JP2007139447A - Moisture permeability measuring instrument of thin film and moisture permeability measuring method - Google Patents

Moisture permeability measuring instrument of thin film and moisture permeability measuring method Download PDF

Info

Publication number
JP2007139447A
JP2007139447A JP2005330129A JP2005330129A JP2007139447A JP 2007139447 A JP2007139447 A JP 2007139447A JP 2005330129 A JP2005330129 A JP 2005330129A JP 2005330129 A JP2005330129 A JP 2005330129A JP 2007139447 A JP2007139447 A JP 2007139447A
Authority
JP
Japan
Prior art keywords
film
moisture permeability
electrode film
moisture
lower electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005330129A
Other languages
Japanese (ja)
Inventor
Keiichi Miyairi
圭一 宮入
Eiji Ito
栄次 伊東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinshu University NUC
Original Assignee
Shinshu University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinshu University NUC filed Critical Shinshu University NUC
Priority to JP2005330129A priority Critical patent/JP2007139447A/en
Publication of JP2007139447A publication Critical patent/JP2007139447A/en
Pending legal-status Critical Current

Links

Images

Abstract

<P>PROBLEM TO BE SOLVED: To provide a moisture permeability measuring instrument capable of precisely measuring the moisture permeability of a thin film, and a moisture permeability measuring method of the thin film. <P>SOLUTION: The moisture permeability measuring instrument 1 has the lower electrode film 3 provided on an insulating substrate 5, the moisture absorbable film 2 provided so as to cover at least a part of the lower electrode film 3 and the upper electrode film 4 facially opposed to at least a part of the lower electrode film 3 so as to hold the moisture absorbable film 2 and insulated from the lower electrode film 3. A capacity meter 7 is connected across the lower electrode film 3 and the upper electrode film 4 and the moisture permeability of the sample film 6 to be measured covering the moisture absorbable film 2 is measured by the capacity meter 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、吸湿による静電容量変化から薄膜の透湿度を測定する装置、及び透湿度測定方法に関するものである。   The present invention relates to an apparatus for measuring the moisture permeability of a thin film from a change in capacitance due to moisture absorption, and a moisture permeability measuring method.

電気電子部品や電化製品は、水分や酸素の侵入を防止するために表面コーティングがなされている。該コーティング膜の防水、防湿性能は、コーティング膜の透湿度を測定することで評価できる。該透湿度を測定する手段の一例として、静電容量型湿度センサが利用できる。   Electrical and electronic parts and electrical appliances are surface-coated to prevent moisture and oxygen from entering. The waterproof and moistureproof performance of the coating film can be evaluated by measuring the moisture permeability of the coating film. As an example of means for measuring the moisture permeability, a capacitive humidity sensor can be used.

特許文献１にはポリイミド樹脂を利用した静電容量型湿度センサが示されている。一方、特許文献２には感湿膜にフッ素系有機化合物を利用した静電容量式湿度センサが、特許文献３にはフッ素化ポリイミド材料が示されている。   Patent Document 1 discloses a capacitance type humidity sensor using polyimide resin. On the other hand, Patent Document 2 discloses a capacitance type humidity sensor using a fluorine-based organic compound as a moisture sensitive film, and Patent Document 3 discloses a fluorinated polyimide material.

特開２００２−００５８６７号公報JP 2002-005867 A 特開２００１−２４９０９９号公報JP 2001-249099 A 特開２０００−０２６３８０号公報JP 2000-026380 A

しかし、従来の湿度センサでは感度が低すぎて、コーティング膜の透湿度を精密に測定できていないのが現状である。   However, the conventional humidity sensor has a sensitivity that is too low to accurately measure the moisture permeability of the coating film.

本発明は、薄膜の透湿度を精度よく測定できる装置、およびその測定方法を提供することを目的とする。   An object of this invention is to provide the apparatus which can measure the water vapor transmission rate of a thin film accurately, and its measuring method.

前記の目的を達成するためになされた、特許請求の範囲の請求項１に記載された発明は、絶縁基板上に下部電極膜、該下部電極膜の少なくとも一部を覆うように吸湿性膜、および該下部電極膜の少なくとも一部と該吸湿性膜を挟んで面的に対向し、かつ該下部電極膜とは絶縁された上部電極膜を有し、該下部電極膜と該上部電極膜との間に容量計が接続され、該吸湿性膜を覆う被測定試料膜の透湿度を、容量計で測定することを特徴とする透湿度測定装置である。   In order to achieve the above object, the invention described in claim 1 includes a lower electrode film on an insulating substrate, a hygroscopic film so as to cover at least a part of the lower electrode film, And an upper electrode film that is at least partly opposed to the lower electrode film across the hygroscopic film and is insulated from the lower electrode film, the lower electrode film, the upper electrode film, A moisture meter is connected to each other, and the moisture permeability of the sample film to be measured covering the hygroscopic membrane is measured with a capacitance meter.

請求項２に記載された発明は、請求項１に記載された透湿度測定装置であって、該上部電極膜が水分透過性の電極膜であることを特徴とする。   The invention described in claim 2 is the moisture permeability measuring apparatus described in claim 1, characterized in that the upper electrode film is a water-permeable electrode film.

請求項３に記載された発明は、請求項１に記載された透湿度測定装置であって、該吸湿性膜がポリイミド膜であることを特徴とする。   The invention described in claim 3 is the moisture permeability measuring apparatus described in claim 1, wherein the hygroscopic film is a polyimide film.

請求項４に記載された発明は、請求項１に記載された透湿度測定装置であって、該吸湿性膜がフッ素化ポリイミド膜であることを特徴とする。   The invention described in claim 4 is the moisture permeability measuring apparatus described in claim 1, wherein the hygroscopic film is a fluorinated polyimide film.

請求項５に記載された発明は、絶縁基板上に下部電極膜、該下部電極膜の少なくとも一部を覆うように吸湿性膜、および該下部電極膜の少なくとも一部と該吸湿性膜を挟んで面的に対向し、かつ該下部電極膜とは絶縁された上部電極膜を有する湿度センサの、該吸湿性膜を被測定試料膜で覆い、該下部電極膜と該上部電極膜との間の容量を測定し、その容量から被測定試料膜の透湿度を換算して算出することを特徴とする透湿度測定方法である。   According to a fifth aspect of the invention, there is provided a lower electrode film on an insulating substrate, a hygroscopic film so as to cover at least a part of the lower electrode film, and at least a part of the lower electrode film and the hygroscopic film interposed therebetween A humidity sensor having an upper electrode film that is face-to-face and insulated from the lower electrode film, the hygroscopic film is covered with a sample film to be measured, and the gap between the lower electrode film and the upper electrode film is Is measured by converting the moisture permeability of the sample film to be measured from the capacity, and calculating the moisture permeability.

請求項６に記載された発明は、請求項５に記載された透湿度測定方法であって、前記容量から被測定試料膜の透湿度を換算して算出する式が   The invention described in claim 6 is the moisture permeability measurement method described in claim 5, wherein an equation for calculating the moisture permeability of the sample film to be measured from the capacity is calculated.

Figure 2007139447
Figure 2007139447
Figure 2007139447
Figure 2007139447

（数１中、Ｄｗは透湿度、Δｔは測定時間、ｄは膜厚、εｗは水の比誘電率、εｐは乾燥時の薄膜の比誘電率、εｓは吸湿時の薄膜の比誘電率、Ｃは吸湿時の薄膜の静電容量、Ｃｐは乾燥時の薄膜の静電容量）
であることを特徴とする。 (In a few 1, D w moisture permeability, Delta] t is the time measured, d is the film thickness, epsilon w is the relative permittivity of water, epsilon p is the relative dielectric constant of the thin film during drying, epsilon s is the thin film at the time of moisture absorption Dielectric constant, C is the capacitance of the thin film when absorbing moisture, and C p is the capacitance of the thin film when drying)
It is characterized by being.

請求項７に記載された発明は、請求項５に記載された透湿度測定方法であって、被測定試料膜に前記湿度センサを少なくとも２個設け、うち１個は透湿度が既知の吸湿性膜を用いた標準センサを使用して、キャリブレーションを行うことを特徴とする。   The invention described in claim 7 is the moisture permeability measuring method described in claim 5, wherein at least two of the humidity sensors are provided on the sample film to be measured, one of which is a hygroscopic material having a known moisture permeability. Calibration is performed using a standard sensor using a film.

本発明の透湿度測定装置は、10−3〜10−5g／m２・dayという高感度で薄膜の透湿度を測定することができる。該透湿度測定装置は薄膜を透過する水分が微量でも精度よく測定するので、薄膜の防水、防湿効果を容易に評価できる。 The moisture permeability measuring apparatus of the present invention can measure the moisture permeability of a thin film with high sensitivity of 10 −3 to 10 −5 g / m 2 · day. Since the moisture permeation measuring apparatus accurately measures even a small amount of moisture permeating the thin film, the waterproof and moisture proof effect of the thin film can be easily evaluated.

本発明の透湿度測定方法によれば、高価な装置を必要とせず、簡便な作業で精密に薄膜の透湿度を測定できる。   According to the moisture permeability measuring method of the present invention, it is possible to accurately measure the moisture permeability of a thin film by a simple operation without requiring an expensive device.

本発明の透湿度測定装置及び測定方法を、図面を参照しながら詳細に説明する。   The moisture permeability measuring apparatus and measuring method of the present invention will be described in detail with reference to the drawings.

図１は、本発明の透湿度測定装置１の一実施例の斜視図を、図２はその断面図を示したものである。絶縁基板５に下部電極膜３を帯状に形成し、その上に、該下部電極膜３の少なくとも一部が覆われるように吸湿性膜２をコーティングする。次いで、該吸湿性膜２を挟んで少なくとも下部電極膜３の一部と面的に対向するように、上部電極膜４を帯状に形成する。下部電極膜３及び上部電極膜４は容量計７に接続している。   FIG. 1 is a perspective view of an embodiment of a moisture permeability measuring apparatus 1 of the present invention, and FIG. 2 is a sectional view thereof. The lower electrode film 3 is formed in a strip shape on the insulating substrate 5, and the hygroscopic film 2 is coated thereon so that at least a part of the lower electrode film 3 is covered. Next, the upper electrode film 4 is formed in a strip shape so as to face at least part of the lower electrode film 3 across the hygroscopic film 2. The lower electrode film 3 and the upper electrode film 4 are connected to a capacitance meter 7.

こうして得られた透湿度測定装置１の上部電極膜側表面に、下部電極膜３と上部電極膜４とが対向している部分の少なくとも一部が覆われるように被測定試料膜６をコーティングする。   The sample film 6 to be measured is coated on the surface of the moisture permeability measuring device 1 thus obtained so that at least a part of the portion where the lower electrode film 3 and the upper electrode film 4 face each other is covered. .

前記吸湿性膜２が水分を吸収すると、吸湿性膜２の静電容量が変化する。この静電容量変化を容量計にて測定し、前記数式を用いて透湿度を算出する。   When the hygroscopic film 2 absorbs moisture, the capacitance of the hygroscopic film 2 changes. This capacitance change is measured with a capacitance meter, and the moisture permeability is calculated using the above formula.

前記吸湿性膜は、薄いほど水分検知の感度が上がり、より微量の水分を検出できる。しかし薄すぎると膜強度が低下してしまう。前記吸湿性膜の膜厚は、50ｎｍ〜5μｍであるとよい。前記吸湿性膜は、膜厚が数百ナノメートルから数ミクロン程度の場合、スピンコート法により作製する。一方前記膜厚が数百ナノメートル以下の場合は、真空蒸着法で作製すると好ましい。   The thinner the hygroscopic film, the higher the sensitivity of moisture detection, and a smaller amount of moisture can be detected. However, if it is too thin, the film strength will decrease. The film thickness of the hygroscopic film is preferably 50 nm to 5 μm. The hygroscopic film is produced by a spin coating method when the film thickness is about several hundred nanometers to several microns. On the other hand, when the film thickness is several hundred nanometers or less, it is preferable to produce it by a vacuum deposition method.

前記吸湿性膜として、フッ素化ポリイミド膜を用いることが好ましい。フッ素化ポリイミドは、ポリイミドの有する親水性と、フッ素の有する疎水性との両特性を兼ね備えている。周囲の湿度に応じて、水分を迅速に吸収、離脱させることができるため、湿度環境が急激に変化しても、被測定試料膜の透湿度を正確に測定することができる。透湿度測定を適切に行うためには、前記フッ素化ポリイミド膜におけるフッ素含有量が5〜50重量％であると好ましい。このようなフッ素化ポリイミドとして、具体的には、トリフルオロメチル基やヘキサフルオロプロパン基を含有するポリイミドが挙げられる。   A fluorinated polyimide film is preferably used as the hygroscopic film. The fluorinated polyimide has both the characteristics of hydrophilicity of polyimide and hydrophobicity of fluorine. Since moisture can be quickly absorbed and released according to the ambient humidity, the moisture permeability of the sample film to be measured can be accurately measured even if the humidity environment changes rapidly. In order to appropriately measure moisture permeability, the fluorine content in the fluorinated polyimide film is preferably 5 to 50% by weight. Specific examples of such a fluorinated polyimide include polyimides containing a trifluoromethyl group or a hexafluoropropane group.

前記下部電極膜３は膜厚10ｎｍ〜１μｍであり、前期上部電極4は5ｎｍ〜100ｎｍであると良い。上部・下部電極4とも真空蒸着やスパッタ法により作成する。上部電極4は導電性を保ち、なおかつ水分の透過可能な厚さで無ければならない。上部電極4は金であると望ましいが、アルミや銀であっても良い。下部電極は上部電極と下部電極が重なり合う面積は0.01ｍｍ2〜10ｃｍ2であると良い。 The lower electrode film 3 may have a film thickness of 10 nm to 1 μm, and the upper electrode 4 may have a thickness of 5 nm to 100 nm. Both the upper and lower electrodes 4 are formed by vacuum deposition or sputtering. The upper electrode 4 must be conductive and have a thickness that allows moisture to pass therethrough. The upper electrode 4 is preferably gold, but may be aluminum or silver. The area where the upper electrode and the lower electrode overlap is preferably 0.01 mm 2 to 10 cm 2 in the lower electrode.

前記絶縁基板は、ガラス基板であるとより好ましく、裏面が防水処理されたポリエチレンテレフタレートやポリエチレンナフタレートのようなプラスチックフィルムでも良い。   The insulating substrate is preferably a glass substrate, and may be a plastic film such as polyethylene terephthalate or polyethylene naphthalate whose back surface is waterproofed.

被測定試料膜の具体例としては、ポリエチレンテレフタレート膜、ポリプロピレン膜、その他 ポリエチレン、フィルム上に成膜された酸化シリコンや窒化膜が挙げられる。   Specific examples of the sample film to be measured include a polyethylene terephthalate film, a polypropylene film, other polyethylene, and a silicon oxide or nitride film formed on the film.

薄膜の透湿度は、その膜厚や温度に影響される。したがって、透湿度が既知の吸湿性膜を用いた標準センサを準備し、被測定試料膜の片側表面に該標準センサ１個と前記湿度センサ１個以上とを設けてキャリブレーションを行ってもよい。   The moisture permeability of the thin film is affected by the film thickness and temperature. Therefore, a standard sensor using a hygroscopic film with a known moisture permeability may be prepared, and calibration may be performed by providing one standard sensor and one or more humidity sensors on one surface of the sample film to be measured. .

図３は、本発明の透湿度測定装置の別な実施例を示した図である。上部に窓を設けた金属製の円筒状ヘッド８内に前記の透湿度測定装置１を設置する。該装置の下部電極膜３及び上部電極膜４は、ヘッド外部の容量計７（図３に図示）に接続している。   FIG. 3 is a view showing another embodiment of the moisture permeability measuring apparatus of the present invention. The moisture permeability measuring device 1 is installed in a metal cylindrical head 8 provided with a window at the top. The lower electrode film 3 and the upper electrode film 4 of the apparatus are connected to a capacitance meter 7 (shown in FIG. 3) outside the head.

透湿度測定ヘッド１１上部の窓部分に、被測定試料膜６を密着固定する。該薄膜６を透過しヘッド内に侵入した水分がヘッド内の透湿度測定装置により測定され、前記と同様にして透湿度が決定される。ヘッド内はあらかじめ真空に引いて、ヘッド内の水分を除去しておく。   The sample film 6 to be measured is tightly fixed to the window portion above the moisture permeability measuring head 11. Moisture that permeates the thin film 6 and enters the head is measured by a moisture permeability measuring device in the head, and the moisture permeability is determined in the same manner as described above. The inside of the head is evacuated in advance to remove moisture in the head.

以下、本発明の実施例を詳細に説明するが、本発明の範囲はこれらの実施例に限定されるものではない。
本発明を適用する透湿度測定装置を作製した例を実施例１に示す。 Examples of the present invention will be described in detail below, but the scope of the present invention is not limited to these examples.
An example in which a moisture permeability measuring apparatus to which the present invention is applied is shown in Example 1.

（実施例１）
縦25 ｍｍ、横25 ｍｍ、厚さ１ｍｍのガラス基板を水、アセトンで洗浄した。尚、アルコールで洗浄することもでこともできる。このガラス基板に、幅5ｍｍ、膜厚100ｎｍとなるように金を蒸着し、下部電極膜を形成した。その上に、感湿膜としてトリフルオロメチル其やヘキサフルオロプロパン基を含有するポリイミドの薄膜を膜厚1000ｎｍとなるようスピンコート法にて形成した。なお、ポリイミドは溶媒に不溶であるため、ポリイミドの前駆体であるポリアミド酸の溶液をスピンコートしてポリイミドを作成した。次に、その上に、下部電極膜と対向する向きで幅5ｍｍ、膜厚100ｎｍとなるように金を蒸着し、上部電極膜を形成した。下部金電極膜及び上部金電極膜の蒸着は、真空蒸着法にて行った。上部電極膜及び下部電極膜を容量計に接続し、実施例１の透湿度測定装置を得た。 Example 1
A glass substrate having a length of 25 mm, a width of 25 mm, and a thickness of 1 mm was washed with water and acetone. It can be washed with alcohol. Gold was vapor-deposited on this glass substrate so as to have a width of 5 mm and a film thickness of 100 nm to form a lower electrode film. On top of that, a polyimide thin film containing trifluoromethyl or hexafluoropropane group was formed as a moisture sensitive film by spin coating so as to have a film thickness of 1000 nm. Since polyimide is insoluble in a solvent, a polyimide was prepared by spin coating a solution of polyamic acid which is a precursor of polyimide. Next, gold was vapor-deposited thereon so as to have a width of 5 mm and a film thickness of 100 nm in a direction facing the lower electrode film, thereby forming an upper electrode film. The lower gold electrode film and the upper gold electrode film were deposited by vacuum deposition. The upper electrode film and the lower electrode film were connected to a capacitance meter, and the moisture permeability measuring device of Example 1 was obtained.

（校正試験）
作製した透湿度測定装置について、校正試験を行った。あらかじめ真空に引いておいた容器中に、一定量の水蒸気を含んだ窒素ガスを流し込んだ。水晶振動子上のポリイミド膜に水蒸気を吸着させ、その吸着量を膜厚計から読み取った。同時に、同じ場所に実施例１で得られた透湿度測定装置を設置し、吸湿させた時の静電容量の変化を容量計で測定した。測定結果を図４に示す。 (Calibration test)
A calibration test was performed on the manufactured moisture permeability measuring device. Nitrogen gas containing a certain amount of water vapor was poured into a container that had been previously evacuated. Water vapor was adsorbed to the polyimide film on the quartz oscillator, and the adsorbed amount was read from the film thickness meter. At the same time, the moisture permeability measuring device obtained in Example 1 was installed in the same place, and the change in capacitance when moisture was absorbed was measured with a capacitance meter. The measurement results are shown in FIG.

図４から明らかなように、単位面積あたりの吸着量と、吸着による静電容量増加分との関係は、直線関係を示した。これは、測定の安定度は測定精度に影響するが、数分程度の短時間であれば0.01％の静電容量変化、すなわち10ng／cm２の精度まで測定可能であることを意味している。 As is clear from FIG. 4, the relationship between the amount of adsorption per unit area and the increase in capacitance due to adsorption showed a linear relationship. This means that although measurement stability affects measurement accuracy, it can measure up to 0.01% capacitance change, that is, accuracy of 10 ng / cm 2 in a short time of about several minutes. .

次に、実施例１の透湿度測定装置を用いて、薄膜の透湿度を測定した例を実施例２に示す。   Next, Example 2 in which the moisture permeability of the thin film was measured using the moisture permeability measuring apparatus of Example 1 is shown in Example 2.

（実施例２）
実施例１で得られた透湿度測定装置の上部電極膜側表面に、膜厚60μｍのポリエチレンテレフタレート（ＰＥＴ）の薄膜を熱圧着して、透湿度測定用の試料を得た。 (Example 2)
A 60 μm-thick polyethylene terephthalate (PET) thin film was thermocompression bonded to the surface of the upper electrode film side of the moisture permeability measuring device obtained in Example 1 to obtain a sample for measuring moisture permeability.

（静電容量測定）
実施例２で作製した試料を用いて、静電容量を測定した。
容量計には市販のインピーダンスアナライザー型番4284Ａあるいは4294Ａ（アジレント・テクノロジー社製）を用い、温度30℃、周波数10kHzで湿度を0%から80%まで変化させつつ、静電容量の経時変化を測定した。比較のため、被測定薄膜を設けていない実施例１の装置についても同様に測定した。測定結果を図５に示す。 (Capacitance measurement)
Using the sample prepared in Example 2, the capacitance was measured.
Using a commercially available impedance analyzer model number 4284A or 4294A (manufactured by Agilent Technologies) for the capacitance meter, the change with time of the capacitance was measured while changing the humidity from 0% to 80% at a temperature of 30 ° C and a frequency of 10kHz. . For comparison, the same measurement was performed for the apparatus of Example 1 in which the thin film to be measured was not provided. The measurement results are shown in FIG.

図５から明らかなように、実施例１の装置は測定開始直後に応答し、静電容量が大きく変化した。一方ＰＥＴ薄膜を設けた実施例２の装置は静電容量変化が少なかったが、精度よく測定できた。   As is apparent from FIG. 5, the apparatus of Example 1 responded immediately after the start of measurement, and the capacitance changed greatly. On the other hand, the apparatus of Example 2 provided with the PET thin film showed little change in capacitance, but was able to measure with high accuracy.

本発明の透湿度測定装置は、電子部品、平面ディスプレイ、有機エレクトロルミネッセンス材料などに施されるコーティング膜の透湿度モニターとして利用できる。また、優れたコーティング膜の開発にも貢献する。   The moisture permeability measuring device of the present invention can be used as a moisture permeability monitor for a coating film applied to an electronic component, a flat display, an organic electroluminescent material, or the like. It also contributes to the development of excellent coating films.

本発明を適用する透湿度測定装置の斜視図である。It is a perspective view of a moisture permeability measuring device to which the present invention is applied.

本発明を適用する透湿度測定装置の断面図である。It is sectional drawing of the water vapor permeability measuring apparatus to which this invention is applied.

本発明を適用する透湿度測定装置の一実施例の断面図である。It is sectional drawing of one Example of the moisture permeability measuring apparatus to which this invention is applied.

実施例１の透湿度測定装置における単位面積あたりの容量変化を示すグラフである。It is a graph which shows the capacity | capacitance change per unit area in the moisture permeability measuring apparatus of Example 1. FIG.

実施例１及び実施例２の透湿度測定装置における静電容量の経時変化を示すグラフである。It is a graph which shows the time-dependent change of the electrostatic capacitance in the water vapor transmission rate measuring apparatus of Example 1 and Example 2.

符号の説明Explanation of symbols

１は透湿度測定装置、２は感湿膜、３は下部電極膜、４は上部電極膜、５は絶縁基板、６は被測定試料膜、７は容量計、８は円筒状ヘッド、１１は透湿度測定ヘッドである。   1 is a moisture permeability measuring device, 2 is a moisture sensitive film, 3 is a lower electrode film, 4 is an upper electrode film, 5 is an insulating substrate, 6 is a sample film to be measured, 7 is a capacitance meter, 8 is a cylindrical head, 11 is This is a moisture permeability measuring head.

Claims (7)

絶縁基板上に下部電極膜、該下部電極膜の少なくとも一部を覆うように吸湿性膜、および該下部電極膜の少なくとも一部と該吸湿性膜を挟んで面的に対向し、かつ該下部電極膜とは絶縁された上部電極膜を有し、該下部電極膜と該上部電極膜との間に容量計が接続され、該吸湿性膜を覆う被測定試料膜の透湿度を、容量計で測定することを特徴とする透湿度測定装置。   A lower electrode film on an insulating substrate, a hygroscopic film so as to cover at least a part of the lower electrode film, and at least a part of the lower electrode film and the surface opposite to each other with the hygroscopic film interposed therebetween, and the lower part The electrode film has an insulated upper electrode film, a capacitance meter is connected between the lower electrode film and the upper electrode film, and the moisture permeability of the sample film to be measured covering the hygroscopic film is measured by the capacitance meter. A moisture permeation measuring device characterized by measuring with 該上部電極膜が水分透過性の電極膜であることを特徴とする請求項１に記載の透湿度測定装置。   The moisture permeability measuring device according to claim 1, wherein the upper electrode film is a moisture permeable electrode film. 該吸湿性膜がポリイミド膜であることを特徴とする請求項１に記載の透湿度測定装置。   The moisture permeability measuring device according to claim 1, wherein the hygroscopic film is a polyimide film. 該吸湿性膜がフッ素化ポリイミド膜であることを特徴とする請求項１に記載の透湿度測定装置。   The moisture permeability measuring device according to claim 1, wherein the hygroscopic film is a fluorinated polyimide film. 絶縁基板上に下部電極膜、該下部電極膜の少なくとも一部を覆うように吸湿性膜、および該下部電極膜の少なくとも一部と該吸湿性膜を挟んで面的に対向し、かつ該下部電極膜とは絶縁された上部電極膜を有する湿度センサの、該吸湿性膜を被測定試料膜で覆い、該下部電極膜と該上部電極膜との間の容量を測定し、その容量から被測定試料膜の透湿度を換算して算出することを特徴とする透湿度測定方法。   A lower electrode film on an insulating substrate, a hygroscopic film so as to cover at least a part of the lower electrode film, and at least a part of the lower electrode film and the surface opposite to each other with the hygroscopic film interposed therebetween, and the lower part Cover the hygroscopic film of the humidity sensor having the upper electrode film insulated from the electrode film with the sample film to be measured, measure the capacitance between the lower electrode film and the upper electrode film, and measure the capacitance from the capacitance. A method of measuring moisture permeability, wherein the moisture permeability of a measurement sample film is converted and calculated. 前記容量から被測定試料膜の透湿度を換算して算出する式が
Figure 2007139447
Figure 2007139447
（数１中、Ｄｗは透湿度、Δｔは測定時間、ｄは膜厚、εｗは水の比誘電率、εｐは乾燥時の薄膜の比誘電率、εｓは吸湿時の薄膜の比誘電率、Ｃは吸湿時の薄膜の静電容量、Ｃｐは乾燥時の薄膜の静電容量）
であることを特徴とする請求項５に記載の透湿度測定方法。 An equation for calculating the moisture permeability of the sample film to be measured from the capacity is
Figure 2007139447
Figure 2007139447
(In a few 1, D w moisture permeability, Delta] t is the time measured, d is the film thickness, epsilon w is the relative permittivity of water, epsilon p is the relative dielectric constant of the thin film during drying, epsilon s is the thin film at the time of moisture absorption Dielectric constant, C is the capacitance of the thin film when absorbing moisture, and C p is the capacitance of the thin film when drying)
The moisture permeability measuring method according to claim 5, wherein: 被測定試料膜に前記湿度センサを少なくとも２個設け、うち１個は透湿度が既知の吸湿性膜を用いた標準センサを使用して、キャリブレーションを行うことを特徴とする請求項５に記載の透湿度測定方法。   6. The measurement sample film is provided with at least two humidity sensors, one of which is calibrated by using a standard sensor using a hygroscopic film having a known moisture permeability. Moisture permeability measurement method.
JP2005330129A 2005-11-15 2005-11-15 Moisture permeability measuring instrument of thin film and moisture permeability measuring method Pending JP2007139447A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005330129A JP2007139447A (en) 2005-11-15 2005-11-15 Moisture permeability measuring instrument of thin film and moisture permeability measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005330129A JP2007139447A (en) 2005-11-15 2005-11-15 Moisture permeability measuring instrument of thin film and moisture permeability measuring method

Publications (1)

Publication Number Publication Date
JP2007139447A true JP2007139447A (en) 2007-06-07

Family

ID=38202518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005330129A Pending JP2007139447A (en) 2005-11-15 2005-11-15 Moisture permeability measuring instrument of thin film and moisture permeability measuring method

Country Status (1)

Country Link
JP (1) JP2007139447A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010078604A (en) * 2008-09-26 2010-04-08 Samsung Electronics Co Ltd Chemical sensor utilizing thin-film type sensing member
JP2010197218A (en) * 2009-02-25 2010-09-09 Shinshu Univ Device and method for measuring water vapor permeability of barrier film
JP2011242354A (en) * 2010-05-21 2011-12-01 Shinshu Univ Evaluation method of water vapor barrier property
JP2012103151A (en) * 2010-11-11 2012-05-31 Oike Ind Co Ltd Standard sample for calibration and method for calibrating water vapor permeability measuring device
JP2015007618A (en) * 2013-05-29 2015-01-15 国立大学法人信州大学 Capacitance type gas sensor and manufacturing method therefor
JP2015518168A (en) * 2012-05-29 2015-06-25 スリーエム イノベイティブ プロパティズ カンパニー Humidity sensor and sensor element
KR20160143385A (en) * 2015-06-05 2016-12-14 숭실대학교산학협력단 Capacitive olfactory sensor and manufacturing method thereof
US9933888B2 (en) 2015-03-04 2018-04-03 Soongsil University Research Consortium Techno-Park Multimodal sensor and manufacturing method thereof
US10228344B2 (en) 2010-09-30 2019-03-12 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
TWI697660B (en) * 2019-05-13 2020-07-01 國立清華大學 Non-contact fiber permeability measurement system and method thereof

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010078604A (en) * 2008-09-26 2010-04-08 Samsung Electronics Co Ltd Chemical sensor utilizing thin-film type sensing member
US8480959B2 (en) 2008-09-26 2013-07-09 Samsung Electronics Co., Ltd. Chemical sensor using thin-film sensing member
JP2010197218A (en) * 2009-02-25 2010-09-09 Shinshu Univ Device and method for measuring water vapor permeability of barrier film
JP2011242354A (en) * 2010-05-21 2011-12-01 Shinshu Univ Evaluation method of water vapor barrier property
US10228344B2 (en) 2010-09-30 2019-03-12 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
JP2012103151A (en) * 2010-11-11 2012-05-31 Oike Ind Co Ltd Standard sample for calibration and method for calibrating water vapor permeability measuring device
JP2015518168A (en) * 2012-05-29 2015-06-25 スリーエム イノベイティブ プロパティズ カンパニー Humidity sensor and sensor element
JP2015007618A (en) * 2013-05-29 2015-01-15 国立大学法人信州大学 Capacitance type gas sensor and manufacturing method therefor
US9933888B2 (en) 2015-03-04 2018-04-03 Soongsil University Research Consortium Techno-Park Multimodal sensor and manufacturing method thereof
KR20160143385A (en) * 2015-06-05 2016-12-14 숭실대학교산학협력단 Capacitive olfactory sensor and manufacturing method thereof
KR101709329B1 (en) * 2015-06-05 2017-02-22 숭실대학교산학협력단 Capacitive olfactory sensor and manufacturing method thereof
TWI697660B (en) * 2019-05-13 2020-07-01 國立清華大學 Non-contact fiber permeability measurement system and method thereof
US11460392B2 (en) 2019-05-13 2022-10-04 National Tsing Hua University Non-contact fiber permeability measurement system and method thereof

Similar Documents

Publication Publication Date Title
JP2007139447A (en) Moisture permeability measuring instrument of thin film and moisture permeability measuring method
US8739622B2 (en) Capacitive humidity detector with nanoporous hydrophilic dielectric
Oprea et al. Capacitive humidity sensors on flexible RFID labels
JP5425214B2 (en) Capacitive humidity sensor and manufacturing method thereof
US10145812B2 (en) Capacitive humidity sensor with graphene electrode
US7270002B2 (en) Humidity sensor element, device and method for manufacturing thereof
US7683636B2 (en) Structure for capacitive balancing of integrated relative humidity sensor
JP5112639B2 (en) Humidity sensor
JP5955342B2 (en) Humidity sensor comprising a polymer layer containing a mixture of polyamides as a moisture absorbing layer
Mittal et al. A Novel Sol–Gel $\gamma $-Al 2 O 3 Thin-Film-Based Rapid SAW Humidity Sensor
US8516880B2 (en) Gas sensing system with quartz crystal substrate
US20100031745A1 (en) Nano-porous alumina sensor
US20090134026A1 (en) Gas sensor and method for the production thereof
JP2005031090A (en) Humidity sensor and method of manufacturing the same
JP2011242354A (en) Evaluation method of water vapor barrier property
Timár-Horváth et al. Usage of porous Al 2 O 3 layers for RH sensing
CN109690301B (en) Volumetric gas sensor
ITMI982153A1 (en) MULTISENSOR DEVICE FOR GRAVIMETRIC CHEMICAL MEASUREMENTS THROUGH PIEZOELECTRIC LAYERS RESONANT IN THICK FILM TECHNOLOGY.
Karimov et al. Surface-type humidity sensor based on cellulose-PEPC for telemetry systems
Mahboob et al. A low cost polyimide based metal oxide film RH sensor
FI59675C (en) HYGROMETER MED MONOMOLEKYLAERA SKIKT
Hsieh et al. Dual-layer nanoporous anodic aluminum oxide with embedded electrodes for capacitive relative humidity sensor
Kim et al. Room temperature CO 2 detection using interdigitated capacitors with heteropolysiloxane sensing films
JP2001249099A (en) Electrostatic capacity humidity sensor and humidity measuring instrument
KR100889834B1 (en) Mesuring device for permeation rate of water and oxygen of protective layer in organic electronic device and measuring method using the device

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Effective date: 20070306

Free format text: JAPANESE INTERMEDIATE CODE: A131

A521 Written amendment

Effective date: 20070501

Free format text: JAPANESE INTERMEDIATE CODE: A523

A02 Decision of refusal

Effective date: 20070626

Free format text: JAPANESE INTERMEDIATE CODE: A02