KR20160059142A

KR20160059142A - Gate valve

Info

Publication number: KR20160059142A
Application number: KR1020140160618A
Authority: KR
Inventors: 윤진철; 한영준; 김성철; 임태진
Original assignee: 주식회사 태한이엔씨
Priority date: 2014-11-18
Filing date: 2014-11-18
Publication date: 2016-05-26

Abstract

The present invention relates to a gate valve comprising a valve housing penetrating a main drive cylinder and piping and connected to the main drive cylinder and having a seal assembly therein, And a pusher that includes a protection bar and an impact absorbing O-ring on its front surface to prevent gas infiltration into the valve housing and moves the seal assembly back and forth to open and close the pipe. Thus, it is possible to prevent semiconductor process by-products from flowing back to the semiconductor process chamber in the event of a facility or process abnormality.

Description

Gate Valve {GATE VALVE}

The present invention relates to a gate valve, and more particularly, to a gate valve capable of preventing semiconductor process by-products from flowing back into a semiconductor process chamber in the event of a facility or process abnormality.

In general, a process atmosphere in a chamber for performing a process in a semiconductor facility is variously formed according to an action to be performed, that is, etching, deposition, diffusion, and the like. Vacuum pressure may be required in the process conditions of such a chamber, and a typical exhaust system is a vacuum system. The exhaust system must be equipped with a vacuum pump for the formation of vacuum pressure and a pumping line of this vacuum pump is equipped with a gate valve which interrupts vacuum pumping.

Korean Patent No. 10-0476391 discloses a gate valve of a semiconductor processing system capable of performing processing on a substrate to be processed such as a semiconductor wafer. This technique can reduce the particles generated in the vicinity of the valve seat and the valve body by arranging the base frame movable along the guide so as to approach and separate from the valve seat surrounding the opening.

Korean Patent Laid-Open No. 10-2004-0004998 discloses a gate valve for a semiconductor device capable of providing an O-ring for sealing a pumping line from a chamber side to a vacuum pump side. Such a technique can prevent the sealing o-ring from being damaged by the process, so that the durability is improved, the service life is extended, and the stable sealing property can be maintained.

Korean Patent Laid-Open No. 10-2003-0001836 discloses a semiconductor manufacturing apparatus capable of easily adjusting a pumping amount of a slow pumping line without using a separate valve or control port for controlling a slow pumping line. These techniques reduce manufacturing and installation costs associated with valve line and control port installation, and do not require space for installation thereof.

Korean Patent No. 10-0476391 Korean Patent Publication No. 10-2004-0004998 Korean Patent Publication No. 10-2003-0001836

One embodiment of the present invention seeks to provide a gate valve that can prevent semiconductor process by-products from flowing back into the semiconductor process chamber in the event of a facility or process anomaly.

One embodiment of the present invention seeks to provide a gate valve that is capable of protecting internal components of the valve from corrosive process gases when the process gas passes through the valve as the valve is opened.

An embodiment of the present invention is to provide a gate valve capable of relieving an impact upon opening and closing a valve by attaching an impact absorbing member to front and rear surfaces of a front and rear seal assemblies moving back and forth.

An embodiment of the present invention is to provide a gate valve capable of performing maintenance efficiently by separating and assembling parts of a seal assembly.

In one embodiment, the gate valve includes a valve housing penetrating the main drive cylinder and piping and connected to the main drive cylinder and including a seal assembly therein, the seal assembly having a valve housing And a pusher that includes a protection bar and an impact absorbing O-ring on its front surface to prevent gas infiltration of the seal assembly and moves the seal assembly back and forth to open and close the pipe.

In one embodiment, the apparatus may further include a sub-pumping valve including first and second air outlets for providing an open path of the tubing through supply of air.

The sub pumping valve may further include a seal bellows inserted into the sub pumping valve and moving back and forth by air supplied to the first air inlet or the second air inlet and outlet. The sub pumping valve may reduce an impact caused by pumping by the main drive cylinder through the open path of the pipe.

The sub pumping valve may further include an open hole at one end thereof and an indicator protruding outward through the open hole in accordance with the forward and backward movement of the seal bellows.

In one embodiment, the seal assembly may further include a shock absorbing bar, one end of which is connected to the pusher and includes an impact absorbing member at the other end to absorb an impact when the pipe is opened.

The seal assembly may further include a slider accommodated in a slider hole formed in a moving direction of the pusher so as to pass through the lower end of the pusher in the left and right directions with respect to the center of the pusher,

Wherein the seal assembly includes a plurality of sloped holes formed in respective upper and lower ends of the pusher and a plurality of circular balls accommodated in the plurality of sloped holes and moving along the plurality of sloped holes by the forward and backward movement of the pusher .

In one embodiment, the seal assembly includes a plurality of square protective covers that cover the pusher at each of the upper and lower ends of the pusher to protect the pusher, and a plurality of rectangular protective covers disposed on each of the upper and lower ends of the plurality of square protective covers, A plurality of circular covers in which a sealing O-ring is disposed.

The seal assembly may further include a plurality of rollers disposed between the plurality of square protective covers to support back and forth movement within the valve housing.

In one embodiment, the controller may further include a controller for indicating a closing time of the main driving cylinder due to movement of the seal assembly.

In one embodiment, the gate valve includes a valve housing connected to the main drive cylinder and passing through the pipe, a protection bar inserted into the valve housing and capable of preventing gas infiltration into the valve housing when the pipe is opened, A seal assembly including a shock absorbing O-ring on its front surface and a pusher for moving the protection bar back and forth to open and close the pipe, and first and second air access openings for providing an open path of the pipe through supply of air do.

The gate valve according to an embodiment of the present invention can prevent semiconductor process by-products from flowing back into the semiconductor process chamber in the event of equipment or process anomalies.

The gate valve according to one embodiment of the present invention can protect the internal components of the valve from corrosive process gases as the process gas passes through the valve as the valve opens.

The gate valve according to an embodiment of the present invention can reduce the impact upon opening and closing the valve by attaching an impact absorbing member to the front and back surfaces of the front and rear seal assemblies moving back and forth.

The gate valve according to the embodiment of the present invention can be manufactured so that the components of the seal assembly can be separated and assembled and the maintenance can be efficiently performed.

1 is a view for explaining a gate valve according to an embodiment of the present invention.
Fig. 2 is a view for explaining the flow of gas due to the opening and closing of the main drive cylinder and the sub pumping valve of the gate valve shown in Fig. 1;
3 is a view for explaining a seal assembly driven by the main drive cylinder of the gate valve shown in Fig.
Fig. 4 is a view for explaining the sub-pumping valve of the gate valve shown in Fig. 1;

The description of the present invention is merely an example for structural or functional explanation, and the scope of the present invention should not be construed as being limited by the embodiments described in the text. That is, the embodiments are to be construed as being variously embodied and having various forms, so that the scope of the present invention should be understood to include equivalents capable of realizing technical ideas. Also, the purpose or effect of the present invention should not be construed as limiting the scope of the present invention, since it does not mean that a specific embodiment should include all or only such effect.

Meanwhile, the meaning of the terms described in the present application should be understood as follows.

The terms "first "," second ", and the like are intended to distinguish one element from another, and the scope of the right should not be limited by these terms. For example, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" to another element, it may be directly connected to the other element, but there may be other elements in between. On the other hand, when an element is referred to as being "directly connected" to another element, it should be understood that there are no other elements in between. On the other hand, other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

It is to be understood that the singular " include " or "have" are to be construed as including the stated feature, number, step, operation, It is to be understood that the combination is intended to specify that it does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

All terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. Commonly used predefined terms should be interpreted to be consistent with the meanings in the context of the related art and can not be interpreted as having ideal or overly formal meaning unless explicitly defined in the present application.

1 is a view for explaining a gate valve according to an embodiment of the present invention.

Referring to FIG. 1, the gate valve 100 includes a main drive cylinder 110, a valve housing 120, and a sub-pumping valve 130.

The main drive cylinder 110 is connected to the valve housing 120 to control the pumping of the valve housing 120. The main drive cylinder 110 can open or close the piping 10 by the seal assembly 121 of the valve housing 120. [

The valve housing 120 passes through the pipe 10 and is connected to the main drive cylinder 110 and includes a seal assembly 121 therein. The valve housing 120 can be pumped by the main drive cylinder 110. The width of the valve housing 120 (i.e., the direction perpendicular to the advancing direction of the seal assembly 121) may be formed to have a length equal to or greater than the radius of the pipe 10. [

The valve housing 120 may block or open the pipe 10 according to the back and forth movement of the seal assembly 121 to prevent the byproducts generated during the semiconductor processing process from entering the chamber. The valve housing 120 collides with the protection bar 121-1 of the seal assembly 121 when the piping 10 is shut off by the main drive cylinder 110 and collides with the protection bar 121-1 of the seal assembly 121 when the pipeline 10 is opened. And may collide with the absorption bar 121-3.

The valve housing 120 is connected to the sub pumping valve 130 at the upper end thereof and connected to the open path of the pipe 10 provided according to the opening and closing of the sub pumping valve 130 to pass through the open path of the pipe 10 The gas can be guided to the piping 10.

In one embodiment, the valve housing 120 must be quickly closed in the event of a problem with the process or equipment to shut off the piping 10. Accordingly, it is possible to monitor the closing time by separately including a control unit for indicating the closing time due to the movement of the seal assembly 121. [ The control unit may display an alarm history generated when the main drive cylinder 110 is opened and closed and when the pipe 10 is shut off.

The valve housing 120 is connected to the other end of the valve housing 120 that is opposite to one end of the pipe 10 (i.e., the end that engages with the main drive cylinder 110) by bolts and nuts, The seal assembly 121 can be separated through the other end.

The sub pumping valve 130 includes first and second air outlets 131 and 132 for providing an open path of the piping 10 after the shutoff or shutdown of the piping 10 is completed. The sub pumping valve 130 may provide an open path of the pipe 10 when air is supplied through the first air inlet 131 (or the second air inlet 132). Here, the air can be discharged through the second air inlet / outlet 132 (or the first air inlet / outlet 131). The sub pumping valve 130 may be spaced about 8 mm from the valve housing 120 to minimize the temperature effect upon heating of the valve housing 120.

The sub pumping valve 130 is connected to the first air inlet 131 or the second air inlet 132 through the first air inlet 131 or the second air inlet 132 to reduce the impact generated in the equipment and the pump due to excessive gas flow when the main driving cylinder 110 is pumped. When air is supplied and air is supplied, the gas in the pipe 10 can be gradually pumped. Here, one end of the sub pumping valve 130 may be connected to the pipe 10, and a lower end thereof may be connected to the valve housing 120. In one embodiment, the sub pumping valve 130 may move the seal bellows when air is supplied through the first air inlet 131 or the second air inlet 132.

Fig. 2 is a view for explaining the flow of gas due to the opening and closing of the main drive cylinder and the sub pumping valve of the gate valve shown in Fig. 1;

2A, when the sub-pumping valve 130 is opened and the piping 10 is blocked by the seal assembly 121 of the valve housing 120, the gas flows into the first air inlet 131 of the sub pumping valve 130 Or through the open path created by the air supplied to the second air inlet port 132 and then through a portion of the valve housing 120 and back to the piping 10 via the seal assembly 121. That is, the gas flows in the (a) direction and can reduce the impact caused by the pumping due to the flow in the direction (a).

2B, when the sub pumping valve 130 is closed and the piping 10 is opened by the seal assembly 121 of the valve housing 120 after the sub pumping valve 130 is opened and pumped b) direction.

In FIGS. 2A and 2B, the gas can flow through one end of the pipe 10 connected to the semiconductor equipment to the pipe 10 connected to the vacuum pump.

3 is a view for explaining a seal assembly driven by the main drive cylinder of the gate valve shown in Fig.

3A, the seal assembly 121 may include a protection bar 121-1, a pusher 121-2, a shock absorption bar 121-3, and a slider 121-4.

The protection bar 121-1 includes at least one shock absorbing O-ring 121-1a on its front surface so that it can absorb the impact when the pipe 10 is shut off. The protection bar 121-1 can block the pipe 10 in accordance with the forward and backward movement of the pusher 121-2 and absorb the impact applied to one end of the valve housing 120 when the pipe 10 is shut off. The shock absorbing O-rings 121-1a are arranged in a plurality of (for example, four) shock absorbing O-rings 121-1a at predetermined intervals so as to partially protrude from the front surface of the protection bar 121-1 and are made of a material resistant to corrosive gas such as overburden . The protection bar 121-1 can prevent the semiconductor process by-product from being deposited on the sealing o-ring 121-8a of the seal assembly 121 and on at least one component during opening of the main valve connected to the main drive cylinder 110 have.

The pusher 121-2 can open and close the pipe 10 by moving the protection bar 121-1 back and forth. The pusher 121-2 can be moved back and forth by the slider 121-4 to support the overall movement of the seal assembly 121. [ The pusher 121-2 has a slider hole 121-4a formed therein and is in contact with the slider 121-4 accommodated therein and has a plurality of inclined holes 121-5 formed at the upper end thereof, And can contact the plurality of circular balls 121-6. The upper and lower ends of the pusher 121-2 can be covered by the rectangular cover 121-7, respectively.

One end of the shock absorbing bar 121-3 is disposed at the upper end of the rectangular cover 121-7 at the lower end and the shock absorbing member 121-3a is provided at the other end thereof so that the impact Can be absorbed. In one embodiment, the impact absorbing bar 121-3 may be disposed between the pusher 121-2 and the roller 121-9. The shock absorbing bar 121-3 can absorb an impact applied to the other end of the valve housing 120 when the pipe 10 is opened in accordance with the forward and backward movement of the pusher 121-2. The shock absorbing member 121-3a is disposed so as to protrude from one end of the impact absorbing bar 121-3 and can be formed of a high temperature urethane material.

The slider 121-4 is accommodated in the slider hole 121-4a formed in the moving direction of the pusher 121-2 so as to penetrate from the upper end to the lower end on the left and right sides with respect to the center of the pusher 121-2, 121-2. The slider 121-4 may be arranged asymmetrically on the left and right sides of the pusher 121-2. Specifically, the slider 121-4 is disposed on the left side of the pusher 121-2 with a short slider disposed on the long slider, received in the slider hole 121-4a at the lower end of the pusher 121-2, A long slider is disposed on the short slider at the right side of the pusher 121-2 and can be received in the slider hole 121-4a at the upper end of the pusher 121-2.

Referring to FIG. 3B, the seal assembly 121 may include a plurality of inclined holes 121-5 and a plurality of circular balls 121-6.

The plurality of inclined holes 121-5 may be formed at each of the upper and lower ends of the pusher 121-2 and may have a predetermined angle. A plurality of inclined holes 121-5 may be formed at each of the upper and lower ends of the pusher 121-2, and a plurality of circular balls 121-6 may be accommodated therein.

The plurality of circular balls 121-6 are accommodated in each of the plurality of inclined holes 121-5 and can move along the plurality of inclined holes 121-5 by the forward and backward movement of the pusher 121-2. The plurality of circular balls 121-6 are positioned on the upper side of the plurality of inclined holes 121-5 when the pusher 121-1 advances by the slider 121-4, And may be positioned on the lower side of the plurality of inclined holes 121-5 when the first arm 121-1 is retracted.

Referring to FIG. 3C, the seal assembly 121 may include a plurality of rectangular covers 121-7, a plurality of circular covers 121-8, and a plurality of rollers 121-9.

The plurality of rectangular covers 121-7 cover the pusher 121-2 at the upper and lower ends of the pusher 121-2 to protect the pusher 121-2. The plurality of rectangular covers 121-7 can cover all internal components of the seal assembly 121 except for the protection bars 121-1 and the shock absorption bars 121-3. The rectangular cover 121-7 disposed at the upper end of the pusher 121-2 of the plurality of rectangular covers 121-7 is coupled with the circular cover 121-8 at the upper end thereof, The rectangular cover 121-7 disposed at the lower end of the pusher 121-2 may be coupled with the circular cover 121-8 at the lower end thereof. The plurality of rectangular covers 121-7 can be combined with the plurality of rollers 121-9 at each of the plurality of corners.

The plurality of circular covers 121-8 may be disposed at the upper and lower ends of the plurality of rectangular covers 121-7, respectively. The circular cover 121-8 disposed at the upper end of the plurality of rectangular covers 121-7 among the plurality of circular covers 121-8 has a sealing O-ring 121-8a disposed at the upper end thereof, It is possible to prevent the semiconductor process by-products from being introduced into the chamber.

The plurality of rollers 121-9 may be disposed between the plurality of rectangular covers 121-7 to support the back and forth movement of the seal assembly 121 within the valve housing 120. [ The plurality of rollers 121-9 are disposed at the respective corners of the plurality of rectangular covers 121-7 and partially protruded outside the plurality of rectangular covers 121-7, And can rotate along the side surface of the housing 120. In one embodiment, the plurality of rollers 121-9 may reduce the frictional force between the seal assembly 121 and the valve housing 120.

Fig. 4 is a view for explaining the sub-pumping valve of the gate valve shown in Fig. 1;

Referring to FIG. 4, the sub pumping valve 130 may include first and second air outlets 131 and 132 and an indicator 133.

The first and second air inlets 131 and 132 are disposed at the upper end of the sub pumping valve 130 to supply air for driving the actuator unit. When the seal bellows moves according to the supply of air through the first and second air outlets 131 and 132, it can be opened or closed. When the air flows into the sub pumping valve 130 through the first air inlet 131, the air is discharged to the second air inlet 132. When the air flows into the sub pumping valve 130 through the second air inlet 132, 1 air inlet port 131. The air inlet /

The indicator 133 includes an open hole at one end thereof and may be connected to the shaft of the driving cylinder and protrude outward through the open hole as the driving cylinder moves back and forth. When the indicator 133 protrudes through the open hole, the operator can know that the sub pumping valve 130 is open.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the present invention as defined by the following claims It can be understood that

100: Gate valve
110: main drive cylinder 120: valve housing
121: Seal assembly
121-1: Protection bar 121-1a: shock absorption o-ring
121-2: Pusher
121-3: Shock absorbing bar 121-3a: Shock absorbing member
121-4: Slider 121-4a: Slider hole
121-5: Slope hole 121-6: Circular ball
121-7: square cover 121-8: circular cover
121-8a: Sealing O-ring 121-9: Roller
130: Sub pumping valve
131, 132: Air inlet / outlet 133: Indicator
10: Piping

Claims

A main drive cylinder; And
And a valve housing penetrating the pipe and connected to the main drive cylinder and including a seal assembly therein,
The seal assembly includes a pusher that includes a protection bar and an impact absorbing O-ring on its front surface to prevent gas infiltration into the valve housing when the pipe is opened, and moves the seal assembly back and forth to open and close the pipe Gate valve.

The method according to claim 1,
Further comprising: a sub-pumping valve including first and second air outlets for providing an open path of the pipe through supply of air.

3. The apparatus of claim 2, wherein the sub-pumping valve
And a seal bellows inserted in the seal bellows and moving back and forth by air supplied to the first air inlet or the second air inlet and outlet.

3. The apparatus of claim 2, wherein the sub-pumping valve
And reduces an impact caused by pumping by the main drive cylinder through an open path of the pipe.

4. The apparatus of claim 3, wherein the sub-pumping valve
And an indicator including an open hole at one end thereof and protruding outward through the open hole in accordance with the forward and backward movement of the seal bellows.

The seal assembly of claim 1,
Further comprising a shock absorbing bar having one end connected to the pusher and the other end including an impact absorbing member to absorb an impact when the pipe is opened.

The seal assembly of claim 1,
And a slider accommodated in a slider hole formed in a direction of movement of the pusher so as to pass through the lower end of the pusher in the left and right directions with respect to the center of the pusher and to support the forward and backward movement of the pusher.

The seal assembly of claim 1,
A plurality of inclined holes formed in upper and lower ends of the pusher, respectively; And
And a plurality of circular balls accommodated in each of the plurality of inclined holes and moving along the plurality of inclined holes by back and forth movement of the pusher.

The seal assembly of claim 1,
A plurality of rectangular covers covering the pusher at the upper and lower ends of the pusher to protect the pusher; And
And a plurality of circular covers disposed at the upper and lower ends of the plurality of rectangular covers, respectively, and in which a sealing O-ring is disposed.

10. The seal assembly of claim 9, wherein the seal assembly
And a plurality of rollers disposed between the plurality of square covers for supporting back and forth movement within the valve housing.

The method according to claim 1,
Further comprising a control unit for indicating a closing time of the main drive cylinder by movement of the seal assembly.

A valve housing connected to the main drive cylinder and passing through the piping;
A protection bar inserted into the valve housing and capable of preventing gas infiltration into the valve housing when the pipe is opened, and an impact absorbing O-ring on the front surface thereof, and the protection bar is moved forward and backward to open and close the pipe A seal assembly including a pusher; And
And a sub-pumping valve including first and second air outlets for providing an open path of the pipe through supply of air.