KR20160095381A - method for optical inspection of transparent electrode film - Google Patents

method for optical inspection of transparent electrode film Download PDF

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KR20160095381A
KR20160095381A KR1020150016583A KR20150016583A KR20160095381A KR 20160095381 A KR20160095381 A KR 20160095381A KR 1020150016583 A KR1020150016583 A KR 1020150016583A KR 20150016583 A KR20150016583 A KR 20150016583A KR 20160095381 A KR20160095381 A KR 20160095381A
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image
reference point
black
inspection
transparent electrode
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KR1020150016583A
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Korean (ko)
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장지상
김동욱
전계정
박찬석
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성우테크론 주식회사
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The present invention provides a method to optically inspect a transparent electrode film which uses an image acquired using an optical inspection device to inspect a defect of a sensor electrode mounted on a transparent electrode film, and improves a speed and accuracy for inspection. The method to optically inspect a transparent electrode film comprises: a first step of acquiring an image of a transparent electrode film on which a grid-type sensor electrode is mounted; a second step of converting the acquired image into black and white in accordance with a prescribed shade reference to acquire a threshold image; a third step of image-processing the threshold image to acquire a reference point extraction image; a fourth step of acquiring a reference point of a black block corresponding to the inside of the sensor electrode from the reference point extraction image; a fifth step of applying the acquired reference point to the threshold image, and setting a prescribed area around the reference point as an inspection area; and a sixth step of comparing a number of black pixels in the inspection area, and a number of black pixels corresponding to a prescribed defect condition.

Description

TECHNICAL FIELD [0001] The present invention relates to an optical inspection method for a transparent electrode film,

The present invention relates to an optical inspection method for a transparent electrode film, and more particularly, to a method for inspecting defects of a sensor electrode mounted on a transparent electrode film using an image obtained through an optical inspection apparatus, And an optical inspection method of the transparent electrode film.

2. Description of the Related Art Generally, a touch screen is an input device that detects touches of a user's finger or other input object and converts it into a suitable electric signal to recognize coordinates or gestures, etc., and is applied to various electronic devices.

In particular, the touch screen is directly coupled to a display device of an electronic device, and can replace a space occupied by a separate input device such as a keypad, and thus is widely used in portable electronic devices such as a smart phone, a PDA, and a tablet PC.

On the other hand, the touch screen can be divided into a resistance film type, a capacitive type, an ultrasonic type, and an infrared type depending on the method of sensing the touch input.

Here, the electrostatic capacitance type is a method of detecting the position of a contact object by using a capacitance change generated between a contact object and a transparent sensing electrode when an electrically conductive object (such as a finger) is contacted, It has a longer life span, thinner thickness, and multi-touch support than other types of touch screens.

The transparent electrode film used in the touch screen has a first sensor layer in which a sensor electrode in a first direction is formed and a second sensor layer in which a sensor electrode in a second direction is formed, and the sensor electrodes are formed in different directions Overlapping and forming a lattice.

In this case, the presence and contact position of the object can be detected through the latticed sensor electrode. If a defect such as a short circuit occurs in the sensor electrode, it is impossible to precisely detect contact or contact position of the object. And compares the obtained image image with a reference image in a normal state to discriminate the good or bad of the transparent electrode film.

FIGS. 1 and 2 are illustrations showing image images of a lattice-shaped transparent electrode film in a conventional optical inspection method.

As shown in FIGS. 1 and 2, when light of a predetermined wavelength is irradiated onto the transparent electrode film, due to a difference in reflectance between the portions (3, 4) where the sensor electrode is not mounted and the mounted portion (2) The shape of the image can be obtained with the image image 1.

In detail, each sensor layer of the transparent electrode film is formed of indium tin oxide (ITO), indium zinc oxide (ITO), or the like on a transparent base sheet made of a material such as polyethylene terephthalate And a transparent sensor electrode formed of a material of a transparent electrode.

At this time, the sensor electrode is mounted in a predetermined shape by a photolithography technique using CAD data. Conventionally, CAD data used for photolithography and direct comparison of the obtained image image (1) were used.

In the conventional inspection method, CAD data of a large capacity is loaded, the obtained image image (1) is converted into a format comparable to CAD data, and then the CAD data and the converted image image are compared on a pixel- There is a problem that a considerable time is required for each step.

Furthermore, the image image 1 of the transparent electrode film obtained through the imaging device has a slight difference from the real object due to the difference in irradiated light quantity or the positional difference of the image pickup device. Even when the CAD data is directly compared with the image image, There is a problem that the accuracy of discrimination between the product that can normally operate and the product that does not operate is degraded.

Korean Patent No. 10-1383934

In order to solve the above problems, there is provided an optical inspection method of a transparent electrode film in which defects of a sensor electrode mounted on a transparent electrode film are inspected using an image obtained through an optical inspection apparatus, And the like.

According to an aspect of the present invention, there is provided a method for manufacturing a transparent electrode film, the method including: a first step of obtaining an image image of a transparent electrode film on which a grid-type sensor electrode is mounted; A second step of acquiring a threshold image by switching the obtained image image to black and white according to a preset shadow reference; The thresholded image is subjected to image processing A third step of obtaining a reference point extracted image; A fourth step of obtaining a reference point of a black block corresponding to the inside of the sensor electrode from the reference point extracted image; A fifth step of applying the obtained reference point to the threshold image and setting a predetermined area around the reference point as an inspection area; And a sixth step of comparing the number of black pixels of each inspection area with the number of black pixels corresponding to a predetermined defective condition.

The third step may include thinning a white line corresponding to the sensor electrode and expanding the thinned white line so that the white line is not broken.

The fourth step may include calculating an area center point of the black block, which is enclosed by a white line corresponding to the sensor electrode, as the reference point.

In the fifth step, each of the inspection areas is set to an area including the outline of the black block including the reference point and the white line in contact with the black convex.

Calculating a percentage of the number of black pixels in each of the inspection regions based on the number of black pixels corresponding to the predetermined failure condition; and, if the calculated percentage is within a predetermined deviation range, Area as a good state.

Through the above solution, the optical inspection method of the transparent electrode film according to the present invention provides the following effects.

First, it is possible to simplify the complicated image image according to the shading criterion, and to set the inspection area to the accurate reference by applying the center point of each closed black block of the reference point calculation image to the threshold image calculated to have black and white pixels, Since the defect of the product can be discriminated by the simple comparison of the black and white pixels, the inspection amount can be minimized and the inspection speed can be remarkably improved.

Secondly, the white line of the threshold image is thinned to expand the white line in a state where the image distortion according to the light amount difference is minimized, so that the black block connected by the defective portion is partitioned according to the normal state grid, Since the reference point can be calculated quickly and accurately through a simple operation of finding a center point in black pixels, the time required to calculate the reference point can be reduced and the total inspection time can be significantly reduced.

Third, an inspection area is set according to a predetermined area at the calculated reference point, and the number of black pixels in each inspection area with respect to the number of defective black pixels is calculated as a percentage, and compared with the deviation range, It is possible to reduce the time required for the comparison operation and thus the total inspection time can be remarkably reduced.

Fig. 1 and Fig. 2 are views showing an image image of a lattice-shaped transparent electrode film in a conventional optical inspection method. Fig.
3 is a flow chart illustrating a method of optical inspection of a transparent electrode film according to an embodiment of the present invention.
4 is a view illustrating an image of a transparent electrode film in an optical inspection method of a transparent electrode film according to an embodiment of the present invention.
5 is an exemplary view illustrating a threshold-hold image in an optical inspection method of a transparent electrode film according to an embodiment of the present invention.
6A and 6B are views illustrating a process of acquiring a reference point extracted image in an optical inspection method of a transparent electrode film according to an embodiment of the present invention.
FIG. 6C is an exemplary view showing a process of extracting a reference point by enlarging part B of FIG. 6B; FIG.
FIG. 7 is an enlarged view of a portion A in FIG. 5; FIG.

Hereinafter, an optical inspection method of a transparent electrode film according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 3 is a flowchart illustrating an optical inspection method of a transparent electrode film according to an embodiment of the present invention. FIG. 4 is a cross-sectional view illustrating an image of a transparent electrode film in an optical inspection method of a transparent electrode film according to an embodiment of the present invention. FIGS. 6A and 6B are cross-sectional views illustrating a transparent electrode film according to an exemplary embodiment of the present invention. FIGS. 6A and 6B are cross- 6B is an enlarged view of a portion B in FIG. 6B to show a process of extracting a reference point. FIG. 7 is an enlarged view of a portion A in FIG. 5, .

As shown in FIGS. 3 to 7, the optical inspection method of the transparent electrode film includes an image acquisition (s10), a threshold image acquisition (s20), a reference point extraction image acquisition (S30) s40, applying a reference point (s50), setting an inspection area (s60), and comparing pixels for an inspection area (s70).

First, referring to FIGS. 3 to 4, an image 10 of a transparent electrode film on which a grid-shaped sensor electrode is mounted is obtained (s10). Here, the image 10 of the transparent electrode film can be obtained using an optical inspection apparatus.

In this case, the term " grid type " means that the sensor electrode is formed in the shape of a closed shape to divide a portion where the sensor electrode is not mounted. The shape of the shape may be various shapes such as a polygon such as a rectangle and a pentagon, have.

Here, the optical inspection apparatus refers to an apparatus that irradiates light of a predetermined wavelength to the transparent electrode film, and converts and reflects a difference in reflectance between a portion where the sensor electrode is not mounted and a portion where the sensor electrode is mounted, into an image.

At this time, in the image 10 obtained by using the optical inspection apparatus, a portion where the sensor electrode is mounted is displayed with a high degree of accuracy, and a portion where the sensor electrode is not mounted can be displayed with a high degree of accuracy.

That is, the portion where the sensor electrode is mounted is displayed as white to light gray, and the portions 12 and 13 where the sensor electrode is not mounted are displayed as gray to dark gray. At this time, the brightness of each part may also vary depending on the amount of light to be irradiated.

Here, a white line 11 corresponding to the sensor electrode is displayed in a grid in one direction and the other direction in the image image 10, and a portion where the sensor electrode is not mounted in the white line 11 is closed Indicated by a gray block 12.

Then, in some of the white lines 11, the defective portion 13 due to the short circuit is displayed in gray. At this time, some of the gray blocks 12 are connected to the adjacent gray blocks by the defect portions 13. [

In general, the distance between two parallel white lines 11 formed in the same direction is about 125 占 퐉. If the defective portion 13 is 100 占 퐉 or less, a normal sensing operation for touch input can be performed .

3 to 5, when the image image 10 is acquired (s10), the acquired image image 10 is converted into black and white according to a predetermined shadow reference to generate the threshold image 20, (S20).

Here, the term 'switching to black and white' is understood to mean replacing the data of each pixel with black and white or a simplified variable divided into two, such as 0 and 1, in order to improve the operation speed of the image data.

It is preferable to understand that the predetermined shading reference means a brightness of a certain value, and the shading reference is determined by comparing the sensor electrode of the actual transparent electrode film with the white line 11 displayed on the image image 10 And the calculated value can be maintained in a database according to the imaging performance of the optical device, the light source brightness, and the type of the transparent electrode film.

At this time, for each pixel of the image image 10, a pixel having a brightness value exceeding the shade reference is replaced by a variable corresponding to white or 1, and a pixel having a brightness value below the shade reference is changed from black to 0 To obtain the threshold image (20).

As described above, the complicated image image 10 having various brightness values for each pixel according to the reflectance of the transparent electrode film is replaced with black and white according to the set reference, so that simplified data can be distinguished from the short- So that the amount of calculation and the time required for subsequent image processing or short discrimination are significantly reduced, and the inspection result can be calculated quickly.

That is, by applying the center point of each closed black block of the reference point calculation image as a reference point to a threshold image having black and white pixels that are simplified according to the shading reference, a uniform reference can be provided for the entire transparent electrode film.

Therefore, each inspection area can be set uniformly and accurately, sequential inspection is performed for each inspection area, and defective products can be discriminated by simple comparison of black and white pixels, so that the calculation amount can be minimized and the inspection speed can be remarkably improved .

If the threshold image 20 is acquired (S20), the threshold-extracted image 30 is obtained by image processing the threshold image 20 (S30).

In this case, the white line 21 corresponding to the sensor electrode and the black block 22 corresponding to the inside of the sensor electrode are displayed in the threshold image 20, The portion 23 is displayed in black.

At this time, if the black block 22 is partitioned from the adjacent black block and is in the closed state, the reference point can be calculated. However, when the black block 22 is connected to the adjacent black block by the defect portion 23, After the reference point extracted image 30 is obtained through the image process, the reference point extracted image 30 is used for the reference point extraction.

For example, in the case of holding the reference point of each black block 22 at the center of the area, the center point can be set to be constant in the case of a closed black block, but in the case of a black block connected to another black block, A certain reference point can not be set.

As a result, when the respective parts of the transparent electrode film are divided, some parts overlap and other parts fall out of the inspection area, so that the accuracy of the inspection is impaired and it is difficult to perform efficient inspection.

6A and 6B, the step s30 of obtaining the reference point extracted image 30 includes the steps of thinning the white line 21 and removing the white line 31a And expanding the thinned white line 31a.

In this case, it is preferable that the breaking means the defective portion 33 of the white line 31a.

For example, the step of thinning the white line 21 may be performed by calculating the center line of the white line 21 and replacing pixels other than pixels corresponding to the center line of the white line 21 with black .

Here, the center line applies a distance conversion algorithm to each pixel corresponding to the white line portion 21 of the threshold image 20, and when the distance value of each pixel is calculated through the distance conversion algorithm, By calculating a pixel having a large distance value.

Such a distance conversion algorithm can be performed based on a distance conversion method such as Eucliean distance, city-block distance, or chessboard distance.

At this time, pixels corresponding to the white line 21 are processed as 1, and pixels corresponding to the black block 22 and the defect portion 23 are processed as 0, so that the center line of the white line 21 can be easily Can be calculated.

Here, as the white line 21 is thinned, the portion occupied by the black block 32a in the reference point extracted image 30 is increased.

The reflectance of each part of the film can be changed according to the amount of light irradiated on the transparent electrode film in addition to the reflectance difference depending on whether the sensor electrode is mounted or not during the acquisition of the image 10 through the optical inspection apparatus.

At this time, by thinning the white line 21 of the threshold image 20, the white line 21 of the entire image 20 has a uniform thickness, so that the white line 21 is wider Or distorted images such as displayed in a narrow manner.

Then, when the white line 21 is thinned, the white line is expanded so that the thinning of the thinned white line 31a is removed. At this time, the degree of expansion of the white line 31a may be set corresponding to the lattice area of the transparent electrode film, and may be set to a degree that the black block 32a is not completely removed.

When the thinned white line 31a is expanded, the break of the defect portion 33 is removed and all the black blocks 32b displayed on the reference point extraction image 30 have a closed shape, and the expanded white line 31b. ≪ / RTI >

Accordingly, a reference point can be set for each black block 32b, an inspection area is set around the reference point of each black block 32b, and each part of the transparent electrode film divided for each inspection area is inspected sequentially .

In this way, the white line of the threshold image is thinned to expand the white line in a state in which the image distortion according to the light amount difference is minimized, so that the black block connected by the defect portion can be partitioned according to the normal state lattice.

Therefore, accurate reference can be calculated by performing a simple calculation of finding a center point in a small black pixel with respect to each black block, so that the entire area of the transparent electrode film is divided uniformly in accordance with the grid without division error, The time required to calculate the reference point is reduced, and the whole inspection time can be significantly reduced as each inspection area around the reference point is sequentially inspected.

3 to 6C, when the reference point extraction image 30 is obtained (s30), the reference point 34 of the black block 32b is obtained from the reference point extraction image 30 (s40).

Here, the reference point 34 is preferably set for each black block 32b, and a plurality of reference points 34 may be provided depending on the number of the black blocks 32b. Then, each part of the transparent electrode film can be divided based on the reference point 34 of each black block 32b, and the divided areas can be inspected sequentially.

Accordingly, even if the entire product is not inspected, if defects exceeding the accommodation limit are generated in one of the divided areas, the product can be judged to be defective and the inspection can be performed quickly.

Here, the reference point 34 may be calculated as the area center point of the black block 32b that is sealed by the white line 31b. At this time, the area center point can be calculated through a distance conversion algorithm or the like similarly to the center line calculation, and black pixels are used instead of white pixels.

Thus, one reference point 34 can be calculated by simple calculation for each black block 32b.

3 to 7, when the reference point 34 of each black block 32b is acquired (S40), the acquired reference point 34 is applied to the threshold image 20, The predetermined area around the reference point is set as the inspection area 25 (s50).

Here, the inspection region 25 is preferably set for the reference point 34 of each black block 22, and a plurality of inspection regions 25 may be provided in the entire area of the transparent electrode film.

Accordingly, even when the black block 22 is connected to another black block adjacent to the black block 22, a uniform reference point can be set with respect to the black block partitioned according to the normal grid shape without defects.

As described above, each part of the transparent electrode film can be uniformly and accurately divided according to the normal shape of the grid without being bound to the defective part through the reference point extraction image 30 on which the threshold image 20 is imaged .

That is, since each part of the transparent electrode film is divided according to a uniform reference in the assumption of a normal shape of the grid, the overlapping part can be minimized to reduce the inspection time, Can be inspected finely without a portion to be excluded, so that the reliability of the inspection is improved, and an accurate and efficient quality inspection can be performed.

Here, each of the inspection areas 25 is set to an area including the outline of the black block 22 including the reference point 34 and the white line 21 contacting the black block 22 desirable.

The outermost line of the white line 21 connects the black block 22 including the reference point 34 to the farthest portion of the white line 21 circumscribing the four sides of the black block 22 It can be understood that it means one line.

The area may be set corresponding to the grid standard of the transparent electrode film. If the area for one inspection area is calculated, the same area is applied to the reference point of each grid having the same standard, .

In detail, a square or a rectangle enclosing a rhombus shape connecting a outermost line of a white line circumscribing a black block including the reference point at one reference point is calculated, and the area of the square to the rectangles is calculated as an area , And this process can be performed by the user's direct input or automatic input through arithmetic calculation.

When the area of one reference electrode is set in one transparent electrode film during inspection of the same transparent electrode film, the set area is applied to the entire reference point to set each inspection region. Therefore, Can be reduced.

If the inspection area 25 is set (s50), the number of black pixels in each inspection area is compared with the number of black pixels corresponding to a predetermined failure condition (s60).

Here, the number of black pixels corresponding to the predetermined failure condition is calculated on the basis of the area of each inspection area 25, and when there is a defect 23 of more than 100 mu m in the white line 21 Is preferably calculated on the basis of the reference value.

At this time, a percentage of the number of black pixels in each inspection area is calculated based on the number of black pixels corresponding to the predetermined defective condition, and the calculated percentage is compared with a predetermined deviation range.

Figure pat00001

Here, X 1 denotes a maximum deviation range, and X 2 denotes a minimum deviation range.

At this time, if the calculated percentage is within the predetermined deviation range, the inspection region is determined as a good state and the same process is performed for the next inspection region. If the calculated percentage is not within the predetermined deviation range, the inspection region is determined as a defective state.

In detail, when the percentage exceeds the maximum deviation range, the number of black pixels in the inspection region is excessively higher than a normal value, so that it can be analyzed that a defective portion exceeding the accommodation limit exists in the inspection region.

If the percentage is less than the minimum deviation range, it can be analyzed that the portion corresponding to the sensor electrode exists in the inspection region excessively, and further analysis is made as to whether there is an error in the sensor electrode or image image. Can be performed.

Here, if the inspection area is defective, the inspection can be terminated after determining that the product is defective without performing the next inspection area. Accordingly, if defects exceeding the accommodation limit are generated in one part without inspecting the divided inspection areas as a whole, the product can be judged to be defective and the inspection can be performed quickly.

As described above, the inspection area is set according to a predetermined area at the calculated reference point, and the number of black pixels in each inspection area with respect to the number of defective black pixels is calculated as a percentage, and compared with the deviation range, It is possible to reduce the time required for the comparison operation and thus the total inspection time can be remarkably reduced.

As described above, the present invention is not limited to the above-described embodiments, and variations and modifications may be made by those skilled in the art without departing from the scope of the present invention. And such modifications are within the scope of the present invention.

1,10: Image image 20: Threshold image
25: inspection area 30: reference point extraction image
34: Reference point

Claims (5)

A first step of obtaining an image image of a transparent electrode film on which a grid-like sensor electrode is mounted;
A second step of acquiring a threshold image by switching the obtained image image to black and white according to a preset shadow reference;
The thresholded image is subjected to image processing A third step of obtaining a reference point extracted image;
A fourth step of obtaining a reference point of a black block corresponding to the inside of the sensor electrode from the reference point extracted image;
A fifth step of applying the obtained reference point to the threshold image and setting a predetermined area around the reference point as an inspection area; And
And a sixth step of comparing the number of black pixels in each of the inspection regions with the number of black pixels corresponding to a predetermined defective condition.
The method according to claim 1,
The third step includes thinning a white line corresponding to the sensor electrode,
And expanding the thinned white line so that the break of the white line is removed.
The method according to claim 1,
Wherein the fourth step includes the step of calculating an area center point of the black block closed by a white line corresponding to the sensor electrode as the reference point.
The method according to claim 1,
Wherein each of the inspection regions in the fifth step is set to an area including an outermost line of the black block including the reference point and a white line in contact with the black convex.
The method according to claim 1,
Calculating a percentage of the number of black pixels in each inspection area based on the number of black pixels corresponding to the predetermined failure condition;
And determining that the inspection area is in a good state if the calculated percentage is within a predetermined deviation range.
KR1020150016583A 2015-02-03 2015-02-03 method for optical inspection of transparent electrode film KR20160095381A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106093055A (en) * 2016-08-22 2016-11-09 福州觉感视觉软件科技有限公司 Individual film quality determining method a kind of and plural number Zhang Feilin quality determining method
CN110376475A (en) * 2019-06-20 2019-10-25 浙江四点灵机器人股份有限公司 Glass surface line defct device for fast detecting and method
KR20200041132A (en) 2018-10-11 2020-04-21 가천대학교 산학협력단 Electrode Repair Apparatus and Repair Method for All Solid Thin Film Batteries and Method for Manufacturing All Solid Thin Film Batteries
CN114359179A (en) * 2021-12-16 2022-04-15 苏州镁伽科技有限公司 Panel detection method, system, electronic device and storage medium

Citations (1)

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Publication number Priority date Publication date Assignee Title
KR101383934B1 (en) 2006-10-11 2014-04-10 닛토덴코 가부시키가이샤 Apparatus for inspecting deffects of sheet-shaped products with optical films, data processing apparatus thereof, cutting apparatus thereof and product system thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101383934B1 (en) 2006-10-11 2014-04-10 닛토덴코 가부시키가이샤 Apparatus for inspecting deffects of sheet-shaped products with optical films, data processing apparatus thereof, cutting apparatus thereof and product system thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106093055A (en) * 2016-08-22 2016-11-09 福州觉感视觉软件科技有限公司 Individual film quality determining method a kind of and plural number Zhang Feilin quality determining method
KR20200041132A (en) 2018-10-11 2020-04-21 가천대학교 산학협력단 Electrode Repair Apparatus and Repair Method for All Solid Thin Film Batteries and Method for Manufacturing All Solid Thin Film Batteries
CN110376475A (en) * 2019-06-20 2019-10-25 浙江四点灵机器人股份有限公司 Glass surface line defct device for fast detecting and method
CN114359179A (en) * 2021-12-16 2022-04-15 苏州镁伽科技有限公司 Panel detection method, system, electronic device and storage medium

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