KR20160031883A - A drying appartus for a substrate for display - Google Patents

Abstract

The present invention relates to a drying apparatus for a display substrate and, more specifically, a drying apparatus for a display substrate effectively evaporating and eliminating moisture between substrates without heat loss of the substrates and various electronic components installed on the substrates. Provided is the drying apparatus for the display substrate, comprising: a heating device; a guiding tube wherein gas, heated by the heating device, flows; and a body including a gas floating chamber, configured to guide gas discharged by the guiding tube to float therein and guide the gas to be discharged towards the substrates, and a lamp unit provided in the gas floating chamber. The width of a lower portion of the gas floating chamber is formed to get narrower toward the discharging direction. A discharging hole of the gas floating chamber is arranged to face an edge of the substrates, which are bonded or stacked, and an adjacent area of the same.

Description

[0001] The present invention relates to a drying apparatus for a display substrate,

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a drying apparatus for a substrate for a display, and more particularly, to a drying apparatus for a substrate for a display which can effectively evaporate and remove moisture interposed between the substrate and the various electronic parts embedded in the substrate .

In manufacturing a display device using a large-area glass substrate, a cleaning operation using a cleaning liquid is performed to remove foreign substances generated after the etching of the electrode pattern and the like.

When the cleaning operation for the substrate is completed, a drying operation is performed on the substrate, which drying apparatus is disclosed in Korean Patent Laid-Open No. 10-2007-0050789.

In order to complete a display such as an OLED, an upper substrate and a lower substrate are attached to each other. In this case, in the state where the upper substrate and the lower substrate are attached to each other, fine gaps therebetween, May remain.

Such moisture or a cleaning liquid component has a problem of corroding the electrode or damaging the attachment state of the electrode tab, and therefore, it is necessary to remove it.

For this purpose, a drying device such as a hot gun, which physically contacts the rim of the substrate, is used, but the temperature applied from the outside is high because the heat must be transferred between the gaps on the substrate having low thermal conductivity.

If the heating body of high temperature is directly contacted to the substrate, moisture and cleaning liquid between the substrates can be removed, but heat and damage of the electrodes and the OLED layer may be caused.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to effectively remove moisture interposed between substrates without heating the heater or other physical structure for heating directly on the substrate, It is an object of the present invention to provide a drying apparatus for a display substrate which does not cause damage.

To achieve these objects and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, A guide pipe through which the heated gas moves in the heating device; And a body part having a gas flow chamber for guiding the gas discharged from the guide tube to be discharged from the inside of the guide tube toward the substrate and a lamp part provided in the gas flow chamber, Wherein the width of the gas flow chamber is narrowed toward the discharge direction and the discharge port of the gas flow chamber is disposed so as to face the edge of the stacked substrate and its adjacent portion.

The gas flow chamber includes a recess formed in the body portion; A first guide plate extending downward from a first portion of the body portion and being inclinedly disposed and a second guide plate extending downward from a second portion of the body portion and disposed obliquely, And the first guide plate or the second guide plate guides the flow of the air to be discharged.

 The lower end of the first guide plate and the lower end of the second guide plate are spaced apart from each other to form the discharge port so that the discharged gas can be introduced into the gap between the substrates to which the discharged gas is adhered.

And a discharge guide pipe for guiding the gas to be discharged toward the upper space inside the gas flow chamber is formed at the end of the guide pipe.

And the lamp unit is disposed at a position where the gas circulating in the air circulation chamber can pass before discharging the gas to the discharge port.

The lamp unit may include at least one or more lamps that emit near infrared rays or infrared rays. The lamp unit may further include a fixed holder that fixes the lamp unit to the inside of the gas flow chamber.

The body part may be provided as a pair and may be spaced apart from each other and may be spaced from each other according to the size of the substrate to be humidified and may include a gap adjusting part for adjusting the gap between the body parts .

A buffer chamber provided between the gas guide pipe and the gas flow chamber for guiding the gas discharged from the gas guide pipe to the gas flow chamber and a connection channel connecting the buffer chamber and the gas flow chamber .

The body part may further include a cooling chamber in which a cooling fluid or a cooling fluid for suppressing a temperature rise of the body part is accommodated.

A sliding rail connected to the upper part of the body part, a movable rail provided with the connecting housing slidably movable, and a sliding rail connected to the moving rail to cause sliding movement of the connecting housing and the body part according to the rotating state, And a driving unit for adjusting the driving force.

According to the present invention, since the heated physical structure (e.g., hot gun) does not directly touch the substrate and does not remove the moisture in the substrate, the substrate and the electrical components in the substrate can be prevented from being thermally damaged.

That is, the heated gas (e.g., air) comes into contact with the moisture in the micro gap between the bonded substrates and evaporates the moisture, thereby removing moisture without damaging the substrate or other electrical components.

Further, a lamp section for generating near infrared rays or infrared rays in the gas flow chamber is provided, and radiant heat emitted therefrom is irradiated to the substrate. Therefore, the moisture removal performance can be enhanced by such radiant heat.

On the other hand, since hot air flows in the gas flow chamber, it can be supplied with thermal energy in contact with the lamp, so that convective heat loss of the gas can be minimized.

Since the discharge port of the gas flow chamber is narrowed in the discharge direction to have the same shape as the spray nozzle and the velocity of the discharged gas is increased, the gas can be more effectively supplied to the gap of the substrate, have.

FIG. 1 shows the arrangement of a drying apparatus and a substrate for a display substrate according to the present invention.
Fig. 2 shows a first embodiment of a drying apparatus for a display substrate according to the present invention.
Fig. 3 shows a second embodiment of a drying apparatus for a display substrate according to the present invention.
FIG. 4 is a cross-sectional view of a first embodiment of a drying apparatus for a display substrate according to the present invention and a layout of a substrate.
5 is a schematic sectional view showing a second embodiment of a drying apparatus for a substrate for a display according to the present invention and an arrangement state of the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention, and the manner of achieving them, will be apparent from and elucidated with reference to the embodiments described hereinafter in conjunction with the accompanying drawings. However, it is to be understood that the present invention is not limited to the disclosed embodiments, but may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. It is intended that the disclosure of the present invention be limited only by the terms of the appended claims.

Also, terms used herein are for the purpose of illustrating embodiments and are not intended to limit the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. &Quot; comprises "and / or" comprising "used in the specification do not exclude the presence or addition of components other than the components mentioned. Unless defined otherwise, all terms (including technical and scientific terms) used herein may be used in a sense commonly understood by one of ordinary skill in the art to which this invention belongs.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1, the upper substrate 1 and the lower substrate 2 are bonded together. In the upper substrate 1 and the lower substrate 2, a light-emitting substrate 3 is bonded to the upper substrate 1 and the lower substrate 2, And the film wiring (tab) 4 should be attached, and wet cleaning is carried out before adhesion to remove foreign matter adhering to the substrate.

After performing the wet cleaning, it is dried, and then the above-mentioned components are attached to the substrate to complete the display substrate assembly.

The width of the lower substrate 2 is larger than the width 1 of the upper substrate so that the film wiring 4 can be disposed on the upper substrate.

A circuit pattern and a circuit electrode are arranged between the upper substrate 1 and the lower substrate 2 which are bonded together.

In such a state, undried cleaning liquid or water 5 may be interposed between the bonded substrates, in particular between the outer edge of the bonded substrate or the edge of the bonded substrate, such cleaning liquid or moisture may corrode the circuit And it may cause damage to the attachment state of the film wiring (tab) 4 already attached.

A display substrate drying apparatus (hereinafter, referred to as 'drying apparatus') 100 according to the present invention is disposed along the longitudinal direction of two opposing sides (preferably, two long sides) of one substrate.

As shown in Fig. 1 (a), A1 and A2 mean the portion where the drying apparatus according to the present invention is disposed.

The drying apparatus 100 is spaced from each other and fixed in a facing state. Then, the bonded substrate moves in the direction of the arrow D in Fig. 1 (a), and the substrate 1, 2 can move by the moving roller (not shown) located thereunder.

On the other hand, the interval between the two drying apparatuses 100 facing each other is not fixed, but can be adjusted according to the size of the substrate.

For example, when the size of the substrate to be dried is 46 inches and the 60 inch substrate is transferred, the interval between the drying apparatuses 1 is enlarged, so that the drying operation for the substrate can be performed flexibly.

The spacing adjustment marks between the drying apparatuses 1 are indicated by left and right arrows D1 and D2.

As will be described later, in the drying apparatus 100, the heated gas and near infrared rays or infrared rays are emitted, and the emitted gas and the near infrared rays or infrared rays are directed to the rim of the bonded substrates 1 and 2 and the vicinity thereof.

Particularly, as shown in FIG. 1 (b), the bonded substrates 1 and 2 are finely spaced apart. The hot gas and near-infrared rays emitted from the drying apparatus 100 or infrared rays penetrate through the minute spaced spaces So that the water or cleaning liquid component 5 located there can be evaporated off.

Fig. 2 shows a first embodiment of a drying apparatus 100 according to the present invention.

2, the drying apparatus 100 according to the first embodiment includes a heating device 101 for heating a base body (e.g., air), and a heating device 101 connected to the heating device 101 to guide the movement of the heated body And a body 110 connected to the guide tube 102 and through which the air discharged from the guide tube 102 flows.

In the body 110, a gas flow chamber 111 is provided in which the air discharged from the guide pipe can flow while changing its moving direction.

The gas flow chamber 111 includes a recess portion 112 provided in the body portion, a first guide plate 121 disposed downwardly from the first portion of the lower end of the body portion 110, And a second guide plate 122 disposed obliquely downward from the second portion of the lower end.

The lower end of the first guide plate 121 and the lower end of the second guide plate 122 are spaced apart from each other to form a discharge port 113 of the gas flow chamber 111. The discharge port 113 is connected to the rim Let the part be pointed.

On the other hand, the distance between the first guide plate 121 and the second guide plate 122 becomes closer to the lower side and becomes tapered, whereby the speed of the gas g discharged to the discharge port 113 can be increased.

As the velocity of the gas increases, the gas can more effectively enter the gaps of the bonded substrates and contact the moisture or cleaning fluid components and evaporate them.

The body part 110 is provided with a jig part 114. The jig part 114 is formed in a curved " 1 extending portion 114a and a second extending portion 114b extending in the direction of the substrate 1, 2 in the first extending portion 114a.

The jig 114 serves to support the substrate when an exceptional situation occurs in which the substrate (1,2) moving by the roller deviates.

A discharge guide pipe 103 is provided at an end of the guide pipe 102 and the discharge guide pipe 103 is disposed through the first guide plate 121 or the second guide plate 122.

It is preferable that the discharge guide pipe 103 is arranged to be upwardly inclined so that the base body g discharged from the discharge guide pipe 103 moves toward the upper portion of the gas circulation chamber 111. [

The gas g discharged from the discharge guide pipe 103 moves along the side wall and the ceiling of the gas flow chamber 111 and is guided by the first guide plate 121 or the second guide plate 122 Moves toward the discharge port 113, and then penetrates at minute intervals between the bonded substrates 1 and 2 to evaporate the water or the cleaning liquid component 4.

On the other hand, the lamp unit 130 is provided on the moving route of the flowing gas. 2, the number of the lamp units 130 is two, but one or two or more lamp units 130 may be provided.

The lamp unit 130 is preferably composed of an infrared (IR) lamp capable of emitting near-infrared rays or infrared rays. The lamp unit 130 is fixed to the lamp holder 131 and the lamp holder 131 is fixed to the inner wall of the gas flow chamber 111.

The lamp unit 130 is also in contact with the gas g flowing in the gas flow chamber 111 to supply thermal energy to the substrate g, To help evaporate the water and cleaning fluid component (4) interposed between the bonded substrates (1, 2).

The reason why the moisture 4 between the bonded substrates 1 and 2 is evaporated is that the convection heat traveling on the gas circulating in the gas flow chamber 111 and the heat radiated by the lamp unit 130 will be.

Therefore, it is possible to remove the water or the cleaning liquid component 4 by using convection heat and radiant heat without the physical contact such as a hot-gun conventionally applied to the bonded substrates 1 and 2, It is possible to prevent physical damage of various components.

On the other hand, a cooling chamber 141 into which a cooling gas or a cooling fluid flows is provided at an upper portion of the gas flow chamber 111.

Cooling fluid or cooling gas may be introduced into the cooling chamber 141 to prevent abnormal overheating of the body 110. The body 110 has a temperature sensor 151 and one end of the temperature sensor 151 is located in the gas flow chamber 111 to measure the temperature inside the gas flow chamber 111.

Fig. 3 shows a second embodiment of the present invention.

The construction of the second embodiment of the present invention is similar to that of the first embodiment, but the route of the flow of the heated air (g) and the flow path of the gas inside the gas flow chamber 111 are slightly different from those of the first embodiment.

The same reference numerals will be used for the same components as those in the first embodiment, and a detailed description thereof will be omitted.

In the drying apparatus 100 according to the second embodiment, the guide tube 102 is coupled to the upper surface of the body 110, and the air g discharged from the guide tube 102 is supplied to the upper portion of the body 110 A buffer chamber 161 is provided which is temporarily accommodated.

A gas flow chamber 111 is provided below the buffer chamber 161 and the buffer chamber 161 and the gas flow chamber 111 communicate with each other through a connection channel 162.

Thus, the heated air moves along guide tube 102 -> buffer chamber 161 -> connection channel 162 -> gas flow chamber 111.

The heating gas g flowing into the gas flow chamber 111 flows at the upper portion inside the gas flow chamber 111 and comes into contact with the lamp portion 130 and then comes down the side wall of the gas flow chamber 111, 1 guide plate 121 (or the second guide plate 122) and escape through the discharge port 113. [

The gas exiting the discharge port 113 enters the fine gaps of the adhesion substrates 1 and 2 and evaporates the water or the cleaning liquid component 5 located therein.

On the other hand, near infrared ray or infrared ray IR emitted from the lamp unit 130 is irradiated on the edge of the adhesion substrate 12, and radiant heat is transmitted thereby contributing to evaporation of water or the cleaning liquid component 5.

On the other hand, although it is not visually shown in Fig. 3, it is preferable that a cooling chamber similar to Fig. 2 is arranged in the body part 110. [

The difference between the first embodiment and the second embodiment arises from the difference due to how to secure the route through which the heated air g is introduced into the gas flow chamber 111, And whether or not it is secured.

FIG. 4 shows that the drying apparatus 100 according to the first embodiment is facing each other with the substrates 1 and 2 on which the drying apparatus 100 is stuck. FIG. 5 shows the drying apparatus 100 according to the second embodiment, Are facing each other with the substrates 1 and 2 to which they are attached.

As shown in FIGS. 4 and 5, when the relatively small-sized substrate moves while moving between the drying apparatuses 100, the intervals are adjusted, and the discharge ports 113 of the respective drying apparatuses 100 are arranged on the small- (G) and near infrared rays or infrared rays (IR) are irradiated to the rim, in particular, the interval portion of the bonded substrate.

In addition, when the relatively large-sized substrate enters, the distance between the large-area substrate and the large-area substrate becomes large. In addition, the discharge port 113 of each drying apparatus is located above the rim of the large-area substrate, So that hot air and near infrared rays or infrared rays are irradiated.

A moving rail 170 is provided on the upper part of the body 110 and a driving part 171 is provided on one side of the moving rail 170 to adjust the distance between the drying devices.

The driving portion 171 may be a rotation handle portion that can be manually moved or a drive motor that can be automatically moved.

When the driving unit 171 is the rotation handle, the operator adjusts the gap using the rotation handle.

When the driving unit 171 is a driving motor, the interval is automatically adjusted according to a predetermined value or the size of the substrate sensed according to the size of the substrate to be entered.

The body 110 is connected to the movable rail 170 by the connection housing 172.

A power transmitting member such as a worm and a worm gear intervenes between the driving unit 171 and the moving rail 170 and the connecting housing 172 so that the body 110 and the connecting housing 172 move along the moving rails 171, The distance between the body portions 110 of the drying apparatus 100 can be adjusted.

Hereinafter, the operation of the present invention will be described with reference to the accompanying drawings.

As shown in Fig. 1, the bonded substrates 1, 2 are moved by the moving rollers and passed between the drying apparatuses 100.

At this time, as shown in Figs. 2 and 3, the discharge ports 113 are adjusted so as to face the edges of the substrates 1 and 2 to which the discharge ports 113 are attached.

The heating apparatus 101 is already operated so that the hot gas is heated and the guide tube 102 and the discharge guide tube 103 (or the buffer chamber , 161) and flows into the gas flow chamber 111.

The gas g introduced into the gas flow chamber 111 does not move directly to the edge of the adhesion substrate 1 and 2 but moves along the wall of the gas flow chamber 111. [

When power is applied to the lamp unit 130, near infrared rays or infrared rays are emitted from the lamp unit 130, and the lamp unit 130 itself is also heated.

The gas g moving along the wall of the gas flow chamber 111 is supplied with thermal energy through the lamp unit 130 and then is guided along the first guide plate 121 (or the second guide plate 122) Move downward.

Since the interval between the first guide plate 121 and the second guide plate 122 becomes narrower toward the lower side, the speed of the gas becomes faster as it goes downward.

The accelerated gas g exits from the discharge port 131 and flows into the fine gaps of the adhesion substrates 1 and 2 and comes into contact with the water or the cleaning liquid component 4 in the minute gap to vaporize it and evaporate it.

On the other hand, since the near infrared rays or infrared rays IR irradiated from the lamp unit 130 are irradiated to the rim of the bonded substrates 1 and 2, the radiant heat of the near infrared rays or the infrared rays IR irradiates the moisture in the fine gaps of the bonded substrate or the evaporation of the cleaning liquid component 4 Contributing.

1, the position of the drying apparatus 100 of the present invention is arranged to have a predetermined length along the lengthwise direction of the sides of the substrates 1 and 2, as indicated by A1 and A2.

Therefore, after a certain position of the adhesion substrates 1 and 2, in particular, a micro gap, is present in the drying apparatus 100 and there is moisture or a cleaning liquid component, a distance corresponding to the length of the drying apparatus 100 When moved, the portion is continuously exposed to the heated gas and near-infrared rays emitted or discharged from the drying apparatus 100.

Therefore, even if the moisture is not removed at the time of entry, continuous exposure can ultimately remove moisture in the micro gap.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be appreciated that one embodiment is possible. Accordingly, the true scope of the present invention should be determined by the technical idea of the claims.

100: drying device 110:
111: gas flow chamber 121: first guide plate
122: second guide plate 130:

Claims (10)

A heating device for heating the gas;
A guide pipe through which the heated gas moves in the heating device;
And a body part having a gas flow chamber for guiding the gas discharged from the guide tube to be discharged from the inside of the guide tube toward the substrate, and a lamp part provided in the gas flow chamber,
Wherein the width of the lower portion of the gas flow chamber is narrowed toward the discharge direction and the discharge port of the gas flow chamber is disposed so as to face the edge of the laminated or bonded substrate. . The method according to claim 1,
The gas flow chamber includes a recess formed in the body portion;
A first guide plate extending downward from the first portion of the body portion and disposed obliquely, and a second guide plate extending downward from the second portion of the body portion and disposed obliquely,
The first guide plate and the second guide plate are spaced apart from each other, and the gap is narrowed downwardly,
Wherein the first guide plate or the second guide plate guides the flow of air to be discharged. 3. The method of claim 2,
Wherein the lower end of the first guide plate and the lower end of the second guide plate are spaced apart from each other to form the discharge port and guide the discharged gas to be introduced into the gap between the substrates to which the discharged gas is adhered. Device. The method according to claim 1,
Further comprising a discharge guide pipe guiding an end of the guide pipe so that gas can be discharged toward the upper space inside the gas flow chamber. 3. The method according to claim 1 or 2,
Wherein the lamp unit is disposed at a position where the gas circulating in the air circulation chamber can pass before discharging the gas to the discharge port. 6. The method of claim 5,
Wherein the lamp unit comprises at least one lamp that emits near infrared rays or infrared rays,
Further comprising a fixed holder for fixing the position of the lamp part in the gas flow chamber so that the lamp part can be fixed inside the gas flow chamber. The method according to claim 1,
The body part may be provided in a pair and be spaced apart from each other so that the gap can be adjusted according to the size of the substrate to be moisture-
Further comprising an interval adjusting unit for adjusting an interval between the body units. The method according to claim 1,
A buffer chamber provided between the gas guide pipe and the gas flow chamber for guiding the gas discharged from the gas guide pipe to the gas flow chamber;
Further comprising a connection channel connecting the buffer chamber and the gas flow chamber. 9. The method of claim 8,
Wherein the body further includes a cooling chamber in which a cooling fluid or a cooling fluid for suppressing a temperature rise of the body is accommodated. The method according to claim 1,
A connection housing connected to an upper portion of the body portion,
A movable rail on which the connection housing is slidably provided,
Further comprising a driving unit connected to the movable rail to adjust the position of the body unit by causing the sliding movement of the connection housing and the body unit according to a rotation state thereof.

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