KR20140139837A - Pressure measuring plate and injection pressure measurement system of injection nozzle - Google Patents

Abstract

Disclosed are a pressure measurement plate and a system for measuring the jet pressure distribution of a nozzle using the same. The pressure measurement plate for measuring the jet pressure distribution of a nozzle comprises: a base plate with a predetermined shape; a pressure distribution sensor mounted on the base plate, and used to measure the pressure of a jet liquid jetted from the nozzle toward the base plate; and a coating part protecting the pressure distribution sensor from the jet liquid by surrounding the pressure distribution sensor. The system for measuring the jet pressure distribution of the nozzle using the pressure measurement plate comprises: a nozzle mounting part having the nozzle; the pressure measurement plate positioned below the nozzle, and used to measure the pressure of the jet liquid jetted from the nozzle; and a pressure measurement information outputting part connected to the pressure measurement plate, and used to output measurement information on the pressure measured by the pressure measurement plate.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a pressure measurement plate having a pressure distribution sensor and an injection pressure distribution measurement system using the same,

The present invention relates to a pressure measurement plate and a system for measuring the injection pressure distribution of the injection nozzle using the same, and more particularly, to a pressure measurement plate capable of measuring whether or not the injection pressure of the entire injection liquid sprayed from the injection nozzle is uniform, To an injection pressure distribution measurement system of an injection nozzle.

Spray nozzles for uniformly injecting liquids, gases, and the like are used in various fields. It is very important to check whether or not the jet is uniformly jetted from such an injection nozzle.

For example, a processing machine such as a milling machine or the like is equipped with cleaning and cleaning equipment having a spray nozzle for spraying a cleaning liquid to remove objects such as residual chips and debris after a processing operation. In addition, in the manufacturing process of semiconductors, displays (LCD, PDP, LED, OLED, etc.), various objects such as metal impurities, organic contaminants, and natural oxide films such as fine particles remaining on the surfaces of the wafer and display glass, It is common to use the above cleaning and cleaning equipment. In addition, spray nozzles are often used for painting steel plates of ships, automobiles, and the like.

The cleaning, cleaning or painting equipment sprays the cleaning liquid or coating liquid at a constant pressure from the spray nozzle to remove the objects. At this time, it is preferable that the spray pressure of the washing liquid sprayed from the spray nozzle or the entire coating liquid is uniformly maintained. This is because if the injection pressure at each of the points of the center of the injection nozzle, the center of the molecular nozzle, and the direction away from the center of the injection nozzle (the edge area of the injection range) is not uniform, The objects can be completely removed, but the objects can not be completely removed at the low injection pressure point, and the painting operation is not uniformly performed at the point where the injection pressure is high and the point where the injection pressure is high. Therefore, in order to completely remove the objects, it is desirable that the injection pressure be maintained uniform regardless of the injection point of the washing liquid, and it is preferable that the injection pressure be uniformly maintained regardless of the injection point of the coating liquid for the preferable painting operation .

For this reason, it is necessary to measure the jetting pressure of the jetting nozzles used in various fields such as washing, cleaning equipment, coating or painting equipment, and development of a system for measuring the distribution of the jetting pressure of the jetting nozzles Required.

As a conventional example of a system for measuring the injection pressure of the injection nozzle, a technique using a load cell is known. The load cell is a sensor capable of measuring pressure with a built-in strain gage or piezoelectric element, and a pressure application portion is protruded from the upper end of the sensor. The injection pressure of the injection nozzle using the load cell was measured by measuring the injection pressure of the injection liquid applied to the pressure application unit when the injection liquid was sprayed from the injection nozzle toward the pressure application unit. However, since the injection pressure distribution measurement of the injection nozzle using such a load cell is limited to one point or one plane, it is difficult to measure the distribution of the injection nozzle liquid by monitoring dozens to hundreds of points in the injection area of the nozzles.

As another example of the prior art system for measuring the injection pressure of the injection nozzle, Korean Patent Application No. 10-2000-0047921 discloses an apparatus and method for measuring the pressure of the injection nozzle. This patent is capable of measuring the jetting pressure distribution of the jetting nozzles, but it has been difficult to measure the pressure distribution as to whether the pressure applied from the entire air and liquid injected from the jetting nozzles is uniform.

To solve these problems, the inventor of the present invention has made it possible to measure whether or not the injection pressure of the entire spray liquid sprayed from the spray nozzles used in various fields is uniform, A pressure measuring plate and a spraying pressure distribution measuring system for the spraying nozzle using the pressure measuring plate have been developed.

The present invention relates to a pressure measurement plate for measuring an injection pressure distribution of an injection nozzle, comprising: a base plate in the form of a plate having a predetermined shape; A pressure distribution measuring sensor mounted on the base plate and measuring a pressure of the spray liquid sprayed from the spray nozzle toward the base plate; And a coating portion covering the pressure distribution measurement sensor to protect the pressure distribution measurement sensor from the injection liquid.

The pressure distribution measuring sensor includes a first electrode set having a plurality of electrodes arranged in parallel at regular intervals; Wherein the second electrode set is arranged on the first electrode set and the arrangement direction of the first electrode set and the second electrode set are arranged orthogonally to each other A second electrode set; And a capacitor of a capacitance type provided at an intersection of the first electrode set and the second electrode set. It is possible to measure the pressure distribution of the spray liquid sprayed from the spray nozzle through the pressure distribution measurement sensor.

According to another aspect of the present invention, there is provided a system for measuring an injection pressure of an injection nozzle, the system comprising: a nozzle mounting portion on which the injection nozzle is mounted; A pressure measurement plate positioned below the injection nozzle for measuring a pressure of the injection liquid sprayed from the injection nozzle; And a pressure measurement information output unit connected to the pressure measurement plate and outputting pressure measurement information measured by the pressure measurement plate. The pressure measuring plate is the same as the pressure measuring plate according to the embodiment of the present invention.

The nozzle mounting portion can be raised and lowered along the axial direction of the nozzle and can be rotated around the axial direction.

The pressure measuring plate may be movable along a direction perpendicular to the axial direction of the nozzle.

1 is an exploded perspective view showing a configuration of a pressure measurement plate according to an embodiment of the present invention.
FIG. 2 is a perspective view showing a state in which the combination of the pressure measurement plates shown in FIG. 1 is completed.
FIG. 3 is a view showing the pressure distribution measurement sensor shown in FIG. 1. FIG.
Figs. 4A and 4B illustrate how pressure is measured through the pressure distribution measurement sensor shown in Fig.
5 is a perspective view illustrating a configuration of a system for measuring an injection pressure distribution of an injection nozzle according to an embodiment of the present invention.
FIG. 6 is a schematic view illustrating a third driving unit of the injection pressure distribution measuring system of the injection nozzle according to the embodiment of the present invention.
FIG. 7 illustrates a data processing unit built in the controller shown in FIG. 5 in a form of a graph showing pressure measurement information.

Hereinafter, a pressure measurement plate according to an embodiment of the present invention and a system for measuring the injection pressure distribution of the injection nozzle using the same will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Pressure measuring plate

The pressure measuring plate according to an embodiment of the present invention may be used in a general processing machine, a semiconductor equipment, or a display equipment, such as a spray nozzle or a vessel for washing, which is used for removing debris or removing debris and impurities present on a wafer, And the like, which is used for measuring the injection pressure of the spray liquid sprayed from the spray nozzle used in the painting operation.

FIG. 1 is an exploded perspective view showing a configuration of a pressure measuring plate according to an embodiment of the present invention, and FIG. 2 is a perspective view showing a state in which a combination of the pressure measuring plates shown in FIG. 1 is completed.

1 and 2, a pressure measurement plate 100 according to an embodiment of the present invention includes a base plate 110; A pressure distribution measurement sensor 120; And a coating unit 130. [

The base plate 110 may be in the form of a plate having a predetermined shape and forms the base of the pressure measurement plate 100. The base plate 110 may have an area corresponding to the ejection range of the ejection nozzle 200 to effectively measure the distribution of the ejection pressure of the ejection liquid ejected from the ejection nozzle 200, It is possible to have an area larger than the range. The shape of the plate is sufficient to accommodate the jetting range of the jetting nozzle 200. For example, the base plate 110 may be in the form of a plate having a shape of circle, square, hexagon, triangle, or the like, and is not particularly limited thereto. The base plate 110 may be a synthetic resin material, for example, an acrylic material, and is not particularly limited thereto.

The pressure distribution measurement sensor 120 is mounted on the base plate 110. For example, the pressure distribution measurement sensor 120 may be mounted on the upper surface of the base plate 110. The pressure distribution measurement sensor 120 includes a first electrode set 10 having a plurality of electrodes arranged in parallel at regular intervals; A second electrode set 20 in which a plurality of electrodes are arranged in parallel at regular intervals; And a capacitance type capacitor 30 provided at the intersection of the first electrode set 10 and the second electrode set 20.

As shown in FIG. 3, the electrode set in which a plurality of electrodes are arranged at regular intervals in parallel is the first electrode set 10, and an electrode set in which another plurality of electrodes are arranged in parallel at regular intervals Electrode set 20 shown in Fig. The second electrode set 20 is arranged on the first electrode set 10 so that the first electrode set 10 and the second electrode set 20 are arranged such that the arrangement direction thereof is orthogonal to each other. Thus, the intersection points 30 are formed, and the capacitors are provided at the intersections, whereby the pressure distribution measurement sensor 120 is manufactured.

The pressure distribution measurement sensor 120 may have a number of intersections depending on the number of the first electrode set and the second electrode set, and a set having four intersections at a minimum of 2x2. It is possible to manufacture a pressure distribution measurement sensor including an appropriate number of capacitors by adjusting the size and number of electrode sets as needed (substrate size, accuracy of sensitivity, etc.).

Such a sensor is also referred to as an array sensor. Capacitors are placed at the overlapping positions of the electrodes, and one row and column are selectively scanned to measure capacitance, that is, pressure and pressure distribution at that position. At this time, the array is scanned at high speed to obtain the maximum sensor response from each element.

It is important that the spray nozzle 200 for cleaning maintains a constant pressure throughout the range in which the spray liquid is sprayed. By using such a pressure distribution measurement sensor 120, it is possible to prevent the capacitor from falling within the area of the pressure distribution measurement sensor 120 The injection pressure of the entire spraying liquid is increased from the center of the injection nozzle 200 to the center of the injection nozzle 200 and to the direction away from the center of the injection nozzle 200 The distribution can be measured.

Measurement of the pressure distribution through this pressure distribution measurement sensor 120 is illustrated in FIGS. 3A and 3B. Figs. 4A and 4B illustrate how pressure is measured through the pressure distribution measurement sensor shown in Fig. 4A and 4B, yellow indicates that the pressure is weakly applied, and red indicates that a pressure higher than yellow is applied. 4A shows a state in which the injection pressure distribution of the injection liquid is not uniform in the entire injection range of the injection nozzle 200 when the injection pressure of the injection liquid injected from the injection nozzle 200 is applied to the pressure distribution measurement sensor 120 . 4B shows a state in which the injection pressure distribution of the injection liquid is uniform in the entire injection range of the injection liquid when the injection pressure of the injection liquid injected from the injection nozzle 200 is applied to the pressure distribution measurement sensor 120 .

The coating portion 130 is a structure for protecting the pressure distribution measurement sensor 120. To this end, the coating portion 130 may be coated over the pressure distribution measurement sensor 120 to cover the pressure distribution measurement sensor 120. The coating portion 130 protects the pressure distribution measuring sensor 120 from the jetted liquid sprayed from the jetting nozzle 200 to prevent the pressure distribution measuring sensor 120 from being damaged. For example, the coating portion 130 may be coated in the form of wrapping only the pressure distribution measurement sensor 120, or alternatively may be coated in the form of wrapping the entire pressure distribution measurement sensor 120 and the base plate 110 . The material of the coating portion 130 may be, for example, a silicon material, and is not particularly limited thereto, and may be any film-like material so that pressure can be applied to the pressure distribution measurement sensor 120.

The pressure measurement plate 100 according to an embodiment of the present invention is placed under the injection nozzle 200 when measuring the pressure of the injection nozzle 200. In this state, Is ejected toward the pressure measurement plate (100). The pressure of the jetted liquid to be jetted is measured by the pressure distribution measurement sensor 120. In this case, since the pressure distribution measuring sensor 120 is located at an equal interval within the area of the pressure distribution measurement sensor 120 as described above, the jetting liquid sprayed from the jetting nozzle 200 is kept at a constant pressure As shown in FIG.

Injection pressure distribution measurement system of injection nozzle

5 is a side view showing a configuration of a system for measuring the injection pressure distribution of an injection nozzle according to an embodiment of the present invention.

Referring to FIG. 5, the injection pressure distribution measurement system of the injection nozzle according to the embodiment of the present invention includes a nozzle mounting part 300 on which the injection nozzle 200 is mounted; A pressure measurement plate 100; And a pressure measurement information output unit 400. Each of these elements can be arranged and mounted on a mounting table 2 provided, for example, in parallel with the height direction of the shelf 1 and the shelf 1.

The injection nozzle 200 injects the injected liquid at a predetermined pressure. For this purpose, a spray liquid composed of air and liquid can be injected through a compressor (not shown) and a pump (not shown), for example.

The spray nozzle 200 is mounted on the nozzle mounting part 300 and the nozzle mounting part 300 can be installed on the mounting base 2. The nozzle mounting part 300 can be mounted on the shelf 1, As shown in FIG. There is no particular limitation on the form in which the injection nozzle 200 is installed in the nozzle mounting portion 300.

The nozzle mounting portion 300 can be raised and lowered along the axial direction of the injection nozzle 200 and can be rotated to the left and right of the shaft with respect to the axis of the injection nozzle 200. For example, a first driving device (not shown) and a second driving device (not shown) may be installed in the nozzle mounting part 300 for raising, lowering and rotating the nozzle mounting part 300. The first driving device may be a driving device for raising and lowering the nozzle mounting part 300 and the second driving device may be a driving device for rotating the nozzle mounting part 300. For example, the first driving device may be a cylinder device installed parallel to the axial direction of the injection nozzle 200 using pneumatic or hydraulic pressure, The second driving device may be a gear and a driving motor installed perpendicular to the axial direction of the injection nozzle 200.

The pressure measurement plate 100 is located below the injection nozzle 200 and measures the pressure of the injection liquid injected from the injection nozzle 200. To this end, the pressure measurement plate 100 is mounted on the shelf 1 and is positioned below the injection nozzle 200 so as to be perpendicular to the axial direction of the injection nozzle 200. The pressure measurement plate 100 includes a base plate 110; A pressure distribution measurement sensor 120; And a coating unit 130. [ The description of the pressure measurement plate 100 has been described in detail in the foregoing, and therefore will not be described.

The pressure measurement plate 100 is configured such that the nozzle mounting portion 300 is configured to be able to move up and down and rotate as described above so that the nozzle mounting portion 300 is moved up and down and rotated to change the position of the injection nozzle 200 The ejection nozzle 200 may be provided so as to be movable along a horizontal direction perpendicular to the axial direction of the injection nozzle 200 so as to be positioned below the ejection direction of the ejection liquid of the injection nozzle 200. A third driving unit (not shown) connected to the pressure measurement plate 100 for moving the pressure measurement plate 100 may be installed in the interior of the shelf 1 or in the vicinity of the shelf 1 As shown in FIG. The shape of the third driving part can be a single movable number, for example, a conveyor belt. Alternatively, the shape of the third driving portion may be a rotary roller 500 disposed on both sides of the injection nozzle 200, as shown in Fig. The rotary roller 500 may be rotated by a motor (not shown). The third driving unit is not limited to the shapes exemplified above.

When the nozzle mounting part 300 is configured to be able to move up and down and rotate and to be able to move the pressure measuring plate 100, the jetting range according to the height of the jetting nozzle 200, The pressure of the spray liquid sprayed from the spray nozzle 200 can be measured corresponding to the spray angle according to the angle at which the spray nozzle 200 is positioned.

The pressure measurement information output unit 400 outputs pressure measurement information measured through the pressure distribution measurement sensor 120 of the pressure measurement plate 100, that is, pressure distribution information. To this end, the pressure measurement information output unit 400 includes, for example, a monitor 420; And a controller (410). 5, the monitor 420 and the controller 410 may be configured in the form of a programmable logic controller (PLC) provided on one side of the shelf 1, (E. G., A PC and a monitor).

The monitor 420 is connected to the controller 410 and may be a conventional LCD or an LED monitor. In this monitor 420, pressure measurement information input to the controller 410 is output in a predetermined manner under the control of the controller 410. [

The controller 410 is connected to the pressure distribution measurement sensor and the monitor 420 and outputs the pressure measurement information inputted from the pressure distribution measurement sensor on the monitor 420 on the monitor 420 in a predetermined manner. Such a controller 410 may include software for outputting pressure measurement information on the monitor 420. For example, the software may be programmed to output different colors depending on the capacitance of each capacitor of the pressure distribution measurement sensor. For example, as shown in FIGS. 4A and 4B, the software displays a point where each capacitor is located in red / yellow according to a degree of pressure applied to a point where each capacitor is located, . ≪ / RTI > At this time, red color can mean high pressure, and yellow color means low pressure.

Meanwhile, the software can monitor not only the pressure distribution of the nozzle but also the distribution area, the pressure center position of the spray liquid, the average value of the pressure, the maximum value, and the minimum value.

The controller 410 may include a data processing unit. The data processing unit may quantify the pressure measurement information input from the pressure distribution measurement sensor to the controller 410, which may be output on the monitor 420. [ The numerical pressure measurement information can be output in the form of a graph, for example. An example of this aspect can be seen in FIG.

In addition, the data processing unit may store the respective pressure measurement values for each sensor cell in real time using EXCEL or the like. Thus, the defective state of the nozzle over time can be grasped in real time.

Meanwhile, the controller 410 may be designed to control the driving units when the first driving unit, the second driving unit, and the third driving unit are included, as described above. When the height and angle of the injection nozzle 200 are changed by the driving of the first and second driving units, the pressure measurement plate 100 is detected by detecting the changed position of the injection nozzle 200, And may be designed to move downward in the direction of injection. In this case, in order to recognize the change position of the injection nozzle 200 in the controller 410, for example, sensors capable of outputting a position information signal may be mounted on the nozzle mounting portion 300 and the pressure measurement plate 100 And may be designed to receive a position information signal output from each of the sensors and recognize a changed position of the injection nozzle 200. [ The manner of recognizing the changed position of the injection nozzle 200 is only an exemplary form, and is not particularly limited thereto.

The system for measuring the injection pressure distribution of the injection nozzle according to an embodiment of the present invention is a system for measuring the injection pressure distribution of the injection nozzle 200 by injecting the injection liquid from the injection nozzle 200 toward the pressure measurement plate 100, And the pressure distribution measurement sensor 120 measures the distribution of the injection pressure with respect to the entire injection liquid when the injection pressure of the injection liquid is applied to the pressure measurement plate 100.

The measurement information of the injection pressure measured by the pressure distribution measurement sensor 120 is input to the controller 410. The controller 410 controls the injection pressure or the injection pressure in the form of an image as shown in FIGS. 4A and 4B, To the monitor 420 or to output the measurement information of the injection pressure on the monitor 420 in the form of a graph as shown in FIG. Alternatively, the image and the graph may be output simultaneously.

These processes may be performed while changing the angle and height at which the injection nozzle 200 is positioned. In this case, even when changing the angle and height at which the injection nozzle 200 is positioned, the injection amount of the injection liquid And it is also possible to measure the magnitude of the jetting pressure depending on the position of each jetting nozzle 200. In this case, As a result, not only is it possible to provide a measurement result of the injection pressure distribution of the injection liquid jetted from the more accurate injection nozzle 200, but also to the injection nozzle (not shown) based on the size of the injection pressure depending on the position of the injection nozzle 200 200 may be provided with data that can set the position of the spray nozzle 200 for spraying the spray liquid with the spray pressure applicable to each of the wash space or wash materials.

Through this measurement process, the system administrator can confirm whether or not the injection pressure of the entire injection liquid sprayed from the injection nozzle 200 is uniform. For example, if the injection pressure is not uniform, the injection nozzle 200 The supply pressure of the compressor and the pump for supplying the pressurized gas may be adjusted, and then the injection pressure distribution measuring process may be repeated. If the injection pressure is not uniform even after the repetition of the injection pressure measurement process, for example, it is judged that the state of manufacture of the injection nozzle 200 is defective and discarded, and the new injection nozzle 200 can be replaced .

The injection pressure distribution measuring system of the present invention can be used to measure the injection pressure of the injection nozzle 200 through the pressure distribution measurement sensor 120, which is an array sensor in which the capacitors are arranged at regular intervals. It is possible to effectively measure whether or not the injection liquid injected from the injection nozzle 200 is injected at a constant pressure within the injection range.

The injection pressure distribution measurement system of the injection nozzle according to an embodiment of the present invention can be used in various fields.

For example, in the manufacturing process of semiconductor, display (LCD, LED, PDP, OLED, etc.), various processes for removing various objects such as fine particles remaining on the surface of wafers and display glass such as metal impurities, organic contaminants, Can be used to measure the jetting pressure distribution of the jetting nozzles of the cleaning apparatus.

As another example, it can be used to measure the spray pressure distribution of a spray nozzle for coating or painting operations.

The description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features presented herein.

Claims (7)

A pressure measurement plate for measuring an injection pressure distribution of an injection nozzle,
A base plate in the form of a plate having a predetermined shape;
A pressure distribution measuring sensor mounted on the base plate and measuring a pressure of the spray liquid sprayed from the spray nozzle toward the base plate; And
And a coating portion covering the pressure distribution measurement sensor to protect the pressure distribution measurement sensor from the injection liquid.
Pressure gauge plate. The method according to claim 1,
The pressure distribution measuring sensor includes:
A first electrode set in which a plurality of electrodes are arranged in parallel at regular intervals;
Wherein the second electrode set is arranged on the first electrode set and the arrangement direction of the first electrode set and the second electrode set are arranged orthogonally to each other A second electrode set; And
And a capacitance type capacitor provided at an intersection of the first electrode set and the second electrode set.
Pressure gauge plate. A system for measuring an injection pressure of an injection nozzle,
A nozzle mounting portion on which the injection nozzle is mounted;
A pressure measurement plate positioned below the injection nozzle for measuring a pressure of the injection liquid sprayed from the injection nozzle; And
And a pressure measurement information output unit connected to the pressure measurement plate and outputting pressure measurement information measured by the pressure measurement plate.
Measurement system of injection pressure distribution of injection nozzle. The method of claim 3,
The pressure measuring plate may include:
A base plate in the form of a plate having a predetermined shape;
A pressure distribution measuring sensor mounted on the base plate and measuring a pressure of the spray liquid sprayed from the spray nozzle toward the base plate; And
And a coating portion covering the pressure distribution measurement sensor to protect the pressure distribution measurement sensor from the injection liquid.
Measurement system of injection pressure distribution of injection nozzle. 5. The method of claim 4,
The pressure distribution measuring sensor includes:
A first electrode set in which a plurality of electrodes are arranged in parallel at regular intervals;
Wherein the second electrode set is arranged on the first electrode set and the arrangement direction of the first electrode set and the second electrode set are arranged orthogonally to each other A second electrode set; And
And a capacitance type capacitor provided at an intersection of the first electrode set and the second electrode set.
Measurement system of injection pressure distribution of injection nozzle. The method of claim 3,
Wherein the nozzle mounting portion is capable of being raised and lowered along an axial direction of the nozzle and capable of rotating around the axial direction.
Measurement system of injection pressure distribution of injection nozzle. The method of claim 3,
Wherein the pressure measuring plate is movable along a direction perpendicular to the axial direction of the nozzle.
Measurement system of injection pressure distribution of injection nozzle.

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