KR20150077786A - Energy save type clean room air conditioner - Google Patents

Energy save type clean room air conditioner Download PDF

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Publication number
KR20150077786A
KR20150077786A KR1020130166623A KR20130166623A KR20150077786A KR 20150077786 A KR20150077786 A KR 20150077786A KR 1020130166623 A KR1020130166623 A KR 1020130166623A KR 20130166623 A KR20130166623 A KR 20130166623A KR 20150077786 A KR20150077786 A KR 20150077786A
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South Korea
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condenser
capacity
evaporator
clean room
low
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KR1020130166623A
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Korean (ko)
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김권중
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주식회사 이지이엔씨
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Priority to KR1020130166623A priority Critical patent/KR20150077786A/en
Publication of KR20150077786A publication Critical patent/KR20150077786A/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B6/00—Compression machines, plants or systems, with several condenser circuits
    • F25B6/02—Compression machines, plants or systems, with several condenser circuits arranged in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/14—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification
    • F24F3/153—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by humidification; by dehumidification with subsequent heating, i.e. with the air, given the required humidity in the central station, passing a heating element to achieve the required temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B41/00—Fluid-circulation arrangements
    • F25B41/20—Disposition of valves, e.g. of on-off valves or flow control valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B49/00—Arrangement or mounting of control or safety devices
    • F25B49/02—Arrangement or mounting of control or safety devices for compression type machines, plants or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B43/00—Arrangements for separating or purifying gases or liquids; Arrangements for vaporising the residuum of liquid refrigerant, e.g. by heat
    • F25B43/006—Accumulators

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Air Conditioning Control Device (AREA)

Abstract

The present invention relates to an energy saving type air conditioner for a clean room filtering air supplied to the clean room of a semiconductor manufacturing facility and controlling temperature and humidity and, more especially, to an energy saving type air conditioner for a clean room capable of precisely controlling the coolant condensing operation of multiple low-capacity condensers through a control of solenoid valves by including the multiple low-capacity condensers to control humidity without a separate energy supply as much as the energy of corresponding waste heat and installing the solenoid valves on coolant intake ports of each low-capacity condenser and additionally controlling the operation of the low-capacity condensers using a sub heater at the same time.

Description

에너지 절감형 클린룸 공조장치{Energy save type clean room air conditioner}[0001] The present invention relates to an energy saving type clean room air conditioner,

본 발명은 반도체 제조설비의 클린룸으로 공급되는 공기의 여과 그리고 온도와 습도를 제어하는 공조장치에 관한 것으로, 특히 기존 공조시스템에서 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하고자 다수의 저용량 응축기를 구비하고 각 저용량 응축기의 냉매 유입단에 솔레노이드 밸브를 구축함으로써 솔레노이드 밸브의 제어를 통해 상기 저용량 응축기의 냉매 응축 동작을 세밀하게 제어할 수 있도록 함과 동시에 부가적으로 서브히터를 통해 상기 저용량 응축기의 동작을 제어하도록 하기 위한 에너지 절감형 클린룸 공조장치에 관한 것이다.The present invention relates to an air conditioning apparatus for controlling the temperature and humidity of air supplied to a clean room of a semiconductor manufacturing facility. More particularly, the present invention relates to an air conditioning system for recovering waste heat emitted to the atmosphere in an existing air conditioning system, Capacity condenser to control the humidity without adjusting the volume of the refrigerant, and by constructing a solenoid valve at the refrigerant inlet end of each low-capacity condenser, the refrigerant condensing operation of the low-capacity condenser can be finely controlled through the control of the solenoid valve Capacity condenser in addition to an energy saving type clean room air conditioner for controlling the operation of the low capacity condenser through a sub heater.

일반적으로, 반도체나 액정표시장치와 같은 물품의 제조는 고 청정도가 유지되는 클린룸(Clean room) 내에서 이루어지게 된다. 한편 클린룸으로 유입되는 공기를 통해 먼지나 오염물질이 유입되는 것을 방지하고, 유입되는 공기의 온도 및 습도를 최적의 조건(22℃ 50%)으로 조정하기 위하여 외기공조장치가 사용되고 있다.In general, the manufacture of articles such as semiconductors and liquid crystal display devices is performed in a clean room where high cleanliness is maintained. On the other hand, an outside air conditioner is used to prevent dust or contaminants from flowing into the clean room, and to adjust the temperature and humidity of the incoming air to the optimum condition (22 ° C 50%).

한편 반도체나 액정표시장치의 제조공정에서 소요되는 에너지의 대부분(약 90%)은 전력이고, 이중 40%를 공조설비가 소비하게 되며, 공조설비에서 소비되는 대부분의 전력은 상기와 같이 구성되어 클린룸으로 도입되는 외기를 처리하는 외기공조장치를 작동하는데 사용되고 있다.On the other hand, most of the energy (about 90%) consumed in the manufacturing process of a semiconductor or a liquid crystal display device is electric power, 40% of the energy is consumed by the air conditioning equipment, and most of the electric power consumed in the air conditioning equipment is clean And is used to operate an outside air conditioner for treating outside air introduced into a room.

따라서 외기부하를 감소시켜 외기공조장치에서 사용되는 전력을 감소시키는 것만으로도 매우 큰 에너지 절감효과를 기대할 수 있게 된다.Therefore, it is possible to expect a very large energy saving effect by reducing the external air load and reducing the power used in the outside air conditioner.

이에 클린룸으로부터 배출되는 배기의 열을 회수하여 도입외기의 예열이나 예냉에 사용함으로써 외기부하를 감소시켜 에너지를 절감하는 방법에 대한 많은 연구가 진행되고 있다.Therefore, much research has been conducted on a method of reducing energy of the outside air by using the preheating and precooling of the introduced outdoor air by recovering the heat of the exhaust gas discharged from the clean room.

그러나 외기공조장치의 경우, 상당히 많은 에너지를 소모함에 따라 배기의 열을 회수하여 도입외기를 예열 또는 예냉하는 것만으로는 에너지 절감에 대한 요구를 충분히 만족하지 못하는 문제점이 있었다.However, in the case of the outdoor air-conditioning system, there is a problem in that it is not enough to satisfy the demand for energy saving by collecting the heat of the exhaust gas and consuming a considerable amount of energy and preheating or precooling the outdoor air.

더욱이 클린룸은 냉방 에너지 부하가 크고, 여름철 외기의 습도가 높아 제습부하가 대부분을 차지하며, 따라서 클린룸 공조시 습도조절을 위해 대부분은 냉각 제습하고 별도의 난방으로 재 가열하는 시스템으로 구성되는데, 냉각제습의 문제점은 실내 설정 온습도를 해당하는 노점온도까지 과냉각하여 제습한 후 다시 적정온도까지 재열(Reheating)하므로, 냉각과 가열이라는 상반된 작용으로 인하여 에너지 과소비 현상이 발생한다는 것이다.In addition, the clean room has a large amount of cooling energy load and high humidity of the outside air in summer. Therefore, in order to control the humidity in the clean room air conditioning system, the system consists of cooling dehumidification and reheating by separate heating. The problem of cooling and dehumidifying is that the room temperature and humidity are supercooled to the corresponding dew point temperature and dehumidified to the appropriate dew point temperature, and then reheating to the proper temperature, so that energy over consumption phenomenon occurs due to the opposite action of cooling and heating.

상술한 종래 기술의 문제점을 해소하기 위해 제안되어진 기술 중 본 발명의 출원인에 의해 제안되어진 기술이 공개특허 10-2013-0044568호에 제시되어진 기술인데, 이는 첨부한 도 1에 도시되어진 기술이다.Among the proposed techniques for solving the problems of the prior art described above, a technique proposed by the applicant of the present invention is the technique shown in the patent document 10-2013-0044568, which is the technology shown in the accompanying Fig.

첨부한 도 1에 따른 에너지 절감형 클린룸 공조장치는, 습도가 높은 하절기에는 외기를 클린룸 내부에 공급하면 상대습도가 높아져 제습이 필요한데, 습도를 조절하기 위해서 공조기에서 냉각제습 운전이 이루어져 실내의 온도가 낮아지며 온도를 보상하기 위해서 가열을 하게 된다. 따라서 냉각제습 운전모드에서 실외기로부터 버려지는 열을 공조기에 재활용하고, 응축기의 온도가 낮아져 냉동기의 성적계수가 향상되므로 효율적으로 에너지 비용을 절감 할 수 있는 공조시스템이다.In the energy saving type clean room air conditioner according to the accompanying FIG. 1, when the outside air is supplied to the inside of the clean room in the high humidity season, the relative humidity is increased and dehumidification is required. In order to control the humidity, the air conditioner performs the cooling and dehumidifying operation. The temperature is lowered and heated to compensate for the temperature. Therefore, in the cooling and dehumidifying operation mode, the heat discharged from the outdoor unit is recycled to the air conditioner, and the temperature coefficient of the condenser is lowered, thereby improving the coefficient of performance of the refrigerator.

입구 공기를 공기조화하기 위한 증발기(120)와, 상기 증발기(120)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 제1응축기(110)와, 상기 증발기(120)와 제1응축기(110)사이의 냉매 순환을 위한 도관(140)과, 상기 도관(140)을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브(참조번호 미부여)와, 상기 제1응축기(110)의 동작에 연동하면서 상기 제1응축기(110)에서 발생되는 폐열을 회수하여 상기 증발기(120)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 폐열 회수용 제2응축기(210)와, 상기 제1응축기(110)에서 발생되는 폐열을 회수하는 도관(140)사이에 위치하며 상기 제1응축기(110)에서 상기 제2응축기(210)측으로 전달되는 냉매의 량을 제어하는 솔레노이드 밸브(220), 및 상기 도관(140) 사이에 위치하며 상기 증발기(120)와 응축기(110, 210)의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기(130)로 구성되며, 상기 폐열 회수용 제2응축기(210)의 용량은 상기 제1응축기(110)의 용량에 비해 70% 미만인 것이 바람직하다A first condenser 110 for on / off cycling to control the cooling capacity of the evaporator 120; a second condenser 110 for controlling the cooling capacity of the evaporator 120 and the first condenser 110; A valve (not shown) for controlling the flow path of the refrigerant flowing through the conduit 140, and a valve (not shown) connected to the first condenser 110 in cooperation with the operation of the first condenser 110, A waste heat recovery second condenser 210 for performing on / off cycling to recover the waste heat generated in the first condenser 110 to control the cooling capacity of the evaporator 120; A solenoid valve 220 located between the conduits 140 for recovering the waste heat from the first condenser 110 to the second condenser 210 and controlling the amount of refrigerant transferred from the first condenser 110 to the second condenser 210, And is operated according to the operation of the evaporator 120 and the condensers 110 and 210 It consists of a regenerator (130) for accumulating the absorbed extra heat energy is generated, the waste heat recovery capacity of the second condenser 210 is preferably less than 70% compared to the capacity of the first condenser 110

그러나 실제적으로 첨부한 도 1에 따른 에너지 절감형 클린룸 공조장치를 구현하는데 있어 첨부한 도 1에서와 같이 제2응축기(210)를 사용하는데 있어 냉매의 량을 단순히 솔레노이드 밸브(220)만으로 조절하기가 용이하지 않으며, 상기 증발기(120)와 제1응축기(110)사이의 냉매 순환을 위한 도관(140)을 통해 흐르는 냉매의 순환 방향을 제어하기도 용이하지 않다는 문제점이 제시되었다.However, in actual implementation of the energy-saving clean room air conditioner according to the accompanying FIG. 1, the amount of the refrigerant used in the second condenser 210 is adjusted by solely the solenoid valve 220 alone And it is not easy to control the circulation direction of the refrigerant flowing through the conduit 140 for circulating the refrigerant between the evaporator 120 and the first condenser 110.

상술한 문제점을 해소하기 위한 본 발명의 목적은, 반도체 제조설비의 클린룸으로 공급되는 공기의 여과 그리고 온도와 습도를 제어하는 공조장치에 관한 것으로, 특히 기존 공조시스템에서 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하고자 다수의 저용량 응축기를 구비하고 각 저용량 응축기의 냉매 유입단에 솔레노이드 밸브를 구축함으로써 솔레노이드 밸브의 제어를 통해 상기 저용량 응축기의 냉매 응축 동작을 세밀하게 제어할 수 있도록 함과 동시에 부가적으로 서브히터를 통해 상기 저용량 응축기의 동작을 제어하도록 하기 위한 에너지 절감형 클린룸 공조장치를 제공하는 데 있다.An object of the present invention to solve the above problems is to provide an air conditioning apparatus for controlling air filtering and temperature and humidity supplied to a clean room of a semiconductor manufacturing facility and more particularly to an air conditioning apparatus for recovering waste heat, Capacity condenser for adjusting the humidity without supplying energy as much as the energy of the waste heat, and a solenoid valve is installed at the refrigerant inlet end of each low-capacity condenser, thereby controlling the refrigerant condensation operation of the low- Capacity condenser in addition to controlling the operation of the low-capacity condenser through a sub-heater.

상기와 같은 목적을 달성하기 위한 본 발명에 따른 에너지 절감형 클린룸 공조장치의 특징은, 입구 공기를 공기조화하기 위한 증발기와; 상기 증발기의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 제1응축기와; 상기 증발기와 제1응축기사이의 냉매 순환을 위한 도관과; 상기 도관을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브와; 상기 제1응축기의 동작에 연동하면서 상기 제1응축기에서 발생되는 폐열을 회수하여 상기 증발기의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 폐열 회수용 다수의 저용량 제2응축기와; 상기 저용량 제2응축기의 냉매 유입단에 각각 개별적으로 구비되어 상기 제1응축기에서 발생되는 폐열을 회수하는 도관에서 상기 제2응축기측으로 전달되는 냉매의 량을 제어하는 솔레노이드 밸브; 및 상기 도관 사이에 위치하며 상기 증발기와 응축기의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기로 구성되어 상기 솔레노이드 밸브의 제어를 통해 상기 저용량 제2응축기의 냉매 응축 동작을 세밀하게 제어할 수 있도록 하는 데 있다.According to another aspect of the present invention, there is provided an energy saving type clean room air conditioner comprising: an evaporator for air conditioning the inlet air; A first condenser for on / off cycling to control the cooling capacity of the evaporator; A conduit for circulating the refrigerant between the evaporator and the first condenser; A valve for controlling the flow path of the refrigerant flowing through the conduit; A plurality of low-capacity second condensers for recovering waste heat generated in the first condenser in association with the operation of the first condenser and performing on / off cycling to control a cooling capacity of the evaporator; A solenoid valve separately provided at a refrigerant inlet end of the low capacity second condenser to control the amount of refrigerant delivered from the conduit to the second condenser to recover the waste heat generated in the first condenser; And an accumulator which is located between the conduits and accumulates thermal energy generated during operation of the evaporator and the condenser to finely control the refrigerant condensing operation of the low capacity second condenser through the control of the solenoid valve To be able to.

상술한 본 발명에 따른 특징으로 인해 기대되는 효과로는, 하절기 외기의 습도가 높아 제습을 하는 과정에서 과냉각으로 온도가 낮아져 재 가열이 이루어지는데 많은 열에너지가 소모되는데, 기존의 공조기는 공기를 냉각하는 과정에서 발생하는 실외기의 폐열을 대기 중에 방출하는 방식이었으나, 본 발명에서는 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하며, 또한 실외기의 폐열을 회수하고 재가열하여 과냉각된 온도를 보정하며 적정 조건을 일정하게 유지하는 부가적인 효과를 기대한다.The expected effect due to the features of the present invention is that since the humidity of the outdoor air in the summer is high, the temperature is lowered by the supercooling process in the process of dehumidification, and the heat is reheated, and a lot of heat energy is consumed. The waste heat of the outdoor unit generated in the process is discharged to the atmosphere. However, according to the present invention, the waste heat discharged into the atmosphere is recovered to adjust the humidity without supplying energy as much as the energy of the waste heat, Reheating to compensate the supercooled temperature and to maintain the proper conditions constantly.

도 1은 종래 기술의 예시도
도 2는 본 발명에 따른 에너지 절감형 클린룸 공조장치의 세부 구성 및 계통 예시도Figure 1 shows an example of prior art
FIG. 2 is a detailed configuration and system example of an energy saving type clean room air conditioner according to the present invention. FIG.

발명의 상술한 목적과 여러 가지 장점은 이 기술 분야에 숙련된 사람들에 의해, 첨부된 도면을 참조하여 후술되는 본 발명의 바람직한 실시 예로부터 더욱 명확하게 될 것이다.BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects and advantages of the invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings, in which: FIG.

우선적으로 본 발명에 적용되는 기술적 사상을 살펴보면, 하절기 외기의 습도가 높아 제습을 하는 과정에서 과냉각으로 온도가 낮아져 재 가열이 이루어지는데 많은 열에너지가 소모되는데, 기존의 공조기는 공기를 냉각하는 과정에서 발생하는 실외기의 폐열을 대기 중에 방출하는 방식이었으나, 본 발명에서는 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하고자 하는 데 착안한 것이다.First, the technical idea applied to the present invention is as follows. In the process of dehumidification due to high humidity in the summer season, the temperature is lowered due to the supercooling, so that much heat energy is consumed in reheating. In the conventional air conditioner, The waste heat of the outdoor unit is discharged to the atmosphere. However, in the present invention, the waste heat discharged into the atmosphere is recovered so as to control the humidity without supplying energy as much as the energy of the waste heat.

또한 실외기의 폐열을 회수하고 재가열하여 과냉각된 온도를 보정하며 적정 조건을 일정하게 유지하는 부가적인 효과를 기대한다.Also, it is expected that the additional effect of recovering the waste heat of the outdoor unit and reheating it to correct the supercooled temperature and keeping the proper condition constant.

첨부한 도 2는 본 발명에 따른 에너지 절감형 클린룸 공조장치의 구성 및 계통 예시도로서, 습도가 높은 하절기에는 외기를 클린룸 내부에 공급하면 상대습도가 높아져 제습이 필요한데, 습도를 조절하기 위해서 공조기에서 냉각제습 운전이 이루어져 실내의 온도가 낮아지며 온도를 보상하기 위해서 가열을 하게 된다.FIG. 2 is a diagram illustrating a configuration and an example of a system of an energy saving type clean room air conditioner according to the present invention. When the outside air is supplied to a clean room in a high humidity season, the relative humidity is increased and dehumidification is required. The cooling and dehumidifying operation is performed in the air conditioner, the temperature of the room is lowered, and the heating is performed to compensate the temperature.

따라서 냉각제습 운전모드에서 실외기로부터 버려지는 열을 공조기에 재활용하고, 응축기의 온도가 낮아져 냉동기의 성적계수가 향상되므로 효율적으로 에너지 비용을 절감 할 수 있는 공조시스템이다.Therefore, in the cooling and dehumidifying operation mode, the heat discharged from the outdoor unit is recycled to the air conditioner, and the temperature coefficient of the condenser is lowered, thereby improving the coefficient of performance of the refrigerator.

도시되어진 도 2를 참조하여 살펴보면, 입구 공기를 공기조화하기 위한 증발기(120A)와, 상기 증발기(120A)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 제1응축기(110A)와, 상기 증발기(120A)와 제1응축기(110A)사이의 냉매 순환을 위한 도관(140A)과, 상기 도관(140A)을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브(SV1, SV2)와, 상기 제1응축기(110A)의 동작에 연동하면서 상기 제1응축기(110A)에서 발생되는 폐열을 회수하여 상기 증발기(120A)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 폐열 회수용 다수의 저용량 제2응축기(211A, 212A, 213A)와, 상기 제1응축기(110)에서 발생되는 폐열을 회수하는 도관(140)사이에 위치하며 상기 제1응축기(110)에서 상기 제2응축기(211A, 212A, 213A)측으로 전달되는 냉매의 량을 제어하는 솔레노이드 벨브(220A), 및 상기 도관(140) 사이에 위치하며 상기 증발기(120)와 응축기(110, 210)의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기(130A)로 구성된다.Referring to FIG. 2, there is shown an evaporator 120A for air conditioning the inlet air, a first condenser 110A for on / off cycling to control the cooling capacity of the evaporator 120A, A valve 140A for circulating the refrigerant between the first condenser 110A and the first condenser 110A and valves SV1 and SV2 for controlling the flow path of the refrigerant flowing through the conduit 140A, And a plurality of low capacity second condensers 211A, 211A for recovering the waste heat generated in the first condenser 110A and performing on / off cycling to control the cooling capacity of the evaporator 120A, 212A and 213A and a conduit 140 for recovering the waste heat generated in the first condenser 110 and is transmitted from the first condenser 110 to the second condenser 211A, A solenoid valve 220A for controlling the amount of refrigerant, Located between the tubes 140 and consists of a regenerator (130A) for storing absorbed excess thermal energy generated in accordance with the operation of the evaporator 120 and the condenser (110, 210).

이때 제2응축기의 응축공기온도는 상시 15 °C로 유지되면 이로 인한 응축효율의 상승을(고압 16kg/cm^3~17kg/cm^3) 유지하여 압축효율 또한 상승되므로 장비기기의 수명을 연장함은 물론운전 시 압축기 등의 운전상태가 양호한 효과를 기대할 수 있다.At this time, when the condensing air temperature of the second condenser is maintained at 15 ° C at all times, the condensing efficiency is increased (high pressure 16 kg / cm 3 ~ 17 kg / cm 3) to increase the compression efficiency. It is possible to expect a good operation condition such as a compressor during operation.

상술한 구성을 통해 기존 공조시스템에서 대기로 방출되는 폐열을 회수하여 해당 폐열의 에너지만큼 별도의 에너지 공급이 없이 습도를 조절하도록 하고자 다수의 저용량 응축기를 구비하고 각 저용량 응축기의 냉매 유입단에 솔레노이드 밸브를 구축함으로써, 솔레노이드 밸브의 제어를 통해 상기 제2응축기(211A, 212A, 213A)중 상기 솔레노이드 밸브(220A)가 작동하는 저용량 제2응축기만이 냉매 응축 동작을 수행하기 때문에 냉매 응축 동작을 보다 세밀하게 제어할 수 있게 된다.Capacity condenser to recover the waste heat discharged to the atmosphere from the existing air conditioning system and to control the humidity without supplying energy to the waste heat as much as the energy of the waste heat. In addition, a solenoid valve Only the low capacity second condenser of the second condensers 211A, 212A, and 213A, which operates the solenoid valve 220A, performs the refrigerant condensation operation through the control of the solenoid valve, .

더욱이 부가적으로 서브히터(230)를 상기 제2응축기(211A, 212A, 213A)에 인접하게 구비함으로써 폐열을 활용하는 단계에서 효율이 저하되면 이를 보상하도록 한다.In addition, by providing the sub heaters 230 adjacent to the second condensers 211A, 212A, and 213A, the utilization efficiency of the waste heat is compensated when the efficiency is lowered.

또한, 밸브(SV1, SV2)를 구비하여 냉매의 흐름 경로를 제어하기 용이하도록 구현하였다.
In addition, the valves SV1 and SV2 are provided to facilitate control of the flow path of the refrigerant.

또한, 이상에서는 본 발명의 바람직한 실시 예에 대하여 도시하고 설명하였지만, 본 발명은 상술한 특정의 실시 예에 한정되지 아니하며, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에 의해 다양한 변형 실시가 가능한 것은 물론이고, 이러한 변형 실시들은 본 발명의 기술적 사상이나 전망으로부터 개별적으로 이해되어져서는 안 될 것이다.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, It will be understood by those skilled in the art that various changes and modifications may be made by those skilled in the art without departing from the spirit and scope of the present invention.

Claims (2)

입구 공기를 공기조화하기 위한 증발기(120A)와;
상기 증발기(120A)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 제1응축기(110A)와;
상기 증발기(120A)와 제1응축기(110A)사이의 냉매 순환을 위한 도관(140A)과;
상기 도관(140A)을 통해 흐르는 냉매의 흐름경로를 제어하기 위한 밸브(SV1, SV2)와;
상기 제1응축기(110A)의 동작에 연동하면서 상기 제1응축기(110A)에서 발생되는 폐열을 회수하여 상기 증발기(120A)의 냉방 용량을 제어하도록 온/오프 사이클링을 이루는 폐열 회수용 다수의 저용량 제2응축기(211A, 212A, 213A)와;
상기 저용량 제2응축기(211A, 212A, 213A)의 냉매 유입단에 각각 개별적으로 구비되어 상기 제1응축기(110)에서 발생되는 폐열을 회수하는 도관(140)에서 상기 제2응축기(211A, 212A, 213A)측으로 전달되는 냉매의 량을 제어하는 솔레노이드 벨브(220A); 및
상기 도관(140) 사이에 위치하며 상기 증발기(120)와 응축기(110, 210)의 동작에 따라 발생되는 열중 여분의 열에너지를 축적하는 축열기(130A)로 구성되어 상기 솔레노이드 밸브(220A)의 제어를 통해 상기 저용량 제2응축기(211A, 212A, 213A)의 냉매 응축 동작을 세밀하게 제어할 수 있도록 하는 것을 특징으로 하는 에너지 절감형 클린룸 공조장치.
An evaporator (120A) for air conditioning the inlet air;
A first condenser 110A for on / off cycling to control the cooling capacity of the evaporator 120A;
A conduit 140A for circulating the refrigerant between the evaporator 120A and the first condenser 110A;
Valves (SV1, SV2) for controlling the flow path of the refrigerant flowing through the conduit (140A);
A plurality of low-capacity accumulators for recovering the waste heat generated in the first condenser 110A in association with the operation of the first condenser 110A and performing on / off cycling to control the cooling capacity of the evaporator 120A 2 condensers 211A, 212A, and 213A;
The second condensers 211A, 212A, and 213A are separately provided at the refrigerant inlet ends of the low capacity second condensers 211A, 212A, and 213A to collect waste heat generated in the first condenser 110, A solenoid valve 220A for controlling the amount of the refrigerant delivered to the side of the evaporator 213A; And
And an accumulator 130A disposed between the conduits 140 and accumulating thermal energy generated during operation of the evaporator 120 and the condensers 110 and 210 so that the control of the solenoid valve 220A Capacity condensing operation of the low-capacity second condensers (211A, 212A, 213A) can be finely controlled through the second condenser (211A, 212A, 213A).
제 1항에 있어서,
상기 저용량 제2응축기에 인접하게 소용량 서브히터(230)를 구비하는 것을 특징으로 하는 에너지 절감형 클린룸 공조장치.
The method according to claim 1,
And a small-capacity sub-heater (230) adjacent to the low-capacity second condenser.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107036194A (en) * 2017-05-27 2017-08-11 山东美诺邦马节能科技有限公司 The double low-temperature receiver dehumidifying fresh-air ventilation units of high-temperature water cooling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107036194A (en) * 2017-05-27 2017-08-11 山东美诺邦马节能科技有限公司 The double low-temperature receiver dehumidifying fresh-air ventilation units of high-temperature water cooling

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