KR20140051038A - Jig for flexible printed circuit board used for plasma sputtering - Google Patents

Abstract

The present invention relates to a jig for a flexible PCB used for sputtering. Especially, the jig for a flexible PCB used for sputtering fixes a flexible PCB to be sputtered in a process of providing an electromagnetic and electrostatic shielding structure on the flexible PCB circuit, which prevents radiation and noise by forming a metal thin film such as silver and/or nickel on an FBCB surface using a plasma sputtering device, providing excellent conductivity and grounding performance, and blocking electromagnetic waves and static electricity.

Description

[0001] The present invention relates to a flexible printed circuit board used for plasma sputtering,

The present invention relates to a flexible jig for sputtering. More specifically, the present invention relates to a flexible jig for jig for flexible sputtering, A flexible PCB cost jig for sputtering which fixes a flexible PCB to be sputtered in a process of providing a structure for shielding electromagnetic waves and static electricity on a flexible PCB circuit for solving radiation and noise generation by shielding static electricity will be.

Generally, a printed circuit board is connected to a printed circuit board according to a circuit design of an electric wiring, and is often referred to as a neural circuit of an electronic product.

Various electronic devices such as LCD, OLED, PDP module using various PCBs, FPCB, RFPCB, COF, TCP, and various notebook computers, PDAs, small video cameras, compact cameras, electronic notebooks, and mobile phones, OLED, PDP module, and electronic device by miniaturization, thinning, high function and design diversification due to development of processing technology, space optimization design technology, and technology enabling high density and highly integrated component mounting.

A structure of a commonly known rigid flexible printed circuit board (RFPCB) using such a technique will be described. A first rigid substrate and a second rigid substrate are formed on one side and the other side, and the first rigid substrate and the second rigid substrate are connected to each other And a flexible substrate portion, which is a connection portion for connection.

However, due to the miniaturization, diversification and thinning of the LCD, OLED, PDP module and electronic device, it is difficult to be solely generated in LCD, OLED, PDP module and electronic device, or to penetrate LCD, OLED, PDP module and electronic device Otherwise, electromagnetic waves and static electricity flow along the connected circuit lines, causing radiation and noise, or causing various damages to electronic devices, resulting in defects.

In order to impart conductivity to the PCB, FPCB, RFPCB, COF, TCP, and the like, and to shield electromagnetic waves and static electricity, a copper alloy layer patterned with a predetermined conductive circuit is formed on upper and lower sides of a polyimide layer, And a cover layer made of an insulating film is formed on the upper and lower sides of the copper foil layer to protect the surface circuit. The flexible printed circuit board according to claim 1, And an overcoat is formed on the upper and lower sides of the metal paste to prevent the electromagnetic wave and the static electricity.

A copper foil layer patterned by a predetermined conductive circuit is formed on the upper and lower sides of the polyimide layer formed of the insulating film. In order to protect the surface circuit on the upper and lower sides of the copper foil layer, Wherein a pair of conductive adhesive tapes each having a rectangular cross section is attached to the upper and lower sides of both ends of the copper foil layer with a predetermined space therebetween, On the upper and lower surfaces of the adhesive tape,

The copper foil layer and the coverlay are sequentially laminated so as to shield electromagnetic waves and static electricity.

In order to impart the above conductivity, a through hole is formed in the flexible substrate portion, and the through hole is plated to impart conductivity to the flexible substrate portion.

In addition, a connector is formed on upper and lower sides of a TCP or COF substrate having a surface formed of an insulating film, and a chip is formed in a central portion of the substrate. A metal conductive tape is attached to the front surface of the substrate, Shielding.

A copper foil layer patterned by a predetermined conductive circuit is formed on the upper and lower sides of the polyimide layer formed of the insulating film. In order to protect the surface circuit on the upper and lower sides of the copper foil layer, And a cover sheet is formed on the flexible substrate portion, wherein a metal conductive tape is attached to the upper side and the lower side of the coverlay to shield electromagnetic waves and static electricity.

However, this also means that when the electronic device is repeatedly used, the particles, the metal conductive tape, and the insulating film may fall, resulting in deterioration or deterioration of other parts or cracks, resulting in lower flexibility of the product Causing a lot of defects and also failing to effectively shield electromagnetic waves and static electricity, resulting in radiation and noise.

In order to solve the conventional problems, the present invention forms a metal thin film such as silver or / and nickel by using a plasma sputtering apparatus on the surface of an FPCB to provide excellent conductivity and grounding performance to shield electromagnetic waves and static electricity, In a process of providing a structure for shielding electromagnetic waves and static electricity on a flexible PCB circuit for solving the problem of occurrence of a sparkling phenomenon.

In order to achieve the above object, a jig base 20 is positioned at the center of the jig, and a flex sub PCB 30 is provided on the upper and lower surfaces of the jig base 20, And a masking jig 10 on which a vapor deposition opening 12 is formed to deposit a sputtering deposition material on the flexible PCB 30 is formed on each of the flexible substrates 30,

The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed by being inserted into the holes 23 formed in the masking jig 10,

The double-sided jig combined body including the masking jig 10, the flexible PCB 30 and the jig base 20 is inserted and fixed to the carrier 40 for fixing the jig assembling body 1,

The jig assembly 1 is locked by the locking device 50 which is mounted on the carrier 40 and then closed so as to be fitted in the guide bar 42 of the carrier so as to lock the carrier 40 With features,

The jig assembling body 1 held in the carrier 40 is configured to be pressed up and down by the elastic module 45 configured to include a coil spring when the carrier 40 is locked With features,

A plurality of moving bars 44 except the fixed bars fixed to the left and right sides of the carrier 40 can be moved left and right along the guide bars 42,

As a flexible cross-section type jig for sputtering,

A jig base 20 is located at the bottom of the jig base 20. A plasma subframe 30 to be subjected to plasma sputtering is disposed on the jig base 20. A sputter deposition material is deposited on the flexible subfibers 30, And a masking jig (10) having a vapor deposition opening (12) opened to be deposited on a vapor deposition surface (32) of the substrate (30)

A plurality of shafts 22 for adjusting the mating position of the masking jig 10, the flexible PCB 30 and the jig base 20 are mounted on the masking jig 10, the flexible PCB 30, the jig base 20, And the engagement position of the masking jig 10, the flexible PCB 30, and the jig base 20 is fixed by being inserted into the formed holes 23,

The cross-sectional jig provided with the flexible PCB 30 for the plasma sputtering is inserted into the carrier 41 for fixing the jig,

Characterized in that the carrier (41) on which the cross-sectional jig is mounted is provided with a locking device (51) for fixing the carrier (41) in a closed state,

A plurality of elastic modules 45 are formed on the fixed bar and the movable bar 44 of the carrier 41,

The elastic module 45 is configured to include a coil spring and applies an elastic force to the jig in a state where the carrier 41 is closed so that the jig is fixed to the carrier 41 in tight contact.

The carrier 41 is provided with a hinge 60 to hold the fixing bar 44 in a state where the fixing bar 44 is opened in a state that the carrier 41 is opened and suddenly prevent the fixing bar 44 from being closed. Lt; / RTI &

A plurality of moving bars 44 except the fixed bars fixed to the left and right sides of the carrier 41 can be moved laterally along the guide bars 42,

As a flexible PC cost jig for sputtering,

In the carrier 140 on which the PC jig is mounted, a cylindrical rotation projection 146 is formed on each of the right and left sides,

The carrier 140 having the cylindrical rotation protrusions 146 on its left and right sides is characterized in that it is engaged with the rotation support 142 in such a manner that the rotation protrusion 146 is fitted into the hole 148 of the rotation support 142 Lt; / RTI &

The carrier 140 on which the jig is mounted is conveyed on the conveyor 150. In the work process chamber in which the conveyor 150 is conveyed, And then,

When the mounting process of the jig is completed with respect to the carrier 140 on one side, the carrier 140 is rotated by the rotation support table 142 to mount the jig on the opposite side of the carrier 140 And then,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

The jig is closed by a cover constituted by the fixing bar 44 of the carrier and is locked by the locking device 70,

The locking device 70 is constituted by a bar 75 that is locked in the inside and a coil spring connected to the bar 75. When the pressing switch 74 is pressed, the locking bar 75 is protruded by a coil spring.

The locking device 70 is configured to move left and right along a rail groove 72 formed in a groove in the carrier 150,

A connecting hinge 80 connected to the guide bar 42 is provided on the opposite side of the locking device 70. The connecting hinge 80 is disposed on the carrier 150 along the rail groove 82, , And the movable member

As a carrier on which a flexible PC cost jig for sputtering is mounted,

The jig is closed by a cover composed of a fixing bar (44) of the carrier and locked by a locking device (80)

The locking part (82) of the locking device (80) is configured to be rotatable,

The locking device 80 is configured to move left and right along a rail groove 72 formed as a groove in the carrier 150,

A connecting hinge 80 connected to the guide bar 42 is provided on the opposite side of the locking device 80. The connecting hinge 80 is disposed on the carrier 150 along the rail groove 82, , And the movable member

As a carrier on which a flexible PC cost jig for sputtering is mounted,

A plurality of elastic modules 45 are installed on the fixed bar or the movable bar 44 of the carrier,

The elastic module is composed of a coil spring 46 having a helical shape and a fixing bolt 47 for fixing the coil spring 46 to the fixed bar or the movable bar 44,

Characterized in that the coil spring (46) of the elastic module (45) presses the portion of the masking jig (10) of the jig in a state in which the fixing bar or the transfer bar (44)

As a carrier on which a flexible PC cost jig for sputtering is mounted,

A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,

The elastic module 45 includes a fixed shaft 49 fitted with a coil spring 48 and the coil spring 48 and penetrating through the through hole 92 of the fixed bar or the movable bar 44, (90) coupled to an end of the fixed shaft (49) to prevent the fixed shaft (49) from being detached from the fixed bar or the movable bar (44).

The bottom surface of the fixing shaft 49 of the elastic module 45 presses the portion of the masking jig 10 of the jig while the fixing bar or the transfer bar 44 is closed, 44 is characterized in that a portion of the stationary shaft 49 coupled with the ears 90 protrudes above the upper portion of the fixed bar or the transfer bar 44,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,

The elastic module 94 includes a coil spring 96 and a coil spring 96. The spring ball 97 receives the spring force of the coil spring 96 and the coil spring 96. The coil spring 96 and the spring ball 97, (95). In this case,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,

The elastic module 110 includes a rod 103 receiving a resilient force by a coil spring 102 and a coil spring 102 and a body 101 configured to prevent the coil spring 103 and the rod 103 from being stored, ≪ / RTI >

The rod 103 of the elastic module 110 presses the portion of the masking jig 10 of the jig in a state where the fixing bar or the transfer bar 44 is closed,

As a flexible PC cost jig for sputtering,

A jig base 20 is located at the bottom of the jig base 20. A flex sub PCB 30 is disposed on the upper surface of the jig base 20 to be subjected to plasma sputtering for silver and / And a masking jig 10 on which a vapor deposition opening 12 is formed so as to be sputtered so that a plasma sputter deposition material is deposited on the flexible PCB 30,

The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, And the fixing position of the masking jig 10, the flexible PCB 30, and the jig base 20 is fixed,

As a flexible PC cost jig for sputtering,

A jig base 20 is located at the center of the jig base 20 and a flex sub PCB 30 is disposed on the top and bottom surfaces of the jig base 20 to form sputtering lamination layers. And a masking jig (10) having a vapor deposition opening (12) opened to be sputtered to be deposited on the flexible PCB (30)

The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed by being inserted into the holes 23 formed in the masking jig 10,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is constituted by a square which is open and whose edge portion is gently curved or circular,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is constituted by a rectangle which is opened and whose edge portion is gently curved or circular,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is constituted by a square in which the inside is not opened but the corner portion is formed into a gently curved or circular shape,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is formed of a rectangular shape in which the inside is not opened but the corner portion is gently curved or circular,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is formed in an open cylindrical shape,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44)

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is constituted by a regular hexagon,

As a carrier on which a flexible PC cost jig for sputtering is mounted,

Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is composed of a regular hexagon,

As a flexible PC cost jig for sputtering,

A jig base 20 is located at the bottom of the jig base 20. A flex sub PCB 30 is disposed on the upper surface of the jig base 20 to be subjected to plasma sputtering for silver and / And a masking jig 10 on which a vapor deposition opening 12 is formed so as to be sputtered so that a plasma sputter deposition material is deposited on the flexible PCB 30,

A plurality of spring bar fixing bolts 202 for guiding and adjusting the engagement positions of the masking jig 10, the flexible PCB 30 and the jig base 20 are fixed to the masking jig 10 and the jig base 20 And the engagement position of the masking jig 10, the flexible PCB 30, and the jig base 20 is guided,

Wherein the plate spring bar 200 is aligned with four peripheral portions of the masking jig 10 and is fitted to the spring bar fixing bolt 202,

The plate spring bar 200 is formed with a spring tension portion 204 in the form of a leaf spring so that the plate spring bar 200, the masking jig 10, the flexible PCB 30, The plate spring bar 200 applies a certain elastic force to the masking jig 10, the flexible PCB 30, and the jig base 20 in a state where the plate spring bar 200 is in a state of being opened.

When the end of the spring bar fixing bolt 202 is raised above the locking part 206 of the plate spring bar 200, the plate spring bar 200 is pushed rightward, This narrow portion is fitted in the concave portion 203 of the spring bar fixing bolt 202 so that the plate spring bar 200 is caught by the concave portion 203 of the spring bar fixing bolt 202 With features,

A carrier on which jig assemblies are placed on both sides;

On both sides of the carrier, a movable bar for opening and closing is provided,

Wherein the movement bar comprises a plurality of fixed bars to which the movement is fixed, and a plurality of guide bars that can be inserted and moved by the fixed bar,

The carrier and the rotation support are connected to each other by a rotation protrusion on the left and right sides so that the carrier can rotate on the rotation support,

The carrier and the rotation support are provided with a push bolt and a lock catch, respectively, so that when the push bolt is locked, the carrier does not rotate in the rotation support,

Wherein a front bar is provided on a front surface of the moving bar and the bar is not opened in a state in which the front bar is caught by a snatch lock provided on the carrier,

An edge assembly block is fixedly installed at one end of the guide bar, and a central assembly block is fixed to a joint portion where the guide bar and the guide bar are connected to each other to connect the guide bars together, Characterized in that the fixing bar is fitted in the opening of the block,

The flexible package cost jig for sputtering is mounted on an upright type conveyor in which the rotary support is vertically fixed, and then an operator fixes the jig assembly to the jig on the carrier.

The operator of the present invention using the flexible PC cost jig for sputtering according to the present invention has a remarkable effect that the process time can be shortened and a large amount of flexible PCB ratio can be mounted on the jig.

It is possible to maximize the work efficiency by increasing the amount of work within the same time by allowing the performer performing the work process to perform the job of mounting the flexible PCB on both sides of the jig moving on the conveyor.

The preferred embodiments, advantages and features of the present invention are described in detail below with reference to the accompanying drawings.

1 is a perspective view of a double-sided type of a flexible PC cost jig for sputtering according to the present invention.
2 is a cross-sectional view of a flexible type cost jig for sputtering according to the present invention.
FIG. 3 is a perspective view of a flexible type cost jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier.
FIG. 4 is a perspective view of a flexible type cost jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier.
FIG. 5 is a perspective view of a flexible PC jig for sputtering according to the present invention in a closed state after a double-sided type is inserted into a carrier.
6 is a perspective view of a flexible jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier and then locked by a locking device.
7 is a side view of a flexible jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier and then locked by a locking device.
8 is an enlarged view of a locking device for a carrier for a double-sided type among the flexible jigs for jigs for sputtering according to the present invention.
FIG. 9 is an enlarged view of a jig contact method in a state where the flexible PC cost jig for sputtering according to the present invention is closed.
10 is a plan view for explaining the operation of the movable bar after the double-sided type of the flexible PC jig for sputtering according to the present invention is inserted into the carrier.
11 is a perspective view of a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention.
12 is a side view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention.
FIG. 13 is a perspective view of a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention inserted into a carrier.
FIG. 14 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier.
FIG. 15 is a side view of a carrier in which a cross-sectional type of a flexible PC jig for sputtering according to the present invention is inserted, and a side view of a hinge used in the carrier.
16 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier and then closed.
17 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier and then locked by a locking device.
18 is an enlarged view of a locking device for a carrier for a cross-sectional type of a flexible PC jig for sputtering according to the present invention.
19 is a plan view for explaining the operation of the movable bar after the end face type of the flexible PC cost jig for sputtering according to the present invention is inserted into the carrier.
20 is a side view illustrating that a flexible PC cost jig and a carrier for sputtering according to the present invention are sputtered in a sputtering chamber.
FIG. 21 is a perspective view showing a state in which a cross-sectional type of flexible Jig for sputtering according to the present invention is mounted on a carrier and is coupled with a rotation support.
FIG. 22 is a perspective view showing a state in which a cross-sectional type of the flexible Jig for sputtering according to the present invention is mounted on a carrier and is engaged with a rotation support.
FIG. 23 is an exploded perspective view of a rotation pin and a fixing table as components for engaging with a rotation support in a state where a cross-sectional type of a flexible Jig for sputtering according to the present invention is mounted on a carrier.
FIG. 24 is a perspective view showing a rotary pin and a fixing table assembled as a component for engaging with a rotation support in a state where a cross-sectional type of flexible Jig for sputtering according to the present invention is mounted on a carrier.
FIG. 25 is a perspective view of a type of flexible jig for sputtering according to the present invention mounted on a carrier after being coupled to a rotary support in a state where the jig is mounted on a carrier. FIG.
FIG. 26 is a perspective view showing a state where a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and engaged with a rotation support, and then the carrier rotates on a conveying conveyor.
FIG. 27 is a perspective view and a side view of a state in which the carrier of the flexible type cost jig for sputtering according to the present invention is mounted on a carrier and is coupled with a rotation support and then rotated by 100 degrees or more on a conveying conveyor.
FIG. 28 is a perspective view of the flexible type cost jig for sputtering according to the present invention before the end surface type is mounted on the carrier, closed by the fixing bar, and locked by the locking device.
29 is a perspective view of a state in which a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by a locking device.
FIG. 30 is a side view of the flexible type cost jig for sputtering according to the present invention before the end surface type is mounted on the carrier, closed by the fixing bar, and locked by the locking device.
31 is a side view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by a locking device.
32 is a plan view for explaining how the locking device is adjusted along the rail groove in a state in which the end face type of the flexible PC jig for sputtering according to the present invention is mounted on the carrier.
33 is a perspective view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by another locking device.
Fig. 34 is a perspective view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier, closed by a fixing bar, and locked by another locking device.
35 is a perspective view illustrating a state in which an elastic module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
36 is a front view of an elastic module mounted on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.
FIG. 37 is a perspective view illustrating a state in which another elastic module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted. FIG.
38 is a front view of another elasticity module installed on a carrier fixing bar on which a flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.
FIG. 39 is a front view illustrating a state in which another elasticity module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
40 is a perspective view of another elastic module installed on a carrier fixing bar on which the flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.
FIG. 41 is a front view illustrating a state in which another elasticity module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
FIG. 42 is a perspective view of another elastic module installed on a carrier fixing bar on which a flexible PC cost jig for sputtering according to the present invention is mounted, before assembling and after assembling. FIG.
FIG. 43 is a perspective view of a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention.
FIG. 44 is a perspective view of a cross-sectional type stack of a flexible PC cost jig for sputtering according to the present invention. FIG.
FIG. 45 is a perspective view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention stacked and fixed.
FIG. 46 is a plan view and a side view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention.
FIG. 47 is a perspective view of a double-sided type laminated structure among flexible Jigs-free jigs for sputtering according to the present invention. FIG.
FIG. 48 is a perspective view of a double-sided type jig for a flexible PC for sputtering according to the present invention, which is stacked and fixed.
FIG. 49 is a plan view and a side view of a double-sided type stacked type flexible jig for sputtering according to the present invention.
50 is a cutaway perspective view and a front view of a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
51 is a cutaway perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
52 is a cutaway perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
53 is a cut-away perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.
54 is a perspective view of a flexible PC cost plate bar type jig for sputtering according to the present invention.
55 is an exploded perspective view of a flexible PC cost plate bar type jig for sputtering according to the present invention.
56 is a perspective view showing a state in which a plate spring bar portion is cut in a perspective view of a flexible type cost plate type jig for sputtering according to the present invention.
57 is a cut-away side view of a plate spring bar, which is one of the components of a flexible PC cost plate type jig for sputtering according to the present invention.
FIG. 58 is an enlarged view of FIG. 56 and FIG. 57A, illustrating a portion of a plate bar type jig fixed by a spring bar fixing bolt. FIG.
59 is an enlarged view of a laminated structure for fixing a plate bar type jig by a spring bar fixing bolt according to the present invention.
60 is a front view of a flexible PC cost plate bar type jig for sputtering according to the present invention.
Fig. 61 is an enlarged view of part A of Fig. 60, illustrating how the plate spring bar is locked by the spring bar fixing bolt.
**************************************************
62 is a perspective view of still another embodiment of a flexible PC cost jig for sputtering according to the present invention.
Fig. 63 is an enlarged perspective view of part A shown in Fig.
Fig. 64 is a perspective view of the flexible bar cost jig for sputtering shown in Fig. 63 and a guide bar partly separated. Fig.
65 is an enlarged perspective view of the portion B-1 in FIG.
66 is an enlarged perspective view of a portion B-2 in FIG. 64; FIG.
67 is a perspective view showing the snatch lock part in the flexible PC cost jig for sputtering shown in Fig.
Fig. 68 is a perspective view showing the respective operating states of the snatch lock, which is the portion C in Fig. 67;
FIG. 69 is a perspective view of the flexible PC cost jig for sputtering shown in FIG. 62 being closed. FIG.
70 is a plan view of the flexible PC cost jig for sputtering shown in FIG. 69. FIG.
71 is a plan view of a state in which a jig coupling body is placed and closed in a flexible PC cost jig for sputtering shown in FIG. 69; FIG.
72 is a front view of a flexible PC cost jig for sputtering according to another embodiment shown in FIG. 62 installed on an upright conveyor.
FIG. 73 is a front view of a state in which a spring bar is opened in a state where a flexible PC jig for sputtering according to the present invention is installed on an upright type conveyor.
74 is a front view of a state in which a carrier rotates in a state where a flexible PC jig for sputtering according to the present invention is installed on an upright type conveyor;
75 is a front view of the spring bar opened in the state of FIG. 75; FIG.
76 is a front view of a state where a flexible PC cost jig for sputtering according to the present invention is installed on a conveyor installed on the right and left sides.
77 is a front view of the spring bar of the flexible PC cost jig for sputtering placed on the conveyor shown in Fig. 76 opened. Fig.
78 is a front view of the carrier of the flexible PC cost jig for sputtering placed on the conveyor shown in Fig. 76, rotated. Fig.

1 is a perspective view of a double-sided type of a flexible PC cost jig for sputtering according to the present invention. 2 is a cross-sectional view of a flexible type cost jig for sputtering according to the present invention.

1 and 2, a double-sided type flexible jig for sputtering according to the present invention has a jig base 20 at the center of the double-sided type jig base 20, And a masking jig 10 on which a vapor deposition opening 12 is formed so that a sputtering deposition material is deposited on the flexible PCB 30 is formed on each of the flexible substrate 30.

The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed to each other through the holes 23 formed in the masking jig 10, the flexible PCB 30, and the jig base 20, respectively.

The masking jig 10 and the jig base 20 of the present invention are made of PC, aluminum, or the like.

FIG. 3 is a perspective view of a flexible type cost jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier. FIG. 4 is a perspective view of a flexible type cost jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier.

3 and 4, the double-sided jig coupling body 1 provided with the flexible PCB 30 for plasma sputtering is inserted into the carrier 40 for fixing the jig coupling body 1.

FIG. 5 is a perspective view of a flexible PC jig for sputtering according to the present invention in a closed state after a double-sided type is inserted into a carrier.

5, a jig assembly 1 according to the present invention is mounted on a carrier 40 and then closed. The jig assembly 1 is locked by a locking device 50 which is fitted in a guide bar 42 and locks the carrier 40 It is locked.

6 is a perspective view of a flexible jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier and then locked by a locking device. 7 is a side view of a flexible jig for sputtering according to the present invention in which a double-sided type is inserted into a carrier and then locked by a locking device.

6 and 7, the user of the flexible PC cost jig for sputtering according to the present invention pulls the handle 52 of the carrier upward to fit the locking device 50 into the guide bar 42, 40).

The jig coupling body 1 held in the carrier 40 is configured to be pushed up and down by the elastic module 45 configured to include the coil spring in the locked state of the carrier 40 of the present invention.

8 is an enlarged view of a locking device for a carrier for a double-sided type among the flexible jigs for jigs for sputtering according to the present invention.

8, the locking device 50 of the present invention is inserted into the guide bar 42 of the carrier 40 so that the upper and lower portions of the carrier 40 are locked with each other.

FIG. 9 is an enlarged view of a jig contact method in a state where the flexible PC cost jig for sputtering according to the present invention is closed.

9, the flexible module for sputtering according to the present invention includes a fixed bar formed on the carrier 40 in a closed state, and an elastic module configured to include a plurality of coil springs on the movable bar 44 The jig combined body 1 of the double-sided type is pressed tightly.

10 is a plan view for explaining the operation of the movable bar after the double-sided type of the flexible PC jig for sputtering according to the present invention is inserted into the carrier.

10, a double-sided type flexible jig for sputtering according to the present invention includes a plurality of movable bars 44 (a fixed bar 44 fixed to the left and right bars so as not to move) Can be moved laterally along the guide bar 42 installed up and down.

This is because it is necessary to adjust the position of the fixing bar 44 in accordance with the position and shape of the vapor deposition opening 12 for plasma sputtering in the masking jig 10 of the jig combination 1. [

Once the position of the fixing bar 44 is determined on the carrier 41, the fixing bolt 55 is tightened on the guide bar 42 so that the fixing bar 44 can no longer move along the guide bar 42 Fix it.

11 is a perspective view of a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention. 12 is a side view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention.

11 and 12, in the cross-sectional type of the flexible package for jig for sputtering according to the present invention, the jig base 20 is positioned at the bottom portion, and the top surface of the jig base 20 is subjected to plasma sputtering A plating sub-wafer 30 is positioned on the flexible substrate 30. A vapor deposition opening 12 is opened above the flexible substrate 30 to allow the deposition of a sputter deposition material (silver and / or nickel) on the deposition surface 32 of the flexible PCB 30 And a masking jig 10 formed thereon.

The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed to each other through the holes 23 formed in the masking jig 10, the flexible PCB 30, and the jig base 20, respectively.

FIG. 13 is a perspective view of a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention inserted into a carrier. FIG. 14 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier.

13 and 14, a cross-sectional jig coupling body 2 provided with a flexible PCB 30 for plasma sputtering according to the present invention is inserted into a carrier 41 for fixing the jig coupling body 2.

A locking device 51 for fixing the carrier 41 in a closed state is provided on the carrier 41 on which the cross-sectional jig combination 2 of the present invention is mounted.

FIG. 15 is a side view of a carrier in which a cross-sectional type of a flexible PC jig for sputtering according to the present invention is inserted, and a side view of a hinge used in the carrier.

Referring to FIG. 15 (a), a plurality of elastic modules 45 are formed on the fixing bar 44 of the carrier 41 of the present invention. The elastic module 45 according to the present invention is configured to include a coil spring so that the jig assembling body 2 is fixed to the carrier 41 by applying an elastic force to the jig assembling body 2 in a state where the carrier 41 is closed .

Referring to Figs. 15 (b) and 15 (c), the moving structure of the hinge 60 provided in the carrier 41 of the present invention is shown. The hinge 60 of the present invention is installed in the carrier 41 so that the fixing bar 44 can be held in the opened state in the state in which the carrier 41 is opened. It is possible to prevent the portion of the fixing bar 44 from being closed suddenly.

16 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier and then closed. 17 is a perspective view showing a state in which a cross-sectional type of a flexible PC cost jig for sputtering according to the present invention is inserted into a carrier and then locked by a locking device.

16 and 17, the user of the flexible PC cost jig for sputtering according to the present invention is configured such that the locking device 51 is pulled upward and the locking device 51 is inserted into the fixing bolt 55 of the carrier 41 So that the carrier 41 is locked.

In the state where the carrier 41 of the present invention is locked, the cross-sectional jig assembling body 2 accommodated in the carrier 41 is configured to press the jig assembling body 2 by the elasticity module 45 configured to include the coil spring.

18 is an enlarged view of a locking device for a carrier for a cross-sectional type of a flexible PC jig for sputtering according to the present invention.

18, the locking device 51 of the present invention is fitted in the fixing bolts 55 provided on the left and right sides of the carrier 41, so that the carriers 41 are locked with each other.

19 is a plan view for explaining the operation of the movable bar after the end face type of the flexible PC cost jig for sputtering according to the present invention is inserted into the carrier.

Referring to FIG. 19, a guide bar 42 having a plurality of movable bars 44 vertically installed except for a fixed bar provided on the left and right sides of the carrier 41 of the cross-sectional type of the flexible PC cost jig for sputtering according to the present invention, You can move left and right along.

This is because it is necessary to adjust the position of the movable bar 44 according to the position and shape of the vapor deposition opening 12 for plasma sputtering in the masking jig 10 of the jig combination 2 of the cross-sectional type.

Once the position of the movable bar 44 is determined on the carrier 41, the fixing bolt 55 is tightened on the guide bar 42 so that the movable bar 44 can no longer move along the guide bar 42 Fix it.

20 is a side view illustrating that a flexible PC cost jig and a carrier for sputtering according to the present invention are sputtered in a sputtering chamber.

Referring to FIG. 20, a flexible PC jig for sputtering according to the present invention is placed in a chamber 100 for plasma spraying in a state where the jig is fixed to a carrier 140, and then a plasma sputtering process, that is, silver and / or nickel The process of evaporation is carried out.

FIG. 21 is a perspective view showing a state in which a cross-sectional type of flexible Jig for sputtering according to the present invention is mounted on a carrier and is coupled with a rotation support. FIG. 22 is a perspective view showing a state in which a cross-sectional type of the flexible Jig for sputtering according to the present invention is mounted on a carrier and is engaged with a rotation support.

Referring to FIGS. 21 and 22, a carrier 140 mounted on one end of the flexible jig for sputtering according to the present invention has a cylindrical rotation protrusion 146 formed on the left and right sides.

The carrier 140 having one cylindrical rotation protrusion 146 according to the present invention is coupled to the rotation support 142 in such a manner that the rotation protrusion 146 is fitted into the hole 148 of the rotation support 142 do.

FIG. 23 is an exploded perspective view of a rotation pin and a fixing table as components for engaging with a rotation support in a state where a cross-sectional type of a flexible Jig for sputtering according to the present invention is mounted on a carrier. FIG. 24 is a perspective view showing a rotary pin and a fixing table assembled as a component for engaging with a rotation support in a state where a cross-sectional type of flexible Jig for sputtering according to the present invention is mounted on a carrier.

23 and 24, the rotation protrusions 146 of the present invention are installed on the right and left sides of the carrier 140 so as to be rotatable by the fixing table 147 and not to be separated from the fixing table 147.

FIG. 25 is a perspective view of a type of flexible jig for sputtering according to the present invention mounted on a carrier after being coupled to a rotary support in a state where the jig is mounted on a carrier. FIG. FIG. 26 is a perspective view showing a state where a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and engaged with a rotation support, and then the carrier rotates on a conveying conveyor.

25 and 26, the carrier 140 on which the cross-sectional jig assembling body 2 of the present invention is mounted is conveyed on the conveyor 150. [

In the work process room in which the conveyor 150 to be conveyed is installed, the worker carries out a process operation of mounting the cross-sectional jig combination body 2 on the carrier 140 coupled with the rotation support 142.

Once the step of mounting the end surface type jig combination body 2 on the carrier 140 on one side is completed, the carrier 140 is rotated by the rotation support table 142 to be attached to the opposite side of the carrier 140, So that the mounting process of the mounting unit 2 is performed.

FIG. 27 is a perspective view and a side view of a state in which the carrier of the flexible type cost jig for sputtering according to the present invention is mounted on a carrier and is coupled with a rotation support and then rotated by 100 degrees or more on a conveying conveyor.

27, the surface of the carrier 140, on which the mounting of the end surface type jig assembling body 2 is finished, is turned upside down on the rotation support 142 of the present invention, and the process of mounting the jig assembling body 2 on the other side is performed .

FIG. 28 is a perspective view of the flexible type cost jig for sputtering according to the present invention before the end surface type is mounted on the carrier, closed by the fixing bar, and locked by the locking device. 29 is a perspective view of a state in which a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by a locking device.

28 and 29, a cross-sectional type jig combination 2 according to the present invention is mounted on a carrier 150 and is closed by a cover composed of a fixing bar 44 and locked by a locking device 70. [

The locking device 70 according to the present invention is constituted by a bar 75 that is locked in the inside and a coil spring connected to the bar 75. When the pressing switch 74 is pressed, the locking bar 75 is protruded by a coil spring.

The locking device 70 according to the present invention is configured to move left and right along a rail groove 72 formed as a groove in the carrier 150.

A connecting hinge 80 connected to the guide bar 42 is provided on the opposite side of the locking device 70 according to the present invention and the connecting hinge 80 is provided with a rail groove 82 composed of a groove on the carrier 150 So as to move left and right.

When the cover composed of the fixing bar 44 of the carrier 150 according to the present invention is closed, the locking bar 75 of the locking device 70 protrudes and is caught by the guide bar 42 to lock the carrier 150.

FIG. 30 is a side view of the flexible type cost jig for sputtering according to the present invention before the end surface type is mounted on the carrier, closed by the fixing bar, and locked by the locking device. 31 is a side view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by a locking device.

30 and 31, in a state in which the cross-sectional jig assembling body 2 according to the present invention is mounted on the carrier 150, the fixing bar 45 provided with the plurality of elastic modules 45 descends downward A plurality of elastic modules 45 press the jig assembling body 2.

In this state, when the push switch 74 of the locking device 70 is pressed by the user of the present invention, the locking bar 75 protrudes and is caught by the guide bar 42, and the cover composed of the fixing bar 44 is locked .

32 is a plan view for explaining how the locking device is adjusted along the rail groove in a state in which the end face type of the flexible PC jig for sputtering according to the present invention is mounted on the carrier.

Referring to FIG. 32, the locking device 70 according to the present invention can move left and right along the rail groove 72. It is necessary to adjust not only the position of the fixing bar 44 but also the position of the locking device 70 according to the position and shape of the vapor deposition opening 12 for plasma sputtering in the masking jig 10 of the jig combination 2 Because.

33 is a perspective view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier and closed by a fixing bar and locked by another locking device.

33, when a flexible PC cost type cavity type jig coupling body 2 for sputtering according to the present invention is mounted on a carrier 150 and is closed by a cover composed of a plurality of fixing bars 44, Is hooked on the guide bar 42, the carrier 150 is locked.

The locking portion 82 of the locking device 80 according to the present invention is configured to be rotatable.

Fig. 34 is a perspective view of a state in which the end face type of the flexible PC cost jig for sputtering according to the present invention is mounted on a carrier, closed by a fixing bar, and locked by another locking device.

Referring to FIG. 34, a flexible PC-based costile type jig coupling body 2 for sputtering according to the present invention is mounted on a carrier 150 and is closed by a cover composed of a plurality of moving bars 44 and fixing bars The carrier 150 is locked in such a manner that the locking device 86 is caught by the guide bar 42. [

FIG. 35 is a perspective view illustrating a state in which a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted and an elastic module installed on the moving bar are installed. 36 is a front view of an elastic module mounted on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.

35 and 36, a plurality of elastic modules 45 are installed on the fixed bar or the movable bar 44 of the present invention. The elastic module of the present invention is constituted by a coil spring 46 having a helical shape and a fixing bolt 47 for fixing the coil spring 46 to the fixing bar or the moving bar 44.

The coil spring 46 of the elastic module 45 presses the portion of the masking jig 10 of the jig assembling members 1 and 2 in a state where the fixing bar or the transfer bar 44 of the present invention is closed.

36 (a) shows a state before the elastic module is assembled, and Fig. 36 (b) shows a state in which the elastic module is assembled to the fixed bar or the transfer bar 44 of the present invention.

FIG. 37 is a perspective view illustrating a state in which another elastic module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted. FIG. 38 is a front view of another elasticity module installed on a carrier fixing bar on which a flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.

37 and 38, a plurality of elastic modules 45 are installed on the fixed bar or the movable bar 44 of the present invention. The elastic module 45 of the present invention is provided with the fixing shaft 49 and the fixed shaft 49 provided so as to penetrate the coil spring 48 and the coil spring 48 and through the through hole 92 of the fixed bar or the movable bar 44 49 to prevent the fixing shaft 49 from being detached from the fixed bar or the movable bar 44. [

The bottom surface of the fixing shaft 49 of the elastic module 45 presses the portion of the masking jig 10 of the jig assembling bodies 1 and 2 while the fixing bar or the transfer bar 44 of the present invention is closed, The fixing shaft 49 penetrating through the fixing bar or the transfer bar 44 of the present invention protrudes above the upper portion of the fixing bar or the transfer bar 44 in a state where the portion coupled with the earing 90 is present.

38A shows a state before the elastic module is assembled, and FIG. 38B shows a state in which the elastic module is assembled to the fixing bar or the transfer bar 44 according to the present invention.

FIG. 39 is a front view illustrating a state in which another elasticity module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted. 40 is a perspective view of another elastic module installed on a carrier fixing bar on which the flexible PC cost jig for sputtering according to the present invention is mounted, before and after assembly.

39 and 40, a plurality of elastic modules 94 are installed in the fixed bar or the movable bar 44 of the present invention. The elastic module 94 of the present invention is configured such that the coil spring 96 and the spring ball 97 receiving the elastic force by the coil spring 96 and the coil spring 96 and the spring ball 97, (95).

The spring ball 97 of the elastic module 94 presses the portion of the masking jig 10 of the jig assembling bodies 1 and 2 in a state where the fixing bar or the transfer bar 44 of the present invention is closed.

39 (a) shows a state before the elastic module 94 is assembled, and Fig. 39 (b) shows a state in which the elastic module 94 is assembled to the fixing bar or the transfer bar 44 of the present invention .

FIG. 41 is a front view illustrating a state in which another elasticity module installed on a fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted. FIG. 42 is a perspective view of another elastic module installed on a carrier fixing bar on which a flexible PC cost jig for sputtering according to the present invention is mounted, before assembling and after assembling. FIG.

41 and 42, a plurality of another elasticity modules 110 are installed in the fixed bar or the movable bar 44 of the present invention. Another elastic module 110 according to the present invention includes a rod 103 and a rod 103 that are received by the coil spring 102 and the coil spring 102, (101).

The rod 103 of another elasticity module 110 is configured to press the portion of the masking jig 10 of the jig assembling bodies 1 and 2 while the fixing bar or the transfer bar 44 of the present invention is closed.

Figure 42 (a) shows a state before the elastic module 110 is assembled, and Figures 42 (b) and 42 (c) show a perspective view and a cross-sectional view of a state in which the elastic module 110 is assembled .

FIG. 43 is a perspective view of a cross-sectional type of the flexible PC cost jig for sputtering according to the present invention. FIG. 44 is a perspective view of a cross-sectional type stack of a flexible PC cost jig for sputtering according to the present invention. FIG. FIG. 45 is a perspective view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention stacked and fixed. FIG. 46 is a plan view and a side view of a cross-sectional type of a flexible PC jig for sputtering according to the present invention.

Referring to FIGS. 43 to 46, a laminate structure of a cross-sectional type of the flexible PC jig for sputtering according to the present invention will be described. In the lamination structure of the cross-sectional type, a jig base 20 is positioned at the bottom portion, And a flexible substrate 30 on which the plasma sputtering deposition material is to be deposited, and / or on which a plasma sub-plasma 30 is to be deposited, and a plasma sputtering deposition material is formed on the flexible sub- And a masking jig 10 in which the evacuation opening 12 is formed.

46 (c), a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, and the jig base 20 according to the present invention are attached to the masking jig 10, The flexible PCB 30 and the holes 13 formed in the jig base 20 to fix the joining position of the masking jig 10, the flexible PCB 30, and the jig base 20 to each other.

FIG. 47 is a perspective view of a double-sided type laminated structure among flexible Jigs-free jigs for sputtering according to the present invention. FIG. FIG. 48 is a perspective view of a double-sided type jig for a flexible PC for sputtering according to the present invention, which is stacked and fixed. FIG. 49 is a plan view and a side view of a double-sided type stacked type flexible jig for sputtering according to the present invention.

47 to 49, a double-sided type laminated structure of the flexible PC jig for sputtering according to the present invention will be described. A jig base 20 is located at the center of the jig base 20, and sputtering A flexible substrate 30 to be stacked is placed and a vapor deposition opening 12 is formed on each of the flexible substrate 30 so as to be sputtered so that a sputter deposition material is deposited on the flexible PCB 30 And a masking jig (10).

49 (c), a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, and the jig base 20 according to the present invention are attached to the masking jig 10, The flexible PCB 30 and the holes 23 formed in the jig base 20 to fix the joining position of the masking jig 10, the flexible PCB 30, and the jig base 20 to each other.

50 is a cutaway perspective view and a front view of a fixed bar or a movable bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.

50 (a) and 50 (b), the cutting face of the carrier fixing bar or the moving bar 44 on which the flexible PC cost jig for sputtering according to the present invention is mounted is opened and the edge portion is gently curved And has a basic shape of a square formed as a circle or a circle.

50 (c) and 50 (d), the cutting face of the carrier fixing bar or the moving bar 44 on which the flexible PC cost jig for sputtering according to the present invention is mounted is opened and the corner portion is gently curved And has a basic shape of a rectangle formed in a circle or a circle.

51 is a cutaway perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.

51 (a) and 51 (b), when the interior of the cutter surface of the fixed bar or the movable bar 44 on which the flexible jig for sputtering according to the present invention is mounted is not opened, And has a basic shape of a square formed into a curved or circular shape.

51 (c) and 51 (d), the cut surface of the fixed bar or the movable bar 44 of the carrier on which the flexible jig for sputtering according to the present invention is mounted is not opened inside, And has a basic shape of a rectangle formed in a curved or circular shape.

52 is a cutaway perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.

52 (a) and 52 (b), the cutting surface of the carrier fixing bar or the moving bar 44 on which the flexible PC jig for sputtering according to the present invention is mounted has a hollow cylindrical shape .

Referring to Figures 52 (c) and 52 (d), the cutting face of the carrier fixing bar or the moving bar 44 on which the flexible PC cost jig for sputtering according to the present invention is mounted has a cylindrical shape have.

53 is a cut-away perspective view and a front view of another fixing bar of a carrier on which a flexible PC cost jig for sputtering according to the present invention is mounted.

53 (a) and 53 (b), the cutting face of the carrier fixing bar or the moving bar 44 on which the flexible PC cost jig for sputtering according to the present invention is mounted has a regular hexagon shape .

53 (c) and 53 (d), the cutting face of the carrier fixing bar or the moving bar 44 on which the flexible PC cost jig for sputtering according to the present invention is mounted is shaped like a regular hexagon have.

54 is a perspective view of a flexible PC cost plate bar type jig for sputtering according to the present invention. 55 is an exploded perspective view of a flexible PC cost plate bar type jig for sputtering according to the present invention.

54 and 55, a stacked structure of a flexible type cost-plate type bar type jig for sputtering according to the present invention will be described. A jig base 20 is located at the bottom portion of the jig base 20, And a flexible substrate 30 on which the plasma sputtering deposition material is to be deposited, and / or on which a plasma sub-plasma 30 is to be deposited, and a plasma sputtering deposition material is formed on the flexible sub- And a masking jig 10 in which the evacuation opening 12 is formed.

A plurality of spring bar fixing bolts 202 for guiding and adjusting the joining position of the masking jig 10, the flexible PCB 30 and the jig base 20 according to the present invention are provided on the masking jig 10, The flexible PCB 30 and the jig base 20 are guided while the plate spring bar 200 is inserted into four peripheral portions of the masking jig 10, And then is engaged with the spring bar fixing bolt 202. [0053] As shown in FIG.

56 is a perspective view showing a state in which a plate spring bar portion is cut in a perspective view of a flexible type cost plate type jig for sputtering according to the present invention. 57 is a cut-away side view of a plate spring bar, which is one of the components of a flexible PC cost plate type jig for sputtering according to the present invention. FIG. 58 is an enlarged view of FIG. 56 and FIG. 57A, illustrating a portion of a plate bar type jig fixed by a spring bar fixing bolt. FIG.

56 to 58, a side view of a flexible type cost-plate type jig according to the present invention is cut along the longitudinal direction, and a masking jig 10, a flexible PCB 30, a jig base 30, The plate spring bar 200 is aligned on the masking jig 10 in a state where the engagement position of the spring bar fixing bolt 20 is guided, and then the spring bar fixing bolt 202 is fitted and engaged.

59 is an enlarged view of a laminated structure for fixing a plate bar type jig by a spring bar fixing bolt according to the present invention.

59, the mating jig 10, the flexible PCB 30, and the jig base 20 according to the present invention are coupled to each other by a guide (not shown) The plate spring bar 200 is aligned on the masking jig 10 and then engaged with the respective holes by the spring bar fixing bolts 202. [

The plate spring bar 200 according to the present invention is constituted by a spring tension portion 204 in the form of a leaf spring which corresponds to a clip spring and the plate spring bar 200 according to the present invention, the masking jig 10, the flexible PCB 30 The flexible spring 30 and the jig base 20 in a state in which the plate spring bar 200 and the jig base 20 are stacked.

60 is a front view of a flexible PC cost plate bar type jig for sputtering according to the present invention. Fig. 61 is an enlarged view of part A of Fig. 60, illustrating how the plate spring bar is locked by the spring bar fixing bolt.

Referring to FIGS. 60 and 61, the principle of locking the plate spring bar 200 by the spring bar fixing bolt 202 according to the present invention is shown.

61, when the end of the spring bar fixing bolt 202 according to the present invention is raised above the locking portion 206 of the plate spring bar 200, the plate spring bar 200 is pushed rightward, The narrow portion of the locking portion 206 is fitted into the concave portion 203 of the spring bar fixing bolt 202 and the plate spring bar 200 is inserted into the concave portion 203 of the spring bar fixing bolt 202, .

Under such a laminated structure, the combination of the plate spring bar 200, the masking jig 10, the flexible PCB 30 and the jig base 20 is firmly maintained.

************************************************** *********

62 is a perspective view of still another embodiment of a flexible PC cost jig for sputtering according to the present invention. Fig. 63 is an enlarged perspective view of part A shown in Fig.

Referring to FIGS. 62 to 63, the flexible PC jig for sputtering according to another embodiment of the present invention is provided with one fixing bar 210 on each side, and one fixing bar 210 on the middle portion A plurality of guide bars 214 are inserted into the fixing bar 210 at the same time so that the fixing bar 210 can be moved.

A front fixing bar 212 and a rear fixing bar are respectively installed on the front and back sides of the fixing bar 210 installed at the side portion and the middle portion of the present invention.

The front fixing bar 212 and the rear fixing bar are respectively provided with the joining portions 220 at the portions where the front fixing bars 212 and the rear fixing bars are joined to the side fixing bars 210 and the middle fixing bars 210, And the fixing bar 210 is joined.

The carrier 140 on which the jig combination 1 of the present invention is placed is connected by a pair of left and right rotation projections 146 to a rotation support 142 formed on the outer periphery of the carrier 140, And is configured to rotate at the rotation support 142 about the projection 146.

Fig. 64 is a perspective view of the flexible bar cost jig for sputtering shown in Fig. 63 and a guide bar partly separated. Fig. 65 is an enlarged perspective view of the portion B-1 in FIG. 66 is an enlarged perspective view of a portion B-2 in FIG. 64; FIG.

64 to 66, at one side of two guide bars 214 of a flexible PC cost jig for sputtering according to another embodiment of the present invention, an edge assembly block 215 is inserted into a guide bar 214 And the two projecting portions of the central assembly block 216 are inserted into the two guide bars 214 so that the two guide bars 214 are connected to each other in a straight line.

The edge assembling block 215 and the center assembling block 216 are fixed to the fixing bar 210 while the edge assembling block 215 and the center assembling block 216 are fixedly coupled to the two guide bars 214, And a plurality of guide bars 214 configured to be connected to each other in a straight line can be moved along the fixed bar 210.

The edge assembly block 215 of the metallic material of the present invention and the center assembly block 216 and the guide bar 214 may be fixedly connected to each other by welding or the like.

67 is a perspective view showing the snatch lock part in the flexible PC cost jig for sputtering shown in Fig. Fig. 68 is a perspective view showing the respective operating states of the snatch lock, which is the portion C in Fig. 67;

67 and 68, a snack lock module C is installed in the flexible PC jig for sputtering according to the present invention, and the front fixing bar 212 is inserted into the respective snap- Locked into the lock 224 and locked so that the spring bar does not open.

The snatch lock 224 used in the present invention is of the same type as the lock mechanism used in a car door, and is used in devices with severe vibration or impact, trucks, buses, special cars, shutters, and the like.

The locking portions of the two snatch locks 224 are connected to each other by the connecting bar 222. When the connecting bar 222 is pulled, the lock of the two snatch locks 224 is released, Can be released from the snatch lock 224.

FIG. 69 is a perspective view of the flexible PC cost jig for sputtering shown in FIG. 62 being closed. FIG. 70 is a plan view of the flexible PC cost jig for sputtering shown in FIG. 69. FIG. 71 is a plan view of a state in which a jig coupling body is placed and closed in a flexible PC cost jig for sputtering shown in FIG. 69; FIG.

69 to 71, the jig assembly 1 of the present invention is placed on the carrier 140 with the spring bar opened, the spring bar is lowered, and the front fixing bar 212 is inserted into the snatch lock 224 It becomes locked.

The carrier 140 of the present invention is placed in the outer rotation support 142 of the present invention and is configured to be rotatable within the rotation support 142 by the rotation projection 146, A push lock bolt 160 is installed on the support table 160 and a lock lock latch 161 is installed on the carrier 140 so that the lock bolt 160 is hooked on the lock latch lock 161 while the lock of the push bolt 160 is protruded, 140 are prevented from rotating so that the carrier 140 and the rotation support 142 are positioned on the same plane.

When the push bolt 160 of the present invention is opened, the lock with the lock-locked latch 161 is released, and the carrier 140 can be rotated and rotated within the rotation support 142.

The push bolt 160 and the lock lock latch 161 of the present invention are conventional products and are sold as a push bolt, a slide bolt, and a spring slide bolt.

FIG. 72 is a front view of a flexible PC jig for sputtering according to another embodiment of the present invention shown in FIG. 62 mounted on an upright conveyor.

Referring to FIG. 72, a jig coupling body 142 of the flexible PC cost jig for sputtering according to another embodiment of the present invention is vertically fixed to the upright conveyor 152 of the present invention.

The push bolt 160 of the present invention is immersed in the lock clasp 161 so that the carrier 140 is fixed to the rotation support table 142.

FIG. 73 is a front view of a state in which a spring bar is opened in a state where a flexible PC jig for sputtering according to the present invention is installed on an upright type conveyor.

73, in order to fix the jig assembly 1 according to the present invention to the flexible jig for sputtering according to the present invention, the operator releases the push bolt 160, The stopper 224 is released and the spring bar 120 is opened in a state where the position of the carrier 140 is fixed by a stopping means (not shown) provided in a state where the stopper is rotated 90 degrees.

When the spring bar 120 is opened, the operator places the jig assembly 1 inside the carrier 140, closes the spring bar 120, and locks the front fixing bar 212 in the snatch lock 224 do.

74 is a front view of a state in which a carrier rotates in a state where a flexible PC jig for sputtering according to the present invention is installed on an upright type conveyor;

75 is a front view of the spring bar opened in the state of FIG. 75; FIG.

74 and 75, in order to fix the jig assembly 1 according to the present invention to the flexible jig for sputtering according to the present invention, the operator inserts the push bolt 160 into the lock- And the carrier 140 is released from the state where the position of the carrier 140 is fixed by a stopping means (not shown) provided separately in a state where the carrier 140 is rotated by a certain angle, (Not shown).

When the spring bar 120 is opened, the operator places the jig assembly 1 inside the carrier 140, closes the spring bar 120, and locks the front fixing bar 212 in the snatch lock 224 do.

76 is a front view of a state where a flexible PC cost jig for sputtering according to the present invention is installed on a conveyor installed on the right and left sides. 77 is a front view of the spring bar of the flexible PC cost jig for sputtering placed on the conveyor shown in Fig. 76 opened. Fig.

Referring to FIGS. 76 and 77, a jig coupling body 142 of a flexible PC cost jig for sputtering according to another embodiment of the present invention is laid down on a conveyor 150 of the present invention.

The push bolt 160 of the present invention is immersed in the lock clasp 161 so that the carrier 140 is fixed to the rotation support table 142.

In order to fix the jig assembly 1 according to the present invention to the flexible jig for sputtering according to the present invention, the operator releases the spring bar 120 by releasing the snatch lock 224.

In this case, there is no need to release the push bolt 160 from the locking latch 161 and rotate the carrier 140 by a certain angle.

When the spring bar 120 is opened, the operator places the jig assembly 1 inside the carrier 140, closes the spring bar 120, and locks the front fixing bar 212 in the snatch lock 224 do.

78 is a front view of the carrier of the flexible PC cost jig for sputtering placed on the conveyor shown in Fig. 76, rotated. Fig.

78, the operator releases the push bolt 160 from the locking latch 161, and the carrier 140 is rotated by about 180 degrees by means of a stopping means (not shown) The snap bar lock 224 on the opposite side is released and the spring bar 120 on the opposite side is opened to insert and fix the jig assembling body 1. [

The flexible PC cost jig for sputtering according to the present invention can reduce the work time for the workers who want to achieve a metal thin film layer by plasma sputtering process in order to achieve the object of electromagnetic shielding against the flexible PCB, It has a remarkable effect that the defect rate is minimized in the plasma sputtering process due to the mounting on the jig and the rigid mounting.

While the preferred embodiments of the present invention have been described above using specific terms, such description is for illustrative purposes only and that various changes and modifications may be made without departing from the spirit and scope of the following claims. Day. Such modified embodiments are not to be understood individually from the spirit and scope of the present invention, but are to be regarded as falling within the scope of the appended claims.

10: masking jig 12: opening for evacuation
20: Jig base
30: Flexible PCB (FPCB)
40: carrier 42: guide bar
44: fixed bar, moving bar 45: elastic module
50, 51: Locking device 55: Fixing bolt
100: Chamber
140: carrier 142:
146: Rotation projection 150: Conveyor
200: Plate spring bar
202: Spring bar fixing bolt
203: concave portion 204: spring tension portion
206:

Claims (38)

As a flexible PC cost jig for sputtering,
A jig base 20 is located at the center of the jig and a flex sub PCB 30 is positioned on the top and bottom surfaces of the jig base 20. A sputtering deposition material is formed on each flexible sub chip 30, And a masking jig (10) formed with a vapor deposition opening (12) opened to be deposited on the substrate (30)
The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed to each other by being inserted into the holes 23 formed in the jig base 20. The jig 10, the flexible PCB 30, and the jig base 20 are fixed to each other.
The method according to claim 1,
The double-sided jig combined body including the masking jig 10, the flexible PCB 30 and the jig base 20 is inserted and fixed to the carrier 40 for fixing the jig assembling body 1. [ Flexible PC cost jig for.
3. The method of claim 2,
The jig assembly 1 is locked by the locking device 50 which is mounted on the carrier 40 and then closed so as to be fitted in the guide bar 42 of the carrier so as to lock the carrier 40 Features Flexible PC cost jig for sputtering.
3. The method of claim 2,
The jig assembling body 1 held in the carrier 40 is configured to be pressed up and down by the elastic module 45 configured to include a coil spring when the carrier 40 is locked Features Flexible PC cost jig for sputtering.
3. The method of claim 2,
Wherein a plurality of moving bars (44) except the fixed bars fixed to the left and right sides of the carrier (40) are movable left and right along the guide bars (42) Jig.
As a flexible cross-section type jig for sputtering,
A jig base 20 is located at the bottom of the jig base 20. A plasma subframe 30 to be subjected to plasma sputtering is disposed on the jig base 20. A sputter deposition material is deposited on the flexible subfibers 30, And a masking jig (10) having a vapor deposition opening (12) opened to be deposited on a vapor deposition surface (32) of the substrate (30)
A plurality of shafts 22 for adjusting the mating position of the masking jig 10, the flexible PCB 30 and the jig base 20 are mounted on the masking jig 10, the flexible PCB 30, the jig base 20, And the positions of the masking jig (10), the flexible PCB (30), and the jig base (20) are fixed to each other through the holes (23) formed therein.
The method according to claim 6,
The cross-sectional jig provided with the flexible PCB 30 for the plasma sputtering is inserted into the carrier 41 for fixing the jig,
Wherein the carrier (41) on which the cross-sectional jig is mounted is provided with a locking device (51) for fixing the carrier (41) in a closed state.
8. The method of claim 7,
A plurality of elastic modules 45 are formed on the fixed bar and the movable bar 44 of the carrier 41,
Wherein the elastic module (45) comprises a coil spring, and applies an elastic force to the jig in a state in which the carrier (41) is closed so that the jig is fixed tightly to the carrier (41) Flexible PC cost jig.
8. The method of claim 7,
The carrier 41 is provided with a hinge 60 to hold the fixing bar 44 in a state where the fixing bar 44 is opened in a state that the carrier 41 is opened and suddenly prevent the fixing bar 44 from being closed. Flexible PC cost jig for sputtering.
8. The method of claim 7,
Wherein a plurality of moving bars (44) except the fixed bars fixed to the left and right sides of the carrier (41) are movable left and right along the guide bars (42) installed vertically. Jig.
As a flexible PC cost jig for sputtering,
In the carrier 140 on which the PC jig is mounted, a cylindrical rotation projection 146 is formed on each of the right and left sides,
The carrier 140 having the cylindrical rotation protrusions 146 on its left and right sides is characterized in that it is engaged with the rotation support 142 in such a manner that the rotation protrusion 146 is fitted into the hole 148 of the rotation support 142 Flexible PC cost jig for sputtering.
12. The method of claim 11,
The carrier 140 on which the jig is mounted is conveyed on the conveyor 150. In the work process chamber in which the conveyor 150 is conveyed, And then,
When the mounting process of the jig is completed with respect to the carrier 140 on one side, the carrier 140 is rotated by the rotation support table 142 to mount the jig on the opposite side of the carrier 140 Wherein the flexible jig for the sputtering is a flexible jig for the sputtering.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
The jig is closed by a cover constituted by the fixing bar 44 of the carrier and is locked by the locking device 70,
Characterized in that the locking device (70) is constituted by a bar (75) locked in the inside and a coil spring connected thereto, and the locking bar (75) is protruded by a coil spring when the pressing switch (74) is pressed. Flexible PC cost jig for.
14. The method of claim 13,
Wherein the locking device (70) is configured to move left and right along a rail groove (72) formed as a groove in the carrier (150).
The method of claim 13, wherein
A connecting hinge 80 connected to the guide bar 42 is provided on the opposite side of the locking device 70. The connecting hinge 80 is disposed on the carrier 150 along the rail groove 82, The flexible jig for sputtering according to claim 1,
As a carrier on which a flexible PC cost jig for sputtering is mounted,
The jig is closed by a cover composed of a fixing bar (44) of the carrier and locked by a locking device (80)
Wherein the locking part (82) of the locking device (80) is configured to be rotatable.
17. The method of claim 16,
Wherein the locking device (80) is configured to move left and right along a rail groove (72) formed as a groove in the carrier (150).
The method of claim 16, wherein
A connecting hinge 80 connected to the guide bar 42 is provided on the opposite side of the locking device 80. The connecting hinge 80 is disposed on the carrier 150 along the rail groove 82, The flexible jig for sputtering according to claim 1,
As a carrier on which a flexible PC cost jig for sputtering is mounted,
A plurality of elastic modules 45 are installed on the fixed bar or the movable bar 44 of the carrier,
The elastic module is composed of a coil spring 46 having a helical shape and a fixing bolt 47 for fixing the coil spring 46 to the fixed bar or the movable bar 44,
Characterized in that the coil spring (46) of the elastic module (45) presses the portion of the masking jig (10) of the jig in a state that the fixing bar or the transfer bar (44) is closed. Jig.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,
The elastic module 45 includes a fixed shaft 49 fitted with a coil spring 48 and the coil spring 48 and penetrating through the through hole 92 of the fixed bar or the movable bar 44, (90) coupled to an end of the fixed shaft (49) to prevent the fixed shaft (49) from being detached from the fixed bar or the movable bar (44).
The bottom surface of the fixing shaft 49 of the elastic module 45 presses the portion of the masking jig 10 of the jig while the fixing bar or the transfer bar 44 is closed, 44) of the fixed shaft (49) is protruded above the upper portion of the fixing bar or the transfer bar (44).
As a carrier on which a flexible PC cost jig for sputtering is mounted,
A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,
The elastic module 94 includes a coil spring 96 and a coil spring 96. The spring ball 97 receives the spring force of the coil spring 96 and the coil spring 96. The coil spring 96 and the spring ball 97, (95). ≪ RTI ID = 0.0 > 8. < / RTI >
As a carrier on which a flexible PC cost jig for sputtering is mounted,
A plurality of elastic modules are installed on the fixed bar or the movable bar 44 of the carrier,
The elastic module 110 includes a rod 103 receiving a resilient force by a coil spring 102 and a coil spring 102 and a body 101 configured to prevent the coil spring 103 and the rod 103 from being stored, ≪ / RTI >
Characterized in that the rod (103) of the elastic module (110) presses the portion of the masking jig (10) of the jig in a state where the fixing bar or the transfer bar (44) is closed. .
As a flexible PC cost jig for sputtering,
A jig base 20 is located at the bottom of the jig base 20. A flex sub PCB 30 is disposed on the upper surface of the jig base 20 to be subjected to plasma sputtering for silver and / And a masking jig 10 on which a vapor deposition opening 12 is formed so as to be sputtered so that a plasma sputter deposition material is deposited on the flexible PCB 30,
The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed to each other by being inserted into the holes 13 formed in the jig base 20. The jig 10, the flexible PCB 30, and the jig base 20 are fixed to each other.
As a flexible PC cost jig for sputtering,
A jig base 20 is located at the center of the jig base 20 and a flex sub PCB 30 is disposed on the top and bottom surfaces of the jig base 20 to form sputtering lamination layers. And a masking jig (10) having a vapor deposition opening (12) opened to be sputtered to be deposited on the flexible PCB (30)
The masking jig 10, the flexible PCB 30, the jig base 20, and the jig base 20 are provided with a plurality of shafts 22 for adjusting the joining position of the masking jig 10, the flexible PCB 30, The flexible PCB 30 and the jig base 20 are fixed to each other by being inserted into the holes 23 formed in the jig base 20. The jig 10, the flexible PCB 30, and the jig base 20 are fixed to each other.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is composed of a square whose opening is open and the corner portion is gently curved or circular.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is formed of a rectangle which is opened and the edge portion is gently curved or circular.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Wherein the fixed bar of the carrier or the cut surface of the movable bar (44) is made of a square in which the inside is not opened but the corner portion is gently curved or formed in a circular shape.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is made of a rectangular shape in which the inside is not opened but the corner portion is gently curved or circular.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Wherein the fixed bar of the carrier or the cut surface of the movable bar (44) is formed in an open cylindrical shape.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Characterized in that the fixed bar of the carrier or the cut surface of the movable bar (44) is formed in a cylindrical shape without opening the inside of the flexible jig for sputtering.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Wherein the fixed bar of the carrier or the cut surface of the movable bar (44) is composed of a regular hexagonal opening.
As a carrier on which a flexible PC cost jig for sputtering is mounted,
Wherein the fixed bar of the carrier or the cut surface of the movable bar (44) is a regular hexagon which is not open.
As a flexible PC cost jig for sputtering,
A jig base 20 is located at the bottom of the jig base 20. A flex sub PCB 30 is disposed on the upper surface of the jig base 20 to be subjected to plasma sputtering for silver and / And a masking jig 10 on which a vapor deposition opening 12 is formed so as to be sputtered so that a plasma sputter deposition material is deposited on the flexible PCB 30,
A plurality of spring bar fixing bolts 202 for guiding and adjusting the engagement positions of the masking jig 10, the flexible PCB 30 and the jig base 20 are fixed to the masking jig 10 and the jig base 20 And the engagement position of the masking jig 10, the flexible PCB 30, and the jig base 20 is guided,
Wherein the plate spring bar (200) is aligned with four peripheral portions of the masking jig (10), and then the plate spring bar (200) is fitted to the spring bar fixing bolt (202).
34. The method of claim 33,
The plate spring bar 200 is formed with a spring tension portion 204 in the form of a leaf spring so that the plate spring bar 200, the masking jig 10, the flexible PCB 30, Wherein the plate spring bar (200) applies a certain elastic force to the masking jig (10), the flexible PCB (30) and the jig base (20).
34. The method of claim 33,
When the end of the spring bar fixing bolt 202 is raised above the locking part 206 of the plate spring bar 200, the plate spring bar 200 is pushed rightward, This narrow portion is fitted in the concave portion 203 of the spring bar fixing bolt 202 so that the plate spring bar 200 is caught by the concave portion 203 of the spring bar fixing bolt 202 Features Flexible PC cost jig for sputtering.
A carrier on which jig assemblies are placed on both sides;
On both sides of the carrier, a movable bar for opening and closing is provided,
Wherein the movement bar comprises a plurality of fixed bars to which the movement is fixed, and a plurality of guide bars that can be inserted and moved by the fixed bar,
The carrier and the rotation support are connected to each other by a rotation protrusion on the left and right sides so that the carrier can rotate on the rotation support,
The carrier and the rotation support are provided with a push bolt and a lock catch, respectively, so that when the push bolt is locked, the carrier does not rotate in the rotation support,
Wherein a front fixing bar is provided on a front surface of the moving bar and the moving bar is not opened in a state where the front fixing bar is caught by a snatch lock provided on the carrier.
37. The method of claim 36,
An edge assembly block is fixedly installed at one end of the guide bar, and a central assembly block is fixed to a joint portion where the guide bar and the guide bar are connected to each other to connect the guide bars together, And the fixing bar is inserted into the opening of the block.
37. The method of claim 36,
Wherein the flexible package cost jig for sputtering is installed on an upright conveyor in which the rotary support is vertically fixed, and then an operator fixes the jig assembly to the jig in the carrier.

Images