KR20150030945A

KR20150030945A - Helium hose for charging and removing method of contaminants being in helium hose for sustaining the purity of helium for charging

Info

Publication number: KR20150030945A
Application number: KR20130110308A
Authority: KR
Inventors: 강석민
Original assignee: 강석민
Priority date: 2013-09-13
Filing date: 2013-09-13
Publication date: 2015-03-23

Abstract

The present invention relates to a hose for filling a helium gas, comprising: a pair of valves respectively installed at both ends of the hose connecting between a helium gas tank and a charging body to control inflow and outflow of helium gas; And a vacuum valve installed between both ends of the hose and connected to a vacuum pump to exhaust pollutants remaining in the hose to the outside.
According to the present invention, it is possible to prevent the deterioration of the helium gas filling the charge by maintaining the clean state of the hose connecting the helium gas tank and the filler, A heating device capable of increasing the activity of the substance can be expected to double the emission of pollutants.
In addition, the present invention can prevent the removal and inflow of contaminants remaining in the hose, prevent the damage and damage of the industrial equipment using the high purity helium gas to fill the charge, and enable the production of high quality products, It is possible to expect the effect of improving the competitiveness of the product.

Description

[0001] The present invention relates to a method of removing contaminants in a helium hose for maintaining purity of helium during helium charging and a method for removing contaminants from a helium hose,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of removing contaminants in a helium hose and a charging hose for maintaining helium purity when helium is charged, and more particularly, to a method of removing contaminants in a helium hose by connecting a helium gas tank filled with high- The present invention provides a method for removing contaminants in a helium hose and a hose for filling the helium gas so that the contaminants remaining in the hose are discharged so that the purity of the helium gas in the helium gas tank can be filled.

Generally, a helium gas filling hose exists as a conduit between the tank filled with helium gas and the heat treatment equipment or the semiconductor equipment or the filling tank, and serves as a medium to allow the helium gas of the tank to be charged into the device or the filling tank.

However, since the conventional charging apparatus is frequently in contact with the outside atmosphere, the contaminants (such as substances having properties other than helium gas filled in the helium gas tank) flow into or remain in the pipeline, The gas fills the filler in a deteriorated state due to contaminants present in the hose.

That is, generally, the helium gas supply method through the helium hose simply injects and exhausts ultra-high purity helium gas into the helium hose. In this case, the pollutants in the helium hose are not sufficiently exhausted, The purity of high purity (99.999%) helium gas is lowered, which results in noise of the cryo pump and the cryocooler and damage of the internal parts, and it is necessary to maintain the purity of the ultra high purity helium gas inside the helium hose.

Inside the cryo pump, there is provided a DISPLACER which maintains an internal temperature of about 10K (-263 degrees Celsius). The display is reciprocated in the vertical direction. In this case, If helium gas of purity is supplied, the inherent contaminants will freeze between the display and the cylinder and interfere with the reciprocating motion of the displacer. In this case, there is a problem that severe noise and internal components (motor and bearing, etc.) . The ultra high purity helium gas is in the gas state in the 10K band, but the remaining impurities (H20, O2, N2, THC) are in the solid state at the above temperature because they are below freezing point.

Disclosure of the Invention The present invention has been conceived to solve the problems as described above, and it is an object of the present invention to provide a helium gas tank which can maintain a clean state of a hose connecting a fuel tank, And a method of supplying and removing contaminants using the hose.

The present invention also provides a heatex filling hose provided with a vacuum pump and a contaminant removing means capable of doubling the discharge of contaminants through a heating device capable of increasing the activity of contaminants, And a method of supplying and removing contaminants using the same.

In addition, the present invention can prevent the removal and inflow of contaminants remaining in the hose, prevent the damage and breakage of industrial equipment using the high purity helium gas to fill the charge, and improve the quality of the product. The present invention also provides a method for removing contaminants using the hose, and a method for supplying contaminants using the hose.

According to an aspect of the present invention, there is provided a helium gas filling hose comprising: a pair of valves installed at both ends of a hose connecting a helium gas tank and a charging body to control the flow of helium gas; A vacuum valve separately installed at one of the ends of the hose and connected to the vacuum pump to exhaust contaminants remaining in the hose to the outside; And a heater installed in one region between the opposite ends of the hose to activate the contaminants remaining in the hose to induce movement to the vacuum pump.

The hose comprising: a gauge indicative of the pressure of helium gas in an area adjacent to the valve; And a gauge valve for restricting pressure measurement of the gauge or blocking the inflow of helium gas into the gauge.

A rotary pump, a dry pump, a CRYO pump, and a turbo pump.

In addition, the present invention provides a method for manufacturing a hose, comprising: a first step of closing both ends of the hose; A second step of heating the hose; And a third step of operating the vacuum pump to discharge contaminants remaining in the hose.

A fourth step of, after the third step, stopping the operation of the hose of the second step and the vacuum pump of the third step and closing the vacuum valve; A fifth step of opening both ends of the hose closed by the first step; And a high-purity helium gas of the helium gas tank is supplied to the filler through both ends of the opened hose.

According to the present invention, it is possible to maintain the clean state of the hose connecting the helium gas tank and the rechargeable battery, thereby preventing deterioration of the helium gas filling the rechargeable battery.

In addition, the present invention can be expected to have the effect of doubling the emission of contaminants through a vacuum pump and a heating device capable of increasing the activity against contaminants in a certain area of the hose.

In addition, the present invention can prevent the removal and inflow of contaminants remaining in the hose, prevent the damage and breakage of the industrial equipment using the high purity helium gas by filling the charge with the product, It is possible to expect an effect of improving the competitiveness of the system.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a whole view for explaining a hose according to a preferred embodiment of the present invention;
FIG. 2 is a perspective view illustrating a first method for explaining a method of removing contaminants according to a preferred embodiment of the present invention,
3 is a second flow shown to illustrate a feeding method according to a preferred embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear.

The present invention applies to cryogenic cryo (CRYO) technology. Cryogenic Pump (CRYO PUMP) is a high vacuum (1.0 x 10 ^-8 torr or less) pump used in semiconductor or general industry. The principle of this pump is to compress super high purity helium gas to high pressure (CRYO COMPRESSOR) And the temperature is lowered to about 10K to form a vacuum by freezing or capturing molecules. In this case, a helium hose is connected to the helium gas tank to supply or recover helium gas between the CRYO compressor and the cryo pump.

There are various types of pumps used for maintaining the vacuum, and the kind of such pumps is not particularly limited. For example, a rotary pump, a DRY pump, a CRYO pump, a TURBO pump, and the like can be used.

1 is an overall view illustrating a hose according to a preferred embodiment of the present invention.

A pair of valves 110 and a hose 100 which are respectively installed at both ends of the hose 100 connecting between the helium gas tank 10 and the filler 20 to control the inflow and outflow of the helium gas, And a vacuum valve 121 connected between the opposite ends of the hose 100 and connected to a vacuum pump 120 for exhausting molecules remaining in the hose 100 to the outside. And a heating device 130.

The contaminant here means all substances other than helium in gas, liquid and solid form.

The charging unit 20 is any one selected from a heat treatment equipment, a semiconductor equipment or a charging tank, and the charging tank is a tank for transferring or carrying the helium gas.

The hose 100 is a metal chain which is prevented from being damaged by the heating device 130. For example, the hose 100 is preferably a copper pipe or a stainless steel pipe, and it is highly desirable that the pipe 100 is a flexible pipe so as to be further flexible in connection.

The valve 110 includes a first valve 111 provided adjacent to one end connected to the helium gas tank 10 and a second valve 113 provided adjacent to the other end connected to the filler 20, It is preferable that when the pollutants are removed, the valves 111 and 113 are closed or at least the second valve 113 is kept closed.

The vacuum pump 120 is most preferably a cryo pump connected to a cryocompressor forming a high vacuum in the semiconductor equipment.

The vacuum valve 121 is for blocking the inflow of helium gas into the vacuum pump 120 when the discharge to the pollutant is completed or not used.

The heating device 130 is installed in a region between both ends of the hose 100 so as to heat the hose 100 to approximately 70 to 90 ° C to increase the activity of the contaminants remaining therein.

Instead of this heating device, a heating method may be adopted in which electric means is connected to both ends of the hose 100 and heat is generated by electrical resistance generated in the hose.

The hose 100 is heated to increase the activity of the remaining contaminants (for example, oxygen or hydrogen) which are fixed or remained inside the vacuum pump 120 and induce the discharge to the vacuum pump 120, To multiply the clean state inside the housing 100.

The heating device 130 is preferably installed to surround the outer periphery of the hose 100 as shown in FIG.

A pair of gauges 140 for measuring the pressure of the helium gas are installed in the area close to the valve 110. The gauges 140 are connected to the helium gas tank 10 through the helium A gauge valve 141 is further provided between the gauge 140 and the hose 100 to measure the pressure of the gas and the pressure supplied to the filling body 20, It is used when pressure measurement is unnecessary, or when replacement of the gauge 140 is required.

The pollutant discharge method through the hose constructed as described above will be described with reference to Fig.

2 is a first flowchart illustrating a method for removing contaminants according to a preferred embodiment of the present invention.

As shown in the figure, the pollutant removal method using a hose is performed through a first step of closing both ends of the hose, a second step of heating the hose, and a third step of discharging contaminants remaining in the hose by operating the vacuum pump .

The first step is to close both ends of the hose to block the entry of contaminants from the outside and the entry and exit of helium gas.

That is, it is intended to block the inflow of helium gas from the helium gas tank and to block the inflow of contaminants from the contaminated hose into the filling body.

Thereafter, the second step proceeds with the ends of the hose blocked. In the second step, the inside of the hose is heated to a certain temperature (approximately 70 to 90 ° C) through a heating device to increase the activity of the contaminants adhering to or remaining in the hose.

Thereafter, the activated contaminant activates the vacuum pump of the third stage to discharge the contaminants remaining in the hose to the outside. In this case, the third step is performed together with the second step, or the hose temperature reaches the set temperature It is preferable to make it operate.

In this way, the hose is kept in a clean state since the pollutants which are fixed or remained inside are discharged to the outside through each step.

Then, if the clean state of the hose is maintained as in the second flow shown in FIG. 3, a fourth step of stopping the operation of the hose of the second stage and the operation of the vacuum pump of the third stage, And a sixth step of supplying high-purity helium gas of the helium gas tank to the filling body through both ends of the opened hose.

Therefore, the present invention can prevent the removal and inflow of the pollutants remaining in the hose, and it is possible to produce high-quality products by filling high-purity helium gas with the high-purity helium gas, There is an advantage that it can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. Therefore, the embodiments disclosed in the present invention are intended to illustrate rather than limit the scope of the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

10: Helium gas tank 20:
100: Hose 110: Valve
111: first valve 113: second valve
120: Vacuum pump 121: Vacuum valve
130: Heating device 140: Gauge
141: Gauge valve

Claims

In a helium gas filling hose,
A pair of valves respectively installed at both ends of the hose connecting between the helium gas tank and the charge body to control inflow and outflow of the helium gas;
A vacuum valve separately installed at one of the ends of the hose and connected to the vacuum pump to exhaust contaminants remaining in the hose to the outside; And
A heating device installed in one region between both ends of the hose to activate the contaminants remaining in the hose to induce movement to the vacuum pump;
And a hose for filling the helium gas.

The method according to claim 1,
The hose,
A gauge indicative of the pressure of the helium gas in the region adjacent to the valve; And
Further comprising: a gauge valve for limiting the pressure measurement of the gauge or for blocking inflow of helium gas into the gauge.

The method according to claim 1,
The pump includes:
Wherein the pump is one of a rotary pump, a dry pump, a CRYO pump, and a turbo pump.

A method of discharging pollutants in a hose according to any one of claims 1 to 3,
A first step of closing both ends of the hose;
A second step of heating the hose; And
A third step of operating the vacuum pump to discharge contaminants remaining in the hose;
Wherein the method further comprises the steps of:

5. The method of claim 4,
After the third step,
A fourth step of stopping the operation of the vacuum pump in the second step and closing the vacuum valve in the third step;
A fifth step of opening both ends of the hose closed by the first step; And
A sixth step in which high purity helium gas of the helium gas tank is supplied to the filler through both ends of the opened hose;
Wherein the method further comprises the steps of: