KR20150121895A - Nozzle apparatus for vertical type parylene monomer - Google Patents

Abstract

The vertical parylene film deposition nozzle apparatus of the present invention has a reduced internal ventilating cross-section of a heating decomposition unit to make a dimer in a gas phase be rapidly pyrolyzed into a parylene monomer and supplied to a deposition chamber. The vertical parylene film deposition nozzle apparatus of the present invention can be made in a small size since the moving path of the gasified parylene dimer is increased.

Description

TECHNICAL FIELD [0001] The present invention relates to a vertical ferrule film-

The present invention relates to a process for producing a ferulic acid, which comprises a vaporizing portion for vaporizing a feruler dimer powder, a heat decomposing portion for pyrolyzing the gaseous perhalin dimer to produce ferrolein monomer, and a nozzle plate for feeding the feruler monomer into the vaporizing chamber, And more particularly, to a heating and decomposing unit that reduces the internal air cross-sectional area so that the dimer on the gas phase is thermally decomposed into ferulic monomers at a high speed and is supplied to the deposition chamber To a vertical ferrule film-forming nozzle device capable of increasing the moving path of the vaporized ferrolein dimmers to produce a small-sized device.

Generally, medical devices, identification cards (for example, identification cards, driver's licenses, passports, ID cards / passports, etc.), semiconductors, electronic devices, bicycles, needles, needles, and the like have high chemical resistance and thermal stability. It is used to coat the material.

Such parylene is composed of polymer groups capable of vapor deposition and is named according to the substituent. Any base material can be uniformly coated regardless of its form, and particularly, it can be coated densely in deep holes or cracks There is a characteristic that can be.

Ferarine vapor deposition coatings have been used extensively in electronic packaging and the like since they are transparent and chemically very stable and do not easily dissolve in any existing chemical solvent.

Such a ferrous-based deposition coating apparatus is usually constituted by connecting a vaporizing section and a pyrolyzing section to receive a coating material in a deposition chamber to which a vacuum pump is connected, and to supply ferrolein monomers to the inside of the deposition chamber.

However, in the conventional feruline vapor deposition coating apparatus (Patent Registration No. 10-0735869), there is a problem that the vaporization portion and the pyrolysis portion vaporize the ferrolein dimer powder and sufficiently pyrolyze the vaporization portion and the pyrolysis portion.

In addition, since the vaporized portion and the pyrolysis portion manufactured as described above can not be vertically installed in the deposition chamber and are connected horizontally, there is a problem in that the ferrolein deposition coating apparatus can not be installed in a narrow space.

SUMMARY OF THE INVENTION It is a first object of the present invention to provide a heating and decomposing section and a nozzle plate section, Plane) is reduced so that the ferroelectric film can be rapidly formed.

A second object of the present invention is to provide a ferrolein film-forming nozzle device capable of increasing the moving path of the vaporized ferrolein dimer to produce a small-sized device.

According to an aspect of the present invention for achieving the above object, a first invention is a ferrolein film-forming nozzle apparatus (hereinafter referred to as a " ferroeln film forming apparatus ") connected to a lower portion of a deposition chamber for depositing a film on a coating material accommodated in a deposition chamber 100), comprising: a vaporization part (10) for vaporizing a feruler dimer powder by heating to produce a dimer on a gaseous phase; and a vaporization part (10) connected in communication with the vaporization part (10) A nozzle plate part 30 connected to the heating and decomposing part 20 to supply a dimer on the inside of the deposition chamber 200 to the inside of the deposition chamber 200, An insulation jacket 40 coupled to the outer circumferential surface of the vaporization part 10 and the thermal decomposition part 20 to prevent heat loss; And a cooling jacket 50 coupled to an upper outer circumferential surface of a heat decomposition unit 20 coupled to the deposition chamber 200 to protect the deposition chamber 200. The vaporization unit 10 may include a cooling jacket 50, The heat decomposition section 20 and the nozzle plate section 30 are arranged on a vertical line between each other and the heat decomposition section 20 is reduced in the internal air cross section so that the dimer on the gas phase is pyrolyzed at a high speed .

In a second aspect of the present invention, in the first aspect of the present invention, in the vaporization part (10), a container (12) in which the ferialin dimer powder is housed is placed, and on the outer circumferential surface thereof, 60 of the first tube 11 to be wound.

The third invention is characterized in that, in the second invention, the heat decomposition section (20) is vertically provided on the upper portion of the vaporizing section (10), and pyrolyzed dimer of the gaseous phase is formed on the outer circumferential surface by heating to produce ferrolein monomer And a second tube body 21 on which the second heating coil 70 is wound.

The nozzle plate portion 30 is coupled to the upper end of the heat decomposition portion 20 and has a nozzle hole 31 having the same size as the inner diameter of the second tube body 21, And a round bar 33 having a diameter smaller than that of the nozzle hole 31 is formed at the center of the nozzle hole 31 in a downward direction.

A fifth aspect of the present invention is that, in the fourth invention, the round bar (33) is supported on the nozzle hole (31) through at least two connecting rods (34) radially coupled, So that the internal ventilation cross section of the heat decomposition section 20 can be reduced.

According to an aspect of the present invention for achieving the above object, a sixth invention is a ferrolein film-forming nozzle apparatus (hereinafter referred to as a ferrolein film-forming apparatus) connected to a lower portion of a deposition chamber for depositing a film on a coating material accommodated in a deposition chamber 100), comprising: a vaporizing portion (10) for vaporizing a feruler dimer powder by heating to produce a dimer on a gaseous phase; A heat decomposition unit 20 connected to the vaporization unit 10 and thermally decomposing the dimer on the gas by heating to produce ferrolein monomer; and a heat decomposition unit 20 connected to the heat decomposition unit 20, A nozzle plate portion 30 for supplying a dimer on the inside of the deposition chamber 200 and an insulation jacket 40 (not shown) coupled to the outer circumferential surface of the vaporization portion 10 and the thermal decomposition portion 20 to prevent heat loss. ); And a cooling jacket 50 coupled to an upper outer circumferential surface of a heat decomposition unit 20 coupled to the deposition chamber 200 to protect the deposition chamber 200. The vaporization unit 10 may include a cooling jacket 50, The heating decomposition section 20 and the nozzle plate section 30 are arranged on a vertical line between each other and the vaporization section 10 is inserted into the heat decomposition section 20 to guide the dimer on the gas phase downward, The dimer is induced upward again between the vaporizing part 10 and the heat decomposing part 20 to reduce the size of the scale according to the increase of the moving path and to enable the efficient pyrolysis of the dimer.

A seventh aspect of the present invention is the refrigerating machine according to the sixth aspect of the present invention, wherein the vaporizing part (10) comprises a hollow first tube body (11) having a container (12) It is preferable that the lower part of the nozzle plate 30 is inserted to communicate with the heat decomposition part 20 and the upper part is coupled to the center of the bottom surface of the nozzle plate part 30 to be shielded.

In the eighth invention, in the seventh invention, the heating and decomposing section (20) is constituted by a second tube body (21) whose upper part is opened, and a feruler dimer powder is vaporized on the outer peripheral surface of the second tube body by indirect heating It is preferable that the first heating coil 60 and the second heating coil 70 which thermally decompose the dimer in the gaseous phase to produce the ferrimer monomer are wound.

In the ninth invention, in the seventh invention, the nozzle plate part (30) is connected to the upper end of the heat decomposition part (20), and the nozzle hole (31) of the same size as the inner diameter of the second tube And a blocking disc 32 having a diameter smaller than that of the nozzle hole 31 is coupled to an upper portion of the first tube body 11 at the center of the nozzle hole 31. [

According to a tenth aspect of the present invention, in the ninth aspect of the present invention, it is preferable that the blocking disc 32 is supported on the nozzle hole 31 through at least two connecting rods 34 radially coupled.

According to the vertical ferrule-forming nozzle apparatus of the present invention, the inner air cross-section of the heat decomposing unit is reduced, and the ferrule monomers can be generated quickly.

In addition, there is an effect that the size of the vertical ferrule film-forming nozzle device can be reduced to a small size by increasing the ferrule dimer in the gas phase downward and upward.

FIG. 1 is a cross-sectional view of a vertical ferrule film-forming nozzle apparatus according to a first embodiment of the present invention,
Figure 2 is an exploded view of Figure 1,
FIG. 3 is an exemplary view showing a vertical ferrule-film-forming nozzle apparatus according to a first embodiment of the present invention bonded to a deposition chamber,
FIG. 4 is an operation diagram of a vertical ferrule formation nozzle apparatus according to the first embodiment of the present invention,
FIG. 5 is a cross-sectional view of a vertical ferrolein film-forming nozzle apparatus according to a second embodiment of the present invention,
FIG. 6 is an exploded view of FIG. 5,
FIG. 7 is an exemplary view showing a vertical ferrule film-forming nozzle apparatus according to a second embodiment of the present invention coupled to a deposition chamber;
FIG. 8 is an operational view of a vertical ferrule formation nozzle apparatus according to a second embodiment of the present invention.

Hereinafter, a vertical ferrule forming nozzle apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

1 is an exploded view of FIG. 1, and FIG. 3 is a cross-sectional view of a vertical ferrule forming apparatus according to a second embodiment of the present invention. FIG. Fig. 6 is an exemplary view showing a lean film-forming nozzle device coupled to a deposition chamber; Fig.

1 to 3, a first embodiment of the present invention is a method of depositing a ferromagnetic film on a coating material (not shown) accommodated in a deposition chamber 200, To a ferrolein film-forming nozzle apparatus (100) for supplying ferroelen monomers on a substrate.

In the ferrule forming nozzle apparatus 100, the vaporizing section 10, the heat decomposing section and the nozzle plate section are arranged on a vertical line between each other, and the heat dissipating section 20 has a reduced internal air cross- It is configured to be able to quickly generate ferro-liners.

Here, the vaporizing unit 10 functions to vaporize the feruler dimer powder by heating to generate a dimer on the gas and sublimate it.

The vaporizing part 10 is provided with a container 12 in which the feruler dimer powder is housed and an outer peripheral surface of the vaporizing part 10 is provided with a first tube 11 ).

Since the flange P is formed on the upper portion of the first tube body 11, a structure is provided in which the vaporized ferrolein dimer communicates with the heating and decomposing part 20 vertically.

The heating and decomposing unit 20 is vertically communicated with the vaporizing unit 10 and thermally decomposes the dimer on the gas by heating to produce a ferrous monomolecule.

The outer circumferential surface of the heating and decomposing unit 20 is composed of a second tube body 21 through which the second heating coil 70 is wound so as to thermally decompose the ferrule dimer on the gas by heating to produce ferrolein monomer.

At this time, a flange P is formed on the lower portion and the upper portion of the second tube 21 so as to be coupled to the vaporization portion 10 and the nozzle plate portion 30, respectively.

A round bar 33 coupled to the nozzle plate 30 is disposed at a central region of the interior of the second tube 21 of the heat decomposition unit 20 so as to reduce the air flow cross- Thereby making it possible to rapidly pyrolyze the dimer on the gaseous phase.

In this structure, the dimer in the gas phase is brought close to the inner wall surface of the heat decomposition section 20 to improve the pyrolysis efficiency of the dimer, and the cross section of the dimer is reduced, so that feruric monomers on the gas phase are generated at a high rate, .

The nozzle plate 30 is connected to a flange P formed on the upper end of the heat decomposition unit 20 and has a nozzle hole 31 having the same size as the inner diameter of the second tube 21, A round bar 33 having a diameter smaller than that of the nozzle hole 31 is connected to the center of the nozzle hole 31 in a downward direction.

At this time, the round bar 33 is supported on the nozzle hole 31 through at least two connecting rods 34 radially coupled, and extends downward to the heating / decomposing part 20, So that the ventilation cross section can be reduced.

The shape of the nozzle hole 31 of the nozzle plate 30 is the same as that of the heat dissolving unit 20 in the form of a donut because the round bar 33 is coupled to the center through the connecting rod 34.

The vapor phase dimer vaporized in the vaporizing section 10 is pyrolyzed in the thermal decomposition section 20 to produce ferrolein monomers and the gaseous perylene monomers are vaporized through the nozzle holes 31 of the nozzle plate section 30, So that it can flow into the interior of the housing 200.

On the other hand, the vaporizing unit 10 and the heat decomposing unit 20 are constructed so that the heat insulating jacket 40 is coupled to the outer circumferential surface to prevent heat loss.

The heating and decomposing unit 20 is configured to further protect the deposition chamber 200 by further coupling a cooling jacket 50 to a portion of the deposition chamber 200 that is coupled to or exposed to the deposition chamber 200.

Hereinafter, the operation of the vertical ferrule film-forming nozzle apparatus according to the first embodiment will be briefly described.

4 is an operational view of a vertical ferrule formation nozzle apparatus according to the first embodiment of the present invention.

As shown in FIG. 4, the vertical ferrule formation nozzle apparatus 100 of the present invention is connected to a lower portion of a deposition chamber 200 connected to a vacuum pump (not shown), and supplies ferrolein monomer by vacuum.

This is for the purpose of allowing the ferullin monomer to be deposited by polymerization reaction on the surface of the deposition material (not shown) disposed inside the deposition chamber 200.

At this time, the heat decomposition unit 20 and the vaporization unit 10 are configured to prevent the heat loss by being coupled with the heat insulation jacket 40, and the cooling jacket 50 is formed on the upper outer circumference surface of the heat decomposition unit 20, And is superimposed on the outer circumferential surface of the jacket so that the deposition chamber 200 can be protected against heat.

In this state, when the first heating coil 60 wound on the vaporizing part 10 is heated to raise the temperature in the vaporizing part 10 by about 100 ° C to 150 ° C, the feruler dimer powder contained in the container 12 And is vaporized in the gaseous dimer.

The vaporized dimer sublimates to the thermal decomposition section 20 by vacuum pressure.

The dimer sublimated into the thermal decomposition section 20 is pyrolyzed in the interior of the thermal decomposition section 20 having a temperature range of about 650 ° C. to 700 ° C. by the heat of the second heating coil 70, ).

The dimer sublimated due to the round bar 33 coupled to the nozzle plate 30 is guided to the inner wall surface of the heat decomposing unit 20 at the central region of the interior of the second tube 21 of the heat decomposing unit 20 And more effectively produce a high-quality ferulic monomer (Monomer).

Therefore, since the gas cracking surface is reduced in the heat decomposition unit 20, ferrous monomers which are pyrolyzed at a high rate are supplied into the deposition chamber.

5 is an exploded view of the vertical ferrule film-forming nozzle apparatus according to the second embodiment of the present invention, FIG. 6 is an exploded view of FIG. 5, FIG. 7 is a cross- Fig. 6 is an exemplary view showing a lean film-forming nozzle device coupled to a deposition chamber; Fig.

5 to 7, the second embodiment differs from the first embodiment in that the vaporizing section 10 is inserted into the heat decomposing section 20.

In this structure, the vaporizing unit 10 is inserted into the heat decomposing unit 20 to guide the dimer on the gas phase downward, and the downwardly directed dimmer is raised again between the vaporizing unit 10 and the heat decomposing unit 20 To reduce the size of the scale according to the increase of the movement path, and to enable effective pyrolysis of the dimer.

The second embodiment is characterized in that the flow path of the gas phase dimer is increased in addition to the reduction in the cross section of the air flow which is an advantage of the first embodiment.

Here, the vaporization part 10 is made up of a hollow first tube body 11 having a container 12 in which ferulein dimer powder is housed.

The upper part of the first tube body 11 is coupled to the center of the bottom surface of the nozzle plate part 30 through the flange P and the lower part is inserted into the second tube body 21 of the thermal decomposition part 20 to be.

Accordingly, the dimer vaporized in the first tube 11 is prevented from proceeding due to the shielding of the upper part, and the structure can be guided downward by the vacuum pressure of the deposition chamber 200.

The outer diameter of the first tube 11 of the vaporization part 10 is formed to be smaller than the inner diameter of the second tube 21 of the heat decomposition part 20 and is formed between the first tube 11 and the second tube 21 So that the vaporized dimer can be induced upward.

The heat decomposition unit 20 is composed of a second tube body 21 which is opened vertically by inserting the first tube body 11 of the vaporization unit 10 and is open at the top.

At this time, on the outer circumferential surface of the second tube body 21, a first heating coil 60 for vaporizing the ferialin dimer powder by heating, a second heating coil 70 for pyrolyzing the dimer in gaseous form to produce ferrolein monomer, Is wound and configured.

This is because the powder dimer accommodated in the vessel 12 of the vaporizing section 10 is vaporized through the first heating coil 60 so that a dimer on the vapor phase can be generated and the second heating coil 70 is constituted by the first A gas phase dimer upwardly guided between the tubular body 11 and the second tubular body is pyrolyzed to form a ferrylin dimer.

The nozzle plate 30 is connected to the upper end of the second tube 21 of the thermal decomposition unit 20 and has a nozzle hole 31 having the same size as the inner diameter of the second tube 21 A blocking disc 32 having a diameter smaller than that of the nozzle hole 31 is coupled to the flange P formed on the upper portion of the first tube body 11 at the center of the nozzle hole 31 .

At this time, the blocking disc 32 is supported on the nozzle hole 31 through at least two connecting rods 34 radially coupled.

The nozzle plate portion 30 is fixed to the upper portion of the second tube body 21 of the heat decomposition portion 20 and the first tube body 11 of the vaporization portion is fixed to the blocking disk 32 of the nozzle plate portion 30 Is inserted into the second tube body (21).

Hereinafter, the operation of the vertical ferrule forming nozzle apparatus according to the second embodiment will be briefly described.

FIG. 8 is an operational view of a vertical ferrule formation nozzle apparatus according to a second embodiment of the present invention.

As shown in FIG. 8, the first heating coil 60 wound on the heat decomposition unit 20 generates heat, thereby raising the internal temperature of the second tube body to a temperature range of about 650 ° C. to 700 ° C.

Then, the temperature inside the first tube body 11 inserted into the second tube body 21 is raised to a temperature range of about 100 ° C to 150 ° C due to the indirect heating.

Then, the feruler dimer powder accommodated in the vessel 12 of the vaporizing section 10 is vaporized into a vapor phase dimer.

The vaporized dimmer is directed downward to the lower portion of the first tube body 11 because the upper portion of the first tube body 11 is shielded.

The downwardly directed gaseous dimer is again induced upwardly between the first tube and the second tube.

The gas phase dimer upwardly guided through the second heating coil 70 is pyrolyzed to produce a ferrolein dimmer and is supplied to the inside of the deposition chamber 200 through the nozzle hole 31 of the nozzle plate portion 30.

Accordingly, the vertical ferrule formation nozzle apparatus of the second embodiment increases the moving path of the gaseous dimer along with the reduction of the cross section of the air, which is an advantage of the first embodiment, so that it can produce high-quality ferrolein monomers due to effective pyrolysis.

In addition, since the moving path of the gas phase dimer can be increased in the second embodiment, the vertical ferromagnetic film forming nozzle device can be manufactured in a small scale with a reduced scale.

Although the present invention has been described in connection with the preferred embodiments mentioned above, various other modifications and variations will be possible without departing from the spirit and scope of the invention. It is, therefore, to be understood that the appended claims are intended to cover such modifications and changes as fall within the true scope of the invention.

10: vaporizer 11: first tube 12: container
20: heat decomposition part 21: second tube
30: nozzle plate portion 31: nozzle hole 32:
33: Round rod 34: Connecting rod
40: Insulation jacket
50: Cooling jacket
60: first heating coil
70: second heating coil
P: Flange 100: Vertical ferrule film-forming nozzle device
200: deposition chamber

Claims (10)

A ferrolein film nozzle apparatus (100) connected to a lower portion of a deposition chamber for depositing a film on a coating material contained in a deposition chamber (200)
A vaporizing portion 10 for vaporizing the feruler dimer powder by heating to produce a dimer on the gaseous phase;
A thermal decomposition unit 20 connected in communication with the vaporization unit 10 and thermally decomposing the dimer on the gas by heating to produce ferrolein monomer;
A nozzle plate part 30 connected to the heating and decomposing part 20 to supply a gas-phase dimer into the deposition chamber 200;
An insulation jacket 40 coupled to the outer circumferential surface of the vaporization part 10 and the thermal decomposition part 20 to prevent heat loss; And
And a cooling jacket (50) coupled to an upper outer peripheral surface of the heat decomposition section (20) coupled with the deposition chamber (200) to protect the deposition chamber (200)
The vaporizing section 10, the heat decomposition section 20 and the nozzle plate section 30 are arranged on a vertical line between each other, and the heating and decomposing section 20 has a reduced internal air cross- Is pyrolyzed at a high velocity.
The method according to claim 1,
The vaporizing part 10 is provided with a container 12 in which the feruler dimer powder is housed and an outer circumferential surface of which the first heating coil 60 of the first heating coil 60 is wound so that the feruler dimer powder can be vaporized by heating Wherein the vertical nozzle is formed of a vertical nozzle.
3. The method of claim 2,
The heating decomposition part 20 is vertically disposed on the upper part of the vaporization part 10 and the second heating coil 70 is wound on the outer circumferential surface so as to thermally decompose the dimer on the gas phase by heating to produce ferrolein monomer And a second tubular body (21).
The method of claim 3,
The nozzle plate 30 is connected to the upper end of the heat decomposing part 20 and has a nozzle hole 31 having the same size as the inner diameter of the second tube 21 at the center, And a round bar (33) having a smaller diameter than that of the nozzle hole (31) in a state is downwardly coupled to the center of the nozzle hole (31).
5. The method of claim 4,
The round bar 33 is supported by the nozzle hole 31 through at least two connecting rods 34 radially coupled to the nozzle hole 31 and the lower portion of the round bar 33 extends downward to the heating / And a cross section of the air passage is reduced.
A ferrolein film nozzle apparatus (100) connected to a lower portion of a deposition chamber for depositing a film on a coating material contained in a deposition chamber (200)
A vaporizing portion 10 for vaporizing the feruler dimer powder by heating to produce a dimer on the gaseous phase;
A thermal decomposition unit 20 connected in communication with the vaporization unit 10 and thermally decomposing the dimer on the gas by heating to produce ferrolein monomer;
A nozzle plate part 30 connected to the heating and decomposing part 20 to supply a gas-phase dimer into the deposition chamber 200;
An insulation jacket 40 coupled to the outer circumferential surface of the vaporization part 10 and the thermal decomposition part 20 to prevent heat loss; And
And a cooling jacket (50) coupled to an upper outer peripheral surface of the heat decomposition section (20) coupled with the deposition chamber (200) to protect the deposition chamber (200)
The vaporizing section 10, the heat decomposition section 20, and the nozzle plate section 30 are arranged on a vertical line between each other,
The gasification unit 10 is inserted into the heat decomposition unit 20 to guide the dimer in the gas phase downward and to induce the downwardly directed dimer upward again between the vaporization unit 10 and the heat decomposition unit 20 Wherein the size of the scale according to the increase of the path is reduced and effective dimerization of the dimer is possible.
The method according to claim 6,
The vaporization unit 10 includes a hollow first tube body 11 having a container 12 in which ferulin dimer powder is housed,
Wherein the lower part of the first tube body (11) is inserted to communicate with the thermal decomposition part (20), and the upper part is coupled to the center of the bottom surface of the nozzle plate part (30) Device.
8. The method of claim 7,
The heating and decomposing part 20 is composed of a second tube body 21 having an open upper part. The outer circumferential surface of the second tube body is provided with a first heating coil 60 for vaporizing the ferrolein dimer powder by indirect heating, And a second heating coil (70) for generating ferrimer monomers by thermally decomposing the dimer on the first heating coil (70).
8. The method of claim 7,
The nozzle plate 30 is connected to the upper end of the heat decomposing part 20 and has a nozzle hole 31 having the same size as the inner diameter of the second tube 21 at the center, And a blocking disc (32) having a diameter smaller than that of the nozzle hole (31) is coupled to an upper portion of the first tube body (11).
10. The method of claim 9,
Wherein the blocking disc (32) is supported on the nozzle hole (31) through at least two connecting rods (34) radially coupled.

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