CN114606463A - Device and method for zone coating - Google Patents
Device and method for zone coating Download PDFInfo
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- CN114606463A CN114606463A CN202210078818.XA CN202210078818A CN114606463A CN 114606463 A CN114606463 A CN 114606463A CN 202210078818 A CN202210078818 A CN 202210078818A CN 114606463 A CN114606463 A CN 114606463A
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- 238000000576 coating method Methods 0.000 title claims abstract description 133
- 239000011248 coating agent Substances 0.000 title claims abstract description 116
- 238000000034 method Methods 0.000 title abstract description 24
- 239000007888 film coating Substances 0.000 claims abstract description 75
- 238000009501 film coating Methods 0.000 claims abstract description 75
- 238000004544 sputter deposition Methods 0.000 claims abstract description 19
- 238000001704 evaporation Methods 0.000 claims abstract description 17
- 238000005192 partition Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 abstract description 9
- 230000000903 blocking effect Effects 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 11
- 238000007747 plating Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000007667 floating Methods 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010963 304 stainless steel Substances 0.000 description 1
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000003100 immobilizing effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a device and a method for coating a film in a subarea manner, which comprise a clamping tool and at least two baffles, wherein the clamping tool is provided with a circular through hole; two threaded holes which are symmetrical to the circular through hole are formed in the clamping tool, and the two threaded holes are detachably connected with clamping screws; the upper surface and the lower surface of the clamping tool are respectively provided with two positioning pins which are symmetrical to the circular through hole, and the upper surface and the lower surface of the clamping tool are respectively provided with two fastening screws which are symmetrical to the circular through hole; and the baffle plate is provided with film coating holes matched with the shapes and the positions of the areas to be coated. Fixing a product to be coated in the circular through hole, connecting the baffle plates to the upper surface and the lower surface of the clamping tool, and then evaporating the baffle plates by using an ion sputtering coating machine; by replacing the baffle plates, evaporation in different modes can be carried out on each area to be coated, and partitioned coating of complex coating patterns is realized.
Description
Technical Field
The invention relates to the field of optical processing coating, in particular to a device and a coating method for partition coating.
Background
With the rapid development of laser and optical fiber related technologies, laser related products are becoming mature and the degree of commercialization is continuously improved. The types of products required are more and more, and in the process of coating films on various optical parts, the coating film has some special coating areas and the requirements of coating different coating systems on the same product lens.
According to the design requirements of an optical system, the surfaces of some optical parts do not need to be completely coated with coatings, and the regions without coatings need to be shielded during coating. In the prior art, a protection baffle or a high-temperature adhesive tape is usually adhered to the surface of an optical part for shielding, and the protection baffle or the high-temperature adhesive tape on the optical part is removed after coating.
In the process of coating an optical product, when a customer has special coating requirements, for example, a semicircular film layer needs to be coated, and another film system needs to be coated beside the semicircular film layer. When only one tool is involved, when a clamped product lens and a coating flange are combined together, the product lens is required to be moved every time for coating, certain position offset can occur in each clamping of the lens, certain offset can occur in the area where the baffle blocks the product lens, overlapping among different film systems occurs in the coating process, the optical performance of the product is affected, a series of uncertain factors such as falling damage and scratching of the product can also occur due to the fact that the product is moved for many times, and the risk of bad products is increased.
Through retrieval, the special Chinese patent publication No. CN206396322U, which is favorable to 2017, 8, 11, discloses an optical part partition coating clamp, which comprises a coating clamp frame, wherein a rectangular coating tank is arranged in the coating clamp frame, the coating clamp frame is provided with connecting threaded holes, the coating clamp frames on two sides of the coating tank are respectively connected with a first coating blocking plate and a second coating blocking plate which can be movably adjusted, the first coating blocking plate and the second coating blocking plate are respectively provided with elongated through holes corresponding to the connecting threaded holes, locking screws are arranged between the elongated through holes and the connecting threaded holes in the first coating blocking plate and the second coating blocking plate, one sides of the first coating blocking plate and the second coating blocking plate, which face the coating tank, are provided with coating blocking knife edges, and a gap between the coating knife edges in the first coating blocking plate and the second coating blocking plate is an optical part coating area.
In the above technical documents, the first film-coating blocking plate and the second film-coating blocking plate are used to form a gap to realize film coating on a part of the area of the product to be coated, but the gap has a single shape and cannot realize the film coating process on the areas to be coated with different shapes, so that it is necessary to design a device capable of efficiently coating a complicated area to be coated with a film.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a device and a method for zone coating, which can meet the requirements of customers on shapes of different coating areas, and simultaneously effectively prevent the optical performance of a product lens from being influenced because the product lens needs to be moved to the joint of a coating floating film and the edges of different coating areas to cause coating overlapping in the coating process.
According to one aspect of the present specification, there is provided an apparatus for zone coating, comprising a clamping tool and at least two baffles; a circular through hole is formed in the clamping tool, and a product to be coated is fixed in the circular through hole; the upper surface and/or the lower surface of the clamping tool are/is provided with positioning pins for positioning the clamping tool and any baffle plate; the upper surface and/or the lower surface of the clamping tool is/are provided with a set screw for fixing the clamping tool and any baffle plate; a positioning hole matched with the positioning pin nail and a fastening hole matched with the fastening screw are formed in each baffle plate; each baffle is provided with a film coating hole, each film coating hole corresponds to a film coating subarea of a product to be coated, and all the film coating subareas are spliced to form the whole film coating area of the product to be coated.
In the technical scheme, a product to be coated is fixed through a clamping tool, a baffle plate provided with coating holes is connected to the clamping tool as required, and the baffle plate is subjected to evaporation coating through an ion sputtering coating machine, so that the coating of a specific area on the product to be coated is achieved; by replacing the baffle plate, the coating of other areas to be coated by adopting different coating processes can be realized, so that the coating process of different coating processes can be carried out on the complicated areas to be coated.
Furthermore, two threaded holes are symmetrically formed in the side wall of the clamping tool and are matched with the clamping screws respectively, so that the to-be-coated product is fixed in the circular through hole of the clamping tool. The product to be coated is fixed through the clamping screw, so that the product to be coated is more convenient to fix, and the upper surface and the lower surface of the product to be coated cannot be damaged.
Furthermore, the positioning pin nails are arranged in at least one group, each group of the positioning pin nails comprises even positioning pin nails, and the even positioning pin nails are symmetrically arranged on the clamping tool relative to the circular through hole. And a plurality of groups of positioning nails symmetrical to the clamping tool are adopted, so that the film coating holes in the baffle plate can be more accurately aligned with the to-be-coated area.
Furthermore, the tightening screws are provided with at least one group, each group comprises an even number of tightening screws, and the even number of tightening screws are symmetrically arranged on the clamping tool relative to the circular through holes. The multiple groups of tightening screws are mutually matched, so that the baffle plate is more attached to the surface of the clamping tool, and the film floating in the film coating process is prevented from influencing the film coating effect.
Furthermore, the upper end face and/or the lower end face of the clamping tool are/is provided with two positioning pin nails and two fastening screws, the two positioning pin nails and the two fastening screws are located on the diameter extension line of the circular through hole, and the diameter extension lines where the two positioning pin nails and the two fastening screws are located are perpendicular to each other.
Furthermore, a stop hole is formed in the side face of the clamping tool close to the positioning pin nail, a stop screw is detachably connected to the stop hole, and the stop screw is used for preventing the positioning pin nail from falling off and loosening. And displacement deviation between the area to be coated and the coating hole caused by loosening of the positioning pin is prevented.
Furthermore, the edge of the film coating hole is provided with a 45-degree chamfered edge. The condition that the film floats is ensured not to occur when the workpiece rotates on the umbrella stand of the film plating machine in the film plating process.
According to another aspect of the present specification, there is provided a coating method for coating an upper surface or a lower surface of a product to be coated based on a divisional coating apparatus, including:
step 1: placing and fixing a product to be coated in the circular through hole, wherein the upper surface of the product to be coated is provided with at least two areas to be coated;
and 2, step: a baffle plate provided with a film coating hole matched with one of the shapes and positions of the areas to be coated on the upper surface of the product to be coated penetrates through a positioning pin on the surface of the clamping tool, and the baffle plate is fixed on the surface of the clamping tool through a fastening screw on the surface of the clamping tool;
and 3, step 3: evaporating the baffle plate by using an ion sputtering coating machine to complete coating of a to-be-coated area on the upper surface of a to-be-coated product;
and 4, step 4: taking down the baffle fixed on the clamping tool, and repeating the step 2 to complete the film coating of the other area to be coated;
and 5: and (4) repeating the step (4) until all the areas to be coated are coated.
In the technical scheme, a product to be coated is fixed on a clamping tool, a baffle plate with the same shape and position as an area to be coated is connected to the clamping tool, when an ion sputtering coating machine carries out evaporation coating on the baffle plate, the baffle plate blocks gaseous film materials in a non-coating area, and the gaseous film materials in the area to be coated pass through a coating hole, so that the coating of the area to be coated is realized; and replacing the baffle plate with different film coating holes, and coating the film on the product to be coated again, thereby realizing the film coating process on different areas to be coated.
According to another aspect of the present specification, there is provided a method for coating an upper surface and a lower surface of a product to be coated based on a divisional coating apparatus, comprising:
step 1: placing and fixing a product to be coated in the circular through hole, wherein the upper surface and the lower surface of the product to be coated are provided with at least two areas to be coated;
step 2: a baffle plate provided with a film coating hole matched with the shape and position of a region to be coated on the upper surface penetrates through the upper surface of the clamping tool to position a pin nail, and the baffle plate is fixed on the upper surface of the clamping tool through a fastening screw on the upper surface of the clamping tool; a baffle plate provided with a film coating hole matched with the shape and position of a region to be coated on the lower surface penetrates through the lower surface of the clamping tool to position a pin nail, and the baffle plate is fixed on the surface of the clamping tool through a fastening screw on the lower surface of the clamping tool;
and step 3: evaporating the upper surface baffle plate by using an ion sputtering coating machine;
and 4, step 4: turning the device for zone coating by 180 degrees, and evaporating the baffle plate connected with the lower surface by using an ion sputtering coating machine;
and 5: taking down the baffles fixed on the upper surface and the lower surface, enabling the baffle provided with a film coating hole matched with the shape and the position of the other to-be-coated area on the upper surface to penetrate through the upper surface of the clamping tool to position the pin nail, and fixing the baffle on the upper surface of the clamping tool through a set screw on the upper surface of the clamping tool; a baffle plate provided with a film coating hole matched with the other to-be-coated area of the lower surface in shape and position penetrates through the lower surface positioning pin nail of the clamping tool, and the baffle plate is fixed on the surface of the clamping tool through a fastening screw on the lower surface of the clamping tool;
and 6: repeating the step 3 and the step 4 to finish the film coating of the other film coating area to be coated on the upper surface and the lower surface of the product to be coated;
and 7: and (5) repeating the step (5) and the step (6) until the coating of all the areas to be coated is finished.
In the technical scheme, baffles are fixed on the upper surface and the lower surface of the clamping tool, after the upper surface of a product to be coated is coated by using an ion sputtering coating machine, the clamping tool is turned over, and the lower surface of the product to be coated is coated by using the ion sputtering coating machine; and replacing the baffles on the upper surface and the lower surface of the clamping tool, and repeating the operation to finish the coating process of each area to be coated on the upper surface and the lower surface of the product to be coated. The operation is simple, and the film coating effect is better.
Compared with the prior art, the invention has the beneficial effects that:
(1) according to the device for coating the film in the subareas, the product to be coated is fixed through the clamping tool, and the baffle plate provided with the film coating hole is connected to the clamping tool through the positioning pin nail and the fastening screw according to requirements, so that the film coating is fixed in the appointed film coating area of the lens in the film coating process, and the film coating area is ensured not to be overlapped in the product immobilizing process; the baffle plate is evaporated by an ion sputtering coating machine, so that the coating of a specific area on a product to be coated is achieved; the device provided by the invention is convenient to clamp, and the product can complete all film coating of two surfaces only by one-time clamping without repeatedly disassembling and turning over to load the film coating, and only the film coating baffle needs to be replaced.
(2) The edge of the film coating hole of the baffle plate is provided with a 45-degree chamfered edge, so that the rotation of the umbrella blade in the film coating process can not block the condition of film floating at the edge.
(3) The four corners of the baffle are respectively provided with a positioning pin and a fastening screw, so that the baffle is ensured not to have position deviation in the process of switching the baffle, and the baffle can be firmly fixed on the tool clamp.
(4) The invention provides a film coating method, wherein a product to be coated is fixed on a clamping tool, a baffle plate with the same shape and position as an area to be coated is connected on the clamping tool, when an ion sputtering film coating machine carries out evaporation coating on the baffle plate, the baffle plate blocks a gaseous film material in a non-film coating area, and the gaseous film material in the area to be coated passes through a film coating hole, so that the film coating of the area to be coated is realized; the baffle plates are replaced to realize the film coating of different areas to be coated, the operation is convenient, and the film coating of different modes can be carried out on different areas to be coated on one side and/or two sides of a product to be coated.
Drawings
FIG. 1 is a schematic view of an apparatus for zone coating according to an embodiment of the present invention (single-sided double baffle);
FIG. 2 is a schematic view of an apparatus for zone coating according to an embodiment of the present invention (double-sided single baffle);
FIG. 3 is a schematic view of an apparatus for zone coating according to an embodiment of the present invention (double-sided double-baffle);
FIG. 4 is a process flow diagram of a single-sided coating method according to an embodiment of the invention;
FIG. 5 shows the shape and position of the area to be coated on the upper surface of the product to be coated according to the embodiment of the present invention;
FIG. 6 is a process flow diagram of a double-sided coating method according to an embodiment of the invention;
fig. 7 shows the shape and position of the coating areas on the upper and lower surfaces of the product to be coated according to the embodiment of the invention.
In the figure: 1. a clamping tool; 2. a first baffle plate; 3. a second baffle plate; 4. a third baffle plate; 5. a fourth baffle plate; 6. positioning a pin nail; 7. tightening the screw; 8. a stop hole; 9. positioning holes; 10. a tightening hole; 11. a threaded bore.
Detailed Description
The technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings, and it is to be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like, indicate orientations and positional relationships based on those shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be considered as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Example 1
As shown in fig. 1, the present embodiment provides a device for coating two to-be-coated film regions on one surface of a to-be-coated product in a partitioned manner, which includes a clamping tool 1 and two baffles, wherein the clamping tool 1 is made of 304 stainless steel, and can effectively prevent the clamping tool 1 from being deformed and being heated to expand during a coating process, which is caused by high temperature, and the to-be-coated product is jammed and broken. A circular through hole is formed in the clamping tool 1 and used for fixing a product to be coated; two threaded holes 11 symmetrical to the circular through hole are formed in the side edge of the clamping tool 1, the threaded holes 11 are detachably connected with clamping screws, and one ends, close to the circular through hole, of the clamping screws are used for clamping the side edge of a product to be coated.
The upper surface of the clamping tool 1 is provided with two positioning pins 6 which are symmetrical to the circular through hole, the upper surface is provided with two tightening screws 7 which are symmetrical to the circular through hole, and the connecting line of the two positioning pins 6 is perpendicular to the connecting line of the two tightening screws 7. The side surface of the clamping tool 1 close to the positioning pin nail 6 is provided with a stop hole 8, the stop hole 8 is detachably connected with a stop screw, and the stop screw is used for preventing the positioning pin nail 6 from falling off and loosening, so that the displacement deviation between a film coating area and a film coating hole caused by the loosening of the positioning pin nail 6 is avoided.
Two baffles are made of hard aluminum alloy, the hard aluminum alloy is light in weight and convenient to mount and dismount, the areas which do not need to be coated with films can be better conveniently blocked, the edges of the baffles are subjected to deburring treatment, the areas coated with films are neat, and the condition of film shortage is avoided.
The two baffles are respectively a first baffle 2 and a second baffle 3, the first baffle 2 is provided with film coating holes matched with the shape and the position of the film area to be coated 1 (shown in figure 5), and the second baffle 3 is provided with film coating holes matched with the shape and the position of the film area to be coated 2 (shown in figure 5); the edge of the film coating hole is provided with a 45-degree chamfered edge, so that the film floating condition is avoided when a workpiece rotates on an umbrella stand of a film coating machine in the film coating process.
The first baffle 2 and the second baffle 3 are provided with positioning holes 9 matched with the two positioning pins 6, and the first baffle 2 and the second baffle 3 are provided with fastening holes 10 matched with the two fastening screws 7.
Example 2
As shown in fig. 2, the present embodiment provides a device for performing a film coating on to-be-coated areas on an upper surface and a lower surface of a to-be-coated product at a time, and the device includes a clamping tool 1 and two baffles, different from embodiment 1, in this embodiment, two positioning pins 6 symmetrical to a circular through hole are disposed on both the upper surface and the lower surface of the clamping tool, two tightening screws 7 symmetrical to the circular through hole are disposed on both the upper surface and the lower surface, and a connection line of the two positioning pins 6 on the same surface is perpendicular to a connection line of the two tightening screws 7.
Different from the embodiment 1, the two blocking plates in the embodiment are a first blocking plate 2 and a third blocking plate 4, respectively, the first blocking plate 2 is provided with film coating holes adapted to the shape and position of the to-be-coated film region 1 (as shown in fig. 5), and the third blocking plate 4 is provided with film coating holes adapted to the shape and position of the to-be-coated film region 3 (as shown in fig. 7).
Example 3
As shown in fig. 3, this embodiment provides a device for partitioned coating, which is different from embodiment 2, in that the device for partitioned coating in this embodiment includes a clamping tool 1 and four baffles, the four baffles are a first baffle 2, a second baffle 3, a third baffle 4 and a fourth baffle 5, respectively, the first baffle 2 is provided with coating holes adapted to the shape and position of a to-be-coated film region 1 (shown in fig. 7), the second baffle 3 is provided with coating holes adapted to the shape and position of the to-be-coated film region 2 (shown in fig. 7), the third baffle 4 is provided with coating holes adapted to the shape and position of the to-be-coated film region 3 (shown in fig. 7), and the fourth baffle 5 is provided with coating holes adapted to the shape and position of the to-be-coated film region 4 (shown in fig. 7); the edge of the film coating hole is provided with a 45-degree chamfered edge, so that the film floating condition is avoided when a workpiece rotates on an umbrella stand of a film coating machine in the film coating process.
Example 4
As shown in fig. 2, this embodiment provides a coating method for coating an upper surface of a product to be coated based on the device for zone coating in embodiment 1, and the method includes the following specific steps:
step 1: placing and fixing a product to be coated in the circular through hole, wherein two areas to be coated are arranged on the upper surface of the product to be coated (as shown in fig. 3);
step 2: a first baffle plate 2 provided with coating holes matched with the shape and position of a to-be-coated area 1 penetrates through a positioning pin 6 on the upper surface of a clamping tool 1, and the first baffle plate 2 is fixed on the upper surface of the clamping tool 1 through a fastening screw 7 on the upper surface of the clamping tool 1;
and step 3: the method comprises the following steps of (1) carrying out evaporation plating of a nano metal film of metal germanium on a first baffle plate 2 by using an ion sputtering film plating machine to finish film plating of a film to be plated region 1 of a product to be plated;
and 4, step 4: taking down the first baffle plate 2 fixed on the clamping tool 1, enabling the second baffle plate 3 provided with coating holes matched with the shape and position of the area 2 to be coated to penetrate through a positioning pin 6 on the surface of the clamping tool 1, and fixing the second baffle plate 3 on the surface of the clamping tool 1 through a fastening screw 7 on the surface of the clamping tool 1; and (3) performing evaporation coating of the light splitting film on the second baffle 3 by using an ion sputtering film coating machine to complete film coating of the film coating area 2 of the product to be coated.
Example 5
As shown in fig. 4, this embodiment provides a coating method for coating an upper surface and a lower surface of a product to be coated based on the device for zone coating in embodiment 1, and the method includes the following specific steps:
step 1: placing and fixing a product to be coated in the circular through hole, wherein two areas to be coated are arranged on the upper surface and the lower surface of the product to be coated (as shown in fig. 7);
step 2: a first baffle plate 2 provided with coating holes matched with the shape and position of a coating area 1 on the upper surface of a product to be coated penetrates through a positioning pin 6 on the upper surface of a clamping tool 1, and the first baffle plate 2 is fixed on the upper surface of the clamping tool 1 through a fastening screw 7 on the upper surface of the clamping tool 1; penetrating a third baffle 4 provided with coating holes matched with the shape and position of a coating area 3 on the lower surface of a product to be coated through a positioning pin 6 on the lower surface of the clamping tool 1, and fixing the baffle on the surface of the clamping tool 1 through a fastening screw 7 on the lower surface of the clamping tool 1;
and step 3: the method comprises the following steps of (1) carrying out evaporation coating of a nano metal film of metal germanium on a first baffle plate 2 connected with the upper surface of a clamping tool 1 by using an ion sputtering film coating machine to finish film coating of a region to be coated 3;
and 4, step 4: turning the clamping tool 1 for 180 degrees, and performing evaporation plating of a nano metal film of metal germanium on a third baffle plate 4 connected with the lower surface of the clamping tool 1 by using an ion sputtering film plating machine;
and 5: taking down the first baffle plate 2 and the third baffle plate 4, enabling the second baffle plate 3 provided with coating holes matched with the shapes and positions of the areas to be coated 2 to penetrate through the upper surface of the clamping tool 1 to position pins 6, and fixing the baffle plates on the upper surface of the clamping tool 1 through fastening screws 7 on the upper surface of the clamping tool 1; a fourth baffle 5 provided with a film coating hole matched with the shape and position of the film coating area 4 to be coated penetrates through a positioning pin 6 on the lower surface of the clamping tool 1, and the baffle is fixed on the lower surface of the clamping tool 1 through a fastening screw 7 on the lower surface of the clamping tool 1;
step 6: the ion sputtering film plating machine is used for evaporating a spectroscopic film on the second baffle plate 3 connected with the upper surface of the clamping tool 1 to complete the film plating of the region to be plated 2; and (3) turning the clamping tool 1 for 180 degrees, and performing spectral film evaporation on a fourth baffle 5 connected with the lower surface of the clamping tool 1 by using an ion sputtering film plating machine to finish the film plating of the region to be plated 4.
In the description herein, references to the description of the terms "one embodiment," "certain embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions deviate from the technical solutions of the embodiments of the present invention.
Claims (9)
1. The device for coating the film in the subareas is characterized by comprising a clamping tool and at least two baffles; a circular through hole is formed in the clamping tool, and a product to be coated is fixed in the circular through hole; the upper surface and/or the lower surface of the clamping tool are/is provided with positioning pins for positioning the clamping tool and any baffle plate; the upper surface and/or the lower surface of the clamping tool is/are provided with a set screw for fixing the clamping tool and any baffle plate; a positioning hole matched with the positioning pin nail and a fastening hole matched with the fastening screw are formed in each baffle plate; each baffle is provided with a film coating hole, each film coating hole corresponds to a film coating subarea of a product to be coated, and all the film coating subareas are spliced to form the whole film coating area of the product to be coated.
2. The device for coating film in different areas according to claim 1, wherein the side wall of the clamping tool is symmetrically provided with two threaded holes, and the two threaded holes are respectively matched with the clamping screws for fixing the product to be coated in the circular through hole of the clamping tool.
3. The device for zone coating according to claim 1, wherein at least one set of the positioning pins is provided, each set comprises an even number of positioning pins, and the even number of positioning pins are symmetrically arranged on the clamping tool relative to the circular through hole.
4. The device for partition coating according to claim 1, wherein the set screws are provided in at least one group, each group comprises an even number of set screws, and the even number of set screws are symmetrically arranged on the clamping tool relative to the circular through hole.
5. The device for zone coating according to claim 1, wherein the upper end surface and/or the lower end surface of the clamping tool are provided with two positioning pins and two fastening screws, the two positioning pins and the two fastening screws are located on the diameter extension line of the circular through hole, and the diameter extension lines of the two positioning pins and the two fastening screws are perpendicular to each other.
6. The device for zone coating according to claim 1, wherein a stop hole is formed in the side surface of the clamping tool near the positioning pin, a stop screw is detachably connected to the stop hole, and the stop screw is used for preventing the positioning pin from falling off and loosening.
7. The apparatus of claim 1, wherein the coating hole edge is provided with 45 ° chamfered edge.
8. A coating method, based on any one of claims 1 to 7, of a device for zone coating, for coating the upper or lower surface of a product to be coated, comprising:
step 1: placing and fixing a product to be coated in the circular through hole, wherein the upper surface of the product to be coated is provided with at least two areas to be coated;
and 2, step: a baffle plate provided with a film coating hole matched with one of the shapes and positions of the areas to be coated on the upper surface of the product to be coated penetrates through a positioning pin on the surface of the clamping tool, and the baffle plate is fixed on the surface of the clamping tool through a fastening screw on the surface of the clamping tool;
and step 3: evaporating the baffle plate by using an ion sputtering coating machine to complete coating of a to-be-coated area on the upper surface of a to-be-coated product;
and 4, step 4: taking down the baffle fixed on the clamping tool, and repeating the step 2 to finish the film coating of the other area to be coated;
and 5: and (4) repeating the step (4) until all the areas to be coated are coated.
9. A coating method, based on any one of claims 1 to 7, of a device for zone coating, for coating the upper and lower surfaces of a product to be coated, comprising:
step 1: placing and fixing a product to be coated in the circular through hole, wherein the upper surface and the lower surface of the product to be coated are provided with at least two areas to be coated;
step 2: a baffle plate provided with a film coating hole matched with the shape and position of a region to be coated on the upper surface penetrates through the upper surface of the clamping tool to position a pin nail, and the baffle plate is fixed on the upper surface of the clamping tool through a fastening screw on the upper surface of the clamping tool; a baffle plate provided with a film coating hole matched with the shape and position of a region to be coated on the lower surface penetrates through the lower surface of the clamping tool to position a pin nail, and the baffle plate is fixed on the surface of the clamping tool through a fastening screw on the lower surface of the clamping tool;
and step 3: evaporating the upper surface baffle plate by using an ion sputtering coating machine;
and 4, step 4: turning the device for zone coating by 180 degrees, and evaporating the baffle plate connected with the lower surface by using an ion sputtering coating machine;
and 5: taking down the baffles fixed on the upper surface and the lower surface, enabling the baffle provided with a film coating hole matched with the shape and the position of the other to-be-coated area on the upper surface to penetrate through the upper surface of the clamping tool to position the pin nail, and fixing the baffle on the upper surface of the clamping tool through a set screw on the upper surface of the clamping tool; penetrating a baffle plate provided with a film coating hole matched with the shape and position of the other to-be-coated area on the lower surface through the lower surface of the clamping tool to position a pin nail, and fixing the baffle plate on the surface of the clamping tool through a fastening screw on the lower surface of the clamping tool;
step 6: repeating the step 3 and the step 4 to finish the film coating of the other film coating area to be coated on the upper surface and the lower surface of the product to be coated;
and 7: and (5) repeating the step (5) and the step (6) until the coating of all the areas to be coated is finished.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210078818.XA CN114606463A (en) | 2022-01-24 | 2022-01-24 | Device and method for zone coating |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210078818.XA CN114606463A (en) | 2022-01-24 | 2022-01-24 | Device and method for zone coating |
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| CN114606463A true CN114606463A (en) | 2022-06-10 |
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| CN202210078818.XA Pending CN114606463A (en) | 2022-01-24 | 2022-01-24 | Device and method for zone coating |
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| CN206970703U (en) * | 2017-06-19 | 2018-02-06 | 苏州求是真空电子有限公司 | A kind of mask clamping fixture for gas phase double-sided deposition plated film |
| CN110699671A (en) * | 2019-10-21 | 2020-01-17 | 江苏菲沃泰纳米科技有限公司 | Coating clamp and application thereof |
| CN211376327U (en) * | 2020-03-19 | 2020-08-28 | 中国振华集团云科电子有限公司 | Product double-sided film forming clamp |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20140051038A (en) * | 2012-10-22 | 2014-04-30 | (주) 세이텍 | Jig for flexible printed circuit board used for plasma sputtering |
| CN105018884A (en) * | 2015-07-30 | 2015-11-04 | 苏州方昇光电装备技术有限公司 | Small vacuum evaporation instrument |
| CN107119254A (en) * | 2017-06-19 | 2017-09-01 | 苏州求是真空电子有限公司 | A kind of mask clamping fixture for gas phase double-sided deposition plated film |
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