KR20160014253A - Apparatus for inspecting a display cell - Google Patents

Abstract

Disclosed is an apparatus for inspecting a display cell. The apparatus includes an inspection chamber for performing an inspection process on a display cell formed on a substrate; a substrate stage which is arranged in the inspection chamber, and supports the substrate to put the display cell downwards; a first card stage which is arranged under the substrate stage, and supports a first probe card to be in contact with first inspection pads arranged along a first lateral surface of the substrate, and whose location is fixed; and a second card stage which is arranged under the substrate stage, supports a second probe card to be in contact with second inspection pads arranged along a second lateral surface of the substrate, and is configured to be horizontally movable according to the size of the substrate.

Description

[0001] Apparatus for inspecting a display cell [0002]

Embodiments of the present invention relate to a display cell inspection apparatus. To an apparatus for electrically and optically inspecting a display cell formed on a mother substrate (hereinafter referred to as a substrate) such as an OLED (Organic Light Emitting Device) cell.

The OLED device used as a flat panel display device is widely used in portable display devices, smart phones, tablet PCs, and the like, as well as being widely used as a next-generation display device due to its large size, having a wide viewing angle, excellent contrast and high response speed . In particular, the OLED device has advantages such as brightness, driving voltage, response speed, etc., and is capable of multi-coloring as compared with an inorganic light emitting display device.

In the manufacturing process of the OLED device, a TFT (Thin Film Transistor) layer is formed on the substrate through various film forming processes and etching processes, and on the TFT layer, a lower electrode and an organic layer (for example, a hole transport layer, Transport layer) and an upper electrode may be formed. Then, the OLED device can be completed by sealing the TFT layer and the substrate on which the organic light emitting layer is formed using an encapsulating substrate.

In particular, a plurality of OLED cells may be formed on the substrate, and after the sealing process is completed, individual OLED cells may be individualized through a cutting process to complete the OLED device.

Meanwhile, after the sealing process is completed, an inspection process for OLED cells formed on the substrate may be performed. In the inspection process, a function test of the TFT layer, a correction circuit inspection, an image quality inspection, a spectral inspection, an image inspection, and the like may be performed by applying an inspection signal to the OLED cells. However, since the inspecting process is performed after the sealing process is completed as described above, the loss due to the defective OLED devices in the inspecting process may be increased.

In order to solve the above problems, Japanese Unexamined Patent Application Publication No. 10-2006-0017586 discloses a method of performing the TFT array function test before performing the cell process after the TFT array forming process, -0046645 and 10-2011-0096382 disclose a method for measuring the thickness of the thin film layers during or after forming each thin film layer of OLED cells.

However, even if the function test for the TFT array and / or the thickness measurement for the thin film layers forming the organic light emitting layer are performed as described above, since the final inspection processes must be additionally performed after the sealing process is performed, There is a possibility that the productivity of the apparatus is deteriorated.

In Korean Patent Application No. 10-2012-0120865 filed by the present applicant, in order to solve the above-mentioned problems, it is possible to perform an inspection process on display cells such as a plurality of OLED cells formed on a substrate before a sealing process An apparatus for inspecting display cells is disclosed, and an apparatus for inspecting the display cells is being continuously researched and developed.

On the other hand, in the case of a display cell for manufacturing a large-sized TV, one display cell may be formed on a substrate, and test pads for inspecting the display cell may be disposed along the first and second sides of the substrate, Or may be disposed on both sides of the substrate.

A new type of probe card arrangement may be required if the test pads are disposed along at least two of the side surfaces of the substrate as described above. Further, when the size of the substrate is changed, the position of the probe card needs to be changed.

Embodiments of the present invention provide a display cell inspection apparatus capable of easily performing a display cell inspection process on a substrate when inspection pads are disposed along at least two sides of side surfaces of the substrate.

According to embodiments of the present invention, a display cell inspection apparatus includes: an inspection chamber for performing an inspection process on a display cell formed on a substrate; an inspection chamber disposed inside the inspection chamber, A first card stage supporting and supporting a first probe card disposed below the substrate stage and configured to contact first test pads disposed along a first side of the substrate; A second card stage configured to support a second probe card disposed below the substrate stage and configured to contact second test pads disposed along a second side of the substrate, the second probe stage configured to move in a horizontal direction according to the size of the substrate; . ≪ / RTI >

According to embodiments of the present invention, the second card stage may be adjacent to the first card stage and the first card stage and the second card stage may be disposed perpendicular to each other.

According to embodiments of the present invention, the first card stage may be arranged in the y-axis direction, and the second card stage may be arranged in the x-axis direction and movable in the y-axis direction.

According to embodiments of the present invention, the second card stage may be disposed in parallel with the first card stage.

According to the embodiments of the present invention, the display cell testing apparatus may further include a third card stage and a fourth card stage arranged in parallel with each other in a direction perpendicular to the first card stage. At this time, the third probe card and the fourth probe card may be respectively supported on the third card stage and the fourth card stage.

According to the embodiments of the present invention, the first card stage may be arranged in the y-axis direction, and the second card stage may be configured to be movable in the x-axis direction and the y-axis direction. Further, the third card stage may be configured to be movable in the y-axis direction, and the fourth card stage may be configured to be movable in the x-axis direction.

According to embodiments of the present invention, the substrate stage may include a vacuum plate having vacuum holes formed therein, and clamps for holding edge portions of the substrate may be disposed at edge portions of the vacuum plate.

According to embodiments of the present invention, the display cell inspection apparatus may further include a stage driving unit for moving and rotating the vacuum plate in the vertical and horizontal directions.

According to the embodiments of the present invention, the display cell inspection apparatus may further include clamp driving units for operating the clamps, and the clamp driving units may be configured such that when the internal pressure of the vacuum holes becomes higher than a predetermined pressure, The clamps can be operated to grip the edge portions.

According to the embodiments of the present invention, the vacuum holes are connected to a vacuum system including a vacuum pump, and the display cell inspection apparatus determines whether the internal pressure of the vacuum holes is preset And an auxiliary vacuum system for providing vacuum pressure for adsorbing the substrate when the pressure is higher than the pressure.

According to embodiments of the present invention, the display cell inspection apparatus may further include at least one alignment camera for detecting the probes of the first and second probe cards.

According to embodiments of the present invention, the display cell inspection apparatus may further include an optical inspection unit for checking the optical characteristics of the display cell to which the inspection signal is applied by the first and second probe cards.

According to embodiments of the present invention as described above, when inspection pads are arranged along at least two sides of a substrate on which a large OLED cell or a plurality of OLED cells used for large-scale TV production are formed, It is possible to easily perform the inspection on the OLED cell by arranging the probe cards to correspond to the OLED cell.

In addition, when the size of the substrate is changed, one probe card is fixed and the remaining probe cards are configured to be movable, so that the size of the substrate can positively cope with the change.

1 is a schematic view for explaining a substrate on which an OLED cell is formed.
2 is a schematic view for explaining an inline process facility to which a display cell inspection apparatus according to an embodiment of the present invention is connected.
FIG. 3 is a schematic view for explaining the display cell inspection apparatus shown in FIG. 2. FIG.
Fig. 4 is a schematic plan view for explaining the substrate stage shown in Fig. 3. Fig.
5 is a schematic side view for explaining the substrate stage shown in Fig.
6 is a schematic view for explaining the operation of the substrate stage shown in Fig.
FIGS. 7 and 8 are schematic diagrams for explaining probe cards and card stages shown in FIG. 3. FIG.
Fig. 9 is a schematic view for explaining another example of the substrate shown in Fig. 1. Fig.
10 and 11 are schematic views for explaining another example of the probe card and the card stage.
12 is a schematic view for explaining another example of the substrate shown in Fig.
13 and 14 are schematic views for explaining another example of the probe card and the card stage.
15 is a schematic configuration diagram for explaining the optical inspection unit shown in FIG.

BRIEF DESCRIPTION OF THE DRAWINGS The invention will be described in more detail below with reference to the accompanying drawings showing embodiments of the invention. However, the present invention should not be construed as limited to the embodiments described below, but may be embodied in various other forms. The following examples are provided so that those skilled in the art can fully understand the scope of the present invention, rather than being provided so as to enable the present invention to be fully completed.

When an element is described as being placed on or connected to another element or layer, the element may be directly disposed or connected to the other element, and other elements or layers may be placed therebetween It is possible. Alternatively, if one element is described as being placed directly on or connected to another element, there can be no other element between them. The terms first, second, third, etc. may be used to describe various items such as various elements, compositions, regions, layers and / or portions, but the items are not limited by these terms .

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Furthermore, all terms including technical and scientific terms have the same meaning as will be understood by those skilled in the art having ordinary skill in the art, unless otherwise specified. These terms, such as those defined in conventional dictionaries, shall be construed to have meanings consistent with their meanings in the context of the related art and the description of the present invention, and are to be interpreted as being ideally or externally grossly intuitive It will not be interpreted.

Embodiments of the present invention are described with reference to schematic illustrations of ideal embodiments of the present invention. Thus, changes from the shapes of the illustrations, e.g., changes in manufacturing methods and / or tolerances, are those that can be reasonably expected. Accordingly, the embodiments of the present invention should not be construed as being limited to the specific shapes of the areas illustrated in the drawings, but include deviations in shapes, the areas described in the drawings being entirely schematic and their shapes Is not intended to illustrate the exact shape of the area and is not intended to limit the scope of the invention.

FIG. 1 is a schematic view for explaining a substrate on which an OLED cell is formed, and FIG. 2 is a schematic view for explaining an inline process facility to which a display cell inspection apparatus according to an embodiment of the present invention is connected. FIG. 3 is a schematic view for explaining the display cell inspection apparatus shown in FIG. 2. FIG.

1 to 3, a display cell inspection apparatus 100 according to an exemplary embodiment of the present invention may be used to electrically and optically inspect a display cell such as an OLED cell 20. Referring to FIG. In particular, it can be preferably used for the substrate 10 on which the OLED cell 20 used for large-scale TV production is formed. Also, although not shown, a plurality of OLED cells may be used to perform the laminating inspection on the formed substrate.

Specifically, the inspection apparatus 100 encapsulates the OLED cell 20 using a cell process for forming the OLED cell 20 on the substrate 10 and an encapsulation substrate (not shown) in the manufacturing process of the OLED device, And to check the electrical and optical characteristics of the OLED cell 20 during the sealing process for sealing the OLED cell 20.

In particular, as shown in FIG. 2, the inspection apparatus 100 according to an embodiment of the present invention may be connected to an inline process facility for manufacturing the display cell 20. For example, the testing apparatus 100 may be connected between the cell processing facility 30 for the cell process and the sealing process facility 40 for the sealing process. For example, the cell processing facility 30 and the sealing process facility 40 may have a cluster shape, and the substrate 10 may be transferred between the cell processing facility 30 and the sealing process facility 40 An in-line substrate transfer device 50 may be disposed. According to an embodiment of the present invention, the inspection apparatus 100 may be connected to the in-line substrate transfer apparatus 50 between the cell process facility 30 and the sealing process facility 40, 30 may be used to perform an electrical and optical inspection process on the OLED cell 20 formed on the substrate 10.

The substrate 10 can be transferred from the cell processing facility 30 to the inspection apparatus 100 via the in-line substrate transfer apparatus 50 and the inspection and inspection process And then transferred to the sealing process facility 40 through the in-line substrate transfer device 50.

As described above, since the electrical and optical inspection process for the substrate 10 can be performed after the cell process and before the sealing process, the defective rate of the OLED cell 20 can be greatly reduced, It is possible to omit subsequent processes for the OLED cell 20 determined to be the OLED cell 20, thereby greatly reducing the manufacturing cost of the OLED cell 20. [

The cell process includes the steps of forming an OLED cell 20 on a substrate 10 and forming a TFT array layer on the substrate 10 and forming an organic emission layer on the TFT array layer can do. For example, the organic light emitting layer may include a lower electrode layer, a hole transporting layer, a light emitting layer, an electron transporting layer, an upper electrode layer, and the like. As shown in FIG. 1, the OLED cell 20 formed on the substrate 10 in the cell process may include a plurality of electrode pads electrically connected to the TFT array layer.

The first, second, third, and fourth test pads 22, 24, 26, 28 for inspecting the OLED cell 20 are formed on edge portions of the substrate 10, The first to fourth test pads 22, 24, 26, and 28 may be electrically connected to the electrode pads, though not shown in detail. As an example, a plurality of first, second, third, and fourth test pads 22, 22, and 24 may be disposed along the first, second, third, and fourth sides of the substrate 20, 24, 26, 28 may be provided.

As shown, one OLED cell 20 is formed on the substrate 10, but alternatively a plurality of OLED cells may be formed on the substrate 10.

The sealing process may be performed after the cell process by sealing the OLED cell 20 by attaching the sealing substrate and the substrate 10 on which the OLED cell 20 is formed.

The inspection apparatus 100 may include an inspection chamber 102 for providing a space for performing an electrical and optical inspection process on the OLED cell 20. That is, the substrate 10 can be transferred from the cell processing facility 30 to the inspection chamber 102 and then transferred from the inspection chamber 102 to the sealing process facility 40 after the inspection process is performed. .

According to an embodiment of the present invention, the inspection apparatus 100 may include a substrate transfer module 200 for transferring the substrate 100 between the inspection chamber 102 and the inline process facility. The substrate transfer module 200 includes a substrate transfer chamber 202 connected to the inspection chamber 102 and a substrate transfer chamber 202 disposed within the substrate transfer chamber 202 for transferring the substrate 100 between the inspection chamber 102 and the in- And a substrate transfer robot 204 for transferring the substrate.

The substrate transfer robot 202 may be connected between the inspection chamber 102 and the inline substrate transfer apparatus 50 and the substrate transfer robot 204 may be connected to the inline substrate transfer apparatus 50 And the substrate 10 can be transferred from the inline substrate transfer robot 52 provided in the substrate processing apparatus 100. [

The substrate 10 transferred to the inspection chamber 102 may be loaded on the substrate stage 300 disposed in the inspection chamber 102. According to an embodiment of the present invention, the substrate 10 may be transferred to the inspection chamber 102 with the OLED cell 20 facing downward. At this time, the substrate transfer robot 204 can transfer the substrate 10 while supporting the edge portions of the substrate 10.

Fig. 4 is a schematic plan view for explaining the substrate stage shown in Fig. 3, Fig. 5 is a schematic side view for explaining the substrate stage shown in Fig. 3, and Fig. 6 is a cross- Fig.

4 to 6, the substrate stage 300 includes a vacuum plate 302 having a plurality of vacuum holes 304 so that the back surface of the substrate 10 can be attracted to the vacuum plate 302 And a stage driving unit 310 for moving and rotating the wafer W.

The substrate 10 may be adsorbed on the lower surface of the vacuum plate 302 by vacuum pressure provided through the vacuum holes 304 and the vacuum holes 304 may be connected to the vacuum system 110 Can be connected. Although not shown in detail, the vacuum system 110 may include a vacuum pump, a pressure control valve, etc., as shown in FIG. 6, and its operation may be controlled by a controller 104 (see FIG. 3) .

The stage driving unit 310 may have a substantially rectangular coordinate robot shape. The stage driving unit 310 includes horizontal driving units 312 and 314 for moving the vacuum plate 302 in the horizontal direction, a vertical driving unit 316 for moving the vacuum plate 302 in the vertical direction, And a rotation driving unit 318 for rotating the vacuum plate 302.

The horizontal driving units 312 and 314 can horizontally move the vacuum plate 302 between the loading and unloading areas of the substrate 10 and the inspection area and can also move the OLED cell 20 in the inspection area. The vacuum plate 302 can be moved in the horizontal direction for inspection. The X-axis driving unit 312 and the Y-axis driving unit 314 may include an X-axis driving unit 312 and a Y-axis driving unit 314. The X-axis driving unit 312 and the Y- A motion guide, or the like.

The vertical driving unit 316 may vertically move the vacuum plate 302 for loading and unloading the substrate 10 and inspecting the OLED cell 20. For example, the vertical driving unit 316 may be configured using a servo motor, a speed reducer, and a linear motion guide. However, the configurations of the X-axis driving unit 312, the Y-axis driving unit 314, and the vertical driving unit 316 may be variously changed, so that the scope of the present invention is not limited thereto.

The rotation driving unit 318 may include a motor for rotating the vacuum plate 302. For example, the rotation driving unit 318 may be constructed using a direct drive motor and a cross roller bearing, and a vacuum pipe or the like connected to the vacuum plate 302 through a central through hole of the direct drive motor Can be deployed.

The vertical driving unit 316 may be mounted on the X-axis driving unit 312 and the rotary driving unit 318 may be mounted on the lower portion of the vertical driving unit 316. That is, the vertical driving unit 316 can be moved in the horizontal direction by the horizontal driving units 312 and 314, the rotation driving unit 318 can be moved in the vertical direction by the vertical driving unit 316, The plate 302 may be mounted on the lower portion of the rotation driving unit 318.

According to an embodiment of the present invention, the inspection apparatus may include an auxiliary vacuum system 320 connected to vacuum holes 304 formed in the vacuum plate 302 as shown in FIG. Although not shown in detail, the auxiliary vacuum system 320 may include an auxiliary vacuum pump, a pressure control valve, etc., and the pressure inside the vacuum holes may be reduced due to an operation error of the vacuum system 110, And may provide vacuum pressure through the vacuum holes 304 to stably adsorb the substrate 10 when the pressure is higher than the set pressure.

Although not shown, a pressure sensor (not shown) for measuring the pressure inside the vacuum holes 304 may be mounted on the substrate stage 300, and the controller 104 controls the vacuum holes The operation of the auxiliary vacuum system 320 may be controlled based on the internal pressure of the auxiliary vacuum system 304.

In addition, according to an embodiment of the present invention, a plurality of clamps 330 may be disposed at edge portions of the vacuum plate 302 to grip edge portions of the substrate 10. The clamps 330 may be formed to prevent the substrate 10 from falling when the pressure inside the vacuum holes 304 becomes higher than a preset pressure due to an operation error of the vacuum system 110, The edge portions of the substrate 10 can be gripped.

For example, clamp actuators 332 for operating the clamps 330 may be disposed on the vacuum plate 302, and the clamps 330 may be rotatably mounted on the vacuum plate 302 It can be mounted on the edge portion. Pneumatic cylinders may be used as the clamp driving parts 332 and the clamp driving parts 332 may rotate the clamps 330 so that the substrate 10 is gripped by the clamps 330 have.

Alternatively, the clamps 330 may be coupled to the clamp actuators 332 and moved in a horizontal direction, that is, away from or closer to the substrate 10, whereby the clamps 330 The holding of the substrate 10 may be performed.

FIGS. 7 and 8 are schematic diagrams for explaining the probe cards and the card stages shown in FIG. 3. FIG.

Below the substrate stage 300, the first to fourth test pads 22, 24, 26, and 28 are provided for the electrical and optical inspection of the OLED cell 20 formed on the substrate 10, The corresponding first, second, third and fourth probe cards 122, 124, 126, and 128 may be disposed.

Although not shown in detail, each of the first to fourth probe cards 122, 124, 126, and 128 may have a substantially bar shape, and the first to fourth test pads 22, 24, 26, 28). ≪ / RTI >

The first, second, third and fourth card stages 132, 134, and 134 for supporting the first to fourth probe cards 122, 124, 126 and 128, respectively, , 136, 138 may be disposed. As shown in FIG. 7, the first to fourth card stages 132, 134, 136, and 138 may be arranged in a rectangular shape corresponding to the substrate 10. As an example, the first and second card stages 132 and 134 may be disposed parallel to each other in the y-axis direction, and the third and fourth card stages 136 and 138 may be disposed in parallel with respect to the y- And may be arranged parallel to each other in the x-axis direction perpendicular to each other.

Clamps (not shown) for fixing the first to fourth probe cards 122, 124, 126, 128 are formed on the first to fourth card stages 132, 134, 136, Respectively.

When the size of the substrate 10 is changed, it is necessary to replace the first to fourth probe cards 122, 124, 126, 128, and the first to fourth card stages 132, 134, 136, 138 must also be changed.

According to an embodiment of the present invention, the position of the first card stage 132 may be fixed and the second card stage 134 may be configured to be movable in the x-axis and y-axis directions as shown . Also, the third card stage 136 may be configured to be movable in the y-axis direction, and the fourth card stage 138 may be movably disposed in the x-axis direction.

8, when the size of the substrate to be inspected becomes small, the third card stage 136 may be moved in the y-axis direction, and the fourth card stage 138 may be moved in the x-axis direction . Also, the second card stage 134 can be moved in the x-axis direction and the y-axis direction corresponding to the movement of the third and fourth card stages 136 and 138. [

At this time, the first to fourth card stages 122A, 124A, 126A, and 128A are formed on the first to fourth card stages 132, 134, 136, and 138 corresponding to the size change of the substrate 10 Can be mounted.

Although not shown in detail, the testing apparatus 100 may include driving units for moving the second to fourth card stages 134, 136, and 138. The driving units may be configured using a linear motion guide, a movable panel movably mounted on the linear motion guide, a motor for moving the movable panel, a ball screw, a ball nut, or the like. At this time, the second to fourth card stages 134, 136, and 138 may be coupled to the movable panel.

Also, although not shown, the driving units may include the second to fourth card stages 134, 136, and 138 to adjust the arrangement angles of the second to fourth probe cards 124, 126, It may be rotated.

Fig. 9 is a schematic view for explaining another example of the substrate shown in Fig. 1, and Figs. 10 and 11 are schematic views for explaining another example of the probe card and the card stage.

Referring to FIG. 9, the substrate 10 may include first test pads 22A and second test pads 24A disposed along two sides parallel to each other. In this case, the testing apparatus 100 may include a fixed first card stage 132A and a second card stage 134A configured to be movable. A first probe card 122B and a second probe card 124B may be disposed on the first card stage 132A and the second card stage 134A, respectively.

For example, as shown in FIG. 10, the first card stage 132A may be arranged in the y-axis direction and its position may be fixed, and the second card stage 134A may be fixed to the first card stage 132A And arranged so as to be movable in the x-axis direction.

As shown in FIG. 11, on the first and second card stages 132A and 134A, a first probe card 122C and a second probe card 124C having different lengths according to the size of the substrate, Can be replaced.

Fig. 12 is a schematic view for explaining another example of the substrate shown in Fig. 1, and Figs. 13 and 14 are schematic diagrams for explaining another example of the probe card and the card stage.

Referring to FIG. 12, the substrate 10 may include first test pads 22B and second test pads 24B disposed along two sides that are adjacent to each other and perpendicular to each other. In this case, the testing apparatus 100 may include a fixed first card stage 132B and a second card stage 134B configured to be movable. A first probe card 122D and a second probe card 124D may be mounted on the first card stage 132B and the second card stage 134B, respectively.

For example, as shown in the drawing, the first card stage 132B may be arranged in the y-axis direction and its position may be fixed, and the second card stage 134B may be disposed perpendicular to the first card stage 132B I.e., in the x-axis direction and movable in the y-axis direction.

14, a first probe card 122E and a second probe card 124E having different lengths according to the size of the substrate 10 are formed on the first and second card stages 132B and 134B, Can be replaced.

Referring again to FIG. 3, according to an exemplary embodiment of the present invention, the testing apparatus 100 may perform an optical inspection of an OLED cell 20 to which an inspection signal is applied. The inspection signal may be applied from the electrical inspection unit 140 to the OLED cell 20 through the first to fourth probe cards 122, 124, 126 and 128, And may be performed by the optical inspection unit 150 disposed under the fourth card stages 132, 134, 136,

15 is a schematic configuration diagram for explaining the optical inspection unit shown in FIG.

15, the optical inspection unit 150 includes an inspection camera 152 for measuring the image quality and brightness of the OLED cell 20, a spectroscope 154 for measuring color coordinates, color temperature, and the like, A fluorescence microscope 156 for detecting foreign substances, stains, and the like on the substrate 10 and for checking the alignment state of thin film patterns formed on the substrate 10, and the like.

According to an embodiment of the present invention, two inspection cameras 152 and two spectroscopes 154 are used. However, since the number of the inspection cameras 152 and the spectroscopes 154 can be variously changed, The scope of which is not limited.

The optical inspection unit 150 may include driving units for moving the inspection camera 152 and the spectroscope 154 and the fluorescence microscope 156 for optical inspection of the OLED cells 20. [ For example, the driving units may be constructed using a linear motion guide, a motor, a ball screw, and a ball nut. The inspection camera 152, the spectroscope 154, and the fluorescence microscope 156 may be constructed by the driving units And can be configured to be movable in the vertical and horizontal directions, respectively.

According to an embodiment of the present invention, the inspection apparatus 100 includes the substrate 10, the first to fourth probe cards 122, 124, 126, and 128, and the optical inspection unit 150 And alignment cameras 160 and 340 for alignment with each other.

5, the substrate stage 300 may be provided with a first probe card 122 for detecting the alignment marks or probes of the first to fourth probe cards 122, 124, 126, 128, The optical inspection unit 150 may include second alignment cameras 160 for detecting the alignment marks of the substrate 10. The second alignment cameras 160 may be disposed on the optical inspection unit 150,

5, one first aligning camera 340 is attached to the rotation driving part 318 of the substrate stage 300 through brackets, but a plurality of first aligning cameras 340 are mounted on the rotation driving part 318 of the substrate stage 300, Can be used.

The second alignment cameras 160 may be disposed adjacent to the spectroscopes 154 and the fluorescence microscope 156 and may be movable along with the spectroscopes 154 and the fluorescence microscope 156 Lt; / RTI >

Although the inspection pads 22, 24, 26 and 28 are disposed on the side portions of the substrate 10 in the above description, the inspection process of the OLED cell 20 may be performed in the OLED cell The probes of the first to fourth probe cards 122, 124, 126, and 128 may be in contact with electrode pads (not shown) arranged at edge portions of the first to fourth probe cards 122, 124, 126 and 128.

According to the embodiments of the present invention as described above, the manufacturing cost of the display cell 20 can be greatly reduced by performing the inspection process before the sealing process for the display cell 20 is performed.

In particular, when the inspection pads 22, 24, 26, 28 are disposed along at least two sides of the substrate 10, such as the large OLED cell 20 used for large-scale TV production, or when a plurality of OLED cells are formed (S) by arranging the probe cards 122, 124, 126, 128 to correspond to each side of the substrate 10 when the test pads are disposed along at least two sides of the substrate, It can be easily performed.

When the size of the substrate 10 is changed, one probe card 122 is fixed and the remaining probe cards 124, 126, and 128 are made movable so that the size of the substrate 10 is changed It can cope positively.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

10: substrate 20: OLED cell
22, 24: Inspection pad 30: Cell processing equipment
40: Sealing process facility 50: Inline substrate transfer device
52: substrate transfer robot for in-line 100: inspection apparatus
102: Inspection chamber 104:
110: Vacuum system
122, 124, 126, 128: first to fourth probe cards
132, 134, 136, 138: first to fourth card stages
140: Electrical inspection part 150: Optical inspection part
200: substrate transfer module 202: substrate transfer chamber
204: substrate transfer robot 300: substrate stage
302: vacuum plate 320: auxiliary vacuum system
330: Clamp

Claims (12)

An inspection chamber for performing an inspection process on a display cell formed on a substrate;
A substrate stage disposed within the inspection chamber and supporting the substrate such that the display cell faces downward;
A first card stage supporting a first probe card disposed below the substrate stage and configured to contact first test pads disposed along a first side of the substrate, the first probe stage being fixed in position; And
A second card stage configured to support a second probe card disposed below the substrate stage and configured to contact second test pads disposed along a second side of the substrate, the second probe stage configured to move in a horizontal direction according to the size of the substrate; The display cell inspection apparatus comprising: The display cell inspection apparatus according to claim 1, wherein the second card stage is adjacent to the first card stage and the first card stage and the second card stage are disposed perpendicular to each other. The display cell inspection apparatus according to claim 2, wherein the first card stage is arranged in the y-axis direction, and the second card stage is arranged in the x-axis direction and movable in the y-axis direction. The display cell inspection apparatus according to claim 1, wherein the second card stage is disposed in parallel with the first card stage. The apparatus according to claim 4, further comprising: a third card stage and a fourth card stage arranged parallel to each other in a direction perpendicular to the first card stage and supporting the third probe card and the fourth probe card, respectively To the display cell. 6. The image forming apparatus according to claim 5, wherein the first card stage is disposed in the y-
Wherein the second card stage is configured to be movable in the x-axis direction and the y-axis direction,
The third card stage is configured to be movable in the y-axis direction,
And the fourth card stage is configured to be movable in the x-axis direction. The display cell inspection apparatus of claim 1, wherein the substrate stage includes a vacuum plate having vacuum holes formed therein, and clamps for holding edge portions of the substrate are disposed at edge portions of the vacuum plate. The display cell inspection apparatus according to claim 7, further comprising a stage driving unit for moving and rotating the vacuum plate in vertical and horizontal directions. 8. The apparatus of claim 7, further comprising clamp drivers for operating the clamps,
Wherein the clamp driving units operate the clamps to grip edge portions of the substrate when an internal pressure of the vacuum holes becomes higher than a preset pressure. 8. The apparatus of claim 7, wherein the vacuum holes are connected to a vacuum system including a vacuum pump,
Further comprising an auxiliary vacuum system for providing vacuum pressure for adsorbing the substrate when an internal pressure of the vacuum holes becomes higher than a predetermined pressure due to an operation error of the vacuum system or a vacuum leak, . The display cell inspection apparatus of claim 1, further comprising at least one alignment camera for detecting the probes of the first and second probe cards. The display cell inspection apparatus according to claim 1, further comprising an optical inspection unit for checking optical characteristics of the display cell to which inspection signals are applied by the first and second probe cards.

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