KR20160096748A - The capacitance type humidity sensor and making method thereof - Google Patents

The capacitance type humidity sensor and making method thereof Download PDF

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Publication number
KR20160096748A
KR20160096748A KR1020150017844A KR20150017844A KR20160096748A KR 20160096748 A KR20160096748 A KR 20160096748A KR 1020150017844 A KR1020150017844 A KR 1020150017844A KR 20150017844 A KR20150017844 A KR 20150017844A KR 20160096748 A KR20160096748 A KR 20160096748A
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KR
South Korea
Prior art keywords
roll
layer
type
electrode layer
shape
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Application number
KR1020150017844A
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Korean (ko)
Inventor
장성필
최교상
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인하대학교 산학협력단
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Priority to KR1020150017844A priority Critical patent/KR20160096748A/en
Publication of KR20160096748A publication Critical patent/KR20160096748A/en

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process

Abstract

A capacitive humidity sensor is disclosed. The capacitive humidity sensor comprises a substrate; A lower electrode layer formed on the substrate; A roll-type sensing layer formed on the lower electrode layer and including a predetermined shape that is continuously wound up while being wound up; And a roll-type upper electrode layer formed in the same shape as the roll-type moisture-absorbing layer and overlying the roll-type moisture-absorbing layer.

Description

[0001] The present invention relates to a capacitance type humidity sensor and a manufacturing method thereof,

The present invention relates to a capacitive humidity sensor. And more particularly, to a capacitive humidity sensor of a predetermined shape that is continuously wound while being increased.

With the development of science and industry and the improvement of the quality of human life, there has been a demand for a pleasant environment. Humidity is a very important factor in detecting, measuring, and controlling the surrounding environment so that humans can live their life in a pleasant environment in accordance with this demand.

Humidity has an important role as an environmental factor in industry as well as in everyday life. It is also a field that demands humidity control in various industries such as automobile, medical equipment, agriculture, semiconductor industry, materials industry, meteorology, HVAC, It is growing rapidly. Each industry requires high sensitivity to humidity measurements, low hysteresis, long stability, and high accuracy.

In this regard, humidity sensors, which are widely used today, utilize changes in capacitance or material resistance.

1 is a view showing a capacitive humidity sensor disclosed in the prior art Patent No. 10-2014-0125904.

Referring to FIG. 1, in the capacitance type humidity sensor 10 using a change in capacitance, a polymer sensing layer exists between the lower electrode 11 and the upper electrode 12. The capacitance type humidity sensor has a wide measurement width and a fast reaction speed and has a linear output. However, since the manufacturing process is relatively complicated, the manufacturing cost is high, it is difficult to manufacture, the miniaturization is limited, and the response speed is slow there was.

At this time, the capacitance type humidity sensor has a sensing polymer layer formed between the electrodes at both ends, and the change in the amount of charge induced across the electrodes depends on the change in the dielectric constant and the change in induced charge due to the humidity of the sensing polymer layer And is a sensor for measuring the humidity by detecting a difference in capacitance due to a change in dielectric constant according to humidity.

On the other hand, FIG. 2 is a view showing a resistance type humidity sensor disclosed in the prior art Patent No. 10-2014-0125904.

Referring to FIG. 2, the conventional resistance type humidity sensor 20 is a sensor for measuring humidity using a change in electric resistance in which the electrode 22 formed on the polymer humidity layer 21 changes according to humidity. And the response speed is high, linear humidity measurement is unstable, measurement of low humidity and high humidity is difficult, and temperature variation width is large.

On the other hand, microprocessing technology enables miniaturization and manufacturing of sensors with high performance at a reasonable price. It is used extensively because it has advantages such as cost reduction, power consumption reduction, small size, low weight, compatibility with other electric devices, and the like, which are manufactured using microelectromechanical systems (MEMS) Are also being studied extensively due to miniaturization, weight reduction, high output, easy mass production and ease of low-cost fabrication.

In addition, a wide measurement range and linear output characteristics are important for humidity sensors. Therefore, it is necessary to develop capacitive humidity sensor with high reliability and precision using MEMS process.

SUMMARY OF THE INVENTION The present invention is directed to a capacitive humidity sensor that can easily absorb or desorb moisture in the air by patterning the upper electrode layer and the sensing layer in a roll shape using a MEMS process and a method of manufacturing the same.

Another object of the present invention is to provide a capacitive humidity sensor which is easy to use where a curved line is required by using a flexible substrate, and a method of manufacturing the same.

Another object of the present invention is to provide a capacitive humidity sensor and a method of manufacturing the same that provide cost reduction, power consumption reduction, small size, low weight, and high compatibility with other electric devices using a MEMS process have.

It is another object of the present invention to provide a humidity sensor having a highly sensitive sensitivity by facilitating contact of moisture by hydrophilizing the moisture layer of the moisture layer, and a method of manufacturing the same.

According to an aspect of the present invention, there is provided a capacitive humidity sensor comprising: a substrate;

A lower electrode layer formed on the substrate; A roll-type sensing layer formed on the lower electrode layer and including a predetermined shape that is continuously wound up, and a roll-type upper electrode layer formed on the roll-type sensing layer in the same shape as the roll-type sensing layer.

In this case, the predetermined shape may be any one of a roll shape having a polygonal shape and a roll shape having a circular shape.

In addition, the substrate may be formed of a material selected from the group consisting of polyurethane acrylate, polyethylene glycol diacrylate, polystyrene, polymethyl methacrylate, polyimide, polyetherimide, Polyether imide, polycarbonate, polyethylene, polyether sulfone, polyethylene naphthalate, polyethyleneterephthalate, polypropylene, polyester, and the like. And polydimethyl siloxanes (PDMS). [0033] The term " polydimethylsiloxane "

The roll-type layer may be formed of a material selected from the group consisting of polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyethylene glycol (PEG), polyimide or cellulose. Based polymer layer selected from the group consisting of polyimide-based polymers. The roll-type moisture-sensitive layer may be hydrophilized through ultraviolet surface modification or plasma surface modification.

The lower electrode layer may be formed on the substrate 100 by using an e-beam evaporator, thermal evaporation, laser molecular beam epitaxy, pulsed laser deposition, or sputtering. ≪ / RTI >

The roll-type sensing layer and the roll-type upper electrode layer may be patterned into any one of a roll-like shape in a polygonal shape and a roll-shape in a circular shape.

According to an aspect of the present invention, there is provided a method of manufacturing a capacitive humidity sensor, including: forming a lower electrode layer on a substrate; Forming a sensing layer on the lower electrode layer; Patterning the moisture-sensitive layer in a roll shape using photosensitive polyimide forming the humidity layer; Forming a photoresist on the exposed lower electrode layer due to the patterning of the patterned roll-type layer and the roll-type layer; Patterning the photoresist so that the roll-shaped layer is exposed; Depositing an upper electrode layer on the exposed roll-type wetting layer and the photoresist remaining after the patterning; And removing the photoresist and the upper electrode layer deposited on the photoresist at the same time to form a rolled top electrode layer of the same type as the rolled top layer on the top of the rolled bottom layer, The shape of the upper electrode layer formed on the upper portion of the roll-type moisture-sensitive layer may be any one of a roll-like shape of a polygonal shape and a roll-shape of a circular shape.

The polygonal roll-shaped and circular-shaped rolls may be wound while continuously increasing a predetermined shape.

According to the capacitance type humidity sensor of the present invention, moisture in the atmosphere is easily adsorbed or desorbed, and it is convenient to use in a curve where necessary, and it is possible to reduce costs, reduce power consumption, It is possible to provide a humidity sensor having a very high sensitivity.

1 is a view showing a conventional capacitive humidity sensor.
2 is a view showing a conventional resistance type humidity sensor.
3 is a plan view showing each layer of the humidity sensor according to one embodiment of the present invention.
4 is a side view showing each layer of the humidity sensor according to one embodiment of the present invention.
5 is a perspective view illustrating a structure of a humidity sensor according to an embodiment of the present invention.
6A to 6F are process flowcharts for explaining a method of manufacturing a humidity sensor according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals are used to designate the same or similar components throughout the drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather obvious or understandable to those skilled in the art.

FIG. 3 is a plan view showing each layer of the humidity sensor according to one embodiment of the present invention, and FIG. 4 is a side view showing each layer of the humidity sensor according to an embodiment of the present invention.

3 and 4, the humidity sensor may include a substrate 100, a lower electrode layer 200, a roll-shaped wetting layer 300, and a rolled upper electrode layer 400. At this time, the humidity sensor may include a roll-type sensing layer 300 and a roll-type upper electrode layer 400 having a predetermined shape.

As used herein, the term "roll type" may refer to a meander type. Since the bean-type sensor increases the contact area with the air, the sensitivity of the sensor can be improved and the adsorption and desorption of moisture can be advantageously improved, thereby improving hysteresis and response time.

First, the substrate 100 is a flexible substrate. The substrate 100 may be formed of a material selected from the group consisting of polyurethane acrylate, polyethylene glycol diacrylate, polystyrene, polymethyl methacrylate, Polyimide, polyether imide, polycarbonate, polyethylene, polyether sulfone, polyethylene naphthalate, polyethylene terephthalate, polypropylene, , Polyesters, and polydimethylsiloxanes (PDMS). [0033] The term " polyimide siloxane "

At this time, according to an embodiment of the present invention, it is preferable that the substrate 100 is made of a polydimethylsiloxane substrate, which is an elastomer having high durability and does not cause damage even after many uses.

Next, the lower electrode layer 200 is formed on the substrate 100, and can output an electric signal corresponding to the capacitance together with the upper electrode layer 300 to be described later.

The lower electrode layer 200 may be formed by an electron beam evaporation method, a thermal evaporation method, a laser molecular beam epitaxy method, a pulsed laser deposition method or a sputtering method May be deposited on the substrate.

The lower electrode layer 200 is preferably made of a metal material having excellent conductivity such as aluminum gold or platinum.

Next, the roll-type sensing layer 300 is formed on the lower electrode layer 200 and may include a predetermined shape that is continuously wound up. In this case, the roll type may be any one of a roll type having a polygonal shape and a roll type having a circular shape. Preferably, it may be a roll-shaped rectangular shape.

Here, according to one embodiment of the present invention, the humidity sensing layer 300 is formed by coating a polyimide-based polymer on the lower electrode layer 200. More specifically, the roll-type sensing layer 300 may be formed of a material selected from the group consisting of polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyethylene glycol (PEG), polyimide Based polymer selected from the group consisting of cellulose and cellulose.

Preferably, the roll-type sensing layer 300 may be polyimide. Polyimide has excellent heat resistance, is chemically stable, and can be used at high temperatures. In addition, the sensitivity to humidity is excellent according to the change of humidity.

In addition, the roll-type sensing layer 300 is hydrophilized through ultraviolet surface modification or plasma surface modification. That is, the roll-type sensing layer 300 is a polymer material having hydrophilicity. Such a polymer material is easy to reproduce the sensor characteristics because of the absorptivity of the material itself. That is, the capacitance type humidity sensor of the present invention can provide a humidity sensor having a very high sensitivity by hydrophilizing the moisture-sensitive surface of the moisture-sensitive layer and facilitating contact of moisture.

In addition, the roll-type moisture-absorbing layer 300 absorbs moisture from the outside, and the dielectric constant is changed. Thus, the roll-type sensing layer 300 can measure the humidity by sensing a difference in capacitance between the electrodes in accordance with the change in the dielectric constant according to the relative humidity of the roll-type sensing layer 300.

Next, the roll-type upper electrode layer 400 is formed on the roll-type moisture-sensing layer 300 and may include the same formation as the roll-type moisture-sensing layer 300. In this case, the roll type may be any one of a roll type having a polygonal shape and a roll type having a circular shape. Preferably, it may be a roll-shaped rectangular shape. The roll-type upper electrode layer 400 is formed of a material including a metal having a good conductivity as in the lower electrode layer 200.

5 is a perspective view illustrating a structure of a humidity sensor according to an embodiment of the present invention.

5, the humidity sensor may include a substrate 100, a lower electrode layer 200, a roll-shaped wetting layer 300, and a rolled upper electrode layer 400. At this time, the humidity sensor may include a roll-type sensing layer 300 and a roll-type upper electrode layer 400 having a predetermined shape.

A lower electrode layer 200 having a size smaller than or equal to that of the substrate 100 is disposed on the substrate 100 and a roll-type moisture-sensing layer 300 is formed on the lower electrode layer 200, And a roll-type upper electrode layer 400 is disposed on the roll-type sensing layer 300.

At this time, the roll-type sensing layer 300 and the roll-type upper electrode layer 400 may overlap in the same shape. More specifically, the roll-type wetting layer 300 and the roll-type upper electrode layer 400 are formed in a predetermined shape that is continuously wound up while being wound, and the predetermined shape may be a rolled shape of a polygonal shape and a roll shape. Preferably, the predetermined shape may be a roll-shaped rectangular shape.

Hereinafter, each of the elements constituting the humidity sensor will be described. First, the substrate 100 is a flexible substrate. The substrate 100 may be made of polyurethane acrylate, polyethylene glycol diacrylate, polystyrene, Polyimide, polyetheretherketone, polymethyl methacrylate, polyimide, polyether imide, polycarbonate, polyethylene, polyether sulfone, polyethylene naphthalate, At least one composite selected from the group consisting of polyethylene terephthalate, polypropylene, polyester and polydimethyl siloxane (PDMS) can be produced.

Next, the lower electrode layer 200 may be formed by an electron beam evaporation method, a thermal evaporation method, a laser molecular beam epitaxy method, a pulsed laser deposition method or a sputtering method May be deposited on the substrate.

The lower electrode layer 200 is preferably made of a metal material having excellent conductivity such as aluminum gold or platinum.

Next, the roll-type sensing layer 300 may be formed of a material such as polymethyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyethylene glycol (PEG), polyimide or cellulose cellulose, and the like. Preferably, the roll-type sensing layer 300 may be polyimide.

In addition, the roll-type sensing layer 300 is hydrophilized through ultraviolet surface modification or plasma surface modification. That is, the roll-type sensing layer 300 is a polymer material having hydrophilicity.

Next, the roll-type upper electrode layer 400 is formed of a material containing a metal having excellent conductivity as in the lower electrode layer 200.

Further, the humidity sensor according to the embodiment of the present invention may be implemented in the form of a program command that can be executed through various computer means and recorded in a computer-readable medium.

Further, a method of manufacturing the humidity sensor according to the present invention will be described below.

Particularly, in the method of manufacturing the humidity sensor according to the present invention, the humidity layer can be patterned using the photosensitive polyimide property. Further, the upper electrode is patterned using a lift-off process or an etching process. can do.

In the lift-off process, a photoresist is spin-coated on the patterned layer and patterned. Then, a metal to be an upper electrode is deposited on the upper portion of the exposed layer and the remaining photoresist due to the patterning, And removing the remaining photoresist.

The etching process refers to a process of depositing a metal on the patterned layer, patterning the photoresist thereon, and then fixing the pattern with the etching solution.

Hereinafter, a method of manufacturing a humidity sensor according to an embodiment of the present invention will be described in detail with reference to FIGS. 6A to 6F. FIG. In this case, the humidity sensor manufacturing method of Figs. 6A to 6F is a method using a lift-off process.

First, a lower electrode layer 200 is formed on a substrate 100. More specifically, the lower electrode layer 200 may be formed on the substrate 100 smaller than the substrate 100 using an etching or lift-off process. At this time, the lower electrode layer 200 is preferably formed of a material containing a metal having excellent conductivity such as aluminum, gold, and platinum.

Next, the humidity sensing layer 30 is formed on the lower electrode layer 200. More specifically, in the humidity sensing layer 30, a polyimide-based polymer solution is spin-coated on the entire surface of the lower electrode layer 200 in a micro-thickness. 6A shows a state in which the lower electrode layer 200 and the moisture-sensitive layer 30 are formed on the substrate 100. FIG.

Next, the humidity layer 30 is patterned using a photosensitive polyimide (see FIG. 6B). Thus, the humidity layer 30 does not require a separate etching material. At this time, the humidity layer has a predetermined shape that is wound up while being continuously enlarged, and the predetermined shape may be a rolled shape of a rectangular shape or a roll shape of a circular shape.

Next, referring to FIG. 6C, a photoresist 1 is formed to cover the entire surface including the upper portion of the lower electrode layer 200 exposed due to the patterning of the patterned roll-type moisture layer 300 and the moisture-sensitive layer.

Next, the photoresist 1 is patterned to expose the patterned roll-type layer 300 (see FIG. 6D). That is, the photoresist portions formed on the roll-type sensing layer 300 are etched and removed.

Next, an upper electrode layer 40 is deposited on the exposed roll-type wetting layer 300 and the photoresist 1 remaining after patterning (see FIG. 6E).

Finally, the photoresist 1 and the top electrode layer deposited on top of the photoresist are simultaneously removed (see FIG. 6F). The photoresist is removed by irradiating light, and the upper electrode layer portion formed on the photoresist is removed together. Thus, a desired top electrode layer shape can be obtained. That is, the photoresist 1 and the upper electrode layer deposited on the photoresist may be simultaneously removed to form a roll-type upper electrode layer of the same type as the roll-type wetting layer 300 on the roll-type wetting layer 300.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation in the embodiment in which said invention is directed. It will be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the scope of the appended claims.

100: substrate
200: lower electrode layer
300: roll-type sediment layer
400: rolled upper electrode layer

Claims (10)

Board;
A lower electrode layer formed on the substrate;
A roll-type sensing layer formed on the lower electrode layer and including a predetermined shape that is continuously wound up while being wound up;
A roll-shaped upper electrode layer formed in the same shape as the roll-
The humidity sensor comprising:
The method according to claim 1,
Wherein the preset shape is any one of a roll shape of a polygonal shape and a roll shape of a circular shape.
3. The method of claim 2,
Wherein the predetermined shape is a rectangular shape.
The method according to claim 1,
The substrate may be formed of a material selected from the group consisting of polyurethane acrylate, polyethylene glycol diacrylate, polystyrene, polymethyl methacrylate, polyimide, polyetheretherketone, imide, polycarbonate, polyethylene, polyether sulfone, polyethylene naphthalate, polyethylene terephthalate, polypropylene, polyester and polydimethylsiloxane. Wherein the at least one composite is at least one composite selected from the group consisting of polydimethyl-siloxanes (PDMS).
The method according to claim 1,
The roll-type moisture-sensitive layer may be formed of poly methyl methacrylate (PMMA), polyvinyl alcohol (PVA), polyethylene glycol (PEG), polyimide or cellulose Wherein the layer is a polyimide-based polymer selected from the group consisting of polyimide-based polymers.
The method according to claim 1,
Wherein the roll-type moisture layer is subjected to hydrophilic treatment through ultraviolet surface modification or plasma surface modification.
The method according to claim 1,
The lower electrode layer may be formed on the substrate 100 by using an e-beam evaporator, thermal evaporation, laser molecular beam epitaxy, pulsed laser deposition, or sputtering. Is deposited on the substrate.
The method according to claim 1,
Wherein the roll-type sensing layer and the roll-type upper electrode layer are patterned in either a roll-like shape having a polygonal shape or a roll-shaped shape having a circular shape.
Forming a lower electrode layer on the substrate;
Forming a sensing layer on the lower electrode layer;
Patterning the moisture-sensitive layer in a roll shape using photosensitive polyimide forming the humidity layer;
Forming a photoresist on the exposed lower electrode layer due to the patterning of the patterned roll-type layer and the roll-type layer;
Patterning the photoresist so that the roll-shaped layer is exposed;
Depositing an upper electrode layer on the exposed roll-type wetting layer and the photoresist remaining after the patterning; And
Removing the photoresist and the upper electrode layer deposited on the photoresist at the same time to form a rolled top electrode layer of the same type as the rolled layer on the top of the rolled layer,
Wherein the roll-type moisture layer and the upper electrode layer formed on the roll-type moisture layer are any one of a polygonal roll type and a circular roll type.
10. The method of claim 9,
Wherein the polygonal roll-shaped and circular-shaped rolls are wound while continuously increasing a predetermined shape.

KR1020150017844A 2015-02-05 2015-02-05 The capacitance type humidity sensor and making method thereof KR20160096748A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112710706A (en) * 2020-12-08 2021-04-27 北京智芯微电子科技有限公司 Humidity sensor
CN113340950A (en) * 2021-05-28 2021-09-03 苏州锐光科技有限公司 Capacitive humidity sensor and manufacturing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112710706A (en) * 2020-12-08 2021-04-27 北京智芯微电子科技有限公司 Humidity sensor
CN113340950A (en) * 2021-05-28 2021-09-03 苏州锐光科技有限公司 Capacitive humidity sensor and manufacturing method thereof

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