KR20140119405A - Push-pull assay and gate valve having the push-pull assay - Google Patents

Abstract

Disclosed are a push-pull assembly performing a stable push-pull motion, an opening valve including the same, and a gate valve including the same. The push-pull assembly includes a fixed body part, a moving body part, a moving shaft part, a bellows part, and multiple guide parts. The fixed body part has a side combined with the valve body, a body accepting groove formed on a side, and a body through hole connected to the body accepting groove. The moving body part is placed in the body accepting groove to perform a push-pull motion along an opening and closing direction and has multiple guide accepting grooves on a side facing the fixed body part. The moving shaft part is placed in the body through hole while having a shape elongated in the opening and closing direction and moves a ceiling plate following the movement of the moving body part by being combined with the ceiling plate. The bellows part is placed in the body through hole to cover the moving shaft part, is combined with the fixed body part and the moving body part, and is contracted and expanded depending on the movement of the moving body part. The guide parts are combined with the fixed body part to be matched with each of the guide accepting grooves and guide the moving body part to move in the opening and closing direction. Thus, as the guide parts guide the movement of the moving body part (320), the push-pull motion is stably performed.

Description

PUSH-PULL ASSEMBLY AND GATE VALVE HAVING THE PUSH-PULL ASSEMBLY

The present invention relates to a push-pull assembly and a gate valve having the same, and more particularly, to a push-pull assembly capable of opening and closing an opening of a process chamber in which a substrate enters and exits, and a gate valve having the same .

Generally, most of the processes for manufacturing a liquid crystal display (LCD) substrate or a semiconductor device proceed in a vacuum state. Therefore, most of the equipment for performing the process for manufacturing the LCD substrate or the semiconductor device is a vacuum equipment, and a vacuum pump is used for maintaining vacuum inside the vacuum equipment. A gate valve is provided to isolate the vacuum equipment from the outside of the vacuum equipment or other vacuum equipment.

Such a gate valve generally includes a housing, an opening / closing valve, and a lift driving module. The housing has a first opening facing the gate formed in the vacuum equipment and a second opening corresponding to the first opening. The open / close valve may open / close at least one of the first and second openings. Wherein the lift driving module is disposed outside the housing and a part of the lift driving module is coupled to the opening / closing valve through a hole formed in the lower surface of the housing, and the opening / closing valve is interposed between the first and second openings, In the vertical direction.

The on-off valve also includes a valve body, a sealing plate, and a plurality of push-pull assemblies. The valve body may be disposed in the housing and coupled with the elevation drive module to be movable in the up and down direction. The sealing plate is disposed to correspond to at least one of the first and second openings in the housing. The push-pull assemblies are disposed between the sealing plate and the valve body to push-pull the sealing plate.

Meanwhile, each of the push-pull assemblies may include a fixed body portion, a movable body portion, and a movable shaft portion. The fixed body portion is fixedly coupled to the valve body, and a body receiving groove is formed on the one side surface. The moving body is disposed in the body receiving groove to perform a push-pull motion along an opening / closing moving direction. The moving shaft portion is disposed to penetrate the fixed body portion, one end thereof is engaged with the sealing plate, the other end is coupled with the moving body portion, and the sealing plate is moved according to the movement of the moving body portion.

However, when the movable body part moves along the opening / closing movement direction, it can move shaking due to various factors such as an external impact, and as a result, the moving shaft part can also be shaken together. Such shaking of the moving shaft can not only act as an obstacle to the stable push-pull movement of the sealing plate but also generate particles due to friction.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made to solve the above problems, and it is an object of the present invention to provide a push-pull assembly capable of performing a stable push-pull motion.

Another object of the present invention is to provide a gate valve having the push-pull assembly.

The push-pull assembly according to an embodiment of the present invention is a device that is coupled to a valve body and can push-pull the seal plate along the opening and closing movement direction. The push-pull assembly includes a fixed body portion, A shaft portion, a bellows portion, and a plurality of guide portions.

One side of the fixed body is coupled to the valve body, a body receiving groove is formed on the one side surface, and a body through hole is formed to be connected to the body receiving groove. The moving body portion is disposed in the body receiving groove to perform a push-pull movement along the opening and closing moving direction, and a plurality of guide receiving grooves are formed on a surface facing the fixed body portion. The moving shaft portion is disposed in the body through-hole in a shape elongated along the opening / closing movement direction, and is engaged with the sealing plate to move the sealing plate in accordance with the movement of the moving body portion. The bellows portion is disposed in the body through-hole so as to surround the moving shaft portion, and is engaged with the fixed body portion and the moving body portion, respectively, and contracted and expanded according to the motion of the moving body portion. The guide portions are engaged with the fixed body portion so as to correspond to the guide receiving grooves, respectively, and guide the movable body portion to move along the opening and closing movement direction.

The push-pull assembly may further include a restoring force providing unit that provides restoring force to the moving body so that the moving body portion performing the pushing motion along the opening and closing moving direction performs a pulling motion.

The restoring force providing unit may include a plurality of guide springs that are disposed between the fixed body and the movable body to enclose the guide units, respectively, and provide restoring force to the movable body.

Alternatively, the restoring force providing unit may include a shaft spring that is disposed between the fixed body and the movable body to enclose the bellows, and provides a restoring force to the movable body.

The moving body may perform the pushing motion by a pneumatic pressure applied through the inner injection hole of the valve body. Also, the moving body may perform the pulling motion by the restoring force providing portion while the pneumatic pressure is discharged through the inner discharge hole of the valve body. At this time, the side wall of the fixed body formed by the body receiving groove may be formed with a side wall exhaust hole connected to the internal discharge hole to discharge the air pressure to the internal discharge hole.

The guide portions may be arranged concentrically around the moving shaft portion and spaced apart from each other by a predetermined distance. The number of the guide portions may be four or more. At this time, the body receiving groove may have a cylindrical shape having a height of the opening and closing movement, and the moving body may have a shape corresponding to the body receiving groove.

Each of the guide portions may include a guide pin and a guide friction preventing portion. The guide pin is fixedly coupled to the fixed body part, and at least a part of the guide pin is inserted into the guide receiving groove to guide the movement of the movable body part. The guide friction preventing portion is disposed to surround one end of the guide pin so as to reduce a frictional force between the guide pin and the guide receiving groove.

The push-pull assembly may further include a plate coupling part disposed between the sealing plate and the moving shaft part and coupling the sealing plate to the moving shaft part.

The bellows portion may include a contraction expansion portion, an upper coupling portion, and a lower coupling portion. The shrinking / expanding portion is disposed in the body through hole so as to surround the moving shaft portion, and is contracted and expanded according to the movement of the moving body portion. The upper joint part is connected to one end of the shrinking and expanding part and is engaged with the fixed body part. And the lower end engaging portion is connected to the other end portion of the contraction expanding portion facing the one end portion and is engaged with the moving body portion.

The shaft coupling screw for coupling the plate coupling portion to the moving shaft portion may be coupled with the moving body portion through the moving shaft portion, and the moving shaft portion may be coupled to the moving body portion. At this time, when the movable shaft portion is engaged with the movable body portion by the shaft coupling screw, at least a part of the lower end engagement portion can be pressed and fixed to the movable body portion.

A gate valve according to an embodiment of the present invention includes a housing and an opening / closing valve. The housing has at least one opening. Wherein the opening / closing valve includes a valve body disposed in the housing, a sealing plate corresponding to an opening of the housing, and at least one push-pull member capable of push- Assembly.

The push-pull assembly includes a fixed body portion, a movable body portion, a moving shaft portion, a bellows portion, and a plurality of guide portions. One side of the fixed body is coupled to the valve body, a body receiving groove is formed on the one side surface, and a body through hole is formed to be connected to the body receiving groove. The moving body portion is disposed in the body receiving groove to perform a push-pull movement along the opening and closing moving direction, and a plurality of guide receiving grooves are formed on a surface facing the fixed body portion. The moving shaft portion is disposed in the body through-hole in a shape elongated along the opening / closing movement direction, and is engaged with the sealing plate to move the sealing plate in accordance with the movement of the moving body portion. The bellows portion is disposed in the body through-hole so as to surround the moving shaft portion, and is engaged with the fixed body portion and the moving body portion, respectively, and contracted and expanded according to the motion of the moving body portion. The guide portions are engaged with the fixed body portion so as to correspond to the guide receiving grooves, respectively, and guide the movable body portion to move along the opening and closing movement direction.

According to the push-pull assembly and the gate valve having the push-pull assembly, the guide portions are coupled with the fixed body portion so as to correspond to the guide receiving grooves of the movable body portion, and by guiding the movement of the movable body portion, It is possible to suppress shaking due to various factors such as an external impact when moving along the moving direction. Accordingly, the shaking of the moving shaft portion moved together by the moving body portion is suppressed, so that the sealing plate can stably perform the push-pull motion, and the noise or particles due to friction can be reduced.

Further, since the guide springs arranged to respectively surround the guide portions provide a restoring force for the pulling motion to the moving body portion that has performed the pushing motion, the moving body portion performs the full motion stably .

1 is a perspective view showing a gate valve according to a first embodiment of the present invention.
Fig. 2 is an exploded perspective view showing the gate valve of Fig. 1 in an exploded state.
FIG. 3 is a perspective view showing only the gate valve of FIG. 1 and an open / close valve and a pneumatic transfer module.
4 is a front view of the opening and closing valve and the air pressure transfer module of FIG. 3 viewed from the sealing plate side.
5 is a sectional view taken along the line A-A 'of the open / close valve and the pneumatic pressure transmission module of Fig.
6 is a sectional view taken along the line B-B 'of the open / close valve and the air pressure transfer module of FIG.
7 is a cross-sectional view of the open / close valve and the pneumatic conveyance module of Fig. 4 taken along the line C-C '.
8 is a cross-sectional view showing a state in which air is injected and a sealing plate is moved in FIG.
Fig. 9 is a cross-sectional view showing a part of the pneumatic injection unit of the pneumatic conveyance module of Fig. 3;
10 is a perspective view showing a state in which a part of the rotation shaft housing part is removed from the gate valve of FIG.
Fig. 11 is an enlarged perspective view of part D in Fig. 10; Fig.
FIG. 12 is a perspective view showing a state in which the first side plate is separated from the gate valve of FIG. 1; FIG.
13 is an enlarged perspective view of part E in Fig.
14 is a cross-sectional view illustrating the sequence in which the gate valve of FIG. 1 is operated.
15 is a front view of the gate valve according to the second embodiment of the present invention when viewed from the sealing plate side.
16 is a sectional view taken along the line F-F 'of the open / close valve and the air pressure transfer module of Fig. 15;
FIG. 17 is a cross-sectional view of the open / close valve and the air pressure transfer module of FIG. 15 taken along line G-G '.
FIG. 18 is a cross-sectional view of the open / close valve and the air pressure transfer module of FIG. 15 taken along line H-H '.
19 is a sectional view showing a state in which air is injected and a sealing plate is moved in FIG.

The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text.

It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprising" or "having ", and the like, are intended to specify the presence of stated features, integers, steps, operations, elements, parts, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, parts, or combinations thereof.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Reference will now be made in detail to the preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings.

≪ Example 1 >

1 is an exploded perspective view of the gate valve shown in FIG. 1, and FIG. 3 is an exploded perspective view of the gate valve according to the first embodiment of the present invention, Only a transmission module is shown in a perspective view.

1 to 3, the gate valve according to the present embodiment may include a housing 100, an on-off valve, a pneumatic transfer module 400, and a rotation drive module 500. At this time, the on-off valve may include a valve body 200, a sealing plate 300a, and a plurality of push-pull assemblies 300.

The housing 100 provides an internal space for accommodating the open / close valve and the pneumatic conveyance module 400, and may be disposed adjacent to any vacuum device or disposed between two vacuum devices. The housing 100 has a front opening 112 facing the gate of the vacuum apparatus and a rear opening 122 formed at a position corresponding to the front opening 112. At this time, the front and rear openings 112 and 122 are formed at positions corresponding to each other according to the substrate moving direction I1, and a substrate or an element moves between the front and rear openings 112 and 122 A substrate moving path is formed.

For example, the housing 100 may have a rectangular parallelepiped shape formed along the first, second, and third directions D1, D2, and D3 perpendicular to each other, and the rectangular parallelepiped shape may be formed in the first direction (D1).

Specifically, the housing 100 includes a front plate 110 having the front opening 112 formed therein, a rear plate 120 disposed at a position corresponding to the front plate 110 and having the rear opening 122 formed therein, A first side plate 130 and second side plates 130 and 140 for connecting the front plate 110 and the left and right portions of the rear plate 120, An upper side plate 150 and a lower side plate 160 that connect upper and lower sides of the main body 120 to each other.

The upper and lower side plates 150 and 160 are disposed to face each other in the first direction D1 and the first and second side plates 130 and 140 are disposed in the first direction D1, The front plate 110 and the rear plate 120 may be disposed to face each other along the second direction D2. The front plate 110 and the rear plate 120 may be disposed to face each other along the third direction D3. In addition, the substrate moving direction I1 may be parallel to the third direction D3.

FIG. 4 is a front view of the opening and closing valve and the air pressure transfer module of FIG. 3 viewed from the sealing plate side, FIG. 5 is a sectional view taken along the line A-A ' Sectional view taken along line B-B 'of the open / close valve and the pneumatic transfer module of Fig.

2 to 6, the valve body 200 may be disposed in the housing 100 and may have a shape elongated along the first direction D1 corresponding to the housing 100 . Specifically, for example, the valve body 200 includes a front portion 210, a rear portion 220, a first side portion 230, a second side portion 240, an upper surface portion 250, and a lower surface portion 260 .

The front portion 210 corresponds to the front opening 112 and an assembly receiving groove 212 for receiving the push-pull assemblies 300 is formed. The rear portion 220 is opposed to the front portion 210 and corresponds to the rear opening 122. The rear portion 220 includes a substrate passage groove for opening the substrate moving passage formed between the front and rear openings 112, (222) may be formed. At this time, a substrate facing surface 222a is formed on the bottom of the substrate passing groove 222.

The first side surface portion 230 corresponds to the first side surface plate 130 and the second side surface portion 240 corresponds to the first side surface portion 230 and corresponds to the second side surface plate 140.

The upper surface portion 250 is disposed to face the upper surface plate 150 and the lower surface portion 260 is disposed to face the upper surface portion 250 and to face the lower surface plate 160.

The valve body 200 is provided with a plurality of internal injection holes 212 for connecting the first side surface portion 230 and the assembly receiving groove 212 to inject air into the assembly receiving groove 212, And a plurality of internal discharge holes 234 for connecting the first side surface portion 230 and the assembly receiving recess 212 and discharging the air pressure from the assembly receiving recess 212 may be formed.

The inner injection holes 232 may be spaced apart from each other along the first direction D1 so that the inner injection holes 234 are spaced apart from the inner injection holes 232 And may be spaced apart along the direction D1.

In the present embodiment, a plurality of pneumatic pressure receiving grooves 212a may be formed on the bottom of the assembly receiving groove 212 formed in the front portion 210 to form a space for pneumatic injection. The pneumatic pressure receiving grooves 212a may be spaced apart from each other along the first direction D1 to correspond to the internal injection holes 232. [ Therefore, the inner injection holes 232 can connect the first side surface portion 230 and the pneumatic pressure receiving grooves 212a to inject pneumatic pressure into the respective pneumatic pressure receiving grooves 212a.

Meanwhile, the valve body 200 may be rotated by the rotation driving module 500 to be described later. At this time, the rotation axis direction of the valve body 200 may be parallel to the first direction D1.

FIG. 7 is a cross-sectional view of the open / close valve and the air pressure transfer module of FIG. 4 taken along the line C-C ', and FIG. 8 is a sectional view of the state where the air is injected and the sealing plate is moved.

3 to 8, the sealing plate 300a is disposed on the front portion 210 of the valve body 200 so as to correspond to the front opening 112, The front opening 112 has a larger area than the front opening 112 and is formed in a corresponding shape. A sealing member such as an O-ring may be attached to the sealing plate 300a to improve sealing with the front plate 110 when the front opening 112 is closed.

The push-pull assemblies 300 are disposed and fixed in the assembly receiving recess 212 of the front portion 210. The push-pull assemblies 300 move the sealing plate 300a along the opening / closing movement direction I2 by the air pressure provided from the pneumatic pressure transmitting module 400 to be described later, Can open / close the front opening 112 by movement in the opening / closing movement direction I2. At this time, the opening / closing movement direction I2 may be parallel to the third direction D3.

For example, each of the push-pull assemblies 300 includes a fixed body 310, a moving body 320, a moving shaft 330, a bellows portion 340, a plate engaging portion 350 ), A plurality of guide portions 360, and a restoring force providing portion 370.

One side of the fixed body 310 is fixedly coupled to the valve body 200. Specifically, the fixed body portion 310 is disposed in the assembly receiving groove 212, and one side of the fixed body portion 310 is engaged with and fixed to the bottom surface of the assembly receiving groove 212. At this time, at least one coupling protrusion 212b is inserted between one side of the fixed body part 310 and the bottom surface of the assembly receiving groove 212 to improve the coupling force.

A body receiving groove 312 for receiving the moving body 320 is formed on one side of the fixed body 310 and a body through hole 314 is formed to be connected to the body receiving groove 312. [ Is formed to correspond to the sealing plate 300a.

The moving body 320 may be disposed in the body receiving groove 312 to perform a push-pull motion along the opening / closing moving direction I2. Specifically, the moving body 320 may perform a pushing motion through the pneumatic pressure injected into the pneumatic pressure receiving groove 212a through the inner injection hole 232 of the valve body 200. The pneumatic pressure injected through the pneumatic pressure receiving groove 212a of the moving body 320 is discharged through the internal discharge hole 234 of the valve body 200 and is supplied to the restoring force providing unit 370, To perform a pull motion. The side wall 316 of the fixed body part 310 formed by the body receiving groove 312 is connected to the internal discharge hole 234 to discharge the pneumatic pressure to the internal discharge hole 234, A hole 318 may be formed.

A plurality of guide receiving grooves 326 for accommodating the guide portions 360 to be described later are formed on one surface of the moving body portion 320 facing the fixed body portion 310 .

The body receiving groove 312 of the fixed body 310 may have a cylindrical shape with the opening and closing movement direction I2 as an elevation and the moving body 320 may include a body receiving groove 312, As shown in Fig.

At least one body friction preventing portion 328 for reducing frictional force with the side wall 316 of the fixed body portion 310 is formed on the outer side surface of the moving body portion 320. For example, Can be disposed.

The moving shaft portion 323 protrudes from the moving body portion 322 and passes through the shaft through hole of the fixed body portion 321 and is coupled to the sealing plate 300a. At this time, the moving shaft portion 323 is preferably protruded from the center of the moving body portion 322.

The moving shaft 330 is disposed in the body through-hole 312 in a shape elongated along the opening / closing movement direction I2. The upper end of the moving shaft 330 is coupled to the sealing plate 300a and the lower end of the moving shaft 330 is coupled to the moving body 320. The lower end of the moving shaft 330 is coupled to the moving body 320, Thereby moving the sealing plate 300a.

For example, the moving shaft portion 330 may be disposed at the center of the moving body portion 320 and coupled thereto. A shaft protrusion 322 for coupling with the moving shaft 330 may be formed on one surface of the moving body 320 and a shaft protrusion 322 may be formed on a lower surface of the moving shaft 330. [ A protrusion coupling groove 332 may be formed.

The bellows portion 325 is disposed to surround the outer periphery of the moving shaft portion 232 and is capable of shrinking and expanding in the opening and closing moving direction I2 and the bellows portion 325 is formed in the accommodating space 321a and the fixed body portion 321 ) To block the flow of air. At this time, the bellows portion 325 may be disposed on the inner side of the spring so as to be wrapped around the spring.

The bellows portion 340 is disposed in the body through hole 314 so as to surround the moving shaft portion 330 and is coupled to the fixed body portion 310 and the moving body portion 320, And contracts and expands according to the motion of the body portion 320. At this time, the bellows part 340 may seal the space between the receiving space of the body receiving groove 312 and the outside of the fixed body part 310 to block the flow of air.

The plate engaging portion 350 is disposed between the sealing plate 300a and the moving shaft 330 to couple the sealing plate 300a to the moving shaft 330. More specifically, the plate engaging portion 350 is screwed to the upper end of the moving shaft 330, and the sealing plate 300a is secondarily screwed to the plate engaging portion 350 have.

The guide portions 360 are engaged with the fixed body portion 310 so as to correspond to the guide receiving grooves 326 and the guide bodies 360 are engaged with the guide bodies 326 so that the movable body portion 320 is moved along the opening / do. At this time, the guide portions 360 may be arranged concentrically around the moving shaft 330 and spaced apart from each other by a predetermined distance. For example, four or more guide portions 360 may be arranged at regular intervals in the form of concentric circles.

Each of the guide portions 360 may include a guide pin 362 and a guide friction preventing portion 364. The guide pin 362 has a shape elongated along the opening and closing movement direction I2 and has an upper end inserted and fixed to the fixed body 310 and at least a part of a lower end opposite to the upper end is fixed to the fixed body 310, And is inserted into the guide receiving groove 326 to guide the movement of the movable body 320. The guide friction preventing portion 364 is disposed so as to surround the lower end of the guide pin 362 to reduce the frictional force between the guide pin 362 and the guide receiving groove 326. For example, It can be a bush.

The restoring force providing portion 370 provides restoring force to the moving body portion so that the moving body portion 320 performing the pushing motion along the opening and closing moving direction I2 performs a pulling motion. At this time, the restoring force providing portion 370 is disposed between the fixed body portion 310 and the moving body portion 320 so as to surround the bellows portion 340, and provides the restoring force to the moving body portion 320 And a shaft spring 372 for rotating the shaft 372. At this time, a shaft spring receiving groove 324 for receiving a part of the shaft spring 372 may be formed on one surface of the moving body 320.

In this embodiment, the bellows portion 340 may include a constriction expanding portion 342, an upper engaging portion 344, and a lower engaging portion 346. The shrinking / expanding part 342 is disposed in the body through-hole 314 so as to surround the moving shaft part 330 and is contracted and expanded according to the movement of the moving body part 320. The upper engaging portion 344 is connected to the upper end of the contraction expanding portion 342 and is engaged with the fixed body portion 310. The lower end engaging portion 346 is connected to the lower end of the contraction bulge portion 342 facing the upper end portion and is coupled with the moving body portion 320 through the axial projection portion 322.

The shaft coupling screw 334 for coupling the plate coupling portion 300a to the moving shaft portion 330 can be coupled with the moving body portion 320 through the moving shaft portion 330, The moving shaft portion 330 may be coupled to the moving body portion 320. At this time, when the movable shaft part 330 is engaged with the movable body part 320 by the shaft coupling screw 334, at least a part of the lower end engaging part 346 is pressed to move the movable body part 320, .

The push-pull assemblies 300 may be spaced apart from each other by a predetermined distance along the rotation axis of the valve body 200, for example, in the first direction D1. If N is an even number, the plurality of push-pull assemblies 300 may include a first group of N / 2 push-pull assemblies 300 adjacent to a first rotating shaft unit 510, And a second group of N / 2 push-pull assemblies 300 adjacent to a second rotary shaft unit 520, which will be described later.

The rotation driving module 500 rotates the valve body 200 so that the opening and closing movement direction I2 does not coincide with or match the substrate moving direction I2. Specifically, for example, the rotation drive module 500 may include a first rotation axis unit 510, a second rotation axis unit 520, and a rotation drive unit 530.

The first rotating shaft unit 510 is fixedly coupled to one end of the valve body 200 and is fixed to one surface of the housing 100 facing the one end of the valve body 200, As shown in Fig.

More specifically, the first rotary shaft unit 510 is coupled with and fixed to the upper surface portion 250 of the valve body 200, and is rotatably coupled with the upper hole 152 formed in the upper surface plate 150. [ do. The first rotary shaft unit 510 may be coupled to the upper hole 152 of the top plate 150 so that the inside and the outside of the housing 100 are sealed.

The second rotating shaft unit 520 is fixedly coupled to the other end of the valve body 200 facing the one end of the valve body 200 and is fixed to the housing body 200 facing the other end of the valve body 200. [ So that the valve body 200 can be rotated.

Specifically, the second rotary shaft unit 520 is fixedly coupled to the lower surface 260 of the valve body 200, and is rotatably coupled to the lower hole formed in the lower surface plate 160. At this time, the second rotary shaft unit 520 may be coupled to the lower hole of the bottom plate 160 so that the inside and the outside of the housing 100 are sealed.

In the meantime, a first pneumatic injection hole for injecting pneumatic pressure generated in an external pneumatic pressure generator (not shown) is provided in the first rotary shaft unit 510, and a first pneumatic injection hole for pneumatic pressure- A discharge hole may be formed. In addition, a second pneumatic injection hole for injecting pneumatic pressure generated by the pneumatic pressure generator is formed in the second rotary shaft unit 520, and a second pneumatic discharge hole for discharging pneumatic pressure by the pneumatic pressure generator .

The rotation drive unit 530 is coupled with any one of the first and second rotation axis units 510 and 520 to provide rotational power for rotating the valve body 200. A detailed description of the rotation drive unit 530 will be described later with reference to a separate drawing.

Fig. 9 is a cross-sectional view showing a part of the pneumatic injection unit of the pneumatic conveyance module of Fig. 3;

2 to 6 and 9, the pneumatic pressure transfer module 400 is configured such that the pneumatic pressure transfer module 400 is pneumatically coupled to the push-pull assemblies 300 so that the sealing plate 300a is reciprocated in the opening / closing movement direction I1. Or pull out the pneumatic pressure from the push-pull assemblies 300. The push- Specifically, for example, the pneumatic transfer module 400 includes a first transfer module 400a corresponding to the first group of push-pull assemblies 300 and a second transfer module 400b corresponding to the second group of push- And a second transmission module 400b corresponding to the second transmission module 400b.

The first transfer module 400a injects the pneumatic pressure provided through the first pneumatic injection hole formed in the first rotary shaft unit 510 into the first group of push-pull assemblies 300 at the same speed Alternatively, pneumatic pressure may be discharged from the first group of push-pull assemblies 300 through the first pneumatic discharge hole formed in the first rotary shaft unit 510 at the same speed.

The second transfer module 400b injects the pneumatic pressure provided through the second pneumatic injection hole formed in the second rotary shaft unit 520 into the second group of push-pull assemblies 300 at the same speed Alternatively, pneumatic pressure may be discharged from the second group of push-pull assemblies 300 through the second pneumatic discharge hole formed in the second rotary shaft unit 520 at the same speed.

Meanwhile, in the present embodiment, the pneumatic pressure transmission module 400 may include only one of the first and second transmission modules 400a and 400b. In this case, when the pneumatic pressure transmission module 400 includes only the first transmission module 400a, the first transmission module 400a may provide pneumatic pressure to both the first and second groups, The air pressure can be discharged from all of the second group. In addition, the first pneumatic injection hole and the first pneumatic discharge hole are formed only in the first rotary shaft unit 510, and the second pneumatic injection hole and the second pneumatic discharge hole May not be formed.

Each of the first and second transmission modules 400a and 400b may include a pneumatic injection unit 410, a pneumatic discharge unit 420 and a pneumatic connection unit 430. [

The pneumatic injection unit 410 may include an injection main pipe part 412 and a plurality of injection distribution pipe parts 414. The injection main pipe part 412 extends along the rotational axis direction of the valve body 200 so as to correspond to the push-pull assemblies 300. The injection distribution pipe portions 414 are branched from the injection main pipe portion 412 at predetermined intervals and connected to the internal injection holes 232 of the valve body 200, respectively. As a result, the injection piping portions 414 can branch the pneumatic pressure provided from the injection main piping portion 412 and inject the pneumatic pressures into the push-pull assemblies 300, respectively.

The pneumatic exhaust unit 420 may include a discharge main pipe portion 422 and a plurality of injection distribution pipe portions 424. The discharge main pipe portion 422 extends along the rotational axis direction of the valve body 200 so as to correspond to the push-pull assemblies 300. The discharge distribution pipe portions 424 are branched from the discharge main pipe portion 422 at predetermined intervals and connected to the internal discharge holes 234 of the valve body 200, respectively. As a result, the injection distribution pipe portions 414 collect the pneumatic pressure discharged from the push-pull assemblies 300 to the injection main pipe portion 412 and discharge the same.

In this embodiment, the injection dispense piping portions 412 and the inner injection holes 232 are formed in such a manner that the pneumatic pressures injected into the respective push-pull assemblies 300 are equal to each other, Can be constructed. For example, the inner diameters of the injection piping portions 412 may be set to be constant as they are away from the pneumatic inlet of the injection main pipe portion 412, that is, the first rotary shaft unit 510 or the second rotary shaft unit 520 For example, in the order of R1, R2, R3, ..., R7. The diameter of the internal injection holes 232 is increased to a certain extent as the distance from the pneumatic inlet of the injection main pipe unit 412, that is, the first rotary shaft unit 510 or the second rotary shaft unit 520 can do.

In addition, the discharge dispense piping portions 422 and the inner discharge holes 234 can be discharged such that the pneumatic pressures discharged from each of the push-pull assemblies 300 are equal to each other, Structure. For example, the inner diameters of the discharge distribution pipe portions 422 are set to be constant as they are away from the pneumatic outlet of the discharge main pipe portion 422, that is, the first rotary shaft unit 510 or the second rotary shaft unit 520 Size. ≪ / RTI > The diameter of the inner discharge holes 234 is increased to a certain size as the distance from the pneumatic outlet of the discharge main pipe portion 422, that is, the first rotary shaft unit 510 or the second rotary shaft unit 520 can do.

The pneumatic connecting unit 430 is coupled to the first rotary shaft unit 510 or the second rotary shaft unit 520 to connect the pneumatic injection unit 410 to the first rotary shaft unit 510 or the second rotary shaft unit 520, Unit 520 and connects the pneumatic discharge unit 420 to the first rotary shaft unit 510 or the second rotary shaft unit 520. [ More specifically, the pneumatic connection unit 430 connects the pneumatic injection unit 410 to the first pneumatic injection hole of the first rotary shaft unit 510 or to the second pneumatic injection hole of the second rotary shaft unit 520 And a discharge connection hole for connecting the pneumatic discharge unit 420 to the first pneumatic discharge hole of the first rotary shaft unit 510 or the second pneumatic discharge hole of the second rotary shaft unit 520 .

In the present embodiment, the pneumatic injection unit 410 may further include an injection connection pipe portion 416 for connecting between the injection main pipe portion 412 and the injection connection hole of the pneumatic connection unit 430 have. At this time, the injection connection pipe portion 416 may have a structure bent at least once through various pipe connection means.

The pneumatic discharge unit 420 may further include a discharge connection pipe portion 426 connecting between the discharge main pipe portion 422 and the discharge connection hole of the pneumatic connection unit 430. At this time, the discharge connection pipe portion 426 may have a structure bent at least once through various pipe connection means.

Fig. 10 is a perspective view showing a state in which a part of the rotation shaft housing part is removed from the gate valve of Fig. 1, and Fig. 11 is a perspective view of an enlarged view of part D of Fig.

10 and 11, the rotation driving unit 530 may include a power generating unit 532, a speed reducing unit 534, a rotational power providing unit 536, and a rotational position sensing unit 538 .

The power generating unit 532 may be an electric motor that generates primary power and provides rotational power, for example. The deceleration base 534 decelerates the rotational force of the electric motor and transmits the decelerated base 534 to the rotary power supplier 536.

The rotary power supply 536 is coupled to any one of the first and second rotary shaft units 510 and 520, for example, the second rotary shaft unit 520, The rotational force is converted into a rotational power for rotating the valve module 300 and transmitted to the second rotary shaft unit 520. That is, the rotational power providing portion 536 may include a rotation shaft changing gear that changes the rotational force provided from the reduction base portion 534 to the rotational power.

The rotation position sensor unit 538 is coupled to the second rotation shaft unit 520 to sense the rotational position of the valve body 200. For example, the rotation position sensor unit 538 may include a rotation projection 538a, a first position sensor 538b, and a second position sensor 538c.

The rotation protrusion 538a is engaged with the second rotary shaft unit 520 and rotates together with the valve body when the valve body rotates. The first position sensor 538b senses whether the open / close movement direction I2 coincides with the substrate movement direction I1, and detects whether the opening / closing movement direction I2 is coincident with the substrate movement direction I1. For example, 1 proximity sensor. The second position sensor 538c senses whether the opening and closing movement direction I2 is formed at a predetermined angle with respect to the substrate moving direction I2 and detects whether the rotation protrusion 538a is close to the substrate moving direction I2, And a second proximity sensor capable of sensing a second proximity sensor.

In this embodiment, a pair of branch branches may be formed on the rotation projection 538a as shown in the figure. At this time, the first position sensor 538b may include a pair of first proximity sensors disposed corresponding to the branch branches, and the second position sensor 538c may correspond to the branch branches Pairs of second proximity sensors.

In place of the rotational force, the power generating unit 532 generates a primary power that performs a linear reciprocating motion, and the rotational power providing unit 536 can change the rotational power of the primary power. At this time, the deceleration base 534 may be omitted.

In addition, although the rotation position sensor unit 538 includes two position sensors for sensing two rotational positions, the rotational position sensor unit 538 may include three or more position sensors for sensing three or more rotational positions .

The rotation driving unit 530 may further include a rotation axis housing part 530a coupled with the bottom plate 160 to surround the rotation power providing part 536 and the rotation position sensing part 538 have. At this time, the rotation shaft housing part 530a may serve as a support for supporting the rotation power providing part 536 and the rotation position sensing part 538.

The rotation drive unit 530 may further include a drive control unit (not shown) for controlling the power generation unit 532 in response to the position sensing signals sensed by the rotation position sensing unit 538 .

Fig. 12 is a perspective view showing a state in which the first side plate is separated from the gate valve in Fig. 1, and Fig. 13 is a perspective view showing an enlarged view of a portion E in Fig.

2 and 3 and FIGS. 12 and 13, the gate valve according to the present embodiment includes the valve body 200, the valve body 200, the first rotary shaft unit 510, And the second rotating shaft unit 510 is coupled to the other end of the valve body 200, that is, the lower surface of the valve body 200 260 to the second coupling unit 550. The second coupling unit 550 may be coupled to the second coupling unit 550. [

The first coupling unit 540 includes a first valve body coupling portion 542 coupled with a top surface portion 250 of the valve body 200 and a portion of the rear surface portion 220 adjacent to the top surface portion 250, And a first rotation axis coupling unit 544 coupled to the first rotation axis unit 510. [ The second coupling unit 550 includes a second valve body coupling portion coupled to a lower portion 260 of the valve body 200 and a portion of the rear portion 220 adjacent to the lower surface portion 260, And a second rotating shaft coupling unit coupled to the second rotating shaft unit 520. [

As such, the first coupling unit 540 is coupled to the top surface 250 and a portion of the rear surface 220 adjacent thereto, and the second coupling unit 550 is coupled to the bottom surface 260 and the adjacent The first and second coupling units 540 and 550 can be more strongly coupled to the valve body 200 as the first and second coupling units 540 and 550 are coupled to a portion of the rear portion 220.

14 is a cross-sectional view illustrating the sequence in which the gate valve of FIG. 1 is operated.

1, 2 and 14, the gate valve mainly includes a gate close mode for closing a substrate transfer path formed between the front and rear openings 112 and 122, A gate open mode in which the substrate transfer path is opened, and a maintenance mode in which the operation is not performed.

Specifically, the gate closing mode can be operated when the valve body 200 is rotated so that the opening / closing movement direction I2 coincides with the substrate moving direction I1. The gate opening mode may be operated when the valve body 200 is rotated so that the opening / closing movement direction I2 is formed at a first angle with respect to the substrate moving direction I1. When the opening / closing movement direction I2 is formed at a first angle with respect to the substrate moving direction I1, the substrate opposing surface 222a formed at the bottom of the substrate passing groove 222 is moved in the substrate moving direction I2, (I1). The maintenance mode may be operated when the opening / closing movement direction I2 is formed at a second angle larger than the first angle with respect to the substrate moving direction I1. The maintenance mode is a mode in which maintenance is performed without any operation, or when maintenance is required.

In the present embodiment, the first angle may range from 40 degrees to 80 degrees, for example, about 60 degrees. At this time, when the first angle is smaller than 40 degrees, a space for forming various components for moving along the opening / closing movement direction I2 is reduced, which makes design difficult. When the first angle exceeds 80 degrees , The total volume of the valve body 200 is increased to increase manufacturing costs or to provide stronger rotational power. Further, the second angle may be an angle of 80 degrees, for example, 90 degrees.

The gate valve is operated in the maintenance mode, and the valve body 200 is rotated at a desired angle so that the gate opening mode or the gate Closed mode. At this time, in the gate closing mode, a pushing operation in which the sealing plate 300a moves according to the opening / closing moving direction I2 to cut off the front opening 112 and the pushing operation in which the front opening 112 is opened Can be distinguished by a pull operation.

As described above, according to the gate valve of the present invention, the guide portions 360 are coupled with the fixed body portion 310 so as to correspond to the guide receiving grooves 326 of the movable body portion 320, When the movable body 320 is moved along the opening / closing movement direction by guiding the movement of the part 320, it is possible to suppress the shaking due to various factors such as an external impact. Accordingly, the shaking of the moving shaft 330, which moves together with the moving body 320, is suppressed, so that the sealing plate 350 can stably perform the push-pull movement, Thereby reducing noise or particles.

In the present embodiment, the gate closing mode and the gate opening mode are selectively operated by adopting a structure in which the gate valve rotates the valve body 200. [ However, instead of the structure in which the gate valve rotates the valve body 200, a structure is employed in which the valve body 200 is reciprocated in the second direction D2, The open mode can be selectively operated.

≪ Example 2 >

FIG. 15 is a front view of the gate valve according to the second embodiment of the present invention as viewed from the sealing plate side, and FIG. 16 is a front view of the gate valve according to the second embodiment of the present invention, 15 is a cross-sectional view taken along line G-G 'of FIG. 15, and FIG. 18 is a cross-sectional view of the open / close valve and the pneumatic transfer module of FIG. And FIG. 19 is a cross-sectional view showing a state in which air is injected and the sealing plate is moved in FIG.

Since the gate valve according to the present embodiment is substantially the same as the gate valve according to the first embodiment described with reference to Figs. 1 to 14 except for the restoring force providing portion 370, the same components as those of the first embodiment The same reference numerals are given thereto, and a detailed description thereof will be omitted.

15 to 19, the restoring force providing portion 370 according to the present embodiment includes a plurality of guide springs 374 in place of the axial springs 372 in the first embodiment. At this time, the guide springs 374 are disposed between the fixed body 310 and the movable body 320 so as to enclose the guide portions 360, respectively, and provide the restoring force to the movable body 320 do.

As described above, the guide springs 374 arranged to surround the guide portions 360 uniformly apply the restoring force for the pull motion to the moving body portion 320 that has performed the pushing motion The moving body portion 320 can perform a more stable pull motion.

When the shrinkage expansion part 342 of the bellows part 340 shrinks and expands due to the omission of the shaft spring 372 in the first embodiment, a part of the shrinkage expansion part 342 It is possible to prevent the occurrence of defective tearing by the shaft spring 372.

On the other hand, as the shaft spring 372 is omitted, the shaft spring receiving groove 324 in the first embodiment for accommodating a portion of the shaft spring 327 can be omitted. On the other hand, a bellows receiving groove 322a for receiving a part of the bellows 340 may be formed on one side of the moving body 320. The bellows receiving groove 322a is formed to enclose the outer periphery of the axial projection 322 and can receive the lower end coupling portion 344 and a part of the contraction and expansion portion 342.

However, unlike the present embodiment, the restoring force providing portion 370 may include both the shaft spring 372 and the guide springs 374.

While the present invention has been described in connection with what is presently considered to be practical and exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: housing 110: front plate
112: front opening 120: rear plate
122: rear opening 130: first side plate
140: second side plate 150: upper side plate
160: lower side plate 200: valve body
210: front part 212: assembly receiving groove
212a: air pressure receiving groove 212b: engaging projection
220: rear face portion 222: substrate passing groove
222a: substrate facing surface 230: first side surface
232: Internal injection hole 234: Internal discharge hole
240: second side portion 250: upper surface portion
260: lower surface portion 300a: sealing plate
300: push-pull assembly 310: fixed body portion
312: body receiving groove 314: body through hole
316: side wall 318: side wall exhaust hole
320: moving body portion 322: shaft projection portion
322a: a bellows receiving groove 324: a shaft receiving groove
326: guide receiving groove 328: body friction preventing portion
330: moving shaft portion 332: projection-engaging groove
334: shaft coupling screw 340: bellows part
342: contraction bulge 344:
346: bottom engaging portion 350: plate engaging portion
360: guide portion 362: guide pin
364: Guide friction preventing portion 370:
372: shaft spring 374: guide spring
400: Pneumatic transmission module 400a: First transmission module
400b: second transmission module 410: pneumatic injection unit
412: injection main pipe section 414: injection distribution pipe section
416: injection connection piping section 420: pneumatic exhaust unit
422: discharge main pipe portion 424: discharge distribution pipe portion
426: Discharge connection piping part 430: Pneumatic connection unit
500: rotation drive module 510: first rotation shaft unit
520: second rotary shaft unit 530: rotary drive unit
532: Power generating unit 534: Deceleration base
536: Rotational power providing unit 538: Rotational position sensing unit
538a: rotation projection 538b: first position sensor
538c: second position sensor 540: first coupling unit
550: second coupling unit I1: substrate moving direction
I2: opening / closing movement direction

Claims (16)

1. A push-pull assembly coupled to a valve body to allow push-pull movement of a sealing plate along an opening and closing movement direction,
A fixed body portion having one side surface coupled to the valve body, a body receiving groove formed on the one side surface, and a body through hole connected to the body receiving groove;
A movable body portion which is disposed in the body receiving groove and performs push-pull movement along the opening and closing movement direction and has a plurality of guide receiving grooves formed on one surface thereof facing the fixed body portion;
A moving shaft disposed in the body through-hole in a shape elongated along the opening and closing direction and coupled with the sealing plate to move the sealing plate in accordance with the movement of the moving body;
A bellows portion disposed in the body through-hole to surround the moving shaft portion, the bellows portion being engaged with the fixed body portion and the moving body portion, respectively, and contracting and expanding according to the movement of the moving body portion; And
And a plurality of guide portions coupled to the fixed body portion to correspond to the guide receiving grooves and guiding the movable body portion to be moved along the opening and closing movement direction. 2. The apparatus according to claim 1, further comprising a restoring force providing unit for providing a restoring force to the moving body so that the moving body part performing a pushing motion along the opening and closing moving direction performs a pulling motion A push-pull assembly. 3. The apparatus of claim 2, wherein the resilient force providing unit
And a plurality of guide springs disposed between the fixed body part and the movable body part to respectively surround the guide parts and provide a restoring force to the movable body part. 3. The apparatus of claim 2, wherein the resilient force providing unit
And a shaft spring disposed between the fixed body portion and the movable body portion to enclose the bellows portion and to provide a restoring force to the movable body portion. 3. The apparatus of claim 2, wherein the moving body portion
Wherein the pushing motion is performed by pneumatic pressure applied through the inner injection hole of the valve body. 6. The apparatus of claim 5, wherein the movable body portion
Wherein the pneumatic pressure is discharged through the inner discharge hole of the valve body to perform the pulling motion by the restoring force providing portion. [7] The apparatus according to claim 6, wherein the side wall of the fixed body formed by the body receiving groove
And a side wall exhaust hole connected to the internal discharge hole to discharge the air pressure to the internal discharge hole. The apparatus of claim 1, wherein the guide portions
Wherein the push-pull assembly is disposed concentrically with the moving shaft part at a predetermined interval. 9. The apparatus according to claim 8, wherein the body receiving groove has a cylindrical shape with the opening /
Wherein the movable body portion has a shape corresponding to the body receiving groove. The push-pull assembly of claim 8, wherein the number of the guide portions is four or more. 2. The apparatus of claim 1, wherein each of the guide portions
A guide pin fixedly coupled to the fixed body and at least a part of which is inserted into the guide receiving groove to guide movement of the movable body; And
And a guide friction preventing portion disposed to surround one end of the guide pin to reduce a frictional force between the guide pin and the guide receiving groove. The push-pull assembly of claim 1, further comprising a plate engaging portion disposed between the sealing plate and the moving shaft portion and coupling the sealing plate to the moving shaft portion. 13. The apparatus of claim 12, wherein the bellows portion
A shrinking and expanding unit disposed in the body through-hole so as to surround the moving shaft part, the shrinking and expanding part contracting and expanding according to the movement of the moving body part;
An upper engaging part connected to one end of the contraction bulge and engaged with the fixed body part; And
And a lower end coupling portion connected to the other end of the shrinking expansion portion facing the one end portion and coupled with the moving body portion. 14. The apparatus of claim 13, wherein the shaft coupling screw coupling the plate coupling portion to the moving shaft portion
Wherein the movable body portion is coupled with the movable body portion through the movable shaft portion, thereby coupling the movable shaft portion to the movable body portion. 15. The apparatus according to claim 14, wherein the movable shaft
And wherein when the shaft coupling screw is engaged with the moving body portion, at least a portion of the lower engaging portion is pressed and fixed to the moving body portion. A housing having at least one opening; And
A valve body disposed in the housing, a sealing plate corresponding to an opening of the housing, and at least one push-pull assembly capable of push-pulling movement of the sealing plate along an opening and closing movement direction Closing valve,
The push-pull assembly
A fixed body portion having one side surface coupled to the valve body, a body receiving groove formed on the one side surface, and a body through hole connected to the body receiving groove;
A movable body portion which is disposed in the body receiving groove and performs push-pull movement along the opening and closing movement direction and has a plurality of guide receiving grooves formed on one surface thereof facing the fixed body portion;
A moving shaft disposed in the body through-hole in a shape elongated along the opening and closing direction and coupled with the sealing plate to move the sealing plate in accordance with the movement of the moving body;
A bellows portion disposed in the body through-hole to surround the moving shaft portion, the bellows portion being engaged with the fixed body portion and the moving body portion, respectively, and contracting and expanding according to the movement of the moving body portion; And
And a plurality of guide portions coupled to the fixed body portion to correspond to the guide receiving grooves and guiding the movable body portion to move along the opening and closing movement direction.

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