KR20160121991A

KR20160121991A - Ingot growing apparatus

Info

Publication number: KR20160121991A
Application number: KR1020150051949A
Authority: KR
Inventors: 박진섭; 김진노; 장준혁
Original assignee: (주)에스테크
Priority date: 2015-04-13
Filing date: 2015-04-13
Publication date: 2016-10-21
Also published as: KR101714751B1

Abstract

Presented is an ingot growing apparatus ingot. According to an embodiment of the present invention, provided is an ingot growing apparatus comprising: a main chamber which includes a crucible configured to accommodate raw material, and a heater configured to melt the raw material by heating the crucible; a dome chamber which is installed above the crucible; a tubular pull chamber which is installed above the dome chamber, and extends in an upward direction; and a door which includes a body located on an outer surface of the pull chamber and a hinge portion installed on one side of the body so as to rotatably support the body; wherein the hinge portion comprises a first member configured to be rotatable around a first rotation axis parallel to a direction in which the pull chamber extends, and a second member configured such that one side thereof is coupled to the first member and the other side thereof is coupled to the body so that the second member can be rotated around a second rotation axis parallel to the first rotation axis.

Description

[0001] INGOT GROWING APPARATUS [

The present invention relates to an ingot growing apparatus.

Generally, a single crystal ingot is manufactured by a Czochralski crystal growth method (CZ method). More specifically, a crucible provided in a hot zone region is filled with a solid raw material such as polysilicon, heated and melted by an electric heater to melt, and then a single crystal seed is hung from a seed connector and brought into contact with a melt Slowly rotate and raise. Then, the seed connector is pulled up in the order of a neck part, a shoulder part whose diameter increases, a cylindrical body part of a constant diameter, and finally a tail part whose diameter is reduced a single crystal ingot is obtained.

The ingot growing apparatus for growing a single crystal ingot in the above manner comprises a main chamber provided with a cooling means, a quartz crucible provided inside the main chamber for melting polysilicon, a graphite crucible for supporting a quartz crucible, A pedestal for supporting a crucible and a graphite crucible, an electrothermal heater for heating a crucible, a power supply means for supplying a large electric power to the electrothermal heater, a driving shaft for driving, lifting and lowering the crucible and a pedestal, A dome chamber installed above the main chamber, a gate valve and viewport installed in the dome chamber, a pull chamber installed above the dome chamber, and an ingot impression cable installed in the pull chamber. And a Seed Mechanism.

The ingot growing apparatus may further comprise vacuum means for maintaining the vacuum chamber in the pull chamber, the dome chamber and the main chamber, a cooling means for cooling the ingot, a sensing means for sensing the state required for the ingot growth, A control means, a measurement means, and the like.

However, in the conventional ingot growing apparatus, the door which can selectively see the inside of the pull chamber is installed at the center of the pull chamber, but it is difficult to completely seal the door and the pull chamber, so that it is difficult to maintain the vacuum in the pull chamber.

An embodiment of the present invention is to provide an ingot growing apparatus for keeping the inside of a chamber in a vacuum state.

An embodiment of the present invention is to provide an ingot growing apparatus capable of confirming whether or not a process of an ingot is smooth.

One embodiment of the present invention is to provide an ingot growing apparatus that facilitates cleaning in a chamber after the ingot process is completed.

According to an aspect of the present invention, there is provided a crucible comprising a main chamber including a crucible for containing a raw material and a heater for heating the crucible to melt the raw material, a dome chamber provided on the crucible, And a door including a tubular pull chamber extending in an upward direction, a body located on an outer surface of the pull chamber, and a hinge portion provided on one side of the body for rotatably supporting the body, wherein the hinge portion comprises: A first member rotatable about a first rotation axis parallel to an extending direction of the pull chamber, a first member coupled to the first member such that the first member is rotatable about a second rotation axis parallel to the first rotation axis, And a second member formed of a second material.

The ingot growing apparatus may further include an O-ring formed on one surface of the body to seal between the body and the outer surface of the pull chamber in a state where the body is closed on the outer surface of the pull chamber.

The ingot growing apparatus may be formed such that the other surface of the body facing the one surface of the first member is spaced apart from one surface of the first member.

The ingot growing apparatus may have a protruding wall protruding outwardly of the pull chamber along the periphery of the opening of the pull chamber outer surface on which the door is formed and an outer surface of the protruding wall corresponding to one surface of the body . &Lt; / RTI >

The ingot growing apparatus may have a flat surface on one side of the body.

The ingot growing apparatus may further include a pressing member installed on the first member and capable of pressing the other surface of the body.

The ingot growing apparatus may further include a coupling handle formed on the other side of the body so that the other side of the body is fixed to one side of the outer surface of the pull chamber.

The ingot growing apparatus according to an embodiment of the present invention can be kept in a vacuum state inside the pull chamber.

The ingot growing apparatus according to an embodiment of the present invention can increase the contact force with the pull chamber even when the door is not flat.

The ingot growing apparatus according to an embodiment of the present invention can confirm whether or not the ingot process progresses smoothly inside the pull chamber.

1 is a side view showing an ingot growing apparatus according to an embodiment of the present invention.
2 is a cross-sectional view illustrating a portion of an ingot growing apparatus according to an embodiment of the present invention.
3 is a perspective view illustrating a pull chamber of an ingot growing apparatus according to an embodiment of the present invention.
4 is a plan view showing a pull chamber of the ingot growing apparatus according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

1 is a side view showing an ingot growing apparatus according to an embodiment of the present invention. 2 is a cross-sectional view illustrating a portion of an ingot growing apparatus according to an embodiment of the present invention. 3 is a perspective view illustrating a pull chamber of an ingot growing apparatus according to an embodiment of the present invention. 4 is a plan view showing a pull chamber of the ingot growing apparatus according to an embodiment of the present invention. Hereinafter, the ingot growing apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. In the description of the ingot growing apparatus according to an embodiment of the present invention, the ingot growing apparatus will be described focusing on the constitution of the present invention, and the invention of the ingot growing apparatus according to the embodiment of the present invention The detailed description of the same configuration as that of the known configuration is omitted.

Referring to FIG. 1, an ingot growing apparatus according to an embodiment of the present invention includes a base 20, a main chamber 30, a dome chamber 90, a pull chamber 80, and a driving unit 40.

The base 20 is provided on the bottom surface on which the ingot growing apparatus 10 is placed to support the ingot growing apparatus. The base 20 may have a plurality of frames coupled together.

Referring to FIG. 1, a main chamber support 32 is provided on a base 20, and a main chamber 30 is installed on a main chamber support. Referring to FIG. 2, the main chamber 30 may have a cylindrical shape. In the main chamber 30, a crucible 33 for containing a raw material and a heater 31 for melting the raw material by heating the crucible 33 may be provided.

The dome chamber 90 is installed on the crucible 33. The dome chamber 90 may have a lower dome shape and a dome-shaped upper portion may have a cylindrical shape. A cooling device (not shown) for cooling the ingot 13 growing in the crucible 33 may be installed in the dome chamber 90. The cooling device may be formed so that the cooling water can circulate therein.

Referring to FIG. 1, a pull chamber 80 is installed at an upper portion of the dome chamber 90. The pull chamber 80 may have a tubular shape extending in the upward direction. 2, in the pull chamber 80, a growing ingot 13 passes inside the pull chamber 80 while rising along the seed cable 57. That is, the pull chamber 80 serves as a passage through which the ingot 13 can pass.

According to an embodiment of the present invention, a door 70 is installed in the pull chamber 80. The door 70 can be opened or closed by confirming the process of the ingot 13 when the ingot 13 passes through the pull chamber 80 or when the ingot 13 is recovered while the process is finished, As shown in FIG. A detailed description of the door will be given later.

Referring to FIG. 2, the driving unit 50 is installed at an upper portion of the pull chamber 80. The drive unit 50 may include a housing 51, a support roller 55, a drum 53, a drive motor 59, a seed cable 57, and a speed reducer (not shown). The driving unit 50 moves the seed cable 57 supported by the support roller 55. [

The housing 51 is installed on the upper side of the pull chamber 80, and the inside thereof is maintained in a vacuum state. The housing 51 may have a cylindrical shape.

The support roller 55 is installed inside the housing 51 and supports the seed cable 57. The support roller 55 may be cylindrical. A lift hole 52 is formed in the lower portion of the support roller 55 to raise and lower the seed cable 57. A seed cable 57 is rotated and engaged with the outer circumferential groove of the support roller 55. The seed cable 57 can be lowered to the upper portion of the melt 11 through the lift hole 52.

2, the seed cable 57 is wound around a plurality of spiral grooves formed on the surface of the drum 53. [ Is rotated in the outer circumferential groove of the support roller (55), and then descends to the top of the melt (11) through the lift hole (52). A seed 15 and a seed chuck (not shown) are installed at the end of the seed cable 57 to raise the ingot 13 to be grown. When the drive motor 59 rotates and the drum 53 rotates as the ingot 13 grows, the seed cable 57 is wound on the drum 53 and the ingot 13 is slowly raised.

Referring to FIG. 2, the drum 53 may be cylindrical. The drum 53 is installed inside the housing 51 in a vacuum state. The drum 53 is wound at one end of the seed cable 57 to raise the ingot 13. The drum 53 is driven by receiving driving force from a driving motor 59 provided outside the housing 51.

The seed cable 57 between the drum 53 and the ingot 13 is supported by the support roller 55. The seed cable 57 is wound from the drum 53 in the order of the support rollers 55 and extends to the dome chamber 90 so that the ingot 13 is connected to the end.

A decelerator (not shown) is installed between the drum 53 and the drive motor 59. The speed reducer adjusts the speed of the ingot (13) wound by the seed cable (57) so that the ingot (13) rising does not hit the pull chamber (80) and is not damaged.

Referring to FIG. 3, in an ingot growing apparatus according to an embodiment of the present invention, the door 70 may include a body 71 and a hinge portion 73. The door (70) is located on the outer surface of the pull chamber (80). The door 70 is provided at one side of the door 70, for example, at the center of the body 71 so as to check whether the ingot 13 is smoothly progressed inside the pull chamber 80, ). The transparent window part is made of a transparent material, and the process of the ingot 13 can be confirmed through the transparent window part.

3 and 4, one surface 71a of the body, for example, the surface facing the pool chamber, may be plane. At this time, an O-ring 83 is installed on one surface 71a of the body along the circumference of the one surface 71a. The O-ring 83 seals between the body 71 and the outer surface of the pull chamber 80 in a state where the door 70 is closed, so that the inside of the pull chamber maintains a vacuum state.

According to an embodiment of the present invention, a protrusion wall 82 is formed in an opening 80a on the outer surface of the pull chamber 80 where the door 70 is formed. The protruding wall 82 is formed to protrude outwardly of the pull chamber 80 along the opening 80a. The outer surface of the protruding wall 82 may have a rectangular plane corresponding to a face 71a of the body, that is, a face facing the pull chamber 80. [

3, a hinge portion 73 is formed at one side of the body, for example, at the right corner of the body, as viewed in Fig. 3, so as to rotatably support the body 71 with respect to the outer surface of the pull chamber 80. [ Respectively. According to an embodiment of the present invention, the hinge portion 73 may include a first member 77 and a second member 81.

More specifically, the first member 77 is rotatable about a first rotation axis C1, which is provided at the right corner of the body and is parallel to the extending direction of the pull chamber 80. The first member 77 has a hexahedral shape and a pin member 75 is provided on one side of the first member so that the first member 77 can rotate about the pin member 75. At this time, the pin member 75 becomes the first rotation shaft. The first member 77 can also engage with the fixing member 79.

3, the fixing member 79 is fixedly coupled to the side surface of the projection wall 82. As shown in Fig. The fixing member 79 and the first member 77 are connected to each other so that the first member 77 may rotate about the first rotation axis C1 and be perpendicular to the horizontal surface of the protrusion wall 82 or may be horizontal .

3, the first member 77 rotates around the first rotation axis C1 so that the body 71 rotates about the first rotation axis C1 to be away from the protrusion wall 82. As shown in FIG. The body 71 rotates about the first rotation axis C1 to selectively open and close the opening 80a.

The second member 77 is provided at the right corner of the body 71 and can rotate about the second rotation axis C2 formed in parallel with the extending direction of the pull chamber 80. [ The second member 81 may be made of at least one member having a hexahedral shape. A pin member 78 is provided at the center of the second member 81 to rotate about the pin member 78. That is, the pin member 78 becomes the second rotation axis C2.

3 and 4, the other surface 71b of the body facing the one surface of the first member 77 is formed to be spaced apart from one surface 81a of the second member. This is because the space 86 must be formed between the second member 81 and the body 71 so that the second member 81 can rotate. When the second member 81 rotates with respect to the first member 77, one surface 71a of the body can be brought into close contact with the protruding wall 82.

3, the pressing member 85 is installed on the first member 77 and presses the other surface of the body 71. As shown in Fig. The pressing member 85 may be a screw, a fixing pin, a bolt, or the like. The urging member 85 urges the first member 81 against the body 71 so that the contact between the body 71 and the O-ring 83 for sealing between the body 71 and the outer surface of the pull chamber 80 .

3, the coupling handle 87 may be formed on the other side of the body 71 so that the other side of the body 71 is fixed to one side of the outer surface of the pull chamber 80. The door 70 can selectively open and close the opening 80a of the pull chamber by the engaging tab 87. [

The engaging tab 87 is provided on the side surface of the protruding wall 82 and extends in the direction away from the body 71 about a third rotational shaft (not shown) provided on the side surface of the protruding wall 82, It rotates in a direction approaching.

When the coupling handle 87 rotates in a direction away from the body 71, the door 70 is opened and closed, and the door 70 is closed when the coupling handle 87 is rotated in a direction approaching the body 71. When the door 70 is closed, the engaging knob 87 presses the other surface 71b of the body 71. This allows contact between the body 71 and the O-ring 83 for sealing between the body 71 and the outer surface of the pull chamber 80.

The ingot growing apparatus 10 according to an embodiment of the present invention is provided with a door 70 in the center of the pull chamber 80 in which the inside of the pull chamber 80 can be seen. The door 70 includes a first member 77 and a second member 81 and has a double hinge portion so as to be rotatable about the first rotation axis C1 and the second rotation axis C2, The contact force between the door 70 and the O-ring 83 installed between the door 70 and the pull chamber 80 is increased. Thereby completely sealing the gap between the door 70 and the pull chamber 80 so that the pull chamber 80 can maintain the vacuum.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

10: ingot growing apparatus 11: melt
13: ingot 15: seed
20: Base 30: Main chamber
31: heater 32: main chamber support
33: crucible 50:
51: housing 52: lift hole
53: drum 55: support roller
57: Seed cable 59: Driving motor
70: Door 71: Body
71a: one surface of the body 71b:
73: hinge part 75: pin member
C1: first rotating shaft 77: first member
C2: second rotation shaft 79: fixing member
80: full chamber 80a: opening
81: second member 81a: one surface of the second member
82: protruding wall 83: O-ring
85: pressing member 86: space
87: engaging knob 90: dome chamber

Claims

A main chamber including a crucible for containing a raw material and a heater for heating the raw material to melt the raw material;
A dome chamber installed at an upper portion of the crucible;
A tubular pull chamber provided on the upper portion of the dome chamber and extending upward,
And a door including a body positioned on an outer surface of the pull chamber and a hinge portion provided on one side of the body for rotatably supporting the body,
The hinge portion
A first member rotatable about a first rotation axis parallel to an extending direction of the pull chamber;
And a second member having one side coupled to the first member and the other side coupled to the body so as to be rotatable about a second rotation axis parallel to the first rotation axis.

The method according to claim 1,
And an O-ring formed on one surface of the body to seal between the body and the outer surface of the pull chamber in a state where the body is closed on the outer surface of the pull chamber.

The method according to claim 1,
And the other surface of the body facing the one surface of the first member is spaced apart from one surface of the second member.

The method according to claim 1,
A protruding wall protruding outwardly of the pull chamber is formed in the opening of the outer surface of the pull chamber where the door is formed,
And an outer surface of the protruding wall corresponds to one surface of the body.

5. The method of claim 4,
Wherein one surface of the body is flat.

6. The method of claim 5,
And a pressing member installed on the first member and capable of pressing the other surface of the body.

The method according to claim 1,
And an engaging portion formed on the other side of the body so that the other side of the body is fixed to one side of the outer surface of the pull chamber.