CN206970703U - A kind of mask clamping fixture for gas phase double-sided deposition plated film - Google Patents
A kind of mask clamping fixture for gas phase double-sided deposition plated film Download PDFInfo
- Publication number
- CN206970703U CN206970703U CN201720709556.7U CN201720709556U CN206970703U CN 206970703 U CN206970703 U CN 206970703U CN 201720709556 U CN201720709556 U CN 201720709556U CN 206970703 U CN206970703 U CN 206970703U
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- mask
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- plated film
- plate
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Abstract
The utility model discloses a kind of mask clamping fixture for gas phase double-sided deposition plated film, including upper mask plate, Sample location plate and lower mask plate；Upper mask plate is provided with upper mask openings, the first fastener hole；Lower mask plate is provided with lower mask openings, locating slot, flexure strip, mask piece and the second fastener hole；Lower mask openings connect with locating slot；Flexure strip and mask piece are sequentially located in locating slot；Sample location plate is provided with sample fixing hole, the 3rd fastener hole；Sample fixing hole is located at the top of corresponding locating slot below corresponding upper mask openings；Second fastener hole corresponding on 3rd fastener hole the first fastener hole corresponding with upper mask plate and lower mask plate is coaxially disposed.The utility model can realize all samples up and down two need edge of the coated surface respectively with the second through hole on upper mask openings edge and mask piece to be close to, to prevent that deposited particles are into the coverage part for not needing plated film in vapor deposition processes, so as to improve the quality of coated product.
Description
Technical field
The utility model is specifically related to a kind of mask clamping fixture for gas phase double-sided deposition plated film.
Background technology
Gas phase deposition technology includes physical gas phase deposition technology and chemical vapour deposition technique, for requiring to produce special form
Masking process is typically used during the plated film film layer of shape.Conventional mask clamping fixture is formed by upper and lower two layers mostly, but due to plated film sample
Product thickness is often different, so as to which the situation that sample can not clamp often occur.Plated film and non-plated are being required to sample surfaces
Film edge clearly in the case of, certain use limitation be present in the mask clamping fixture of upper and lower two layers of composition.In order to solve sample thickness
Degree difference causes the problem of poorly sealed, and notification number is CN204125521U Chinese utility model patent and Publication No.
CN105908124A Chinese utility model patent each proposes the mask of the gas-phase deposition for overcoming problem above
Fixture, but both the above structure can not all realize double-sided coating of the sample in same period, especially for stress in thin film
The defects of fatal be present in sensitive sample.
Utility model content
In view of the above-mentioned problems, the utility model proposes a kind of mask clamping fixture for gas phase double-sided deposition plated film, can be with low
Into it is local realize all samples up and down two need upper mask openings edge and mask piece of the coated surface respectively with upper mask plate
The edge of upper second through hole is close to, and the coverage part of plated film is not needed to prevent deposited particles in vapor deposition processes from entering, from
And improve the quality of coated product.
Above-mentioned technical purpose is realized, reaches above-mentioned technique effect, the utility model is achieved through the following technical solutions：
A kind of mask clamping fixture for gas phase double-sided deposition plated film, including upper mask plate, the sample being sequentially arranged from top to bottom
Product location-plate and lower mask plate；
The upper mask plate is provided with upper mask openings, the first fastener hole；
The lower mask plate is provided with lower mask openings, locating slot, flexure strip, mask piece and the second fastener hole；Under described
Mask openings connect with locating slot, are coaxially disposed positioned at the lower section of locating slot, and with locating slot；Flexure strip and the mask piece from
Under it is supreme sequentially in the locating slot, the lateral wall of the two is close to the madial wall of locating slot；
The Sample location plate is provided with sample fixing hole, the 3rd fastener hole；The sample fixing hole is located at upper mask plate
Corresponding to upper below upper mask openings, while positioned at the top of corresponding locating slot on lower mask plate, three is coaxially disposed, described
The cross sectional dimensions of sample fixing hole is more than the cross sectional dimensions of corresponding upper mask openings, and less than locating slot on corresponding lower mask
Cross sectional dimensions；Second corresponding on 3rd fastener hole, first fastener hole corresponding with upper mask plate and lower mask plate
Fastener hole is coaxially disposed, and the cross sectional dimensions of three is identical.
Further, first through hole and the second through hole, the first through hole are respectively equipped with flexure strip and the mask piece
Cross sectional dimensions is more than or equal to the cross sectional dimensions of the second through hole；Plated under the shape of cross section and sample of second through hole
Plated film shape needed for film surface is identical.
Further, the cross sectional dimensions of second through hole is less than or equal to the cross sectional dimensions of lower mask openings.
Further, the flexure strip is wavy shaped configuration.
Further, the shape of cross section of the upper mask openings is identical with the plated film shape needed for coated surface on sample.
Further, the upper mask openings, first through hole and the second through hole are circle.
Further, the sample fixing hole is cylindrical hole, for localizing sample.
Further, the bottom wall of the roof of the mask piece and sample fixing hole is in same plane.
Further, the 4th fastener hole and the 5th fastener hole are further respectively had on the Sample location plate and lower mask plate,
4th fastener hole and the 5th fastener hole are coaxially disposed, and the cross sectional dimensions of the two is identical.
Further, corresponding opening position is respectively provided with the upper mask plate, Sample location plate and lower mask plate
The first positioning hole, the second positioning hole and the 3rd positioning hole, the three for coordinating positioning to use are coaxially disposed, and cross sectional dimensions phase
Together.
The beneficial effects of the utility model：
The utility model proposes a kind of mask clamping fixture for gas phase double-sided deposition plated film, the mask clamping fixture passes through in sample
Flexure strip and mask piece are set between location-plate and lower mask plate, apply elastic force to mask piece using flexure strip, even if sample is thick
Spend uniformity it is poor, can also realize all samples up and down two need upper mask openings side of the coated surface respectively with upper mask plate
The edge of the second through hole is close on edge and mask piece, so as to prevent that deposited particles entrance does not need plated film in vapor deposition processes
Part is covered, so as to improve the quality of coated product.
Brief description of the drawings
Fig. 1 is a kind of structural representation of embodiment of the utility model；
Fig. 2 be a kind of embodiment of the present utility model comprising upper mask openings, Sample location hole, lower mask openings, cover
The schematic cross-section of diaphragm and flexure strip；
In figure：The upper mask plates of 100-；The upper mask plate perforates of 101-, 102 be the first fastener hole, and 103 be the first positioning hole,
200 be Sample location plate, and 201 be Sample location hole, and 202 be the second fastener hole, and 203 be the second positioning hole, and 204 be the 4th fastening
Hole, 300 be lower mask plate, and 301 be lower mask openings, and 302 be the 3rd fastener hole, and 303 be the 3rd positioning hole, and 304 be the 5th tight
Solid hole, 305 be locating slot, and 3011 be mask piece, and 3012 be flexure strip.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, with reference to embodiments, to this
Utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining this practicality
It is new, it is not used to limit the utility model.
Application principle of the present utility model is explained in detail below in conjunction with the accompanying drawings.
As shown in Figure 1-2, a kind of mask clamping fixture for gas phase double-sided deposition plated film, including be sequentially arranged from top to bottom
Upper mask plate 100, Sample location plate 200 and lower mask plate 300；
The upper mask plate 100 is provided with upper mask openings 101, the first fastener hole 102；Wherein, the upper mask openings
101 shape of cross section is identical with the plated film shape needed for coated surface on sample；
The lower mask plate 300 is provided with lower mask openings 301, locating slot 305, flexure strip 3012, the and of mask piece 3011
Second fastener hole 202；The lower mask openings 301 connect with locating slot 305, positioned at the lower section of locating slot 305, and and locating slot
305 are coaxially disposed；The flexure strip 3012 and mask piece 3011 are sequentially located in locating slot 305 from bottom to up, the outside of the two
Wall is close to the madial wall of locating slot 305；Preferably, the flexure strip 3012 is wavy shaped configuration or spring structure, for
Mask piece applies elastic force；The roof of the mask piece 3011 is in same plane with the bottom wall of sample fixing hole 201, or slightly higher
In the bottom wall of sample fixing hole 201, the sample for be located in Sample location hole 201 using the elasticity of flexure strip 3012 is with above covering
The edge of film perforate 101 is close to, and so as to solve the problems, such as that it is poorly sealed that thickness of sample difference causes, prevents vapor deposition processes
Middle deposited particles enter the coverage part for not needing plated film.
The Sample location plate 200 is provided with sample fixing hole 201, the 3rd fastener hole 302；The sample fixing hole 201
The corresponding upper lower section of mask openings 101 on upper mask plate 100, while positioned at corresponding locating slot 305 on lower mask plate 300
Top, three is coaxially disposed, and the cross sectional dimensions of the sample fixing hole 201 is more than the transversal of corresponding upper mask openings 101
Face size, and less than the cross sectional dimensions of locating slot 305 on corresponding lower mask；3rd fastener hole 302 and upper mask plate 100
Second fastener hole 202 corresponding on first fastener hole 102 corresponding to upper and lower mask plate 300 is coaxially disposed, and three's is transversal
Face size is identical.
In a kind of embodiment of the utility model embodiment, set respectively on the flexure strip 3012 and mask piece 3011
There are first through hole and the second through hole, the first through hole cross sectional dimensions is more than or equal to the cross sectional dimensions of the second through hole；
The shape of cross section of second through hole is identical with the plated film shape needed for coated surface under sample；Preferably, second through hole
Cross sectional dimensions be less than or equal to lower mask openings 301 cross sectional dimensions；
Plated film above and below the sample needed for coated surface is shaped as circle, and when product is cylindrical product, the upper mask
Perforate 101, first through hole, the second through hole and sample fixing hole 201 are cylindrical hole.In other embodiment of the present utility model
In, upper mask openings 101, first through hole, the second through hole and the sample fixing hole 201 can also be other shapes, specifically by
The shape of plated film shape and product in itself on sample needed for coated surface determines.
Embodiment two
In order to strengthen fixing and be easy to actual assembling process, the present embodiment and the difference of embodiment one are：The sample
The 4th fastener hole 204 and the 5th fastener hole 304, the 4th fastening are further respectively had on product location-plate 200 and lower mask plate 300
The fastener hole 304 of hole 204 and the 5th is coaxially disposed, and the cross sectional dimensions of the two is identical.
Preferably, the first described fastener hole 102, the second fastener hole 202, the 3rd fastener hole 302, the 4th fastener hole 204,
5th fastener hole 304 is respectively arranged on the surrounding of mask plate 100, Sample location plate 200 and lower mask plate 300, particular number root
Set according to being actually needed.
Embodiment three
In order to improve assembly precision, save installation time, the present embodiment and the difference of embodiment one or embodiment two exist
In：It is fixed to be respectively provided with cooperation for corresponding opening position on the upper mask plate 100, Sample location plate 200 and lower mask plate 300
The first positioning hole 103, the second positioning hole 203 and the 3rd positioning hole 303, the three that position uses are coaxially disposed, and cross sectional dimensions
It is identical.
Preferably, first positioning hole 103, the second positioning hole 203 and the 3rd positioning hole 303 are respectively arranged on mask plate
100th, the end of Sample location plate 200 and lower mask plate 300, particular number according to be actually needed setting.
Mask clamping fixture of the present utility model actual use when installation process be：
S1：Sample location plate and lower mask plate are assembled, is specially：Flexure strip and mask piece are sequentially placed into lower mask first
In the locating slot of plate, then the 3rd positioning hole on the second positioning hole on Sample location plate and lower mask plate is realized to it
The alignment of Sample location plate is placed on lower mask plate, and locked the 4th fastener hole and the 5th fastener hole using sunk screw,
Sample location plate is fixed on lower mask plate by realization；
S2：Sample and upper mask plate are assembled, is specially：Sample sample being put on the Sample location plate locked is consolidated
Determine in hole, then the first positioning hole on upper mask plate aligns with the second positioning hole on Sample location plate again, realization will be upper
Mask plate alignment is placed on Sample location plate, is finally locked the first fastener hole, the second fastener hole and the 3rd fastener hole with screw
Tightly, the final mask clamping fixture for gas phase double-sided deposition plated film is obtained.
In this way, even if thickness of sample uniformity is poor, can also make all samples upper and lower surface be close to mask plate and
Lower mask plate, so as to prevent that deposited particles are into the coverage part for not needing plated film in vapor deposition processes, so as to improve plated film
The quality of product.
In summary：
The utility model proposes a kind of mask clamping fixture for gas phase double-sided deposition plated film, the mask clamping fixture passes through in sample
Flexure strip and mask piece are set between location-plate and lower mask plate, apply elastic force to mask piece using flexure strip, even if sample is thick
Spend uniformity it is poor, can also realize all samples up and down two need upper mask openings side of the coated surface respectively with upper mask plate
The edge of the second through hole is close on edge and mask piece, so as to prevent that deposited particles entrance does not need plated film in vapor deposition processes
Part is covered, so as to improve the quality of coated product.
The advantages of general principle and principal character of the present utility model and the utility model has been shown and described above.One's own profession
The technical staff of industry is it should be appreciated that the utility model is not restricted to the described embodiments, described in above-described embodiment and specification
Simply illustrate principle of the present utility model, on the premise of the spirit and scope of the utility model is not departed from, the utility model is also
Various changes and modifications are had, these changes and improvements are both fallen within claimed the scope of the utility model.The utility model
Claimed scope is by appended claims and its equivalent thereof.
Claims (10)
- A kind of 1. mask clamping fixture for gas phase double-sided deposition plated film, it is characterised in that：It is upper including what is be sequentially arranged from top to bottom Mask plate, Sample location plate and lower mask plate；The upper mask plate is provided with upper mask openings, the first fastener hole；The lower mask plate is provided with lower mask openings, locating slot, flexure strip, mask piece and the second fastener hole；The lower mask Perforate connects with locating slot, is coaxially disposed positioned at the lower section of locating slot, and with locating slot；Flexure strip and the mask piece from it is lower to On sequentially in the locating slot, the lateral wall of the two is close to the madial wall of locating slot；The Sample location plate is provided with sample fixing hole, the 3rd fastener hole；The sample fixing hole is right on upper mask plate Below the upper mask openings answered, while it is coaxially disposed positioned at the top of corresponding locating slot on lower mask plate, three, the sample The cross sectional dimensions of fixing hole is more than the cross sectional dimensions of corresponding upper mask openings, and less than the horizontal stroke of locating slot on corresponding lower mask Sectional dimension；Second fastening corresponding on 3rd fastener hole, first fastener hole corresponding with upper mask plate and lower mask plate Hole is coaxially disposed, and the cross sectional dimensions of three is identical.
- A kind of 2. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：The bullet Property piece and mask piece on be respectively equipped with first through hole and the second through hole, the first through hole cross sectional dimensions is more than or equal to the The cross sectional dimensions of two through holes；The shape of cross section of second through hole is identical with the plated film shape needed for coated surface under sample.
- A kind of 3. mask clamping fixture for gas phase double-sided deposition plated film according to claim 2, it is characterised in that：Described The cross sectional dimensions of two through holes is less than or equal to the cross sectional dimensions of lower mask openings.
- A kind of 4. mask clamping fixture for gas phase double-sided deposition plated film according to claim 2, it is characterised in that：The bullet Property piece is wavy shaped configuration.
- A kind of 5. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：On described The shape of cross section of mask openings is identical with the plated film shape needed for coated surface on sample.
- A kind of 6. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：On described Mask openings, first through hole and the second through hole are circle.
- A kind of 7. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：The sample Product fixing hole is cylindrical hole, for localizing sample.
- A kind of 8. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：It is described to cover The roof of diaphragm is in same plane with the bottom wall of sample fixing hole.
- A kind of 9. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：The sample The 4th fastener hole and the 5th fastener hole, the 4th fastener hole and the 5th fastening are further respectively had on product location-plate and lower mask plate Hole is coaxially disposed, and the cross sectional dimensions of the two is identical.
- A kind of 10. mask clamping fixture for gas phase double-sided deposition plated film according to claim 1, it is characterised in that：It is described Corresponding opening position is respectively provided with the first positioning for coordinating positioning to use on upper mask plate, Sample location plate and lower mask plate Hole, the second positioning hole and the 3rd positioning hole, three are coaxially disposed, and cross sectional dimensions is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720709556.7U CN206970703U (en) | 2017-06-19 | 2017-06-19 | A kind of mask clamping fixture for gas phase double-sided deposition plated film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720709556.7U CN206970703U (en) | 2017-06-19 | 2017-06-19 | A kind of mask clamping fixture for gas phase double-sided deposition plated film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206970703U true CN206970703U (en) | 2018-02-06 |
Family
ID=61408395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720709556.7U Expired - Fee Related CN206970703U (en) | 2017-06-19 | 2017-06-19 | A kind of mask clamping fixture for gas phase double-sided deposition plated film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206970703U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114606463A (en) * | 2022-01-24 | 2022-06-10 | 武汉优光科技有限责任公司 | Device and method for zone coating |
-
2017
- 2017-06-19 CN CN201720709556.7U patent/CN206970703U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114606463A (en) * | 2022-01-24 | 2022-06-10 | 武汉优光科技有限责任公司 | Device and method for zone coating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180206 Termination date: 20200619 |