に搭載された内燃機関から、排気管を通じて排出される排ガスに含まれる粒子状物質を検出するためのものである。粒子状物質検出センサ1によって得られた情報を基に、排ガス浄化装置の故障検知を行う。粒子状物質検出センサ1は、排気管の内側に突出するように配設されており、粒子状物質検出センサ1の軸方向における排気管の内側に配置される端部側を先端側とし、その反対側を基端側とする。
This will be described in more detail below.
The particulate matter detection sensor 1 of this example is for detecting particulate matter contained in exhaust gas discharged from an internal combustion engine mounted on an automobile through an exhaust pipe. Based on the information obtained by the particulate matter detection sensor 1, failure detection of the exhaust gas purification device is performed. The particulate matter detection sensor 1 is disposed so as to protrude to the inside of the exhaust pipe, and the end portion side disposed inside the exhaust pipe in the axial direction of the particulate matter detection sensor 1 is defined as the tip side. The opposite side is the proximal side.

図1〜図3に示すごとく、粒子状物質検出センサ1は、排ガス中の粒子状物質を堆積させる被堆積部10と、被堆積部10に互いに離れて配置された複数の検出電極12とを備えている。粒子状物質検出センサ1は、絶縁性材料からなる9つの絶縁部材13と、絶縁部材13の間に配置された8つの検出電極12とを有しており、絶縁部材13と検出電極12とを交互に積層した積層部11が形成されている。被堆積部10は、粒子状物質検出センサ1の先端に、検出電極12の端部を露出して形成されている。   As shown in FIGS. 1 to 3, the particulate matter detection sensor 1 includes a deposition portion 10 that deposits particulate matter in exhaust gas, and a plurality of detection electrodes 12 that are arranged apart from each other on the deposition portion 10. I have. The particulate matter detection sensor 1 has nine insulating members 13 made of an insulating material, and eight detection electrodes 12 arranged between the insulating members 13. The insulating member 13 and the detection electrodes 12 are connected to each other. Stacked portions 11 that are alternately stacked are formed. The deposited portion 10 is formed at the tip of the particulate matter detection sensor 1 with the end of the detection electrode 12 exposed.

絶縁部材13は、アルミナ、ジルコニア、マグネシア、ベリリアなどのセラミック材料を平板状に形成してなる。検出電極12は、焼結前の絶縁部材13の一面に銅ペーストや銀ペースト等を用いたスクリーン印刷により形成されている。また、各絶縁部材13には、検出電極12と接続された電極リード14が形成されている。積層部11においては、正極121と負極122とが交互に配置されており、隣り合う検出電極12同士が一対の検出電極12を形成している。尚、本例においては、一対の検出電極12の並び方向、つまり検出電極12及び絶縁部材13の積層方向において、積層部11における検出電極12の幅tは5μmであり、一対の検出電極12間の距離Sは20μmとした。   The insulating member 13 is formed by forming a ceramic material such as alumina, zirconia, magnesia, or beryllia into a flat plate shape. The detection electrode 12 is formed on one surface of the insulating member 13 before sintering by screen printing using a copper paste, a silver paste, or the like. Each insulating member 13 is provided with an electrode lead 14 connected to the detection electrode 12. In the stacked portion 11, the positive electrodes 121 and the negative electrodes 122 are alternately arranged, and the adjacent detection electrodes 12 form a pair of detection electrodes 12. In this example, in the direction in which the pair of detection electrodes 12 are arranged, that is, in the stacking direction of the detection electrode 12 and the insulating member 13, the width t of the detection electrode 12 in the stacked portion 11 is 5 μm. The distance S was set to 20 μm.

粒子状物質検出センサ1の被堆積部10において、検出電極12に捕集電圧を印加すると、検出電極12の周囲に電界が形成され、粒子状物質が検出電極12へと引き寄せられる。検出電極12に付着した粒子状物質は、検出電極12の表面を移動し、一対の検出電極12の間に堆積する。そして、被堆積部10に堆積した粒子状物質によって、被堆積部10に露出した一対の検出電極12が導通し、一対の検出電極12の間における電気抵抗値が低下する。検出電極12間の電気抵抗値の変化に伴い、検出電極12間を流れる電気信号としての電流量が変化する。これにより、粒子状物質検出センサ1から出力される電流値が変化する。つまり、粒子状物質検出センサ1から出力される電流値は、被堆積部10における粒子状物質の堆積量に応じて変化するものであり、粒子状物質の堆積量に関する情報を有するものである。この電流値を用いることで被堆積部10における粒子状物質の堆積量を検出することができる。本例において、粒子量検出手段において検出された電流は、シャント抵抗を備えたコントロールユニットへと出力され、コントロールユニットは、電流値とシャント抵抗の積で算出される電圧を出力する。この電圧が粒子状物質検出センサ1の出力となる。   When a collection voltage is applied to the detection electrode 12 in the deposition target portion 10 of the particulate matter detection sensor 1, an electric field is formed around the detection electrode 12, and the particulate matter is attracted to the detection electrode 12. Particulate matter adhering to the detection electrode 12 moves on the surface of the detection electrode 12 and is deposited between the pair of detection electrodes 12. The pair of detection electrodes 12 exposed to the deposition target portion 10 are made conductive by the particulate matter deposited on the deposition target portion 10, and the electrical resistance value between the pair of detection electrodes 12 decreases. As the electrical resistance value between the detection electrodes 12 changes, the amount of current as an electrical signal flowing between the detection electrodes 12 changes. Thereby, the current value output from the particulate matter detection sensor 1 changes. That is, the current value output from the particulate matter detection sensor 1 changes according to the amount of particulate matter deposited in the portion 10 to be deposited, and has information on the amount of particulate matter deposited. By using this current value, it is possible to detect the amount of particulate matter deposited in the portion 10 to be deposited. In this example, the current detected by the particle amount detection means is output to a control unit having a shunt resistance, and the control unit outputs a voltage calculated by the product of the current value and the shunt resistance. This voltage becomes the output of the particulate matter detection sensor 1.

次に、本例の作用効果について説明する。
粒子状物質検出センサ1においては、検出電極12の幅tが、一対の検出電極12の間の距離S以下である。そのため、検出電極12に付着した粒子状物質が、検出電極12の表面において、粒子状物質が移動する距離Sを短縮することができる。これにより、検出電極12に付着した粒子状物質を速やかに一対の検出電極12の間へと移動させ、一対の検出電極12の間に粒子状物質によって導通パスを速やかに形成することができる。これにより、粒子状物質検出センサ1における検出感度を向上することができる。
Next, the function and effect of this example will be described.
In the particulate matter detection sensor 1, the width t of the detection electrode 12 is not more than the distance S between the pair of detection electrodes 12. Therefore, the distance S in which the particulate matter attached to the detection electrode 12 moves on the surface of the detection electrode 12 can be shortened. Thereby, the particulate matter adhering to the detection electrode 12 can be quickly moved between the pair of detection electrodes 12, and a conduction path can be quickly formed between the pair of detection electrodes 12 by the particulate matter. Thereby, the detection sensitivity in the particulate matter detection sensor 1 can be improved.

また、検出電極12の幅tは、一対の検出電極12の間の距離Sの1/4以下である。そのため、粒子状物質検出センサ1における、検出感度及び検出精度をさらに向上し、高性能な粒子状物質検出センサ1を得ることができる。   Further, the width t of the detection electrode 12 is ¼ or less of the distance S between the pair of detection electrodes 12. Therefore, the detection sensitivity and detection accuracy in the particulate matter detection sensor 1 can be further improved, and the high-performance particulate matter detection sensor 1 can be obtained.

また、複数の検出電極12と、電気絶縁性を有する複数の絶縁部材13とを交互に積層した積層部11を有している。そのため、検出電極12の幅t及び一対の検出電極12の間の距離Sを、容易に小さくすることができる。   Moreover, it has the laminated part 11 which laminated | stacked the several detection electrode 12 and the several insulating member 13 which has electrical insulation alternately. Therefore, the width t of the detection electrode 12 and the distance S between the pair of detection electrodes 12 can be easily reduced.

以上のごとく、本例の粒子状物質検出センサ1によれば、粒子状物質の検出感度を向上することができる。   As described above, according to the particulate matter detection sensor 1 of this example, the detection sensitivity of particulate matter can be improved.

(確認試験)
本試験においては、粒子状物質検出センサ1における検出電極12の幅tを変化させた際の検出感度への影響を確認した。
本試験には、上述の実施例1に示した検出電極12の幅tを5μmとした粒子状物質検出センサ1と、検出電極12の幅tを変化させた粒子状物質検出センサ101〜104を用いて、検出感度の比較を行った。検出電極12の幅tは、粒子状物質検出センサ101が10μm、粒子状物質検出センサ102が15μm、粒子状物質検出センサ103が20μm、粒子状物質検出センサ104が30μmである。
(Confirmation test)
In this test, the influence on the detection sensitivity when the width t of the detection electrode 12 in the particulate matter detection sensor 1 was changed was confirmed.
In this test, the particulate matter detection sensor 1 in which the width t of the detection electrode 12 shown in Example 1 is 5 μm and the particulate matter detection sensors 101 to 104 in which the width t of the detection electrode 12 is changed are included. The detection sensitivity was compared. The width t of the detection electrode 12 is 10 μm for the particulate matter detection sensor 101, 15 μm for the particulate matter detection sensor 102, 20 μm for the particulate matter detection sensor 103, and 30 μm for the particulate matter detection sensor 104.

粒子状物質検出センサ101〜104における一対の検出電極12間の距離Sは、実施例1と同様に20μmである。
また、その他の構成は実施例1と同様である。尚、本例又は本例に関する図面において用いた符号のうち、実施例1において用いた符号と同一のものは、特に示さない限り、実施例1と同様の構成要素等を表す。
The distance S between the pair of detection electrodes 12 in the particulate matter detection sensors 101 to 104 is 20 μm as in the first embodiment.
Other configurations are the same as those in the first embodiment. Of the reference numerals used in this example or the drawings relating to this example, the same reference numerals as those used in the first embodiment represent the same components as in the first embodiment unless otherwise specified.

粒子状物質検出センサ1は、内燃機関の排ガスを流通する排気管の内周面から、排気管の中央に向かって突出するように配設されている。排気管には、粒子状物質濃度が3mg/m3の排ガスを、20m/sの流速で流通させた。また、粒子状物質検出センサ1の近傍における排ガス温度は200℃である。 The particulate matter detection sensor 1 is disposed so as to protrude from the inner peripheral surface of the exhaust pipe through which the exhaust gas of the internal combustion engine flows toward the center of the exhaust pipe. In the exhaust pipe, exhaust gas having a particulate matter concentration of 3 mg / m 3 was circulated at a flow rate of 20 m / s. The exhaust gas temperature in the vicinity of the particulate matter detection sensor 1 is 200 ° C.

上述の条件下において、粒子状物質検出センサ1における検出感度及び繰り返し精度の確認を行った。検出感度は、粒子状物質検出センサ1における不感質量によって判断する。不感質量とは、粒子状物質検出センサ1において導通パスが形成され、粒子状物質検出センサ1の電気特性が変化するまでの間に、排気管内を流通した排気ガスに含まれる粒子状物質の量を示すものである。尚、計測は、5回行い、その平均値を不感質量とした。   Under the conditions described above, the detection sensitivity and repeatability of the particulate matter detection sensor 1 were confirmed. The detection sensitivity is determined by the dead mass in the particulate matter detection sensor 1. The dead mass is the amount of particulate matter contained in the exhaust gas flowing through the exhaust pipe until a conduction path is formed in the particulate matter detection sensor 1 and the electrical characteristics of the particulate matter detection sensor 1 change. Is shown. In addition, measurement was performed 5 times and the average value was made into the dead mass.

Figure 2016099169
Figure 2016099169

表1は、確認試験の結果を示すものである。表1における、不感質量の欄には、不感質量の計測値を示した。また、判定1の欄は、不感質量に対する判定を示すものであり、不感質量が30mgを超える場合「×」(不可)、不感質量が30mg以下でかつ20mgを超える場合「○」(良)、不感質量が20mg以下の場合「◎」(優)とした。
また、繰り返し精度の欄には、不感質量の計測を5回行った際の不感質量の標準偏差を示してある。また、判定2の欄は、繰り返し精度の判定を示すものであり、繰り返し精度が15%を超える場合「×」(不可)、繰り返し精度が15%以下でかつ10%を超える場合「○」(良)、繰り返し精度が10%以下の場合「◎」(優)とした。
また、総合判定の欄は、不感質量及び繰り返し精度の少なくとも一方が「×」となる場合「×」、不感質量及び繰り返し精度の両方が「○」又はいずれか一方が「○」で他方が「◎」の場合「○」、不感質量及び繰り返し精度の両方が「◎」の場合「◎」とした。
Table 1 shows the results of the confirmation test. In Table 1, the insensitive mass column shows the measured value of the insensitive mass. Moreover, the column of the judgment 1 shows the judgment with respect to the insensitive mass, “X” (impossible) when the insensitive mass exceeds 30 mg, “O” (good) when the insensitive mass is 30 mg or less and exceeds 20 mg, When the dead mass was 20 mg or less, it was set as “◎” (excellent).
In the column of repeat accuracy, the standard deviation of the dead mass when the dead mass is measured five times is shown. The column of determination 2 indicates determination of repeatability. When the repeatability exceeds 15%, “X” (impossible), and when repeatability is 15% or less and exceeds 10%, “◯” ( Good), and “繰 り 返 し” (excellent) when the repeatability is 10% or less.
Also, the column for comprehensive judgment is “×” when at least one of the dead mass and the repeatability is “×”, both the dead mass and the repeat accuracy are “O” or one of them is “O” and the other is “O”. In the case of “”, “◯” was given, and in the case where both the insensitive mass and the repeatability were “◎”, “◎” was given.

表1に示すごとく、検出電極12の幅tを20μm以下とすることで、不感質量が30mg以下となり、検出電極12の幅tを5μmとした場合、不感質量が20mg以下となることが確認された。また、検出電極12の幅tを20μm以下とすることで、繰り返し精度が15%以下となり、検出電極12の幅tを10μm以下とした場合、繰り返し精度が10%以下となることが確認された。   As shown in Table 1, it was confirmed that when the width t of the detection electrode 12 was 20 μm or less, the dead mass was 30 mg or less, and when the width t of the detection electrode 12 was 5 μm, the dead mass was 20 mg or less. It was. It was also confirmed that when the width t of the detection electrode 12 was 20 μm or less, the repeatability was 15% or less, and when the width t of the detection electrode 12 was 10 μm or less, the repeatability was 10% or less. .

したがって、検出電極12の幅tを、一対の検出電極12の間の距離S以下とすることで検出感度及び繰り返し精度が良好な粒子状物質検出センサ1が得られる。また、検出電極12の幅tを、一対の検出電極12の間の距離Sの1/2以下とすることで、繰り返し精度がより向上し、安定して粒子状物質を検出することができる粒子状物質検出センサ1が得られる。また、検出電極12の幅tを、一対の検出電極12の間の距離Sの1/4以下とすることで、検出感度及び繰り返し精度が向上し、優れた検出感度と安定性とを備えた粒子状物質検出センサ1が得られる。   Therefore, when the width t of the detection electrode 12 is set to be equal to or less than the distance S between the pair of detection electrodes 12, the particulate matter detection sensor 1 with good detection sensitivity and repeatability can be obtained. Further, by setting the width t of the detection electrode 12 to be equal to or less than ½ of the distance S between the pair of detection electrodes 12, the repetition accuracy is further improved, and particles that can stably detect the particulate matter. A particulate matter detection sensor 1 is obtained. Further, by making the width t of the detection electrode 12 equal to or less than ¼ of the distance S between the pair of detection electrodes 12, the detection sensitivity and the repeatability are improved, and the detection sensitivity and stability are excellent. A particulate matter detection sensor 1 is obtained.

(実施例2)
本例は、図4及び図5に示すごとく、実施例1と構造の異なる粒子状物質検出センサを示すものである。
本例の粒子状物質検出センサ100は、絶縁性材料を略長方形の板状に形成した絶縁部材13と、絶縁部材13の表面にスクリーン印刷によって平膜状に形成された一対の検出電極12とを有している。粒子状物質検出センサ100において、絶縁部材13における一対の検出電極が形成された面が粒子状物質を堆積させるための被堆積部10である。
(Example 2)
This example shows a particulate matter detection sensor having a structure different from that of Example 1, as shown in FIGS.
The particulate matter detection sensor 100 of this example includes an insulating member 13 in which an insulating material is formed in a substantially rectangular plate shape, and a pair of detection electrodes 12 formed in a flat film shape on the surface of the insulating member 13 by screen printing. have. In the particulate matter detection sensor 100, the surface of the insulating member 13 on which the pair of detection electrodes are formed is a portion to be deposited 10 for depositing particulate matter.

一対の検出電極12は、正極125と負極126とからなり、被堆積部10における長手方向と平行に形成された電極基部123と、電極基部123から長手方向と直交して延設された複数の櫛歯部124とをそれぞれ有している。正極125及び負極126は、電極基部123が互いに向かい合うように配置されると共に、正極125における櫛歯部124の間に、負極126における櫛歯部124が入り込むように配置されている。   The pair of detection electrodes 12 includes a positive electrode 125 and a negative electrode 126, and includes an electrode base 123 formed in parallel to the longitudinal direction of the portion 10 to be deposited, and a plurality of electrodes extending from the electrode base 123 perpendicular to the longitudinal direction. Each has a comb tooth portion 124. The positive electrode 125 and the negative electrode 126 are disposed so that the electrode base 123 faces each other, and the comb tooth portion 124 in the negative electrode 126 is disposed between the comb tooth portions 124 in the positive electrode 125.

本例においては、正極125の櫛歯部124と負極126の櫛歯部124との間に付着した粒子状物質によって導通パスが形成される。つまり、複数の櫛歯部124が並んだ方向が並び方向となる。並び方向において、各櫛歯部124の幅tは、20μmとし、各櫛歯部124の間の距離Sは40μmとした。   In this example, a conduction path is formed by the particulate matter adhered between the comb teeth 124 of the positive electrode 125 and the comb teeth 124 of the negative electrode 126. That is, the direction in which the plurality of comb-tooth portions 124 are arranged is the arrangement direction. In the arrangement direction, the width t of each comb tooth portion 124 was 20 μm, and the distance S between each comb tooth portion 124 was 40 μm.

本例によれば、構造を簡略化することにより、検出感度に優れた粒子状物質検出センサ100を容易に製造することができる。
また、本例においても実施例1と同様の作用効果を得ることができる。
According to this example, the particulate matter detection sensor 100 having excellent detection sensitivity can be easily manufactured by simplifying the structure.
Also in this example, the same effects as those of the first embodiment can be obtained.

1、100 粒子状物質検出センサ
10 被堆積部
11 積層部
12 検出電極
13 絶縁部材
DESCRIPTION OF SYMBOLS 1,100 Particulate matter detection sensor 10 Deposited part 11 Laminated part 12 Detection electrode 13 Insulating member

Claims (5)

内燃機関から排出される排ガスに含まれる粒子状物質の一部を堆積させる被堆積部(10)と、該被堆積部(10)に配置された一対の検出電極(12)とを備えており、
上記一対の検出電極(12)の並び方向において、上記検出電極(12)の幅は、上記一対の検出電極(12)の間の距離以下であることを特徴とする粒子状物質検出センサ(1、100)。
A deposition part (10) for depositing a part of particulate matter contained in exhaust gas discharged from an internal combustion engine, and a pair of detection electrodes (12) arranged in the deposition part (10); ,
In the direction in which the pair of detection electrodes (12) are arranged, the width of the detection electrode (12) is equal to or less than the distance between the pair of detection electrodes (12). , 100).
上記検出電極(12)の上記幅は、上記一対の検出電極(12)の間の上記距離の1/2以下であることを特徴とする請求項1に記載の粒子状物質検出センサ(1、100)。   The particulate matter detection sensor (1, 2) according to claim 1, wherein the width of the detection electrode (12) is ½ or less of the distance between the pair of detection electrodes (12). 100). 上記検出電極(12)の上記幅は、2.0μm以上であることを特徴とする請求項1又は2に記載の粒子状物質検出センサ(1、100)。   The particulate matter detection sensor (1, 100) according to claim 1 or 2, wherein the width of the detection electrode (12) is 2.0 µm or more. 複数の上記検出電極(12)と電気絶縁性を有する複数の絶縁部材(13)とを交互に積層した積層部(11)を有していることを特徴とする請求項1〜3のいずれか一項に記載の粒子状物質検出センサ(1)。   The laminated part (11) which laminated | stacked the said some detection electrode (12) and the several insulating member (13) which has electrical insulation alternately, The one of Claims 1-3 characterized by the above-mentioned. The particulate matter detection sensor (1) according to one item. 上記検出電極(12)は、上記被堆積部(10)の表面に平膜状に形成されていることを特徴とする請求項1〜3のいずれか一項に記載の粒子状物質検出センサ(100)。   The particulate matter detection sensor (1) according to any one of claims 1 to 3, wherein the detection electrode (12) is formed in a flat film shape on the surface of the deposition portion (10). 100).
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