KR20140121662A - Non-contact height gauge - Google Patents

Non-contact height gauge Download PDF

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Publication number
KR20140121662A
KR20140121662A KR20130038172A KR20130038172A KR20140121662A KR 20140121662 A KR20140121662 A KR 20140121662A KR 20130038172 A KR20130038172 A KR 20130038172A KR 20130038172 A KR20130038172 A KR 20130038172A KR 20140121662 A KR20140121662 A KR 20140121662A
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KR
South Korea
Prior art keywords
measurement
laser displacement
displacement gauge
height
linear scale
Prior art date
Application number
KR20130038172A
Other languages
Korean (ko)
Inventor
김원홍
Original Assignee
김원홍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김원홍 filed Critical 김원홍
Priority to KR20130038172A priority Critical patent/KR20140121662A/en
Publication of KR20140121662A publication Critical patent/KR20140121662A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

The present invention relates to a non-contact height measuring apparatus, and more particularly, to a non-contact height measuring apparatus which includes a linear scale sensor 103 coupled with a driving axis of a vertical axis driving actuator 106, And the vertical axis actuator 106 is configured to automatically follow the measurement range 210 of the laser displacement gauge 101 in conjunction with the output data (measurement data) value of the laser displacement gauge 101 .
When the height of the object is measured using the present invention, the movement position of the laser displacement gauge 101 is automatically adjusted according to the height of the measurement object 110, and the position of the laser displacement gauge 101 is measured by taking the data of the interlocked linear scale sensor 103 .
The laser displacement gage 101 performs the displacement value measurement at a position shifted in accordance with the height of the measurement object 110 and outputs the value to the current position value of the laser displacement gauge 101, that is, the current position data of the linear scale sensor 103 The height of the object exceeding the measurement range 210 of the laser displacement gauge can be measured in a noncontact manner.
The present invention is not limited to the measurement range 210 of the laser displacement gauge by combining the laser displacement gauge 101 and the linear scale sensor 103 in combination and deriving the measurement results by summing the respective measurement value data as described above Non-contact height measuring instrument.

Description

{Non-contact height gauge}

The present invention relates to a non-contact height measuring instrument, and more particularly, to a non-contact height measuring instrument in which a laser displacement meter and a linear scale sensor are combined to extend the measurement range limit of a laser displacement meter.

A laser displacement gauge used as a means for measuring the height of an object in a noncontact manner has been commercialized as a product capable of highly accurate measurement of several tens of micrometers to 1 micrometers or less.

Since the height measurement using the laser displacement meter is made by non-contact, the contact type measuring instrument such as fragile parts, elastic parts, high temperature parts, parts to be kept clean, flexible parts that can cause dimensional fluctuation due to measuring pressure, It is possible to accurately and quickly measure a measurement object which is difficult to measure.

The height measurement using a laser displacement meter has many advantages, but the measurement range is limited.

2, the laser displacement gauge generally measures the distance by the triangulation method, and measures the distance between the measurement upper limit point 207 and the measurement lower limit point 207 about the measurement reference point 208, which is a distance from the laser light source, (209), and the measurement using the laser displacement meter is possible only within the measurement range (210).

As described above, the laser displacement gauge has various advantages in the non-contact measurement of objects, but due to the limited measurement range, it is not suitable for measuring objects of various sizes exceeding the range.

An object of the present invention is to solve the problem of the limitation of the measurement range of the laser displacement meter described above and to realize a noncontact height measuring apparatus which is not limited by the measurement range while maintaining the advantage of noncontact measurement using a laser displacement meter.

In order to achieve the above object, the linear scale sensor 103 is coupled to the parallel surface of the vertical drive actuator 106 driven by the servo motor 104 for vertical axis drive to output the current position data of the linear scale sensor 103 So that the current moving position of the displacement gauge 101 can be known.

The measurement section is controlled by a servomotor (104) for vertical axis driving and is configured to be capable of both automatic follow-up and manual control.

In the measurement section automatic tracking mode, a feedback control system is formed by referring to the current measurement data output value of the laser displacement gauge 101 so that the servo motor 104 for vertical axis drive is driven, and the laser displacement gauge 101 and the measurement object 110 Is automatically followed by the measurement range 210 of FIG.

The measurer adjusts the position of the laser displacement gauge 101 in the automatic tracking mode or the manual mode according to the height of the measurement object 110 and performs measurement to measure the measured value of the laser displacement gauge 101 and the current position of the linear scale sensor 103 And the measurement result value is calculated.

By applying the present invention, noncontact measurement without being limited by the measurement range of the laser displacement meter can be realized, so that noncontact height measurement can be realized in object measurement of various sizes.

Because height measurement is non-contact, it provides quick and convenient measurement, which is the advantage of non-contact measurement. It has no measurement pressure, and is fragile and elastic parts, high temperature parts, parts that need to maintain cleanliness, , It is possible to measure an object which is difficult to measure with a contact type measuring device such as a flexible part, a gel or a liquid.

BRIEF DESCRIPTION OF THE DRAWINGS FIG.
2 is a view showing a measurement range of a laser displacement meter
3 is a block diagram of a control block for implementing the present invention.

1, a vertical axis driving actuator 106 is coupled to the rear center of the base plate 111 and a laser displacement gauge 101 (see FIG. 1) ).

The vertical axis drive actuator 106 is configured to measure a current movement position of the laser displacement gauge 101 mounted on the vertical axis drive plate 107 by being coupled with the linear scale sensor 103 in parallel with the drive shaft.

The vertical axis drive actuator 106 is position-controlled by the vertical axis drive servomotor 104 and is configured to automatically follow the measurement range 210 of FIG. 2 in conjunction with the output data (measurement data) of the laser displacement gauge 101 have.

1, when a user turns on the power to drive the contactless height measuring device of the present invention, the vertical axis driving actuator 106 causes the laser displacement gauge 101 to fall within the measurement range 210 The servo motor 104 for vertical axis driving is driven.

On the other hand, when there is no object to be measured on the other hand 108, the position of the laser displacement gauge 101 is shifted so that the measurement range 210 of FIG.

When the movement is completed, measurement is performed, and the measured value of the laser displacement gauge 101 and the measured value of the linear scale sensor 103 are added together to output a measured value.

At this time, if you want to set the measurement data of the currently measured normal (108) as the measurement origin, you can set the current measurement result value to zero (measurement origin) by pressing the zero point button.

In the auto-tracking mode, the laser displacement gage 101 is spaced apart at regular intervals 108 and the measurer places the measurement object on the positive side 108 and pushes the measurement object between the positive side 108 and the laser displacement gauge 101 The vertical axis drive actuator 106 moves the vertical axis drive servomotor 104 vertically upward so that the laser displacement gauge 101 enters the measurement range 210.

When the movement is completed, the measurement is performed, and the measurement result value obtained by adding the measurement data of the laser displacement gauge 101 and the measurement data of the linear scale 103 is displayed on the touch screen monitor 105, If a PC is connected, the measurement data is transmitted to the PC.

When measuring manually, the measurer can place the measurement object on the positive side 108 and manipulate the manual movement button of the touch screen monitor 105 so that the laser displacement gauge 101 can come into the measurement range 210.

3, the current value measurement data of the laser displacement gauge 101 is supplied to a laser displacement gauge signal processing unit 301, a measurement region follow-up control unit 302, a servo motor driving unit 304, And a servo motor 104 interlocked with the laser displacement gauge 101 to form a feedback control system.

The measurement section tracking control section 302 refers to the current output value of the laser displacement gauge 101 and outputs the position control output to the servo motor driving section 304 so that the laser displacement gauge 101 is located within the measurement range 210 .

The position data of the linear scale sensor 103 is provided in various data forms such as a pulse train or a serial communication method. In the implementation of the present invention, the position data is converted into a digital signal capable of arithmetic processing and input to the measured value arithmetic processing unit 307.

The measurement data of the laser displacement gauge 101 is also supplied in various signals such as voltage, current value, and data of serial communication system. The measured data is converted into a digital signal that can be processed by the laser displacement gauge signal processing unit 301, .

The measurement value calculation processing section 307 calculates the position data of the linear scale sensor 103, the measurement data of the laser displacement gauge 101, and the zero point (measurement origin point) data and outputs the resultant value.

101: Laser displacement meter
102: laser displacement meter support bar
103: Linear scale sensor
103a: Linear scale sensor head
104: Servo motor for vertical axis drive
105: Touch screen monitor
106: vertical axis driving actuator
107: vertical axis drive plate
However,
109: USB port for PC connection
110: object to be measured
201: semiconductor laser driving circuit
202: optical sensor signal processing circuit
203: semiconductor laser diode
204: Projection lens
205: Optical sensor
206: receiving lens
207: Measurement upper limit point
208: measurement reference point
209: Lower limit of measurement
210: Measuring range
301: laser displacement gauge signal processor
302: measurement interval tracking control unit
303: Manual input of measurement section
304: Servo motor drive unit
305: Linear scale sensor signal processor
306: Zero setting
307: Measurement value calculation processor
308: Measured value display

Claims (3)

In the non-contact height measurement using the laser displacement gauge 101, the laser displacement gauge 101 and the linear scale sensor 103 are combined and interlocked, and the respective measurement value data are summed to derive the measurement result, A method of measuring a contactless height without limitation. The vertical displacement drive actuator 106 is coupled to the vertical plane of the base plate 111 and the laser displacement gage 101 is mounted on one side of the vertical axis drive plate 107 And a linear scale sensor (103) is coupled to a parallel surface of the vertical axis driving actuator (106) so that the current position of the laser displacement gauge (101) can be known. Height meter. In the first aspect, the measurement interval follow-up control unit 302 compares the within-range agreement using the displacement value output data of the laser displacement gauge 101 and feedback control of the servo motor drive unit 304 to automatically adjust the height of the measurement object Following control circuit.




KR20130038172A 2013-04-08 2013-04-08 Non-contact height gauge KR20140121662A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR20130038172A KR20140121662A (en) 2013-04-08 2013-04-08 Non-contact height gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20130038172A KR20140121662A (en) 2013-04-08 2013-04-08 Non-contact height gauge

Publications (1)

Publication Number Publication Date
KR20140121662A true KR20140121662A (en) 2014-10-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR20130038172A KR20140121662A (en) 2013-04-08 2013-04-08 Non-contact height gauge

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KR (1) KR20140121662A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111721213A (en) * 2020-06-30 2020-09-29 苏州天准科技股份有限公司 Height difference detection device and size detection equipment
CN113091654A (en) * 2021-04-20 2021-07-09 郑州机械研究所有限公司 Method for measuring appearance axis of special-shaped aircraft

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111721213A (en) * 2020-06-30 2020-09-29 苏州天准科技股份有限公司 Height difference detection device and size detection equipment
CN113091654A (en) * 2021-04-20 2021-07-09 郑州机械研究所有限公司 Method for measuring appearance axis of special-shaped aircraft

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