KR20140051532A - Line type light exposure apparatus and lenticular assembly - Google Patents

Abstract

The present invention relates to a line type light exposure apparatus and a lenticular assembly. The light exposure apparatus according to one embodiment of the present invention includes a line-type light source generating apparatus. According to one embodiment of the present invention, the line-type light source generating apparatus includes a light source and a lenticular assembly. The lenticular assembly includes at least one convex lenticular assembly and at least one concave lenticular assembly.

Description

An exposure device equipped with an optical source device and a lenticurea device used for generating an optical source. {LINE TYPE LIGHT EXPOSURE APPARATUS AND LENTICULAR ASSEMBLY}

The present invention relates to an exposure apparatus equipped with a luminous source generating apparatus and a lenticurea combination used in a luminous source generating apparatus.

The most typical use of the present invention is a semiconductor circuit or a microcircuit or an exposure device used to construct a fine pattern.

The concentrator generating device used in the present invention enables the condensing function of the convex lenticular to be used in the exposure machine, thereby enabling ultra-precise exposure.

The luminous source generating apparatus to be used in the present invention can use a lenticure combination. Such a lenticure combination allows simultaneous use of the light converging function of the convex lenticular and the light dividing function of the concave lenticular, thereby enabling a finer exposure operation.

The use of an exposure apparatus employing a source of light source allows the photosensitive layer to be exposed accurately and precisely in accordance with the pattern pattern of the film. Even if the pitch is extremely minute, processing can be performed. If the thickness of the photosensitive layer is relatively thick There is a characteristic that it is exposed clearly.

In addition, there is a feature that enables accurate exposure even in a somewhat vibrating environment.

Generally, an exposure device refers to a device that places a film on which a desired pattern is formed on a substrate coated with a photo-resist (PR), and irradiates ultraviolet rays to transfer a desired pattern to the photosensitive material.

In the present invention, a wafer, glass, or the like is also defined as a substrate in the present invention.

Conventionally, an exposure device for producing a fine pitch circuit must be equipped with a device for producing parallel light, and a device for producing such parallel light has been required to have a configuration of expensive equipment.

However, according to the present invention, it is possible to provide benefits to many industrial fields by providing a luminous source generating device which is manufactured by a simple Lenticular lamp for an expensive parallel light configuration.

INDUSTRIAL APPLICABILITY The present invention can provide a low-cost vertical light exposure device having a linear light source generating device by Lenticular.

In addition to being advantageous in terms of economy, the present invention is also designed so that a circuit with a fine pitch, which could not be manufactured even by using an expensive parallel light exposure apparatus, can be quickly fabricated with a large area.

The present invention adopts a luminous source generating device using a condensing function and a vertical optical function of a convex lenticular, so that even when the thickness of the photosensitive material becomes several tens of microns, it is possible to perform a clean exposure, and even if the pitch of the circuit is several microns, So that it is possible to provide a lenticular exposure apparatus capable of forming a clear, clean circuit.

When the optical circulator is used as in the present invention, the most significant feature is that it is possible to perform exposure of an extremely fine circuit, to enable photosensitive exposure of a large-sized photosensitive layer at the same time, and to perform an exposure work by scanning the optical source It is possible to work quickly because of presence.

In addition, in terms of the working environment, it is essential to perform processing in a space free from vibration in the conventional laser processing. However, in the case of the exposure apparatus using the linear light source generating apparatus of the present invention, It is true.

Conventionally, a balanced light exposure apparatus has been used for exposure of a very fine circuit, but the conventional balanced light exposure apparatus has a complicated equipment structure and requires a high production cost.

However, when the exposure apparatus employing the apparatus for generating optical circulars according to the present invention is constructed, an exposure apparatus that can function as an apparatus for producing parallel light economically using optical properties of light without using a complicated apparatus or expensive equipment can be manufactured.

The light irradiated in the present invention is a vertical light or a parallel light and has an advantage of precisely exposing an extremely fine pattern because the light diffuses or scatters light when the light touches the photosensitive material .

In general, the most ideal light source device for constructing a very fine circuit requires the following matters.

First, it should be parallel light to prevent scattering and scattering of light;

Third, it should be a light source to enable rapid mass work and scanning.

Third, the light energy must be condensed by the lens to maintain the intensity of the light of each source.

Fourth, when a very fine circuit is to be fabricated, the width of the source must be several tens of nanometers, since it must be much smaller than the microscopic circuit.

The fifth source must be present as a bundle of geniuses in order to have a lot of energy;

Sixth, in order to concentrate the size of the tonic circle at a high density, it is required that the distance between the tonic circle and the tonic circle be dense.

In addition, even if it consists of bundles of ray sources, it is required that the ray sources are not connected to each other and exist independently.

The luminous source generating apparatus to be used in the present invention satisfies all the above conditions.

The light provided by the exposure device having the optical circulator according to the present invention is irradiated to the photosensitive material through the film on which the pattern is formed and the irradiated light exposes the photosensitive material in the shape of a pattern formed on the film .

The optical circulator generating apparatus in the present invention includes a light source and a convex reticle as basic components. As another example of an optical source generator, a combination of a light source and a reticle array is included as a basic component.

The light source generating device used in the present invention is configured such that the light source and the convex lenticular lens are fixed so as not to move relative to each other. Or the combination of the light source and the lenticular is fixed so as not to move relative to each other.

Of course, the film disposed in the tonic circle generator and the exposure machine can be configured to move relatively.

The present invention intensively utilizes the function of the central region of the convex lenticular lens in which light is vertically transmitted when the light of the light source is irradiated on the convex lenticular.

When the present invention is applied to an exposure apparatus equipped with a linear light source generating apparatus, the linear light source generating apparatus is located on the upper portion of the film on which the pattern is formed.

When the sheet material on which the photosensitive material is coated is continuously exposed, it is preferable that the linear light source device of the present invention is constructed so as to be spaced apart from the film by a predetermined distance so that the linear light source device and the film are mutually moved without friction.

In the present invention, since the linear light source generating device can be relatively moved relative to the film in the positional relationship between the linear light source generating device and the film, even if a substrate coated with a photosensitive material of a large area is easily exposed, You can.

Of course, a substrate to which the exposure material is thinly coated is positioned below the film having the pattern formed thereon, and the film and the substrate should be prevented from moving relative to each other during the exposure process.

The present invention uses light condensed in a line shape produced by a convex lenticular. In the present invention, when used as a lenticure combination, the light splitting function of the concave Lenticular is additionally used.

By adding the concave Lenticular, the line width of the line-shaped condensed light formed by the convex lenticule is narrowed further, and the number of the condensed light of the line shape is further increased to enable more precise exposure.

In the present invention, when the lenticule assembly is passed through, the width of the condensed light can reach the condensed light on the line having a line width of several tens to several hundred nanometers.

This fact enables the pitch width of the workpiece to be exposed to be as high as a few microns without errors.

The present invention uses a condensing function of a large number of convex lenses constituting a convex lenticular lens in an exposure machine and uses a vertical optical function of a large number of convex lenses constituting a convex lenticular lens in an exposure machine.

By forming light as vertical light in the present invention, it is possible to perform a clear exposure even if the thickness of the photosensitive material is thicker than a few tens of microns, and the interference and scattering of light can be prevented by the vertical light. Therefore, even if the pitch of the circuit is several microns, It is possible.

In addition, when the work is carried out through the exposure device having the linear light source generator of the present invention, the safety of the work can be achieved, and a clear and clear circuit configuration without defects can be realized.

In addition, even if the substrate is coated with a large-area photosensitive material, the entirety of the substrate can be easily and economically exposed at a time through the transfer of the source of light of the present invention.

In the present invention, the linear light source generator is generally manufactured so as to be capable of performing relative movement in the left-right direction or the back-and-forth direction with respect to the patterned film.

If this relative movement is required

First, there are cases where the light source generating device is transported with the film stopped,

Second, the source of light is included in the case where the film is transported in a stationary state.

It goes without saying that, in the above description, the film may include a film and an associated support for supporting the film.

As described above, in the present invention, the exposure apparatus having the linear light source generating device has the light focusing function of the Lenticular or Lenticular combination as essential components.

In addition, the present invention is characterized in that a central portion of a typical convex lenticular lens is concentratedly used for generating vertical light.

The present invention is characterized in that the light source, the convex lenticular or the combination of the light source and the lenticular are fixed without relative movement.

For this purpose, the light source, the lenticurea or the combination of the light source and the lenticure are fixedly set in one fixed plane.

For continuous operation, the toric source generating device may be capable of relative movement relative to the substrate structure comprising the film.

The optical circulator according to the present invention is characterized in that the condensing function, which is a physical phenomenon of each convex lenticular lens constituting the convex lenticular, and a light dividing function, which is a physical phenomenon of each concave lenticular lens constituting the concave lenticular, May be used.

By manufacturing an exposure apparatus to which a function of a source of light source is applied, even if the thickness of the photosensitive material is several tens of microns or more, processing can be performed even if the width of the pitch is only a few microns.

The extremely fine pitches with small circuit pitches are capable of pure and clear exposure only by vertical light without scattering or diffuse scattering of light.

The exposure device provided with the linear light source generating device of the present invention enables a clear circuit configuration without defects.

Conventionally, in order to make an exposure apparatus having parallel light, an expensive apparatus is required. In the present invention, however, the functions of a conventional expensive apparatus can be extremely easily performed by fully utilizing the physical function of the Lenticular lens.

As compared with conventional exposure apparatus technology, it is difficult to expose a large area and requires a long exposure time. In contrast, when the apparatus of the present invention is used, exposure of a large area can be achieved extremely easily and quickly It has a great feature that it can be.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing an embodiment of an exposure apparatus provided with a linear light source generating apparatus of the present invention,
2 is a perspective view of a typical convex lenticular,
3 is a view showing a state where light is condensed when light of a light source passes through a general convex lenticule,
4 is a view showing a state in which light is condensed by vertical light generated in a central portion of each lens of a general convex lenticular,
5 is an explanatory view for explaining the configuration of a vertical light convex tentacle,
6 is an explanatory diagram illustrating a vertical light lenticule that implements vertical light through a lens shield to a convex lenticular.
FIG. 7 is an explanatory view for explaining a vertical light lenticule that implements vertical light through a light transmission slitter to a convex lenticular.
8 is a perspective view of a general concave lenticular.
Figures 9a, 9b, 9c are examples of lenticular assemblies.
10 is a configuration diagram of a convex lenticular with a light shielding portion.
11 is a configuration diagram of a concave lenticular with a light shielding portion.
FIGS. 12 and 13 show another embodiment of a lenticular assembly provided with a light shielding portion.
Fig. 14 is an explanatory view of an exposure device having an upper structure and a lower structure.
Fig. 15 is a specific explanatory view of Fig. 14. Fig.
16 is an explanatory diagram of a luminous source generating apparatus having a lenticure combination.
Fig. 17 is an embodiment of an inventive exposure apparatus made up of another type of upper structure and lower structure.

The present invention relates to an exposure apparatus equipped with a luminous source generating apparatus and a lenticurea combination used in a luminous source generating apparatus.

In the exposure device equipped with the linear light source generating device of the present invention, the light produced by the linear light source generating device is irradiated on the patterned film, and the irradiated light exposes the photosensitive material in the shape of the pattern.

The optical circulator generating apparatus used in the present invention includes a light source, a convex reticula or a combination of a light source and a lenticure, and a combination of a light source and a convex lenticular or a combination of a light source and a lenticure is fixed .

When the exposure apparatus is constructed, the linear light source generating apparatus and the film are relatively moved.

The film and the photosensitive layer are structured so as not to move relative to each other. That is, the film and the exposure layer do not cause slip.

The optical circulator according to the present invention makes use of the vertical light provided by the central region of the convex lenticular lens, in which the light of the illuminated light is vertically down.

An exposure apparatus equipped with a linear light source generating apparatus according to the present invention includes a linear light source generating device composed of a light source and a lenticule combination, wherein the light source and the lenticule combination do not mutually move relative to each other.

As an embodiment of the exposure apparatus of the present invention,

An upper structure including at least one pressing roller supported by an elastic body, at least one or more auxiliary rollers, a pattern film constituted by transparent and opaque portions, and an optical circulator generating device;

An exposure apparatus comprising a substrate on which a thin photosensitive layer is uniformly applied, a table on which the substrate is placed, and an adhesion means for bringing the substrate and the table in close contact with each other.

As another embodiment of the present invention,

An upper structure including at least one pressing roller supported by an elastic body, at least one auxiliary roller, and a luminous source generating device;

A lower structure including a substrate on which a thin photosensitive layer is uniformly applied, a table on which the substrate is placed, and a contact means for bringing the substrate and the table into close contact with each other;

And a pattern film composed of transparent and opaque portions is placed on the photosensitive layer of the lower structure.

Hereinafter, various embodiments of the present invention will be described in detail, but the present invention is not limited to the following embodiments unless it departs from the gist thereof.

1 is a view showing an embodiment of an exposure apparatus provided with a linear light source generating apparatus of the present invention.

The exposure apparatus 1 of FIG. 1 is constituted by a substrate structure 9, a luminous source generating apparatus 2, and other apparatus sections including opening / closing ports.

The above-mentioned optical circulator generating device 2 is constituted by a light source 4 and a convex lenticular lens 5 or a combination of a light source 4 and a lenticular lens 5.

It is preferable that the light source 4 emits light uniformly over the entire area of the convex lenticule 5 or the lenticular combination 5 having a constant area.

The present invention is characterized in that the light source, the convex lenticular or the combination of the light source and the lenticular are fixed without relative movement.

That is, the light source and the convex lenticule or the combination of the light source and the lenticule are fixed in one fixed frame.

In the exposure device provided with the linear light source generating device, the linear light source generating device is moved relative to the film of the aligner.

Conventionally, there is a technique for an exposure apparatus utilizing Lenticular, but there is a method in which a lenticure is closely contacted with a film to move it, and a light source located at an upper portion is moved relative to Lenticular. However, There is a difference.

There is a remarkable difference in interpreting the physical phenomena of whether the light source is moved or fixed with respect to the lenticulars.

The technique of moving the light source relative to the lenticule is well known to a camera for recording a stereoscopic image by a conventional lenticular.

Conventionally, a convex lenticular lens has been used closely in the technique of recording or reproducing a stereoscopic image. As a technique of recording stereoscopic images, there is a stereoscopic image camera that records a plurality of images through respective lenticular lenses constituting the lenticular.

This is a method in which a plurality of images having different wide angles are recorded in one film by moving the lenticule relative to the subject. For convenience of explanation, the light source may be viewed as a subject.

The technique of relatively moving the light source relative to the lenticule is based on this stereoscopic imaging technique.

However, in the present invention, the light source is fixed with respect to the lenticular, and instead of using all the light beams having different light angles through the respective lenticular lenses constituting the lenticular lens, There is a characteristic that only the part is used intensively.

That is, the present invention is characterized in that the light source and the lenticular are set as a single fixture so as not to move relative to each other, and the present invention is applied to the exposure apparatus.

The luminous source generating apparatus used in the exposure apparatus of the present invention causes relative movement to the film.

As a conventional technique, there is a method in which a convex lenticular is closely contacted with a film so as not to move, and in this state, a light source is moved relative to a convex lenticular, but this is very different from the present invention .

Conventionally, a light source is relatively moved with respect to a convex lenticular. At this time, on a film existing under each lens of the convex lenticular, light focused by the movement of the light source passes through the moving path of the light source And sequentially move in response to the request.

This principle is the same as the principle of allowing stereoscopic images to be taken by recording a plurality of images by the convex lenticular.

In this case, even if the light is condensed, the intensity of the light changes depending on the position of the convex lenticular, and it is impossible to obtain an ideal uniform condensed light by this phenomenon.

The round light source generating device 2 used in the present invention can be moved by various types of conveying means 3.

It is needless to say that the embodiments of the light source generating device transfer means 3 can be configured in various forms.

It is also possible that the slider rod is used to drive the motor as shown in FIG.

In the present invention, when the linear light source generating device transfer means 3 is not configured, the linear light source generating device is in a stopped state and the substrate structure located under the linear light source generating device can be moved Of course.

In the exposure machine, the substrate structure 9 is defined as a generic term for a structure located below the above-mentioned light source generating device. That is, the substrate structure 9 in the present invention does not include the substrate to which the photosensitive material is applied.

The term " substrate structure " is a generic representation of various structures configured to support functions of supporting or moving the substrate.

The photosensitive material sheet in a reel-like state wound by the rollers formed in the exposure machine may be continuously exposed while being spread flat on the top of the substrate structure.

On the substrate structure, a substrate to which a photosensitive material is applied is detachably positioned.

A fine hole is formed in the upper part of the substrate structure, and the substrate is fixed by vacuum pressure through the hole.

A film on which a pattern is formed is placed on a substrate to which the photosensitive material is applied.

During the exposure operation, it is preferable that the substrate having the substrate structure and the photosensitive material coated thereon and the film disposed on the substrate coated with the photosensitive material proceed in a fixed state so that there is no relative movement.

Of course, it is preferable that the substrate on which the photosensitive material is coated and the film on which the pattern formed on the substrate is formed are closely adhered to each other.

For convenience of explanation, the plate coated with the photosensitive material uniformly is referred to as a substrate, and a state in which the substrate is flatly spread is also referred to as a flat plate.

In the present invention, in order to sensitize the photosensitive material, the flat plate 8, on which the photosensitive material 7 is uniformly applied to the lower part of the patterned film 6, is placed on the substrate structure 9, The photosensitive material is exposed using the apparatus.

The substrate to which the photosensitive material is uniformly applied may have various shapes. The photosensitive material may exist in the form of a thinly coated sheet.

Of course, the sheet-like substrate may be wound in a roll form. Or a form in which the photosensitive material is thinly coated on a solid substrate which is not deformed.

When the light is irradiated through the patterned film through the optical source, the photosensitive material is exposed according to the shape of the pattern formed on the film by the irradiated light.

The luminous source generating device 2 used in the present invention is composed of a light source 4 emitting light and a lenticule 5 positioned below the light source.

It goes without saying that other components may be added to add additional functions to the optical source.

Even if other components are added to the linear light source, it is included in the scope of the present invention if it includes a light source 4, which is a key element of the present invention, and a lenticure 5, which is positioned below the light source.

The light source generating apparatus of the present invention can roughly classified into two types.

Hereinafter, the present invention will be described with reference to the accompanying drawings.

First, it is constituted as one lenticurea called Lenticule which is used in the source of light of the source of light. It is a common lenticule called Lenticule which is used at this time.

Second, the lenticurea used for the source of light of the luminous source is configured as a combination of lenticureas, and a plurality of lenticules used at this time are arranged and used.

In this case, the most common configuration is a convex lenticule at the top, and a concave lenticule is arranged at the bottom of the convex lenticule.

At this time, the number of the concave lenticule is one or more than two, and in order to increase the number of divided light beams on the condensed line, the number of concave lenticulars is increased.

In the description of the present invention, first, a first form of a circular light source generating apparatus will be described, and as a further embodiment of the present invention, a second form circular light generating apparatus will be described later.

In the case of making an exposure apparatus using the optical circulant generating apparatus used in the present invention, the optical circulant generating apparatus is placed on the upper side of the patterned film.

In order to perform a continuous exposure operation, the linear light source device is positioned at a predetermined distance from the film so that the film can be relatively moved without friction.

Of course, it is also within the scope of the present invention to perform exposure without transferring the source of light generation for the purpose of making a device for a more precise operation while the continuous operation is not performed and the operation speed is lowered.

In case of performing the exposure work with the source of light of the source of light and the film being stopped, it is needless to say that the distance between the source of light and the film is minimized.

In the exposure machine of the present invention, the flat plate 8 on which the photosensitive material 7 is uniformly applied is placed under the film 6 on which the pattern is formed.

The flat plate 8 is a substrate for forming a circuit pattern. A photosensitive layer is formed on the flat plate.

The photosensitive material is exposed in the shape of the pattern of the film on the upper side of the photosensitive layer.

In order to allow light to be irradiated onto the photosensitive layer on the upper surface of the flat plate, the concentrator generating device 2 is disposed on the upper side of the film.

During the exposure operation, the patterned film 6 is preferably adhered to the upper surface of the flat plate 8 coated with the photosensitive material 7.

The film 6 has a pattern of a transparent part and an opaque part.

When light is irradiated from the linear light source 2 to the film 6, the transparent part of the film transmits the light and the opaque part blocks the light.

The condensed vertical light irradiated through the linear light source generating device 2 precisely cures the photosensitive material through the transparent part of the film 6. [

After the exposure operation, if the photoresist material is removed by a chemical method, that is, the uncured portion, that is, the uncured portion, a pattern shape is formed in the flat plate 8 by the exposure portion.

2 is a perspective view showing a general convex tentacle.

As shown in Fig. 2, the convex portion of the convex portion of the convex portion 10 has a shape in which a columnar shape having a convex section is continuously connected.

That is, each of the plurality of convex lenticular lenses 11 having a long columnar shape is continuously connected to the side surface.

Conventionally, such a shape is used as a three-dimensional image screen called a convex tachy.

3 is a view showing a state where light is condensed when light of a light source passes through a general convex lenticular.

Each of the lenticular lenses 13 and 14 of the convex lenticular lens has a property of condensing the light of the light source 12.

After the photosensitive layer is closely attached to the lower portion of the convex lenticular, when the light of the light source is irradiated, the condensed light acts on the photosensitive layer 15 to form the exposure portion 16 at the portion where the light is condensed.

That is, when light is irradiated through the convex lenticule, the exposed portion and the non-exposed portion are arranged in the photosensitive layer adhered to the lenticule.

It can be explained as a transparent body in which a plurality of convex lenses having a cylindrical shape in which a plane is formed on one surface of a convex lenticular lens and a convex lens is formed in a longitudinal direction on the other surface are arranged side by side.

There is a unique function of condensing light in the form of a line through the function of each convex lens constituting the convex lenticule called the convex lenticular.

As shown in the figure, when the light of the light source 12 is illuminated through the convex lens, the light is focused toward the focal point of the convex lens by the convex lenses 13 and 14 formed on the lenticular.

The light focused on the photosensitive material 15 can be sought for various functions by adjusting the distance a between the curvature of the convex lens of the convex lenticular lens and the photosensitive material.

In the photosensitive layer, an exposing portion 16 is formed by the condensed light.

FIG. 4 is a view showing a state in which light is condensed by vertical light generated at the center of each lens of a general convex lens.

Through the curved surfaces of the respective lenses of the convex lenticular lens, the light received from the upper portion is condensed in a form corresponding to the curvature and transmitted to the lower portion.

At this time, the light irradiated near the central part of each lens constituting the convex lenticular is almost vertically downward in a state in which the refraction action is extremely fine.

In the curved portion of each lens constituting the convex lenticular, the light is refracted at a certain angle at a certain angle, and then the light is converged by being lowered to the lower portion.

The farther away from the center of each lens, the greater the angle of refraction becomes.

In the present invention, the convex lenticule is defined as a convex lenticule consisting of only the area near the center of each lens of the convex tentacle.

In the present invention, the light irradiated to the vertical light lenticular is almost vertically downward.

In this case, of course, there is no light concentrating action at all.

In the present invention, only the regions near the central portion of each of the convex lenticular lenses called the vertical optical lenticular lens are cut out, and only the convex lenticular lens can be described as a convex lenticular lens.

The vertical light Lens Tucker functions to concentrate the light radiated from the upper portion almost vertically and transmit it to the lower portion.

In the present invention, the central region of each of the convex lenticular lenses does not exactly mean the central portion of the lens but is defined as including a region of the right and left small regions around the center of the lens.

The light received from the light source 17 located at the upper portion in the left and right constant range regions 18 is condensed in a substantially vertical direction and irradiated to the lower portion centering on the center of the respective convex lenticular lenses.

In other words, in the region 18 of the left and right sides of the center of the convex lenticular lens, the refraction of light is minimized in each lens of the convex lenticular lens. In this region, It is condensed and irradiated.

In the present invention, the light is condensed only in the vertical direction through the region near the central portion of each lens of the convex lenticule, which is defined as vertical light.

The vertical light defined in the present invention means almost vertical.

The shape of the convex lenticule used in the linear light source device of the present invention does not mean only the vertical lenticulacular that only collects the area near the center of each lens of the convex lenticular.

In other words, it is possible to use various types of convex lenticules, but for the efficiency part, the vertical lenticular is the most efficient.

The present invention can use various types of boro-tentilicurates.

In that case, the efficiency of the optical circulator generating apparatus may decrease according to each mode, and these also belong to the scope of the present invention.

If a photosensitive layer is disposed under the convex portion of the convex lens and the light is irradiated through a linear light source including a vertical optical lenticular, an exposure portion is formed in the exposure layer 20 by the vertical light. The exposure unit at this time is referred to as a vertical light exposure unit 19 in the present invention.

A convex lenticule is defined as a vertical lenticule in the present invention in which the light emitted from the light source 17 is condensed in a direction substantially perpendicular to the lower surface by a minimum refraction action.

Also, in the convex lenticule, the area of each lenticule lens of the convex lenticule is defined as the vertical light area 18 of the lenticule, in which the light is condensed in the substantially vertical direction with respect to the lower plane due to the minimum refraction action .

Therefore, the area 18 of a small constant range on the left and right sides of the center of the respective lenticular lenses becomes the vertical light area of the lenticular lens.

Fig. 5 is an explanatory view for explaining the configuration of the vertical optical convex tentacle.

The vertical optical lenticular according to the present invention can be configured in various embodiments.

5 is a convex lenticular formed by connecting only the vertical light region 21 of each convex lenticular lens. This is the most typical vertical lenticular type.

The vertical light lens of the present invention is characterized in that the light of the light source located at the upper portion is condensed and is transmitted almost vertically to the lower portion.

The vertical light Lenticular lens of this embodiment can be manufactured mechanically by forming a small constant range shape on the left and right sides of the central portion of each lenticular lens, and can be manufactured by various methods such as laser machining.

As another method, a vertical lenticular lens can be manufactured by making a small amount of lenses, then copying and connecting them.

The pitch of the vertical light lenticule is inevitably smaller than the pitch of a typical convex lenticular.

This is because the lenticular lens is constituted only by the region near the central portion of each lens of the common convex lens.

In the present invention, it is preferable that the pitch of the vertical light lenticular is set to a very small pitch with a size of several tens of microns.

6 is an explanatory diagram illustrating a vertical light lenticule that implements vertical light through a lens shield to a convex lenticular.

In this embodiment, the opaque shielding material 24 is filled in the portions of the respective convex lenticular lenses except for the vertical light region 25 to shield light from passing therethrough.

That is, opaque shields are formed in regions other than the vertical light region of each lenticular lens, thereby constituting a vertical light lenticular.

If the photosensitive layer is placed under the vertical light cantilever, the irradiated light is formed in the photosensitive layer 27 through the vertical light region 25 of each lenticular lens.

FIG. 7 is an explanatory view for explaining a vertical light lenticule that implements vertical light through a light transmission slitter to a convex lenticular.

At the bottom of the convex lenticular, a light transmitting slit is formed. The light transmitting slit is formed at the lower part of the central portion of each convex lenticular lens 29.

The light transmitting slit may have a long groove or a transparent portion along the longitudinal direction of each lenticular lens.

And the light transmitting slit is supported and formed through the slit support 30.

The light to be irradiated is condensed through each lens 29 of the convex lenticular and the condensed light passes through only the central portion of the condensed light through the light transmitting slit formed in the slit support 30.

If the photosensitive layer is placed under the light transmitting slit, the collected condensed light is irradiated to the photosensitive layer 31 coated with the photosensitive material to form the exposed portion 33.

In another embodiment of the present invention, the lens shield of the Lenticular lens shown in FIG. 6 and the light transmitting slit of the Lenticular lens shown in FIG. 7 are simultaneously formed in a lenticular.

In the present invention, when a convex lenticular lens having only a vertical light region includes at least one lens, it is referred to as a vertical lenticular lens.

In general, many lenses called Lenticular lenses are configured to have the same cross section in the longitudinal direction.

In the present invention, if the number of lenses of the lenticular lens is at least one, it is referred to as lenticular.

Therefore, it is a matter of course that the present invention also encompasses Lenticular lenses in which the number of lenticular lenses is one.

However, the larger the number of the convex lenticular lenses having the vertical light region, the shorter the exposure time becomes.

In addition, in all the embodiments of the present invention, the Fresnel lens can be placed on the upper portion of the lenticular to induce more efficient utilization of light. This also belongs to the embodiment of the present invention.

The concept of the optical circulator generating apparatus of the present invention is so important. The present invention is characterized in that the optical circulator generating device comprises a light source and a convex tentacle, and the light source and the convex tentacle are fixed without being relatively moved.

According to still another embodiment of the present invention, there is provided a linear light source generating apparatus including a light source and a lenticule combination, wherein the light source and the lenticule combination are fixed without being relatively moved. The constitution thereof will be described later.

The light sources in the present invention are various.

It is natural that LEDs and laser light sources as well as all existing types of illuminants are included.

The light source used in the present invention may be constituted by a plurality of point light sources, or may be configured in the form of a linear light source or a surface light source.

It is preferable that the light source is configured to be uniformly irradiated to the entire upper surface of the convex lenticule or to the entire upper surface area of the lenticure combination.

In the present invention, when the light emitted from the light source is irradiated onto the film through the lenticular, the light irradiated on the film appears as a plurality of line-shaped lights.

That is, the number of lines corresponding to the number of lenticular lenses constituting the lenticular is irradiated to the film.

In order to uniformly irradiate the light irradiated onto the above-mentioned line over the large-area film, it is necessary to relatively transfer the light source device to the film.

Accordingly, the present invention may be configured so that the optical circulator generating apparatus used in the present invention includes a transfer means for transferring the optical pulse source generator.

In order to allow the film and the circular light source generating device to move without friction, the film and the circular light source generating device are configured to be spaced apart from each other by a predetermined distance.

The present invention can form a large-area exposed portion through relative movement between the linear light source generating device and the film.

The concentrator generating device is located at the top of the film in the exposure machine. Generally, the optical source generator is slightly spaced from the film so that the optical source generator and the film can be moved relative to each other.

However, in the case of fixing the light source device, the substrate structure formed at the lower portion may be moved. The transfer of the present invention is satisfactory if either the source of light source or the substrate structure is movable.

Since the light source device is moved in the left-right direction or the back-and-forth direction, the entire light-sensitive portion can be exposed in a short period of time.

The present invention makes it possible to perform a rapid exposure work on a wide workpiece. The linear light source device of the present invention can be transported in a scanning manner on a film to perform a rapid operation.

Even in the case of a substrate in which a photosensitive material is thinly coated on a sheet and rolled up in a roll shape, it is possible to perform a rapid operation as a scan.

However, in a special case, the above-mentioned light source generating device can be configured to be able to proceed without relative movement with the film.

In the present invention, as a specific embodiment of the conveyance means of the concentrator, it is possible to constitute the rail portion and the driving portion in the concentrator generating device.

The driving portion is composed of a driving motor having a driving gear, and a lever having a driving gear engaged with the rail portion may be formed.

As described above, according to the present invention, by using the condensing function of Lenticular, it is possible to perform a clear exposure even if the thickness of the photosensitive material is several tens of microns or more, and it is possible to perform a clear exposure even if the pitch of the circuit is several microns There is no defect and it is possible to construct a clear circuit.

In the present invention, light radiated by vertical light can maximally prevent scattering and reflection of light, so that it is possible to provide an ideal, clean exposure.

Hereinafter, another embodiment of the present invention will be described in which the linear light source generating device is composed of a combination of a light source and a lenticule.

A lenticurea combination is defined as a lenticurea consisting of at least two lenticulars arranged vertically.

The most representative embodiment of the lenticurea combination is formed by laminating at least one concave lenticular on the lower part of the convex lenticular.

By using a combination of a convex lenticular and a concave lenticular, it is possible to produce a concentric circle generating device capable of more precise working.

When a luminous source generating device including a combination of a light source and a lenticule is used, condensed line-shaped light having an extremely minute width in units of nano can be produced.

When a light source is irradiated to a substrate coated with a photosensitive material by using a luminous source generating device including a combination of a light source and a lenticure, an extremely fine line-shaped light can be detected.

It is one of the important means of seeing a stereoscopic image called a bolt lenchy which we commonly know.

The lens is made of a transparent material called a convex tentacle, and one surface is constituted by a plane, and the other surface is constituted by a series of lenses each having a columnar shape.

The definition of the concave lenticular used in the present invention is as follows.

It is defined as being made of a transparent material called Oomori-Len Tikyu, with one side being made up of a plane, and the other side being made up of a continuous array of lenses with a long oval shape.

8 is a perspective view of a general concave lenticular.

The concave lens unit 34 is formed with concave lenses in the form of bones at positions corresponding to the respective convex lenses of the columnar shape of the convex lenticular.

When the convex lenticule and the concave lenticule are appropriately arranged and the light is irradiated to the combined lenticule combination, the light is condensed through the convex lenticule, and the condensed light is divided into a plurality of minute lights through the concave lenticule .

Figures 9a, 9b, 9c are examples of lenticular assemblies.

FIG. 9A shows a concave lenticule arranged at the lower part of the convex lenticular.

Each of the columnar lenses constituting the convex cantilever 35 functions as a convex lens and has a projecting portion with a gentle curvature.

The central portion of the convex portion of the gentle curvature of the convex lenticular is referred to as an acid in the present invention.

Mountain boundaries are formed at the boundary between the neighboring mountains and mountains of the convex lenticule.

Each of the bony lenses constituting the concave lenticular layer 36 functions as a concave lens and has a concave portion with a gentle curvature.

The central portion of the concave portion of the gentle curvature of the concave lenticular is referred to as a bone in the present invention.

In the border of the goal and the goal of the lenticulea, a goal boundary line is formed.

FIG. 9B shows the arrangement of four concave lenticules at the bottom of the convex lenticular.

The most typical form for arranging the concave lenticule is to arrange a plurality of concave lenticulars in the same form under the convex lenticule.

9B shows that the arrangement of the four concave lenticules 38, 39, 40 and 41 can be arranged in various forms below the one convex lenticule 37. FIG.

You can make various effects by arranging the inverted lenticule.

FIG. 9C shows an embodiment in which a concave lenticular is arranged in the lower part of the convex lenticular and a convex lenticular is formed in the lower part of the convex lenticule.

Figures 9a, 9b and 9c illustrate various embodiments of lenticular assemblies. It is a matter of course that the arrangement of the lenticule assembly can be arranged in an extremely wide variety of forms.

A plurality of convex lenticules may be arranged or a plurality of concave lenticulars may be arranged, or at least one convex lenticule and at least one concave lenticule may be arranged to use a lenticurea combination.

The lenticular assembly according to the present invention can arrange the convex lenticular and the concave lenticular in various shapes, and different effects can be produced according to the order and the method of the arrangement.

In arranging such a plurality of lenticulars, the arrangement of the upper lenticule and the lower lenticure greatly affects the function of the exposure system.

The central portion of each lens of the upper lenticulars and the central portion of each lens of the lower lenticulars may be aligned in the vertical direction in order to exert various functions. In some cases, each of the lower lenticulars The central portion of the lens of the upper lenticular lens is spaced apart from the central portion of the respective lenses of the upper lenticular by a necessary distance.

As an embodiment, a case where a convex tentacle is formed on the upper portion and a concave tentacle is formed on the lower side will be described.

When the central portion of each lens of the convex tentacle and the center portion of each lens of the concave lens are slightly spaced apart, the light on the line focused through the convex tentacle is reflected by the lower concave lens, It is divided into light on the line.

It carries out the splitting function of the circle light circle called "Otomoren Tikyu". Considering this action, the arrangement of the lenticule assembly is appropriately designed as necessary.

Hereinafter, a description will be given of how the light condensed in a line shape by the convex lenticule is divided by the concave lenticule.

This embodiment is an explanation of the case where the convex lenticular is placed on the upper side and the concave lenticular is arranged on the lower side.

The light irradiated from the light source is transmitted to the concave lenticule of the lower portion by the condensed line-shaped light of the same number as the number of lines of the lenticurea lenses by the respective lenses of the convex lenticular.

The light on the line focused by the convex lenticular is again split by the respective lenses of the concave lenticule at the bottom.

The light on the same number of converged lines as the number of the lenses of the convex lenticular is divided into the light on the lines much more than the light on the lines converged by the concave lenticule by the concave lenticule located at the bottom.

Shaped light that is condensed by the number of the respective lenses of the convex tentacle and divides the line-shaped light condensed by the convex tentacle, which is concave lenticule arranged at the lower part of the convex tentacle, .

The number of the line-shaped lights converged by the convex tentacle is divided into line-shaped lights increased in number by a number of times through the concave lenticule at the bottom.

At this time, the number of lines converged by the concave lenticular is increased by a factor of several, and the width of the line-shaped light converged at the same time is greatly reduced, thereby enabling finer exposure work.

The effect of this division of light depends on the composition and arrangement of the lenticule combination. The characteristics of the light that is condensed and divided by the Lenticure combination

First, the linewidth is tapered

Second, the number of lines of light is significantly increased.

The light thus condensed and divided by the Lenticular structure allows ultrafine exposure.

In the present invention, the source of light produced through the combination of lenticurea can be made into a line-shaped light having a width of several tens of nanometers to several hundreds of nanometers.

The lenticular combination of the present invention provides an advantage that the light to be irradiated can be condensed and divided into an extremely fine line-shaped vertical light.

In the case where the luminous source generating apparatus manufactured by the combination of Lenticure is also required to be continuously operated, the luminous source generating apparatus must be moved relative to the film.

When the light source generating device is fixed, the substrate structure may be moved.

The light source generating device is configured to relatively move with respect to the film structure and the substrate structure under the film, so that the exposure of a large area can be performed promptly.

However, as an apparatus for carrying out the work more precisely in the case of the exposure of a narrow area or in the stationary state, the above-mentioned optical source apparatus is allowed to perform the exposure work while fixing the film and the substrate structure under the film And this is also a part of the present invention.

10 is a configuration diagram of a convex lenticular with a shielding portion.

In the present invention, it is possible to make a ray source of several tens to hundreds of nanometers through a lenticule combination.

However, in this case, the distance between the source of light and the neighboring source of light is too small, so that it can act as if the source of light is attached.

In order to prevent these adjacent ray source from sticking to each other, a light shielding portion 47 is formed between the convex lenticular lenses 46 as shown in Fig.

A constant gap is formed between the convex lenticular lens and the adjacent convex lenticular lens.

In the present invention, a lenticule interval is defined as a lenticule lens having a region that prevents light from entering between a lenticular lens and a neighboring lenticular lens, regardless of whether the lens is a convex lenticular lens or a concave lenticular lens.

The light-shielding portion 47 is configured to prevent light from entering the lenticular gap portion.

The light shielding portion may print the gap portion by a printing method, or may produce a pattern film having only an opaque portion in the gap portion, and position the pattern film on the convex portion of the convex portion.

In the present invention, the lenticurea is defined as a convex lenticular 45 having a light shielding portion.

Of course, the bottom surface 48 of the convex cantilever with the shielding portion is configured as a flat surface.

11 is a configuration diagram of a concave lenticular with a shielding portion.

The concave lenticular layer 49 having the light shielding portion 50 corresponds to the convex lenticular with the light shielding portion of Fig.

The light shielding portion 50 is positioned between the recessed portion 51 and the recessed portion. Of course, the bottom surface 52 of the concave lenticular with the shielding portion is configured as a flat surface.

Figs. 12 and 13 show still another embodiment of a lenticular assembly provided with a light shielding portion.

Fig. 12 shows a lenticular assembly having a light shielding portion by laminating concave lenticules 54,55 and 56 having a light shielding portion and a convex lenticule 53 having a light shielding portion.

13 shows a lenticular assembly having a light shielding portion by laminating convex lenticular lenses 57, 59 and 61 having light shielding portions and concave lenticules 58 and 60 having light shielding portions.

When a lenticure assembly having such a light shielding portion is used, it is possible to form a linear light source having a width of several tens of nanometers. However, there is an advantage that the linear light source and the linear light source can be formed with a considerable distance.

These advantages provide the advantage of achieving even finer pitch line widths.

A lenticurea combination having a light shielding part can be formed by combining a convex lenticule having a light shielding part and a concave lenticule having a light shielding part in various forms.

FIGS. 14 and 15 are explanatory diagrams of an example of an exposure apparatus having an upper structure and a lower structure.

Fig. 14 shows an embodiment of an exposure apparatus made up of an upper structure and a lower structure.

This is because the elastic body 73 having elasticity such as a sponge is composed of at least one press roller 54, at least one or more auxiliary rollers 62, 64 and 65, and a transparent and opaque part, , A pattern film (63) which becomes a light source, and a luminous source generating device (75);

A substrate 70 on which a thin photosensitive layer 72 is uniformly applied, a table 69 for positioning the substrate, and a contact means 68 for bringing the substrate and the table into close contact with each other. .

When the substrate is a nonconductive substrate, a conductive layer is first formed by sputtering the surface of the substrate 70 with a conductive metal in order to form the conductive layer 71 on the substrate 70. In some cases, the sputtering layer is plated again to increase the thickness of the conductive layer 71.

In this embodiment, the upper structure and the lower structure are configured to move relative to each other. That is, if the upper structure is fixed, the lower structure can be relatively moved, and if the lower structure is fixed, the upper structure can be relatively moved.

The pattern film 63 may be configured to have an endless track so as to rotate in a clockwise direction when counterclockwise or counterclockwise as shown in the drawing.

The pattern film is brought into close contact with the substrate by a pressing roller (74).

That is, the pattern film is pressed onto the substrate 70 coated with the photosensitive material 72, and the photosensitive material applied to the pattern film and the substrate are brought into contact with each other by the pressing roller so as not to slide therebetween.

The substrate and the table of the lower structure are supported by the contact means. The tightening means uses a vacuum pressure generated by a vacuum pumper formed inside the table.

In the present embodiment, it is preferable that the pattern film 63 is formed in the form of an infinite orbit through which the start portion and the end portion are connected.

When the pattern film is formed in the form of an infinite orbit, the luminous source generating device 75 is present inside the infinite orbit 53. Even when the upper structure is made in the form of an infinite orbit, the upper structure can be configured to be vertically spaced relative to the lower structure so that the substrate coated with the photosensitive material can be replaced.

The substrate 70 is preferably made of a flexible substrate having a thin photosensitive layer 72 uniformly coated thereon.

At this time, the substrate can be wound around the table 69 on both sides of the reel, so that a continuous exposure operation can be performed.

That is, if the patterned film is formed into an endless track, it is possible to provide a great advantage that a substrate can be wound around a reel to perform a continuous operation.

In this embodiment, it is preferable that the substrate includes a metal layer 71 on which a conductive metal is sputtered on the polyimide film 70, and the photosensitive layer 72 is uniformly coated on the metal layer.

In the present invention, a light source device formed by lenticurea is defined as an optical source device.

In the present embodiment, when the pattern film is not made into an infinite orbit, it is necessary to move the upper structure when a certain range of exposure is performed.

In order to explain this structure, the position where the upper structure starts to be exposed with the lower structure in close contact with the lower structure is defined as an initial position.

When the pattern film is not formed by the infinite orbit, after the exposure operation in a certain range is performed, that is, after a certain exposure operation is performed from the initial position, the upper structure and the lower structure are moved apart from each other And return to the initial position.

FIG. 15 and FIG. 15 are perspective views of an exposure apparatus having an upper structure and a lower structure of FIG. 14;

In this embodiment of the present exposure apparatus, the pattern film constituted by the transparent film 87 and the non-transparent portion 76 is installed in the form of an infinite orbit. In the endless track formed by the pattern film, .

The embodiment of the exposure machine includes at least one pressing roller 84 supported by an elastic body 83, at least one or more auxiliary rollers 79, 78, 77, a pattern film constituted of transparent and opaque portions, An upper structure including an optical source generator (86);

A substrate 80 on which a thin photosensitive layer 81 is uniformly applied, a table on which the substrate is placed, and an adhesion means for tightly adhering the substrate and the table.

And the upper structure is integrally and rigidly coupled by the support frames 85 on both sides.

16 is an explanatory diagram of a linear light source generating device having a lenticule assembly constituted in the exposure machine of the present invention.

The luminous source generating device 91 is integrally formed with the frame 90 by the lighting means 88 and the lenticular combination 89. [

Fig. 17 is an embodiment of an inventive exposure apparatus made up of another type of upper structure and lower structure.

This is another embodiment of the exposure apparatus of the present invention,

At least one pressing roller (97) supported by an elastic body, at least one auxiliary roller (100,101,102,103)

An upper structure including a concentrator generating device 98;

A substrate (93) uniformly coated with a thin photosensitive layer (104), a table (95) for positioning the substrate, and a contact means (94) for bringing the substrate and the table in close contact with each other;

And a pattern film 96 composed of transparent and opaque portions is placed on the photosensitive layer of the lower structure.

The above-mentioned pressing roller and the linear light source generating device make all the movements up and down or left and right the same.

In this embodiment, after the upper structure is in close contact with the lower structure at the initial position, the upper structure moves away from the lower structure and returns to the initial position.

A metal layer sputtered with a conductive metal is formed on the substrate 93 in order to impart conductivity, a thin plating layer 92 made of metal such as copper is formed on the sputtered metal layer, and a thin The photosensitive layer 104 is constituted.

The lenticurea combination used in the apparatus for generating a source of light to be used in the present invention is characterized in that a combination of a borontolite crystal that receives the light generated by the light source for the first time and at least one or more concave lenticulars do.

Since several lenticulars are laminated, there may be spaces or gaps between the lenticulars.

It is desirable to remove such a space or a clearance since it may deform the optical properties.

In order to remove the gap, it is preferable that the lenticule assembly is laminated in a vacuum state when the lenticular assembly is laminated.

It is preferable that a bonding portion for laminating the lenticular assembly in a vacuum state and sealing the edge portion by using an ultrasonic wave or an ultraviolet resin is preferably provided.

It is a matter of course that the bonding portion of the lenticular bonded body used in the generator of the present invention can be bonded by ultrasonic waves, bonded with a Ubic resin, or by various other methods.

It is preferable that the lenticure combination used in the generator of the present invention used in the present invention is held in a flat plate.

It is preferable to use a glass plate to maintain such a flat surface.

The glass plate is used to support the surface of the convex lenticular and the lenticule laminated thereafter can be automatically held on the flat surface due to the plane of the glass plate.

It will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It is not.

1: Exposure machine 2: Optical source generator
3: source of light source generating means 4: light source
5: Bolectic Cure, Lenticurea combination
6: Film 7: Photosensitive material
8: Plate 9: Substrate structure
11: Lenticular lens
34: Concerto Lenticulare
73: elastomer
74: Compression roller
62, 64, 65:
63: pattern film
68:
69: Table
70: substrate
71: conductive layer
72: Photosensitive layer
75: Optical source generator

Claims (8)

In an exposure machine equipped with a luminous source generating device,
Wherein the linear light source device comprises a combination of a light source and a lenticule, and the light source and the lenticure combination do not move relative to each other. The method according to claim 1,
Wherein the combination of lenticurea is formed by combining at least one or more of at least one of borontenticura and at least one or more of concurrent lenticulars. In a lenticurea combination used for generating a source of light,
Characterized in that the first light receiving unit receives the light generated by the light source and at least one or more concave lenticules are combined in the lower part of the convex lenticular. The lenticular assembly according to claim 3,
Wherein a bonding portion is provided at an edge portion of the lenticure combination. ≪ RTI ID = 0.0 > 21. < / RTI > The lenticular assembly according to claim 3,
Characterized in that a vacuum state is established in the lenticular bonding portion so that a gap is not formed in the lamination portion where lenticurea and lenticurea are laminated. The method of claim 3,
Characterized in that said convex lenticular is supported flat on a glass plate. ≪ RTI ID = 0.0 > 11. < / RTI > 7. The method according to any one of claims 3 to 6,
Wherein the bonding portion is bonded by ultrasonic waves. ≪ RTI ID = 0.0 > 11. < / RTI > 7. The method according to any one of claims 3 to 6,
Wherein the bonding portion is bonded with a UV resin. ≪ RTI ID = 0.0 > 11. < / RTI >

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