KR102256926B1 - Helium gas charging system and method for helium calibration measuring instrument - Google Patents

Helium gas charging system and method for helium calibration measuring instrument Download PDF

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KR102256926B1
KR102256926B1 KR1020200109144A KR20200109144A KR102256926B1 KR 102256926 B1 KR102256926 B1 KR 102256926B1 KR 1020200109144 A KR1020200109144 A KR 1020200109144A KR 20200109144 A KR20200109144 A KR 20200109144A KR 102256926 B1 KR102256926 B1 KR 102256926B1
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South Korea
Prior art keywords
hose
helium
helium gas
filling
gas
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KR1020200109144A
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Korean (ko)
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정현욱
윤민영
김민
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(주)아이텍기술
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/02Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01Shape
    • F17C2201/0104Shape cylindrical
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323Valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338Pressure regulators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00Handled fluid, in particular type of fluid
    • F17C2221/01Pure fluids
    • F17C2221/016Noble gases (Ar, Kr, Xe)
    • F17C2221/017Helium
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01Propulsion of the fluid
    • F17C2227/0128Propulsion of the fluid with pumps or compressors
    • F17C2227/0135Pumps
    • F17C2227/0142Pumps with specified pump type, e.g. piston or impulsive type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)

Abstract

The present invention relates to a helium gas charging system and method for a helium calibration measuring instrument, which can stably fill a helium gas cylinder, having been used for one-time use, with helium gas stored in an additional helium gas storage tank and can enable reuse of the stored helium gas. To solve the technical problem, the helium gas charging system comprises: a helium gas storage tank in which helium gas is stored; a charging gas cylinder connected to the helium gas storage tank through a hose, and filled with the helium gas stored in the helium gas storage tank; a helium regulator installed on the hose connected to the helium gas storage tank to convert high-pressure gas into low-pressure gas and discharge the same; a first opening and closing valve installed on the hose corresponding to one side of the helium regulator to open and close the hose; a vacuum pump installed on the hose for connecting the helium gas storage tank and the charging gas cylinder to remove air from the hose; a second opening and closing valve installed on the hose corresponding to one side of the vacuum pump to open and close the hose; and a positive and negative pressure gauge installed on the hose connected to the charging gas cylinder to identify the pressure of the hose and the charging gas cylinder.

Description

헬륨교정측정기용 헬륨가스 충전 시스템 및 방법{Helium gas charging system and method for helium calibration measuring instrument}Helium gas charging system and method for helium calibration measuring instrument}

본 발명은 일회용으로 사용되던 헬륨가스통에 별도로 마련된 헬륨가스저장탱크에 저장된 헬륨가스를 안정적으로 충진하여 재사용할 수 있도록 한 헬륨교정측정기용 헬륨가스 충전 시스템 및 방법에 관한 것이다.The present invention relates to a helium gas filling system and method for a helium calibration measuring device that stably fills and reuses helium gas stored in a helium gas storage tank provided separately in a helium gas cylinder used for single use.

일반적으로 헬륨 교정측정기(STL-6)의 헬륨가스가 충전된 헬륨가스통을 해외(독일)에서 수입하여 사용하고 있다.In general, helium gas cylinders filled with helium gas of the helium calibration measuring instrument (STL-6) are imported and used from overseas (Germany).

이와 같은 헬륨가스통은 고가(약 300만원)이며, 헬륨가스통에 충전된 헬륨가스를 모두 소진하면 헬륨가스를 재충전하여 사용하거나 헬륨가스가 충전된 새제품을 구매 해야된다.Such a helium gas cylinder is expensive (about 3 million won), and when the helium gas filled in the helium gas cylinder is exhausted, the helium gas must be recharged and used, or a new product filled with helium gas must be purchased.

그러나 현재 국내에서는 헬륨가스통에 헬륨가스의 재충전이 불가하여 해외(독일)에서 재충전을 의뢰하거나 새제품을 구매해야하는데 헬륨가스를 충전하는 비용이나 새제품을 구매하는 비용이 비슷하여 비용이 많이 발생하는 문제점이 있다.However, in Korea, it is not possible to recharge helium gas into the helium gas cylinder, so you have to request recharging from overseas (Germany) or purchase a new product. There is a problem.

따라서, 국내에서 헬륨가스를 재충전하여 사용할 수 있는 기술개발이 시급하다.Therefore, it is urgent to develop a technology that can be used by recharging helium gas in Korea.

대한민국 공개특허 제10-2015-0030945호가 공개된 바 있다.Korean Patent Application Publication No. 10-2015-0030945 has been disclosed.

본 발명은 상기와 같은 종래 기술의 제반 문제점을 해소하기 위하여 안출된 것으로서, 본 발명의 기술적 구성에 의한 목적은 일회용으로 사용되던 충전가스통에 별도로 마련된 헬륨가스저장탱크에 저장된 헬륨가스를 충전가스통에 안정적으로 충진하여 재사용할 수 있도록 한 헬륨교정측정기용 헬륨가스 충전 시스템 및 방법을 제공하는데 있다.The present invention was conceived to solve the problems of the prior art as described above, and the object of the technical configuration of the present invention is to stabilize the helium gas stored in the helium gas storage tank separately provided in the filling gas cylinder used for single use in the filling gas cylinder. It is to provide a helium gas filling system and method for a helium calibration measuring device that can be filled with and reused.

상기 기술적 과제를 달성하기 위한 본 발명은 헬륨가스가 저장된 헬륨가스저장탱크; 상기 헬륨가스저장탱크와 호스를 통해 연결되어 헬륨가스저장탱크에 저장된 헬륨가스가 충전되는 충전가스통; 상기 헬륨가스저장탱크에 연결된 호스에 설치되어 고압의 가스를 저압의 가스로 변환하여 배출시키는 헬륨레귤레이터; 상기 헬륨레귤레이터의 일측에 해당하는 호스에 설치되어 호스를 개폐시키는 제1개폐밸브; 상기 헬륨가스저장탱크와 충전가스통의 사이를 연결하는 호스에 설치되어 호스 내의 공기를 제거하는 진공펌프; 상기 진공펌프의 일측에 해당하는 호스에 설치되어 호스를 개폐시키는 제2개폐밸브; 및 상기 충전가스통에 연결된 호스에 설치되어 호스와 충전가스통의 압력을 확인하기 위한 양음압게이지;를 포함하는 교정측정기용 헬륨가스 충전시스템를 제공한다.The present invention for achieving the above technical problem is a helium gas storage tank in which helium gas is stored; A filling gas cylinder connected to the helium gas storage tank through a hose and filled with helium gas stored in the helium gas storage tank; A helium regulator installed in a hose connected to the helium gas storage tank to convert and discharge high-pressure gas into low-pressure gas; A first opening/closing valve installed on a hose corresponding to one side of the helium regulator to open and close the hose; A vacuum pump installed on a hose connecting the helium gas storage tank and the filling gas cylinder to remove air from the hose; A second opening/closing valve installed on a hose corresponding to one side of the vacuum pump to open and close the hose; And a positive and negative pressure gauge installed on a hose connected to the filling gas cylinder to check the pressure of the hose and the filling gas cylinder.

다른 양태에 있어서, 제1개폐밸브를 닫아 호스를 폐쇄하는 단계; 상기 호스가 폐쇄된 상태에서 진공펌프를 가동시켜 호스 및 충전가스통의 내부 공기를 진공상태까지 펌핑시키는 단계; 상기 호스 및 충전가스통의 내부가 진공상태에서 제2개폐밸브를 닫아 호스를 폐쇄하여 진공상태를 유지시키는 단계; 상기 호스가 진공상태로 폐쇄된 상태에서 제1개폐밸브를 열은 다음 헬륨레귤레이터의 헬륨가스배출밸브를 열어 헬륨가스저장탱크에 저장된 헬륨가스를 충전가스통으로 대기압까지 주입시키는 단계; 기 헬륨가스가 충전가스통으로 대기압까지 주입이 완료되면 헬륨가스배출밸브를 닫아주어 충전압까지 주입시키는 단계; 상기 헬륨가스가 충전가스통으로 충전압까지 주입이 완료되면 제1개폐밸브와 제2개폐밸브를 순차적으로 닫아 호스를 폐쇄한 후 충전가스통을 분리시키는 단계; 및 상기 제1개폐밸브를 닫고 가스통개폐밸브를 천천히 열어 호스 내에 있는 압력을 외부로 배출시켜 제거하는 단계;를 포함하는 헬륨교정측정기용 헬륨가스 충전방법를 제공한다.In another aspect, closing the hose by closing the first opening and closing valve; Pumping the air inside the hose and the filling gas cylinder to a vacuum state by operating the vacuum pump while the hose is closed; Closing the hose by closing the second opening/closing valve while the inside of the hose and the filling gas cylinder are in a vacuum state to maintain a vacuum state; Opening the first opening/closing valve while the hose is closed in a vacuum state, and then opening the helium gas discharge valve of the helium regulator to inject helium gas stored in the helium gas storage tank into the filling gas cylinder to atmospheric pressure; Injecting the helium gas to the filling pressure by closing the helium gas discharge valve when the injection of the helium gas to the atmospheric pressure is completed; When the helium gas is injected into the filling gas cylinder to the filling pressure, the first opening and closing valve and the second opening and closing valve are sequentially closed to close the hose and then the filling gas cylinder is separated; And closing the first opening/closing valve and slowly opening the gas cylinder opening/closing valve to discharge and remove the pressure in the hose to the outside.

본 발명에 따르면, 일회용으로 사용되던 충전가스통에 별도로 마련된 헬륨가스저장탱크에 저장된 헬륨가스를 안정적으로 충진하여 재사용할 수 있도록 하여 단가가 비싼 충전가스통을 버리지 않고 재사용하 수 있음에 따라 비용을 현저히 줄일 수 있다.According to the present invention, the helium gas stored in the helium gas storage tank separately provided in the single-use filling gas cylinder can be stably filled and reused, and thus the cost can be re-used without discarding the expensive filling gas cylinder. I can.

도 1은 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전시스템를 나타낸 개념도.
도 2는 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전방법을 나타낸 순서도.
1 is a conceptual diagram showing a helium gas filling system for a helium calibration meter according to the present invention.
Figure 2 is a flow chart showing a helium gas filling method for a helium calibration meter according to the present invention.

본 발명은 다양한 변경을 가할 수 있고 여러 가지 실시예를 가질 수 있는바, 특정 실시예들을 도면에 예시하고 상세한 설명에 설명하고자 한다.Since the present invention can make various changes and have various embodiments, specific embodiments will be illustrated in the drawings and described in the detailed description.

그러나, 이는 본 발명을 특정한 실시 형태에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경, 균등물 내지 대체물을 포함하는 것으로 이해되어야 한다. 각 도면을 설명하면서 유사한 참조부호를 유사한 구성요소에 대해 사용하였다.However, this is not intended to limit the present invention to a specific embodiment, it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention. In describing each drawing, similar reference numerals have been used for similar elements.

제2, 제1 등과 같이 서수를 포함하는 용어는 다양한 구성요소들을 설명하는데 사용될 수 있지만, 상기 구성요소들은 상기 용어들에 의해 한정되지는 않는다.Terms including ordinal numbers such as second and first may be used to describe various elements, but the elements are not limited by the terms.

본 명세서에 사용되는 용어들은 하나의 구성요소를 다른 구성요소로부터 구별하는 목적으로만 사용된다. 예를 들어, 본 발명의 권리 범위를 벗어나지 않으면서 제2 구성요소는 제1 구성요소로 명명될 수 있고, 유사하게 제1 구성요소도 제2 구성요소로 명명될 수 있다. 및/또는 이라는 용어는 복수의 관련된 기재된 항목들의 조합 또는 복수의 관련된 기재된 항목들 중의 어느 항목을 포함한다.Terms used in the present specification are used only for the purpose of distinguishing one component from another component. For example, without departing from the scope of the present invention, the second element may be referred to as the first element, and similarly, the first element may be referred to as the second element. The term and/or includes a combination of a plurality of related listed items or any of a plurality of related listed items.

어떤 구성요소가 다른 구성요소에 "연결되어" 있다거나 "접속되어" 있다고 언급된 때에는, 그 다른 구성요소에 직접적으로 연결되어 있거나 또는 접속되어 있을 수도 있지만, 중간에 다른 구성요소가 존재할 수도 있다고 이해되어야 할 것이다. 반면에, 어떤 구성요소가 다른 구성요소에 "직접 연결되어" 있다거나 "직접 접속되어" 있다고 언급된 때에는, 중간에 다른 구성요소가 존재하지 않는 것으로 이해되어야 할 것이다.When a component is referred to as being "connected" or "connected" to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in the middle. It should be. On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there is no other component in the middle.

본 출원에서 사용한 용어는 단지 특정한 실시예를 설명하기 위해 사용된 것으로, 본 발명을 한정하려는 의도가 아니다. 단수의 표현은 문맥상 명백하게 다르게 뜻하지 않는 한, 복수의 표현을 포함한다. 본 출원에서, "포함하다" 또는 "가지다" 등의 용어는 명세서상에 기재된 특징, 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것이 존재함을 지정하려는 것이지, 하나 또는 그 이상의 다른 특징들이나 숫자, 단계, 동작, 구성요소, 부품 또는 이들을 조합한 것들의 존재 또는 부가 가능성을 미리 배제하지 않는 것으로 이해되어야 한다.The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof does not preclude in advance.

다르게 정의되지 않는 한, 기술적이거나 과학적인 용어를 포함해서 여기서 사용되는 모든 용어들은 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자에 의해 일반적으로 이해되는 것과 동일한 의미를 가지고 있다. 일반적으로 사용되는 사전에 정의되어 있는 것과 같은 용어들은 관련 기술의 문맥상 가지는 의미와 일치하는 의미를 갖는 것으로 해석되어야 하며, 본 출원에서 명백하게 정의하지 않는 한, 이상적이거나 과도하게 형식적인 의미로 해석되지 않는다.Unless otherwise defined, all terms used herein including technical or scientific terms have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning of the related technology, and should not be interpreted as an ideal or excessively formal meaning unless explicitly defined in the present application. Does not.

이하, 첨부된 도면을 참조하여 본 발명의 실시예를 설명하면 다음과 같다.Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

도 1은 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전시스템를 나타낸 개념도이다.1 is a conceptual diagram showing a helium gas filling system for a helium calibration measuring device according to the present invention.

도 1을 참조하면, 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전 시스템은 헬륨가스가 저장된 헬륨가스저장탱크(10)와, 헬륨가스저장탱크(10)와 호스(20)를 통해 연결되어 헬륨가스저장탱크(10)에 저장된 헬륨가스를 충전하기 위한 충전가스통(30)과, 헬륨가스저장탱크(10)에 연결된 호스(20)에 설치되어 고압(120~130barg)의 가스를 저압(8~12barg)의 가스로 변환하여 배출시키는 헬륨레귤레이터(40)와, 헬륨레귤레이터(40)의 일측에 해당하는 호스(20)에 설치되어 호스(20)를 개폐시키는 제1개폐밸브(50)와, 헬륨가스저장탱크(10)와 충전가스통(30)의 사이를 연결하는 호스(20)에 설치되어 호스 내의 공기를 제거하는 진공펌프(60)와, 진공펌프(60)의 일측에 해당하는 호스(20)에 설치되어 호스를 개폐시키는 제2개폐밸브(70) 및 충전가스통(30)에 연결된 호스(20)에 설치되어 호스(20)와 충전가스통(30)의 압력을 확인하기 위한 양음압게이지(80)를 포함하여 구성된다.Referring to FIG. 1, the helium gas filling system for a helium calibration measuring device according to the present invention is connected through a helium gas storage tank 10 in which helium gas is stored, and a helium gas storage tank 10 and a hose 20. It is installed in the filling gas cylinder 30 for filling the helium gas stored in the storage tank 10 and the hose 20 connected to the helium gas storage tank 10 to reduce the high pressure (120 to 130 barg) gas to the low pressure (8 to 12 barg). A helium regulator 40 that converts and discharges the gas of ), a first opening/closing valve 50 installed in the hose 20 corresponding to one side of the helium regulator 40 to open and close the hose 20, and helium gas A vacuum pump 60 installed on a hose 20 connecting between the storage tank 10 and the filling gas cylinder 30 to remove air from the hose, and a hose 20 corresponding to one side of the vacuum pump 60 A positive and negative pressure gauge 80 for checking the pressure of the hose 20 and the filling gas cylinder 30 installed in the second opening/closing valve 70 which is installed in the hose to open and close the hose 20 and the hose 20 connected to the filling gas cylinder 30 ).

한편, 헬륨레귤레이터(40)는 헬륨가스저장탱크(10) 내에 저장된 헬륨가스의 배출량을 조절하는 헬륨가스배출밸브(41)와, 헬륨가스저장탱크(10)를 통해 호스(20)로 유입되는 헬륨가스의 압력과, 충전가스통(30)으로 공급되는 압력을 각각 측정하기 위한 한 쌍의 게이지(42)를 포함하여 구성된다.On the other hand, the helium regulator 40 includes a helium gas discharge valve 41 that controls the amount of helium gas stored in the helium gas storage tank 10, and helium flowing into the hose 20 through the helium gas storage tank 10. It is configured to include a pair of gauges 42 for measuring the pressure of the gas and the pressure supplied to the filling gas cylinder 30, respectively.

또한, 제1개폐밸브(50)는 헬륨레귤레이터(40)를 통해 헬륨가스저장탱크(10) 내에서 배출되는 헬륨가스가 충전가스통(30) 방향으로 유동시키는 호스(20) 내부를 차단하거나 개방하도록 볼밸브로 구성됨이 바람직하며. 제1개폐밸브(50)는 진공펌프(60)를 구동시켜 호스(20) 내에 음압을 형성시 음압을 유지하기 위해 폐쇄된 상태로 구비된다.In addition, the first opening/closing valve 50 blocks or opens the inside of the hose 20 through which the helium gas discharged from the helium gas storage tank 10 flows in the direction of the filling gas cylinder 30 through the helium regulator 40. It is preferable to be composed of a ball valve. The first opening/closing valve 50 is provided in a closed state to maintain the negative pressure when the vacuum pump 60 is driven to form a negative pressure in the hose 20.

또한, 진공펌프(60)는 로터리(rotary) 펌프, 드라이(dry) 펌프, 크라이오(CRYO) 펌프, 터보(turbo) 펌프 중 선택된 어느 하나가 사용될 수 있으며, 바람직하게는 고진공을 형성하는 크라이오 컴프레셔(cryo compressor)가 연결된 크라이오 펌프(cryo pump)를 사용함이 바람직하다.In addition, as the vacuum pump 60, any one selected from a rotary pump, a dry pump, a CRYO pump, and a turbo pump may be used. It is preferable to use a cryo pump to which a compressor (cryo compressor) is connected.

또한, 제2개폐밸브(70)는 상술한 진공펌프(60)를 가동시 호스(20) 내부를 개방시켜 진공상태까지 펌핑이 완료되면 호스(20) 내부를 차단하여 진공상태를 유지해주는 볼밸브로 구성됨이 바람직하다.In addition, the second opening and closing valve 70 is a ball valve that opens the inside of the hose 20 when the above-described vacuum pump 60 is operated, and blocks the inside of the hose 20 when pumping is completed to a vacuum state to maintain a vacuum state. It is preferably composed of.

또한, 양음압게이지(80)는 충전가스통(30)과 호스(20)의 압력을 확인하기 위해 것으로, 양음압게이지(80)와 호스(20)의 사이에는 가스통개폐밸브(81)가 더 구비되며, 이때, 가스통개폐밸브(81)는 진공작업이 불필요하거나 또는 충전가스통(30)의 교체 등이 요구될 경우에 호스(20)를 차단하는 용도로 사용된다.In addition, the positive and negative pressure gauge 80 is to check the pressure of the filling gas cylinder 30 and the hose 20, a gas cylinder opening and closing valve 81 is further provided between the positive and negative pressure gauge 80 and the hose 20 At this time, the gas cylinder opening and closing valve 81 is used for blocking the hose 20 when a vacuum operation is not required or when replacement of the filling gas cylinder 30 is required.

다음으로, 상기와 같이 구성된 헬륨교정측정기용 헬륨가스 충전 시스템을 이용한 헬륨교정측정기용 헬륨가스 충전 방법을 설명한다.Next, a method of charging helium gas for a helium calibration meter using the helium gas charging system for a helium calibration meter configured as described above will be described.

도 2는 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전방법을 나타낸 순서도이다.Figure 2 is a flow chart showing a helium gas filling method for a helium calibration meter according to the present invention.

도 2를 참조하면, 본 발명에 따른 헬륨교정측정기용 헬륨가스 충전방법은 먼저 제1개폐밸브(50)를 닫아 호스(20)를 폐쇄한다.(S100) 한편, 필요시 가스통개폐밸브(81)도 폐쇄한다.Referring to Figure 2, the helium gas filling method for a helium calibration meter according to the present invention first closes the first opening and closing valve 50 to close the hose 20. (S100) On the other hand, if necessary, the gas cylinder opening and closing valve 81. Also closed.

S100 단계와 같이 호스(20)가 폐쇄된 상태에서 진공펌프(60)를 가동시켜 호스(20) 또는 충전가스통(30)의 내부 공기를 진공상태까지 펌핑시킨다.(S200)As in step S100, the vacuum pump 60 is operated while the hose 20 is closed to pump the air inside the hose 20 or the filling gas cylinder 30 to a vacuum state. (S200)

S200 단계와 같이 호스(20) 및 충전가스통(30)의 내부가 진공상태에서 진공펌프(60)의 가동을 중지시키고 제2개폐밸브(70)를 닫아 호스(20)를 폐쇄하여 진공상태를 유지시킨다.(S300)As in step S200, when the inside of the hose 20 and the filling gas cylinder 30 is in a vacuum state, the operation of the vacuum pump 60 is stopped and the second opening/closing valve 70 is closed to close the hose 20 to maintain the vacuum state. (S300)

S300 단계와 같이 호스(20)가 진공상태로 폐쇄된 상태에서 제1개폐밸브(50)를 열은 다음 헬륨레귤레이터(40)의 헬륨가스배출밸브(41)를 열어 헬륨가스저장탱크(10)에 저장된 헬륨가스를 충전가스통(30)으로 대기압까지 천천히 주입시킨다.(S400)In the state where the hose 20 is closed in a vacuum state as in step S300, the first opening/closing valve 50 is opened, and then the helium gas discharge valve 41 of the helium regulator 40 is opened to the helium gas storage tank 10. The stored helium gas is slowly injected into the filling gas cylinder 30 to atmospheric pressure. (S400)

S400 단계와 같이 헬륨가스가 충전가스통(30)으로 대기압까지 주입이 완료되면 헬륨가스배출밸브(41)를 천천히 열어주어 헬륨가스를 충전압까지 천천히 주입시킨다(S500)When the helium gas is injected into the filling gas cylinder 30 to atmospheric pressure as in step S400, the helium gas discharge valve 41 is slowly opened to slowly inject helium gas to the filling pressure (S500).

이때, 충전압은 양음압게이지(80) 최대 8barg까지 천천히 주입시킴이 바람직하다.At this time, it is preferable to slowly inject the charging pressure up to a maximum of 8 barg of the positive and negative pressure gauge 80.

그런 다음, 헬륨가스가 충전가스통으로 충전압까지 주입이 완료되면 가스통개폐밸브(81)와 제2개폐밸브(70)를 순차적으로 닫아 호스(20)를 폐쇄한 후 충전가스통(30)을 호스(20)에서 분리시키므로 작업이 완료된다.(S600)Then, when helium gas is injected into the filling gas cylinder to the filling pressure, the gas cylinder opening and closing valve 81 and the second opening and closing valve 70 are sequentially closed to close the hose 20, and then the filling gas cylinder 30 is connected to the hose ( Since it is separated at 20), the work is completed (S600).

마지막으로 제1개폐밸브(50)를 닫고 가스통개폐밸브(81)를 천천히 열어 호스(20) 내에 있는 압력을 외부로 배출시켜 제거한다.(S700)Finally, the first opening/closing valve 50 is closed and the gas cylinder opening/closing valve 81 is slowly opened to discharge and remove the pressure in the hose 20 to the outside (S700).

따라서, 본 발명은 일회용으로 사용되던 헬륨가스통에 별도로 마련된 헬륨가스저장탱크에 저장된 헬륨가스를 안정적으로 충진하여 재사용할 수 있다.Accordingly, the present invention can be reused by stably filling the helium gas stored in the helium gas storage tank separately provided in the helium gas cylinder used for single use.

10 : 헬륨가스저장탱크
20 : 호스
30 : 충전가스통
40 : 헬륨레귤레이터
50 : 제1개폐밸브
60 : 진공펌프
70 : 제2개폐밸브
80 : 양음압게이지
10: helium gas storage tank
20: hose
30: filling gas cylinder
40: helium regulator
50: first opening and closing valve
60: vacuum pump
70: second opening and closing valve
80: positive negative pressure gauge

Claims (3)

헬륨가스가 저장된 헬륨가스저장탱크(10)와, 헬륨가스저장탱크(10)와 호스(20)를 통해 연결되어 헬륨가스저장탱크(10)에 저장된 헬륨가스를 충전하기 위한 충전가스통(30)과, 헬륨가스저장탱크에 연결된 호스에 설치되어 고압의 가스를 저압의 가스로 변환하여 배출시키는 헬륨레귤레이터(40)와, 헬륨레귤레이터(40)의 일측에 해당하는 호스(20)에 설치되어 호스를 개폐시키는 제1개폐밸브(50)와, 헬륨가스저장탱크(10)와 충전가스통(30)의 사이를 연결하는 호스(20)에 설치되어 호스 내의 공기를 제거하는 진공펌프(60)와, 진공펌프(60)의 일측에 해당하는 호스(20)에 설치되어 호스를 개폐시키는 제2개폐밸브(70) 및 충전가스통(30)에 연결된 호스에 설치되어 호스(20)와 충전가스통의 압력을 확인하기 위한 양음압게이지(80)와, 충전가스통(30)의 교체시 호스(20)를 차단하는 가스통개폐밸브(81)를 포함하고,
상기 헬륨레귤레이터(40)는 헬륨가스저장탱크 내에 저장된 헬륨가스의 배출량을 조절하는 헬륨가스배출밸브(41)와, 헬륨가스저장탱크(10)를 통해 호스(20)로 유입되는 헬륨가스의 압력과, 충전가스통(30)으로 공급되는 압력을 각각 측정하기 위한 한 쌍의 게이지(42)를 포함하는 헬륨교정측정기용 헬륨가스 충전 시스템을 이용한 헬륨교정측정기용 헬륨가스 충전 방법에 관한 것으로,
제1개폐밸브(50)를 닫아 호스(20)를 폐쇄하는 단계;
상기 호스가 폐쇄된 상태에서 진공펌프를 가동시켜 호스 및 충전가스통의 내부 공기를 진공상태까지 펌핑시키는 단계;
상기 호스(20) 및 충전가스통(30)의 내부가 진공상태에서 진공펌프(60)의 가동을 중지시키고 제2개폐밸브(70)를 닫아 호스(20)를 폐쇄하여 진공상태를 유지시키는 단계;
상기 호스(20)가 진공상태로 폐쇄된 상태에서 제1개폐밸브(50)를 열은 다음 헬륨레귤레이터(40)의 헬륨가스배출밸브(41)를 열어 헬륨가스저장탱크(10)에 저장된 고압의 헬륨가스를 저압의 헬륨가스로 변환하여 충전가스통(30)으로 대기압까지 천천히 주입시키는 단계;
상기 헬륨가스가 충전가스통(30)으로 대기압까지 주입이 완료되면 헬륨가스배출밸브(41)를 천천히 열어주어 양음압게이지 최대 8barg의 충전압까지 천천히 주입시키는 단계;
상기 헬륨가스가 충전가스통(30)으로 충전압까지 주입이 완료되면 가스통개폐밸브(81)와 제2개폐밸브(70)를 순차적으로 닫아 호스(20)를 폐쇄한 후 충전가스통(30)을 호스에서 분리시키는 단계; 및
상기 제1개폐밸브(50)를 닫고 가스통개폐밸브(81)를 천천히 열어 호스(20) 내에 있는 압력을 외부로 배출시켜 제거하는 단계;를 포함하는 것을 특징으로 하는 헬륨교정측정기용 헬륨가스 충전방법.
A helium gas storage tank 10 in which helium gas is stored, and a filling gas cylinder 30 for filling the helium gas stored in the helium gas storage tank 10 and connected through the helium gas storage tank 10 and the hose 20 , A helium regulator 40 installed on a hose connected to the helium gas storage tank to convert and discharge high pressure gas into low pressure gas, and a hose 20 corresponding to one side of the helium regulator 40 to open and close the hose. The vacuum pump 60 is installed on the hose 20 connecting the first opening and closing valve 50 to allow the helium gas storage tank 10 and the filling gas cylinder 30 to remove air from the hose, and a vacuum pump It is installed on the hose 20 corresponding to one side of 60 to check the pressure of the hose 20 and the filling gas cylinder installed on the hose connected to the second opening and closing valve 70 and the filling gas cylinder 30 to open and close the hose It includes a positive and negative pressure gauge 80 for, and a gas cylinder opening and closing valve 81 that blocks the hose 20 when the filling gas cylinder 30 is replaced,
The helium regulator 40 includes a helium gas discharge valve 41 that controls the discharge amount of helium gas stored in the helium gas storage tank, and the pressure of the helium gas flowing into the hose 20 through the helium gas storage tank 10. , It relates to a helium gas filling method for a helium calibration measuring instrument using a helium gas filling system for a helium calibration measuring instrument including a pair of gauges 42 for measuring the pressure supplied to the filling gas cylinder 30, respectively,
Closing the hose 20 by closing the first opening and closing valve 50;
Pumping the air inside the hose and the filling gas cylinder to a vacuum state by operating the vacuum pump while the hose is closed;
Stopping the operation of the vacuum pump 60 while the inside of the hose 20 and the filling gas cylinder 30 is in a vacuum state and closing the hose 20 by closing the second opening/closing valve 70 to maintain the vacuum state;
When the hose 20 is closed in a vacuum state, the first opening/closing valve 50 is opened, and then the helium gas discharge valve 41 of the helium regulator 40 is opened to reduce the high pressure stored in the helium gas storage tank 10. Converting helium gas into low-pressure helium gas and slowly injecting it into the filling gas cylinder 30 to atmospheric pressure;
When the helium gas is injected into the filling gas cylinder 30 to atmospheric pressure, slowly opening the helium gas discharge valve 41 to slowly inject the positive and negative pressure gauge to a filling pressure of up to 8 barg;
When the helium gas is injected into the filling gas cylinder 30 to the filling pressure, the gas cylinder opening and closing valve 81 and the second opening and closing valve 70 are sequentially closed to close the hose 20, and then the filling gas cylinder 30 is connected to the hose. Separating from; And
Closing the first opening/closing valve 50 and slowly opening the gas cylinder opening/closing valve 81 to discharge and remove the pressure in the hose 20 to the outside. .
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115046133A (en) * 2022-05-26 2022-09-13 华能山东石岛湾核电有限公司 Storage method of helium gas used for high-temperature gas cooled reactor
CN115127017A (en) * 2022-06-30 2022-09-30 大连大特气体有限公司 Standard gas split charging device and method
CN115127017B (en) * 2022-06-30 2024-05-24 大连大特气体有限公司 Standard gas split charging device and split charging method

Citations (3)

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Publication number Priority date Publication date Assignee Title
KR950009648U (en) * 1993-09-15 1995-04-21 PLC input device
KR200310195Y1 (en) * 2002-12-27 2003-04-11 주식회사 가스랜드코리아 Filling device of oxygen
KR20150030945A (en) 2013-09-13 2015-03-23 강석민 Helium hose for charging and removing method of contaminants being in helium hose for sustaining the purity of helium for charging

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950009648U (en) * 1993-09-15 1995-04-21 PLC input device
KR200310195Y1 (en) * 2002-12-27 2003-04-11 주식회사 가스랜드코리아 Filling device of oxygen
KR20150030945A (en) 2013-09-13 2015-03-23 강석민 Helium hose for charging and removing method of contaminants being in helium hose for sustaining the purity of helium for charging

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115046133A (en) * 2022-05-26 2022-09-13 华能山东石岛湾核电有限公司 Storage method of helium gas used for high-temperature gas cooled reactor
CN115127017A (en) * 2022-06-30 2022-09-30 大连大特气体有限公司 Standard gas split charging device and method
CN115127017B (en) * 2022-06-30 2024-05-24 大连大特气体有限公司 Standard gas split charging device and split charging method

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